JPH04326902A - Draining detergent - Google Patents
Draining detergentInfo
- Publication number
- JPH04326902A JPH04326902A JP9522391A JP9522391A JPH04326902A JP H04326902 A JPH04326902 A JP H04326902A JP 9522391 A JP9522391 A JP 9522391A JP 9522391 A JP9522391 A JP 9522391A JP H04326902 A JPH04326902 A JP H04326902A
- Authority
- JP
- Japan
- Prior art keywords
- methanol
- water
- cleaning agent
- ethanol
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003599 detergent Substances 0.000 title abstract description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims abstract description 105
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 55
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 claims abstract description 48
- 239000012459 cleaning agent Substances 0.000 claims description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 39
- 230000000694 effects Effects 0.000 abstract description 14
- 239000002904 solvent Substances 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 9
- 238000003795 desorption Methods 0.000 description 8
- 239000012046 mixed solvent Substances 0.000 description 7
- 230000002209 hydrophobic effect Effects 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 4
- 239000002075 main ingredient Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- AJDIZQLSFPQPEY-UHFFFAOYSA-N 1,1,2-Trichlorotrifluoroethane Chemical compound FC(F)(Cl)C(F)(Cl)Cl AJDIZQLSFPQPEY-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011538 cleaning material Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- -1 it is non-flammable Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
Landscapes
- Extraction Or Liquid Replacement (AREA)
- Detergent Compositions (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、物品の表面に付着した
水の水切り除去に用いる水切り洗浄剤に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drain cleaning agent used for draining and removing water adhering to the surface of articles.
【０００２】0002
【従来の技術】電子工業、精密工業、光学工業等の分野
において、切削、研磨が行なわれた物品は、通常、水洗
に供される。水洗等により表面に水が付着した物品は、
そのまま乾燥すると表面にシミやサビが発生するため、
水洗後に水切り洗浄剤に浸漬され、上記付着した水の除
去が行なわれる。このような水切り洗浄剤としては、例
えば疎水性溶剤を主剤とし、これに親水性溶剤が添加さ
れたものがある。この水切り洗浄剤は、上記親水性溶剤
が、物品の付着水と相溶することにより、物品からの付
着水の脱離を生じさせる働きを利用したものである。ま
た、脱離した水の大部分は、上記洗浄剤の主剤が疎水性
溶剤であるため、該洗浄剤中に溶け込むことなく分離さ
れる。かかる水切り洗浄剤において、疎水性溶剤として
は、１，１，２−トリクロロ−１，２，２−トリフルオ
ロエタン、ジクロロメタン等が、また、親水性溶剤とし
ては、メタノール、エタノール、イソプロパノール等が
用いられている。しかし、ジクロロメタンの疎水性溶剤
に、親水性溶剤としてメタノールおよびエタノールを併
用したものは知られていない。2. Description of the Related Art In fields such as the electronic industry, precision industry, and optical industry, articles that have been cut and polished are usually washed with water. Items with water attached to their surfaces due to washing etc.
If left to dry as is, stains and rust will occur on the surface, so
After washing with water, it is immersed in a draining detergent to remove the adhering water. Examples of such drain cleaning agents include those that have a hydrophobic solvent as a main ingredient and a hydrophilic solvent added thereto. This drain cleaning agent utilizes the function of the above-mentioned hydrophilic solvent to cause the adhering water to be removed from the article by being compatible with the adhering water. Moreover, most of the desorbed water is separated without being dissolved in the cleaning agent because the main ingredient of the cleaning agent is a hydrophobic solvent. In such a drain cleaning agent, 1,1,2-trichloro-1,2,2-trifluoroethane, dichloromethane, etc. are used as the hydrophobic solvent, and methanol, ethanol, isopropanol, etc. are used as the hydrophilic solvent. It is being However, it is not known to use dichloromethane as a hydrophobic solvent together with methanol and ethanol as hydrophilic solvents.
