JP6630517B2 - valve - Google Patents

Description

  The present invention relates to a valve used for a fluid line of a semiconductor manufacturing device, a nuclear power plant, and the like.

  2. Description of the Related Art Conventionally, there has been proposed a valve capable of adjusting a lift amount of a diaphragm, which is a displacement amount of the diaphragm at the time of opening and closing. (For example, see Patent Document 1). In the valve of the patent document, an actuator screwed to a bonnet is rotated to move the actuator away from or close to the diaphragm, thereby adjusting the amount of movement of the stem and adjusting the amount of lift of the diaphragm.

JP-A-2007-064333

  By the way, even if the lift amount of the diaphragm is adjusted at the time of manufacturing the valve, if the valve is used at a high temperature, the body, the stem, etc. expand, so the lift amount of the diaphragm changes from the set value at the time of manufacture. . Therefore, it is necessary to reset the lift amount of the diaphragm. Further, even when the process temperature is changed, it is necessary to reset the lift amount of the diaphragm.

  In the above valve, the stem is connected to the drive shaft of the actuator, and the stem and the diaphragm retainer are urged by the spring. Therefore, when the actuator is rotated, the stem and the diaphragm retainer also rotate, so that the diaphragm is worn and causes breakage.

  Therefore, an object of the present invention is to provide a valve that can adjust the lift amount of the diaphragm without damaging the diaphragm.

  In order to solve the above object, a valve according to one embodiment of the present invention has a valve chamber and a fluid passage communicating with the valve chamber, and is provided at an opening of the fluid passage and protrudes toward the valve chamber. A body provided with a valve seat, a diaphragm that comes into contact with and separates from the valve seat and opens and closes the fluid passage, a bonnet that clamps a peripheral edge of the diaphragm together with the body, and a direction in which the bonnet extends. A stem that is configured to be divided into a plurality of parts, is supported by the bonnet so as to be able to approach and separate from the body, and is capable of deforming the diaphragm, a casing screwed to the bonnet, and the stem provided on the casing. A drive unit to be driven; and an actuator unit having a rotation suppressing mechanism for suppressing rotation of the casing with respect to the bonnet. By removing the suppression of the rotation of the casing by the rotation suppressing mechanism and rotating the casing with respect to the bonnet, the distance of the drive unit from the diaphragm changes and the moving amount of the stem decreases. And the lift amount of the diaphragm is changed.

Further, an urging portion for urging the stem toward the diaphragm is further provided.
In a state where the driving unit is not driven, the diaphragm may be in a closed state in which the fluid passage is closed by the urging force of the urging unit.

  Further, the urging unit may be provided in the actuator unit.

  According to the present invention, it is possible to provide a valve capable of easily adjusting the lift amount of the diaphragm without damaging the diaphragm.

1 shows a longitudinal sectional view of a valve in a closed state according to an embodiment of the present invention. FIG. 3 shows an exploded perspective view of the booster mechanism. FIG. 3 is an explanatory diagram illustrating a principle of amplifying a force of an operation unit by a booster mechanism. FIG. 3 shows a longitudinal sectional view of the valve in the open state. FIG. 3 shows an exploded view of a state in which an actuator unit has been removed from a bonnet. FIG. 2 shows a longitudinal sectional view of a valve to which an actuator unit having a manual driving unit is attached. 1 shows a longitudinal section of a valve with an actuator part having a drive part with both manual and automatic functions mounted.

  A valve according to an embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 shows a longitudinal sectional view of a valve 1 in a closed state in the present embodiment. As shown in FIG. 1, the valve 1 is a diaphragm valve, and is a valve used in a gas line of a fluid control device (for example, the most upstream side of gas Iran). The valve 1 includes a body 2, a bonnet part 10, and an actuator part 20. In the following description, the actuator 1 of the valve 1 will be described as an upper side, and the body 2 will be described as a lower side.

  The body 2 has a cylindrical valve chamber 2a and an inflow path 2b and an outflow path 2c communicating with the valve chamber 2a. An annular valve seat 2 </ b> D protruding toward the bonnet portion 10 is provided at a periphery (an opening of the inflow passage 2 b) of a portion where the inflow passage 2 b of the body 2 communicates with the valve chamber 2 a.

  The bonnet part 10 has a bonnet 11, a bonnet nut 12, a diaphragm 13, a holding adapter 14, a diaphragm holding 15, and a stem 16.

