JP5834101B2 - Display device - Google Patents

Description

The present invention relates to a display device and a display system using the display device. In particular, the present invention relates to a display device that performs wireless signal transmission and a display system that performs wireless signal transmission. The present invention also relates to an electronic device using such a display device and a display system.

In recent years, display devices have been actively developed due to an increase in large display devices such as liquid crystal televisions. In particular, a technique of integrally forming a driver circuit (hereinafter also referred to as an internal circuit) including a pixel circuit, a shift register, and the like by using a transistor formed over an insulating substrate has a low power consumption,
In order to greatly contribute to cost reduction, development is being actively promoted. The internal circuit formed on the insulating substrate is a flexible printed circuit board (FPC).
controller IC etc. (hereinafter referred to as ed Circuit) etc.
Connected to an external circuit). The FPC performs an electrical connection between an internal circuit and an external circuit. The operation of the display device is controlled by supplying a power supply voltage, a control signal, video data, and the like from an external circuit to the internal circuit (see Patent Document 1).

JP-A-11-281996

However, in the conventional display device, various problems are caused by connecting the internal circuit and the external circuit through an input interface such as an FPC.

For example, when FPC is crimped, a short circuit is likely to occur, and malfunction is likely to occur. Also,
A connection portion between an internal circuit or an external circuit and an input interface such as an FPC is vulnerable to heat, bending stress, and the like, and is easily broken. In addition, since the power supply voltage, control signal, video data, and the like are supplied from the FPC terminal to the internal circuit, the layout of the routing wiring that connects the FPC terminal and the internal circuit restricts the location and number of FPCs. It is easy to receive and the flexibility of the layout of the routing wiring is reduced. As a result, problems such as a voltage drop and a delay due to the layout wiring layout are likely to occur. Further, in recent years, with the increase in size of display devices, further reduction in power consumption has been demanded.

By the way, in recent years, individual identification technology using radio communication such as an electromagnetic field or radio waves has attracted attention. In particular, as a semiconductor device that updates data by wireless communication, RFID (Radi)
An individual identification technique using an o Frequency Identification) tag has attracted attention.

An RFID tag (hereinafter, also simply referred to as RFID) is an active type (active type) capable of transmitting radio waves or electromagnetic waves including RFID information depending on whether it has a built-in power supply or receives power supply from the outside. ) RFID and a passive type (passive type) RFID that is driven by using electric power of an external radio wave or electromagnetic wave (carrier wave). Among these, in the active type RFID, RFI
A power source for driving D is built in, and a battery is provided as a power source. Further, in the passive type, a power source for driving the RFID is created by using electric power of an external radio wave or electromagnetic wave (carrier wave), and a configuration without a battery is realized.

In view of the problems that have arisen in the conventional display device in which the internal circuit and the external circuit are connected by an input interface such as an FPC, the internal circuit and the external circuit are connected by using wireless signal transmission. It is an object of the present invention to provide a display device and a display system that are electrically connected and display a desired image using wireless signal transmission.

The present invention provides a non-contact display device in which an internal circuit and an external circuit are electrically connected by using wireless signal transmission. Furthermore, a display device for recording a video signal based on video data in advance and displaying a desired video using wireless signal transmission is provided.

A specific configuration of the display device according to the present invention includes a memory circuit in which a video signal is recorded, an antenna circuit that receives a radio signal, a demodulation circuit that demodulates the radio signal received by the antenna circuit, and a demodulation circuit. A controller that receives the demodulated radio signal, instructs the readout of the video signal from the memory circuit by the radio signal, and outputs a scanning line control signal and a signal line control signal;
A signal line driver circuit to which a video signal output from the signal line control signal and the memory circuit is input;
It has a scanning line driving circuit to which a scanning line control signal is input, and a pixel circuit that is controlled by the signal line driving circuit and the scanning line driving circuit to display an image.

Another configuration of the display device according to the present invention includes a memory circuit in which a video signal is recorded, an antenna circuit that transmits and receives a radio signal, a demodulation circuit that demodulates a radio signal received by the antenna circuit,
A controller that receives the radio signal demodulated by the demodulator circuit, instructs the readout of the video signal from the memory circuit by the radio signal, and outputs the scanning line control signal and the signal line control signal; and the signal line control signal and the memory circuit A signal line driving circuit to which an output video signal is input, a scanning line driving circuit to which a scanning line control signal is input, a pixel circuit controlled by the signal line driving circuit and the scanning line driving circuit, and a memory, and a memory And a modulation circuit that modulates a radio signal output from the circuit and inputs the modulated radio signal to the antenna circuit.

In addition, the configuration of the display system according to the present invention includes a display device and a wireless communication device that transmits and receives data by exchanging wireless signals with the display device, and the display device records video signals. A memory circuit, an antenna circuit that receives a radio signal, a demodulation circuit that demodulates the radio signal received by the antenna circuit, and a radio signal demodulated by the demodulation circuit are input from the memory circuit by the radio signal. A controller that commands reading and outputs a scanning line control signal and a signal line control signal, a signal line driving circuit to which a video signal output from the signal line control signal and the memory circuit is input, and a scanning line control signal are input And a pixel circuit controlled by the signal line driving circuit and the scanning line driving circuit to display an image, and the display device transmits from the wireless communication device. And displaying the image by radio signal.

In addition, another configuration of the display system according to the present invention includes a display device and a wireless communication device that transmits and receives data by transmitting and receiving a wireless signal to and from the display device. A memory circuit that is recorded, an antenna circuit that transmits and receives radio signals, a demodulation circuit that demodulates radio signals received by the antenna circuit, and a radio signal demodulated by the demodulation circuit are input,
A controller for instructing readout of a video signal from a memory circuit by a wireless signal and outputting a scanning line control signal and a signal line control signal, and a signal line drive for inputting the signal line control signal and the video signal output from the memory circuit A circuit, a scanning line driving circuit to which a scanning line control signal is input, a pixel circuit that is controlled by the signal line driving circuit and the scanning line driving circuit, and a radio signal output from the memory circuit; A modulation circuit that inputs to the antenna circuit,
The display device displays an image by a wireless signal transmitted from the wireless communication device.

In the above structure, the memory circuit is preferably a nonvolatile memory.

Note that in this specification, a transistor being on refers to a state in which a voltage between a gate and a source of the transistor exceeds a threshold voltage, and a current flows between the source and the drain. In addition, the transistor being off means a state in which the voltage between the gate and the source of the transistor is lower than the threshold voltage and no current flows between the source and the drain.

Note that it is difficult to distinguish between a source and a drain because of the structure of a transistor. Further, depending on the operation of the circuit, the level of the potential may be switched. Therefore, in this specification,
The source and drain are not particularly specified, and are described as a first electrode and a second electrode. For example, when the first electrode is a source, the second electrode indicates a drain, and conversely, when the first electrode is a drain, the second electrode indicates a source. .

Note that in this document (specification, claims or drawings), one pixel represents one color element. Therefore, in the case of a color display device composed of R (red), G (green), and B (blue) color elements, the minimum unit of an image is composed of three pixels, an R pixel, a G pixel, and a B pixel. Shall be. Note that the color elements are not limited to three colors, and more than that may be used, or colors other than RGB may be used. For example, white (W) may be added to obtain RGBW. Further, RGB may be obtained by adding one or more colors such as yellow, cyan, and magenta. Further, for example, a similar color may be added for at least one color of RGB. For example, R, G, B1, and B2 may be used. B1 and B2 are both blue but have different wavelengths. By using such color elements, it is possible to perform display closer to the real thing. In addition, power consumption can be reduced.

Further, the brightness may be controlled by using a plurality of areas for one color element. In this case, one color element is one pixel, and each area for controlling the brightness is a sub-pixel. For example,
When the area gradation method is performed, there are a plurality of areas for controlling the brightness for each color element, and the gradation is expressed as a whole. At this time, each area for controlling brightness is set as a sub-pixel. Therefore,
One color element is composed of a plurality of sub-pixels. In that case, the size of the region contributing to display may be different depending on the sub-pixel. Further, in a plurality of brightness control areas for one color element, that is, in a plurality of sub-pixels constituting one color element, a signal supplied to each is slightly different so as to widen a viewing angle. It may be.

Note that in this document (the specification, the claims, the drawings, and the like), the pixel includes a case where the pixels are arranged (arranged) in a matrix. Here, the pixels are arranged (arranged) in a matrix form when they are arranged in a straight line in the vertical direction or the horizontal direction,
Including the case where they are lined up on a jagged line. Thus, for example, three color elements (for example, RGB)
In the case of performing full-color display in (), the case where the stripes are arranged and the case where the dots of the three color elements are so-called delta arrangements are included. Furthermore, the case where a Bayer is arranged is included. The size of the display area may be different for each dot of the color element. This can reduce power consumption or extend the life of the display element.

Note that in this document (the specification, the claims, the drawings, and the like), a display device which is a device having a display element and a display element can employ various modes and have various elements. For example, display elements and display devices include EL elements (EL elements including organic and inorganic substances, organic EL elements, inorganic EL elements), electron emission elements, liquid crystal elements, electronic ink, electrophoretic elements, and grating light valves (GLV). , Plasma display (PDP), digital micromirror device (DMD), piezoelectric ceramic display, carbon nanotube, and other display media whose contrast, brightness, reflectance, transmittance, and the like change due to electromagnetic action can be used. . An EL display is used as a display device using an EL element, and a field emission display (F) is used as a display device using an electron-emitting device.
ED) and SED type flat display (SED: Surface-conductio)
As a display device using a liquid crystal element such as n Electron-emitter Display, a liquid crystal display (a transmissive liquid crystal display, a transflective liquid crystal display,
As a display device using a reflective liquid crystal display, a direct-view liquid crystal display, a projection liquid crystal display), electronic ink, or an electrophoretic element, there is electronic paper.

Note that various types of transistors can be used as the transistor described in this document (the specification, the claims, the drawings, or the like). Thus, there is no limitation on the type of transistor used. For example, a thin film transistor (TFT) including a non-single-crystal semiconductor film typified by amorphous silicon, polycrystalline silicon, microcrystalline (also referred to as semi-amorphous) silicon, or the like can be used. When using TFT, there are various advantages. For example, since manufacturing can be performed at a lower temperature than that of single crystal silicon, manufacturing cost can be reduced or a manufacturing apparatus can be increased in size. Moreover, since a manufacturing apparatus can be enlarged, it can manufacture using a large sized substrate. Therefore, a large number of display devices can be manufactured at the same time, and can be manufactured at low cost. Furthermore, since it can be manufactured at a low temperature, a substrate having low heat resistance can be used. Therefore, a transistor can be manufactured on a transparent substrate. Further, light transmission through the display element can be controlled by using a transistor over a transparent substrate. Alternatively, since the thickness of the transistor is small, part of the film included in the transistor can transmit light. Therefore, the aperture ratio can be improved.

Note that when a polycrystalline silicon is manufactured, a catalyst element (such as nickel) is used, whereby crystallinity can be further improved and a transistor with favorable electrical characteristics can be manufactured.
As a result, a gate driver circuit (scanning line driving circuit), a source driver circuit (signal line driving circuit), and a signal processing circuit (signal generation circuit, gamma correction circuit, DA conversion circuit, etc.) can be integrally formed on the substrate. .

Note that when a microcrystalline silicon is manufactured, by using a catalyst element (such as nickel), crystallinity can be further improved and a transistor with favorable electrical characteristics can be manufactured.
At this time, crystallinity can be improved only by applying heat treatment without using a laser. As a result, a part of the gate driver circuit (scanning line driver circuit) and the source driver circuit (analog switch or the like) can be integrally formed on the substrate. Further, when a laser is not used for crystallization, unevenness in crystallinity of silicon can be suppressed. Therefore, a beautiful image can be displayed.

Of course, it is possible to manufacture polycrystalline silicon and microcrystalline silicon without using a catalytic element (such as nickel).

Alternatively, a transistor can be formed using a semiconductor substrate, an SOI substrate, or the like. By using these substrates, a transistor with small variations in characteristics, size, shape, and the like, high current supply capability, and small size can be manufactured. In addition, when these transistors are used, power consumption of the circuit can be reduced or high integration of the circuit can be achieved.

Alternatively, a transistor having a compound semiconductor or an oxide semiconductor such as ZnO, a-InGaZnO, SiGe, GaAs, IZO, ITO, or SnO, or a thin film transistor in which these compound semiconductor or oxide semiconductor is thinned can be used. I can do it. By using these compound semiconductors or oxide semiconductors, the manufacturing temperature of the thin film transistor can be lowered. For example, a transistor can be manufactured at room temperature. as a result,
A transistor can be formed directly on a substrate having low heat resistance, such as a plastic substrate or a film substrate. Note that these compound semiconductors or oxide semiconductors can be used not only for a channel portion of a transistor but also for other purposes. For example, these compound semiconductors or oxide semiconductors can be used as resistance elements, pixel electrodes, and transparent electrodes. Furthermore, since they can be formed or formed simultaneously with the transistor, cost can be reduced.

Alternatively, a transistor formed using an inkjet method or a printing method can be used. Thus, it can be manufactured at room temperature, manufactured at a low vacuum, or manufactured on a large substrate. Further, since the transistor can be manufactured without using a mask (reticle), the layout of the transistor can be easily changed. Furthermore, since it is not necessary to use a resist, the material cost is reduced and the number of processes can be reduced. Further, since a film is formed only on a necessary portion, the material is not wasted and cost can be reduced as compared with a manufacturing method in which etching is performed after film formation on the entire surface.

Alternatively, a transistor including an organic semiconductor or a carbon nanotube can be used. By using these organic semiconductors and carbon nanotubes, a transistor can be formed over a bendable substrate. Therefore, it can be strong against impact.

In addition, transistors with various structures can be used. For example, a MOS transistor, a junction transistor, a bipolar transistor, or the like can be used as the transistor described in this document (specification, claims, drawings, or the like). By using a MOS transistor, the size of the transistor can be reduced. Therefore, a large number of transistors can be mounted. In addition, a large current can be passed by using a bipolar transistor. Therefore, the circuit can be operated at high speed.

Note that a MOS transistor, a bipolar transistor, or the like may be formed over one substrate. Thereby, low power consumption, miniaturization, high-speed operation, etc. can be realized.

In addition, various transistors can be used.

Note that various types of substrates on which transistors are formed can be used and are not limited to specific types. As a substrate on which a transistor is formed, for example, a single crystal substrate, an SOI substrate, a glass substrate, a quartz substrate, a plastic substrate, a paper substrate, a cellophane substrate, a stone substrate, a wood substrate, a cloth substrate (natural fiber (silk, cotton, hemp) ), Synthetic fibers (nylon, polyurethane, polyester) or recycled fibers (including acetate, cupra, rayon, recycled polyester), leather substrates, rubber substrates, stainless steel substrates, substrates with stainless steel foil, etc. Can be used. Alternatively, the skin (skin surface, dermis) or subcutaneous tissue of an animal such as a human may be used as the substrate. Alternatively, a transistor may be formed over a certain substrate, and then the transistor may be transferred to another substrate, and the transistor may be disposed over another substrate. The substrate to which the transistor is transferred is a single crystal substrate, SOI substrate, glass substrate, quartz substrate, plastic substrate, paper substrate, cellophane substrate, stone substrate, wood substrate, cloth substrate (natural fiber (silk, cotton, hemp) , Synthetic fibers (including nylon, polyurethane, polyester) or recycled fibers (including acetate, cupra, rayon, recycled polyester), leather substrates, rubber substrates, stainless steel substrates, substrates with stainless steel foil, etc. be able to. Or the skin of human animals (skin surface, dermis)
Alternatively, subcutaneous tissue may be used as the substrate. Alternatively, a transistor is formed on a certain substrate,
The substrate may be polished and thinned. As substrates to be polished, single crystal substrates, SOI substrates, glass substrates, quartz substrates, plastic substrates, paper substrates, cellophane substrates, stone substrates, wood substrates, cloth substrates (natural fibers (silk, cotton, hemp), synthetic fibers) (Including nylon, polyurethane, polyester) or recycled fibers (including acetate, cupra, rayon, recycled polyester), leather substrates, rubber substrates, stainless steel substrates, substrates with stainless steel foils, etc. can be used. . By using these substrates, it is possible to form a transistor with good characteristics, a transistor with low power consumption, manufacture a device that is not easily broken, impart heat resistance, reduce weight, or reduce thickness.

Note that the structure of the transistor described in this document (the specification, the claims, the drawings, or the like) can take a variety of forms. For example, a multi-gate structure having two or more gate electrodes may be used. When the multi-gate structure is used, the channel regions are connected in series, so that a plurality of transistors are connected in series.
The multi-gate structure reduces off-state current, improves the breakdown voltage of the transistor to improve reliability, or operates between the drain and source even when the drain-source voltage changes when operating in the saturation region. The current does not change so much, and a flat characteristic can be obtained.
Alternatively, a structure in which gate electrodes are arranged above and below the channel may be employed. By adopting a structure in which the gate electrodes are arranged above and below the channel, the channel region is increased, so that the current value can be increased and a depletion layer can be easily formed to improve the S value. When gate electrodes are provided above and below a channel, a structure in which a plurality of transistors are connected in parallel is obtained. In addition, the gate electrode may have a structure disposed above the channel or a structure disposed below the channel. The transistor structure may be a normal stagger structure or an inverted stagger structure. Furthermore, the channel region may be divided into a plurality of regions, may be connected in parallel, or may be connected in series. In addition, a source electrode or a drain electrode may overlap with the channel (or a part thereof). By using a structure in which a source electrode or a drain electrode overlaps with a channel (or part of it), it is possible to prevent electric charges from being accumulated in part of the channel and unstable operation. The transistor may have a structure having an LDD region. By providing an LDD region, the drain-source current can be reduced even when the drain-source voltage changes when operating in the saturation region, reducing the off-state current, improving the breakdown voltage of the transistor, or improving the reliability. Does not change so much, and a flat characteristic can be obtained.

Note that wiring, electrodes, conductive layers, conductive films, terminals, vias, plugs, etc. are made of aluminum (Al).
, Tantalum (Ta), titanium (Ti), molybdenum (Mo), tungsten (W), neodymium (Nd), chromium (Cr), nickel (Ni), platinum (Pt), gold (Au), silver (
Ag), copper (Cu), magnesium (Mg), scandium (Sc), cobalt (Co)
, Zinc (Zn), niobium (Nb), silicon (Si), phosphorus (P), boron (B), arsenic (As), gallium (Ga), indium (In), tin (Sn), oxygen (O) One or more elements selected from the group consisting of, or a compound, alloy material (for example, indium tin oxide (ITO), indium, etc.) containing one or more elements selected from the group Zinc oxide (IZO), indium tin oxide containing silicon oxide (ITSO), zinc oxide (ZnO), tin oxide (SnO), tin cadmium oxide (CTO), aluminum neodymium (A
1-Nd), magnesium silver (Mg—Ag), molybdenum niobium (Mo—Nb), and the like. Alternatively, the wiring, the electrode, the conductive layer, the conductive film, the terminal, and the like are preferably formed using a substance in which these compounds are combined. Or one or more elements selected from the group and a silicon compound (silicide) (for example, aluminum silicon, molybdenum silicon, nickel silicide, etc.), one or more elements selected from the group and nitrogen It is desirable to form with a compound (eg, titanium nitride, tantalum nitride, molybdenum nitride, or the like).

Note that silicon (Si) may contain an n-type impurity element (such as phosphorus) or a p-type impurity element (such as boron). When silicon contains an impurity element, conductivity can be improved, or behavior similar to that of a normal conductor can be obtained. Therefore, it becomes easy to use as wiring, electrodes, and the like.

