JPH11220893A - Vibration-type actuator and vibration-type drive unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration-type actuator which can obtain multidegree of freedom of a driving force by a single vibrator with a simple configuration. SOLUTION: A vibrator in which an electromechanical transducer 3 which excites a vertical vibration and a plurality of horizontal vibrations with different phases in an elastic body 4 and which combines the vertical vibration with at least two vibrations among the plurality of horizontal vibrations selectively to form a circular or elliptical motion at a position in the arbitrary plane of the elastic body and a contact body 2 which is brought into contact with the vibrator and transferred relatively to the vibration unit are provided. The vibrator and the contact unit are attracted to each other and pressurized by a magnet 7.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a vibration type actuator and a vibration type driving device.

[0002]

2. Description of the Related Art As a vibration-type actuator for generating a motion around multiple axes, for example, Journal of Precision Engineering (Vol.
No. 3, pp. 1227-1230, 1995) or Nikkei Mechanical (No. 5, pp. 26-27,
1997. 4.28) has proposed a spherical vibration type actuator disclosed in US Pat.

[0003] This spherical vibration-type actuator uses a moving body formed in a spherical shape as a moving body, and rotates the spherical moving body (rotor) around two or three of three orthogonal axes. In this configuration, a plurality of vibrators (stators) that generate rotational force by vibration (for example, traveling waves) about one axis are arranged so as to make pressure contact with the moving body.

[0004] As such a spherical vibration type actuator, a two-degree-of-freedom type using four vibrators at present is available.
A three-degree-of-freedom type using three vibrators has been developed.

The vibrating body used in the spherical vibration type actuator is, for example, the same as the vibrating body used in a ring type vibration type actuator used for driving an auto-focus lens of a camera. Fig. 2 shows the external shape. The vibrating body 19 is obtained by bonding a piezoelectric element 19b made of piezoelectric ceramics to the bottom surface of a ring-shaped elastic body 19a. The piezoelectric element 19b has an appropriate phase difference (an odd phase multiple of a half wavelength). ) Forms two driving phases, and by applying an alternating signal having an appropriate phase difference (for example, 90 °) to both driving phases, the elastic body 19a bends (bends) along the circumferential direction. A traveling wave is formed. Then, by bringing a contact body (not shown) into contact with the elastic body 19a via a pressurizing means (not shown), the contact body and the vibrating body 19 move relative to each other in a direction opposite to the traveling direction of the traveling wave. I do. When the vibrating body 19 is fixed, the contact body rotates as a moving body, for example.

As shown in FIG. 17, a spherical vibration type actuator, for example, a two-degree-of-freedom type spherical vibration type actuator, comprises a pair of opposing vibrators 19 arranged around a spherical moving body 2 by two pairs. The movement of two degrees of freedom is realized with the center of the vibrating body 19 as a rotation axis.

[0007] Other vibration-type actuators that generate motion about multiple axes include Third Intern.
national Conference on Mot
ion and Vibration Contro
1, Chiba, September, 1-6, 19
96 pp. A piezoelectric manipulator described in K9-K15 has been proposed. FIG. 18 shows the configuration.

This piezoelectric manipulator comprises a vibrating body 19 formed of a cylindrical elastic body and a piezoelectric element, and hemispherical moving bodies 20a, 20a disposed at axial ends of the vibrating body 19.
b, and a divided electrode (not shown) is formed around the vibrating body 19. Further, the hemispherical moving bodies 20 a and 20 b are connected to a spring 21 disposed in the vibrating body 19.
The moving bodies 20a and 20b are always in contact with the opening end of the vibrating body 19, respectively.

Then, by applying an appropriate AC voltage to each of the divided electrodes so as to adjust the vibration excited in the vibrating body 19, two hemispherical moving bodies in contact with the open ends of the vibrating body 19, respectively. 20a and 20b are driven by only one moving body 19.

This driving principle is based on a hemispherical moving body 20a,
An elliptical motion is generated at a contact point between the vibration body 20b and the vibrating body 19, and an elliptical motion in a plurality of planes is generated by changing an AC voltage applied to each electrode. It can be driven in any direction.

[0011]

However, FIG.
In the conventional spherical vibration type actuator shown in (1), a plurality of vibrators are used, so the following difficulties are pointed out.

[0012] In order to use a plurality of vibrators for rotation about one axis, it is necessary to match the characteristics of the respective vibrators.

[0013] Since a plurality of vibrators exist around the moving body, miniaturization is difficult and space efficiency is poor.

Since another vibrating body around the axis which is not used for driving is pressed against the moving body, the vibrating body becomes a resistance to rotation and has a problem of efficiency and heat generation.

The following problems have been pointed out with respect to the conventional cylindrical vibrating actuator shown in FIG.

Since an alternating signal is input to a plurality of electrodes provided on the peripheral surface of the vibrating body in accordance with the driving direction, the input signal differs for each electrode, so that complicated control is required.

Since the hemispherical moving bodies 20a and 20b are pressed against the cylindrical vibrating body 19 by pulling together the springs 21 arranged in the vibrating body 19, the movable range is limited. The pressing force of the press contact is not constant, and the pressing force cannot be easily adjusted.

An object of the first invention according to the present application is to provide a vibration-type actuator capable of generating a driving force with a high degree of freedom by a single vibrator with a simple configuration.

An object of a second invention according to the present application is to provide a vibration-type driving device capable of driving a driven body with a simple configuration and a high degree of freedom.

[0020]

A first configuration for realizing the object of the first invention according to the present application is an electric device that excites an elastic body to vibrate in a vertical direction and a plurality of horizontal vibrations having different phases. -Providing a mechanical energy conversion element, selectively combining at least two of the longitudinal vibration and the plurality of lateral vibrations, and applying a circular or elliptical motion to a point in an arbitrary plane of the elastic body. It has a vibrating body to be formed, and a contacting body that comes into contact with the vibrating body and moves relative to the vibrating body, and the vibrating body and the contacting body are pressurized by pressurizing means.

A second configuration for realizing the object of the first invention according to the present application has a vibrating body formed with vibration generating means for generating vibration displacement in at least three different directions.
A vibration type in which the vibrating body generates a combined vibration combining vibration displacements in at least two directions of the vibration displacements in the directions, and relatively moves the vibrating body and a contact body in contact with the vibrating body in an arbitrary direction. An actuator, wherein the vibrating body and the contact body are pressurized by pressurizing means.

A third configuration for realizing the object of the first invention according to the present application has a vibrating body formed with vibration generating means for generating vibration displacement in at least three different directions.
A vibration type actuator that gives a vibration displacement in a direction to generate a synthetic vibration in the vibrating body, and relatively moves the vibrating body and a contact body that contacts the vibrating body in an arbitrary direction, wherein the vibrating body and the vibrating body The contact body is pressurized by pressurizing means.

A fourth structure for realizing the object of the first invention according to the present application has a vibrating body provided with an electro-mechanical energy conversion element for exciting at least three different vibration displacements in an elastic body, A vibration type in which a combined vibration is generated by selectively combining vibration displacements in at least two directions among the three different vibration displacements, and the vibrating body and a contact body in contact with the vibrating body are relatively moved in an arbitrary direction. An actuator, wherein the electro-mechanical energy conversion element has a polarization region that is also used for vibration displacement in different directions, and pressurizes the vibrating body and the contact body with a pressing unit.

According to a fifth configuration for realizing the object of the first invention according to the present application, the vibrating body is brought into contact with the vibrating body by changing a ratio of each component of the combination of the vibration displacements in at least three directions. And a moving contact body in an arbitrary direction.

In a sixth configuration for realizing the object of the first invention according to the present application, the pressurizing means suctions and presses the vibrating body and the contact body by magnetic force.

In a seventh aspect of the invention for realizing the object of the first invention, the pressurizing means suctions air to suction-press the contact body to the vibrating body.

According to an eighth aspect of the present invention, the pressing means applies an elastic force to the contact body to press the vibrating body.

According to a ninth structure for realizing the object of the first invention according to the present application, the pressurizing means for suction-pressing the vibrating body and the contact body by magnetic force comprises: It is constituted by a permanent magnet provided on either one.

