JPH04296802A - Manufacture of optical fiber fixing substrate - Google Patents
Manufacture of optical fiber fixing substrateInfo
- Publication number
- JPH04296802A JPH04296802A JP8584591A JP8584591A JPH04296802A JP H04296802 A JPH04296802 A JP H04296802A JP 8584591 A JP8584591 A JP 8584591A JP 8584591 A JP8584591 A JP 8584591A JP H04296802 A JPH04296802 A JP H04296802A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- groove
- substrate
- fixing
- fiber fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 51
- 239000000758 substrate Substances 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000011521 glass Substances 0.000 claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 10
- 238000002425 crystallisation Methods 0.000 claims abstract description 7
- 230000008025 crystallization Effects 0.000 claims abstract description 7
- 238000001816 cooling Methods 0.000 claims abstract 2
- 238000000034 method Methods 0.000 abstract description 16
- 238000003825 pressing Methods 0.000 abstract description 5
- 238000007730 finishing process Methods 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000010583 slow cooling Methods 0.000 abstract 1
- 238000000227 grinding Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 7
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910008556 Li2O—Al2O3—SiO2 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Mechanical Coupling Of Light Guides (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は複数の光ファイバを一本
づつＶ溝に固定する形式の光ファイバ固定用基板の製造
法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a substrate for fixing optical fibers in which a plurality of optical fibers are fixed one by one in a V-groove.
【０００２】0002
【従来の技術】例えば、１２５μｍ 程度の直径を有す
る光ファイバ固定用基板は、従来から種々のものが知ら
れている。いずれのタイプの基板においても、固定した
光ファイバが軸ずれを起こすと光伝送損失が大きくなる
ため、光ファイバ固定用基板における光ファイバ固定部
は、従来から例えば０．５μｍ 以下の高い加工精度を
要求されている。図２に、光ファイバ固定部としてＶ溝
１を固定すべき光ファイバ２の数だけ設けてなる光ファ
イバ固定用基板３の斜視図を示すように、光ファイバ２
を固定するＶ溝１は例えば深さ百数十μｍ の微細なも
のである。2. Description of the Related Art Various substrates for fixing optical fibers having a diameter of, for example, about 125 μm have been known. In any type of substrate, optical transmission loss increases if the fixed optical fiber is misaligned, so the optical fiber fixing part of the optical fiber fixing substrate has traditionally been manufactured with a high processing accuracy of, for example, 0.5 μm or less. requested. As shown in FIG. 2, a perspective view of an optical fiber fixing substrate 3 in which V grooves 1 are provided as the number of optical fibers 2 to be fixed as optical fiber fixing parts.
The V-groove 1 for fixing is a minute one with a depth of, for example, a hundred and several tens of micrometers.
【０００３】このため、上述した形状の光ファイバ固定
用基板３の製造方法としては、高精度を達成することの
できる、アルミナ、ジルコニア、メノー等のセラミック
ス材料を研削加工して光ファイバ固定部をなすＶ溝を加
工する方法、シリコン材料をエッチングしてＶ溝を加工
する方法、樹脂材料をインジェクション成形して丸穴を
形成する方法が従来から一般的に用いられている。Therefore, as a manufacturing method for the optical fiber fixing substrate 3 having the above-mentioned shape, the optical fiber fixing part is formed by grinding a ceramic material such as alumina, zirconia, or agate, which can achieve high precision. Conventionally, commonly used methods include forming a V-groove, etching a silicon material to form a V-groove, and forming a round hole by injection molding a resin material.
【０００４】0004
【発明が解決しようとする課題】しかしながら、シリコ
ン材料を用いる方法や樹脂材料を用いる方法ではより高
精度で微細のＶ溝を形成することができないため、セラ
ミックス材料を研削加工する方法が用いられるようにな
ってきたが、この場合は、セラミックス材料を加工する
プロセスが、素材を焼成して焼結体を得た後、この焼結
体を平面研削して、さらにダイヤモンド砥石によりＶ溝
を加工する必要があり、加工時間が例えば８心の光ファ
イバを同時に固定するための固定基板で５〜１０時間程
度かかり問題があるとともに、研削の対象がセラミック
スであるため砥石の摩耗が激しい問題があった。さらに
、加工が難しいのに起因して、一つの光ファイバ固定用
基板で固定できるファイバの数が制限され、超多心の光
ファイバを同時に固定できる基板を得ることができない
問題があった。[Problems to be Solved by the Invention] However, since it is not possible to form finer V-grooves with higher precision using methods using silicon materials or methods using resin materials, methods of grinding ceramic materials have been used. However, in this case, the process of processing the ceramic material involves firing the material to obtain a sintered body, then surface-grinding this sintered body, and then cutting a V-groove using a diamond grindstone. For example, it takes about 5 to 10 hours to fix a fixing board for fixing 8-core optical fibers at the same time, which poses a problem.In addition, since the object to be ground is ceramics, there is a problem of severe wear of the grinding wheel. . Furthermore, due to the difficulty of processing, the number of fibers that can be fixed on one optical fiber fixing substrate is limited, and there is a problem that it is not possible to obtain a substrate that can simultaneously fix a large number of optical fibers.
