JP4437554B2 - Air operated valve - Google Patents

Description

  The present invention relates to an air operated valve that drives a valve portion by sliding a piston in a cylinder using operating air.

  An air operated valve 1100 shown in FIG. 27 is an example of an air operated valve that drives the valve section by sliding the piston in the cylinder using the operating air.

  The air operated valve 1100 has an external appearance by attaching an actuator part 1110 to a body 1101 and further attaching a manual mechanism 1120 for forcibly driving the actuator part 1110 to the actuator part 1110.

  The body 1101 is provided with a valve seat 1104 between the primary side flow path 1102 and the secondary side flow path 1103. The diaphragm 1105 is nipped between the body 1101 and the holder 1106 by screwing an adapter 1107 through the holder 1106 into the body 1101. The stem 1108 is slidably loaded in the holder 1106 and is in contact with the back pressure surface of the diaphragm 1105. The actuator unit 1110 is screwed into the adapter 1107 so that the center rod 1118 abuts against the stem 1108 and is attached to the body 1101.

  In the actuator unit 1110, in order to ensure the pressure resistance of the operation air, components other than the O-ring are formed of a metal having rigidity such as stainless steel. The actuator portion 1110 constitutes a cylinder by screwing and connecting a hollow base 1111 and a cap 1112. The base 1111 and the cap 1112 sandwich and hold the partition plate 1113 to form a first piston chamber 1114 and a second piston chamber 1115 partitioned by the partition plate 1113. The first piston chamber 1114 and the second piston chamber 1115 are slidably loaded with the first piston 1116 and the second piston 1117, and are hermetically partitioned into pressurizing chambers 1114a and 1115a and back pressure chambers 1114b and 1115b.

  The center rod 1118 penetrates from the first piston 1116 through the partition plate 1113 to the second piston 1117 and is fixed to the first and second pistons 1116 and 1117. A compression spring 1119 is contracted in the back pressure chamber 1114b of the first piston chamber 1114, and the elastic force of the compression spring 1119 acts on the stem 1108 via the first piston 1116 and the center rod 1118, and the diaphragm 1105 is moved to the valve seat 1104. Abut.

  In the center rod 1118, a main channel 1118a is bored along the axis from the upper end surface to the vicinity of the center, and branch channels 1118b and 1118c are formed so as to be orthogonal to the main channel 1118a. The branch channels 1118b and 1118c are formed so as to communicate with the pressurizing chambers 1114a and 1115a. The center rod 1118 has an upper end located in an air supply / exhaust flow path 1112b formed in the cap 1112, and supplies operation air to the pressurizing chambers 1114a, 1115a via the flow paths 1118a, 1118b, 1118c, or adds air. Operation air is discharged from the pressure chambers 1114a and 1115a. On the other hand, a first breathing hole 1112a is formed in the cap 1112 so as to communicate with the back pressure chamber 1114b. The base 1111 is formed with a second breathing hole 1111a so as to communicate with the back pressure chamber 1115b. Therefore, in the actuator portion 1110, the center rod 1118 moves in the vertical direction in the drawing according to the balance between the elastic force of the compression spring 1119 and the pressure of the operation air acting on the pressurizing chambers 1114a and 1115a.

  In the air operated valve 1100 having such a configuration, when operating air is not supplied to the air supply / exhaust flow path 1112b, the elastic force of the compression spring 1119 is applied to the diaphragm 1105 via the first piston 1116, the center rod 1118, and the stem 1108. Acts to bring the diaphragm 1105 into contact with the valve seat 1104. In this case, the control fluid supplied to the primary flow path 1102 is blocked and does not flow from the valve seat 1104 to the secondary flow path 1103.

  On the other hand, when the operation air is supplied to the air supply / exhaust flow path 1112b and the internal pressure of the pressurizing chambers 1114a and 1115a overcomes the elastic force of the compression spring 1119, the center rod 1118 rises upward in the figure and moves from the stem 1108. Separate. The diaphragm 1105 is not pressurized in the valve seat direction, and is separated from the valve seat 1104 by its own reaction force. In this state, when the control fluid is supplied to the primary side flow path 1102, the control fluid flows from the primary side flow path 1102 to the secondary side flow path 1103 via the valve seat 1104.

  Thereafter, when operating air in the pressurizing chambers 1114a and 1115a is discharged from the air supply / exhaust flow path 1112b, the elastic force of the compression spring 1119 overcomes the internal pressure of the pressurizing chambers 1114a and 1115a, and the center rod 1118 descends. The center rod 1118 pressurizes the diaphragm 1105 in the valve seat direction via the stem 1108 and brings the diaphragm 1105 into contact with the valve seat 1104. As a result, the flow path is blocked and the control fluid supplied to the primary side flow path 1102 does not flow from the valve seat 1104 to the secondary side flow path 1103.

JP-A-2005-214231

  However, the conventional air operated valve 1100 has a cylinder formed by fitting screws of a base 1111 made of a highly rigid metal and a cap 1112 to form the first and second piston chambers 1114 and 1115. In addition, the base 1111 and the cap 1112 were cut into a cup shape and provided. Therefore, the conventional air operated valve 1100 has a large number of cuttings of the base 1111 and the cap 1112 constituting the cylinder, and has many useless parts cut by cutting. Therefore, the conventional air operated valve 1100 is expensive due to processing costs and material costs.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide an inexpensive air operated valve.

The air operated valve according to the present invention has the following configuration.
(1) In an air operated valve that drives a valve portion by sliding a piston in a cylinder using operating air, the cylinder is attached to a pipe-shaped exterior member and one opening of the exterior member And a second closing plate attached to the other opening of the exterior member.

(2) In the invention described in (1), the first closing plate and the second closing plate are attached to the exterior member by at least one of caulking or welding, press-fitting, adhesion, and locking structure.

(3) In the invention described in (1) or (2), the cylinder includes an inner member that forms a piston chamber for housing the piston in a hollow portion of the outer member, and the cylinder wall is It has a heavy structure.

(4) In the invention according to any one of (1) to (3), at least one of an operation port or a joint, a valve opening / closing detection sensor, a valve opening adjustment mechanism, and an indicator is provided on the first closing plate. Provided.

(5) In the invention described in (4), the first closing plate is rotatably attached to the exterior member.

(6) In the invention described in (5), the first closing plate includes a first plate attached to the other opening of the exterior member, and at least one of the air supply port or the attachment portion, The second plate is detachably attached to the first plate.

In the invention described in (1), the cylinder is configured by attaching the plate-like first and second closing plates to the opening portions at both ends of the pipe-like outer member. No cutting process is required to mold the glass into a cup shape, and there are no useless parts cut by cutting in the exterior member and the first and second closing plates. Therefore, according to the invention described in (1) above, it is possible to reduce costs by reducing processing costs and material costs.
Note that the exterior member is not limited to a cylinder, but may be a polygonal shape or the like as long as it has a pipe shape with both ends opened. For example, if the exterior member is made of metal, the exterior member may be easily formed by drawing or extrusion. On the other hand, the first and second closing plates are not limited to the disc shape, but may be polygonal plates as long as they are attached to the openings of the exterior member. If the first and second closing plates are made of metal, for example, they have a simple shape, and may be easily formed by punching, cutting, die casting, or the like.