Note that silicon having various crystallinity such as single crystal, polycrystal (polysilicon), and microcrystal (microcrystal silicon) can be used. Alternatively, silicon having no crystallinity such as amorphous (amorphous silicon) can be used. By using single crystal silicon or polycrystalline silicon, resistance of a wiring, an electrode, a conductive layer, a conductive film, a terminal, or the like can be reduced. By using amorphous silicon or microcrystalline silicon, a wiring or the like can be formed by a simple process.

Note that since aluminum or silver has high conductivity, signal delay can be reduced.
Furthermore, since aluminum or silver is easy to etch, patterning is easy and fine processing can be performed.

Further, since copper has high conductivity, signal delay can be reduced. When using copper,
In order to improve adhesion, it is desirable to have a laminated structure.

Molybdenum or titanium is desirable because it has advantages such as no defects, easy etching, and high heat resistance even when in contact with an oxide semiconductor (ITO, IZO, or the like) or silicon.

Tungsten is desirable because it has advantages such as high heat resistance.

Neodymium is desirable because it has advantages such as high heat resistance. In particular, when an alloy of neodymium and aluminum is used, the heat resistance is improved, and aluminum does not easily cause hillocks.

Silicon is preferable because it can be formed at the same time as a semiconductor layer included in a transistor and has high heat resistance.

Also, ITO, IZO, ITSO, zinc oxide (ZnO), silicon (Si), tin oxide (S
nO) and tin cadmium oxide (CTO) have a light-transmitting property, and thus can be used for a portion that transmits light. For example, it can be used as a pixel electrode or a common electrode.

IZO is desirable because it is easy to etch and process. IZO is less likely to have a residue that remains when it is etched. Therefore, when IZO is used as the pixel electrode, it is possible to reduce the occurrence of defects (short circuit, alignment disorder, etc.) in the liquid crystal element and the light emitting element.

Note that the wiring, electrode, conductive layer, conductive film, terminal, via, plug, and the like may have a single-layer structure,
It may have a multilayer structure. With a single-layer structure, a manufacturing process of wiring, electrodes, conductive layers, conductive films, terminals, and the like can be simplified, the number of process days can be reduced, and cost can be reduced. Alternatively, by using a multilayer structure, it is possible to reduce the demerits while making use of the merits of each material, and to form wirings, electrodes, and the like with good performance.
For example, by including a low resistance material (such as aluminum) in the multilayer structure, the resistance of the wiring can be reduced. In addition, by using a laminated structure in which a low heat resistant material is sandwiched between high heat resistant materials, the heat resistance of a wiring, an electrode, or the like can be increased while taking advantage of the low heat resistant material. For example, a layered structure in which a layer containing aluminum is sandwiched between layers containing molybdenum, titanium, neodymium, or the like is preferable.

Further, when the wiring and electrodes are in direct contact with each other, they may adversely affect each other. For example,
One wiring, electrode, etc. are contained in the material of the other wiring, electrode, etc., changing their properties and failing to fulfill their original purpose. As another example, when forming or manufacturing a high-resistance portion, a problem may occur that prevents normal manufacture. In such a case, it is preferable to sandwich or cover a material that easily reacts by a laminated structure with a material that does not easily react. For example, IT
When connecting O and aluminum, it is desirable to sandwich titanium, molybdenum, or a neodymium alloy between ITO and aluminum. When silicon and aluminum are connected, it is desirable to sandwich titanium, molybdenum, or a neodymium alloy between ITO and aluminum.

In addition, wiring means what the conductor is arrange | positioned. The wiring may extend linearly or may be arranged short without extending. Therefore, the electrode is included in the wiring.

Note that carbon nanotubes may be used for wirings, electrodes, conductive layers, conductive films, terminals, vias, plugs, and the like. Furthermore, since the carbon nanotube has translucency, it can be used in a portion that transmits light. For example, it can be used as a pixel electrode or a common electrode.

Note that in this document (specification, claims, drawings, etc.), being connected is synonymous with being electrically connected. Therefore, in the configuration disclosed by the present invention, in addition to a predetermined connection relationship, another element (for example, another element or a switch) that enables electrical connection may be disposed therebetween.

Note that a variety of switches can be used as a switch described in this document (specification, claims, drawings, or the like). An example is an electrical switch or a mechanical switch. That is, the switch described in this document is not limited to a specific switch as long as it can control the flow of current, and various switches can be used. For example, a transistor or a diode (for example, a PN diode, a PIN diode, a Schottky diode,
A diode-connected transistor) or a thyristor. Alternatively, a logic circuit combining them may be used. Therefore, when using a transistor as a switch,
Since the transistor operates as a simple switch, the polarity (conductivity type) of the transistor is not particularly limited. However, when it is desirable that the off-state current is small, it is desirable to use a transistor having a polarity with a small off-state current. As a transistor with low off-state current, there are a transistor provided with an LDD region and a transistor having a multi-gate structure. In addition, the potential of the source terminal of the transistor operated as a switch is set to the low potential side power supply (VSS, G
N-channel type is used when operating in a state close to ND, 0 V, etc., and conversely, P-channel type is used when operating in a state where the potential of the source terminal is close to a high potential side power source (VDD, etc.). desirable. This is because the absolute value of the voltage between the gate and the source can be increased, so that it can easily operate as a switch. In addition, using both N channel type and P channel type, C
A MOS type switch may be used. When a CMOS switch is used, a current can flow when either the P-channel switch or the N-channel switch is turned on, so that the switch can easily function as a switch. For example, the voltage can be appropriately output regardless of whether the voltage of the input signal to the switch is high or low. In addition, since the voltage amplitude value of the signal for turning on / off the switch can be reduced, the power consumption can be reduced.

In addition, in this document (specifications, claims, drawings, etc.), formed on a certain object, or formed on, or on The above description is not limited to being in direct contact with a certain object. This includes cases where they are not in direct contact, that is, cases where another object is sandwiched between them. Therefore, for example, when the layer B is formed on the layer A (or on the layer A), the case where the layer B is formed in direct contact with the layer A and the case where the layer B is formed In direct contact with another layer (eg layer C
And the layer D) are formed, and the layer B is formed in direct contact therewith. The same applies to the description of “above”, and it is not limited to being in direct contact with a certain object, and includes a case where another object is sandwiched therebetween. Therefore, for example, when the layer B is formed above the layer A, the case where the layer B is formed in direct contact with the layer A and the case where another layer is formed in direct contact with the layer A. (For example, the layer C or the layer D) is formed, and the layer B is formed in direct contact therewith. It should be noted that the same applies to the case of below or below, and includes the case of direct contact and the case of no contact.

According to the present invention, the wiring between the internal circuit and the external circuit can be removed, so that it is possible to prevent malfunction and damage to the display device caused by connection with an input interface such as an FPC. In addition, power consumption can be reduced by performing wireless signal transmission. In addition, by recording the video signal in the display device in advance, the data amount of the signal transmitted wirelessly can be reduced, and the wireless signal can be processed in a short time. Thereby, display defects (such as flicker) when displaying a moving image can be reduced.

The figure which shows an example of a structure of the display system of this invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 3 is a diagram illustrating an example of a configuration of a reader / writer according to the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. The figure which shows an example of a structure of the display system of this invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. The figure which shows an example of a structure of the display system of this invention. FIG. 14 illustrates an example of a structure of a display device of the present invention. FIG. 14 illustrates an example of operation of a display device of the present invention; FIG. 14 illustrates an example of operation of a display device of the present invention; FIG. 14 illustrates an example of operation of a display device of the present invention; FIG. 14 illustrates an example of operation of a display device of the present invention; FIG. 3 is a diagram illustrating an example of a configuration of a reader / writer according to the present invention. FIG. 14 illustrates an example of an electronic device to which a display device of the present invention is applied. FIG. 14 is a diagram showing an example of an electronic device to which the display system of the present invention is applied. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. FIG. 11 illustrates an example of a display device of the present invention. FIG. 11 illustrates an example of a display device of the present invention. FIG. 11 illustrates an example of a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention. 4A and 4B illustrate an example of a method for manufacturing a display device of the present invention.

Embodiments of the present invention will be described below with reference to the drawings. However, the present invention is not limited to the following description, and various modifications can be made without departing from the spirit and scope of the present invention, and the present invention is limited to the description of the embodiment described below. Are not to be interpreted. Note that in the structures of the present invention described below, the same reference numerals may be used in common in different drawings.

(Embodiment 1)
The present invention electrically connects an internal circuit and an external circuit by using wireless signal transmission,
Enables a non-contact type display device. In addition, by recording a video signal in advance on the display device, it is possible to display a desired video using wireless signal transmission. Note that in this specification, a “non-contact display device” refers to a display device having a configuration in which an internal circuit and an external circuit are not directly connected but are electrically connected using wireless signal transmission. Hereinafter, a configuration example of a display device according to the present invention and a display system using the display device will be described with reference to the drawings.

The display device and display system shown in FIG. 1 includes a reader / writer 101 that is a wireless communication device,
The display device 102 is used.

The reader / writer 101 displays a modulated carrier wave (hereinafter also referred to as a radio signal) on the display device 10.
2 to send. The wireless signal transmitted from the reader / writer 101 to the display device 102 includes a data processing command signal, a display device control signal, a memory ID, a memory address (x address, y address), and the like. The display device control signal includes a clock generation signal, a vertical synchronization signal, a horizontal synchronization signal, a memory circuit control signal, and the like.

The display device 102 receives the wireless signal transmitted from the reader / writer 101 and displays a video based on the video signal recorded in advance. The display device 102 includes an antenna circuit 103,
The power generation unit 104, the signal processing unit 105, and the display unit 106 are included.

The antenna circuit 103 receives a radio signal transmitted from the reader / writer 101.

The power generation unit 104 uses the radio signal received by the antenna circuit 103 to display the display device 10.
A power supply voltage necessary to drive 2 is generated.

The signal processing unit 105 outputs a control signal (a scanning line control signal such as a clock pulse or a start pulse or a signal line control signal) necessary for driving the display unit 106 from the radio signal received by the antenna circuit 103. In order to display a desired image on the display unit 106,
A video signal recorded in advance is read and output to the display unit 106. One feature of the present invention is that a video signal is recorded in advance on a display device, the video signal is read out by a wireless signal, and a desired video is displayed on the display unit 106.

In the display unit 106, the signal processing unit 10 uses the power supply voltage generated by the power generation unit 104 and the control signals such as the scanning line control signal and the signal line control signal output from the signal processing unit 105.
5 displays a desired video based on the video signal output from 5.

A wireless signal transmitted from the reader / writer 101 to the display device 102 includes a data processing command signal, a display device control signal, a memory ID, and a memory address (x address, y address).
Etc. are included. The data processing command signal is a signal serving as a signal for starting a series of signal processing until one video is displayed on the display device. The display device control signal is a signal for displaying a desired video, and includes a clock generation signal, a horizontal synchronization signal, a vertical synchronization signal, a memory circuit control signal, and the like. The memory ID is a memory circuit identification number for identifying a memory circuit provided in the signal processing unit. The memory address (x address, y address) is an address in the memory circuit. The memory ID and the memory address (x address, y address) are information necessary for reading a video signal from the memory circuit.

Next, each component of the display device 102 will be described.

First, a configuration example of the antenna circuit 103 is shown in FIG.

The antenna circuit 103 includes an antenna 1501 and a resonant capacitor 15 constituting an LC parallel resonant circuit.
02. An induction magnetic field is generated in the antenna 1501 by a wireless signal transmitted from the reader / writer 101, and an electromotive force is induced in the antenna 1501 by this induction magnetic field. The antenna circuit 103 receives an electromotive force induced in the antenna 1501 as an electrical signal.

Note that by adjusting the inductance of the antenna 1501 and the size of the resonance capacitor 1502, the reception efficiency of the radio signal in the antenna circuit 103 and the antenna circuit 1
03, the frequency band of the radio signal that can be received can be adjusted.

Next, a configuration example of the power generation unit 104 is shown in FIG.

The power generation unit 104 includes a rectifier circuit 201, a storage capacitor 202, and a constant voltage circuit 203.

The operation of the power generation unit 104 will be described below.

A radio signal received by the antenna circuit 103 is input to the rectifier circuit 201. The rectifier circuit 201 performs full-wave rectification or half-wave rectification on the radio signal received by the antenna circuit 103. The voltage rectified by the rectifier circuit 201 is smoothed by the storage capacitor 202 and input to the constant voltage circuit 203. The constant voltage circuit 203 generates a predetermined constant voltage using the voltage smoothed by the storage capacitor 202. The constant voltage generated by the constant voltage circuit 203 is supplied to the signal processing unit 105 and the display unit 106 and is used as a power supply voltage for driving the signal processing unit 105 and the display unit 106.

Note that a microwave transmission system (for example, UHF band (for example, UHF band)) is used as a signal transmission system.
860 to 960 MHz band) or 2.45 GHz band or the like), the microwave system directly receives electromagnetic wave energy and generates a power supply voltage.
And the display device 102 are close to each other, the rectifier circuit 201 uses the signal processing unit 105 and the display unit 1.
An excessive power supply voltage is generated for the 06 operation. Therefore, normally, the constant voltage circuit 203 is controlled so that a voltage higher than a certain level is not supplied to the signal processing unit 105 and the display unit 106 so that an overvoltage is not applied to the signal processing unit 105 and the display unit 106.

Next, a configuration example of the signal processing unit 105 is shown in FIG.

The signal processing unit 105 includes a demodulation circuit 301, an amplifier 302, a logic circuit 303, a memory controller 304, a display controller 305, and a memory circuit 306.
One feature of the present invention is that a memory circuit 306 is provided in the signal processing unit 105.

The operation of the signal processing unit 105 will be described below.

A radio signal received by the antenna circuit 103 is input to the demodulation circuit 301. The demodulation circuit 301 demodulates a radio signal that is a modulated wave transmitted from the reader / writer 101. The radio signal demodulated by the demodulation circuit 301 is amplified by the amplifier 302 and then input to the logic circuit 303. The logic circuit 303 separates the radio signal transmitted from the reader / writer 101 into a data processing command signal, a display device control signal, a memory ID, a memory address, and the like, and analyzes the signal. The display device control signal is further separated into a clock generation signal, a vertical synchronization signal, a horizontal synchronization signal, a memory circuit control signal, and the like. Here, the data processing command signal is a signal for instructing the start of a series of signal processing until one video is displayed on the display device, and the logic circuit 303 starts signal processing by the data processing command signal. The radio signal separated by the logic circuit 303 is input to the memory controller 304 and the display controller 305 as appropriate. The memory controller 304 has a signal for controlling the memory circuit 306 (memory I
D, memory address, memory circuit control signal, etc.) are input to control the operation of the memory circuit 306. The display controller 305 receives signals (such as a clock generation signal, a vertical synchronization signal, and a horizontal synchronization signal) necessary to drive the display unit 106 and controls the operation of the display unit 106. A video signal is recorded in the memory circuit 306. A desired video signal can be read from the memory circuit 306 and displayed on the display unit 106 by a wireless signal such as a memory ID, a memory address, and a memory circuit control signal input to the memory controller 304.

Here, a configuration example of the memory controller 304 is shown in FIG.

In FIG. 5, the memory controller 304 includes a memory R / W circuit 1201, a reference oscillation circuit 1202, a variable frequency dividing circuit 1203, a memory ID counter 1204a, and an x counter 1204.
b, y counter 1204c, memory ID decoder 1205a, x decoder 1205b, y
The decoder 1205c is configured.

The memory circuit 306 includes a plurality of storage elements. Their storage elements are (x,
It shall be selected by the address of y). The memory circuit 306 is a single or a plurality of storage elements and records a video signal for displaying one video on the display unit 106. Therefore, a desired video signal can be read by selecting one or a plurality of storage elements by an address (x, y).

In the memory controller 304, the memory circuit control signal separated by the logic circuit 303 is input to the memory R / W circuit 1201. The memory R / W circuit 1201 includes the logic circuit 30.
3 outputs a memory R / W signal that permits reading of the video signal recorded in the memory circuit 306 in accordance with the memory circuit control signal input from 3.

The memory circuit control signal separated by the logic circuit 303 is input to the variable frequency dividing circuit 1203 via the reference oscillation circuit 1202 and converted to a signal having an appropriate frequency. Variable frequency divider 1
The memory circuit control signal converted to an appropriate frequency in 203 is sent to the memory ID counter 1204.
is input to the memory ID decoder 1205a via a. Further, the memory ID included in the radio signal received by the antenna circuit 103 and separated by the logic circuit 303 is the memory ID.
It is input to the decoder 1205a. Thereby, a memory circuit to which a specific memory ID is allocated can be selected. Since the memory ID is a memory circuit identification number assigned to identify each memory circuit, a specific memory circuit can be selected by selecting a specific memory ID. Here, the memory circuit 306 is selected by selecting the memory ID for identifying the memory circuit allocated to the memory circuit 306.

The memory circuit control signal converted to an appropriate frequency by the variable frequency dividing circuit 1203 is input to the x decoder 1205b via the x counter 1204b and the antenna circuit 10
3 is included in the radio signal received by 3 and the memory address (x
Address) is input to the x decoder 1205b. Thereby, x of the memory circuit 306 is obtained.
An address can be selected. Similarly, the memory circuit control signal converted to an appropriate frequency by the variable frequency dividing circuit 1203 is input to the y decoder 1204c via the y counter 1204c and is included in the radio signal received by the antenna circuit 103. Logic circuit 3
The memory address (y address) separated at 03 is input to the y decoder 1205c. Thereby, the y address of the memory circuit 306 can be selected. Memory circuit 30
By selecting six x addresses and y addresses, a specific storage element can be selected from among a plurality of storage elements constituting the memory circuit 306. A desired image is displayed on the display unit 1 by selecting one or a plurality of storage elements in which the desired image signal is recorded by an (x, y) address.
06 can be displayed.

The input memory ID and memory address (x address, y address) are output to the memory circuit 306 when reading of the video signal from the memory circuit 306 is permitted by the memory R / W signal.

Next, a configuration example of the memory circuit 306 is shown in FIG. Note that the memory circuit according to the present invention is preferably a nonvolatile memory. By making the memory circuit a non-volatile memory, it is possible to prevent the video signal from being lost when the power is turned off. Here, FIG. 22 shows a configuration example in the case where a read-only memory (ROM) is used as the memory circuit 306.

The memory circuit 306 illustrated in FIG. 22 has a structure in which a plurality of storage elements 2201 are arranged in a matrix. Each storage element 2201 has a plurality of word lines 2202 and a plurality of bit lines 2203. By controlling the word line 2202 and the bit line 2203,
A video signal is read from each storage element. In the memory circuit 306, a switch 2204 is provided for each bit line 2203.

Next, a configuration example of the memory element 2201 is shown in FIG. The memory element 2201 includes a transistor 2
301, word line 2202, bit line 2203, high-potential side power line 2302 (power supply potential: V
DD) and a low potential side power supply line 2303 (power supply potential: VSS). The transistor 2301 has a gate electrode connected to the word line 2202 and a first electrode connected to the bit line 220.
3 and the second electrode is connected to either the high potential side power supply line 2302 or the low potential side power supply line 2303. The second electrode of the transistor 2301 and the high potential side power supply line 230
2 or the low potential side power supply line 2303 is determined at the time of manufacturing the memory circuit according to the video signal to be recorded. For example, as illustrated in FIG.
Is connected to the high potential side power supply line 2302, “1” is held in the memory element 2201. As shown in FIG. 23B, when the second electrode of the transistor 2301 is connected to the low potential side power supply line 2303, “0” is held in the memory element 2201.