  The bonnet 11 has a substantially cylindrical shape, and is fixed to the body 2 by screwing a bonnet nut 12 to the body 2. On the outer periphery of the upper end of the bonnet 11, a male screw portion 11A is provided.

  The diaphragm 13 is composed of a plurality of diaphragms, and its outer peripheral edge is narrowed by an annular holding adapter 14 and is held against the body 2. The diaphragm 13 serving as a valve element has a substantially spherical shell shape, and a substantially arc shape convex upward is in a natural state. When the diaphragm 13 comes into contact with and separates from the valve seat 2D, communication between the inflow path 2b and the outflow path 2c is established or cut off. When the valve 1 is in the closed state, the diaphragm 13 contacts the valve seat 2D, and the inflow path 2b and the outflow path 2c are shut off. As shown in FIG. 4, when the valve 1 is in the open state, the diaphragm 13 is separated from the valve seat 2D, and the inflow path 2b and the outflow path 2c communicate.

  The diaphragm retainer 15 is provided on the upper side of the diaphragm 13, is supported by the bonnet 11 so as to be movable in the vertical direction, and can press the central portion of the diaphragm 13.

  The stem 16 is provided so as to penetrate the hood 11, and includes a first stem 17, a second stem 18, and a third stem 19. As described above, the stem 16 is divided into a plurality (three in this embodiment) along the vertical direction (the direction in which the hood 11 extends). In the first to third stems 17 to 19, adjacent stems are in contact with each other, but are not connected.

  The first stem 17 is provided above the diaphragm retainer 15 and has a lower end in a flange shape. The second stem 18 has a columnar shape and is provided above the first stem 17. The third stem 19 is provided on the upper side of the second stem 18 and includes a cylindrical portion 19A and a disk portion 19B provided on an upper end of the cylindrical portion 19A. The lower half of the cylindrical portion 19A is located in the bonnet 11, and the upper half of the cylindrical portion 19A and the disk portion 19B are located in the actuator portion 20.

The actuator section 20 includes a casing 21, a nut 22, and a driving section 30.
The casing 21 includes a bottom casing 23, a lower casing 24, and an upper casing 25. The nut 22 is screwed to the male screw portion 11A of the bonnet 11 and abuts on the casing 21 to suppress the rotation of the casing 21 with respect to the bonnet 11. Therefore, the nut 22 functions as a rotation suppressing mechanism. By loosening the nut 22, the suppression of the rotation of the casing 21 is released. Further, by pressing the nut 22 against the casing 21, the actuator section 20 (the casing 21) is locked to the bonnet 11, and by releasing the pressing of the nut 22 against the casing 21, the actuator section 20 (the casing 21) is released. Of the bonnet 11 is released. Therefore, the nut 22 functions as a locking member that locks the actuator portion 20 (the casing 21) detachably from the bonnet 11.

  The bottom casing 23 includes a bottom portion 23A and a cylindrical portion 23B extending downward from the bottom portion 23A. A through hole 23c is formed at the center of the bottom portion 23A, and an annular concave portion 23d is formed so as to surround the through hole 23c. The cylindrical portion 19A of the third stem 19 penetrates the through hole 23c, and the disk portion 19B of the third stem 19 is located in the concave portion 23d. An external thread portion 23E is provided on the outer periphery of the bottom portion 23A. A female screw portion 23F is provided on the inner periphery of the cylindrical portion 23B, and the female screw portion 23F is screwed to the male screw portion 11A of the bonnet 11, whereby the bottom casing 23 is fixed to the bonnet 11. The first O-ring 3A is interposed between the bottom portion 23A and the cylindrical portion 19A of the third stem 19, and suppresses the radial movement of the third stem 19 when moving in the vertical direction.

  The lower casing 24 has a substantially cylindrical shape, and is provided with a female screw portion 24A on an inner periphery of a lower end portion and a male screw portion 24B on an outer periphery of an upper end portion. The lower casing 24 is provided with a partition portion 24D that extends inward from an inner peripheral surface 24c and partitions the internal space up and down. A through hole 24e is formed at the center of the partition 24D. The lower casing 24 is fixed to the bottom casing 23 by screwing its female thread 24A into the male thread 23E of the bottom casing 23.

