JP2962236B2 - Pellicle storage container, transfer device and transfer method for pellicle storage container - Google Patents

Description

Description: BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a frame case for housing a frame with a pellicle, which is optimal for carrying, using a carrying arm used for automatic carrying. . 2. Description of the Related Art In recent years, in the production of semiconductor devices,
Circuit structures such as C have been increasingly miniaturized and densified, and the line width rules of the circuits have been reduced to 1 μm or less. Semiconductor manufacturing has long been regarded as a battle against dust (fine dust and the like), and the cleanliness of the manufacturing line is required. Therefore, storage and management of a photomask or a reticle used in a photolithography process are extremely troublesome. In order to prevent foreign matter from adhering to the pattern area of the photomask or reticle, an optically stable transparent polymer thin film (pellicle) is placed at a fixed distance (about 5 to 7 mm) from the surface of the mask or reticle. Has been adopted. The pellicle is uniformly stretched on one surface of a frame having a thickness of about 5 to 7 mm in a circular or rectangular shape corresponding to the shape of a mask or a reticle, and an adhesive layer is provided on the opposite surface of the frame. In order to attach the pellicle-equipped frame to the reticle, the pattern area of the reticle and the outer shape of the frame were manually adjusted, and then fixed to the reticle with an adhesive layer of the frame. [0003] A pellicle provided on a frame is placed in a dust-proof case because it dislikes dust. When the pellicle is attached to a mask such as a photomask or a reticle, the pellicle is attached in an apparatus that does not require human hands for the above-described reason. Therefore, when attaching the pellicle, it is necessary to move the dustproof case on which the pellicle is mounted to a predetermined location by using a transfer arm or the like. [0004] Therefore, a dustproof case that can be handled when transporting using the transport arm is required. An object of the present invention is to provide a dustproof case that can be handled by a transfer arm. [0005] Accordingly, the present invention has been made to solve the above-mentioned problems by the following means. The terms and numbers in parentheses in the description of “Means for Solving the Problems” indicate the terms described in the embodiment of the invention described later and the configuration of the dustproof case for the frame with a pellicle in FIG. It matches the figure number in the figure. According to the first aspect of the present invention, in a pellicle storage container (14, 15) for storing a frame (16) to which a pellicle is attached, a tray ( 14) and at least one pair of protrusions (14) on the outer wall of the pellicle storage container below the tray.
b), wherein at least one pair of projections each have a surface for engaging with the transport means (5b) for transporting the pellicle storage container, and the engaging surfaces are substantially parallel to each other. Features. In this way, the transport means (5
Since the surface for engaging with the projection (14b) for engaging with the projection b) is provided, the surface on which the projection is engaged and the conveying means are engaged so as to have a predetermined positional relationship. . Claim 2
According to the present invention, the outer shape of the tray portion (14) is formed in a rectangular shape, and the engaging surface is parallel to one side of the outer shape of the tray portion. In this way, the protrusion (1) provided in parallel with one side of the tray (14) is provided.
Since the surfaces of the transfer means (5b) and the transfer means (5b) in (4b) are parallel to each other, the transfer means and the pellicle storage container are engaged in a predetermined positional relationship. According to the third aspect of the present invention, the frame (16) to which the pellicle is attached is housed and the transport means (5) is accommodated.
b) a transport device for transporting a pellicle storage container (14, 15) provided with a projection (14b) for engaging with the projection, wherein the transport means includes a surface that engages with a predetermined surface of the projection. It is characterized by having. In this way, the projections (1
Since the transport device is configured to engage with the transport means (5b) for transporting the pellicle storage container provided with 4b), the pellicle storage container can be transported stably. According to the present invention of claim 4, the conveying means (5b)
Are arm portions facing each other (arm fingers 24) and arm driving portions (18, 2) for opening and closing the facing arm portions.
3) that the predetermined surface of the arm and the predetermined surface of the projection provided on the pellicle storage container are engaged by opening and closing the arm (in the direction of arrow B). Features. As described above, the pellicle housing container is held by the arm portion by performing the opening / closing operation of changing the distance between the arm portions (24) opposed to each other with the transfer projection (14b) provided on the pellicle housing container. The storage container can be stably and reliably transported.