According to a tenth configuration for realizing the object of the first invention according to the present application, the pressurizing means for suction-pressing the vibrating body and the contact body by magnetic force comprises: It is constituted by an electromagnet force formed by energizing a coil provided on one of them.

According to an eleventh structure for realizing the object of the first invention according to the present application, the pressurizing means for sucking air to suck and press the contact body on the vibrating body includes: The air is sucked through a communication port that communicates with a recess formed in a contact portion with the body. A twelfth configuration for realizing the object of the first invention according to the present application is characterized in that the pressurizing means for applying an elastic force to the contact body and pressing the vibrating body presses the contact body with respect to the elastic body. And a holding member for receiving a reaction force of the elastic pressing member.

According to a thirteenth configuration for realizing the object of the first invention according to the present application, the holding member is disposed around the contact body and attached to the vibrator side so as to have one degree of freedom. Is what it is.

A fourteenth structure for realizing the object of the first invention according to the present application is characterized in that the vibrating body has a contact member elastically in contact with the contact body near a contact portion with the contact body. It is provided.

According to a fifteenth configuration for realizing the object of the first invention according to the present application, the vibrator has a support having a plurality of supporting arms extending radially outward. .

A first configuration of a vibration-type driving device for realizing the object of the second invention according to the present application is such that the above-mentioned vibration-type actuator is provided at a joint portion of an arm that moves with multiple degrees of freedom. .

A second configuration of the vibration-type driving device for realizing the object of the second invention according to the present application is such that a vibration-type actuator provided at a joint portion of the arm responds to movement of a joint of an operator by remote control. It has a remote control means for operating it.

A third configuration of the vibration-type driving device for realizing the object of the second invention according to the present application is that the vibration-type actuator is provided at a joint of an arm that performs a multi-degree-of-freedom motion, and the laparoscopic operation is performed. Or microsurgery.

[0037]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Before describing the embodiments of the present invention, the technology on which the present invention is based will be described first.

(Technology 1 as a Premise of the Invention) FIG. 1 shows a technology 1 as a premise of the present invention.

FIG. 1 shows the driving principle of the vibration type actuator according to the present embodiment. In FIG. 1, (b), (c) and (d) of FIG. A piezoelectric element 3 as an electro-mechanical energy conversion element giving the displacement shown in FIG. Further, as the piezoelectric element, for example, a plurality of single piezoelectric element plates are stacked, and an electrode plate is sandwiched between the piezoelectric element plates as necessary, so that the individual piezoelectric element plates can be individually driven. The alternating signal can be applied.

In this embodiment, the piezoelectric element 3 repeatedly expands and contracts in the axial direction by the application of the alternating signal.
As shown in (b) of FIG.
Among the axes, a first piezoelectric element that excites longitudinal vibration that is a displacement in the z-axis direction, and a second piezoelectric element that excites transverse (bending) vibration in the zx plane as shown in FIG. And a third piezoelectric element that excites lateral (bending) vibration in the zy plane as shown in FIG. 1D. The first piezoelectric element is uniformly polarized in the thickness direction. Further, the second and third piezoelectric elements are polarized so as to have opposite polarities in the thickness direction at both sides of the diameter.

Here, when an alternating signal having a phase difference of, for example, 90 ° is applied to the second piezoelectric element and the third piezoelectric element, two bending vibrations with respect to the vibrating body are synthesized.
An elliptical motion around the z-axis (in the xy plane) is formed on the surface of the vibrator. In this case, since the natural frequencies of the vibrating body about the x-axis and the y-axis substantially match, an alternating signal having the natural frequency as a driving frequency is applied to the second piezoelectric element and the third piezoelectric element. In this case, the above-described elliptical vibration is generated.

Next, when an alternating signal having a frequency substantially equal to the natural frequency of the vibrator in the z-axis direction is applied to the first piezoelectric element, the vibrator vibrates in the primary mode at a constant period in the primary mode. Will be repeated.

At this time, when an alternating signal is applied to the second piezoelectric element so as to be excited by one cycle of vibration that coincides with (substantially coincides with) one cycle of the longitudinal vibration of the vibrating body,
An elliptical motion in the xz plane is generated at a point on the surface of the vibrating body, and a driving force in the x-axis direction (around the y-axis) is obtained. In this case, since the natural frequency of the vibrating body in the z-axis direction is different from the primary natural frequency of the bending vibration in the xz plane, as shown in FIG. The second piezoelectric element is driven in the second mode of the natural frequency with respect to the bending vibration in the direction, so that the period of the longitudinal vibration matches the period of the bending vibration.

Similarly, when an alternating signal is applied to the third piezoelectric element so as to be excited by one cycle of vibration which coincides with (substantially coincides with) one cycle of the longitudinal vibration of the vibrating body, An elliptical motion in the yz plane is generated at a point on the surface of the vibrating body, and a driving force in the y-axis direction (around the x-axis) is obtained. In this case, since the natural frequency of the vibrating body in the z-axis direction is different from the natural frequency of the bending vibration in the yz plane, in the present embodiment, as shown in FIG. By driving the third piezoelectric element in the secondary mode of the natural frequency with respect to the bending vibration, the period of the longitudinal vibration is made to coincide with the period of the bending vibration.

That is, by applying an alternating signal having a frequency close to the natural frequency of the vibrating body 1, for example, an AC voltage to the first piezoelectric element, the second piezoelectric element, and the third piezoelectric element, The longitudinal or transverse (bending) vibration of the natural vibration as shown in (b), (c) and (d) of FIG. 1 is excited.

Then, by selectively applying an alternating signal to any two of the first piezoelectric element, the second piezoelectric element, and the third piezoelectric element, the longitudinal vibration of the vibrating body 1 is reduced.
The combination of the two transverse (bending) vibrations in mutually perpendicular directions generates an elliptical motion at a point on the surface of the vibrating body 1. For example, the combination of (b) and (c) makes x-
Elliptical motion in the z-plane is generated. Alternatively, an elliptical motion in the yz plane is generated by a combination of (b) and (d), and an elliptical motion in the xy plane is generated by a combination of (c) and (d).

Therefore, when the moving body is pressed against a certain part of the vibrating body, the moving body can be driven in a plurality of directions.

The driving principle of a conventional piezoelectric actuator is as follows. An ellipse about one axis is applied to a point on the surface of an elastic body by applying an alternating signal having a phase shift to two driving phases of a piezoelectric element constituting a vibrating body. Was trying to form a movement,
In the present embodiment, three-phase piezoelectric elements (first piezoelectric element,
By combining the second piezoelectric element and the third piezoelectric element), it is possible to form an elliptical motion around three axes (within three orthogonal planes), and with a single vibrator in three orthogonal planes. In addition to the realization of the vibration-type actuator that enables the driving of the actuator, further downsizing can be achieved.

(Technique 2 as a premise of the invention) FIG. 2 shows a technology 2 as a premise of the present invention.

The prerequisite technique 1 shown in FIG.
Although the vibrating body in the vibrating actuator has a cylindrical shape, in the technology 2 which is the premise of FIG. 1, the vibrating body has a prismatic shape, and the piezoelectric element 3 is bonded to a side surface of the prismatic elastic body 1 with an adhesive. doing. In the base technology 2, for example, a second piezoelectric element and a third piezoelectric element that form a lateral vibration (bending vibration) are arranged on two adjacent side surfaces of an elastic body 1 having a prism shape. And the third piezoelectric element can be arranged so as to have a phase difference of exactly 90 degrees, and the first piezoelectric element forming the longitudinal vibration is bonded to the remaining other side surface with an adhesive. .

Also in this prerequisite technique 2, an alternating signal similar to that of the first embodiment is applied to the first piezoelectric element, the second piezoelectric element, and the third piezoelectric element, and is applied to the first piezoelectric element. When the alternating signal is applied, the vibrating body vibrates longitudinally as shown in FIG. 2B, and when the alternating signal is applied to the second piezoelectric element, the vibrating body becomes x-as shown in FIG. 2C. It bends and vibrates in the z-plane, and the alternating signal is applied to the third piezoelectric element.
As shown in (1), the vibrating body bends and vibrates in the yz plane.