  The upper casing 25 has a substantially cylindrical shape, and is fixed to the lower casing 24 by screwing a female screw portion 25A provided on the inner periphery of a lower end portion thereof into a male screw portion 24B provided on an upper end portion of the lower casing 24. Have been. An operation air inflow path 25b into which operation air flows is formed in the upper casing 25, and a threaded portion 25c for screwing a pipe joint (not shown) is formed at an upper end of the operation air inflow path 25b. ing. In the casing 21, a piston accommodating chamber 21a is formed above the partition 24D, and a booster mechanism accommodating chamber 21b is formed below the partition 24D.

  The drive unit 30 includes the third stem 19, a piston 31, a coil spring 32, an operation unit 33, and a booster mechanism 40. The drive unit 30 is an automatic drive unit.

  The piston 31 is provided above the partition part 24D, and is supported on the inner periphery of the lower casing 24 so as to be movable in the vertical direction. The piston 31 includes a substantially disk-shaped base 31A, an upper extension 31B extending upward from the center of the base 31A, and a lower extension 31C extending downward. A second O-ring 3B is provided on an outer peripheral edge of the base 31A, and the second O-ring 3B suppresses radial movement of the base 31A when the base 31A moves in the vertical direction. An operation air introduction chamber 21c is formed by the lower surface of the base 31A and the upper surface of the partition 24D. The second O-ring 3B prevents operation air from leaking from the operation air introduction chamber 21c.

  The upper part of the upper extension part 31B is inserted into the operation air inflow path 25b, and suppresses radial movement when moving in the vertical direction by the third O-ring 3C. The third O-ring 3C prevents operation air from leaking to the outside. The piston 31 has an operation air introduction passage 31d extending from the upper end of the upper extension 31B to the lower surface of the base 31A and communicating with the operation air introduction chamber 21c.

  The lower side of the lower extension 31C is penetrated by the through hole 24e, and suppresses radial movement when moving in the vertical direction by the fourth O-ring 3D. The fourth O-ring 3D prevents operation air from leaking from the operation air introduction chamber 21c. A mounting hole 31e that opens downward is formed in the lower extension 31C.

  The coil spring 32 is disposed between the lower surface of the upper casing 25 and the upper surface of the base 31A of the piston 31, and constantly urges the piston 31 downward.

  The operating unit 33 is disposed in the booster mechanism accommodating chamber 21b, and includes a cylindrical portion 33A and a truncated cone portion 33B. The cylindrical portion 33A is mounted in the mounting hole 31e of the lower extension 31C. The truncated cone portion 33B is provided at the lower end of the cylindrical portion 33A so as to be tapered downward.

  As shown in FIG. 2, the booster mechanism 40 includes a pair of retainers 41 (only one is shown in FIG. 2), and a pair of transmission portions 42 provided between the pair of retainers 41 and supported by the pair of retainers 41. And

  The pair of retainers 41 are fixed to the lower casing 24, and are provided so as to sandwich the pair of transmission portions 42 in a direction perpendicular to the paper surface of FIG. Each retainer 41 is provided with a bearing 41A.

  Each transmission unit 42 includes a pair of support plates 43, an upper roller 44, a support shaft 45, a lower roller 46, a support shaft 47, and an eccentric shaft 48.

  Each support plate 43 is provided adjacent to the retainer 41. A circular shaft insertion hole 43a is formed in an upper part of each support plate 43, and a fitting hole 43b is formed in a lower part of each support plate 43. The fitted hole 43b has a shape in which upper and lower ends of a circle are cut out.

  The upper roller 44 is rotatably supported by a support shaft 45 extending in a direction perpendicular to the plane of FIG. Both ends of the support shaft 45 are inserted into the shaft insertion holes 43 a of the pair of support plates 43. The upper roller 44 is provided at a position where the upper roller 44 can contact the tapered surface 33C of the truncated cone portion 33B of the operating portion 33.

  The lower roller 46 is rotatably supported by a support shaft 47 extending in a direction perpendicular to the plane of FIG. At both ends of the support shaft 47 and at portions protruding from the lower roller 46, fitting portions 47A are provided. The lower roller 46 is provided at a position where it can come into contact with the upper surface of the disk portion 19B. The fitting portion 47A has a shape obtained by cutting the upper and lower ends of the support shaft 47. Each fitting portion 47A is fitted into a fitting hole 43b of the support plate 43 and is fixed to the support plate 43.