According to the invention described in (2) above, the first and second closing plates are attached to the opening portions at both ends of the exterior member by at least one of caulking, welding, press-fitting, adhesion, and locking structure, so that the cylinder can be easily Can be assembled.
Note that the first and second closing plates are not only one of caulking, welding, press-fitting, adhesion, and locking structure. For example, the first and second closing plates are press-fitted into the opening of the exterior member. The first and second closing plates may be attached to the exterior member by combining two or more methods by applying an adhesive to the contact surface.
The locking structure includes, for example, a screw structure that engages and locks a female screw formed on the inner peripheral surface of the exterior member and a male screw formed on the outer peripheral surface of the first and second closing plates. An uneven structure in which a claw is provided on the outer peripheral surface of the first and second closing plates and the claw is engaged with and engaged with a groove formed on the inner peripheral surface of the exterior member may be used.

According to the invention described in (3) above, since the interior member is arranged in the hollow portion of the exterior member and the wall of the cylinder has a double structure, the thickness of the exterior member is reduced to reduce the weight of the entire valve. Can be planned.
In this case, for example, if the interior member is a resin molded product and the rigidity of the interior member is supplemented by the exterior member, the weight and size of the valve can be reduced. And if an interior member combines the cylindrical interior components opened to one side and comprises a piston chamber, an interior component can be easily manufactured by injection molding etc. and cost reduction can be aimed at.

The invention described in (4) above excludes the first closing plate only by changing the first closing plate provided with at least one of an operation port or joint, a valve opening / closing detection sensor, a valve opening adjustment mechanism, and an indicator. Functions can be changed by sharing parts (exterior member, second closing plate, etc.), and costs can be reduced.
In this case, for example, if the valve opening / closing detection sensor or the valve opening adjustment mechanism and the indicator are provided on the first closing plate along with the operation port, the operation of connecting the pipe to the operation port, the valve opening / closing detection sensor, or the valve opening adjustment mechanism Easy to operate indicator from one direction.
Further, for example, if the first closing plate is provided with an attachment portion capable of attaching the valve opening / closing detection sensor, the valve opening adjusting mechanism, and the indicator in common, the valve can be removed without removing the first closing plate from the exterior member. The function can be changed by exchanging the open / close detection sensor, the valve opening adjustment mechanism, and the indicator.

According to the invention described in (5) above, since the first closing plate is rotatably attached to the exterior member, the position of the operation port or the like can be easily adjusted by rotating the first closing plate.
In this case, if a friction member that generates friction is disposed at the sliding contact portion between the first closing plate and the exterior member, an appropriate operational feeling can be given when the first closing plate is rotated.

  According to the invention described in (6) above, the first closing plate has at least one of the first plate attached to the other opening of the exterior member and the air supply port or the attaching portion, and is attached to and detached from the first plate. Since it is divided into the second plate that can be freely attached, the function can be changed by replacing the second plate even after the valve assembly.

  Next, an embodiment of an air operated valve according to the present invention will be described with reference to the drawings.

(First embodiment)
First, a first embodiment of the air operated valve of the present invention will be described. FIG. 1 is a cross-sectional view of an air operated valve 1A according to the first embodiment of the present invention. FIG. 2 is a top view of the air operated valve 1A shown in FIG.
The air operated valve 1 </ b> A according to the first embodiment includes a pipe-shaped exterior member 21, a cap 26 </ b> A that is an example of a “first closing plate” attached to one opening of the exterior member 21, and an exterior member It has a feature in that it has a base 25 that is an example of a “second closing plate” attached to the other opening of 21. In addition, the air operated valve 1A is characterized in that the function can be changed while using other parts in common by changing the types of the caps 26A, 26B, and 26C.

<Overall configuration>
As shown in FIG. 1, the air operated valve 1 </ b> A according to the first embodiment includes a valve unit 2 that controls a control fluid and an actuator unit 3 </ b> A that applies a driving force to the valve unit 2. The air operated valve 1 </ b> A has a cylindrical appearance by connecting the actuator portion 3 </ b> A to the body 4 via the adapter 11.

  The valve unit 2 is built in the body 4. The body 4 is formed of a metal material having rigidity and heat resistance, such as stainless steel or aluminum, in a cylindrical shape. A primary side port 5 and a secondary side port 6 are provided on the lower surface of the body 4. On the other hand, a mounting hole 7 is formed in a cylindrical shape on the upper side surface of the body 4. A valve seat 8 is provided in an annular shape at the center of the bottom wall of the mounting hole 7, and the primary side port 5 and the secondary side port 6 communicate with each other through the valve seat 8.

  The valve portion 2 has an adapter 11 in which a diaphragm 9 is mounted in the mounting hole 7 of the body 4, the outer edge portion of the diaphragm 9 is pressed by the holder 10, and inserted between the inner peripheral surface of the mounting hole 7 and the outer peripheral surface of the holder 10. Is screwed into the body 4 so that the outer edge of the diaphragm 9 is held between the body 4 and the holder 10. The diaphragm 9 is made of a thin film made of resin or metal so that it can be deformed. The holder 10 and the adapter 11 are made of a metal having heat resistance and rigidity. The holder 10 is loaded with a metal stem 13 so as to be in contact with the diaphragm 9, and the driving force of the actuator portion 3 </ b> A is transmitted to the diaphragm 9 via the stem 13.

  The actuator portion 3A has a cylindrical shape as shown in FIGS. As shown in FIG. 1, the actuator portion 3A has a normally closed type air cylinder structure. The actuator unit 3A is configured by dividing a cylinder that houses the pistons 23 and 24 into a plurality of parts, specifically, an exterior member 21, an interior part 22, a base 25, and a cap 26A.

  As shown in FIG. 1, the actuator portion 3 </ b> A has a pipe-shaped exterior member 21 in which interior parts 22 </ b> A, 22 </ b> B, 22 </ b> C and pistons 23, 24 are alternately loaded. The cylinder wall has a double structure. The interior parts 22 </ b> A, 22 </ b> B, and 22 </ b> C are fixed while being overlapped inside the exterior member 21, and form a first piston chamber 27 and a second piston chamber 28. The pistons 23 and 24 are slidably loaded in the first and second piston chambers 27 and 28, and the first and second piston chambers 27 and 28 are made into pressure chambers 27a and 28a and back pressure chambers 27b and 28b. Each is divided. A compression spring 29 is contracted in the back pressure chamber 28 b of the second piston chamber 28, and a downward force (valve seat direction) in the figure is always applied to the pistons 23 and 24.

  In this way, the actuator portion 3A constitutes a cylinder by combining the individually provided exterior member 21, interior components 22A, 22B, and 22C, pistons 23 and 24, base 25, and cap 26A. The actuator portion 3A is fixed to the body 4 via the adapter 11. Therefore, the pistons 23 and 24 may not be arranged coaxially with respect to the valve seat 8 depending on the dimensions of parts and assembly variations. However, the pistons 23 and 24 transmit driving force to the diaphragm 9 via the columnar stem 13. Therefore, even when the position where the piston 23 abuts on the stem 13 is slightly deviated from the axis, the stem 13 is in surface contact with the diaphragm 9 and transmits the driving force in a distributed manner. It can be brought into close contact with a uniform force in the circumferential direction.