Therefore, as in the case of the first base technology, a driving force in three planes orthogonal to each other can be obtained by combining two of these three types of vibration.

In the second prior art, the vibrating body can be obtained by attaching the piezoelectric element to the prismatic side surface, so that the vibrating body can be easily manufactured, and two piezoelectric elements for bending vibration can be attached to the adjacent side surface. The position (phase difference) of both piezoelectric elements can be defined only by pasting.

In the above-described base technology 1 and base technology 2, if the vibrating body is fixed, the contact member (indicated by a broken line in the drawing) which comes into pressure contact with the driving surface of the vibrating body is used as a moving body and the three orthogonal axes are used. The driving force can be applied in the direction, and conversely, if the contact body is fixed, the driving force can be applied to the vibrating body in three axial directions orthogonal to the contact body.

(Technology 3 as a premise of the invention) FIG. 3 shows a technology 3 as a premise of the invention.

The basic structure of the vibrating body in the vibration type actuator according to the prior art 3 is based on the first prior art shown in FIG.
A piezoelectric element is arranged between the head elastic body 4 having a female thread formed in the inner diameter part, the intermediate elastic body 5a having a hole formed in the center part, and the rear elastic body 5b. Fastening bolt 6 forming a central shaft member inserted from the rear elastic body 5b side
Is screwed into the female thread portion of the head elastic body 4 to sandwich the piezoelectric element 3 between the head elastic body 4 and the intermediate elastic body 5a and between the intermediate elastic body 5a and the rear elastic body 5b. And are integrally connected.

In the base technology 3, the piezoelectric element 3 disposed between the head elastic body 4 and the intermediate elastic body 5a is a first piezoelectric element that excites a longitudinal vibration to the vibrating body. The piezoelectric element 3 arranged between the body 5a and the rear elastic body 5b forms a second piezoelectric element that forms bending vibration in the xz plane and forms a bending vibration in yz plane. A third piezoelectric element, wherein the second piezoelectric element and the third piezoelectric element are disposed with a phase difference of 90 ° in position.

The distal end of the head elastic body 4 has a tapered inner peripheral surface that is oblique with respect to the axis that comes into contact with the spherical moving body 2.

Therefore, in this base technology 3,
As in the above-described base technology 1, by combining two vibrations of the longitudinal vibration and the two-direction bending vibration formed in the vibrating body, the spherical moving body 2 can be moved along the x-axis, the y-axis, and the z-axis.
Each can be rotated about an axis.

For example, the combination of (c) and (d) in FIG. 1 is around the z-axis, the combination of (b) and (c) is around the y-axis, and the combination of (b) and (d) is the x-axis. The moving body 2 can be rotated around, and the moving body 2 can rotate around three axes orthogonal to each other.

(Technology 4 as a Premise of the Invention) FIG. 4 shows a technology 4 as a premise of the invention.

The basic structure of the vibrating body in the vibration type actuator of the prerequisite technology 4 is the same as that of the prerequisite technology 3 shown in FIG. 3, and is a moving body driven by elliptical motion in three orthogonal planes formed on the head 4a. Base technology 3 is that 2 is flat
And different.

In the base technology 4, when the moving body 2 is pressed against the head 4a of the head elastic body 4, the moving body 2 moves in the x-axis direction, the y-axis direction, and around the z-axis. For example, the first
When a longitudinal vibration in the z direction formed by driving the piezoelectric element and a transverse vibration in the xz plane formed by driving the second piezoelectric element are excited with a phase difference of about 90 °, The head 4a of the vibrator generates an elliptical motion in the xz plane, and the moving body 2 in contact with the head 4a moves straight in the x-axis direction.

When the longitudinal vibration in the z direction and the transverse vibration in the yz plane are excited with a phase difference of about 90 °, an elliptic motion in the yz plane occurs at the end point of the head 4a. The moving body 2 in contact with the head 4a moves straight in the y-axis direction.

Further, when the transverse vibration in the xz plane and the transverse vibration in the yz plane are excited with a phase difference of about 90 °,
An elliptical motion in the xy plane is generated in the head 4a, and the moving body 2 in contact with the head 4a rotates around the z-axis.

The above are some of the techniques that are the premise of the present invention. Embodiments of the present invention will be described below.

(First Embodiment) FIG. 5 shows a first embodiment of the present invention.
An embodiment will be described.

In this embodiment, the spherical moving body 2 is attracted and pressed by the magnetic force of the permanent magnet 7 to the vibrating body in the vibration type actuator of the prior art 3 shown in FIG. The permanent magnet 7 is provided in the concave end 4b of the elastic body 4.

(Second Embodiment) FIG. 6 shows a second embodiment.

In the present embodiment, the spherical moving body 2 is attracted and pressed by the magnetic force of the electromagnet to the vibrating body in the vibration type actuator of the prior art 3 shown in FIG. The coil 8 is arranged in a concave groove 4c provided on the outer periphery of the coil 4 and an electromagnet is formed by energizing the coil 8. The magnetic force causes the moving body 2 to move the head elastic body 4
And apply suction pressure. The coil 8 is attached to a support member 30 arranged around the vibrator, and the outer end of a support plate 9 extending from the vibrator is attached to the support member 30.

The coil 8 may be arranged at any place around the vibrating body as long as it can form a magnetic circuit.

(Third Embodiment) FIG. 7 shows a third embodiment of the present invention.
An embodiment will be described.

This embodiment is intended to improve the contact property of the spherical moving body 2 with the vibrating body of the vibrating actuator in the first embodiment shown in FIG. A contact body 10 made of an elastic material disposed near the contact portion of the moving body 2 is disposed in the concave portion 4b to increase the contact area between the moving body 2 and the head elastic body 4.

For this reason, the contact of the moving body 2 with the vibrating body is stabilized, the output torque is increased, and the allowable range of the processing error at the time of processing the parts can be expanded.

(Fourth Embodiment) FIG. 8 shows a fourth embodiment of the present invention.
An embodiment will be described.

In the present embodiment, similarly to the third embodiment, the contact property of the spherical moving body 2 with the vibrating body of the vibration type actuator in the first embodiment shown in FIG. 1 is improved. In the vibrating body, the distal end recess 4b of the head elastic body 4 is formed by a cylindrical flange 11 having spring properties.

In the present embodiment, the moving body 2 comes into contact with the spring 11 with a certain elastic force by the pressurizing means (not shown), so that the contact area of the flange 11 with the spherical surface of the moving body 2 is reduced. As a result, the contact property of the moving body 2 becomes stable, the output torque increases, and the allowable range of a processing error at the time of component processing can be expanded.

(Fifth Embodiment) FIGS. 9, 10, and 1
1 shows a fifth embodiment of the present invention.

This embodiment shows a specific configuration of a columnar vibrating body, in which a first elastic body 5c is directly disposed after a head elastic body 4, and a first elastic body 5c and a second elastic body 5d are formed. The piezoelectric element plates 3a and 3b for exciting longitudinal vibration between them, the piezoelectric element plate 3c for detecting vibration, and the support plate 9 also having a function that the central part 9a is in contact with the piezoelectric element plate 3a as an electrode plate.
And the electrode plates 12z, 12sz, 13 are arranged. Further, between the second elastic body 5d and the third elastic body 5e, piezoelectric element plates 3e, 3f and 3g for exciting transverse vibration (bending vibration) are provided.
3h, piezoelectric element plates 3d and 3i for detecting vibration, electrode plates 12SA, 12A, 12SB, 12B, 13 and sheet 1
4 are arranged. Then, by screwing the distal end thread portion of the fastening bolt 6 into the female thread portion of the inner diameter portion of the head elastic body 4, the head elastic body 4, the first elastic body 5c, the second elastic body 5d,
Third elastic body 5e, piezoelectric element plates 3a to 3i, electrode plate 12,
The sheet 13 and the sheet 14 are integrally held in the arrangement shown in the figure to form a vibrating body. The electrode plate 13 is a ground electrode.

Here, the support plate 9 supports the vibrating body by fixing an arm extending radially from the central electrode plate 9a to a fixing portion 30 shown in FIG. Note that the support plate 9 may have a shape other than the plate as long as it does not affect the natural vibration of the vibrator itself. Of course, it is not necessary that the electrode plate also serves as the electrode plate.