  The eccentric shaft 48 is provided at a position eccentric to the fitting portion 47A from the axis of the support shaft 47 toward the center axis of the truncated cone portion 33B. Each eccentric shaft 48 is mounted on a bearing 41A of the retainer 41. Thereby, each transmission part 42 is provided to be able to swing about the eccentric shaft 48 with respect to the retainer 41.

  Then, as each of the transmission portions 42 swings, the distance from the axis of the eccentric shaft 48 to the contact point between the lower roller 46 and the disk portion 19B changes. As a result, the force by which the lower roller 46 presses the disk portion 19B changes.

  When the valve 1 is in the closed state as shown in FIG. 1, the operating portion 33 is biased downward by the coil spring 32 and is located at the lowermost end. Thereby, each upper roller 44 is located on the side away from each other, and each lower roller 46 is located on the side approaching each other. The biasing force of the coil spring 32 is transmitted to the disk portion 19B of the third stem 19 via the upper roller 44, the support plate 43, and the lower roller 46, and the third stem 19, the second stem 18, and the first The stem 16 composed of the stem 17 is urged downward. When the stem 16 presses the diaphragm retainer 15, the diaphragm 13 is pressed and comes into contact with the valve seat 2D, whereby the communication between the inflow passage 2b and the outflow passage 2c is cut off.

  The force applied to the disk portion 19B of the third stem 19 is the taper angle of the truncated cone portion 33B of the operating portion 33, the distance between the axis of the eccentric shaft 48 and the axis of the support shaft 45 of the upper roller 44, and By setting the horizontal distance between the axis of the support shaft 47 of the lower roller 46 and the axis of the eccentric shaft 48 to an appropriate value, the biasing force of the coil spring 32 can be increased. The principle will be described with reference to FIG.

  As shown in FIG. 3, assuming that the urging force of the coil spring 32 applied to the operating portion 33 is F and the half angle of the inclination angle of the tapered surface 33C of the frustoconical portion 33B of the operating portion 33 is α, The force G acting on the upper roller 44 is G = F / 2Sinα.

  This force G is transmitted to the disk portion 19B of the third stem 19 via the support plate 43 and the lower roller 46.

  The distance between the axis of the support shaft 45 of the upper roller 44 and the axis of the eccentric shaft 48 of the lower roller 46 is C, and the axis of the support shaft 45 of the upper roller 44 and the axis of the eccentric shaft 48 of the lower roller 46. Γ, the horizontal distance between the axis of the support shaft 47 of the lower roller 46 and the axis of the eccentric shaft 48 of the lower roller 46 is δ, Assuming that the force transmitted from the roller 46 to the disk portion 19B of the third stem 19 is N, the following holds: N × δ = G × Cosγ × C. Therefore, the downward force of the pair of lower rollers 46 pressing the disk portion 19B of the third stem 19, that is, the downward force of pressing the stem 16, is 2N = F × Cosγ × C ÷ Sinα ÷ δ. By setting α, γ, δ, and C to appropriate values, the force applied to the operating section 33 can be amplified and transmitted to the stem 16 at an arbitrary amplification factor.

  In the present embodiment, by setting α = 40 °, γ = 25 °, C = 12.5, and δ = 1.5, the amplification factor is about 12 times. For this reason, the valve 1 can be used even with a high-pressure fluid.

  The operation air is introduced into the operation air introduction chamber 21c through the operation air inflow passage 25b and the operation air introduction passage 31d, whereby an upward force due to air pressure acts on the piston 31. By making this force greater than the urging force of the coil spring 32, the piston 31 and the operating portion 33 move upward. Accordingly, the upper rollers 44 move toward each other, the support plate 43 swings, and the lower rollers 46 move toward each other. As a result, the distance from the axis of the eccentric shaft 48 of the lower roller 46 to the contact point between the lower roller 46 and the disk portion 19B is reduced, and the force of the lower roller 46 pushing the stem 16 downward is eliminated. As a result, the diaphragm 13 is pushed up by the pressure of the fluid, separated from the valve seat 2D, and the valve is opened (see FIG. 4).

  It is sufficient that the air pressure required to open the valve is slightly larger than the urging force of the coil spring 32, and the urging force of the coil spring 32 can be reduced based on the amplification principle shown in FIG. The air pressure required to open the valve may be small.