【０００３】0003
【発明が解決しようとする課題】このような水切り洗浄
剤において、親水性溶剤としてメタノールを用いたもの
は、メタノールの引火性の高さから、十分な水脱離効果
を得るだけメタノールを添加すると、液が可燃性となり
安全性に問題がある。また、エタノール等の他の親水性
溶剤を用いたものは、水脱離効果が小さく、水の脱離に
時間がかかったり、物品の表面に水が残留してシミを形
成する問題がある。[Problem to be solved by the invention] In such drain cleaning agents, those that use methanol as a hydrophilic solvent have a problem with adding enough methanol to obtain a sufficient water removal effect due to the high flammability of methanol. , the liquid becomes flammable and poses a safety problem. In addition, those using other hydrophilic solvents such as ethanol have a problem that the water removal effect is small, it takes time to remove water, and water remains on the surface of the article to form stains.
【０００４】このような背景から、高い水脱離効果を有
し、不燃性の水切り洗浄剤の開発が大きな課題であった
。[0004] Against this background, the development of a nonflammable drain cleaning agent that has a high water desorption effect has been a major challenge.
【０００５】[0005]
【課題を解決するための手段】本発明者らは、上記課題
を解決すべく鋭意研究を重ねてきた。その結果、ジクロ
ロメタンに特定量のメタノールおよびエタノールを混合
することにより上記課題が解決されることを見い出し、
本発明を完成するに至った。[Means for Solving the Problems] The present inventors have made extensive research in order to solve the above problems. As a result, they discovered that the above problem could be solved by mixing specific amounts of methanol and ethanol with dichloromethane,
The present invention has now been completed.
【０００６】すなわち、本発明は、ジクロロメタン、メ
タノールおよびエタノールよりなり、メタノールとエタ
ノールとの合計量が１３重量％以上２５重量％以下で、
かつメタノールの量が３重量％以上１２重量％未満であ
る水切り洗浄剤である。That is, the present invention comprises dichloromethane, methanol and ethanol, and the total amount of methanol and ethanol is 13% by weight or more and 25% by weight or less,
And the amount of methanol is 3% by weight or more and less than 12% by weight.
【０００７】本発明の水切り洗浄剤の主剤はジクロロメ
タンである。かかるジクロロメタンは疎水性であり、そ
の結果、本発明の水切り洗浄剤によれば、物品から脱離
した水の大部分は、上記洗浄剤に混入することなく、少
量のメタノール、エタノール、ジクロロメタンを含有し
た水溶液として分離される。この水溶液は、水切り洗浄
剤の液面に浮上するため、本発明の水切り洗浄剤では、
物品から脱離した水を、容易に取り除くことができる。
尚、取り除いた水を蒸留装置等に導入し、含有されるメ
タノール、エタノール、ジクロロメタンを分離してそれ
ぞれ再度洗浄剤の原料として用いてもよい。The main ingredient of the drain cleaning agent of the present invention is dichloromethane. Such dichloromethane is hydrophobic, and as a result, according to the drain cleaning agent of the present invention, most of the water desorbed from the article contains small amounts of methanol, ethanol, and dichloromethane without being mixed into the cleaning agent. It is separated as an aqueous solution. Since this aqueous solution floats to the surface of the drain cleaning agent, in the drain cleaning agent of the present invention,
Water desorbed from the article can be easily removed. Note that the removed water may be introduced into a distillation apparatus or the like to separate the methanol, ethanol, and dichloromethane contained therein, and each may be used again as a raw material for a cleaning agent.