【０００５】本発明の目的は上述した課題を解消して、
加工時間が短くてすみ、砥石の長寿命化が達成できると
ともに、超多心加工が可能で超多心の光ファイバを同時
に固定することのできる光ファイバ固定用基板の製造法
を提供しようとするものである。[0005] The purpose of the present invention is to solve the above-mentioned problems,
An object of the present invention is to provide a method for manufacturing an optical fiber fixing substrate that can shorten processing time, prolong the life of the grinding wheel, and also be capable of processing ultra-multi-core optical fibers and simultaneously fixing ultra-multi-core optical fibers. It is something.
【０００６】[0006]
【課題を解決するための手段】本発明の光ファイバ固定
用基板は、複数の光ファイバを固定するためのＶ溝を有
する光ファイバ固定用基板の製造法において、結晶化ガ
ラスを溶解し、ガラスの軟化点以上の温度において金型
プレスをしてＶ溝を有する基板を形成し、冷却後、結晶
化のための熱処理を行い、その後、Ｖ溝を砥石で仕上げ
加工することを特徴とするものである。[Means for Solving the Problems] The optical fiber fixing substrate of the present invention is a method for manufacturing an optical fiber fixing substrate having a V-groove for fixing a plurality of optical fibers. A substrate having a V-groove is formed by mold pressing at a temperature higher than the softening point of It is.
【０００７】[0007]
【作用】上述した構成において、材料として結晶化ガラ
スを使用し、柔らかい状態で複数のＶ溝に対応したサブ
ミクロン精度の金型により一度プレス加工した後、さら
にダイヤモンド砥石等によるＶ溝の仕上げ加工を行うこ
とにより、光ファイバ固定用の基板を作製しているため
、砥石を使用した時間のかかる研削加工を少なくでき、
加工時間の短縮化、砥石の長寿命化、および超多心加工
が可能な光ファイバ固定基板の製造法を得ることができ
る。[Operation] In the above structure, crystallized glass is used as the material, and after being pressed in a soft state using a mold with submicron precision that can accommodate multiple V-grooves, the V-grooves are further finished by a diamond grindstone, etc. By doing this, we are creating a substrate for fixing optical fibers, which reduces the time-consuming grinding process using a grindstone.
It is possible to obtain a method for manufacturing an optical fiber fixing substrate that can shorten processing time, extend the life of a grinding wheel, and process a large number of fibers.
【０００８】ここで、アルミナ等のセラミックスを使用
せず結晶化ガラス例えばＬｉ２ ＯーＡｌ２ Ｏ３ ー
ＳｉＯ２ 系の結晶化ガラスを使用するのは、軟化点以
上の温度であればプレス加工によりＶ溝の加工が可能で
あるとともに、その後の結晶化のための熱処理を必要と
するもののこの熱処理における収縮率は１％程度で、プ
レス成形した形状がほばそのまま結晶化のための熱処理
後も残るためである。また、金型を使用したプレス成形
を用いるのは、近年サブミクロンオーダのＶ溝を有する
金型を作製することができるようになったとともに、一
度金型を作ってしまえば繰り返し使用できるためである
。Here, the reason for using crystallized glass, for example, Li2 O-Al2 O3-SiO2 type crystallized glass without using ceramics such as alumina, is that if the temperature is above the softening point, the V-groove can be formed by pressing. Although it is possible to process and requires subsequent heat treatment for crystallization, the shrinkage rate during this heat treatment is about 1%, and the shape of the press-formed material remains almost unchanged even after the heat treatment for crystallization. be. In addition, press forming using a mold is used because in recent years it has become possible to create molds with V-grooves on the order of submicrons, and once the mold is made, it can be used repeatedly. be.