Next, a video signal reading method in the memory circuit 306 will be described with reference to FIGS.

When the memory circuit 306 selected by the memory controller 304 is permitted to read the video signal from the memory circuit 306 by the memory R / W signal, the x decoder 12
The x address selected by the memory controller 304 is input from 05b. The y address selected by the memory controller 304 is input from the y decoder 1205c. Then, the word line 2202 corresponding to the selected y address is selected.
The switch 2204 connected to the bit line 2203 corresponding to the selected x address.
Is turned on, and the corresponding bit line 2203 is selected. Through the above operation, the video signal recorded in the storage element 2201 connected to the selected word line and bit line is read and output to the display unit 106.

Note that although a structure in which a ROM is used as the memory circuit 306 has been described in this embodiment, the present invention is not particularly limited. For example, a memory circuit can be configured using a flash memory or the like.

Next, a configuration example of the display controller 305 is shown in FIG.

The display controller 305 includes a reference clock generation circuit 1101 and a variable frequency dividing circuit 11.
02, a horizontal clock generation circuit 1103, and a vertical clock generation circuit 1104.

In the display controller 305, the clock generation signal separated by the logic circuit 303 is input to the reference clock generation circuit 1101, and a reference clock is generated. This reference clock is input to the horizontal clock generation circuit 1103 and the vertical clock generation circuit 1104 via the variable frequency dividing circuit 1102.

The horizontal clock generation circuit 1103 receives the horizontal synchronization signal separated by the logic circuit 303 and outputs signal line control signals such as a clock pulse S_CLK and a start pulse S_SP for the signal line driver circuit. The vertical clock generation circuit 1104 includes a logic circuit 303.
The vertical synchronization signal separated in step S1 is input, and scanning line control signals such as a clock pulse G_CLK and a start pulse G_SP for the scanning line driver circuit are output.

In FIG. 4, the number of memory circuits included in the signal processing unit 105 is one in the memory circuit 306, but the present invention is not particularly limited, and the signal processing unit 105 may include a plurality of memory circuits.

For example, FIG. 7 shows a configuration example of the signal processing unit 105 when three memory circuits are provided. In FIG. 7, the memory circuit includes a first memory circuit 701, a second memory circuit 702, and a third memory circuit 703.

Video signals for displaying different videos are recorded in the first memory circuit 701 to the third memory circuit 703. Next, based on the memory ID and the memory address included in the wireless signal received by the antenna circuit 103, the memory controller 304 selects one of the first memory circuit 701 to the third memory circuit 703. And the selected 1
A memory address is selected from the memory circuits. Then, the video signal recorded in the memory element selected by the selected memory circuit and memory address is read, and the display unit 10
6 is output.

Thus, by providing a plurality of memory circuits, more video signals can be recorded. As a result, various videos can be displayed.

Note that the memory circuit 306 may be formed over the same substrate as the display device or a portable storage medium may be connected from the outside. In the case where the memory circuit is formed over the same substrate as the display device, the number of components can be reduced and the cost can be reduced. In addition, reliability can be improved by reducing the number of connection points with circuit components. On the other hand, when a portable storage medium is connected from the outside, the video signal recorded in the memory circuit can be rewritten, so that it can be used as a display device with higher versatility. In addition, by using a portable storage medium as the memory circuit, the memory capacity of the memory circuit can be increased and more video signals can be recorded. Therefore, various videos can be displayed.

Next, a configuration example of the display unit 106 is shown in FIG. Note that in this embodiment, an example of using an active matrix type as a driving method of the display unit 106 is shown.

The display unit 106 includes a pixel circuit 401, a signal line driver circuit 402, and a scanning line driver circuit 403. The pixel circuit 401 has a configuration in which pixels are arranged in a matrix, and a transistor is arranged in each pixel. Here, FIG. 9 shows a circuit configuration example of the pixel.

FIG. 9 shows a configuration in which two transistors are arranged in each pixel. Pixels are signal lines 1401
, A scanning line 1402, a power supply line 1403, a first transistor 1404, a second transistor 1405, a capacitor 1406, and a display element 1407. Note that FIG. 9 illustrates an example in which a light-emitting element is used as the display element 1407.

The first transistor 1404 has a gate electrode connected to the scan line 1402, a first electrode connected to the signal line 1401, a second electrode connected to the gate electrode of the second transistor 1405,
The capacitor 1406 is connected to the first electrode. The second transistor 1405 includes the first transistor
Are connected to the power supply line 1403, and the second electrode is connected to the first electrode of the display element 1407. The capacitor 1406 has a second electrode connected to the power supply line 1403.

Note that the first transistor 1404 and the second transistor 1405 may be a P-channel type or an N-channel type.

The capacitor 1406 is not necessarily provided. For example, when an N-channel transistor is used as the second transistor 1405 and the N-channel transistor has an LDD region provided to overlap with the gate electrode through the gate insulating film, the overlapping A parasitic capacitance generally called a gate capacitance is formed in the region. This parasitic capacitance can be positively used as a capacitor for holding a voltage applied to the gate electrode of the second transistor 1405.

Next, the operation of the display unit when displaying an image will be described below. (See FIGS. 8 and 9).

A signal line control signal output from the display controller 305 and a video signal output from the memory circuit 306 are input to the signal line driver circuit 402. Signal line driver circuit 402
Selects a signal line 1401 based on the signal line control signal, and inputs a video signal to the selected signal line 1401.

A scanning line control signal output from the display controller 305 is input to the scanning line driving circuit 403. The scanning line driving circuit 403 scans the scanning line 140 based on the scanning line control signal.
Select 2 sequentially.

The operation of the pixel will be described. When the scan line 1402 is selected by the scan line driver circuit 403, the potential of the gate electrode of the first transistor 1404 changes. Through the gap between the source region and the drain region of the first transistor 1404 that is thus turned on,
A video signal is input from the signal line 1401 to the gate electrode of the second transistor 1405.
In addition, a video signal is held in the capacitor 1406. The gate voltage of the second transistor 1405 is changed by the video signal input to the gate electrode of the second transistor 1405, and the source region and the drain region are brought into conduction. The potential of the power supply line 1403 is applied to the first electrode of the display element 1407 through the second transistor 1405. As a result, the display element 1407 emits light and a desired image is displayed.

In the present embodiment, the active matrix type is used as the driving method of the display unit 106, but a passive matrix type may be used.

Note that as a driving method of the signal line driver circuit 402, line sequential driving or dot sequential driving may be used.

Further, although an example of a display device using a light-emitting element as a display element is described in this embodiment mode, the present invention is not particularly limited. For example, as a display element, an electron emission element, a liquid crystal element, electronic ink, an electrophoretic element, a grating light valve (GLV), a plasma display (P
DP, a digital micromirror device (DMD), a piezoelectric ceramic display, a carbon nanotube, and other display media whose contrast, luminance, reflectance, transmittance, and the like change due to an electromagnetic action can be used. As a light-emitting element, an EL element including an organic substance and an inorganic substance, an organic EL element, and an inorganic EL element can be used. In addition, a display device using an EL element is an EL display, and a display device using an electron-emitting device is a field emission display (FED) or a SED flat display (SE).
D: Surface-conduction Electron-emitter Di
display devices using liquid crystal elements such as liquid crystal displays (transmissive liquid crystal displays, transflective liquid crystal displays, reflective liquid crystal displays, direct view liquid crystal displays, projection liquid crystal displays), electronic inks and electrophoretic elements. There is an electronic paper as a display device used.

Next, a configuration example of the reader / writer 101 in FIG. 1 will be described with reference to FIG.

The reader / writer 101 includes a transmission unit 902, a control unit 903, an interface unit 904, and an antenna circuit 905. The control unit 903 includes an interface unit 904.
The transmission unit 902 is controlled by the control of the host device 906 via The transmission unit 902 modulates a radio signal such as a data processing command signal, a display device control signal, a memory ID, and a memory address (x address, y address) to be transmitted to the display device 102, and generates an electromagnetic wave (wireless signal) from the antenna circuit 905. Output.

In this embodiment, the antenna circuit 905 of the reader / writer 101 shown in FIG.
It has an antenna 907 and a resonance capacitor 908 constituting a parallel resonance circuit, and is connected to the transmission unit 902. When transmitting a wireless signal to the display device 102, the transmission unit 902 supplies an induction current to the antenna circuit 905 and transmits the wireless signal from the antenna circuit 905 to the display device 102.

As described above, the reader / writer 101 sends a plurality of wireless signals (for example, data processing command signal, display device control signal, memory ID, memory address (x address, y address), etc.) to the display device 102. However, a plurality of radio signals to be transmitted to the reader / writer 101 may be multiplexed and transmitted on a single carrier wave having a certain frequency.

Further, a plurality of wireless signals transmitted by the reader / writer 101 may be transmitted using a plurality of carrier waves having at least two different frequencies. In this case, a plurality of antenna circuits may be provided in the display device 102 so that each carrier wave having a different frequency can be received.

For example, FIG. 11 shows a case where the display device 102 is provided with two antenna circuits. FIG.
1, the first antenna circuit 1301 and the second antenna circuit 130 are used as the antenna circuits.
2 and each of these two antenna circuits is used to receive carrier waves having two types of frequencies. That is, carrier waves having different frequencies are received by different antenna circuits.
Thereby, since it is possible to prevent radio signals from being mixed, radio signals can be transmitted more accurately, and malfunction of the display device can be prevented.

Note that the antenna circuit 103 as shown in FIG. 1 or the antenna circuit such as the first antenna circuit 1301 and the second antenna circuit 1302 as shown in FIG.
The frequency of the carrier wave transmitted between them is 125 kHz, 13.56 MHz, 915 MHz, 2
. 45 GHz, etc., which are set according to the ISO standard. Of course, the frequency of the carrier wave transmitted between the antenna circuit and the reader / writer 101 is not limited to this. 300 MHz to 3 GHz which is an ultra short wave, 30 MHz to 300 MHz which is an ultra short wave, 3 MHz to 30 MHz which is a short wave, 300 kHz which is a medium wave
~ 3MHz, 30kHz ~ 300kHz which is long wave, and 3kHz ~ 30k which is super long wave
Any frequency of Hz can be used.

The modulation method of the carrier wave may be analog modulation or digital modulation, and may be any of amplitude modulation, phase modulation, frequency modulation, and spread spectrum. Preferably, amplitude modulation or frequency modulation is used.

In the display device 102 illustrated in FIG. 1, the common antenna circuit 103 is used in the power generation unit 104 and the signal processing unit 105, but separate antenna circuits are used in the power generation unit 104 and the signal processing unit 105. May be. A configuration example of the display system in this case is shown in FIG.

The display device 102 illustrated in FIG. 12 includes a first antenna circuit 801 and a second antenna circuit 802 as antenna circuits. The first antenna circuit 801 is connected to the power generation unit 104, and the second antenna circuit 802 is connected to the signal processing unit 105. The first antenna circuit 801 receives a radio signal (electromagnetic wave) that is randomly generated outside. The power generation unit 104 generates a power supply voltage using the radio signal (received by the first antenna circuit 801. On the other hand, the second antenna circuit 802 generates a specific frequency transmitted from the reader / writer 101. The signal processing unit 105 outputs a control signal necessary to drive the display unit 106 using the radio signal received by the second antenna circuit 802. Here, the signal processing unit 105 outputs a control signal necessary to drive the display unit 106. A difference from the display device 102 illustrated in FIG. 11 is that two antenna circuits of the first antenna circuit 801 and the second antenna circuit 802 illustrated in FIG. 12 are connected to the power generation unit 104 and the signal processing unit 105, respectively. 11, both the first antenna circuit 1301 and the second antenna circuit 1302 are connected to the signal processing unit 105. In the display device illustrated in FIG. There.

As shown in FIG. 12, by providing antenna circuits that are separately connected to the power generation unit 104 and the signal processing unit 105, the frequency of the radio signal received by the power generation unit 104 and the signal processing unit 105 can be set separately. can do. In particular, the power generation unit 104 can generate a constant power supply voltage and supply it to the display unit 106 by receiving a radio signal (electromagnetic wave) randomly generated outside. Therefore, it is possible to prevent the display device from becoming inoperable due to fluctuations in the power supply voltage while using the display device.

Note that there is no particular limitation on the shape of the antenna that can be used in the present invention. Therefore, an electromagnetic coupling method, an electromagnetic induction method, a radio wave method, an optical method, or the like can be used as the transmission method. The transmission method may be appropriately selected by the practitioner in consideration of the intended use, and an antenna having an optimal length and shape may be provided according to the transmission method. In the present invention, a radio wave system can be used as a radio signal transmission system, and a microwave system can also be used.

When an electromagnetic coupling method or an electromagnetic induction method (for example, 13.56 MHz band) is applied as a transmission method, a conductive film functioning as an antenna is formed into a ring shape (for example, a loop antenna) in order to use electromagnetic induction due to a change in electric field density. ) Or a spiral shape (for example, a spiral antenna). Here, FIG. 13A illustrates a configuration example of a display device in the case where an electromagnetic coupling method or an electromagnetic induction method is used as a transmission method.

In the display device 102 illustrated in FIG. 13A, the power generation unit 104, the signal processing unit 105, the display unit 106, and the spiral antenna 1702 are provided over a substrate 1701. Note that the display portion 106 includes a pixel circuit 401, a signal line driver circuit 402, and a scanning line driver circuit 403.

As a transmission method, a microwave method (for example, UHF band (860 to 96), which is a kind of radio wave method, is used.
In the case of applying the 0 MHz band) or 2.45 GHz band), the length and shape of the conductive film functioning as an antenna may be set as appropriate in consideration of the wavelength of the radio wave used for wireless signal transmission. The conductive film functioning as an antenna can be formed in, for example, a linear shape (for example, a dipole antenna) or a flat shape (for example, a patch antenna). Further, the shape of the conductive film functioning as an antenna is not limited to a linear shape, and may be provided in a curved shape, a meandering shape, or a combination thereof in consideration of the wavelength of electromagnetic waves.

FIG. 13B illustrates a configuration example of a display device in the case where an electromagnetic coupling method or an electromagnetic induction method is used as a transmission method.

In the display device 102 illustrated in FIG. 13B, the power generation unit 104, the signal processing unit 105, the display unit 106, and the dipole antenna 1703 are provided over a substrate 1701. Note that the display portion 106 includes a pixel circuit 401, a signal line driver circuit 402, and a scanning line driver circuit 403.

For example, in the case where the pixel circuit 401, the power generation unit 104, and the signal processing unit 105 are formed using elements such as thin film transistors, the transistors that constitute the pixel circuit 401 and the power generation unit 10 are used.
4 and the transistor constituting the signal processing unit 105 are formed at the same time, the circuits formed by the respective elements can be arbitrarily arranged. Therefore, by arranging the signal processing unit 105, the signal line driving circuit 402, the scanning line driving circuit 403, and the like that require a high voltage for driving in proximity to the power generation unit 104, a wireless signal (
The loss of power given by (electromagnetic waves) can be minimized. Because the pixel circuit 4
This is because, when 01, the power generation unit 104, and the signal processing unit 108 are separately provided by bonding or the like, power is lost because the respective circuits are connected by connection wiring.

The display device and the display system according to the present invention can remove the wiring between the internal circuit and the external circuit by using wireless signal transmission. As a result, it is possible to prevent malfunction or damage to the display device caused by connection with an input interface such as an FPC. Also,
By performing wireless signal transmission, power consumption can be reduced.

Further, as in this embodiment, by recording a video signal in advance on the display device, a desired video can be displayed using wireless signal transmission. Further, by using a method of transmitting a memory ID and a memory address to a display device using wireless signal transmission and reading out a video signal from the memory circuit, a signal transmission and display device for displaying a desired image is displayed. It is possible to shorten the time required for signal processing in the inside.

For example, when a video with a large data capacity, such as a video with a large image size or a video with a large number of gradations or colors, is transmitted using a wireless signal, the signal is transmitted to display a desired video and the display device It takes a long time to process the signal. As a result, it takes a long time to display the video. For example, when displaying a moving image, it may be impossible to write the video for one screen within one frame period. In addition, when one frame period is adjusted so that all the images for one screen can be written, the frame frequency becomes small, and display defects such as flickering occur.

However, the data amount of the wireless signal transmitted from the reader / writer can be reduced by using the method of reading the video signal recorded in the display device in advance using the wireless signal described in this embodiment. It is possible to reduce the time required for transmission of radio signals and signal processing in the display device. In addition, since the time required to display the video can be shortened, it is possible to write all the video signals for one screen within one frame period, and to reduce display defects such as flickering generated in the moving image display. Can do. Furthermore, since the configuration of the radio signal for displaying the desired video can be simplified, the complexity of the radio signal,
It is possible to prevent complication of a circuit constituting the display device.

Note that the present embodiment is an example in which the contents (may be part) described in other embodiments are embodied, an example in which the content is slightly modified, an example in which a part is changed, and an improvement. An example of the case,
An example in the case of detailed description, an example in the case of application, an example of a related part, and the like are shown. Therefore, the contents described in other embodiment modes can be freely applied to, combined with, or replaced with this embodiment mode.

In the present embodiment, various drawings have been used, but the contents described in each drawing (
May be applied to, combined with, the content described in another figure (may be part)
Alternatively, replacement can be performed freely. Furthermore, in the figures described so far,
For each part, more parts can be constructed by combining different parts.

Similarly, the contents (may be a part) described in each drawing of this embodiment are applied, combined, or replaced with the contents (may be a part) described in the figure of another embodiment. Can be done freely. Further, in the drawings of this embodiment mode, more drawings can be formed by combining each portion with a portion of another embodiment.

(Embodiment 2)
In this embodiment, a display device and a display system provided with a mechanism for transmitting a wireless signal from a display device to a reader / writer which is a wireless communication device, that is, an example in which a wireless signal is exchanged between the display device and the reader / writer. Will be described.

Here, FIG. 14 shows a configuration example of the display device and the display system in the present embodiment. Note that components having the same configuration as the display system described in Embodiment 1 are denoted by the same reference numerals. The present embodiment includes a signal processing unit 605 and a reader / writer 601 that have different configurations from those of the first embodiment. Specifically, in the display device and the display system illustrated in FIG. 14, the signal processing unit 605 included in the display device 602 is changed from the display device 602 to the reader / writer 60.
1 is provided with a mechanism for transmitting a radio signal to 1. Further, the reader / writer 601 is connected to the display device 6.
A mechanism for receiving a radio signal transmitted from 02 is provided.

Next, FIG. 15 shows a configuration example of the signal processing unit 605 in the present embodiment.

The signal processing unit 605 includes a demodulation circuit 301, a first amplifier 501, a first logic circuit 502, a memory controller 304, a display controller 305, a memory circuit 306, a second logic circuit 503, a second amplifier 504, and a modulation circuit. 505.

Note that the difference between the signal processing unit 105 (FIG. 4) described in Embodiment 1 and the signal processing unit 605 described in this embodiment is that a modulation circuit 505 is added, the first logic circuit 502, and The second logic circuit 503 has two logic circuits, and the first amplifier 501 and the second amplifier 504 have two amplifiers.

Note that the first amplifier 501 in FIG. 15 corresponds to the amplifier 302 in FIG. Further, the first logic circuit 502 in FIG. 15 corresponds to the logic circuit 303 in FIG. Therefore, the functions of the first amplifier 501 and the first logic circuit 502 in FIG. 15 are the same as those of the amplifier 302 and the logic circuit 303 in FIG.