【０００８】次に、本発明の水切り洗浄剤は、上記ジク
ロロメタンを主剤とし、さらに前記特定量のメタノール
とエタノールを含む。エタノールはメタノールに比べて
引火性が小さいため、この洗浄剤は不燃性である。しか
も、エタノールはメタノールに比べて水の溶解性が小さ
いにもかかわらず、この洗浄剤は、水脱離効果において
メタノールを単独で用いたものに比べてほとんど低下し
ていない。本発明において、このメタノールとエタノー
ルとの使用量は、まずその合計量が１３重量％以上２５
重量％以下、好ましくは１５重量％以上２０重量％以下
である。メタノールとエタノールとの合計量が１３重量
％より小さい場合には、得られる洗浄剤の水脱離効果が
小さいものとなり好ましくない。また、この合計量が２
５重量％より大きい場合には、洗浄前の水脱離効果は頭
打ちとなりそれ以上の向上がみられない外、物品から脱
離した水が洗浄剤中に溶け込む様になり好ましくない。[0008] Next, the drain cleaning agent of the present invention has the above-mentioned dichloromethane as a main ingredient, and further contains the above-mentioned specified amounts of methanol and ethanol. This cleaning agent is nonflammable because ethanol is less flammable than methanol. Moreover, even though ethanol has a lower solubility in water than methanol, this detergent shows almost no decrease in water desorption effect compared to one using methanol alone. In the present invention, the amount of methanol and ethanol used is such that the total amount is 13% by weight or more and 25% by weight.
It is not more than 15% by weight and not more than 20% by weight. If the total amount of methanol and ethanol is less than 13% by weight, the water desorption effect of the resulting detergent will be undesirable. Also, this total amount is 2
If it is more than 5% by weight, the water desorption effect before washing reaches a ceiling and no further improvement is seen, and the water desorbed from the article begins to dissolve into the cleaning agent, which is not preferable.
【０００９】さらに、本発明の水切り洗浄剤は、上記メ
タノールの使用量が３重量％以上１２重量％未満、好ま
しくは５重量％以上１１重量％以下である。この量が３
重量％より小さい場合、得られる洗浄剤は、水脱離効果
の小さいものとなり、洗浄後の物品の表面に水が残留し
、シミが生じるようになる。メタノールの量が１２重量
％以上の場合、得られる洗浄剤は可燃性となり、安全性
に劣るものとなる。Furthermore, in the drain cleaning agent of the present invention, the amount of methanol used is 3% by weight or more and less than 12% by weight, preferably 5% by weight or more and less than 11% by weight. This amount is 3
If it is less than % by weight, the resulting cleaning agent will have a small water desorption effect, and water will remain on the surface of the article after cleaning, resulting in stains. If the amount of methanol is 12% by weight or more, the resulting cleaning agent will be flammable and less safe.
【００１０】尚、本発明の水切り洗浄剤において、使用
する上記ジクロロメタン、メタノールおよびエタノール
の各溶剤は、それぞれ特に制限されるものではないが、
いずれも精製度の高いものを用いるほど、該溶剤中の不
純物の付着による洗浄物の汚染等が防止でき好適である
。[0010] In the drain cleaning agent of the present invention, the above-mentioned dichloromethane, methanol and ethanol solvents used are not particularly limited, but
The higher the degree of purification is used, the more it is possible to prevent contamination of the cleaning material due to adhesion of impurities in the solvent.
【００１１】本発明の水切り洗浄剤に、水が付着した物
品を浸漬すると、水は、洗浄剤中のメタノールおよびエ
タノールと溶け合い水溶液となり、該物品から脱離する
。そして、この物品を洗浄剤より取り出し、付着する溶
剤を乾燥させることにより、物品の水切りを良好に行な
うことができる。When an article with water attached to it is immersed in the drain cleaning agent of the present invention, the water dissolves with methanol and ethanol in the cleaning agent to form an aqueous solution and is released from the article. Then, by removing the article from the cleaning agent and drying the adhering solvent, the article can be drained well.