  In addition, since the actuator part 3A forms the first and second piston chambers 27 and 28 in which the pistons 23 and 24 slide by the interior parts 22A, 22B and 22C, the interior parts 22A, 22B and 22C Is configured.

  The air operated valve 1A is supplied and exhausted with operating air through an operating port 85 provided at the center of the upper end surface of the cap 26A. The operation port 85 communicates with the pressurizing chambers 27a, 28a of the first and second piston chambers 27, 28 via internal flow paths (described later) formed in the pistons 23, 24. Further, the air operated valve 1A has a breathing hole in which back pressure chambers 27b, 28b of the first and second piston chambers 27, 28 are formed in the adapter 11 between the exterior member 21 and the interior components 22A, 22B, 22C. A plurality of conduction channels 31 for communicating with 12 are formed. Accordingly, in the air operated valve 1A, the pistons 23 and 24 move in the axial direction according to the balance between the elastic force (repulsive force) of the compression spring 29 and the internal pressure of the pressurizing chambers 27a and 28a, and the valve portion 2 The driving force can be transmitted to.

  Next, components constituting the cylinder of the air operated valve 1A will be described.

<Piston configuration>
FIG. 3 is a central longitudinal sectional view of the first piston 23 and the second piston 24 shown in FIG.
Pistons 23 and 24 are made by injection-molding a heat-resistant and lightweight resin such as PPS (polyphenylene sulfide), PBT (polybutylene terephthalate), POM (polyacetal), PA (polyamide), PVDF (polyvinyl fluoride), etc. It is a molded product.

  The piston 23 is formed by integrally forming a piston rod 42 and a piston rod 43 in the piston portion 41. The piston portion 41 has a columnar shape, and the outer diameter dimension is substantially the same as the inner diameter dimension of the interior part 22. A mounting groove 44 for mounting a sealing member 33 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin is annularly provided in the piston portion 41 along the outer peripheral surface. The piston rods 42 and 43 also have mounting grooves 45 and 46 for mounting sealing members 32 and 34 (see FIG. 1) such as O-rings made of an elastic material such as rubber or resin along the outer peripheral surface. It is provided in a ring shape.

  As shown in FIGS. 1 and 3, the piston 23 is provided with an internal channel in which a main channel 47 and a branch channel 48 are formed in a T shape. The main flow path 47 is formed from the center of the end face of the piston rod 43 to the branch flow path 48 along the axis. The branch channel 48 corresponds to the pressurizing chamber 27 a and is provided between the mounting groove 45 of the piston rod 42 and the base end portion where the piston rod 42 connects to the piston portion 41. The branch channel 48 is formed so as to penetrate in the radial direction of the piston rod 42. The branch channel 48 has a rectangular shape with a wide cross section.

  On the other hand, the piston 24 is obtained by integrally forming a piston rod 52 in the piston portion 51. The piston portion 51 has a cylindrical shape, and the outer diameter dimension is substantially the same as the inner diameter dimension of the interior part 22. A mounting groove 53 for mounting a sealing member 35 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin is annularly provided in the piston portion 51 along the outer peripheral surface. The piston rod 52 is also provided with a mounting groove 54 for mounting a seal member 36 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin, along the outer peripheral surface. Yes.

  As shown in FIGS. 1 and 3, the piston 24 is provided with an internal flow path in which a main flow path 55 and a branch flow path 56 are formed in a T shape. The main channel 55 is formed from the center of the end surface of the piston portion 51 to the branch channel 56 along the axis. The branch flow path 56 corresponds to the insertion hole 81 of the cap 26 </ b> A, and is provided on the distal end side from the mounting groove 53 of the piston rod 52. The branch flow path 56 is formed so as to penetrate in the radial direction of the piston rod 52. The branch channel 56 has a rectangular shape with a wide cross section.

The piston 24 is provided with a fitting recess 57 concentrically with the main channel 55 at the opening of the main channel 55. A communication passage 58 is formed in a band shape on the bottom wall of the fitting recess 57, and a part of the operation air flowing through the main flow path 55 is guided to the fitting recess 57 via the communication passage 58.
The piston 24 is provided with a guide portion 59 by expanding the base end portion of the piston rod 52. The guide portion 59 is inserted into the compression spring 29 and is provided to stably expand and contract the compression spring 29 in the axial direction.

  Such pistons 23 and 24 are configured such that the piston rod 43 of the piston 23 is fitted into the fitting recess 57 of the piston 24 and the end surfaces thereof are brought into contact with each other, thereby causing the main flow path 55 of the piston 24 and the main flow path 47 of the piston 23 to Communicate.

<Composition of interior parts>
Interior parts 22A, 22B, and 22C shown in FIG. 1 are resin molded products obtained by injection molding a resin having heat resistance and rigidity, such as PPS, PBT, POM, PA, and PVDF. Since the interior parts 22A, 22B, and 22C have the same shape, the interior part 22B will be described here for convenience of description, and the description of the interior parts 22A and 22C will be omitted.

  As shown in FIG. 1, the interior part 22 </ b> B has a bag shape. The interior part 22B has a side surface formed in a cylindrical shape, and is provided with a closed end surface so as to close one end opening of the side surface. The interior part 22 </ b> B has an outer diameter that is substantially the same as the inner diameter of the exterior member 21, and the inner diameter of the side surface corresponds to the piston portion 51. The side surface of the interior component 22B is supported by being in contact with and supported by the inner peripheral surface of the exterior member 21 when the interior component 22B is loaded on the exterior member 21. On the other hand, the closed end face of the interior part 22B includes a partition plate that partitions the hollow portion of the exterior member 21 to form the first and second piston chambers 27 and 28 when the interior part 22B is loaded into the exterior member 21. Therefore, it is made thick so as to ensure pressure resistance against the operation air.

FIG. 4 is an external perspective view of the interior component 22B shown in FIG.
The interior part 22 </ b> B is provided with a through hole 61 for passing through the piston rod 43 of the piston 23 at the center of the closed end surface. An annular groove 62 is formed concentrically with the through hole 61 on the outer surface of the closed end face. A plurality of guide grooves 63 are formed on the outer surface of the closed end surface so as to be longer in the outer diameter direction from between the through hole 61 and the annular groove 62. A D-cut passage 64 is formed on the outer peripheral surface of the interior part 22 </ b> B in parallel with the axis so as to continue from the guide groove 63. The interior part 22 </ b> B has a notch 65 formed so as to be continuous with the D-cut passage 64 at the opening end of the side surface.

<Configuration of exterior member, base, cap>
As shown in FIG. 1, both ends of the exterior member 21 are caulked and fixed to a cap 26 </ b> A and a base 25 to configure the appearance of the cylinder. The exterior member 21, the base 25, and the cap 26A surround the interior parts 22A, 22B, and 22C to supplement the strength of the interior parts 22A, 22B, and 22C.