The operation of the signal processing unit 605 in this embodiment will be described below (FIGS. 14 and 15).
reference).

The operation from when the radio signal is received by the antenna circuit 103 to when the video signal is read from the memory circuit 306 is the same as that of the signal processing unit 105 (FIG. 4) described in Embodiment 1, and therefore will be described here. Omit.

The memory circuit 306 selected by the memory controller 304 reads out a desired video signal from the recorded video signals and outputs it to the display unit 106, and outputs a memory circuit output signal to the second logic circuit 503. The memory circuit output signal includes a memory ID assigned to the selected memory circuit, a memory address (x address, y address), a data output signal indicating that a desired video signal is read and output to the display unit 106, and the like. Is included. That is, the memory circuit output signal is a signal indicating that a video signal for displaying a desired video is read out. In the second logic circuit 503, for the input memory circuit output signal,
Perform the encoding process. The memory circuit output signal encoded by the second logic circuit 503 is amplified by the second amplifier 504 and modulated by the modulation circuit 505. A radio signal including the memory circuit output signal modulated by the modulation circuit 505 is transmitted from the antenna circuit 103 to the reader / writer 601.
Sent to. The reader / writer 601 analyzes the received memory circuit output signal and transmits a wireless signal to the display device 602 again.

Next, a configuration example of the reader / writer 601 in FIG. 14 will be described with reference to FIG. Note that the same components as those of the reader / writer 101 (FIG. 10) described in the first embodiment are denoted by the same reference numerals.

The reader / writer 601 includes a receiving unit 2401, a transmitting unit 902, a control unit 903, an interface unit 904, an antenna circuit 905, and an antenna circuit 2402. The control unit 903 controls the reception unit 2401 and the transmission unit 902 under the control of the host device 906 via the interface unit 904. The transmission unit 902 modulates a radio signal such as a data processing command signal, a display device control signal, a memory ID, and a memory address (x address, y address) to be transmitted to the display device 602 and outputs the modulated radio signal from the antenna circuit 905 as an electromagnetic wave. The receiving unit 2401 demodulates the radio signal received by the antenna circuit 2402 and outputs the result to the control unit 903 as a data processing result.

In the present embodiment, the antenna circuit 905 and the antenna circuit 2402 of the reader / writer 601 shown in FIG. 24 are the antenna 907 and the antenna 24 that constitute an LC parallel resonant circuit, respectively.
03, a resonance capacitor 908, and a resonance capacitor 2404, which are connected to the receiver 2401 and the transmitter 902. When the antenna circuit 2402 receives a radio signal from the display device 602, the antenna circuit 2402 receives an electromotive force induced in the antenna circuit 2402 by the radio signal output from the display device 602 as an electrical signal. In addition, when a wireless signal is transmitted to the display device 602, an induced current is supplied to the antenna circuit 905, and the wireless signal is transmitted from the antenna circuit 905 to the display device 602.

As shown in this embodiment, by providing a mechanism for transmitting a wireless signal output from the signal processing unit 605 via the antenna circuit 103 to the reader / writer 601, continuous video display can be performed. The method will be described below (see FIGS. 14 and 15).

The reader / writer 601 analyzes the data output signal included in the memory circuit output signal transmitted from the display device 602. The data output signal is a signal indicating that the memory circuit 306 has output a video signal. Therefore, by analyzing the data output signal by the reader / writer 601, information that the display device 602 has displayed an image is transmitted to the reader / writer 601. Thereafter, the reader / writer 601 receives the analysis result of the data output signal, selects the memory ID and the memory address of the memory circuit in which the video signal for displaying the next video to be displayed is selected, and again displays the data in the display device 602. Send a radio signal. In the display device 602,
Based on the received radio signal, the instructed memory circuit (here, memory circuit 306) is selected, and a video signal for displaying the next video is read out.

In this manner, continuous video display can be performed by repeatedly transmitting and receiving wireless signals between the reader / writer 601 and the display device 602. Further, since the time taken to display one screen of video can be shortened by the method shown in this embodiment, smoother video display can be performed.

Note that the reader / writer 601 transmits a wireless signal to the display device 602, and the display device 602 reads a desired video signal by the signal processing unit 605 based on the wireless signal received by the antenna circuit and outputs the signal to the display unit 106. In addition, noise or the like may occur and an accurate signal may not be transmitted. In such a case, for example, by adding a mechanism for detecting an error code to the second logic circuit 503, it is detected whether the radio signal transmitted by the reader / writer 601 has been erroneously transmitted in the middle. be able to. The method will be described below (FIGS. 14, 15, and 1).
6).

First, for example, a cyclic code (CRC) is provided as one of memory circuit output signals output from the memory circuit 306. Next, the memory circuit output signal is input to the second logic circuit 503.

Here, a configuration example of the second logic circuit 503 when a mechanism for detecting an error code is provided is shown in FIG.
Shown in The second logic circuit 503 illustrated in FIG. 16 includes an error code detection circuit 1601 and an encoding circuit 1602.

The memory circuit output signal is input to the error code detection circuit 1601. Error code detection circuit 160
In 1, the error code detection process is performed on the cyclic code included in the memory circuit output signal. Thereafter, the processing result in the error code detection circuit 1601 and other memory circuit output signals are input to the encoding circuit 1602, and the encoding process is performed.

Here, error code detection processing is performed on the cyclic code included in the memory circuit output signal, and if it is determined that there is no error in the memory circuit output signal, the reader / writer 601 indicates that “the memory circuit output signal has an error. The result of the error code detection process of “No” is transmitted using a radio signal. As a result, the reader / writer 601 selects a new memory ID and memory address of a memory circuit in which a video signal to be displayed next is recorded, and transmits a wireless signal to the display device 602.

On the other hand, if it is determined that the memory circuit output signal has an error, the reader / writer 601 receives “
The result of the error code detection process that “the memory circuit output signal has an error” is transmitted using a radio signal. As a result, the memory I of the memory circuit 306 once transmitted by the reader / writer 601
D and the memory address are selected again, and the wireless signal is retransmitted to the display device 602.

In this manner, by providing an error code detection circuit and repeating transmission / reception of a wireless signal between the reader / writer 601 and the display device 602, it is possible to confirm whether the wireless signal is correctly transmitted from the reader / writer 601. . As a result, it is possible to prevent erroneous transmission of wireless signals and associated video display errors.

Note that a signal serving as a cue to start transmission / reception of wireless signals between the reader / writer 601 and the display device 602 may be transmitted from the reader / writer 601 to the display device 602, or the display device 60.
2 may be transmitted to the reader / writer 601.

Note that in FIG. 15, the number of memory circuits included in the signal processing unit 605 is represented by 1 of the memory circuit 306.
However, a plurality of memory circuits may be provided.

For example, FIG. 17 illustrates a configuration example of the signal processing unit 605 when three memory circuits are provided. FIG.
7 includes a first memory circuit 1001, a second memory circuit 1002, and a third memory circuit 1003 as memory circuits.

Different video signals are recorded in the first memory circuit 1001 to the third memory circuit 1003, respectively. Next, the memory I included in the radio signal received by the antenna circuit 103
Based on D and the memory address, the memory controller 304 causes the first memory circuit 100 to
One memory circuit is selected from the first to third memory circuits 1003, and a memory address is selected from the selected memory circuit. Then, the video signal recorded in the memory element selected by the selected memory circuit and memory address is read and output to the display unit. Also,
The selected memory circuit reads the recorded video signal and outputs it to the display unit 106, and also outputs a memory circuit output signal to the second logic circuit 503. The second logic circuit 503 performs an encoding process on the input memory circuit output signal. Second logic circuit 503
The memory circuit output signal encoded by the second amplifier 504 is amplified by the modulation circuit 5.
Modulated with 05. The radio signal including the memory circuit output signal modulated by the modulation circuit 505 is:
The data is transmitted from the antenna circuit 103 to the reader / writer 601. The reader / writer 601 analyzes the received memory circuit output signal and transmits a wireless signal to the display device 602 again.

Thus, by providing a plurality of memory circuits, more video signals can be recorded. As a result, various videos can be displayed.

As shown in FIG. 16, when the error code detection circuit 1601 is provided in the second logic circuit 503, different cyclic codes are allocated to a plurality of memory circuits. As a result, it is possible to confirm whether the radio signal is correctly transmitted from the reader / writer 601 for each memory circuit.

As shown in this embodiment, continuous display of video can be performed more smoothly by providing a mechanism for transmitting a wireless signal from the display device to the reader / writer in the signal processing unit. As a result, display defects such as flickering that occur when a moving image is displayed can be prevented. In addition, it is possible to confirm whether or not the wireless signal is correctly transmitted from the reader / writer, and it is possible to prevent erroneous transmission of the wireless signal and the accompanying erroneous display of video.

Note that the present embodiment is an example in which the contents (may be part) described in other embodiments are embodied, an example in which the content is slightly modified, an example in which a part is changed, and an improvement. An example of the case,
An example in the case of detailed description, an example in the case of application, an example of a related part, and the like are shown. Therefore, the contents described in other embodiment modes can be freely applied to, combined with, or replaced with this embodiment mode.

In the present embodiment, various drawings have been used, but the contents described in each drawing (
May be applied to, combined with, the content described in another figure (may be part)
Alternatively, replacement can be performed freely. Furthermore, in the figures described so far,
For each part, more parts can be constructed by combining different parts.

Similarly, the contents (may be a part) described in each drawing of this embodiment are applied, combined, or replaced with the contents (may be a part) described in the figure of another embodiment. Can be done freely. Further, in the drawings of this embodiment mode, more drawings can be formed by combining each portion with a portion of another embodiment.

(Embodiment 3)
In the present embodiment, a case will be described in which the constant voltage circuit included in the power generation unit is a battery that is charged using electromagnetic waves. Here, FIG. 18 shows a configuration example of the display device and the display system in the present embodiment. In addition, the thing of the same structure as the display apparatus and display system which are shown in Embodiment 1 and 2 mentioned above is shown with the same code | symbol. In this embodiment, a power generation unit 1904 and a signal processing unit 1905 having configurations different from those of the first embodiment are provided. In particular,
In the display device and the display system illustrated in FIG. 18, the power generation unit 19 included in the display device 1902.
04, a battery for charging using a wireless signal is provided. A signal for controlling a circuit that controls the battery is input from the signal processing unit 1905.

Next, a configuration example of the power generation unit 1904 in the present embodiment is shown in FIG.

The power generation unit 1904 includes a rectifier circuit 1801 and a constant voltage circuit 1802. The constant voltage circuit 1802 includes a charge control circuit 1803, a charge / discharge management circuit 1804, a battery 1805, and a discharge control circuit 1806.

A charge control circuit 1803 controls whether or not the battery 1805 is charged.

The discharge control circuit 1806 converts the voltage charged in the battery 1805 into the signal processing unit 1905.
And supplied to the display unit 106.

The charge / discharge management circuit 1804 monitors the charge status of the battery 1805 and the charge control circuit 18.
03 and the discharge control circuit 1806 are controlled to prevent overcharging of the battery 1805.

Next, an example of operation when the antenna circuit 103 receives a wireless signal from the reader / writer 101 will be described with reference to FIGS. Here, the charging control circuit 18
An example in which a first switch is provided in 03 and a second switch is provided in the discharge control circuit 1806 is shown.

First, when a wireless signal is transmitted from the reader / writer 101 to the display device 1902 (s200).
1) The antenna circuit 103 starts receiving a radio signal transmitted from the reader / writer 101 (s2002). Next, the charge / discharge management circuit 1804 performs voltage Vy of the battery 1805.
Is greater than or equal to a predetermined voltage value (for example, Vx) (s2003). When the voltage Vy of the battery 1805 is lower than Vx (in the case of No), the second switch provided in the discharge control circuit 1806 is turned off so that the power of the battery 1805 is not supplied to other circuits ( s2004).

Next, the first switch is turned on (s2005), and charging of the battery 1805 is started (s2006). During charging, the charging state of the battery 1805 is monitored by the charge / discharge management circuit 1804, and the voltage value of the battery 1805 is monitored. And the battery 18
When the voltage Vy of 05 becomes equal to or higher than the predetermined voltage value Vx (in the case of YES), the first switch provided in the charge control circuit 1803 is turned off (s2008), and charging is stopped (s20).
09).

Next, the second switch is turned on at the same time as or after the first switch is turned off (s200).
7) Power is supplied to the circuit provided in the signal processing unit 1905 via the discharge control circuit 1806. Then, the display device 1902 transmits a wireless signal including a signal for starting communication to the reader / writer.
The data is transmitted to the writer 101 (s2010). The reader / writer 101 receives a wireless signal including a signal for starting communication (s2011), and then transmits a wireless signal including necessary information to the display device 1902 (s2012). The display device 1902 receives the wireless signal transmitted from the reader / writer 101 (s2013), and processes the received wireless signal (s201).
4) A wireless signal as a reply signal is transmitted (s2015). The reader / writer 10
1 receives the wireless signal transmitted from the display device 1902 (s2016), and then ends the communication (s2017).

In the configuration illustrated in FIG. 18, the power generation unit 1904 and the signal processing unit 1905 are provided with the antenna circuit 103 shared, but the power generation unit 1904 and the signal processing unit 1905 are provided.
Each may be provided with an antenna circuit.

In addition, as shown in FIG. 21, the discharge control circuit 1806, the signal processing unit 1905, and the display unit 10
6 may be provided to control a process of charging the battery 1805 and a process of supplying power from the battery 1805 to the signal processing unit 1905 and the display unit 106. For example, the switch circuit 2101 is intermittently turned on / off, and the battery 1805 is turned on.
The signal processing unit 1905 and the display unit 106 may be supplied with power to operate the signal processing unit 1905 and the display unit 106. Note that the switch circuit 2101 is controlled by a signal output from the signal processing unit 1905.

As described above, stable power can be supplied to a display device by using a battery that can be charged using electromagnetic waves as a constant voltage circuit. In addition, the electromagnetic wave (radio signal) used for charging the battery is weak by charging the battery by receiving the electromagnetic wave (radio signal) over a certain time and discharging the stored power in a pulsed manner. Even in this case, it is possible to supply a large amount of power from the battery to the signal processing unit and the display unit. In particular, when the battery circuit is charged by receiving weak electromagnetic waves (wireless signals) that are randomly generated outside by the antenna circuit, the configuration of the constant voltage circuit shown in this embodiment is very effective. .

Note that the battery 1805 may be a secondary battery or an electric double layer capacitor.

Note that the present embodiment is an example in which the contents (may be part) described in other embodiments are embodied, an example in which the content is slightly modified, an example in which a part is changed, and an improvement. An example of the case,
An example in the case of detailed description, an example in the case of application, an example of a related part, and the like are shown. Therefore, the contents described in other embodiment modes can be freely applied to, combined with, or replaced with this embodiment mode.

In the present embodiment, various drawings have been used, but the contents described in each drawing (
May be applied to, combined with, the content described in another figure (may be part)
Alternatively, replacement can be performed freely. Furthermore, in the figures described so far,
For each part, more parts can be constructed by combining different parts.

Similarly, the contents (may be a part) described in each drawing of this embodiment are applied, combined, or replaced with the contents (may be a part) described in the figure of another embodiment. Can be done freely. Further, in the drawings of this embodiment mode, more drawings can be formed by combining each portion with a portion of another embodiment.

In this embodiment, an example of a structure of a display device 7500 according to the present invention will be described with reference to FIGS. In this embodiment, the line segment XY in the schematic diagram shown in FIG.
A schematic diagram of the cross section is shown.

The display device described in this embodiment includes an antenna circuit 7100, a memory circuit 7200, a logic circuit 7300, and a pixel circuit 7400. The logic circuit 7300 corresponds to a signal line driver circuit, a scan line driver circuit, or other various integrated circuits provided in the display device. In this embodiment, the antenna circuit 7100 is provided with an n-channel transistor, the memory circuit 7200 is provided with an n-channel transistor, the logic circuit 7300 is provided with a CMOS transistor in which an n-channel transistor and a p-channel transistor are electrically connected, and the pixel circuit 7400 is provided with an n-channel transistor. The configuration is shown. Note that the case where the memory circuit 7200 is a ROM will be described. Note that a word line connected to a transistor provided in the memory circuit 7200 is formed in the same layer as a gate electrode layer of the transistor, and a bit line, VDD, and VSS are the same layer as a conductive layer functioning as a source electrode or a drain electrode of the transistor. Shall be formed.

  Hereinafter, a specific manufacturing method will be described.

First, an insulating layer 7002 functioning as a base insulating layer is formed over one surface of the substrate 7000, and the island-shaped semiconductor layer 7004, the semiconductor layer 7006, and the semiconductor layer 700 are interposed through the insulating layer 7002.
8. A semiconductor layer 7010 and a semiconductor layer 7012 are formed (see FIG. 27A).

As the substrate 7000, a substrate having an insulating surface can be used. For example, a glass substrate,
It can be selected from a quartz substrate, a metal substrate (for example, a ceramic substrate or a stainless steel substrate), a semiconductor substrate such as a Si substrate, and the like. In addition, polyethylene terephthalate (PET
), Polyethylene naphthalate (PEN), polyethersulfine (PES), acrylic, or other plastic substrates can also be selected.

The insulating layer 7002 is formed using silicon oxide (SiOx) by a CVD method, a sputtering method, or the like.
), Silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x>y> 0), silicon nitride oxide (SiNxOy) (x>y> 0), or the like. For example, in the case where the insulating layer 7002 has a two-layer structure, a silicon nitride oxide layer may be formed as the first insulating layer and a silicon oxynitride layer may be formed as the second insulating layer. Alternatively, a silicon nitride layer may be formed as the first insulating layer, and a silicon oxide layer may be formed as the second insulating layer. The insulating layer 7002 functions as a blocking layer that prevents an impurity element from entering an element formed over the substrate 7000. In this manner, by forming the insulating layer 7002 functioning as a blocking layer, alkali metal such as Na or alkaline earth metal from the substrate 7000 can be prevented from adversely affecting an element formed above the substrate 7000. it can. Note that in the case where quartz is used for the substrate 7000, the insulating layer 7002 may be omitted.

The island-shaped semiconductor layers 7004, 7006, 7008, 7010, and 7012 are formed on the substrate 7000.
An amorphous semiconductor layer can be formed over the insulating layer 7002, and the amorphous semiconductor layer can be crystallized and then selectively etched.

For example, the amorphous semiconductor layer is formed with a thickness of 25 nm to 200 nm (preferably 30 nm to 150 nm) by a sputtering method, an LPCVD method, a plasma CVD method, or the like. Next, crystallization is performed by irradiating the amorphous semiconductor layer with a laser beam. Note that the crystallization of the amorphous semiconductor layer may be performed by laser crystallization by laser beam irradiation, thermal crystallization using an RTA or furnace annealing furnace, thermal crystallization using a metal element that promotes crystallization, or It can be performed by a method combining laser crystallization or various thermal crystallization methods. In the case of crystallization by laser beam irradiation, dehydrogenation treatment (for example, heat treatment in a nitrogen atmosphere at 500 ° C. for 1 hour) may be performed before laser beam irradiation.

Next, the obtained crystalline semiconductor layer is selectively etched to form an island-shaped semiconductor layer 7004,
A semiconductor layer 7006, a semiconductor layer 7008, a semiconductor layer 7010, and a semiconductor layer 7012 are formed (see FIG. 27A).

