JPS5389668A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5389668A
JPS5389668A JP396077A JP396077A JPS5389668A JP S5389668 A JPS5389668 A JP S5389668A JP 396077 A JP396077 A JP 396077A JP 396077 A JP396077 A JP 396077A JP S5389668 A JPS5389668 A JP S5389668A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
insulation film
peripheries
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP396077A
Other languages
Japanese (ja)
Inventor
Kohei Yamada
Koichiro Yamada
Manabu Matsuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP396077A priority Critical patent/JPS5389668A/en
Publication of JPS5389668A publication Critical patent/JPS5389668A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To perform perfect covering by side-etching the insulation film at the peripheries of grooves formed in a substrate by the use of a resist mask, thereafter forming an insulation film.
COPYRIGHT: (C)1978,JPO&Japio
JP396077A 1977-01-19 1977-01-19 Production of semiconductor device Pending JPS5389668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP396077A JPS5389668A (en) 1977-01-19 1977-01-19 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP396077A JPS5389668A (en) 1977-01-19 1977-01-19 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5389668A true JPS5389668A (en) 1978-08-07

Family

ID=11571650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP396077A Pending JPS5389668A (en) 1977-01-19 1977-01-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5389668A (en)

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