5 is a cross-sectional view showing the relationship among the cap 26A, the base 25, and the exterior member 21 shown in FIG.
The exterior member 21 has a cylindrical shape with both ends open. The exterior member 21 is formed by forming a metal having rigidity such as stainless steel into a thin pipe shape by drawing or extruding, and cutting the drawn tube or the extruded tube to a predetermined length. The total length of the exterior member 21 is determined by how many piston chambers are provided by overlapping the interior components 22. Further, the thickness of the exterior member 21 is determined in consideration of pressure resistance against the operation air. In the first embodiment, it is 0.5 mm.

  The base 25 and the cap 26 </ b> A close both ends of the exterior member 21 so that the interior components 22 </ b> A, 22 </ b> B, and 22 </ b> C are stacked and housed in the exterior member 21 against the elastic force of the compression spring 29. A space (gap) is formed inside. The cap 26A and the base 25 abut against the closed end surfaces of the interior parts 22A and 22C and support the interior parts 22A and 22C. Therefore, the base and cap 26A have a disk shape made of a metal having rigidity such as stainless steel or aluminum.

  The base 25 has a columnar shape whose outermost diameter is the same as or larger than the outer diameter of the exterior member 21, and is provided with a connecting hole 71 penetrating in the center. A female screw for screwing a male screw provided on the outer peripheral surface of the adapter 11 is formed on the inner peripheral surface of the connecting hole 71. On one end surface of the base 25, a positioning recess 72 for positioning the interior component 22A is provided coaxially with the connecting hole 71. A press-fitting portion 73 having a press-fitting allowance is provided on the outer periphery of the end surface where the positioning recess 72 is formed in order to press-fit the open end portion of the exterior member 21. Further, on the outer peripheral surface of the base 25, a caulking groove 74 for caulking the end portion of the exterior member 21 to deform inward is formed inside the press-fit portion 73.

  The cap 26 </ b> A has a columnar shape whose outermost diameter is the same as or larger than the outer diameter of the exterior member 21. In the cap 26A, an insertion hole 81 is formed in a columnar shape at the center of one end surface. The insertion hole 81 is formed so that the piston rod 52 of the piston 24 can be inserted without contact. A mounting groove 82 for mounting a sealing member 37 (see FIG. 1) such as an O-ring made of an elastic material such as rubber or resin is annularly provided around the insertion hole 81 on one end surface of the cap 26A. Yes. The mounting groove 82 corresponds to the annular groove 62 of the interior part 22C. A press-fitting portion 83 having a press-fitting allowance is provided on the outer periphery of one end surface of the cap 26 </ b> A in order to press-fit the open end portion of the exterior member 21. A caulking groove 84 is formed on the outer peripheral surface of the cap 26 </ b> A in an annular shape inside the press-fit portion 83 for caulking the end portion of the exterior member 21 and deforming it inward. Such a cap 26 </ b> A is provided with an operation port 85 so as to communicate with the insertion hole 81 from the center of the other end surface.

<How to assemble an air operated valve>
Next, an example of a method for assembling the air operated valve 1A including the above components will be described.
First, the valve seat 8 is fixed to the mounting hole 7 of the body 4, and the diaphragm 9 is set in the mounting hole 7. Then, the holder 10 is inserted into the mounting hole 7 of the body 4 so as to hold the outer edge of the diaphragm 9, and the stem 13 is fitted into the holder 10, and then the adapter 11 is screwed into the body 4 and fixed. Thereby, the valve part 2 is assembled.

  Then, the actuator unit 3A is assembled. Seal members 32, 33, 34, 35, and 36 are mounted in the mounting grooves 44, 45, 46, 53, and 54 of the pistons 23 and 24, respectively. Then, the press-fit portion 73 of the base 25 is press-fitted into the one end opening of the exterior member 21. Then, the exterior member 21 is loaded with the interior component 22A, the piston 23, the interior component 22B, the piston 24, the compression spring 29, and the interior component 22C. Then, the press-fit portion 83 of the cap 26A is press-fitted into the other end opening of the exterior member 21 so as to crush the seal member 37 between the annular groove 62 of the interior part 22C and the mounting groove 82 of the cap 26A. At this stage, the interior parts 22A, 22B, 22C, the pistons 23, 24, and the compression spring 29 are temporarily held in the exterior member 21. Then, both end portions of the exterior member 21 are fixed by caulking along the caulking grooves 74 and 84 of the base 25 and the cap 26A.

  Thereafter, the actuator part 3 </ b> A is connected to the valve part 2. That is, the adapter 11 screwed on the body 4 is screwed into the connection hole 71 of the base 25. At this time, the piston rod 42 of the piston 23 hits the stem 13, and the elastic force of the compression spring 29 acting on the pistons 23, 24 is transmitted to the diaphragm 9 via the stem 13, and the diaphragm 9 is brought into contact with the valve seat 8. . This completes the assembly.

<Channel structure>
The operation air flow path structure of the air operated valve 1A assembled as described above will be described. FIG. 6 is a diagram showing the operating air flow path structure of the air operated valve 1A shown in FIG.
The operation port 85 communicates with the pressurizing chamber 27a of the first piston chamber 27 through the insertion hole 81 of the cap 26A, the branch channel 56 of the piston 24, the main channel 55, the main channel 47 of the piston 23, and the branch channel 48. is doing. The operation port 85 communicates with the pressurizing chamber 28a of the second piston chamber 28 through the insertion hole 81 of the cap 26A, the branch channel 56 of the piston 24, the main channel 55, the communication channel 58, and the fitting recess 57. ing.

  As described above, in the air operated valve 1A, the flow paths 47, 48, 55, and 56 provided in the pistons 23 and 24 form a flow path for supplying and exhausting operation air to and from the pressurizing chambers 27a and 28a. .

  Further, the air operated valve 1A causes the back pressure chambers 27b, 28b of the first and second piston chambers 27, 28 to be connected to one breathing hole 12 provided in the adapter 11, as indicated by dot hatching in the drawing. The conduction channel 31 is provided.

  The interior parts 22A, 22B, and 22C form a space with the exterior member 21 by the D-cut passage 64 formed on the outer peripheral surface. The back pressure chamber 27b of the first piston chamber 27 communicates with the space provided by the D-cut passage 64 of the interior part 22A via the notch 65 of the interior part 22A and the guide groove 63 of the interior part 22B. The back pressure chamber 28b of the second piston chamber 28 communicates with a space provided by the D-cut passage 64 of the interior parts 22B and 22C via a notch 65 provided in the interior parts 22B and 22C.

  A gap is formed between the closed end face of the interior part 22A and the base 25 by an annular groove 62 and a guide groove 63 provided in the interior part 22A. The gap communicates with a space formed between the interior parts 22A, 22B, 22C and the exterior member 21, and communicates with a hollow hole provided in the adapter 11. A breathing hole 12 is formed in the adapter 11 so as to communicate with the hollow hole.

  As described above, the air operated valve 1A includes a space formed between the interior parts 22A, 22B, and 22C, a space formed between the interior parts 22A, 22B, and 22C and the exterior member 21, and the interior part 22A. A space formed between the base 25 and the base 25 forms a conduction channel 31 for communicating the back pressure chambers 27b, 28b of the first and second piston chambers 27, 28 to the breathing hole 12 of the adapter 11. .