【００１２】0012
【発明の効果】前記した通り、ジクロロメタンにメタノ
ールを添加した水切り洗浄剤は、十分な脱離効果を発揮
させるために必要な量のメタノールを添加すると液が可
燃性となる。これに対して、本発明の水切り洗浄剤は、
メタノールの一部をエタノールに置換えているため不燃
性で、しかも、その水脱離効果については、上記メタノ
ールを単独で添加したものと比べてほとんど低下してい
ない。従って、本発明の水切り洗浄剤は、洗浄の際に、
迅速に物品から付着水が脱離し、また、洗浄後の物品に
水が残留してシミが生じたりすることがない外、取り扱
い上においても安全である。さらに、本発明の水切り洗
浄剤によれば、物品の連続洗浄等により洗浄剤中に水が
混入し、その水分量が増加しても、水脱離効果が長期間
維持され、洗浄剤としての寿命が長くなるという効果が
得られる。Effects of the Invention As described above, the drain cleaning agent prepared by adding methanol to dichloromethane becomes flammable when the amount of methanol required to exhibit a sufficient desorption effect is added. On the other hand, the drain cleaning agent of the present invention is
Since a part of methanol is replaced with ethanol, it is non-flammable, and its water desorption effect is hardly lower than when methanol is added alone. Therefore, the drain cleaning agent of the present invention, during cleaning,
Adhering water is quickly removed from the article, water does not remain on the article after washing, and stains do not occur, and it is safe to handle. Furthermore, according to the drain cleaning agent of the present invention, even if water gets mixed into the cleaning agent due to continuous washing of articles and the water content increases, the water removal effect is maintained for a long period of time, and it can be used as a cleaning agent. The effect of extending the lifespan can be obtained.
【００１３】従って、このような効果を有する本発明の
水切り洗浄剤は、水が付着した物品、例えばシリコンウ
エハー、液晶用ガラス基板、セラミックス等の電子工業
部品、ベアリング等の精密工業部品、レンズ、石英ガラ
ス等の光学工業部品などを水切り洗浄する場合において
、有用な水切り洗浄剤として使用できる。[0013] Therefore, the drain cleaning agent of the present invention having such an effect can be used on articles to which water has adhered, such as silicon wafers, glass substrates for liquid crystals, electronic industrial parts such as ceramics, precision industrial parts such as bearings, lenses, etc. It can be used as a useful drain cleaning agent when cleaning optical industrial parts such as quartz glass.
【００１４】[0014]
【実施例】以下、本発明を具体的に説明するために実施
例を挙げて説明するが、本発明はこれらの実施例に限定
されるものではない。[Examples] The present invention will be described below with reference to Examples to specifically explain the present invention, but the present invention is not limited to these Examples.
【００１５】実施例１
電子工業用グレードのジクロロメタン（徳山曹達（株）
製）、エタノール（和光純薬（株）製）、メタノール（
関東化学（株）製）およびイソプロパノール（徳山曹達
（株）製）を用い、表１に示す組成の混合溶剤を調製し
た。得られた混合溶剤について、クリーブランド開放式
引火点試験方法（ＪＩＳ Ｋ２２６５）に準じてその
引火性を調べた。Example 1 Electronic industry grade dichloromethane (Tokuyama Soda Co., Ltd.)
(manufactured by Wako Pure Chemical Industries, Ltd.), ethanol (manufactured by Wako Pure Chemical Industries, Ltd.), methanol (manufactured by Wako Pure Chemical Industries, Ltd.),
A mixed solvent having the composition shown in Table 1 was prepared using Kanto Kagaku Co., Ltd.) and isopropanol (Tokuyama Soda Co., Ltd.). The obtained mixed solvent was examined for flammability according to the Cleveland open flash point test method (JIS K2265).
【００１６】得られた各混合溶剤の１ｌを容器に入れ、
これに超純水中に浸漬処理した４インチサイズのシリコ
ンウエハを沈め、水がウエハ表面から脱離するのに要す
る時間を測定した。Pour 1 liter of each of the obtained mixed solvents into a container,
A 4-inch silicon wafer immersed in ultrapure water was submerged in this, and the time required for water to separate from the wafer surface was measured.