【０００９】[0009]
【実施例】図１は本発明の光ファイバ固定用基板の製造
法の流れを説明するためのフローチャートである。図１
に従って本発明の製造法を説明すると、まず例えばＬｉ
２ ＯーＡｌ２ Ｏ３ ーＳｉＯ２ 系の結晶化ガラス
を１４００〜１５００℃の温度に加熱して溶解する。次
に、溶解した結晶化ガラスを少量取り出し、軟化点以上
の温度である１０００〜１２００℃の温度で金型により
プレス成形をしてＶ溝を加工するとともに全体の形状を
加工して形成する。その後、一旦冷却する。次に、結晶
核を生成させ結晶化させるための熱処理を行う。その一
例の熱処理スケジュールは、室温から５０〜２００℃／
Ｈｒの昇温速度で一次結晶化温度（結晶核形成）まで昇
温し、一定時間保持後、さらに５０〜２００℃／Ｈｒの
昇温速度で二次結晶化温度（結晶成長）まで昇温し、一
定時間保持後降温するスケジュールである。最後に、結
晶化して硬化した結晶化ガラスのプレスにより成形した
Ｖ溝を、ダイヤモンド砥石で研削して、最終製品として
の光ファイバ固定用基板を得ている。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a flowchart illustrating a method for manufacturing an optical fiber fixing substrate according to the present invention. Figure 1
To explain the manufacturing method of the present invention according to the following, first, for example, Li
2 O-Al2 O3 -SiO2-based crystallized glass is heated to a temperature of 1400 to 1500°C to melt it. Next, a small amount of the molten crystallized glass is taken out and press-molded using a mold at a temperature of 1000 to 1200° C., which is a temperature higher than the softening point, to form a V-groove and to form the overall shape. Then, cool it once. Next, heat treatment is performed to generate crystal nuclei and crystallize. An example of the heat treatment schedule is from room temperature to 50-200℃/
The temperature is raised to the primary crystallization temperature (crystal nucleus formation) at a heating rate of 50 to 200°C/Hr, and after holding for a certain period of time, the temperature is further raised to the secondary crystallization temperature (crystal growth) at a heating rate of 50 to 200°C/Hr. , the schedule is to hold the temperature for a certain period of time and then lower the temperature. Finally, the V-groove formed by pressing the crystallized and hardened crystallized glass is ground with a diamond grindstone to obtain an optical fiber fixing substrate as a final product.
【００１０】図２は本発明の製造法により得られる光フ
ァイバ固定用基板の一例の構造を示す図である。図２に
示す例では、光ファイバ固定用基板は３は、光ファイバ
２を固定するためのＶ溝１を光ファイバ２の数だけ等間
隔に有するＶ溝基板３ー１と、Ｖ溝１に固定された光フ
ァイバ２を押圧して固定するための光ファイバ押え基板
３ー２とを、接着剤で固定して構成している。Ｖ溝１の
形状は固定すべき光ファイバ２の直径に応じて変わるが
、その一例として直径１２５μｍの光ファイバ２を固定
する場合は、Ｖ溝１に光ファイバ２を装着した際光ファ
イバ２の一部がＶ溝基板３ー１の表面よりも若干突出し
た状態となるようにＶ溝加工することが好ましい。上述
した構成は従来の構成と同様であるが、本発明で重要な
のは、Ｖ溝基板３ー１および光ファイバ押え基板３ー２
を構成する材料として、結晶化ガラスを使用する点であ
る。FIG. 2 is a diagram showing the structure of an example of an optical fiber fixing substrate obtained by the manufacturing method of the present invention. In the example shown in FIG. 2, the optical fiber fixing substrate 3 includes a V-groove substrate 3-1, which has V-grooves 1 for fixing the optical fibers 2 at equal intervals equal to the number of optical fibers 2, and a V-groove substrate 3-1, which has V-grooves 1 for fixing the optical fibers 2 at equal intervals. An optical fiber holding board 3-2 for pressing and fixing the fixed optical fiber 2 is fixed with an adhesive. The shape of the V-groove 1 changes depending on the diameter of the optical fiber 2 to be fixed. For example, when fixing an optical fiber 2 with a diameter of 125 μm, when the optical fiber 2 is attached to the V-groove 1, the shape of the optical fiber 2 is It is preferable to process the V-groove so that a part of it protrudes slightly from the surface of the V-groove substrate 3-1. The above-mentioned configuration is similar to the conventional configuration, but what is important in the present invention is the V-groove substrate 3-1 and the optical fiber holding substrate 3-2.
The point is that crystallized glass is used as the material that constitutes the.