Next, a first layer is formed so as to cover the semiconductor layers 7004, 7006, 7008, 7010, and 7012.
An insulating layer 7030 is formed (see FIG. 27B).

The first insulating layer 7030 is formed by a CVD method, a sputtering method, or a film formation method thereof by AL.
Using a method combining the D method, silicon oxide, silicon nitride, silicon oxynitride (S
A single-layer structure or a stacked structure is formed using an insulating material such as iOxNy) (x>y> 0) or silicon nitride oxide (SiNxOy) (x>y> 0). For example, in the case where the first insulating layer 7030 is provided as a single layer, a silicon oxynitride layer or a silicon nitride oxide layer is formed by a CVD method using 5 n
It is formed with a film thickness of m to 50 nm. In the case where the first insulating layer 7030 is provided with a three-layer structure, a silicon oxynitride layer is formed as the first insulating layer, a silicon nitride layer is formed as the second insulating layer, and the third insulating layer 7030 is formed. A silicon oxynitride layer is formed as the insulating layer. Note that the first insulating layer 7030 functions as a gate insulating layer in a thin film transistor to be completed later.

The first insulating layer 7030 includes semiconductor layers 7004, 7006, 7008, 7010,
It can be formed by performing heat treatment or plasma treatment on 7012. For example, the semiconductor layers 7004, 7006, and 7008 are formed by plasma treatment (hereinafter also referred to as high-density plasma treatment) with an electron density of 1 × 10 ¹¹ cm ⁻³ or more and an electron temperature of 1.5 eV or less.
, 7010 and 7012 are subjected to oxidation treatment, nitridation treatment, or oxynitridation treatment, whereby a first insulating layer which becomes an oxide film, a nitride film, or an oxynitride film over the semiconductor layers 7004, 7006, 7008, 7010, and 7012, respectively 7030 can be formed. Preferably, the electron density is 1 × 10 ¹¹ cm ⁻³ or more and 1 × 10 ¹³ cm ⁻³ or less, and the plasma electron temperature is 0.1.
It is desirable to use plasma of 5 eV or more and 1.5 eV or less. The high-density plasma treatment time is not particularly limited, but is preferably 60 seconds or more. As a gas used for the high-density plasma treatment, for example, a rare gas such as He, Ar, Kr, or Xe and a mixed gas such as oxygen, nitrogen oxide (NO ₂ ), ammonia, nitrogen, or hydrogen can be used. Note that in the case where a rare gas is used for high-density plasma treatment, the formed insulating layer may contain the rare gas.

In the high-density plasma treatment performed here, the electron density of plasma is as high as 1 × 10 ¹¹ cm ⁻³ or more, and the electron temperature in the vicinity of the semiconductor layer that is the object to be processed is low, so that the semiconductor layer is damaged by the plasma. This can be prevented. Further, the electron density of the plasma is 1 × 10 ^11.
Since the insulating layer is formed with a high density of cm ⁻³ or more, a dense and high withstand voltage layer can be formed as compared with an insulating layer formed by a CVD method, a sputtering method, or the like. In addition, since the electron temperature of plasma is as low as 1.5 eV or less, the insulating layer can be formed at a lower temperature than conventional plasma treatment or thermal oxidation. For example, even if plasma oxidation is performed at a temperature of about 500 ° C. to 600 ° C. lower than the strain point of the glass substrate by 100 ° C. or more, the oxidation treatment can be sufficiently performed.

The first insulating layer 7030 may be formed by performing high-density plasma treatment on an insulating layer formed by a CVD method or a sputtering method.

For example, when the semiconductor layer 7004, 7006, 7008, 7010, and 7012 are formed using a semiconductor layer containing Si as a main component and subjected to oxidation treatment or nitridation treatment by high-density plasma treatment, silicon oxide ( SiOx layer or silicon nitride (SiN)
x) A layer is formed. Further, the semiconductor layers 7004, 7006, and 7 are formed by high-density plasma treatment.
After performing oxidation treatment on 008, 7010, and 7012, nitriding treatment may be performed by performing high-density plasma treatment again. In this case, the semiconductor layers 7004, 7006, 7008
, 7010, and 7012, a silicon oxide layer is formed, and a nitrogen plasma treatment layer having a high nitrogen concentration is provided on or near the surface of the silicon oxide layer.

By such high-density plasma treatment, 1 nm to 20 nm, specifically 5 nm to 10 nm.
The insulating layer can be formed on the semiconductor layer. Since the reaction in this case is a solid-phase reaction, the interface state density between the insulating layer and the semiconductor layer can be extremely low. Such high-density plasma treatment directly oxidizes (or nitrides) a semiconductor layer (crystalline silicon or polycrystalline silicon), so that the thickness of the formed insulating layer ideally has a very small variation. can do. In addition, since oxidation is not strengthened even at the crystal grain boundaries of crystalline silicon, a very favorable state is obtained. That is, the surface of the semiconductor layer is solid-phase oxidized by the high-density plasma treatment shown here to form an insulating layer with good uniformity and low interface state density without causing abnormal oxidation reaction at the grain boundaries can do.

Note that the semiconductor layers 7004, 7006, 7008, 7010, and 7 are formed by high-density plasma treatment.
In the case where an insulating layer is formed over 012, an insulating layer such as silicon oxide, silicon oxynitride, or silicon nitride is further deposited by a CVD method using plasma or thermal reaction, and stacked to form a first insulating layer 7030. May be. In any case, variations in characteristics of a transistor formed by including an insulating layer formed by high-density plasma in part or all of an insulating layer functioning as a gate insulating layer can be reduced.

Next, a first conductive layer 7032 and a second conductive layer 7034 are stacked over the first insulating layer 7030. Here, the first conductive layer 7032 is formed to a thickness of 20 nm to 100 nm by a CVD method, a sputtering method, or the like. The second conductive layer 7034 has a thickness of 100 nm to
It is formed with a thickness of 400 nm. The first conductive layer 7032 and the second conductive layer 7034 include tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo), aluminum (Al), copper (Cu), chromium (Cr), It is formed of an element selected from niobium (Nb) or the like, or an alloy material or a compound material containing these elements as main components. Alternatively, a semiconductor material typified by polycrystalline silicon doped with an impurity element such as phosphorus is used. First
Examples of the combination of the conductive layer 7032 and the second conductive layer 7034 include a tantalum nitride film and a tungsten film, a tungsten nitride film and a tungsten film, a molybdenum nitride film and a molybdenum film, and the like. Since tungsten and tantalum nitride have high heat resistance, heat treatment for thermal activation can be performed after the first conductive layer 7032 and the second conductive layer 7034 are formed. Note that, here, an example in which the conductive layer has a two-layer structure of the first conductive layer and the second conductive layer is shown; however, the present invention is not particularly limited, and a single-layer structure or a three-layer structure or more It is good. In the case of a three-layer structure, a stacked structure of a molybdenum layer, an aluminum layer, and a molybdenum layer is preferably employed. Here, a tantalum nitride layer is formed as the first conductive layer 7032;
A tungsten layer is formed as the second conductive layer 7034.

Next, the first conductive layer 7032 and the second conductive layer 7034 are selectively etched, so that part of the stacked structure including the first conductive layer 7032 and the second conductive layer 7034 is left, and the gate An electrode 7036, a gate electrode 7038, a gate electrode 7042, a gate electrode 7044, and a gate electrode 7046 are formed (see FIG. 28A).

Next, a resist mask is selectively formed so as to cover the semiconductor layer 7008, and the semiconductor layers 7004, 7006 are formed using the gate electrodes 7036, 7038, 7044, 7046 as masks.
7010 and 7012, an impurity element imparting n-type conductivity is added at a low concentration by an ion implantation method, whereby an impurity region 7048, an impurity region 7050, an impurity region 7054, and an impurity region 705 are added.
6 is formed. As the impurity element imparting n-type conductivity, phosphorus (P), arsenic (As), or the like can be used. Here, phosphorus (P) is used as the impurity element imparting n-type conductivity, and the semiconductor layers 7004 and 7 are included so that the phosphorus is contained at a concentration of 5 × 10 ¹⁷ to 1 × 10 ¹⁹ / cm ^3.
Add to 006, 7010, 7012. (See FIG. 28A).

Next, a resist mask is selectively formed so as to cover the semiconductor layers 7004, 7006, 7010, and 7012, and an impurity element imparting p-type conductivity is added to the semiconductor layer 7008 at a high concentration using the gate electrode 7042 as a mask. An impurity region 7052 functioning as a source region or a drain region is formed. As an impurity element indicating p-type, boron (B) or aluminum (
Al), gallium (Ga), or the like can be used. Here, boron (B) is used as the impurity element imparting p-type conductivity, and is added to the semiconductor layer 7008 so that the boron is contained at a concentration of 1 × 10 ¹⁷ to 1 × 10 ¹⁹ / cm ³ . (See FIG. 28A).

Next, the first insulating layer 7030 and the gate electrodes 7036, 7038, 7042, 7044, 7
An insulating layer is formed so as to cover 046. The insulating layer is formed by plasma CVD, sputtering, or the like, with an insulating layer containing an inorganic material such as silicon, silicon oxide, or silicon nitride, or an insulating layer containing an organic material such as an organic resin, having a single-layer structure or a stacked structure. Form with structure. next,
The insulating layer is selectively etched by anisotropic etching mainly in the vertical direction, and the insulating layer 705 in contact with the side surfaces of the gate electrodes 7036, 7038, 7042, 7044, 7046
8. An insulating layer 7060, an insulating layer 7062, an insulating layer 7064, and an insulating layer 7066 are formed. The insulating layers 7058, 7060, 7062, 7064, and 7066 are also referred to as sidewalls. In addition, it functions as a mask for doping when forming an LDD (Lightly Doped Drain) region.

Next, a resist mask is selectively formed so as to cover the semiconductor layer 7008, and the gate electrode 7
036, 7038, 7044, 7046 and insulating layers 7058, 7060, 7064, 7
Using 066 as a mask, an impurity element imparting n-type conductivity is added to the semiconductor layers 7004, 7006, 7010, and 7012 at a high concentration. The semiconductor layer 7004 includes an impurity region 7068 that functions as a source region or a drain region, and a low-concentration impurity region 7 that forms an LDD region region.
070 and a channel formation region 7072 are formed. Similarly, the semiconductor layers 7006 and 70
10 and 7012 include impurity regions 7 functioning as source regions and drain regions, respectively.
074, 7086, 7092 and a low concentration impurity region 7076 for forming an LDD region region,
7088, 7094 and channel formation regions 7078, 7090, 7096 are formed.
Here, phosphorus (P) is used as an impurity element imparting n-type conductivity, and the phosphorus is 1 × 10 ^20.
The semiconductor layers 7004, 7006, 7010 so as to be included at a concentration of ˜5 × 10 ²¹ / cm ^3.
, 7012. (See FIG. 28B).

Next, a resist mask is selectively formed so as to cover the semiconductor layers 7004, 7006, 7010, and 7012, and the impurity element imparting p-type conductivity is added to the semiconductor layer 7008 using the gate electrode 7042 and the insulating layer 7062 as masks. Add to concentration. In the semiconductor layer 7008, an impurity region 7080 that functions as a source region or a drain region, a low-concentration impurity region 7082 that forms an LDD region, and a channel formation region 7084 are formed. Here, p
Boron (B) is used as an impurity element imparting a mold, and the boron is 1 × 10 ¹⁹ to 1 × 1.
The semiconductor layers 7004, 7006, 7010, and 70 are included so as to be included at a concentration of 0 ²¹ / cm ^3.
Add to 12. (See FIG. 28B).

Through the above steps, the antenna circuit 7100 includes the transistor 7120 and the memory circuit 7200.
Further, the transistor 7130 can be provided, the logic circuit 7300 can be provided with the CMOS transistor 7140, and the pixel circuit 7400 can be provided with the transistor 7150.

The transistors 7120, 7130, and 7150 are n-channel transistors. In these transistors, a channel formation region is formed in a region of a semiconductor layer that overlaps with a gate electrode, and a source region or a drain region is formed in a region that does not overlap with the gate electrode and an insulating layer (side wall) formed on a side surface of the gate electrode. An impurity region to be formed is formed, and a low-concentration impurity region for forming an LDD region is formed between the channel formation region and the impurity region for forming the source region or the drain region, which overlaps with the insulating layer (side wall). Yes. Further, here, the CMOS transistor 7140 is also replaced with another transistor 7.
The configuration is the same as 120, 7130, and 7150. Note that the present invention is not particularly limited, and the LDD region may not be formed.

Next, the first insulating layer 7030, the gate electrodes 7036, 7038, 7042, 7044, 7
An insulating layer is formed to have a single-layer structure or a stacked structure so as to cover 046 and the like. Insulating layer is CVD
Inorganic materials such as silicon oxide and silicon nitride, organic materials such as polyimide, polyamide, benzocyclobutene, acrylic, and epoxy, and siloxane by the method, sputtering method, SOG method, droplet discharge method, screen printing method, etc. It is made of material. Here, the insulating layer 70
98, a stacked structure of insulating layers 7102 is formed.

Note that the insulating layer 70 is formed on the semiconductor layer before the insulating layer is formed on the semiconductor layer or on the semiconductor layer as in this embodiment.
In the case of forming a stacked structure of 98, 7102, after forming one layer or a plurality of layers,
Heat treatment for the purpose of restoring the crystallinity of the semiconductor layer, activating the impurity element added to the semiconductor layer, or hydrogenating the semiconductor layer may be performed. For the heat treatment, thermal annealing, laser annealing, RTA, or the like is preferably applied.

Next, openings are formed in the insulating layers 7098 and 7102, and a conductive layer 7104, a conductive layer 7106, a conductive layer 7108, and a conductive layer 7110 are formed over the openings and the insulating layer 7102. The conductive layers 7104, 7106, and 7110 are electrically connected to impurity regions 7068, 7074, and 7092 formed in the semiconductor layers 7004, 7006, and 7012, respectively. Conductive layer 7
108 is electrically connected to impurity regions 7052 and 7054 formed in the semiconductor layers 7008 and 7010, and is electrically connected to the impurity regions 7052 and 7054 by the conductive layer 7108. The conductive layers 7104, 7106, 7108, and 7110 function as a source electrode or a drain electrode of the transistor. (See FIG. 29A).

The conductive layers 7104, 7106, 7108, and 7110 are formed using a CVD method, a sputtering method, or the like by aluminum (Al), tungsten (W), titanium (Ti), tantalum (Ta),
Molybdenum (Mo), nickel (Ni), platinum (Pt), copper (Cu), gold (Au), silver (
Ag), manganese (Mn), neodymium (Nd), carbon (C), silicon (Si), or an alloy material or compound material containing these elements as a main component, formed in a single layer or stacked layers To do. The alloy material containing aluminum as a main component corresponds to, for example, a material containing aluminum as a main component and containing nickel, or an alloy material containing aluminum as a main component and containing nickel and one or both of carbon and silicon. Conductive layers 7104, 7106, 71
08 and 7110 are, for example, a laminated structure of a barrier film, an aluminum silicon (Al—Si) film, and a barrier film, a barrier film, an aluminum silicon (Al—Si) film, and titanium nitride (TiN).
It is preferable to adopt a laminated structure of a film and a barrier film. Note that the barrier film corresponds to a thin film formed of titanium, titanium nitride, molybdenum, or molybdenum nitride. Since aluminum and aluminum silicon have low resistance and are inexpensive, the conductive layers 7104, 7106, and 71
It is optimal as a material for forming 08 and 7110. In addition, when an upper layer and a lower barrier layer are provided, generation of hillocks of aluminum or aluminum silicon can be prevented. In addition, when a barrier film made of titanium, which is a highly reducing element, is formed, even if a thin natural oxide film is formed on the crystalline semiconductor layer, the natural oxide film is reduced, so that the crystalline semiconductor layer is in good condition. Contact can be made.

Next, an insulating layer 7202 is formed so as to cover the conductive layers 7104, 7106, 7108, and 7110. Then, a conductive layer 7203 and a conductive layer 7206 are formed over the insulating layer 7202. The conductive layer 7203 functions as a connection terminal for electrically connecting the transistor 7120 provided in the antenna circuit 7100 and an antenna to be formed later. The conductive layer 7206 functions as a connection terminal for electrically connecting a transistor provided in the pixel circuit 7400 and a pixel electrode of a light-emitting element to be formed later. The conductive layer 7203 and the conductive layer 7206 can be formed using a material similar to that of the above-described gate electrode or the conductive layer for forming the source or drain electrode.

The insulating layer 7202 is formed by a silicon oxide (SiOx), a silicon nitride (SiNx), or a silicon oxynitride (SiOxNy) (x> y) by a CVD method, a sputtering method, a method in which those film formation methods are combined with an ALD method, or the like. Insulating layers containing oxygen or nitrogen such as silicon nitride oxide (SiNxOy) (x> y) and films containing carbon such as DLC (diamond-like carbon), epoxy, polyimide, polyamide, polyvinylphenol, benzocyclobutene,
It can be provided in a single layer or a laminated structure made of an organic material such as acrylic or a siloxane material such as a siloxane resin. Note that the siloxane material corresponds to a material including a Si—O—Si bond. Siloxane has a skeleton structure formed of a bond of silicon (Si) and oxygen (O). As a substituent, an organic group containing at least hydrogen (for example, an alkyl group or an aromatic hydrocarbon) is used. A fluoro group can also be used as a substituent. Alternatively, an organic group containing at least hydrogen and a fluoro group may be used as a substituent.

Next, a conductive layer 7208 functioning as an antenna is formed over the conductive layer 7203 which is a connection terminal. The conductive layer 7208 is formed using a conductive material by a CVD method, a sputtering method, a printing method such as screen printing or gravure printing, a droplet discharge method, a dispenser method, a plating method, or the like. Conductive materials are aluminum (Al), titanium (Ti), silver (Ag), copper (Cu)
, Gold (Au), platinum (Pt) nickel (Ni), palladium (Pd), tantalum (Ta)
In addition, an element selected from molybdenum (Mo), or an alloy material or a compound material containing these elements as a main component is formed in a single layer structure or a laminated structure.

For example, in the case where the conductive layer 7208 is formed by a screen printing method, a conductive paste in which conductive particles having a particle diameter of several nanometers to several tens of micrometers are dissolved or dispersed in an organic resin is selectively printed. Can be provided. As the conductive particles, silver (Ag), gold (Au
), Copper (Cu), nickel (Ni), platinum (Pt), palladium (Pd), tantalum (T
Any one or more metal particles such as a), molybdenum (Mo), and titanium (Ti), silver halide fine particles, or dispersible nanoparticles can be used. In addition, as the organic resin contained in the conductive paste, one or more selected from organic resins functioning as a binder of metal particles, a solvent, a dispersant, and a coating material can be used. Typically, an organic resin such as an epoxy resin or a silicon resin can be given. In forming the conductive layer, it is preferable to fire after extruding the conductive paste. For example, when fine particles mainly containing silver (for example, a particle size of 1 nm to 100 nm) are used as a conductive paste material, 1
The conductive layer can be obtained by curing by baking in a temperature range of 50 to 300 ° C.
Further, fine particles mainly composed of solder or lead-free solder may be used. In this case, it is preferable to use fine particles having a particle diameter of 20 μm or less. Solder and lead-free solder have the advantage of low cost. Note that the conductive layer 7208 illustrated in FIG. 30A has a coil shape when viewed from above.

In addition, a light-emitting element 7220 is formed in the pixel circuit 7400. In the light-emitting element 7220, the first electrode 7209 is formed so as to cover the conductive layer 7206 which is a connection terminal. After the partition layer 7210 is formed so as to cover the end portion of the first electrode 7209, a layer 7212 including at least a light-emitting layer and a second electrode 7214 are stacked.

