JPS5552621A - Vertical vibration-type piezo-vibrator - Google Patents
Vertical vibration-type piezo-vibratorInfo
- Publication number
- JPS5552621A JPS5552621A JP12490578A JP12490578A JPS5552621A JP S5552621 A JPS5552621 A JP S5552621A JP 12490578 A JP12490578 A JP 12490578A JP 12490578 A JP12490578 A JP 12490578A JP S5552621 A JPS5552621 A JP S5552621A
- Authority
- JP
- Japan
- Prior art keywords
- frame
- vibration
- vibrator
- buffer frame
- piezo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To enhance a Q value and facilitate a fixing work by forming a vibration piece, a buffer frame and a frame into one body by a piezo-electric wafer. CONSTITUTION:Vibration piece 4, buffer frame 6 and frame 8 are formed into one body with a piezo-electric wafer of a thickness of approximately 0.1mm by technique of photolithography, electron beam lithography or X-ray lithography. Vibrator 4 vibrates in the longer direction and resonates or reflects the leaked vibration dependent upon slippage between vibration node A-A' and center line B-B' of the vibration piece connection part by bending displacement of buffer frame 6b, thereby preventing energy leakage to frame 8. Then, the leaked vibeation dependent upon the vibration in the short-side direction orthogonal to the long-side direction is resonated or reflected by the bending displacement of buffer frame 6a, thereby preventing energy leakage.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12490578A JPS5552621A (en) | 1978-10-11 | 1978-10-11 | Vertical vibration-type piezo-vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12490578A JPS5552621A (en) | 1978-10-11 | 1978-10-11 | Vertical vibration-type piezo-vibrator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5552621A true JPS5552621A (en) | 1980-04-17 |
Family
ID=14897004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12490578A Pending JPS5552621A (en) | 1978-10-11 | 1978-10-11 | Vertical vibration-type piezo-vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5552621A (en) |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4469975A (en) * | 1982-01-07 | 1984-09-04 | Murata Manufacturing Co., Ltd. | Piezoelectric vibrator device including vibrator element and frame of unitary construction |
JPS6070810A (en) * | 1983-09-27 | 1985-04-22 | Matsushima Kogyo Co Ltd | Longitudinal vibration type piezoelectric vibrator |
US4608510A (en) * | 1981-01-15 | 1986-08-26 | Asulab S.A. - ESA 55 | Piezoelectric micro-resonateur |
EP0294090A2 (en) * | 1987-06-02 | 1988-12-07 | Seiko Electronic Components Ltd. | Longitudinal resonator |
JPS6416112A (en) * | 1987-07-10 | 1989-01-19 | Seiko Electronic Components | Longitudinal quartz oscillator |
EP0343000A2 (en) * | 1988-05-20 | 1989-11-23 | Seiko Electronic Components Ltd. | Length-extensional piezo-electric resonator |
EP0365268A2 (en) * | 1988-10-17 | 1990-04-25 | Seiko Electronic Components Ltd. | Length longitudinal resonator |
JPH02135907A (en) * | 1988-11-17 | 1990-05-24 | Seiko Electronic Components Ltd | Vertical crystal resonator |
US5001383A (en) * | 1988-09-09 | 1991-03-19 | Seiko Electronic Components Ltd. | Longitudinal quartz crystal resonator |
JPH03192912A (en) * | 1989-12-22 | 1991-08-22 | Seiko Electronic Components Ltd | Both end free type bending crystal resonator |
US5218260A (en) * | 1991-07-10 | 1993-06-08 | Seiko Electronic Components Ltd. | Longitudinal quartz crystal resonator |
US5311096A (en) * | 1991-01-25 | 1994-05-10 | Seiko Electronic Components Ltd. | KT cut width-extensional mode quartz crystal resonator |
US5541469A (en) * | 1993-04-14 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Resonator utilizing width expansion mode |
US5548179A (en) * | 1994-10-17 | 1996-08-20 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
US5621263A (en) * | 1993-08-09 | 1997-04-15 | Murata Manufacturing Co., Ltd. | Piezoelectric resonance component |
US5627425A (en) * | 1992-07-03 | 1997-05-06 | Murata Manufacturing Co., Ltd. | Vibrating unit |
