JPS5384460A - Munufacture of semiconductor device - Google Patents

Munufacture of semiconductor device

Info

Publication number
JPS5384460A
JPS5384460A JP15948476A JP15948476A JPS5384460A JP S5384460 A JPS5384460 A JP S5384460A JP 15948476 A JP15948476 A JP 15948476A JP 15948476 A JP15948476 A JP 15948476A JP S5384460 A JPS5384460 A JP S5384460A
Authority
JP
Japan
Prior art keywords
semiconductor device
munufacture
pentavalent
trivalent
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15948476A
Other languages
Japanese (ja)
Inventor
Yoshiro Nakayama
Koichiro Kotani
Tanji Okawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15948476A priority Critical patent/JPS5384460A/en
Publication of JPS5384460A publication Critical patent/JPS5384460A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To increase the dielectric strength by forming an anode oxide film on the trivalent-pentavalent semiconductor substrate through the positive resist mask and then producing the trivalent-pentavalent semiconductor device of opposite conduction type using the anode oxide film for the mask.
COPYRIGHT: (C)1978,JPO&Japio
JP15948476A 1976-12-29 1976-12-29 Munufacture of semiconductor device Pending JPS5384460A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15948476A JPS5384460A (en) 1976-12-29 1976-12-29 Munufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15948476A JPS5384460A (en) 1976-12-29 1976-12-29 Munufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5384460A true JPS5384460A (en) 1978-07-25

Family

ID=15694768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15948476A Pending JPS5384460A (en) 1976-12-29 1976-12-29 Munufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5384460A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893276A (en) * 1972-02-09 1973-12-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4893276A (en) * 1972-02-09 1973-12-03

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