Further, the piezoelectric element plates 3d, 3e, 3f,
The left and right sides of the piezoelectric element plates 3g, 3h, and 3i are polarized so as to have opposite polarities, and are arranged with a phase difference of 90 ° in the bending direction. The sheet 14 has an insulating property, and the second elastic body 5d and the electrode plate 12 or the third elastic body 5e and the electrode plate 12 disposed on both sides of the sheet 14 are electrically independent. .

For the vibrating body thus configured, a driving circuit shown in FIG.
When an AC voltage having a frequency close to the natural frequency of the vibrating body is input to the electrode plate 12 (12Z) sandwiched between the a and 3b, the piezoelectric element plates 3a and 3b repeatedly expand and contract in the thickness direction, and the Excludes longitudinal vibration. Also, the piezoelectric element plate 3c
Is distorted by longitudinal vibration excited by the piezoelectric element plates 3a and 3b, and generates an electromotive force. At this time, the piezoelectric element plate 3c
The AC voltage taken out from the electrode plate 12 (12SZ) in contact with is used for vibration detection.

The electrode plate 12 sandwiched between the piezoelectric element plates 3e and 3f
When an AC voltage having a frequency close to the natural frequency of the vibrating body is input to (12A), these piezoelectric element plates 3e and 3f alternately expand and contract in the thickness direction on both sides of the diameter portion, and Excitation of transverse vibration to the vibrator.

Further, the piezoelectric element plate 3d is
e) Distortion is caused by the lateral vibration of the vibrating body excited by 3f, and an electromotive force is generated. At this time, the AC voltage extracted from the electrode plate 12 (12SA) in contact with the piezoelectric element plate 3d is used for detecting vibration. Piezoelectric element plates 3d, 3
When an AC voltage having a frequency close to the natural frequency of the vibrating body is input to the electrode plate 12 (12B) sandwiched between the piezoelectric element plates 3g and 3h arranged with a phase difference of 90 ° relative to e,
The portions on both sides of the piezoelectric element plates 3g and 3h across the diameter portion repeatedly expand and contract in the thickness direction, and excite transverse vibration (bending vibration) to the vibrating body. Also, the piezoelectric element plate 3i
Are distorted by longitudinal vibration of the vibrating body excited by the piezoelectric element plates 3g and 3h, and generate an electromotive force. At this time, the AC voltage extracted from the electrode plate 12 (12SB) in contact with the piezoelectric element plate 3i is used for detecting vibration.

The piezoelectric element plates 3a to 3c for exciting the longitudinal vibration
The position of 3c is a position serving as a node in the first mode of longitudinal vibration. Further, the positions of the piezoelectric element plates 3d to 3i that excite the lateral vibration are positions that are antinodes of the secondary mode of the lateral vibration.

On the other hand, the constricted portion (recess) 4c formed on the outer peripheral portion of the head elastic body 4 enlarges the amplitude of the natural vibration, and can suppress the natural frequency low. In addition, a constricted portion (recess) 6 a provided on the central axis 6 of the vibrating body allows
Mainly, the natural frequency of longitudinal vibration can be kept low.

FIG. 19 is a block diagram showing a driving circuit for driving and controlling the above-mentioned vibrating body. 101 is a CPU for controlling the whole system, 102 is an oscillator, 103
Is a phase shifter, and 104 is a selection switch. 10
Reference numeral 5 denotes an output circuit for generating a drive waveform, which is configured in accordance with the circuit shown in FIG. Output circuits 105Z, 105A, 10
5B is connected to the electrode plates 12Z, 12A and 12B, respectively, and applies an AC voltage (alternating signal) to the piezoelectric elements 3a and 3b, 3e and 3f, 3g and 3h. These piezoelectric elements are
Longitudinal vibration in the Z-axis direction, transverse (bending) vibration in the ZX plane, Z
-Excite lateral (bending) vibration in the Y plane.

The selection switch 104 is connected to the CPU 10
Based on the command from 1, two of the three outputs Z, A, and B are selected, and two signals from the oscillator 102 and the phase shifter 103 are output. As a result, one of the three rotations can be selected.

A pulse width control circuit 107 controls the pulse width, and can control the amplitude of the AC voltage applied to the piezoelectric element. The aspect ratio (the ratio between the long axis and the short axis) of the elliptical locus can be changed by changing the applied voltage individually and independently according to the pulse width. The amplitude of the vibrating body can be changed by moving the oscillation frequency of the oscillator 102 closer to or away from the natural frequency of the vibrating body, and the size of the elliptical locus can be changed.

Z generated by the piezoelectric element plates 3c, 3d, 3i
Axial longitudinal vibration, horizontal (bending vibration) in the ZX plane, Z-
The lateral (bending) vibration in the Y plane and the voltage corresponding to the vibration amplitude are output from the detection circuit 106 through the electrode plates 12SZ, 12SA, and 12SB.
Input to U.

By controlling the pulse width control circuit 107, the phase shifter 103, and the oscillator 102 with the CP 101 based on these information, the elliptical locus can be controlled to an arbitrary shape.

By performing such control, the following becomes possible.

1: Since the speed distribution in the feed direction of the vibrating body changes, the speed of the moving body can be changed.

2: Since the frictional force distribution changes, an elliptical locus with the least sliding loss can be created. For example, the inclination of the elliptical locus may be controlled so that the axis of the ellipse is orthogonal to the spherical surface of the moving object. Specifically, an elliptical trajectory is generated in the radial direction of the inner peripheral surface (formed obliquely with respect to the axis) of the elastic body 4 shown in FIG. 3 to improve the efficiency.

Alternatively, it is also possible to feed back the signals of a rotation detector and a wattmeter (not shown) to drive in a state of an elliptical locus with the highest efficiency.

3: Since the way of contact between the vibrating body and the moving body (displacement and velocity in the normal direction) also changes, an elliptical trajectory that minimizes impact or generates no abnormal noise such as squealing is used. Can also.

(Sixth Embodiment) FIG. 12 shows a sixth embodiment of the present invention.

In the present embodiment, for example, a vibrating body having a support plate 9 shown in FIG. 11 is supported via a support 15 movable in any direction, for example. The support base 15 has a cylindrical shape, and can be used as a joint capable of moving the multi-degree-of-freedom vibration type actuator by being attached to a robot arm or the like.

(Seventh Embodiment) FIG. 13 shows a seventh embodiment of the present invention.

In this embodiment, two vibration-type actuators 40 of the embodiments described above and FIGS. 21 to 27 which will be described later are connected in series as operation arms on the left and right sides. , Which is remotely operated by the operation glove 16 via the control system 41, and which drives an actuator by a combination of the operation glove 16 and the control system 41 capable of reading the angular displacement of a human joint. Since the operation system is publicly known, the description of these components is omitted here. The operating arm of the present embodiment uses a spherical body as the moving body 42 of the vibrating actuator 40 on the hand side, and is attached to the rear end of the vibrating actuator 40 on the distal end side. As the moving body 43 of the actuator 40, a rod-shaped one having an operation finger portion (the contact portion with the head elastic body portion of the vibrating body) is used, and the moving bodies 42 and 43 are used.
Is mounted at a position corresponding to a human joint, and a remote control machine (robot) corresponding to human movement can be realized. Note that the remote control machine is a machine that operates in response to the movement of a person.

Such a remote control machine can be used for laparoscopic surgery and microsurgery. Laparoscopic surgery is an operation performed with an endoscope and forceps inserted into the body without incising the patient's body.

By using the present embodiment for this, complicated movements of the human hand can be realized inside the abdomen of the patient who cannot access the human hand. Even fine surgery can be performed. The microsurgery is an operation involving a fine operation performed on a fine living tissue, and is currently performed by a human hand directly under a microscope. By adjusting the scale on the operator side and the scale on the machine side using a remote control machine, it is possible to easily perform fine operations that are difficult with a human hand scale.

(Eighth Embodiment) FIG. 14 shows an eighth embodiment.