<Operation of air operated valve>
Next, the operation of the air operated valve 1A will be described.
As shown in FIG. 2, the air operated valve 1A is installed and fixed by inserting a bolt (not shown) through a mounting hole 14 provided in the body 4 and fastening the bolt to a mounting plate or a semiconductor manufacturing apparatus. Is done. In the air operated valve 1A, an operation port 85 is connected to an air supply / exhaust control device (not shown) via an air supply / exhaust pipe (not shown), and supply / exhaust of the operation air is controlled.

  When the operating air is not supplied to the operating port 85, the air operated valve 1A pushes down the pistons 23 and 24 toward the valve seat by the elastic force of the compression spring 29, so that the diaphragm 9 is brought into contact with the valve seat 8 via the stem 13. Make contact. Therefore, the control fluid supplied to the primary side port 5 does not flow from the valve seat 8 to the secondary side port 6.

  Thereafter, when operating air is supplied to the operating port 85, the operating air is pressurized in the first piston chamber 27 via the branch flow path 56 of the piston 24, the main flow path 55, the main flow path 47 of the piston 23, and the branch flow path 48. It is supplied to the chamber 27a. Further, the operation air is supplied to the pressurizing chamber 28 a via the branch flow path 56, the main flow path 55, the communication path 58, and the fitting recess 57 of the piston 24. When the pressurizing chambers 27a and 28a are pressurized and overcome the elastic force of the compression spring 29, the pistons 23 and 24 rise smoothly in the upward direction in the figure (the direction opposite to the valve seat 8), and the piston rod 42 is moved to the stem 13 Separate from. As a result, the diaphragm 9 is not pressurized in the valve seat direction and is separated from the valve seat 8 by its own reaction force. When the control fluid is supplied to the primary port 5 in this state, the control fluid flows from the primary port 5 to the secondary port 6 through the valve seat 8.

  After that, when the operating air in the pressurizing chambers 27a, 28a is discharged from the operating port 85 and the elastic force of the compression spring 29 becomes larger than the internal pressure of the pressurizing chambers 27a, 28a, the pistons 23, 24 descend and the piston rod 42 Is applied to the stem 13, and a force in the valve seat direction is applied to the diaphragm 9 through the stem 13. As a result, the diaphragm 9 contacts the valve seat 8 to block the flow path, and the control fluid does not flow from the valve seat 8 to the secondary side port 6.

<Function change>
Next, the function change of the air operated valve 1A will be described.
In the air operated valve 1A, at least one of the operation port 85 or the valve opening / closing detection sensor 91, the stroke adjustment knob 92 which is an example of the “valve opening adjustment mechanism”, the opening / closing indicator 93, and the instant joint 96 has caps 26A, 26B, 26C. The functions can be changed only by changing the caps 26A, 26B, and 26C.

<Valve open / close detection sensor>
FIG. 7 is a sectional view of the air operated valve 1 </ b> A, in which the cap 26 </ b> B includes the valve opening / closing detection sensor 91. FIG. 8 is a top view of the air operated valve 1A shown in FIG.
In the air operated valve 1 </ b> A shown in FIG. 7, a cap 26 </ b> B including an operation port 85 and a valve opening / closing detection sensor 91 is rotatably attached to the upper end opening of the exterior member 21.

  The outer dimension of the cap 26B is the same as that of the cap 26A, and the upper end opening of the exterior member 21 is fixed by caulking so as to be rotatable. On the end face of the cap 26 </ b> B, a cylindrical recess 101 is provided in a cylindrical shape at the opening of the insertion hole 81. An operation port 85 is provided outside the insertion hole 81 on the upper end surface of the cap 26B in the figure. The operation port 85 communicates with the cylindrical recess 101 via the bypass channel 102. Further, a connection hole 103 is provided on the upper end surface of the cap 26B in the figure so as to overlap the insertion hole 81 while shifting the axis line from the insertion hole 81. A female screw is formed on the inner peripheral surface of the connection hole 103, and the valve opening / closing detection sensor 91 is screwed. The valve opening / closing detection sensor 91 is screwed and fixed to the connection hole 103 so that the detection portion protrudes into the insertion hole 81.

  In the air operated valve 1 </ b> A, metal parts 105 and 106 are fixed to the tip of the piston rod 42 of the piston 23 and the tip of the piston rod 52 of the piston 24. The metal parts 105 and 106 are made of a metal material having high rigidity and strength, such as stainless steel and brass, and having magnetism. The metal parts 105 and 106 are fixed to the resin piston rods 42 and 52 by press-fitting, insert molding, adhesion, welding or the like.

  In the air operated valve 1A to which the cap 28B is attached, the air supply / exhaust pipe is provided above the operation port 85, the wiring of the valve opening / closing detection sensor 91 is drawn upward, and the valve opening / closing state is determined by the valve opening / closing detection sensor 91. To detect.

  That is, in the air operated valve 1A, when the pistons 23 and 24 are lifted to open the valve, the metal part 106 of the piston rod 52 provided on the piston 24 approaches the valve opening / closing detection sensor 91. The valve opening / closing detection sensor 91 recognizes the metal part 106 and detects that the air operated valve 1A is in the valve open state. On the other hand, in the air operated valve 1A, the metal part 106 moves away from the valve opening / closing detection sensor 91 when the pistons 23 and 24 are lowered to close the valve. When it becomes difficult to recognize the metal part 106, the valve opening / closing detection sensor 91 detects that the air operated valve 1A is in the valve closed state.

<Stroke adjustment knob>
By the way, the cap 26B is provided with a connection hole 103 so that the valve opening / closing detection sensor 91, the stroke adjusting knob 92, and the opening / closing indicator 93 can be attached in common.

FIG. 9 is a view in which a stroke adjustment knob 92 is attached to the cap 26B of the air operated valve 1A shown in FIG. FIG. 10 is a top view of the air operated valve 1A shown in FIG.
In the air operated valve 1A shown in FIGS. 9 and 10, a stroke adjusting knob 92, which is an example of a “valve opening adjusting mechanism”, is screwed into the connection hole 103 of the cap 26B. The stroke adjustment knob 92 adjusts the position of the lower end portion protruding from the insertion hole 81 by adjusting the rotation amount. The air operated valve 1 </ b> A moves the pistons 23 and 24 until the piston rod 52 comes into contact with the stroke adjustment knob 92, and adjusts the amount (stroke) by which the diaphragm 9 is separated from the valve seat 8. At this time, the tip of the piston rod 52 is pressed against the stroke adjustment knob 92, but since the metal part 106 is fixed to the tip, the piston rod 52 is worn or deformed by an impact hitting the stroke adjustment knob 92. There is no. If a memory is provided around the stroke adjustment knob 92 as in the cap 26B shown in FIG. 10, the flow rate can be adjusted easily.