  In the valve 1 of the present embodiment, the distance from the diaphragm 13 of the drive unit 30 changes by loosening the nut 22 and rotating the casing 21 of the actuator unit 20. As a result, the amount of movement of the first stem 17 and the second stem 18 by the drive unit 30 changes, and the amount of lift of the diaphragm 13 changes. Here, the lift amount of the diaphragm 13 is a displacement amount of the diaphragm 13 when the valve 1 is opened and closed. As described above, the valve 1 of the present embodiment can adjust the lift amount of the diaphragm 13 by rotating the actuator section 20 with respect to the bonnet 11. For example, the casing 21 is configured to move up or down by 1 mm by rotating the casing 21 once with respect to the bonnet 11.

  Further, the valve 1 of the present embodiment is configured so that the actuator section 20 can be attached and detached. That is, as shown in FIG. 5, the nut 22 is loosened, the casing 21 is rotated, and the actuator section 20 is detached from the bonnet 11, so that the actuator section 20 can be replaced with another actuator section. In the present embodiment, since the third stem 19 of the stem 16 is supported by the casing 21, the third stem 19 is replaced together with the actuator section 20.

  For example, it can be replaced with a manual actuator unit 50 as shown in FIG. The actuator unit 50 includes a casing 51, a nut 52, and a driving unit 53.

  The casing 51 has a substantially cylindrical shape, and a female screw portion 51A is formed on an inner peripheral surface at a lower portion thereof, and a female screw portion 51B is formed on an inner peripheral surface at an upper portion thereof. The casing 51 is fixed to the bonnet 11 by screwing the female screw portion 51A of the casing 51 to the male screw portion 11A of the bonnet 11. The third stem 19 is supported movably up and down with respect to the casing 51.

  The nut 52 is screwed to the male screw portion 11A of the bonnet 11 on the lower side of the casing 51.

  The drive unit 53 includes a transmission unit 54 and a handle 55.

  The transmission part 54 has a male screw part 54A, and the male screw part 54A is screwed with the female screw part 51B of the casing 51. Thus, the transmission unit 54 is supported by the casing 51 so as to be rotatable and movable in the vertical direction with the rotation. The lower end of the transmission part 54 is in contact with the upper end of the third stem 19.

  The handle 55 is attached to the upper end of the transmission unit 54, and when the operator manually rotates the handle 55 to generate a driving force, the transmission unit 54 receives the rotation driving force and rotates to rotate along the vertical direction. Moving. With the movement of the transmission portion 54, the stem 16 also moves in the up-down direction, and the diaphragm 13 contacts and separates from the valve seat 2D.

  Also, as shown in FIG. 7, the actuator unit 60 can be replaced with an actuator unit 60 having both manual and automatic functions.

  The actuator section 60 includes a casing 61, a nut 62, and a driving section 63.

  The casing 61 includes a connection casing 61A, a lower casing 61B, an upper casing 61C, and a lid casing 61D. The casing 61 has a substantially cylindrical shape as a whole. The connection casing 61A, the lower casing 61B, and the upper casing 61C are connected to each other by screwing.

  A female screw portion 61E is provided on the inner peripheral surface at the lower part of the connection casing 61A, and the female screw portion 61E is screwed to the male screw portion 11A of the bonnet 11, whereby the connection casing 61A is fixed to the bonnet 11. The third stem 19 is supported movably in the vertical direction with respect to the connection casing 61A. A female screw 61F is provided on the inner peripheral surface of the upper part of the upper casing 61C. The upper casing 61C is provided with an operation air introduction part 61G. The lid casing 61D is fitted into the upper casing 61C.

  The nut 62 is screwed to the male screw portion 11A of the bonnet 11 on the lower side of the casing 61.

  The drive section 63 includes a lower piston 64, an upper piston 65, a coil spring 66, a partition section 67, a transmission section 68, and a handle 69.

  The lower piston 64 has a substantially cylindrical shape, is supported by the lower casing 61 </ b> B so as to be movable in the vertical direction, and has a lower end configured to be in contact with the upper surface of the third stem 19. In the lower piston 64, a first communication path 64a and a second communication path 64b are formed. A first introduction chamber 64c is formed by the lower piston 64 and the lower casing 61B.

  The upper piston 65 has a substantially cylindrical shape, and is supported by the upper casing 61C so as to be vertically movable. The upper end of the lower piston 64 is in contact with the lower surface of the upper piston 65. The upper piston 65 is constantly urged downward by a coil spring 66.

  The partition 67 has an annular shape and is provided between the lower piston 64 and the upper piston 65. The partition 67, the upper piston 65, and the upper casing 61C form a second introduction chamber 67a.