【００１１】そのため、本発明の製造法によれば、例え
ば８心の光ファイバを同時に固定するための固定用基板
の加工時間を大幅に短縮することができ、その結果砥石
の長寿命化が達成できるとともに、加工に時間がかから
ない分だけ例えば１００心程度の超多心の光ファイバ固
定用基板を得ることができる。Therefore, according to the manufacturing method of the present invention, it is possible to significantly shorten the processing time of a fixing substrate for fixing, for example, eight optical fibers at the same time, and as a result, a long life of the grinding wheel is achieved. At the same time, it is possible to obtain a substrate for fixing optical fibers with a very large number of fibers, for example, about 100 fibers, since the processing time is short.
【００１２】本発明は上述した実施例にのみ限定される
ものではなく、幾多の変形、変更が可能である。例えば
、上述した実施例では、結晶化ガラスの軟化点以上の温
度でのプレス成形の後一旦室温まで冷却したが、連続し
て結晶化のための熱処理を行うこともできる。また、結
晶化ガラスとしてＬｉ２ ＯーＡｌ２ Ｏ３ ーＳｉＯ
２ 系の結晶化ガラスの例しか開示しなかったが、その
他従来から公知の結晶化ガラスであればどの様なもので
も使用できることはいうまでもない。[0012] The present invention is not limited to the above-described embodiments, but can be modified and changed in many ways. For example, in the above-described embodiments, the press molding at a temperature equal to or higher than the softening point of crystallized glass was once cooled to room temperature, but heat treatment for crystallization may also be performed continuously. In addition, as crystallized glass, Li2O-Al2O3-SiO
Although only the example of the 2-type crystallized glass has been disclosed, it goes without saying that any other conventionally known crystallized glass can be used.
【００１３】[0013]
【発明の効果】以上の説明から明らかなように、本発明
によれば、材料として結晶化ガラスを使用し、柔らかい
状態で複数のＶ溝に対応したサブミクロン精度の金型に
より一度プレス加工した後、さらにダイヤモンド砥石等
によるＶ溝の仕上げ加工を行うことにより、光ファイバ
固定用の基板を作製しているため、砥石を使用した時間
のかかる研削加工を少なくでき、加工時間の短縮化、砥
石の長寿命化、および超多心加工が可能となる。[Effects of the Invention] As is clear from the above explanation, according to the present invention, crystallized glass is used as the material, and once it is pressed in a soft state using a mold with submicron precision that can accommodate a plurality of V grooves. After that, the V-groove is finished with a diamond grindstone, etc. to create the substrate for fixing the optical fiber, which reduces the time-consuming grinding process using a grindstone, shortens processing time, and reduces the processing time. This makes it possible to extend the tool life and perform ultra-multi-core machining.
【図１】本発明の光ファイバ固定用基板の製造法の流れ
を説明するためのフローチャートである。FIG. 1 is a flowchart for explaining the flow of a method for manufacturing an optical fiber fixing substrate according to the present invention.
【図２】本発明の製造法により得られる光ファイバ固定
用基板の一例の構造を示す図である。FIG. 2 is a diagram showing the structure of an example of an optical fiber fixing substrate obtained by the manufacturing method of the present invention.
１ Ｖ溝 ２ 光ファイバ ３ー１ Ｖ溝基板 ３ー２ 光ファイバ押え基板 1 V groove 2 Optical fiber 3-1 V-groove board 3-2 Optical fiber holding board
Claims (1)
溝を有する光ファイバ固定用基板の製造法において、結
晶化ガラスを溶解し、ガラスの軟化点以上の温度におい
て金型プレスをしてＶ溝を有する基板を形成し、冷却後
、結晶化のための熱処理を行い、その後、Ｖ溝を砥石で
仕上げ加工することを特徴とする光ファイバ固定用基板
の製造法。[Claim 1] V for fixing multiple optical fibers
In the manufacturing method of a substrate for fixing optical fibers having a groove, crystallized glass is melted, mold-pressed at a temperature higher than the softening point of the glass to form a substrate having a V-groove, and after cooling, for crystallization. 1. A method of manufacturing a substrate for fixing an optical fiber, which comprises performing heat treatment, and then finishing the V-groove with a grindstone.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8584591A JP2883221B2 (en) | 1991-03-27 | 1991-03-27 | Manufacturing method of optical fiber fixing substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8584591A JP2883221B2 (en) | 1991-03-27 | 1991-03-27 | Manufacturing method of optical fiber fixing substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04296802A true JPH04296802A (en) | 1992-10-21 |
| JP2883221B2 JP2883221B2 (en) | 1999-04-19 |
Family
ID=13870207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8584591A Expired - Lifetime JP2883221B2 (en) | 1991-03-27 | 1991-03-27 | Manufacturing method of optical fiber fixing substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2883221B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0608566A2 (en) * | 1992-12-28 | 1994-08-03 | Matsushita Electric Industrial Co., Ltd. | Opitcal component mounting substrate and method of producing the same |
| EP0760488A1 (en) * | 1995-08-24 | 1997-03-05 | Ngk Insulators, Ltd. | Optical fiber array |