In this embodiment, the vibration-type actuator (multi-degree-of-freedom vibration-type actuator) 5 according to each of the embodiments described above and FIGS.
By mounting a plurality of 0s on the chassis 17 and using a sphere as a moving body, the moving body can be arbitrarily moved in the XY plane, so that translation and rotation can be performed. In FIG. 14, the moving body 2 of the multi-degree-of-freedom vibration type actuator 50 is configured to contact a floor (not shown). It can also be a mechanism.

(Ninth Embodiment) FIG. 15 shows a ninth embodiment of the present invention.

In this embodiment, the vibration-type actuator (multi-degree-of-freedom vibration-type actuator) 6 according to each of the embodiments described above and FIGS.
A camera 18 is arranged in the moving body 2 having a spherical shape of 0 to provide a monitoring camera or a photographing device for input to a computer.

[Tenth Embodiment] FIG. 21 shows the structure and driving principle of a vibration type actuator according to this embodiment. As shown in FIG. 21B, a piezoelectric element 103 as an electro-mechanical energy conversion element (having the same phase) is polarized into four parts between cylindrical elastic bodies 101 and 102 as a single vibrating body 100. , A plurality of piezoelectric element plates which are polarized into four parts are stacked and blocked). An alternating signal (voltage) for driving can be applied to the piezoelectric element 103 independently for each polarization region. The moving body 10 of the vibrating body 100
The inner peripheral surface 100a serving as a contact portion (drive portion) with the second member 2 is formed obliquely with respect to the axis so that the spherical moving body 102 slightly enters the inside.

[0108] Each polarized regions A~D of the piezoelectric element 103 is polarized in the same polarity, the vibrating body 100 to displace in the Z-axis _{direction, V A = V B = V} C = V D = sin ωt An alternating signal of V _A = V _C = sin ωt or V _B = V _D = sin ωt is provided.

[0109] On the other hand, in order to displace the vibration body 100 X-axis direction (bending vibration in Z-X plane) _{is, V A = sin ωt, V} C = -sin ωt or V _A = cos ωt, V _C = −cos ωt.

Further, in order to displace the vibrating body 100 in the Y-axis direction (bending vibration in the ZY plane), V _B = sin ωt, V _D = −sin ωt or V _B = cos ωt, V _D = −cos ωt.

As a result, as shown in FIG. 21 (a), displacement occurs in the Z-axis direction, the X-axis direction, and the Y-axis direction. In addition, the vibration in the Z-axis direction is set to the primary mode,
By setting the vibration in the axial direction to the secondary mode, the vibration in each axial direction is resonated.

The first portion 101a, whose rigidity is reduced by forming the circumferential groove, serves as a node position in the vibrations in the X-axis direction and the Y-axis direction, and serves as a displacement (bending) displacement expansion. Fulfill.

The second portion 101b, whose rigidity is reduced by forming a circumferential groove, serves as a position of a node in the vibration in the Z-axis direction and serves as a longitudinal displacement enlargement.

The embodiment shown in FIG. 21 does not require an electro-mechanical energy conversion element dedicated to longitudinal vibration as in the first to thirteenth embodiments, and basically includes a plurality of polarization regions. By selectively supplying an alternating signal, the vibrating body 100 can be displaced in three axial directions.

Next, supply of an alternating signal for rotating the spherical moving body 102 around each axis will be described.

To rotate the moving body 102 about the X axis, the displacement in the Z axis direction and the displacement in the Y axis
° with a phase difference of

That is, the alternating signals of V _A = V _B = V _C = V _D = sin ωt (displacement in the Z-axis), V _B = cos ωt, and V _D = −cos ωt (displacement in the Y-axis) are respectively corresponded. To the polarization regions A to D.

That is, the following equation is obtained.

V _A = sin ωt V _B = sin ωt + cos ωt = √2 sin (ωt + π / 4) V _C = sin ωt V _D = sin ωt-cos ωt = √2sin (ωt−π / 4) and around the Y axis When rotating the moving body 102 at
The displacement in the axial direction and the displacement in the X-axis direction are given, for example, with a phase difference of 90 °.

[0120] _{V A = V B = V C} = V D = sin ωt (Z axis direction _{displacement) V A = sin ωt, V} C = -sin ωt (X -axis direction displacement) That is, the following equation.

V _A = √2 sin (ωt + π / 4) V _B = sin ωt V _C = √2 sin (ωt−π / 4) V _D = sin ωt, the alternating signal of (Z axis direction displacement + X axis direction displacement) Is supplied to each of the corresponding polarization regions A to D.

Further, when rotating the moving body 102 about the Z axis, a displacement in the X axis direction and a displacement in the Y axis direction are given with a phase difference of, for example, 90 °.

[0123] That is, by _{V A = sin ωt V B =} cos ωt V C = -sin ωt V D = -cos ωt, each corresponding polarized regions A~ an alternating signal (X-axis direction displacement + Y-axis direction displacement) D.

When only the polarization regions A and C of the piezoelectric element 103 are used for realizing the displacement in the Z-axis direction, the supply of the alternating signal to each polarization region changes as follows. Become.

[0125] That is, V is the time of rotation of the X-axis _{A = V C = sin ωt V} B = cos ωt V D = -cos ωt becomes, V is the time of rotation of the Y-axis _A = cos _ωt V _{B = sin ωt V C = -cos} ωt V D = sin ωt , and becomes a _{V a = sin ωt V B =} cos ωt V C = -sin ωt V D = -cos ωt is the time of the rotation around the Z axis .

By changing the phase difference without setting the phase difference to 90 °, the shape of the elliptical motion is changed, and driving with a high torque corresponding to the contact angle between the moving body 102 and the driving section of the vibrating body 100 is possible. And

[Fifteenth Embodiment] FIG. 22 shows the structure and displacement of a vibration type actuator according to the present embodiment.

In this embodiment, as a single vibrating body 200, a cylindrical elastic body 201 and a disk-shaped elastic body 202 are joined. The elastic body 201 is actually divided into two and sandwiches two piezoelectric elements 203 and 204 as electric-mechanical energy conversion elements. The disk-shaped elastic body 202 is provided with four piezoelectric elements 205a to 205d as electric-mechanical energy conversion elements on the surface.

The piezoelectric element 203 is an elastic body 20 serving as a driving unit.
This is for displacing 1 in the X-axis direction as shown in FIG. 22C, and has the same function as the piezoelectric elements 3e and 3f in FIG. Further, the piezoelectric element 204 sets the elastic body 201 to Y
This is for displacing in the axial direction, and has the same function as the piezoelectric elements 3g and 3h in FIG. Note that the piezoelectric element 2
The polarization phases of 03 and 204 are shifted by 90 °.

On the other hand, the piezoelectric elements 205a to 205d are all polarized to have the same characteristics, and the disc-shaped elastic body 202 is
By bending as shown in (d), the elastic body 201 serving as the driving unit is displaced in the Z-axis direction.

A spherical moving body 206 is in contact with the elastic body 201 serving as a driving section in the same manner as in the fourteenth embodiment.
By supplying alternating signals to the piezoelectric element 204 and the piezoelectric elements 205a to 205d with a phase shift of, for example, 90 °, the moving body 206 can be rotated around the X axis. Further, by supplying an alternating signal to the piezoelectric element 203 and the piezoelectric elements 205a to 205d with a phase shift of, for example, 90 °, the moving body 206 can be rotated around the Y axis.

On the other hand, when rotating the moving body 206 about the Z axis, the alternating signals are supplied to the piezoelectric elements 203 and 204 with a phase shift of, for example, 90 °.

In order to always press the moving body 206 against the elastic body 201 irrespective of the direction of gravity, a permanent magnet 210 is provided inside the elastic body 201 as shown in FIG. There is a method of forming itself using a magnetic material. With this structure, the moving body 206 is always driven by the vibrating body 2 regardless of the direction of gravity due to the attractive force of the magnet.
00 can be pressed.

It is also effective to change the shape of the elliptical motion by setting an arbitrary phase difference without setting the phase difference to 90 °.

[Twelfth Embodiment] FIG. 24 shows the structure and displacement of a vibration type actuator according to this embodiment.

