JPS5533679A - Measuring method of distance - Google Patents
Measuring method of distanceInfo
- Publication number
- JPS5533679A JPS5533679A JP10773478A JP10773478A JPS5533679A JP S5533679 A JPS5533679 A JP S5533679A JP 10773478 A JP10773478 A JP 10773478A JP 10773478 A JP10773478 A JP 10773478A JP S5533679 A JPS5533679 A JP S5533679A
- Authority
- JP
- Japan
- Prior art keywords
- grating
- distance
- moire fringe
- variation
- projected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
PURPOSE: To measure the dislocation distnace of an object from the moire fringe due to the interference betweeen the projected grating image, which is formed from a grating projecting portion upon the object to approach and leave the projecting portion, and another standard grating.
CONSTITUTION: By lighting a spot light source S, a projected image of a first grating G1 is formed through a projecting lens 3 upon the surface 0 of an object to be inspected. The projected grating image on the object surface 0 is focused through the lens 3 and a half mirror 2 upon a second grating G2 thereby to form a moire fringe. This fringe is varied with the roughness and distance K of the object 0. As a result, if the object is the same, the variation in the distance K corresponds to the variation in the moire fringe. This moire fringe is observed beofre and after the displacement of the object so that the displacement of K for the distance K of the object can be determined on accordance with the variation in the relative angle of the moire fringe or in the pitch.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10773478A JPS5533679A (en) | 1978-09-01 | 1978-09-01 | Measuring method of distance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10773478A JPS5533679A (en) | 1978-09-01 | 1978-09-01 | Measuring method of distance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5533679A true JPS5533679A (en) | 1980-03-08 |
Family
ID=14466586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10773478A Pending JPS5533679A (en) | 1978-09-01 | 1978-09-01 | Measuring method of distance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533679A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4560280A (en) * | 1982-08-31 | 1985-12-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures |
| WO1997037267A1 (en) * | 1996-04-03 | 1997-10-09 | Mrs Technology, Inc. | Lens focus shift sensor |
| EP1345084A1 (en) * | 2002-03-15 | 2003-09-17 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| EP1345082A1 (en) * | 2002-03-15 | 2003-09-17 | ASML Netherlands BV | Lithographic apparatus and device manufacturing method |
| CN110500970A (en) * | 2019-08-01 | 2019-11-26 | 佛山市南海区广工大数控装备协同创新研究院 | A kind of multi-frequency structural light three-dimensional measuring device and method |
| JP2021162390A (en) * | 2020-03-31 | 2021-10-11 | 株式会社フジタ | Displacement measuring device and displacement measuring method |
-
1978
- 1978-09-01 JP JP10773478A patent/JPS5533679A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4560280A (en) * | 1982-08-31 | 1985-12-24 | Tokyo Shibaura Denki Kabushiki Kaisha | Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures |
| WO1997037267A1 (en) * | 1996-04-03 | 1997-10-09 | Mrs Technology, Inc. | Lens focus shift sensor |
| US5991004A (en) * | 1996-04-03 | 1999-11-23 | Mrs Technology, Inc. | Lens focus shift sensor |
| EP1345084A1 (en) * | 2002-03-15 | 2003-09-17 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| EP1345082A1 (en) * | 2002-03-15 | 2003-09-17 | ASML Netherlands BV | Lithographic apparatus and device manufacturing method |
| US6819400B2 (en) | 2002-03-15 | 2004-11-16 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| CN110500970A (en) * | 2019-08-01 | 2019-11-26 | 佛山市南海区广工大数控装备协同创新研究院 | A kind of multi-frequency structural light three-dimensional measuring device and method |
| JP2021162390A (en) * | 2020-03-31 | 2021-10-11 | 株式会社フジタ | Displacement measuring device and displacement measuring method |
| JP2021170042A (en) * | 2020-03-31 | 2021-10-28 | 株式会社フジタ | Displacement measuring device |
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