JPS522547A - Optical method to measure displacement of plane - Google Patents

Optical method to measure displacement of plane

Info

Publication number
JPS522547A
JPS522547A JP7805975A JP7805975A JPS522547A JP S522547 A JPS522547 A JP S522547A JP 7805975 A JP7805975 A JP 7805975A JP 7805975 A JP7805975 A JP 7805975A JP S522547 A JPS522547 A JP S522547A
Authority
JP
Japan
Prior art keywords
plane
optical method
measure displacement
displacement
measure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7805975A
Other languages
Japanese (ja)
Other versions
JPS5347181B2 (en
Inventor
Kosuke Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7805975A priority Critical patent/JPS522547A/en
Publication of JPS522547A publication Critical patent/JPS522547A/en
Publication of JPS5347181B2 publication Critical patent/JPS5347181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure with high precision the displacement of plane of the entire surface of the object to be measured having indentation or pattern on the surface.
COPYRIGHT: (C)1977,JPO&Japio
JP7805975A 1975-06-24 1975-06-24 Optical method to measure displacement of plane Granted JPS522547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7805975A JPS522547A (en) 1975-06-24 1975-06-24 Optical method to measure displacement of plane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7805975A JPS522547A (en) 1975-06-24 1975-06-24 Optical method to measure displacement of plane

Publications (2)

Publication Number Publication Date
JPS522547A true JPS522547A (en) 1977-01-10
JPS5347181B2 JPS5347181B2 (en) 1978-12-19

Family

ID=13651268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7805975A Granted JPS522547A (en) 1975-06-24 1975-06-24 Optical method to measure displacement of plane

Country Status (1)

Country Link
JP (1) JPS522547A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642205A (en) * 1979-09-17 1981-04-20 Nippon Kogaku Kk <Nikon> Focus detecting method
JPS611378U (en) * 1985-04-22 1986-01-07 マックス株式会社 Screw separation device in screw setter
JPS611375U (en) * 1985-04-22 1986-01-07 マックス株式会社 screw selection device
JPS6154472U (en) * 1984-06-06 1986-04-12
JPS62236678A (en) * 1986-04-04 1987-10-16 日立工機株式会社 Screw driver

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135577Y2 (en) * 1980-03-02 1986-10-16

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642205A (en) * 1979-09-17 1981-04-20 Nippon Kogaku Kk <Nikon> Focus detecting method
JPH0141962B2 (en) * 1979-09-17 1989-09-08 Nikon Kk
JPS6154472U (en) * 1984-06-06 1986-04-12
JPH0232389Y2 (en) * 1984-06-06 1990-09-03
JPS611378U (en) * 1985-04-22 1986-01-07 マックス株式会社 Screw separation device in screw setter
JPS611375U (en) * 1985-04-22 1986-01-07 マックス株式会社 screw selection device
JPS62236678A (en) * 1986-04-04 1987-10-16 日立工機株式会社 Screw driver

Also Published As

Publication number Publication date
JPS5347181B2 (en) 1978-12-19

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