According to the fifth aspect of the present invention, the arm portion (24) includes a surface (20 side) that engages with the predetermined surface of the projection, and a surface (21 side) that engages with the frame. Features. In this way, the transport of the pellicle storage containers (14, 15) and the transport of the frame (16) can be shared, and the arm can also be used, so that the entire apparatus can be made compact. According to the sixth aspect of the present invention, the frame (16) to which the pellicle is attached is housed and the transport means (5) is accommodated.
A transport method for transporting a pellicle storage container (14, 15) provided with a protrusion (14b) for engaging with the b), wherein a predetermined surface of the protrusion provided on the pellicle storage container and a transfer means of the transfer means are provided. The pellicle storage container is gripped by engaging with a predetermined surface. As described above, the pellicle storage container provided with the transfer protrusion (14b) is engaged with the transfer means (5b) for transferring the pellicle storage container, and is transferred.
It is possible to stably transport the pellicle storage container. According to the present invention of claim 7, the transporting means (5b) comprises:
The structure includes two arms (24), and in the operation of gripping the pellicle storage containers (14, 15), a predetermined surface of the arms and the pellicle storage container are changed by changing the interval between the two arms. And a predetermined surface of the projection (14b) provided on the front surface is engaged. In this manner, the pellicle storage container provided with the transfer projections (14b) is transported by engaging with the transport means (5b) for transporting the pellicle storage container, so that the pellicle storage container can be transported stably. Becomes FIG. 1 is a diagram showing a schematic internal configuration of an automatic pellicle sticking apparatus according to an embodiment of the present invention as viewed from above. In the apparatus according to the embodiment of the present invention, a pellicle attaching device main body 1 and an inspection device main body 2 for inspecting foreign matter attached to a reticle or a reticle with a pellicle are integrally provided. The insides of both the apparatus main bodies 1 and 2 are substantially sealed and air-conditioned so that an appropriate cleanness is maintained. On the front side of the apparatus main body 1, a case stock unit 3 for setting a plurality of frame cases accommodating one frame with a pellicle in a sealed state, and one reticle in a sealed state. And a substrate stock unit 4 for setting a plurality of known reticle cases. As the configurations of the substrate stock section 4 and the reticle case, for example, those disclosed in Japanese Patent Application Laid-Open No. 57-64928 can be employed as they are. On the other hand, the frame case set in the case stock unit 3 has a structure as shown in FIG. 2, and includes a tray unit 14 on which a frame 16 with a pellicle is placed, and a tray unit 1
4 from above. FIG. 2 (A)
Is a top view of the inside of the tray section 14, and ribs 14a are provided corresponding to each of the four sides so that the frame 16 with a pellicle does not displace inside the case. The ribs 14a are provided with a predetermined positional accuracy with respect to the outer shape of the case (tray portion), and facilitate alignment with a transfer arm or the like when removing the frame 16 with a pellicle. FIG. 2B shows a cross section when the lid portion 15 is closed on the tray portion 14, and the rib 14 a is set to be lower than the height (thickness) of the frame 16 with a pellicle. Further, on the lower surface of the tray section 14, FIG.
As shown in (C), two parallel ribs 14b are provided. In the embodiment of the present invention, the interval between the two ribs 14b is determined to be larger than the outer width of the frame 16 with a pellicle. The rib 14b is provided for handling when the frame case is automatically conveyed into the bonding apparatus main body 1. In addition, FIG.
As shown in (B), a predetermined space is provided on the left and right sides of the frame 16 in the case, but this is a fake when an arm or the like for transporting the frame 16 enters. FIG. 3 shows an example of a specific structure of the frame 16 with a pellicle suitable for automatic conveyance.
3A is a front view, and FIG. 3B is a side view. The frame 16 with a pellicle is composed of a substantially rectangular frame portion 16a, and corner members (four places) on two sides parallel to each other of the frame portion 16a are provided with:
As shown in FIG. 3A, a conical concave portion 16b is provided. The recesses 16b at the four corners are provided for positioning when sandwiched by a transfer arm or the like, and for imparting slip prevention functions. In addition, frame 16 with pellicle
As shown in FIG. 3 (B), an adhesive adhesive layer 30 is formed on the surface to be attached to the reticle, and in order to further protect the adhesive layer 30, a protective sheet material having the same shape as the outer shape of the frame portion 16a is formed. 17 are adhered. This protective sheet material 17
Immediately before attaching the frame 16 to the reticle, FIG.
As shown in (1), the part 17a of the sheet material 17 protruding beyond the outer shape of a part of the frame 16a is grasped and peeled. Now, such a frame 16 with a pellicle will be described.