The partition layer 7210 is formed using an inorganic insulating material or an organic insulating material and processed into a desired shape. The partition layer 7210 has an opening so that at least part of the first electrode 7209 is exposed. In addition, the side surface of the partition wall layer 7210 preferably has a shape in which the radius of curvature continuously changes.

One of the first electrode 7209 and the second electrode functions as an anode of the light-emitting element 7220 and the other functions as a cathode. First electrode 7209 and second electrode 7214
Is indium tin oxide (ITO), indium tin oxide containing silicon oxide, 2wt%
In addition to indium oxide containing 20 to 20 wt% zinc oxide, gold (Au), platinum (Pt), nickel (Ni), tungsten (W), chromium (Cr), molybdenum (Mo), iron (Fe)
, Cobalt (Co), copper (Cu), palladium (Pd), or the like. In addition to aluminum, an alloy of magnesium and silver, an alloy of aluminum and lithium, or the like can also be used. Note that in the case where the conductive layer 7206 formed as the connection terminal and the first electrode 7209 can be formed using the same material, the formation of the first electrode 7209 is omitted and the conductive layer 7206 is formed as the first electrode. Can function as.

The layer 7212 forms a layer including a light-emitting material that can obtain at least a desired light emission wavelength. Note that the layer 7212 forms a layer containing an organic substance, an inorganic substance, or an organic substance and an inorganic substance,
An organic EL element, an inorganic EL element, or an EL containing an organic substance or an inorganic substance as the light-emitting element 7220
An element is formed.

In addition, the transistor 71 provided in the antenna circuit 7100 without the insulating layer 7222 provided.
A conductive layer functioning as an antenna is provided over the conductive layer functioning as a source electrode or a drain electrode, and a part of the conductive layer functioning as a source electrode or a drain electrode of the transistor 7150 provided in the pixel circuit 7400 is used as the pixel electrode. It may be used.

Next, an insulating layer 7222 is formed so as to cover the conductive layer 7208 and the light-emitting element 7220 (see FIG. 30B). The insulating layer 7222 includes silicon oxide (SiOx) and silicon nitride (Si
Nx), silicon oxynitride (SiOxNy) (x> y), silicon nitride oxide (SiNxO)
y) Insulating layer containing oxygen or nitrogen such as (x> y), layer containing carbon such as DLC (diamond-like carbon), organic material such as epoxy, polyimide, polyamide, polyvinylphenol, benzocyclobutene, acrylic, or siloxane A layer made of a siloxane material such as a resin can be provided in a single-layer structure or a stacked structure. The insulating layer 7222 can be formed by a CVD method, a sputtering method, a droplet discharge method, a coating method, a printing method, or the like depending on the material.

Next, the counter substrate 7224 is attached and pressure-bonded. As the counter substrate 7224, a substrate similar to the substrate 7000 can be used. Further, as the counter substrate 7224, a film provided with an antistatic measure for preventing static electricity or the like (hereinafter referred to as an antistatic film) can be used. Examples of the antistatic film include a film in which an antistatic material is dispersed in a resin, a film on which an antistatic material is attached, and the like. The film provided with an antistatic material may be a film provided with an antistatic material on one side, or a film provided with an antistatic material on both sides. Note that the substrate 7000 and the counter substrate 7224 have light-transmitting properties on the side from which light from the light-emitting element 7220 is extracted.
That is, when light from the light emitting element 7220 is extracted from the substrate 7000 side, the substrate 7000 is used.
Is a light-transmitting substrate, and when the light from the light-emitting element 7220 is extracted from the counter substrate 7224 side, the counter substrate 7224 is a light-transmitting substrate. In the case where light from the light-emitting element 7220 is extracted from both sides of the substrate 7000 and the counter substrate 7224, both the substrates are light-transmitting substrates.

27 to 30 show examples in which a light emitting element is used as a display element, the present invention is not particularly limited. For example, a liquid crystal display element can be used, and an electrophoretic element can also be used. FIG. 31 shows an example of a liquid crystal display device using a liquid crystal display element, and FIG. 32 shows an example of electronic paper using an electrophoretic element. The configuration other than the display element is shown in FIGS.
Since it is the same as what was shown by 0, description is omitted.

In FIG. 31, a liquid crystal display device 73 that uses a liquid crystal display element instead of the light emitting element 7220.
50 is shown. In FIG. 31, an insulating layer 7222 is formed over the antenna circuit 7100, the memory circuit 7200, and the logic circuit 7300, and a spacer is provided in the pixel circuit 7400. The spacer may be formed at the same time using the same material as the insulating layer 7222.

Next, after an alignment film 7353 is formed over the conductive layer 7351, a liquid crystal material 7354 is dropped on a region of the pixel circuit 7400 where the display portion is provided, and the counter substrate 73 provided with the counter electrode 7352 is provided.
24 is bonded and pressure-bonded. The counter substrate 7324 includes a counter electrode 735 made of a transparent conductive layer.
2 and an alignment film 7355 subjected to a rubbing treatment is formed. In addition to these, a color filter or the like may be formed. Further, a polarizing plate is attached to the surface of the counter substrate 7324 opposite to the surface where the counter electrode 7352 is formed. The conductive layer 7351 and the counter electrode 7352 can be formed using a material similar to that of the first electrode 7209 and the second electrode 7214 of the light-emitting element 7220. Note that in the case of a reflective liquid crystal display device, a reflective electrode is formed using a light-blocking conductive material as the conductive layer 7351. Counter substrate 732
4 can be a glass substrate, a quartz substrate, or a transparent substrate such as plastic.

In FIG. 32, instead of the light emitting element 7220, a microcapsule 7 having a diameter of about 10 μm to 200 μm in which a transparent liquid, positively charged white fine particles, and negatively charged black fine particles are enclosed.
An electronic paper 7550 using 552 is shown. The microcapsule 7552
When an electric field is applied by the conductive layers 7551 and 7554, white fine particles and black fine particles move in opposite directions, and white or black can be displayed. A display element applying this principle is an electrophoretic display element. Since the electrophoretic display element has higher reflectance than the liquid crystal display element, an auxiliary light is unnecessary, power consumption is small, and the display portion can be recognized even in a dim place. Further, even when power is not supplied to the display portion, an image once displayed can be held.

Note that in FIGS. 27 to 32, the conductive layer 7208 functioning as an antenna is replaced with a conductive layer 7203.
Although an example is shown in which it is formed so as to be electrically connected to the device, the present invention is not particularly limited. For example, you may provide by sticking the board | substrate with which the conductive layer which functions as an antenna separately was formed. For example, as illustrated in FIG. 33A, a conductive layer 7602 functioning as a bump is provided over the conductive layer 7203, and the conductive layer 7602 and the conductive layer 7604 functioning as an antenna are attached to be electrically connected. Match. Note that the conductive layer 7604 functioning as an antenna is provided over the substrate 7610 in advance. The conductive layer 7604 functioning as an antenna may be formed in a manner similar to that of the conductive layer 7208 described above. Further, the substrate 7610
Alternatively, a substrate similar to the above-described counter substrate 7224 may be used.

In addition, the conductive layer 7203 and the conductive layer 7604 functioning as an antenna are electrically connected by conductive particles 7606 contained in a resin 7608 having adhesiveness. Note that the memory circuit 7200 is omitted in FIG.

Alternatively, as illustrated in FIG. 33B, a conductive layer 7654 functioning as an antenna may be provided over the counter substrate 7654 and then bonded to each other. In this case, a conductive layer 7654 functioning as an antenna is provided over the counter substrate 7654. Similarly to FIG. 33A, the conductive layer 7
A conductive layer 7852 functioning as a bump is provided over 203, and the conductive layer 7652 and the conductive layer 7654 functioning as an antenna are attached to each other so as to be electrically connected. Also,
The conductive layer 7203 and the conductive layer 7654 functioning as an antenna are formed using a resin 765 having adhesiveness.
8 are electrically connected by conductive particles 7656 included in the.

Alternatively, an element such as a thin film transistor may be once formed over a supporting substrate such as a glass substrate or a quartz substrate, and then peeled off from the heat-resistant substrate and transferred to a flexible substrate such as plastic. The support substrate is preferably a substrate having heat resistance. In the case of transferring an element such as a thin film transistor, a separation layer is first provided over a heat-resistant substrate on which the thin film transistor or the like is formed. An element such as a thin film transistor is formed over the separation layer. As the separation layer, a metal layer, a metal oxide layer, a stacked structure of a metal layer and a metal oxide layer, or the like can be used. For example, tungsten (W), molybdenum (Mo), titanium (Ti), tantalum (Ta), niobium (Nb), nickel (Ni), cobalt (Co), zirconium (
Zr), zinc (Zn), ruthenium (Ru), rhodium (Rh), palladium (Pd),
A layer made of an element selected from osmium (Os) and iridium (Ir), an alloy material or a compound material containing these elements as a main component, and an oxide layer of these metal elements are used in a single layer structure or a stacked structure. .

After a desired element such as a thin film transistor or a display element is formed over a heat resistant substrate, the layer including the element is peeled from the supporting substrate. For example, after an opening is formed in a region avoiding a region where an element is formed by irradiating a laser beam (for example, UV light), the layer including the element is peeled from the supporting substrate using a physical force. be able to. Further, before the layer having elements is peeled from the supporting substrate, an etching agent may be introduced into the formed opening to selectively remove the peeling layer. As the etchant, a gas or a liquid containing halogen fluoride or an interhalogen compound can be used. For example, chlorine trifluoride (ClF ₃ ) is used as a gas containing halogen fluoride. Then, the layer including the element is peeled from the support substrate. Note that a part of the release layer may be left without being removed. By doing so, it is possible to suppress the consumption of the etching agent and shorten the processing time required for removing the release layer. Further, even after the peeling layer is removed, the layer having elements can be held on the supporting substrate. Further, the cost can be reduced by reusing the support substrate from which the layer including the element is peeled.

Next, a flexible substrate is attached to the surface from which the supporting substrate is peeled. By using the peeling method in this manner, an element such as a thin film transistor can be provided over a flexible substrate. Note that as the flexible substrate, a film provided with an antistatic measure for preventing static electricity or the like (hereinafter referred to as an antistatic film) can also be used. Examples of the antistatic film include a film in which an antistatic material is dispersed in a resin, a film on which an antistatic material is attached, and the like. The film provided with an antistatic material may be a film provided with an antistatic material on one side, or a film provided with an antistatic material on both sides. By using an antistatic film, it is possible to suppress adverse effects on elements such as thin film transistors due to external static electricity or the like when handled as a product.

As described above, a display device capable of displaying a desired video using wireless signal transmission can be obtained. Note that this embodiment can be combined with any of the other embodiments and other embodiments described in this specification as appropriate.

In this embodiment, an example of a method for manufacturing a transistor, which is different from that in the above embodiment, will be described with reference to FIGS.
This will be described with reference to FIG. Specifically, an example in which a MOS transistor is formed on a single crystal substrate will be described.

In this embodiment, a transistor portion constituting a circuit for controlling a radio signal and a driver circuit for controlling a display panel is representatively shown. Here, a method for manufacturing a P-channel transistor and an N-channel transistor is described.

First, a region 2304 and a region 2306 (hereinafter also referred to as regions 2304 and 2306) in which elements are separated are formed in the semiconductor substrate 2300 (see FIG. 34A). The regions 2304 and 2306 provided in the semiconductor substrate 2300 are separated by an insulating layer 2312 (also referred to as a field oxide film). Here, a single crystal Si substrate having n-type conductivity is used as the semiconductor substrate 2300, and a p-well 230 is formed in the region 2306 of the semiconductor substrate 2300.
7 is provided.

The substrate 2300 can be used without any particular limitation as long as it is a semiconductor substrate. For example, a single crystal Si substrate having an n-type or p-type conductivity, a compound semiconductor substrate (GaAs substrate,
An InP substrate, a GaN substrate, a SiC substrate, a sapphire substrate, a ZnSe substrate, or the like can be used. Also, bonding method or SIMOX (Separation by Im
SOI (Silicon on) manufactured using the planted Oxygen method
An insulator) substrate or the like can also be used.

The element isolation regions 2304 and 2306 are formed by a selective oxidation method (LOCOS (Local Oxid
(Et. of Silicon) method) or trench isolation method can be used as appropriate.

The p well 2307 formed in the region 2306 of the semiconductor substrate 2300 can be formed by selectively introducing an impurity element having p-type conductivity into the semiconductor substrate 2300. As the p-type impurity element, boron (B), aluminum (Al), gallium (Ga), or the like can be used.

Note that in this embodiment, since a semiconductor substrate having n-type conductivity is used as the semiconductor substrate 2300, no impurity element is introduced into the region 2304, but an impurity element exhibiting n-type is introduced. Thus, an n-well may be formed in the region 2304. As the impurity element exhibiting n-type, phosphorus (P), arsenic (As), or the like can be used. On the other hand, when a semiconductor substrate having p-type conductivity is used, an n-type impurity element is introduced into the region 2304 to form an n-well, and no impurity element is introduced into the region 2306. Good.

Next, insulating layers 2332 and 2334 are formed so as to cover the regions 2304 and 2306, respectively (see FIG. 34B).

The insulating layers 2332 and 2334 are silicon oxide layers by oxidizing the surfaces of the regions 2304 and 2306 provided in the semiconductor substrate 2300 by performing heat treatment, for example.
, 2334 can be formed. Further, after the silicon oxide layer is formed by a thermal oxidation method, the surface of the silicon oxide layer is nitrided by performing nitriding treatment, whereby a silicon oxide layer and a film containing oxygen and nitrogen (hereinafter also referred to as a silicon oxynitride layer). ) And a laminated structure.

In addition, as described above, the insulating layers 2332 and 2334 may be formed by plasma treatment. For example, the surfaces of the regions 2304 and 2306 provided in the semiconductor substrate 2300 are subjected to oxidation treatment or nitridation treatment by high-density plasma treatment, so that the insulating layers 2332 and 233 are processed.
4, a silicon oxide (SiOx) film or a silicon nitride (SiNx) film can be formed. Alternatively, the surface of the regions 2304 and 2306 may be oxidized by high-density plasma treatment, and then nitridation may be performed by performing high-density plasma treatment again. In this case, a silicon oxide layer is formed in contact with the surfaces of the regions 2304 and 2306, a silicon oxynitride layer is formed over the silicon oxide layer, and the insulating layers 2332 and 2334 are formed by stacking a silicon oxide layer and a silicon oxynitride layer. The resulting film. Further, regions 2304 and 2306 are formed by thermal oxidation.
After the silicon oxide layer is formed on the surface, oxidation treatment or nitridation treatment may be performed by high-density plasma treatment.

Further, the insulating layers 2332 and 2306 formed in the regions 2304 and 2306 of the semiconductor substrate 2300 are used.
334 functions as a gate insulating layer in a transistor which is completed later.

Next, a conductive layer is formed so as to cover the insulating layers 2332 and 2334 formed over the regions 2304 and 2306 (see FIG. 34C). Here, the conductive layer 2336 is used as the conductive layer.
In this example, the conductive layer 2338 and the conductive layer 2338 are sequentially stacked. Of course, the conductive layer may be formed of a single layer or a stacked structure of three or more layers.

As the conductive layers 2336 and 2338, tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo), aluminum (Al), copper (Cu), chromium (Cr),
An element selected from niobium (Nb) or the like, or an alloy material or a compound material containing these elements as main components can be used. Alternatively, a metal nitride film obtained by nitriding these elements can be used. In addition, a semiconductor material typified by polycrystalline silicon doped with an impurity element such as phosphorus can be used.

Here, the conductive layer 2336 is formed using tantalum nitride, and the conductive layer 233 is formed thereover.
8 is provided in a laminated structure using tungsten. In addition, a single layer or a multilayer film selected from tungsten nitride, molybdenum nitride, or titanium nitride is used as the conductive layer 2336, and a single layer or a multilayer film selected from tantalum, molybdenum, or titanium is used as the conductive layer 2338. Can be used.

Next, the conductive layers 2336 and 2338 provided in a stacked manner are selectively etched and removed, so that the conductive layers 2336 and 2338 are left in portions above the regions 2304 and 2306, respectively. 2342 are formed (see FIG. 35A).

Next, a resist mask 2348 is selectively formed so as to cover the region 2304, and an impurity region is formed by introducing an impurity element into the region 2306 using the resist mask 2348 and the gate electrode 2342 as masks (FIG. 35B )reference). As an impurity element,
An impurity element imparting n-type conductivity or an impurity element imparting p-type conductivity is used. As the impurity element exhibiting n-type, phosphorus (P), arsenic (As), or the like can be used. As the p-type impurity element, boron (B), aluminum (Al), gallium (Ga), or the like can be used. Here, phosphorus (P) is used as the impurity element.

In FIG. 35B, an impurity region 2352 and a channel formation region 2350 which form a source region or a drain region are formed in the region 2306 by introducing an impurity element.

Next, a resist mask 2366 is selectively formed so as to cover the region 2306, and an impurity region is formed by introducing an impurity element into the region 2304 using the resist mask 2366 and the gate electrode 2340 as a mask (FIG. 35C )reference). As an impurity element,
An impurity element imparting n-type conductivity or an impurity element imparting p-type conductivity is used. As the impurity element exhibiting n-type, phosphorus (P), arsenic (As), or the like can be used. As the p-type impurity element, boron (B), aluminum (Al), gallium (Ga), or the like can be used. Here, an impurity element (eg, boron (B)) having a conductivity type different from that of the impurity element introduced into the region 2306 in FIG. 35B is introduced. As a result, an impurity region 2370 that forms a source region or a drain region and a channel formation region 2368 are formed in the region 2304.

Next, an insulating layer 2372 is formed so as to cover the insulating layers 2332 and 2334 and the gate electrodes 2340 and 2342 and electrically connected to impurity regions 2352 and 2370 formed in the regions 2304 and 2306 on the insulating layer 2372, respectively. Conductive layer 2374 is formed (FIG. 35).
(See (D)).

The insulating layer 2372 is formed of silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x> y), silicon nitride oxide (SiNxOy) (x> y), or the like by CVD or sputtering. Single layer made of an insulating layer containing oxygen or nitrogen, a film containing carbon such as DLC (Diamond Like Carbon), an organic material such as epoxy, polyimide, polyamide, polyvinylphenol, benzocyclobutene, acrylic, or a siloxane material such as siloxane resin Alternatively, a stacked structure can be provided. Note that the siloxane material corresponds to a material including a Si—O—Si bond. Siloxane has a skeleton structure formed of a bond of silicon (Si) and oxygen (O). As a substituent, an organic group containing at least hydrogen (
For example, an alkyl group or an aromatic hydrocarbon) is used. A fluoro group can also be used as a substituent. Alternatively, an organic group containing at least hydrogen and a fluoro group may be used as a substituent.