In this embodiment, as a single vibrating body 300, a cylindrical elastic body 301 and a disk-shaped elastic body 302 are joined. A permanent magnet (not shown) is incorporated in the elastic body 301 so that the moving body 306 made of a magnetic material is always attracted by a magnetic force to obtain a pressing force.

The elastic body 302 has four piezoelectric elements (polarized regions) 3 as electric-mechanical energy conversion elements on its surface.
03a to 03d are provided. As the piezoelectric elements 303a to 303d are selectively supplied with the alternating signal,
As shown in (b) to (d), the elastic body 301 as the driving unit can be displaced in the X-axis direction, displaced in the Y-axis direction, or displaced in the Z-axis direction.

When rotating the moving body 306 about the X axis, the displacement in the Y axis direction (FIG. 24C) and the displacement in the Z axis direction (FIG. 24D) are, for example, about 90 °. A phase difference may be provided, and when around the Y axis, the displacement in the X axis direction (FIG. 24B and the displacement in the Z axis direction (FIG. 24D))
For example, it is provided by providing a phase difference of 90 °. Further, when it is desired to rotate around the Z axis, the displacement in the X axis direction (FIG. 24)
(B)) and the displacement in the Y-axis direction (FIG. 24 (c)) are provided with a phase difference of, for example, 90 °. Note that the phase difference is 90 °
It is also effective to change the shape of the elliptical motion by arbitrarily setting without changing the shape.

The supply of the alternating signal to each of the piezoelectric elements 303a to 303d is the same as that of the above-described fourteenth embodiment, and the detailed description is omitted.

[Thirteenth Embodiment] FIG. 25 shows the structure of a vibration-type actuator according to the present embodiment. A plurality of cylindrical elastic members 401 and a single vibrator 400 are provided.
A piezoelectric element 404 is sandwiched between the elastic bodies 401 and 402, and a piezoelectric element 405 is sandwiched between the elastic bodies 402 and 403. Three elastic members 401
403 are fastened by bolts 407 as fastening members. Reference numeral 406 denotes a spherical moving body.

The present embodiment is characterized in that the pressure contact between the vibrating body 400 and the moving body 406 is performed by suction with air. That is, the hose 408 is inserted into the concave portion 401a near the driving section of the vibrating body 400, and suction force is generated near the driving section by sucking air by the hose 408, so that the moving body 406 is always moved regardless of the direction of gravity. It can be brought into pressure contact with the vibrating body 400.

Reference numeral 410 denotes a case, which is an elastic member 4
The vibrating body 400 is supported by fixing the outer end of the support member 411 sandwiched between 01 and 402.

[Fourteenth Embodiment] The fourteenth embodiment shown in FIG. 26A is a modification of the seventeenth embodiment, in which the moving body 406 is pressed against the driving section of the vibrating body 400. Other structures are shown.

Specifically, a dome-shaped upper cover 412 is provided on the upper part of the case 410 by a ball 413 as a bearing so as to be rotatable with respect to the case 410. Pressing members 415 for urging the moving body 406 in the direction of the vibrating body 400 by the coil spring 414 are movably provided at four places on the upper cover 412. The moving body 406 is moved by the urging force of the pressing member 415 to move the vibrating body 40.
It can be pressed against 0 regardless of the direction of gravity. The vibrating body 400 itself is supported on the case 410 by the support member 411.

The moving body 406 has a projection 406a as an actual driving portion projecting from the upper cover 412. The moving body 406 can be rotated in any direction.
A cross-shaped notch 412a is formed in the upper cover 406 as shown in FIG.

The projection 406a of the moving body 406 has the notch 41
2a, and the upper case 412 itself is rotatable with respect to the case 410. Therefore, even if the projection 406a is rotated (swinged) in any direction,
The upper cover 412 is rotated to enter any one of the cutouts 412a so as not to be restricted.

[Fifteenth Embodiment] The fifteenth embodiment shown in FIG. 27A shows a modification of the eighteenth embodiment.
10 is rotatably supported with respect to the disc spring 42.
2 is added to the bearing portion of the ball 413. The disc spring 422 is actually provided with the ball pressing member 423 interposed therebetween, and the upper case 420 itself is attached to the case 410 in the direction of pressing the moving body 406 and the vibrating body 400 downward with respect to the case 410 in the figure. It plays a vital role.

Fixed pressing members 424 are formed at three places inside the upper case 420.
With 24, the moving body 406 is pressed against the vibrating body.

As shown in FIG. 27B, the upper case 420 has a substantially Y-shaped notch 420a. The role of the notch 420a is the same as that of the notch 412a in FIG. 26B described above. FIG. 27 (c) shows an external view.

The upper covers 412, 4 shown in FIGS.
In the embodiment in which 20 is provided, the moving body 406 is substantially covered, and it is possible to prevent a change in the coefficient of friction due to oil, dust, or the like due to touch.

[Sixteenth Embodiment] In the present embodiment, the moving body can be rotated at any arbitrary angle. The dashed line in FIG.
Indicates axis inclined theta ₁ in the axial direction, the solid line of FIG. 29 shows a rotation from the X axis around the axis inclined theta ₂ in the Y-axis direction in the X-Y plane.

If rotation about an axis inclined by θ ₁ and θ ₂ in different axial directions with respect to the reference X-axis, Y-axis, and Z-axis can be realized, any other direction can be used. Rotation around an axis can be realized.

As a specific example, a method of realizing rotation about an axis inclined by θ ₁ and θ _{2 in} different directions with reference to the X axis will be described.

[0154] As shown in FIG. 28, X-Z axis of rotation theta ₁ inclined from the X axis in a plane can be defined as ωθ ₁ = Aωx + Bωz However _{B / A = tan θ 1 (} | ωx | =
| Ωz |).

As shown in FIG. 29, the rotation around the axis inclined by θ ₂ from the X axis in the XY plane can be defined as ωθ ₂ = Cωx + Dωy, where D / C = tan θ ₂ (| ωx | =
| Ωy |).

Further, the rotation about the axis inclined by θ ₁ and θ ₂ is as follows: ω (θ ₁ + θ ₂ ) = ωθ ₁ + ωθ ₂ = Aωx + Bωy +
Cωz where B / A = tan θ ₂ and C / A = tan θ ₁ .

First, the case where the phase difference is 90 ° will be described.

FIGS. 1 to 10 show a vibration type actuator.
The electrode plates 12A and 12A shown in FIG.
A description will be given of what kind of alternating signal is supplied to B and 12Z to enable driving by a rotating shaft having an arbitrary angle.

The rotation ωx about the X axis can be performed by the following equation: V _12Z = sin ωt (Z direction) V _12B = cos ωt (Y direction)

The rotation ωy about the Y axis can be performed by V _12Z = sin ωt (Z direction) V _12A = cos ωt (X direction)

[0161] The rotation omega _Z about the Z-axis is performed in V _12A = sin ωt (X direction) V _12B = cos ωt (Y-direction).

[0162] Then, X-Z axis of rotation theta ₁ inclined from the X axis in the _{plane, V 12A = Bsin ωt V 12B} = Acos ωt + Bcos ωt = (A + B) cos ωt V 12Z = Asin ωt However, B / A = tan θ ₁

In the XY plane, the rotation about the axis inclined by θ ₂ from the X axis is as follows: V _12A = D cos ωt V _12B = C cos ωt V _12Z = C sin ωt + D sin ωt = (C + D) sin ωt where D / C = tan θ ₂ .

Then, the rotation about the axis combining θ ₁ and θ ₂ is given by: V _12A = B cos ωt + C sin ωt = √ (B ² + C ² ) si
n (ωt + α) V _12B = Acos ωt + Ccos ωt = (A + C) cos ωt V _12Z = Asin ωt + Bsin ωt = (A + B) sin ωt where B / A = tan θ ₂ , B / C = tan α, C / A =
tan θ ₁

Next, the case where the vibration type actuator shown in FIGS. 21 and 24 is used will be described. However, the following description describes what alternating signals are supplied to the areas A to D of each piezoelectric element.

V _{A to} V _D correspond to the respective polarization regions A to D in FIG. 21B, and each of the piezoelectric elements 303 in FIG.
a to 303d.