  The transmission part 68 has a substantially columnar shape and extends from the upper end of the upper casing 61C to the connection casing 61A. At the upper end of the transmission section 68, a male screw section 68A is provided. The male screw portion 68A is screwed into the female screw portion 61F of the upper casing 61C, whereby the transmitting portion 68 is supported by the upper casing 61C so as to be rotatable and movable in the vertical direction with the rotation. The lower end of the transmission section 68 is in contact with the upper end of the third stem 19.

  The transmitting portion 68 is formed with a shaft passage 68b extending in the axial direction thereof, and a first radial passage 68c and a second radial passage 68d communicating with the shaft passage 68b and extending in the radial direction of the transmitting portion 68. A part of the outer periphery of the transmission portion 68 facing the lower piston 64 has a slightly smaller outer diameter, and a gap is formed between the lower piston 64 and the operating air. I have. A closing ball 68E for closing the opening is provided at the upper end of the shaft passage 68b.

  The handle 69 is attached to the upper end of the transmission unit 68, and when the operator manually rotates the handle 69 to generate a driving force, the transmission unit 68 receives the rotational driving force and rotates to move vertically. Moving.

  In the state shown in FIG. 7, the transmission portion 68 and the lower piston 64 are located at the lowermost position and press the stem 16 downward, and the valve 1 is in the closed state. In this state, when the handle 69 is rotated to move the transmission unit 68 upward, the lower end of the transmission unit 68 is separated from the upper surface of the third stem 19. The lower piston 64 and the upper piston 65 are urged downward by the coil spring 66, and the lower piston 64 presses the third stem 19 downward, so that the diaphragm 13 remains in contact with the valve seat 2D.

  Operation air is introduced from the operation air introduction part 61G, and is introduced into the second introduction chamber 67a via the first diameter passage 68c, the shaft passage 68b, and the second diameter passage 68d. Thereby, the upper piston 65 rises against the urging force of the coil spring 66. Further, the operation air is introduced into the first introduction chamber 64c through the gap between the transmission portion 68 and the lower piston 64 and the second communication passage 64b, and the upper piston 65 is raised. To rise. As a result, the lower piston 64 is also separated from the upper surface of the third stem 19, so that there is no longer any force to push the stem 16 downward, and the diaphragm 13 is pushed up by the pressure of the fluid and separated from the valve seat 2D. In this case, the driving unit 63 of the actuator unit 60 functions as an automatic driving unit 63.

  In a state where operation air is introduced from the operation air introduction unit 61G and the lower piston 64 is separated from the third stem 19, the handle 69 is rotated to move the transmission unit 68 up and down. When the transmission section 68 moves up and down, the stem 16 moves in the up and down direction, and the diaphragm 13 contacts and separates from the valve seat 2D. In this case, the driving unit 63 of the actuator unit 60 functions as a manual driving unit 63.

  As described above, the drive unit 63 of the actuator unit 60 has both manual and automatic functions.

  As described above, according to the valve 1 of the present embodiment, the stem 16 is configured by being divided into a plurality of parts along the vertical direction (the direction in which the bonnet 11 extends), the nut 22 is loosened, and the casing of the actuator section 20 is loosened. By rotating the 21 with respect to the bonnet 11, the distance of the drive unit 30 from the diaphragm 13 changes, the moving amount of the stem 16 changes, and the lift amount of the diaphragm 13 changes.

  According to this configuration, even if the casing 21 of the actuator section 20 is rotated for adjusting the lift amount of the diaphragm 13, the rotation of the casing 21 is transmitted to the diaphragm 13 because the stem 16 is divided into a plurality. Therefore, the lift amount of the diaphragm 13 can be adjusted without damaging the diaphragm 13.

  Further, since the stem 16 is divided into a plurality of parts, even if the valve 1 is used at a high temperature, the transmission of heat to the actuator section 20 can be suppressed. In addition, even if the bonnet 11 is lengthened to make the valve 1 a high-temperature specification and the stem 16 is lengthened as a whole, the stem 16 is divided into a plurality of parts so that the dimensional accuracy of the stem 16 can be easily improved. Can be put out.

  When the drive unit 30 is not driven, the valve 1 presses the diaphragm 13 by the urging force of the coil spring 32 and abuts on the valve seat 2D, thereby interrupting the communication between the inflow path 2b and the outflow path 2c. In the closed state. Therefore, the lift amount adjustment of the diaphragm 13 can be executed safely.