The conductive layer 2374 is formed by a CVD method, a sputtering method, or the like by aluminum (Al), tungsten (W), titanium (Ti), tantalum (Ta), molybdenum (Mo), nickel (Ni), platinum (Pt), copper ( Cu), gold (Au), silver (Ag), manganese (Mn), neodymium (Nd), carbon (C), silicon (Si), or an alloy material containing these elements as a main component or The compound material is formed as a single layer or a stacked layer. The alloy material containing aluminum as a main component corresponds to, for example, a material containing aluminum as a main component and containing nickel, or an alloy material containing aluminum as a main component and containing nickel and one or both of carbon and silicon. The conductive layer 2374 includes, for example, a barrier film and aluminum silicon (
Laminated structure of Al-Si) film and barrier film, barrier film and aluminum silicon (Al-Si)
A stacked structure of a film, a titanium nitride (TiN) film, and a barrier film may be employed. Note that the barrier film corresponds to a thin film formed of titanium, titanium nitride, molybdenum, or molybdenum nitride. Since aluminum and aluminum silicon have low resistance and are inexpensive, the conductive layer 2
It is optimal as a material for forming 374. In addition, when an upper layer and a lower barrier layer are provided, generation of hillocks of aluminum or aluminum silicon can be prevented. In addition, when a barrier film made of titanium, which is a highly reducing element, is formed, even if a thin natural oxide film is formed on the crystalline semiconductor layer, the natural oxide film is reduced, so that the crystalline semiconductor layer is in good condition. Contact can be made.

As described above, a transistor which forms part of a circuit of a display device that can display a desired image using wireless signal transmission can be obtained. Note that this embodiment can be combined with any of the other embodiments and other embodiments described in this specification as appropriate.

Further, it is noted that the structure of the transistor constituting the display device according to the present invention is not limited to the illustrated structure. For example, a transistor structure such as an inverted stagger structure or a fin FET structure can be employed. The fin FET structure is preferable because the short channel effect accompanying the miniaturization of the transistor size can be suppressed.

In this embodiment, a method for manufacturing a transistor different from that in the above embodiment is described with reference to FIGS.
9 will be used for explanation. Specifically, an example in which a MOS transistor is formed by a manufacturing method different from that of the second embodiment will be described.

First, an insulating layer is formed over the substrate 2600. Here, single-crystal Si having n-type conductivity type
A substrate is used as the substrate 2600, and an insulating layer 2602 and an insulating layer 2604 are formed over the substrate 2600.
(See FIG. 36A). For example, heat treatment is performed on the substrate 2600 to form silicon oxide (SiOx) as the insulating layer 2602, and silicon nitride (SiNx) is formed over the insulating layer 2602 by a CVD method.

The substrate 2600 can be used without any particular limitation as long as it is a semiconductor substrate. For example, an n-type or p-type single crystal Si substrate, compound semiconductor substrate (GaAs substrate, I
nP substrate, GaN substrate, SiC substrate, sapphire substrate, ZnSe substrate, etc.), bonding method or SIMOX (Separation by IMplanted Oxygen)
An SOI (Silicon on Insulator) substrate or the like manufactured using a method can be used.

The insulating layer 2604 may be provided by nitriding the insulating layer 2602 by the high-density plasma treatment described above after the insulating layer 2602 is formed. Note that the insulating layer provided over the substrate 2600 may be provided as a single layer or a stacked structure including three or more layers.

Next, a resist mask 2606 pattern is selectively formed over the insulating layer 2604, and etching is performed selectively using the resist mask 2606 as a mask.
A recess 2608 is selectively formed at 00 (see FIG. 36B). Substrate 2600, insulating layer 2
Etching of 602 and 2604 can be performed by dry etching using plasma.

Next, after the pattern of the resist mask 2606 is removed, an insulating layer 2610 is formed so as to fill the recess 2608 formed in the substrate 2600 (see FIG. 36C).

The insulating layer 2610 is formed using silicon oxide, silicon nitride, silicon oxynitride (SiOxNy) (x>y> 0), silicon nitride oxide (SiNxO) by a CVD method, a sputtering method, or the like.
y) An insulating material such as (x>y> 0) is used. Here, as the insulating layer 2610,
A silicon oxide layer is formed using TEOS (tetraethylorthosilicate) gas by an atmospheric pressure CVD method or a low pressure CVD method.

Next, grinding treatment, polishing treatment or CMP (Chemical Mechanical Po)
The surface of the substrate 2600 is exposed by performing a (listening) process. Here, by exposing the surface of the substrate 2600, a region 2612 and a region 2613 are provided between the insulating layers 2611 formed in the recess 2608 of the substrate 2600. Note that the insulating layer 2611
Is obtained by removing the insulating layer 2610 formed on the surface of the substrate 2600 by grinding treatment, polishing treatment, or CMP treatment. Subsequently, an impurity element having p-type conductivity is selectively introduced, so that a p-well 2615 is formed in the regions 2613 and 2614 of the substrate 2600 (see FIG. 37A).

As an impurity element exhibiting p-type conductivity, boron (B), aluminum (Al), gallium (Ga)
) Etc. can be used. Here, boron (B) is used as the impurity element in the region 2613.
, 2614.

Note that in this embodiment, since a semiconductor substrate having n-type conductivity is used as the substrate 2600, no impurity element is introduced into the region 2612; however, by introducing an impurity element exhibiting n-type conductivity An n-well may be formed in the region 2612. As the impurity element exhibiting n-type, phosphorus (P), arsenic (As), or the like can be used.

On the other hand, when a semiconductor substrate having p-type conductivity is used, an n-type impurity element is introduced into the region 2612 to form an n-well, and no impurity element is introduced into the region 2613. Good.

Next, an insulating layer 2632 and an insulating layer 263 are formed over the surfaces of the regions 2612 and 2613 of the substrate 2600.
4 are formed (see FIG. 37B).

For example, the insulating layers 2632 and 2634 are formed by performing heat treatment on the region 26 provided in the substrate 2600.
The surface of 12, 2613 can be oxidized to form a silicon oxide layer.
The insulating layers 2632 and 2634 are formed in a stacked structure with a silicon oxynitride layer by forming a silicon oxide layer by a thermal oxidation method and then nitriding the surface of the silicon oxide layer by nitriding. Also good.

In addition, as described above, the insulating layers 2632 and 2634 may be formed by plasma treatment. For example, the surfaces of the regions 2612 and 2613 provided in the substrate 2600 are subjected to oxidation treatment or nitridation treatment by the above-described high-density plasma treatment, whereby the insulating layers 2632 and 26
34 can be formed of a silicon oxide (SiOx) film or a silicon nitride (SiNx) film. Alternatively, after the surface of the regions 2612 and 2613 is oxidized by high-density plasma treatment, nitriding treatment may be performed by performing high-density plasma treatment again. In this case, a silicon oxide layer is formed in contact with the surfaces of the regions 2612 and 2613, a (silicon oxynitride layer) is formed over the silicon oxide layer, and the insulating layers 2632 and 2634 are formed of a silicon oxide layer and a silicon oxynitride layer. Becomes a laminated film. Further, the regions 2612 and 2 are formed by thermal oxidation.
After a silicon oxide layer is formed on the surface of 613, oxidation treatment or nitridation treatment may be performed by high-density plasma treatment.

Note that the insulating layers 2632 and 2634 formed in the regions 2612 and 2613 of the substrate 2600 function as gate insulating layers in transistors to be completed later.

Next, the insulating layer 26 formed above the regions 2612 and 2613 provided in the substrate 2600.
A conductive layer is formed so as to cover 32 and 2634 (see FIG. 37C). Here, an example is shown in which a conductive layer 2636 and a conductive layer 2638 are sequentially stacked as the conductive layer. Of course, the conductive layer may be formed of a single layer or a stacked structure of three or more layers.

As the conductive layers 2636 and 2638, tantalum (Ta), tungsten (W), titanium (
An element selected from Ti), molybdenum (Mo), aluminum (Al), copper (Cu), chromium (Cr), niobium (Nb), or the like, or an alloy material or a compound material containing these elements as a main component. be able to. Alternatively, a metal nitride film obtained by nitriding these elements can be used. In addition, a semiconductor material typified by polycrystalline silicon doped with an impurity element such as phosphorus can be used.

Here, the conductive layer 2636 is formed using tantalum nitride, and the conductive layer 2638 is formed thereover.
As a stacked structure using tungsten. In addition, as the conductive layer 2636,
A single layer or a stacked film selected from tantalum nitride, tungsten nitride, molybdenum nitride, or titanium nitride can be used. As the conductive layer 2638, a single layer or a stacked film selected from tungsten, tantalum, molybdenum, or titanium can be used.

Next, the conductive layers 2636 and 2638 provided in a stacked manner are selectively removed by etching, so that the conductive layers 2636 and 2613 are partially formed over the regions 2612 and 2613 of the substrate 2600.
2638 are left, and a conductive layer 2640 and a conductive layer 264 each function as a gate electrode.
2 is formed (see FIG. 38A). Here, in the substrate 2600, the conductive layer 2
The surfaces of regions 2612 and 2613 that do not overlap with 640 and 2642 are exposed.

Specifically, in a region 2612 of the substrate 2600, a portion of the insulating layer 2632 formed below the conductive layer 2640 that does not overlap with the conductive layer 2640 is selectively removed, so that the conductive layer 2
640 and the end portion of the insulating layer 2632 are formed so as to be substantially coincident with each other. Further, in a region 2613 of the substrate 2600, a portion of the insulating layer 2634 formed below the conductive layer 2642 that does not overlap with the conductive layer 2642 is selectively removed, so that end portions of the conductive layer 2642 and the insulating layer 2634 are roughly formed. Form to match.

In this case, an insulating layer or the like that does not overlap with the formation of the conductive layers 2640 and 2642 may be removed, or the resist mask remaining after the formation of the conductive layers 2640 and 2642 or the conductive layers 2640 and 2642 may be used as a mask. A portion of the insulating layer that does not become necessary may be removed.

Next, an impurity element is selectively introduced into the regions 2612 and 2613 of the substrate 2600, whereby impurity regions 2648 and 2650 are formed (see FIG. 38B). Here, region 26
13 is formed by selectively introducing a low-concentration impurity element imparting n-type with the conductive layer 2642 as a mask to form an impurity region 2650, and a low-concentration impurity imparting p-type with the conductive layer 2640 as a mask in the region 2612. An impurity region 2648 is formed by selectively introducing an element. As the impurity element imparting n-type conductivity, phosphorus (P), arsenic (As), or the like can be used. As an impurity element imparting p-type conductivity, boron (B), aluminum (Al), gallium (Ga)
) Etc. can be used. Part of the impurity regions 2648 and 2650 formed here is
An LDD (Lightly Doped Drain) region to be formed later is formed.

Next, an insulating layer 2654 in contact with the side surfaces of the conductive layers 2640 and 2642 is formed. Insulating layer 26
54 is also referred to as a sidewall. The insulating layer 2654 is a single layer or a stack of a film containing an inorganic material such as silicon, silicon oxide, or silicon nitride, or a film containing an organic material such as an organic resin, by a plasma CVD method, a sputtering method, or the like. Form. Then, the insulating layer can be selectively etched by anisotropic etching mainly in the vertical direction so as to be in contact with the side surfaces of the conductive layers 2640 and 2642. Note that the insulating layer 2654
Is used as a mask for doping when forming an LDD (Lightly Doped Drain) region. Here, the insulating layer 2654 includes the conductive layers 2640 and 264.
2 is formed so as to be in contact with the side surface of the insulating layer formed below 2.

Subsequently, an impurity element functioning as a source region or a drain region is formed by introducing an impurity element into the regions 2612 and 2613 of the substrate 2600 using the insulating layer 2654 and the conductive layers 2640 and 2642 as masks (FIG. 38C )reference). Here, substrate 260
An impurity element imparting high concentration n-type is introduced into the zero region 2613 using the insulating layer 2654 and the conductive layer 2642 as masks, and a high concentration p-type is imparted to the region 2612 using the insulating layers 2654 and conductive layers 2640 as masks. Impurity elements are introduced.

As a result, an impurity region 2658 that forms a source region or a drain region, a low-concentration impurity region 2660 that forms an LDD region, and a channel formation region 2656 are formed in the region 2612 of the substrate 2600. In the region 2613 of the substrate 2600, an impurity region 2664 that forms a source region or a drain region, and a low-concentration impurity region 2 that forms an LDD region.
666 and a channel formation region 2662 are formed.

Note that in this embodiment, the region 261 of the substrate 2600 which does not overlap with the conductive layers 2640 and 2642
2 and 2613 are exposed, and the impurity element is introduced. Therefore, the substrate 2600
The channel formation region 2656 and the channel formation region 2662 formed in the regions 2612 and 2613, respectively, can be formed in a self-alignment manner with the conductive layers 2640 and 2642.

Next, an insulating layer 2677 is formed so as to cover an insulating layer, a conductive layer, or the like provided over the regions 2612 and 2613 of the substrate 2600, and an opening 2678 is formed in the insulating layer 2677 (FIG. 39).
(See (A)).

The insulating layer 2677 is formed of silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiOxNy) (x> y), silicon nitride oxide (SiNxOy) (x> y), or the like by CVD or sputtering. Single layer made of an insulating layer containing oxygen or nitrogen, a film containing carbon such as DLC (Diamond Like Carbon), an organic material such as epoxy, polyimide, polyamide, polyvinylphenol, benzocyclobutene, acrylic, or a siloxane material such as siloxane resin Alternatively, a stacked structure can be provided. Note that the siloxane material corresponds to a material including a Si—O—Si bond. Siloxane is composed of silicon (Si) and oxygen (
A skeleton structure is formed by the bond with O). As a substituent, an organic group containing at least hydrogen (for example, an alkyl group or an aromatic hydrocarbon) is used. A fluoro group can also be used as a substituent. Alternatively, an organic group containing at least hydrogen and a fluoro group may be used as a substituent.

Next, a conductive layer 2680 is formed in the opening 2678 using a CVD method, and the conductive layer 2680 is formed.
A conductive layer 2682a, a conductive layer 2682b, a conductive layer 2682c, and a conductive layer 2682d are selectively formed over the insulating layer 2677 so as to be electrically connected to each other (see FIG. 39B).

The conductive layers 2680 and 2682a to 2682d are formed of aluminum (Al), tungsten (W), titanium (Ti), tantalum (Ta), molybdenum (Mo), nickel (Ni), platinum (Pt) by CVD or sputtering. ), Copper (Cu), gold (Au), silver (Ag)
, Manganese (Mn), neodymium (Nd), carbon (C), silicon (Si), or an alloy material or compound material containing these elements as a main component. The alloy material containing aluminum as a main component corresponds to, for example, a material containing aluminum as a main component and containing nickel, or an alloy material containing aluminum as a main component and containing nickel and one or both of carbon and silicon. Conductive layers 2680, 2682a-2682
For example, d adopts a laminated structure of a barrier film, an aluminum silicon (Al—Si) film, and a barrier film, and a laminated structure of a barrier film, an aluminum silicon (Al—Si) film, a titanium nitride (TiN) film, and a barrier film. Good. Note that the barrier film corresponds to a thin film formed of titanium, titanium nitride, molybdenum, or molybdenum nitride. Aluminum and aluminum silicon are optimal materials for forming the conductive layer because they have low resistance and are inexpensive. In addition, when an upper layer and a lower barrier layer are provided, generation of hillocks of aluminum or aluminum silicon can be prevented. In addition, when a barrier film made of titanium, which is a highly reducing element, is formed, even if a thin natural oxide film is formed on the crystalline semiconductor layer, the natural oxide film is reduced, so that the crystalline semiconductor layer is in good condition. Contact can be made. Here, the conductive layer 2
680 can be formed by selectively growing tungsten (W) by a CVD method.

As described above, a transistor which forms part of a circuit of a display device that can display a desired image using wireless signal transmission can be obtained. Note that this embodiment can be combined with any of the other embodiments and other embodiments described in this specification as appropriate.

Note that the structure of the transistor constituting the semiconductor device of the present invention is not limited to the illustrated structure. For example, a transistor structure such as an inverted stagger structure or a fin FET structure can be employed. The fin FET structure is preferable because the short channel effect accompanying the miniaturization of the transistor size can be suppressed.

In this embodiment, an example in which the memory circuit is a flash memory will be described with reference to the drawings. Here, a memory transistor provided in the memory circuit will be described.

The memory transistor shown in this embodiment is a MOSFET (Metal Oxide Se).
A region having a structure similar to that of a semiconductor field effect transistor) and capable of accumulating charges for a long period of time is provided on the channel formation region. This charge storage region is formed on an insulating layer and is also called a floating gate electrode because it is isolated from the surroundings. A control gate electrode is provided on the floating gate electrode through an insulating layer.

In the memory transistor having the above structure, an operation for accumulating and releasing charges in the floating gate electrode is performed by a voltage applied to the control gate electrode. In other words, data is stored by taking in and out the electric charge held in the floating gate electrode. The injection and extraction of charges into the floating gate electrode is performed by using a semiconductor film in which a channel formation region is formed,
A high voltage is applied between the control gate electrodes. At this time, it is said that Fowler-Nordheim type (FN type) tunnel current (NAND type) and thermal electrons (NOR type) flow through the insulating layer on the channel formation region. The insulating layer provided over the channel formation region is also called a tunnel insulating layer.

First, as illustrated in FIG. 40A, an insulating layer 507 serving as a base film is formed over a substrate 500. On the insulating layer 507, the island-shaped semiconductor layer 51 is formed using the same crystallization method as in the first embodiment.
0 is formed.

As shown in FIG. 40B, a first insulating layer 511 is formed over the semiconductor layer 510. First
The insulating layer 511 is formed of silicon oxide, silicon nitride, silicon oxynitride (SiOxNy) using a CVD method, a sputtering method, or a method in which these film formation methods are combined with an ALD method.
A single layer structure or a stacked layer structure is formed using an insulating material such as (x>y> 0) or silicon nitride oxide (SiNxOy) (x>y> 0).

Next, high-density plasma treatment is performed on the first insulating layer 511 to form the second insulating layer 512. A charge storage layer 513 is formed over the second insulating layer 512. The second insulating layer 512 functions as a tunnel insulating layer, and the charge storage layer 513 functions as a floating gate electrode.

Note that the first insulating layer 511 may function as a tunnel insulating layer without being subjected to high-density plasma treatment. Alternatively, the first insulating layer 511 may be formed by performing high-density plasma treatment on the semiconductor layer 510. The high density plasma treatment may be performed in the same manner as in the first embodiment.

The second insulating layer 512 formed by performing high-density plasma treatment on the first insulating layer 511 functions as a tunnel insulating layer of the memory transistor. Accordingly, the thinner the second insulating layer 512, the easier the tunnel current flows. In addition, as the second insulating layer 512 is thinner, charges can be accumulated at a lower voltage in a floating gate electrode formed later.

Generally, there is a thermal oxidation method as a method for forming a thin insulating layer on a semiconductor layer.
When a substrate having a strain point of less than 700 ° C. such as a glass substrate is used, it is very difficult to form a tunnel insulating layer by thermally oxidizing the semiconductor layer. In addition, an insulating layer formed by a CVD method or a sputtering method does not have a sufficient breakdown voltage because it includes a defect inside the film. Furthermore, when a thin insulating layer is formed by CVD or sputtering, the withstand voltage is low,
There is also a problem that defects such as pinholes are likely to occur. Therefore, if the first insulating layer 511 formed by a CVD method or a sputtering method is used as it is as a tunnel insulating layer, a defect may occur.

Therefore, as shown in this embodiment, the second insulating layer 512 is formed by performing high-density plasma treatment on the first insulating layer 511, so that it is denser than the insulating layer formed by a CVD method, a sputtering method, or the like. A high breakdown voltage insulating layer can be formed. In addition, even when the end portion of the semiconductor layer 510 cannot be sufficiently covered when the first insulating layer 511 is formed, the second insulating layer 512 that sufficiently covers the semiconductor layer is formed by high-density plasma treatment. be able to.