<Open / close indicator>
FIG. 11 is a view in which an open / close indicator 93 is attached to the cap 26B of the air operated valve 1A shown in FIG. 7, and shows a valve closed state. FIG. 12 shows the open state of the air operated valve 1A shown in FIG.
In the air operated valve 1A shown in FIGS. 11 and 12, an open / close indicator 93 is screwed into the connection hole 103 of the cap 26B. The open / close indicator 93 is provided so that the rod 94 can protrude to the outside, and the rod 94 is abutted against the piston rod 52 of the piston 24 by a coil spring 95. According to the air operated valve 1A, when the pistons 23 and 24 move upward, the rod 94 is pushed up against the elastic force of the coil spring 95 as shown in FIG. When the pistons 23 and 24 are lowered, the rod 94 is lowered by the elastic force of the coil spring 95 as shown in FIG. Therefore, the user can determine the valve open / close state based on the amount by which the rod 94 projects from the open / close indicator 93. In this case, since the metal member 106 is fixed to the piston rod 52, the piston rod 52 is not rubbed against the rod 94 and worn.

<Instant fittings>
FIG. 13 is a view in which the cap 26B of the air operated valve 1A shown in FIG.
In the air operated valve 1 </ b> A shown in FIG. 13, the exterior member 21 is attached to a cap 26 </ b> C equipped with an instant joint 96. The cap 26C is provided with an operation port 85 at a position shifted outward from the insertion hole 81 so that the instant joint 96 can be attached. The operation port 85 communicates with the cylindrical recess 101 via the bypass channel 102. Since the air operated valve 1A can connect the air supply / exhaust pipe to the instant joint 96 with one touch, piping is easy.

<Effect>
Accordingly, the air operated valve 1A according to the first embodiment forms a cylinder by attaching the plate-shaped cap 26A and the base 25 to the opening portions at both ends of the pipe-shaped exterior member 21, so that the exterior member 21, the cap 26A, Cutting that forms the base 25 into a cup shape is unnecessary, and the exterior member 21, the cap 26 </ b> A, and the base 25 do not have a useless portion that is cut by cutting. Therefore, according to the air operated valve 1A of the first embodiment, it is possible to reduce the processing cost and the material cost and to reduce the cost.

  Further, according to the air operated valve 1A of the first embodiment, the cap 26A and the base 25 are inserted by inserting the cap 26A and the base 25 into the opening of the exterior member 21 and caulking the outer peripheral surface of the opening of the exterior member 21. Since 25 is attached to the exterior member 21, the cylinder can be easily assembled.

  Further, according to the air operated valve 1A of the first embodiment, the interior parts 22A, 22B, and 22C, which are resin molded products, are arranged in the hollow portion of the metal exterior member 21 to make the cylinder wall a double structure. Therefore, the thickness of the exterior member 21 can be reduced to reduce the weight of the entire valve.

  The air operated valve 1A of the first embodiment includes a cap 26A provided with an operation port 85, an operation port 85 and a valve opening / closing detection sensor 91 or a valve opening adjusting mechanism 92, a cap 28B provided with an indicator 94, an instant joint. By simply changing the cap 26C provided with 96, it is possible to change the function by sharing components (exterior member 21, base 25, etc.) excluding the first closing plate, thereby reducing costs.

In addition, the piping connected to the operation port 85 and the instant joint 96 and the wiring of the valve opening / closing detection sensor 91 can be drawn upward, and the stroke adjustment rod 92 can be operated from above. It can be carried out.
And since the cap 28B can use the connection hole 103 (attachment part) in common about the valve opening / closing detection sensor 91, the valve opening adjustment mechanism 92, and the indicator 94, it is not necessary to design the 1st closing plate exclusively, and cost Can be down.

  In the air operated valve 1A of the first embodiment, the cap 26B is rotatably attached to the exterior member 21. Therefore, for example, even when a plurality of air operated valves 1A are arranged in parallel, if the first closing plate 28B is rotated with respect to the exterior member 21, the operation port 85 is considered without considering interference with other parts. Further, the positions of the valve opening / closing detection sensor 91, the stroke adjustment knob 92, and the opening / closing indicator 93 can be easily adjusted and aligned.

(Second Embodiment)
Next, a second embodiment of the air operated valve of the present invention will be described with reference to the drawings. FIG. 14 is a cross-sectional view of an air operated valve 1B according to the second embodiment of the present invention, in which the cap 26D includes only the operation port 85. FIG. 15 is a top view of the air operated valve 1B shown in FIG.
The air operated valve 1B of the second embodiment is that the cap 26D is divided into a fixed plate 111 that is an example of a “first plate” and an option plate 112 that is an example of a “second plate”. It is different from the air operated valve 1A of the first embodiment. Therefore, here, it demonstrates centering on a different point from 1st Embodiment, about the structure which is common in 1st Embodiment, the code | symbol same as 1st Embodiment is attached | subjected to drawing, and description is omitted suitably.

  As shown in FIG. 14, the cap 26D is divided into a fixing plate 111 and an option plate 112A. As shown in FIG. 15, the fixing plate 111 and the option plate 112A are fixed from above with two bolts 113, 113. It is.

  The fixing plate 111 is provided with an insertion hole 81 in a columnar shape, and a cylindrical recess 101 is formed in the opening of the insertion hole 81. Further, a bypass passage 102 is provided through the fixed plate 111 so as to connect to the cylindrical recess 101. A mounting groove 82 for mounting the seal member 37 is formed on the end surface of the fixed plate 111 so as to surround the insertion hole 81, the cylindrical recess 101, and the bypass passage 102. The fixing plate 111 is provided with a first connection hole 115 so as to overlap the insertion hole 81 while shifting the axis from the insertion hole 81. A mounting groove 114 for mounting the seal member 38 is formed in an annular shape on the inner wall of the insertion hole 81 and airtightly partitions between the piston rod 52 of the piston 24 and the inner peripheral surface of the insertion hole 81. The fixed plate 111 also includes a press-fit portion 83 and a caulking groove 84.

  On the other hand, the option plate 112A is provided with an operation port 85 corresponding to the bypass flow path 102 of the fixed plate 111. The option plate 112 </ b> A has a mounting groove 117 for mounting the seal member 39 around one end opening of the operation port 85.

  In such an air operated valve 1 </ b> B, the exterior member 21 is caulked and fixed to the fixing plate 111. In the fixing plate 111, the option plate 112 </ b> A is fixed to the fixing plate 111 with bolts 113 and 113 and covers the first connection hole 115. Accordingly, as shown in FIG. 14, the cap 26 </ b> D including the option plate 112 </ b> A has only a function of supplying and exhausting operation air from the operation port 85.

  In the air operated valve 1B of the second embodiment, since the option plate 112A is detachably provided to the fixed plate 111, the function is changed by replacing the option plate 112A with the other option plates 112B and 112C. Is possible.

FIG. 16 is a diagram in which the option plate 112A of the air operated valve 1B shown in FIG. 14 is replaced with an option plate 112B including a valve opening / closing detection sensor 91. FIG. 17 is a top view of the air operated valve 1B shown in FIG.
As shown in FIGS. 16 and 17, in the air operated valve 1 </ b> B, the option plate 112 </ b> B is fixed to the fixed plate 111 with bolts 113. In the option plate 112B, the operation port 85 corresponding to the bypass flow path 102 of the fixed plate 111 is provided so as to be offset from the center. In addition, the option plate 112B is provided with a second connection hole 116 corresponding to the first connection hole 115 shifted from the center. A female screw is formed on the inner peripheral surface of the second connection hole 116 so that the valve opening / closing detection sensor 92 can be screwed. Therefore, the air operated valve 1B can have a valve opening / closing detection function simply by removing the bolt 113 and replacing the option plate 112A with the option plate 112B.