【００１７】また、ウエハより脱離した水の洗浄剤との
分離状態を観察し、良好に水が分離し洗浄剤上面に水層
が形成されるものを○、脱離した水が短時間に洗浄剤中
に溶解するものを×で評価した。[0017] We also observed the state of separation of the water desorbed from the wafer from the cleaning agent, and determined that the water was separated well and a water layer was formed on the top of the cleaning agent. What dissolves in the cleaning agent was evaluated as x.
【００１８】ウエハから水が脱離後、該ウエハを溶剤中
より取り出し、乾燥した。乾燥後、得られた各ウエハ表
面のシミの有無を、超高輝度照明装置（セナー（株）製
モデル３５０／１１）を用いてウエハ表面に光を照射し
、その光の散乱状態により観察した。この場合シミは白
い斑点として認められた。以上の結果を表１に示す。After the water was removed from the wafer, the wafer was taken out of the solvent and dried. After drying, the presence or absence of stains on the surface of each obtained wafer was observed by irradiating light onto the wafer surface using an ultra-high-intensity illumination device (Model 350/11 manufactured by Senar Co., Ltd.) and observing the state of scattering of the light. . In this case, the stain was recognized as a white spot. The above results are shown in Table 1.
【００１９】[0019]
【表１】[Table 1]
【００２０】[0020]
【表２】[Table 2]
【００２１】実施例２
ジクロロメタンに対し、メタノール１０重量％およびエ
タノール５重量％が混合された混合溶剤とメタノール１
０重量％およびエタノール１０重量％が混合された混合
溶剤を調製し、それぞれを用いて実施例１におけるシリ
コンウエハからの水脱離時間の測定を、連続して１０回
実施した。また、比較例として、ジクロロメタンに対し
メタノール１０重量％が混合された混合溶剤、およびエ
タノール２０重量％が混合された混合溶剤についても、
同様の操作を実施した。結果を表２に示す。Example 2 A mixed solvent in which 10% by weight of methanol and 5% by weight of ethanol were mixed with dichloromethane and methanol 1
A mixed solvent containing 0% by weight and 10% by weight of ethanol was prepared, and the water desorption time from the silicon wafer in Example 1 was measured 10 times using each solvent. In addition, as a comparative example, a mixed solvent in which 10% by weight of methanol was mixed with dichloromethane and a mixed solvent in which 20% by weight of ethanol was mixed were also used.
A similar operation was performed. The results are shown in Table 2.
【００２１】[0021]
【表３】[Table 3]
Claims (1)
タノールよりなり、メタノールとエタノールとの合計量
が１３重量％以上２５重量％以下で、かつメタノールの
量が３重量％以上１２重量％未満である水切り洗浄剤。1. A drain cleaning agent comprising dichloromethane, methanol and ethanol, wherein the total amount of methanol and ethanol is 13% by weight or more and 25% by weight or less, and the amount of methanol is 3% by weight or more and less than 12% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3095223A JP3053894B2 (en) | 1991-04-25 | 1991-04-25 | Drain cleaner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3095223A JP3053894B2 (en) | 1991-04-25 | 1991-04-25 | Drain cleaner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04326902A true JPH04326902A (en) | 1992-11-16 |
| JP3053894B2 JP3053894B2 (en) | 2000-06-19 |
Family
ID=14131751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3095223A Expired - Fee Related JP3053894B2 (en) | 1991-04-25 | 1991-04-25 | Drain cleaner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3053894B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6277203B1 (en) | 1998-09-29 | 2001-08-21 | Lam Research Corporation | Method and apparatus for cleaning low K dielectric and metal wafer surfaces |
-
1991
- 1991-04-25 JP JP3095223A patent/JP3053894B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6277203B1 (en) | 1998-09-29 | 2001-08-21 | Lam Research Corporation | Method and apparatus for cleaning low K dielectric and metal wafer surfaces |
| US6319330B1 (en) | 1998-09-29 | 2001-11-20 | Lam Research Corporation | Method and apparatus for cleaning low K dielectric and metal wafer surfaces |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3053894B2 (en) | 2000-06-19 |
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