The memory transistor of this embodiment stores information by injecting electrons through the tunnel insulating layer. At this time, if hydrogen that causes electron traps exists in the tunnel insulating layer, the voltage fluctuates as writing and erasing are repeated, which causes deterioration of the memory. Accordingly, it is preferable that the hydrogen content in the tunnel insulating layer, which causes an electron trap, is small. By forming the second insulating layer 512 by performing high-density plasma treatment on the first insulating layer 511, the hydrogen content in the film can be reduced as compared with an insulating layer formed by a CVD method, a sputtering method, or the like.

As described above, a memory transistor capable of high-speed operation can be formed by forming a tunnel insulating layer using a high-density plasma treatment over a semiconductor layer where a channel formation region is formed.

The charge storage layer 513 can be formed with a single-layer structure or a stacked structure of two or more layers. For example, the charge storage layer 513 includes a semiconductor material such as silicon (Si) and germanium (Ge), a compound containing silicon as a main component, tungsten (W), titanium (Ti),
Materials selected from metals selected from tantalum (Ta), molybdenum (Mo), etc., alloys based on these metals, and metal compounds (metal nitrides, metal oxides, etc.) based on these metals Can be used.

For example, silicon nitride, silicon nitride oxide, silicon carbide, silicide (tungsten silicide, titanium silicide, nickel silicide), and the like are compounds containing silicon as a main component. Examples of the semiconductor material include n-type or p-type silicon and silicon germanium containing germanium at a concentration of less than 10 atomic%. Examples of the metal compound include tantalum nitride, tantalum oxide, tungsten nitride, titanium nitride, titanium oxide, and tin oxide. In the case of using silicon, an impurity imparting conductivity such as phosphorus or boron may be added.

As shown in FIG. 40D, a third insulating layer 514 is formed over the charge accumulation layer 513. The third insulating layer 514 is formed using an insulating material containing silicon as a main component, such as silicon oxide or silicon oxynitride, or a metal oxide such as aluminum oxide (AlxOy), tantalum oxide (TaxOy), or hafnium oxide (HfOx). Form. These films are formed using a CVD method, a sputtering method, or a combination of these film formation methods and an ALD method.

Similar to the high-density plasma treatment of the first insulating layer 511, the high-density plasma treatment is performed on the third insulating layer 514. As shown in FIG. 41A, the fourth insulating layer 515 is formed by performing high-density plasma treatment on the third insulating layer 514. Next, the fourth insulating layer 51
5, a conductive layer 516 and a conductive layer 517 are sequentially stacked. Note that the third insulating layer 514 may be used as it is without being subjected to high-density plasma treatment.

The conductive layers 516 and 517 are conductive layers constituting a gate electrode (control gate electrode). 2
Although an example in which a gate electrode is formed using a conductive layer, a single layer or three or more layers may be used. The conductive layer constituting the control gate electrode is n-type or p-type silicon, tantalum (Ta), tungsten (W), titanium (Ti), molybdenum (Mo), aluminum (Al), copper (Cu),
Formed from a material selected from metals such as chromium (Cr) and niobium (Nb), alloys based on these metals, and metal compounds (metal nitrides, metal oxides, etc.) based on these metals. can do.

The conductive layers 516 and 517 are selectively etched, so that a gate electrode 520 is formed over the semiconductor layer 510 as illustrated in FIG. Further, the fourth insulating layer 515 and the charge storage layer 513 are etched using the gate electrode 520 as a mask. As a result, the gate electrode 52
0, the fourth insulating layer 515, and the charge storage layer 513 are formed so that the side surfaces thereof substantially coincide. The charge storage layer 513 functions as a floating gate electrode, the fourth insulating layer 515 functions as a control insulating layer, and the gate electrode 520 functions as a control gate electrode.

Next, using the gate electrode 520 as a mask, a low concentration impurity element imparting n-type or p-type is added to form a pair of low-concentration impurity regions. The impurity element imparting n-type has phosphorus (
P), arsenic (As), or the like can be used, and boron (B) or the like can be used for the p-type impurity element. Part of the low concentration impurity region formed here forms an LDD region.

Next, an insulating layer 518 in contact with the side surfaces of the gate electrode 520, the fourth insulating layer 515, and the charge storage layer 513 is formed. The insulating layer 518 is also referred to as a sidewall. Insulating layer 518
Can be formed by forming an insulating layer so as to cover the second insulating layer 512 and the gate electrode 520 and then selectively etching by anisotropic etching mainly in the vertical direction. The insulating layer 518 can be formed with a single-layer structure or a stacked structure using a material such as silicon oxide or silicon oxynitride by a CVD method or a sputtering method. Note that the insulating layer 518 includes L
It is used as a mask for doping when forming a DD (Lightly Doped Drain) region.

Next, an impurity region 522 functioning as a source region or a drain region is formed by adding a high-concentration impurity element imparting n-type or p-type with the gate electrode 520 and the insulating layer 518 as masks. Phosphorous (P), arsenic (As), or the like is used as the impurity element imparting n-type,
Boron (B) or the like can be used for the impurity element exhibiting p-type conductivity. Thus, the semiconductor layer 51
0, an impurity region 522 that forms a source region or a drain region, a low-concentration impurity region 521 that forms an LDD region, and a channel formation region 523 are formed. Note that the channel formation region 523 is formed via an insulating layer or the like. It is formed at a position substantially overlapping with the gate electrode 520. LDD
The low-concentration impurity region 521 functioning as a region is formed in the insulating layer 51 via the second insulating layer 512.
8 is formed at a position substantially overlapping with 8. Note that after the impurity element imparting n-type or p-type is added, heat treatment for activating the impurity element is preferably performed (see FIG. 41C).

As shown in FIG. 41D, a fifth insulating layer 524 is formed so as to cover the gate electrode 520 and the like. An opening reaching the impurity region 522 is formed in the fifth insulating layer 524 and the second insulating layer 512. A conductive layer 525 that is electrically connected to the impurity region 522 is formed over the fifth insulating layer 524.

Through the above process, a memory transistor which is a semiconductor element can be manufactured. In addition,
The structure of the memory transistor described in this embodiment is an example, and a memory transistor having another structure can be used. In addition, this embodiment can be combined with any of the other embodiments or other embodiments described in this specification as appropriate.

The display device and the display system according to the present invention can be applied to various electronic devices.
Specifically, the present invention can be applied to an electronic device having a display portion. Such electronic devices include video cameras, digital cameras, goggles-type displays, navigation systems, sound playback devices (car audio, audio components, etc.), computers, game devices,
A portable information terminal (mobile computer, cellular phone, portable game machine, electronic book, etc.), and an image playback device (specifically, Digital Versatile Dis) provided with a recording medium
c (DVD) and the like, and a device provided with a display device capable of displaying the image.

FIG. 25A shows a display, which includes a housing 26001, a support base 26002, and a display portion 26.
003, a speaker portion 26004, a video input terminal 26005, and the like. The display device of the present invention can be incorporated in the display portion 26003, the housing 26001, or the like. The display includes all information display devices such as personal computers and advertisement displays. By incorporating the display device of the present invention, video based on a video signal recorded in advance can be displayed by transmission of a wireless signal, so that power consumption can be reduced and processing time can be shortened.

FIG. 25B illustrates a camera, which includes a main body 26101, a display portion 26102, and an image receiving portion 26103.
Operation key 26104, external connection port 26105, shutter 26106, and the like. The display device of the present invention can be incorporated in the display portion 26102, the main body 26101, or the like. By incorporating the display device of the present invention, video based on a video signal recorded in advance (including shooting data) can be displayed by wireless signal transmission, so that power consumption is reduced and processing time is shortened. Can be achieved.

FIG. 25C illustrates a computer, which includes a main body 26201, a housing 26202, and a display portion 262.
03, keyboard 26204, external connection port 26205, pointing mouse 262
Including 06. The display device of the present invention can be incorporated in the display portion 26203, the main body 26201, or the like. By incorporating the display device of the present invention, video based on a video signal recorded in advance can be displayed by transmission of a wireless signal, so that power consumption can be reduced and processing time can be shortened.

FIG. 25D illustrates a mobile computer, which includes a main body 26301, a display portion 26302, a switch 26303, operation keys 26304, an infrared port 26305, and the like. The display device of the present invention can be incorporated in the display portion 26302, the main body 26301, or the like. By incorporating the display device of the present invention, video based on a video signal recorded in advance can be displayed by transmission of a wireless signal, so that power consumption can be reduced and processing time can be shortened.

FIG. 25E shows a portable image reproducing apparatus (specifically, a DVD reproducing apparatus) provided with a recording medium.
A main body 26401, a housing 26402, a display portion A 26403, a display portion B 26404,
Recording medium (DVD or the like) reading unit 26405, operation keys 26406, speaker unit 264
07 etc. are included. The display portion A 26403 can mainly display image information, and the display portion B 26404 can mainly display character information. The display device of the present invention includes a display portion A26403,
It can be incorporated in the display portion B 26404, the main body 26401, or the like. By incorporating the display device of the present invention, video based on a video signal recorded in advance can be displayed by transmission of a wireless signal, so that power consumption can be reduced and processing time can be shortened.

FIG. 25F illustrates a goggle type display, which includes a main body 26501, a display portion 26502,
An arm portion 26503 is included. The display device of the present invention can be incorporated in the main body 26501, the display portion 26502, or the like. By incorporating the display device of the present invention, by transmitting radio signals,
Since the video based on the video signal recorded in advance can be displayed, the power consumption can be reduced and the processing time can be shortened.

FIG. 25G illustrates a video camera, which includes a main body 26601, a display portion 26602, and a housing 266.
03, an external connection port 26604, a remote control receiving unit 26605, an image receiving unit 26606, a battery 26607, a voice input unit 26608, an operation key 26609, and the like. The display device of the present invention can be applied to the main body 26601, the display portion 26602, the battery 26607, and the like. By applying the display device of the present invention, video based on a video signal recorded in advance can be displayed by wireless signal transmission, so that power consumption can be reduced and processing time can be shortened.

FIG. 25H illustrates a mobile phone, which includes a main body 26701, a housing 26702, and a display portion 2670.
3, an audio input unit 26704, an audio output unit 26705, operation keys 26706, an external connection port 26707, an antenna 26708, and the like. The display device of the present invention can be incorporated in the main body 26701, the display portion 26703, or the like. By incorporating the display device of the present invention, it is possible to display desired image data stored in advance by wireless signal transmission, so that power consumption can be reduced and processing time can be shortened.

  Thus, the present invention can be applied to all electronic devices.

FIG. 26A shows a television receiver that can carry only a display wirelessly. The display device of the present invention is incorporated in a display 2710 including a housing 2701, a display portion 2702, operation keys 2705, a speaker portion 2703, and the like. External device 27
04 incorporates a wireless communication apparatus according to the present invention. The wireless communication device incorporated in the external device 2704 and the display device incorporated in the display 2710 constitute a display system according to the present invention. Specifically, the antenna 27 provided in the external device 2704 is displayed.
Radio signals are transmitted / received between 06B and the antenna 2706A provided in the display 2710. An image based on the video signal recorded in advance on the display 2710 is displayed on the display unit 27 by a wireless signal received by the antenna 2706A provided in the display 2710.
02 can be displayed. In the case where a battery that can be charged by a wireless signal is mounted on the display 2710, the antenna 2706A and the antenna 27 are used.
The battery can be charged by a wireless signal transmitted and received at 06B.

Note that this embodiment can be combined with any of the other embodiments and other embodiments described in this specification as appropriate.

101 Reader / Writer 102 Display Device 103 Antenna Circuit 104 Power Supply Generation Unit 105 Signal Processing Unit 106 Display Unit 108 Signal Processing Unit 201 Rectifier Circuit 202 Retention Capacity 203 Constant Voltage Circuit 301 Demodulation Circuit 302 Amplifier 303 Logic Circuit 304 Memory Controller 305 Display Controller 306 Memory circuit 401 Pixel circuit 402 Signal line drive circuit 403 Scan line drive circuit 500 Substrate 501 First amplifier 502 First logic circuit 503 Second logic circuit 504 Second amplifier 505 Modulation circuit 507 Insulating layer 510 Semiconductor layer 511 First One insulating layer 512 Second insulating layer 513 Charge storage layer 514 Third insulating layer 515 Fourth insulating layer 516 Conductive layer 517 Conductive layer 518 Insulating layer 520 Gate electrode 521 Low-concentration impurity region 522 Impurity region 523 Channel type Region 524 Sixth insulating layer 525 Conductive layer 601 Reader / writer 602 Display device 605 Signal processing unit 701 First memory circuit 702 Second memory circuit 703 Third memory circuit 801 First antenna circuit 801 Power generation unit 802 Second antenna circuit 2401 Reception unit 902 Transmission unit 903 Control unit 904 Interface unit 905 Antenna circuit 906 Host device 907 Antenna 908 Resonance capacity 1001 First memory circuit 1002 Second memory circuit 1003 Third memory circuit 1101 Reference clock generation Circuit 1102 variable frequency dividing circuit 1103 horizontal clock generating circuit 1104 vertical clock generating circuit 1201 memory R / W circuit 1202 reference oscillation circuit 1203 variable frequency dividing circuit 1301 first antenna circuit 1302 second antenna circuit 1401 signal line 1 402 Scanning line 1403 Power supply line 1404 Transistor 1405 Transistor 1406 Capacitance element 1407 Display element 1501 Antenna 1502 Resonant capacitance 1601 Code detection circuit 1602 Coding circuit 1701 Substrate 1702 Spiral antenna 1703 Dipole antenna 1801 Rectification circuit 1802 Constant voltage circuit 1803 Charging control circuit 1804 Charging Discharge management circuit 1805 Battery 1806 Discharge control circuit 1902 Display device 1904 Power generation unit 1905 Signal processing unit 2101 Switch circuit 2201 Memory element 2202 Word line 2203 Bit line 2204 Switch 2300 Substrate 2301 Transistor 2302 High potential side power line 2303 Low potential side power line 2304 region 2306 region 2307 p-well 2312 insulating layer 2332 insulating layer 2336 conductive layer 2 338 Conductive layer 2340 Gate electrode 2342 Gate electrode 2348 Resist mask 2350 Channel formation region 2352 Impurity region 2366 Resist mask 2368 Channel formation region 2370 Impurity region 2372 Insulating layer 2374 Conductive layer 2401 Receiver 2402 Antenna circuit 2403 Antenna 2404 Resonance capacitance 2600 Substrate 2701 Housing Body 2602 Insulating layer 2703 Speaker portion 2604 Insulating layer 2705 Operation key 2606 Resist mask 2702 Display portion 2608 Recessed portion 2704 External device 2610 Insulating layer 2710 Display 2611 Insulating layer 2612 Region 2613 Region 2615 p-well 2632 Insulating layer 2634 Insulating layer 2636 Conductive layer 2638 Conductive Layer 2640 Conductive layer 2642 Conductive layer 2648 Impurity region 2650 Impurity region 2654 Edge layer 2656 Channel formation region 2658 Impurity region 2660 Low concentration impurity region 2662 Channel formation region 2664 Impurity region 2666 Low concentration impurity region 2677 Insulating layer 2678 Opening 2680 Conductive layer 7000 Substrate 7002 Insulating layer 7004 Semiconductor layer 7006 Semiconductor layer 7008 Semiconductor layer 7010 Semiconductor layer 7012 Semiconductor layer 7012 Insulating layer 7030 Insulating layer 7032 Conductive layer 7034 Conductive layer 7036 Gate electrode 7038 Gate electrode 7042 Gate electrode 7044 Gate electrode 7046 Gate electrode 7048 Impurity region 7050 Impurity region 7052 Impurity region 7054 Impurity region 7056 Impurity region 7058 Insulating layer 7060 Insulating layer 7062 Insulating layer 7064 Insulating layer 7066 Insulating layer 7068 Impurity region 7070 Low-concentration impurity region 7072 Channel formation region 7074 Impurity region 7076 Low concentration impurity region 7078 Channel formation region 7080 Impurity region 7082 Low concentration impurity region 7084 Channel formation region 7100 Antenna circuit 7104 Conductive layer 7106 Conductive layer 7108 Conductive layer 7110 Conductive layer 7120 Transistor 7130 Transistor 7140 CMOS transistor 7150 Transistor 7200 Memory circuit 7202 Insulating layer 7203 Conductive layer 7206 Conductive layer 7208 Conductive layer 7209 First electrode 7210 Partition wall 7212 Layer 7214 Second electrode 7220 Light emitting element 7222 Insulating layer 7224 Counter substrate 7300 Logic circuit 7324 Counter substrate 7350 Liquid crystal display device 7351 Conductive layer 7352 Counter electrode 7353 Alignment film 7354 Liquid crystal material 7355 Alignment film 7400 Pixel circuit 750 0 Display device 7550 Electronic paper 7551 Conductive layer 7552 Microcapsule 7554 Conductive layer 7602 Conductive layer 7604 Conductive layer 7606 Conductive particle 7608 Resin 7610 Substrate 7552 Conductive layer 7852 Layer 7654 Conductive layer 7656 Conductive particle 7658 Resin 7654 Counter substrate 1204a Memory ID counter 1204b x counter 1204c y counter 1204c y decoder 1205a memory ID decoder 1205b x decoder 1205c y decoder 26001 housing 26002 display unit 26003 display unit 26004 speaker unit 26005 video input terminal 2706A antenna 2706B antenna 26101 main body 26102 display unit 26103 image receiving unit 26104 operation key 26105 External connection port 26106 Shutter 26201 Body 26202 Case 26202 Display unit 26203 Display unit 26203 Case 26204 Keyboard 26204 External connection port 26205 External connection port 26205 Remote control reception unit 26206 Pointing mouse 26206 Image receiving unit 26207 Battery 26208 Audio input unit 26209 Operation key 26301 Main body 26302 Display unit 26303 Switch 26304 Operation Key 26305 Infrared port 26401 Main body 26402 Housing 26403 Display unit A
26404 Display B
26405 part 26406 operation key 26407 speaker part 26501 main body 26502 display part 26503 arm part 26701 main body 26702 case 26703 display part 26704 audio input part 26705 audio output part 26706 operation key 26707 external connection port 26708 antenna 2682a conductive layer 2682b conductive layer 2682c conductive layer 2682d conductive layer

Claims (5)

An antenna circuit for receiving radio signals;
A signal processing unit having a memory circuit for storing a video signal and outputting a signal indicating that the video signal has been read; and a memory controller for controlling the memory circuit based on the wireless signal;
A display unit for displaying video based on the video signal read from the memory circuit;
A battery that is charged using the wireless signal, and a switch circuit that controls whether or not power is supplied from the battery to the signal processing circuit and the display unit;
I have a,
The display device, wherein the video signal is stored in the memory circuit before the antenna circuit receives the wireless signal. An antenna circuit for receiving radio signals;
A signal processing unit having a memory circuit for storing a video signal and outputting a signal indicating that the video signal has been read; and a memory controller for controlling the memory circuit based on the wireless signal;
A display unit for displaying video based on the video signal read from the memory circuit;
A battery that is charged using the wireless signal, and a switch circuit that controls whether or not power is supplied from the battery to the signal processing circuit and the display unit;
I have a,
The display device, wherein the memory circuit is a read-only memory. In claim 1 or claim 2 ,
A display device comprising: a logic circuit that determines whether or not an error is present in a signal indicating that the video signal has been read. In any one of Claims 1 thru | or 3 ,
The display device, wherein the antenna circuit transmits a second wireless signal based on a signal indicating that the video signal has been read. In any one of Claims 1 thru | or 4 ,
The display device, wherein the antenna circuit includes a conductive film formed so as to surround the display portion.

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