  A coil spring 32 for urging the stem 16 toward the diaphragm 13 is provided in the actuator section 20. Therefore, since the coil spring 32 can be moved away from the body 2, it is possible to prevent the coil spring 32 from thermally expanding due to heat, thereby suppressing a change in the spring constant and a change in the lift amount of the stem 16 and the diaphragm 13. it can.

  Further, according to the valve 1 of the present embodiment, the stem 16 is divided into a plurality of parts along the vertical direction (the direction in which the bonnet 11 extends). A helical spring 32 is provided to urge the bonnet 11 and the nut 22 is detachably engaged with the bonnet 11.

  According to such a configuration, it is possible to easily replace the actuator unit 20 while ensuring the airtightness of the fluid passage. Further, since the coil spring 32 for urging the stem 16 toward the diaphragm 13 is provided in the actuator section 20, even if the stem 16 is divided into a plurality of parts, the diaphragm 13 is pushed up by the pressure of the fluid. Thus, the fluid passage can be opened.

  In addition, the actuator unit 20 having the automatic driving unit 30 has both the manual and automatic functions shown in FIG. 7 in addition to the actuator unit 50 having the manual driving unit 53 shown in FIG. The actuator unit 60 having the driving unit 63 can be replaced. Therefore, various changes in the actuator unit can be easily performed while the valve 1 is installed in the line.

  Note that the present invention is not limited to the embodiments described above. Those skilled in the art can make various additions and changes without departing from the scope of the present invention.

  For example, in the above embodiment, the drive unit 30 of the actuator unit 20 is provided with the booster mechanism 40, but may be a drive unit without the booster mechanism 40. The configuration of the actuator section 20 of the valve 1 is normally closed, but may be normally open. That is, the normally closed actuator section 20 that can handle high pressure can be replaced with an actuator section that does not support high pressure or a normally open actuator section.

  Further, the stem 16 is divided into three, but may be divided into any number as long as the stem 16 is divided. In the above-described embodiment, the valve 1 has been described as being used in the gas line of the fluid control device. However, the valve 1 is not limited to this.

1: Valve 2: Body 2a: Valve chamber 2b: Inflow path 2c: Outflow path 2D: Valve seat 11: Bonnet 13: Diaphragm 16: Stem
17: first stem 18: second stem 19: third stem 20, 50, 60: actuator section
21, 51, 61: casing 22, 52, 62: nut 30, 53, 63: drive unit
32: Coil spring

Claims (3)

A body provided with a valve chamber and a fluid passage communicating with the valve chamber, and a valve seat provided at an opening of the fluid passage and protruding toward the valve chamber;
A diaphragm that abuts and separates from the valve seat to open and close the fluid passage;
A bonnet that has a cylindrical shape and holds a peripheral portion of the diaphragm together with the body;
A stem configured to be divided into a plurality along the direction in which the bonnet extends, supported by the bonnet so as to be able to approach and separate from the body, and capable of deforming the diaphragm;
A diaphragm holder which is formed between the stem and the diaphragm, has a columnar shape, is supported by the bonnet movably toward the diaphragm, and is capable of pressing the diaphragm;
A casing screwed to the bonnet, a drive unit provided on the casing to drive the stem, and an actuator unit having a rotation suppressing mechanism for suppressing rotation of the casing with respect to the bonnet,
By canceling the suppression of the rotation of the casing by the rotation suppressing mechanism and rotating the casing with respect to the bonnet, the distance of the drive unit from the diaphragm changes and the moving amount of the stem changes. The lift amount of the diaphragm is configured to change,
The stem has a first stem, a second stem, and a third stem,
The first stem is provided on a side opposite to the diaphragm side of the diaphragm retainer, a portion of the diaphragm retainer side has a flange shape,
The second stem has a columnar shape, and is provided on an opposite side to the diaphragm holding side of the first stem,
The valve , wherein the third stem is provided on an opposite side of the second stem with respect to the first stem, and a portion on the driving unit side has a flange shape . Further comprising an urging portion for urging the stem toward the diaphragm,
The valve according to claim 1, wherein the diaphragm is in a closed state in which the diaphragm is closed by the urging force of the urging unit when the driving unit is not driven.   The valve according to claim 1, wherein the urging unit is provided in the actuator unit.

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