18 is a cross-sectional view when the stroke adjusting knob 92 is attached to the air operated valve 1B shown in FIG. FIG. 19 is a cross-sectional view when the open / close indicator 93 is attached to the air operated valve 1B shown in FIG.
In the air operated valve 1B shown in FIG. 16, a valve opening / closing detection sensor 91 is detachably attached to the second connection hole. Therefore, the air operated valve 1B can be provided with a stroke adjustment function by screwing the stroke adjustment knob 92 into the second connection hole 116 as shown in FIG. Further, as shown in FIG. 19, the air operated valve 1B can be provided with an indicator function for visually recognizing the valve open / close state by screwing the open / close indicator 93 into the second connection hole 116.

FIG. 20 is a diagram in which the option plate 112A constituting the cap 26D of the air operated valve shown in FIG. 14 is replaced with an option plate 112C equipped with an instant joint 96.
The option plate 112C is provided with a step by providing the operation port 85 shallower than the option plate 112A, and the instant joint 96 is attached so that the instant joint 96 abuts the step. The air operated valve 1B shown in FIG. 20 including the option plate 112C can connect the air supply / exhaust pipe to the operation port 85 with one touch from above.

<Effect>
Therefore, according to the air operated valve 1B of the second embodiment, the cap 26D, the fixing plate 111 attached to one opening of the exterior member, the second connection hole for attaching the operation port 85, the valve opening / closing detection sensor 91, and the like. 116 is divided into an option plate 112 (112A, 112B, 112C) that has at least one of 116 and is detachably attached to the fixed plate 111. Therefore, the second plates 112A, 112B, 112C are replaced even after the valve is assembled. Then, the function can be changed.

  Specifically, in the air operated valve 1A of the first embodiment described above, the cap 26C including the instant joint 96 and the cap 26B including the valve opening / closing detection sensor 91 and the like must be before assembling the air operated valve 1A. However, in the air operated valve 1B of the second embodiment, if the option plates 112B and 112C are replaced, the specification including the instant joint 96 and the valve opening / closing detection sensor 91 are provided. Specifications can be easily changed at the user site.

  Furthermore, in the air operated valve 1B, since the option plate 112B is arbitrarily connected to the second connection hole 116 with the valve opening / closing detection sensor 91, the stroke adjustment knob 92, and the opening / closing indicator 93, the option plate 112B is replaced. Even if not, the function can be changed only by exchanging the valve opening / closing detection sensor 91, the stroke adjustment knob 92, and the opening / closing indicator 93.

  Further, in the air operated valve 1B of the second embodiment, the bolts 113, 113 are fastened from above and the option plates 112A, 112B, 112C are fixed to the fixed plate 111, so the air operated valve 1B is assembled to the line. Even in this state, it is possible to easily replace the option plates 112A, 112B, and 112C.

  Note that the present invention is not limited to the above-described embodiment, and various applications are possible.

(1) For example, in the above embodiment, the both end portions of the exterior member 21 are crimped and fixed after being press-fitted into the base 25 and the cap 26A.
On the other hand, as shown in part P of FIG. 21, both end portions of the exterior member 21 are press-fitted into the base 25 and the cap 26A, and then both end portions of the exterior member 21 are fixed to the base 25 and the cap 26A by welding. Good. According to this method, the base 25 and the cap 26A are firmly fixed to the exterior member 21, and fluid leakage can be reliably prevented.
Further, unlike the cap 26E shown in FIG. 22, the caulking grooves 74 and 84 are not formed in the base 25 and the cap 26E. The exterior member 21 may be attached to the base 25 and the cap 26E only by press-fitting or adhering, or by adhering the press-fitted part with an adhesive or the like. According to this method, the trouble of processing the caulking grooves 74 and 84 can be saved.
23, male screws are formed on the outer peripheral surfaces of the lower ends of the base 135 and the cap 136, while female screws are formed on the inner peripheral surface of the opening end of the exterior member 137. 135 and the cap 136 may be screwed and engaged. Although this method requires screw processing and increases costs, since both ends of the exterior member 137 are not press-fitted, there is an advantage that the base 135, the cap 136, and the exterior member 137 can be easily detached and reused.

(2) In the first embodiment, the exterior member 21 is caulked to the caps 26B and 26C so that the caps 26B and 26C can be rotated. On the other hand, as shown in FIG. 24, a friction member 130 such as an O-ring may be mounted between the press-fit portion 83 of the cap 26B and the exterior member 21. In this case, when the caps 26B and 26C are rotated, the friction member 130 generates resistance, and an appropriate operational feeling can be given to the user.

(3) For example, in the above embodiment, the D-cut passage 64 is formed on the outer peripheral surface of the interior parts 22A, 22B, and 22C, so that the conduction flow path is provided between the interior parts 22A, 22B, and 22C and the exterior member 21. 31 was formed. On the other hand, instead of the D-cut passage 64, as shown in FIG. 25, a plurality of conductive grooves 131 having a rectangular cross section may be formed on the outer peripheral surfaces of the interior parts 22A, 22B, and 22C. In this case, a conduction flow path 31 is formed between the conduction groove 131 of the interior part 22A, 22B, 22C and the inner peripheral surface of the exterior member 21. In addition, the D-cut passage 64 is not provided on the outer peripheral surfaces of the interior parts 22A, 22B, and 22C, and a conduction groove 132 is formed on the inner peripheral surface of the exterior member 21, as shown in FIG. A conduction channel 31 may be formed between the two. The conduction groove 132 can be formed together when the exterior member 21 is drawn or extruded, and the processing cost is low. Furthermore, the conduction groove 131 may be provided in the interior parts 22A, 22B, and 22C, and the conduction groove 132 may be provided in the exterior member 21.

(4) In the above embodiment, the outer diameters of the air operated valves 1A and 1B are cylindrical. However, the outer diameter may be a polygonal shape, and the plate-like base 25 and the cap 26 may be attached to the upper and lower openings. . In this case, the exterior member 21 may have a polygonal outer peripheral surface shape and a cylindrical inner peripheral surface shape so that the interior part 22 can be loaded. Both may be polygonal, and the outer peripheral surface shape of the interior part 22 may be polygonal. Even in such a case, since the exterior member 21 has a pipe shape, the exterior member 21 can be easily manufactured by providing a polygonal pipe by drawing or extruding and cutting it to a predetermined length. Can do. Further, since the base 26 and the cap 26 have a simple plate shape, they can be manufactured inexpensively and easily by punching or simple cutting.

(5) In the above embodiment, the interior parts 22A, 22B, 22C and the pistons 23, 24 are made of resin molded products. However, such as aluminum die cast molded products and lost wax molded products, the number of cutting processes is small and can be molded at low cost. You may comprise an interior part and a piston with a molded article. When the air operated valve 1A, 1B controls a high-temperature control fluid or is heated, the overall temperature exceeds 80 degrees, and the resin molded product is used as the interior parts 22A, 22B, 22C and the pistons 23, 24. May not be available. In this case, the interior parts 22A, 22B, 22C and the pistons 23, 24 are constituted by aluminum die-cast moldings or lost wax moldings, which are metal, even in an environment where the overall temperature exceeds the heat resistance temperature exceeding 80 degrees. It is preferable that the air operated valves 1A and 1B can be used.