[0167] X-Z axis of rotation theta ₁ inclined from the X axis in the _{plane, V A = Asin ωt + Bsin} ωt = (A + B) sin ωt V B = Acos ωt + Bcos ωt = (A + B) cos ωt V C = Asin ωt−Bsin ωt = (A−B) sin ωt V _D = −Acos ωt−Bcos ωt = − (A + B) cos ω
t where B / A = tan θ ₁ .

[0168] X-Y axis of rotation from the X-axis theta ₂ inclined in a _{plane, V A = Csin ωt + Dcos} ωt = √ (C 2 + D 2) sin
(Ωt + θ ₂ ) V _B = Ccos ωt−Dsin ωt = √ (C ² + D ² ) cos
(Ωt + θ ₂ ) V _C = _C sin ωt−Dcos ωt = −√ (C ² + D ² ) si
n (−ωt + θ ₂ ) V _D = −Ccos ωt + Dsin ωt = −√ (C ² + D ² )
cos (ωt + θ ₂ ) where D / C = tan θ ₂ .

[0169] Then, rotation of the shaft about the combined theta ₁ and theta _{2 is, V A = Asin ωt + Bcos} ωt + Csin ωt = (A + C) sin ωt + Bcos ωt = √ {(A + C) 2 + B 2} sin (ωt + α) V B = acos ωt + Bsin ωt + ccos ωt = (A + C) cos ωt + Bsin ωt = √ {(A + C) 2 + B 2} cos (-ωt + α) V C = Asin ωt-Bcos ωt-Csin ωt = (A-C) sin ωt-Bcos ωt = - ^{√ {(A-C) 2} + B 2} sin (-ωt + β) V D = -Acos ωt + Bsin ωt-ccos ωt = - (A + C) cos ωt + Bsin ωt = -√ {(A + C) 2 + B 2} cos (ωt + α) However , B / A = tan θ ² , C / A = tan θ ₁ , tan α
= B / A + C, tan β = B / (A−C).

FIG. 30 is a block diagram showing a driving circuit for driving and controlling the vibrating body shown in FIGS. 21 and 24.

Reference numeral 101 denotes a CPU for controlling the entire system, 102 denotes an oscillator, 103A and 103B denote phase shifters, and 104 denotes a selection switch.

Output circuits 105Z, 105A and 105B generate driving waveforms.
5B are connected to the polarization regions 303a to 303d, respectively, and apply an AC voltage (alternating signal). These piezoelectric elements are
The vibration in the axial direction, the vibration in the X-axis direction, and the vibration in the Y-axis direction are excited.

By changing the oscillation frequency of the oscillator 102 closer to or farther from the natural frequency of the vibrating body, the amplitude of the vibrating body can be changed.

A pulse width control circuit 107 controls the pulse width, and can control the amplitude of the AC voltage applied to the piezoelectric element. By controlling the pulse width, the applied voltage can be individually and independently changed, and the vibration amplitude can also be individually and independently changed.

The phase shifters 103A and 103B are connected to the oscillator 10
2 can change the phase of the output signal.

By applying three applied voltages having an applied voltage and a phase difference to the respective piezoelectric elements according to the above-described equations shown in the twentieth embodiment, rotation about an axis at an arbitrary angle can be achieved. Can be driven.

The vibrations generated in the piezoelectric element 103 (303) in the Z-axis direction, the X-axis direction, the Y-axis direction, and the voltages corresponding to the respective vibration amplitudes are detected signals 12SZ and 12S.
Information on the respective amplitudes and phases is input to the CPU 101 from the detection circuit 106 through A and 12SB.

Based on these information, the pulse width control circuit 107, the phase shifter 103A, the phase shifter 103B, the oscillator 10
2 is controlled by the CPU 101, and each vibration is adjusted so as to have a predetermined amplitude and phase difference.

Further, since the signal of the rotation detector 108 is fed back, it is possible to control the rotation axis and the rotation speed with higher accuracy.

Further, based on information from the detection circuit, the pulse width control circuit 107, the phase shifter 103A, the phase shifter 103
By controlling B and the like, the shape of the elliptical trajectory of the vibration can be arbitrarily controlled.

By performing such control, the following becomes possible.

1: Since the speed distribution in the feed direction of the vibrating body changes, the speed of the moving body can be changed.

2: Since the frictional force distribution changes, an elliptical locus with the least sliding loss can be created. For example, the inclination of the elliptical locus may be controlled so that the axis of the ellipse is orthogonal to the spherical surface of the moving object. Specifically, an elliptical locus can be generated in the radial direction of the inner peripheral surface 100a (formed obliquely with respect to the axis) of the elastic body 100 shown in FIG. 21 to improve the efficiency.

Alternatively, it is also possible to feed back the signals of a rotation detector and a wattmeter (not shown) to drive in the state of the most efficient elliptical locus.

3: Since the way of contact between the vibrating body and the moving body (displacement and speed in the normal direction) also changes, an elliptical trajectory that minimizes impact or generates no abnormal noise such as squealing is used. Can also.

The fourteenth to twentieth embodiments described above.
13 and FIG.
4. Needless to say, the vibration type actuator shown in FIG. 15 can be used.

Also, as shown in FIG. 21B, the x-axis and y-axis of the piezoelectric element are set at the center of the polarization region.
It is not limited to this.

Further, the vibrating body may be moved with respect to the moving body.

[0189]

According to the first to eighth aspects of the present invention, it is possible to guarantee the relative movement of one vibrating body and the contacting body with multiple degrees of freedom, regardless of the direction of gravity. And the contact body can be kept pressed.

According to the ninth aspect of the present invention, since the contact body comes into contact with the vibrating body with a constant suction force, the moving body can be driven under a stable pressing force.

According to the tenth aspect, since the contact body is brought into contact with the vibrating body with a variable suction force, the driving force of the contact body can be evaluated by changing the pressing force. The output torque can be changed according to the load.

According to the eleventh aspect of the present invention, it is possible to reliably suck the air and apply the suction pressure to the vibrating body by the contact body.

According to the twelfth and thirteenth aspects, the contact body can be pressed against the elastic body with a positive pressure, so that the pressure can be easily adjusted. In addition, the holding member can prevent dust and the like from entering a contact portion between the contact body and the vibrating body. Further, since the movement of the holding member is enabled by one degree of freedom, the movement of another degree of freedom can be easily secured.

According to the fourteenth aspect, the contact area between the vibrating body and the contact body is increased, the contact is stabilized, and the output torque is increased. In addition, the allowable range of the dimensional error at the time of processing the part is expanded.

According to the fifteenth aspect, the vibrating body can be supported without affecting the primary longitudinal vibration mode and the secondary transverse vibration mode of the vibrating body. The used multi-degree-of-freedom vibration type actuator can be supported.

According to the sixteenth and seventeenth aspects of the present invention, a small vibration type driving device using a multi-degree-of-freedom vibration type actuator can be realized, and it can be used precisely in a small place such as a medical machine which is hard to reach by humans. Work can be done.

[Brief description of the drawings]

1A and 1B show a technique 1 as a premise of the present invention, wherein FIG. 1A is an external perspective view of a vibrating body, FIG. 1B is a first mode of longitudinal vibration of the vibrating body, and FIGS. In the second mode.

2A and 2B show a technique 2 as a premise of the present invention, wherein FIG. 2A is an external perspective view of a vibrating body, FIG. 2B is a primary mode of longitudinal vibration of the vibrating body, and FIGS. In the second mode.

FIG. 3 is a cross-sectional view of a vibration-type actuator showing a technique 3 as a premise of the present invention.

FIG. 4 is a sectional view of a vibration-type actuator showing a technique 4 as a premise of the present invention.

FIG. 5 is a cross-sectional view of the vibration-type actuator according to the first embodiment of the present invention.

FIG. 6 is a sectional view of a vibration-type actuator according to a second embodiment of the present invention.

FIG. 7 is a sectional view of a vibration-type actuator according to a third embodiment of the present invention.

FIG. 8 is a sectional view of a vibration-type actuator according to a fourth embodiment of the present invention.