| EP0860720A1 (en) * | 1995-10-27 | 1998-08-26 | Hoya Corporation | Optical fiber fixing member and method of production thereof |
| WO1999006865A1 (en) * | 1997-07-31 | 1999-02-11 | Hoya Corporation | Optical fiber fixing member, method of manufacturing the optical fiber fixing member, optical fiber array, and method of manufacturing the optical fiber array |
-
1991
- 1991-03-27 JP JP8584591A patent/JP2883221B2/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0608566A2 (en) * | 1992-12-28 | 1994-08-03 | Matsushita Electric Industrial Co., Ltd. | Opitcal component mounting substrate and method of producing the same |
| EP0608566A3 (en) * | 1992-12-28 | 1995-02-01 | Matsushita Electric Ind Co Ltd | Opitcal component mounting substrate and method of producing the same. |
| US5425118A (en) * | 1992-12-28 | 1995-06-13 | Matsushita Electric Industrial Co., Ltd. | Optical component mounting substrate and method of producing the same |
| EP0760488A1 (en) * | 1995-08-24 | 1997-03-05 | Ngk Insulators, Ltd. | Optical fiber array |
| US6027253A (en) * | 1995-08-24 | 2000-02-22 | Ngk Insulators, Ltd. | Optical fiber array |
| EP0860720A1 (en) * | 1995-10-27 | 1998-08-26 | Hoya Corporation | Optical fiber fixing member and method of production thereof |
| EP0860720A4 (en) * | 1995-10-27 | 2000-11-02 | Hoya Corp | Optical fiber fixing member and method of production thereof |
| WO1999006865A1 (en) * | 1997-07-31 | 1999-02-11 | Hoya Corporation | Optical fiber fixing member, method of manufacturing the optical fiber fixing member, optical fiber array, and method of manufacturing the optical fiber array |
| US6324332B1 (en) | 1997-07-31 | 2001-11-27 | Hoyo Corporation | Optical fiber fixing member, method of manufacturing the optical fiber fixing member, optical fiber array, and method of manufacturing the optical fiber array |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2883221B2 (en) | 1999-04-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7616857B2 (en) | Optical fiber array substrate | |
| JP4556962B2 (en) | Method for reducing residual stress of blank material, method for manufacturing blank material and glass substrate for information recording medium | |
| US5192353A (en) | Method for press molding near net-shape glass articles | |
| US4397669A (en) | Method for the precision moulding of glass articles, method of manufacturing a mould, and mould for the precision moulding of glass articles | |
| US4391622A (en) | Method for the precision/manufacture of glass articles | |
| JP3991682B2 (en) | Precision drilling method of glass, manufacturing method of ferrule for optical fiber connector, and manufacturing method of magnetic disk glass substrate | |
| JPH04296802A (en) | Manufacture of optical fiber fixing substrate | |
| JP2003292327A (en) | Method for producing optical element | |
| JP4200422B2 (en) | Glass blank, information recording medium substrate, and information recording medium manufacturing method | |
| CN114905793B (en) | Method for high-temperature compression molding of silicon mold | |
| JP4482246B2 (en) | Manufacturing method of glass molded body, manufacturing method of substrate, and manufacturing method of information recording medium | |
| JPH11165323A (en) | Mold molding tool and its molding method | |
| JPH08211244A (en) | Substrate for fixing optical fiber and its production | |
| JP4106616B2 (en) | Manufacturing method of optical fiber array substrate | |
| JP2513599B2 (en) | Method for manufacturing optical waveguide substrate | |
| JPS6360114A (en) | Method for molding optical element | |
| US20060196229A1 (en) | Method for fabricating injection mold core | |
| JP3414350B2 (en) | Method of manufacturing master mold for optical element | |
| JP2575530B2 (en) | Method of manufacturing structure for optical communication device | |
| JP3219460B2 (en) | Optical element mold and method of manufacturing the same | |
| JPS63310735A (en) | Method for forming optical element | |
| JP2002333542A (en) | Molding die for optical element, method for manufacturing molding die for optical element, method for manufacturing optical element, and optical element | |
| JP2003026430A (en) | Mold for molding high-precision prism, method for manufacturing the same and method for manufacturing high-precision prism | |
| JPH0881227A (en) | Molding of lens | |
| JPH11228149A (en) | Manufacture of glass substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19990105 |