(6) In the above embodiment, the interior parts 22A, 22B, 22C are all the same shape. On the other hand, the shape of the interior parts 22A, 22B, and 22C may be changed according to the position where the exterior member 21 is mounted. That is, the interior parts 22A, 22B, and 22C serve as a partition plate that partitions the first and second piston chambers 27 and 28 because the closed end faces increase the thickness of the closed end faces, while the interior parts 22A and 22C. Since the closed end face is supported by the base 25 and the cap 26 to supplement the strength, the thickness of the closed end face may be reduced. Thus, by changing the shapes of the interior parts 22A, 22B, and 22C according to the purpose, the materials of the interior parts 22A, 22B, and 22C can be used appropriately without waste. Further, by reducing the thickness of unnecessary portions, the valve can be reduced in size and weight.

(7) In the above embodiment, the exterior member 21 is a metal pipe. On the other hand, the exterior member 21 may be a resin molded product. In this case, in order to ensure the pressure resistance by increasing the thickness of the exterior member 21, the valve is increased in size. However, cost can be reduced because it can be easily manufactured by injection molding or the like. In addition, the weight can be reduced.

(8) In the above embodiment, the metal parts 105, 106 are provided on the pistons 23, 24 (FIGS. 7, 14, etc.). On the other hand, if the pistons 23 and 24 do not come into contact with other parts, a metal part may be provided only at the tip part in contact with the stem 13.

(9) In the above embodiment, the driving force of the actuator unit 3 is transmitted to the diaphragm 9 via the stem 13. On the other hand, the diaphragm 9 may be fixed to the tip portions of the pistons 23 and 24 so that the driving force is directly transmitted to the diaphragm 9.
(10) In the above embodiment, the air operated valve 1 is a two-way valve that switches the communication state between the primary side port 5 and the secondary side port 6. On the other hand, you may apply the structure of the actuator part 3 demonstrated by the said embodiment to multiway valves, such as a three-way valve. Moreover, although the air operated valve 1 of the said embodiment is a diaphragm valve, a poppet valve may be sufficient.
(11) In the above embodiment, the control fluid flows from the primary port 5 to the secondary port 6, but the air operated valve 1 </ b> A so that the control fluid flows from the secondary port 6 to the primary port 5. , 1B may be used.

It is sectional drawing of the air operated valve which concerns on 1st Embodiment of this invention. It is a top view of the air operated valve shown in FIG. It is the center longitudinal cross-sectional view of the 1st piston and 2nd piston which are shown in FIG. It is an external appearance perspective view of the interior component shown in FIG. It is sectional drawing which shows the relationship between the cap shown in FIG. 1, a base, and an exterior member. It is an air operated valve shown in FIG. 1, Comprising: It is a figure which shows the operation air flow path structure. It is the figure which provided the valve opening / closing detection sensor in the air operated valve shown in FIG. FIG. 8 is a top view of the air operated valve shown in FIG. 7. It is the figure which attached the stroke adjustment knob to the cap of the air operated valve shown in FIG. FIG. 10 is a top view of the air operated valve shown in FIG. 9. It is the figure which attached the opening / closing indicator to the cap of the air operated valve shown in FIG. 7, Comprising: A valve closed state is shown. FIG. 12 shows the open state of the air operated valve shown in FIG. It is the figure which provided the instant coupling in the air operated valve shown in FIG. It is sectional drawing of the air operated valve which concerns on 2nd Embodiment of this invention, Comprising: The cap is provided with only an operation port. FIG. 15 is a top view of the air operated valve shown in FIG. 14. It is the figure which replaced the option plate of the air operated valve shown in FIG. 14 with the option plate provided with a valve opening / closing detection sensor. FIG. 17 is a top view of the air operated valve shown in FIG. 16. It is sectional drawing at the time of mounting | wearing with the stroke adjustment knob in the air operated valve shown in FIG. It is sectional drawing at the time of mounting | wearing with the open / close indicator to the air operated valve | bulb shown in FIG. It is the figure which replaced the option plate which comprises the cap of the air operated valve shown in FIG. 14 with the option plate which attached the instant coupling. It is a modification of the connection structure which connects the exterior member of the air operated valve of this invention to a cap and a base. It is a modification of the connection structure which connects the exterior member of the air operated valve of this invention to a cap and a base. It is a modification of the connection structure which connects the exterior member of the air operated valve of this invention to a cap and a base. This is a modification of the air operated valve of the present invention, in which an O-ring (friction member) is attached to the press-fit portion. It is a figure which shows the modification of the interior components which comprise the air operated valve of this invention. It is a figure which shows the modification of the exterior member which comprises the air operated valve of this invention. It is sectional drawing of the conventional air operated valve.

Explanation of symbols

1A, 1B Air operated valve 2 Valve part 21 Exterior member 22 Interior component (interior member)
23 Piston 24 Piston 25 Base (second closing plate)
26A, 26B, 26C, 26D Cap (first closing plate)
27 First piston chamber 28 Second piston chamber 73 Press-fit portion 74 Caulking groove 83 Press-fit portion 84 Caulking groove 85 Operation port 91 Valve open / close detection sensor 92 Stroke adjustment knob (valve opening adjusting mechanism)
93 Open / close indicator (indicator)
96 Instant Fitting (Fitting)
111 Fixed plate (first plate)
112 Option plate (second plate)

Claims (5)

In an air operated valve system composed of an air operated valve that drives a valve portion by sliding a piston in a cylinder using operating air,
The cylinder is
A pipe-shaped exterior member;
A first closing plate attached to one opening of the exterior member;
Having a second closing plate attached to the other opening of the exterior member;
The air operated valve is one selected from the following (1) to ( 3 );
( 1 ) By attaching the first closing plate provided with an operation port and a valve opening / closing detection sensor, an air operated valve for performing a valve opening / closing detection sensor function is obtained.
( 2 ) By attaching the first closing plate provided with the operation port and the valve opening adjustment mechanism, an air operated valve that performs the valve opening adjustment mechanism function is obtained.
( 3 ) By attaching the operation port and the first closing plate provided with the indicator, it becomes an air operated valve that performs the indicator function,
Air operated valve system featuring In the air operated valve used in the air operated valve system according to claim 1,
An air operated valve, wherein the first closing plate and the second closing plate are attached to the exterior member by at least one of caulking, welding, press-fitting, adhesion, and locking structure. In the air operated valve according to claim 2,
The cylinder is
An air operated valve characterized in that an interior member forming a piston chamber for housing the piston is disposed in a hollow portion of the exterior member, and a cylinder wall is formed in a double structure. In the air operated valve according to claim 3,
An air operated valve, wherein the first closing plate is rotatably attached to the exterior member by caulking or press-fitting . In the air operated valve according to claim 4,
The first closure plate, the one a first plate attached to the opening portion of the outer member has an operating port and mounting unit, is divided into a second plate removably attached to the first plate Air operated valve characterized by that.

Images