FIG. 9 is an external perspective view of a vibration-type actuator according to a fifth embodiment of the present invention.

FIG. 10 is an exploded perspective view of the vibrating body of FIG. 9;

11A and 11B are a side view and a top view showing a state where the vibrating body of FIG. 9 is supported.

FIG. 12 is a side view showing a sixth embodiment of the present invention.

FIG. 13 is a schematic view showing a seventh embodiment of the present invention.

FIG. 14 is a side view showing an eighth embodiment of the present invention.

FIG. 15 is an external perspective view showing a ninth embodiment of the present invention.

FIG. 16 is a perspective view of a ring-shaped vibrating body.

FIG. 17 is a perspective view of a conventional spherical vibration type actuator.

FIG. 18 is a sectional view of a conventional vibration type actuator.

FIG. 19 is a drive circuit diagram according to a fifth embodiment.

FIG. 20 is a circuit diagram of the output circuit of FIG. 19;

FIGS. 21A and 21B show a tenth embodiment, in which FIG. 21A is an external perspective view of a vibrating body and vibration displacement in each direction;
(B) is a plan view of the piezoelectric element.

FIGS. 22A and 22B show an eleventh embodiment, in which FIG. 22A is an external perspective view of a vibrating body, FIG. 22B is a view showing the arrangement direction and polarization direction of a piezoelectric element, and FIGS. FIG.

FIG. 23 is a diagram showing suction holding means for holding the vibrating body and the contact body in FIG. 22;

24A and 24B show a twelfth embodiment, in which FIG. 24A is an external perspective view of a vibrating body, and FIGS. 24B, 24C, and 24D are views showing displacement of the vibrating body.

FIG. 25 is a longitudinal sectional view of a vibration-type actuator according to a thirteenth embodiment.

26A and 26B show a vibration-type actuator according to a fourteenth embodiment, in which FIG. 26A is a vertical sectional view taken along the line AA ′ of FIG.
(B) is a top view of (a).

27A and 27B show a vibration-type actuator according to a fifteenth embodiment, in which FIG. 27A is a vertical cross-sectional view taken along the line BB ′ of FIG.
(B) is a top view of (a), (c) is a side view.

FIG. 28 is a vector diagram for explaining the principle of the sixteenth embodiment.

FIG. 29 is a vector diagram for explaining the principle of the sixteenth embodiment.

FIG. 30 is a block diagram of a drive circuit according to a sixteenth embodiment.

[Explanation of symbols]

1, 101, 102, 201, 202, 301, 30
2, 401 to 403 Elastic body 2, 102, 206, 306, 406 Moving body 3, 103, 203, 204, 404, 405 Piezoelectric element 3a, 3b Vertical vibration piezoelectric element 3c Vertical vibration detection piezoelectric element 3e to 3h Horizontal Vibration piezoelectric element 3d, 3i Lateral vibration detection piezoelectric element 303a to 303d Piezoelectric element 4 Head elastic body 4a Head tip concave part 4b Concave groove 4c Neck (recess) 5a Intermediate elastic body 5b Rear elastic body 5c First elastic body 5d Second elastic body 5e Third elastic body 6,407 Fastening bolt 6a Fastening shaft recess 7 Permanent magnet 8 Coil 9 Support plate 9a Central part 10 Contact body 11 Collar part 12 Electrode plate 13 Ground electrode plate 14 Sheet 15 Support base 16 Glove 17 Chassis 18 Camera 19 Vibration body 19a Elastic body 19b Piezoelectric element 20a, 20b Moving body 21 Spring 30 Meaning support base 40,50,6
0 Vibration body 41 Control system 42, 43 Moving body 408 Hose 410 Case 411 Support member 412 Upper cover 413 Ball 414 Coil spring 415 Pressing member

Continuation of front page (72) Inventor Nobuyuki Kojima 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc.

Claims (18)

[Claims] 1. An elastic body is provided with an electro-mechanical energy conversion element that excites a vertical vibration and a plurality of horizontal vibrations having different phases. A vibrating body that selectively combines at least two vibrations of the elastic body to form a circular or elliptical motion at a point in an arbitrary plane of the elastic body, and a contact body that contacts the vibrating body and moves relative to the vibrating body. A vibrating actuator comprising: a vibrating body and the contact body being pressurized by pressurizing means. 2. A vibrating body having vibration generating means for generating vibration displacements in at least three different directions.
A vibration type in which the vibrating body generates a combined vibration combining vibration displacements in at least two directions of the vibration displacements in the directions, and relatively moves the vibrating body and a contact body in contact with the vibrating body in an arbitrary direction. An actuator, wherein the vibrating body and the contact body are pressurized by pressurizing means. 3. A vibrating body having vibration generating means for generating vibration displacements in at least three different directions, wherein:
A vibration type actuator that gives a vibration displacement in a direction to generate a synthetic vibration in the vibrating body, and relatively moves the vibrating body and a contact body that contacts the vibrating body in an arbitrary direction, wherein the vibrating body and the vibrating body A vibration-type actuator, wherein a pressure is applied to a contact body by a pressure means. 4. A vibrating body provided with an electromechanical energy conversion element that excites at least three different vibration displacements in an elastic body, wherein at least two vibration displacements are selected from among the three different vibration displacements. A vibration type actuator that generates a combined vibration that is combined with each other, and relatively moves the vibrating body and a contact body that comes into contact with the vibrating body in an arbitrary direction, wherein the electro-mechanical energy conversion element is in a different direction. A vibration-type actuator having a polarization region that is also used for vibration displacement, and pressurizing the vibrating body and the contact body with a pressing unit. 5. The vibration body and a contact body that contacts the vibration body are relatively moved in an arbitrary direction by changing the ratio of each component of the combination of the vibration displacements in at least three directions. The vibration type actuator according to claim 2 or 3, wherein 6. The vibration type actuator according to claim 1, wherein said pressurizing means suctions and presses said vibrating body and said contact body by magnetic force. 7. The vibration type actuator according to claim 1, wherein said pressurizing means sucks air to pressurize said contact body to said vibrating body. 8. The vibration-type actuator according to claim 1, wherein the pressing unit applies an elastic force to the contact body to press the vibration body. 9. The pressure means for attracting and pressing the vibrating body and the contact body by magnetic force is constituted by a permanent magnet provided on one of the vibrating body and the contact body. A vibration-type actuator according to claim 6. 10. The pressurizing means for attracting and pressurizing the vibrating body and the contact body by a magnetic force is an electromagnet force formed by energizing a coil provided on one of the vibrating body and the contacting body. 7. The structure according to claim 6, wherein
The vibration-type actuator according to item 1. 11. The pressurizing means for sucking air to suck and press the contact body against the vibrating body, wherein the pressurizing means presses air from a communication port communicating with a concave portion formed in a contact portion of the vibrating body with the contact body. The vibration-type actuator according to claim 7, wherein the vibration type actuator is sucked. 12. The pressing means for applying an elastic force to the contact body to press the vibrating body, wherein the pressing means elastically presses the contact body elastically so as to guarantee free movement with respect to the elastic body. The vibration type actuator according to claim 8, further comprising a dynamic pressing member, and a holding member that receives a reaction force of the elastic pressing member. 13. The vibration-type actuator according to claim 12, wherein the holding member is disposed around the contact body, and is attached to the vibrator so as to have one degree of freedom. 14. The vibration body according to claim 1, wherein a contact member elastically contacting the contact body is provided in the vicinity of a contact portion with the contact body. The vibration-type actuator according to item 1. 15. The vibration type according to claim 1, wherein the vibrating body has a supporting body having a plurality of supporting arms extending radially outward. Actuator. 16. A vibration type driving device, wherein the vibration type actuator according to any one of claims 1 to 15 is provided at a joint portion of an arm which performs a motion with a plurality of degrees of freedom. 17. The vibration type according to claim 16, further comprising remote control means for operating a vibration type actuator provided at a joint portion of said arm by remote control in accordance with a movement of a joint of an operator. Drive. 18. A vibration-type actuator according to claim 1, which is provided at a joint of an arm that performs a multi-degree-of-freedom movement, and is used for laparoscopic surgery or microsurgery. Characteristic vibration type driving device.