US5635882A (en) * | 1993-08-17 | 1997-06-03 | Murata Manufacturing Co., Ltd. | Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator |
US5644274A (en) * | 1993-08-17 | 1997-07-01 | Murata Manufacturing Co., Ltd. | Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator |
US5701048A (en) * | 1993-05-31 | 1997-12-23 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
JP2013017103A (en) * | 2011-07-06 | 2013-01-24 | Nippon Dempa Kogyo Co Ltd | Crystal device |
CN107834991A (en) * | 2017-10-31 | 2018-03-23 | 中电科技集团重庆声光电有限公司 | A kind of quartz resonance sensitive chip |
-
1978
- 1978-10-11 JP JP12490578A patent/JPS5552621A/en active Pending
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4608510A (en) * | 1981-01-15 | 1986-08-26 | Asulab S.A. - ESA 55 | Piezoelectric micro-resonateur |
US4469975A (en) * | 1982-01-07 | 1984-09-04 | Murata Manufacturing Co., Ltd. | Piezoelectric vibrator device including vibrator element and frame of unitary construction |
JPS6070810A (en) * | 1983-09-27 | 1985-04-22 | Matsushima Kogyo Co Ltd | Longitudinal vibration type piezoelectric vibrator |
EP0294090A2 (en) * | 1987-06-02 | 1988-12-07 | Seiko Electronic Components Ltd. | Longitudinal resonator |
JPS6416112A (en) * | 1987-07-10 | 1989-01-19 | Seiko Electronic Components | Longitudinal quartz oscillator |
EP0343000A2 (en) * | 1988-05-20 | 1989-11-23 | Seiko Electronic Components Ltd. | Length-extensional piezo-electric resonator |
US5107164A (en) * | 1988-05-20 | 1992-04-21 | Seiko Electronic Components Ltd. | Length-extentional quartz resonator |
US5001383A (en) * | 1988-09-09 | 1991-03-19 | Seiko Electronic Components Ltd. | Longitudinal quartz crystal resonator |
EP0365268A2 (en) * | 1988-10-17 | 1990-04-25 | Seiko Electronic Components Ltd. | Length longitudinal resonator |
JPH02135907A (en) * | 1988-11-17 | 1990-05-24 | Seiko Electronic Components Ltd | Vertical crystal resonator |
JPH03192912A (en) * | 1989-12-22 | 1991-08-22 | Seiko Electronic Components Ltd | Both end free type bending crystal resonator |
US5311096A (en) * | 1991-01-25 | 1994-05-10 | Seiko Electronic Components Ltd. | KT cut width-extensional mode quartz crystal resonator |
US5218260A (en) * | 1991-07-10 | 1993-06-08 | Seiko Electronic Components Ltd. | Longitudinal quartz crystal resonator |
US5627425A (en) * | 1992-07-03 | 1997-05-06 | Murata Manufacturing Co., Ltd. | Vibrating unit |
US5541469A (en) * | 1993-04-14 | 1996-07-30 | Murata Manufacturing Co., Ltd. | Resonator utilizing width expansion mode |
US5701048A (en) * | 1993-05-31 | 1997-12-23 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
US5621263A (en) * | 1993-08-09 | 1997-04-15 | Murata Manufacturing Co., Ltd. | Piezoelectric resonance component |
US5644274A (en) * | 1993-08-17 | 1997-07-01 | Murata Manufacturing Co., Ltd. | Stacked piezoelectric resonator ladder-type filter with at least one bending mode resonator |
US5635882A (en) * | 1993-08-17 | 1997-06-03 | Murata Manufacturing Co., Ltd. | Laterally coupled piezo-resonator ladder-type filter with at least one bending mode piezo-resonator |
US5648746A (en) * | 1993-08-17 | 1997-07-15 | Murata Manufacturing Co., Ltd. | Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
US5684436A (en) * | 1993-08-17 | 1997-11-04 | Murata Manufacturing Co., Ltd. | Ladder-type filter with laterally coupled piezoelectric resonators |
US5689220A (en) * | 1993-08-17 | 1997-11-18 | Murata Manufacturing Co., Ltd. | Laterally coupled piezoelectric resonator ladder-type filter with at least one width expansion mode resonator |
US5696472A (en) * | 1993-08-17 | 1997-12-09 | Murata Manufacturing Co., Ltd. | Stacked ladder-type filter utilizing at least one shear mode piezoelectric resonator |
US5548179A (en) * | 1994-10-17 | 1996-08-20 | Murata Manufacturing Co., Ltd. | Chip-type piezoelectric resonance component |
JP2013017103A (en) * | 2011-07-06 | 2013-01-24 | Nippon Dempa Kogyo Co Ltd | Crystal device |
CN107834991A (en) * | 2017-10-31 | 2018-03-23 | 中电科技集团重庆声光电有限公司 | A kind of quartz resonance sensitive chip |
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