Are set in the case stock unit 3 in FIG. 1 so as to be stacked in a substantially horizontal state, as shown in FIG. FIG. 4 is a view of the case stock unit 3 as viewed from the front side of the apparatus main body 1. The stock unit 3 is provided with steps 3a for holding both sides of the lower surface of the tray unit 14 of the frame cases (14, 15). Each step is supported by each step 3a so that a predetermined space is formed between the frame cases so as to enter the transfer arm. In FIG. 1, the frame cases (14, 15) are taken out of the case stock unit 3 by the transfer arm 5b which moves in the y direction along the slider 5a, and are carried to the assembly table 9. The assembly table 9 has a two-stage structure of an upper table and a lower table, and is provided so as to be able to linearly move in the y direction from a position A to A 'in FIG. The frame cases (14, 15) carried by the transfer arm 5b are mounted on the lower table of the assembly table 9 at the position A. When the assembly table 9 moves to the position A ', the frame case (14,
15) is located below the suction pad of the lid opening / closing means 10.
The lid opening / closing means 10 vacuum-adsorbs the lid 15 of the frame case (14, 15) with a suction pad, and lifts the lid 15 upward. This will open the frame case. In the middle of the transport path between the position A of the transport arm 5b and the case stock unit 3, a mechanism 12 for holding the protruding portion 17a of the protective sheet material 17 of the pellicle frame 16 is provided. On the other hand, a case containing a reticle is mounted on the substrate stock unit 4, and the reticle in the case is taken out by the transfer arm 6b moving in the y-direction along the slider 6a, and the reticle is horizontally moved toward the back of the apparatus. Carried. The transfer arm 7b moves in the x-direction along the slider 7a, and is configured to be able to reciprocate between the transfer position of the reticle with the transfer arm 6b and the position A. Therefore, the transfer arm 7b is
From the reticle, and can be transported to the upper table of the assembly table 9. When the assembly table 9 is at the position A, the pellicle-attached frame 16 is attached to the reticle, and then the assembly table 9 moves from the position A 'to the position A''.
Go to Above (or below) the reticle to which the pellicle frame 16 is attached at the position A ″, a pressure mechanism 11 for evenly pressing the pellicle frame 16 and the reticle is provided. The pressing member of the pressing mechanism 11 is provided so as to contact only the upper end surface (or lower end surface) of the frame portion 16a of the frame 16 with a pellicle. As described above, the three transfer arms 5 in FIG.
b, 6b, and 7b are all provided so as to be movable in the vertical direction (Z direction). The transfer arms 6b and 7b may be simple U-shaped arms for holding the periphery of the reticle.
The transfer arm 5b has a special structure for both transferring the frame 16 with a pellicle and transferring the frame cases (14, 15). Therefore, the detailed structure of the transfer arm 5b and the detailed structure of other main parts will be sequentially described below. FIG. 5 is a plan view showing the structure of the transfer arm 5b. The entire arm portion is provided on an arm support 50a which moves in the y direction along the slider 5a. The entire arm portion is configured to be rotatable around a central axis L extending in the y-direction by 180 degrees or more as shown by an arrow C by the DC motor 22 fixed to the arm support 50a and the belt drive. . The two L-shaped arm fingers 24 are provided so as to face each other, and can move straight along the slide guide 19 in the direction of arrow B (x direction) in the figure while maintaining symmetry with respect to the central axis 2. is there. Two parallel arm fingers 2
The opening and closing movement of 4 is performed by the DC motor 23 and the cam mechanism 18. The other side to the central axis 2 of the two arms finger 24, conical protrusions 21 which engages the recess 16b of the pellicle with a frame 16, are formed to correspond to the Dear location of the recess 16b. Further, members 20 protruding so as to be able to engage with the ribs 14b on the lower surface of the frame cases (14, 15) are provided at two places outside the both arm fingers 24, respectively. By this member 20, handling of the frame case is ensured. Thus, the transfer arm 5b
Is the transport of the frame case (14, 15) and the frame 1
6 and the arm finger 24
Is rotated 180 degrees or more, the adhesive layer 30 of the sandwiched pellicle frame 16 can be oriented downward or upward in any direction, and can be applied to either one-sided or double-sided attachment of the pellicle frame 16. . The entire transfer arm 5b shown in FIG. 5 including the arm support 50a moves up and down. FIG. 6 is a perspective view showing the overall shape of the assembly table 9, and the upper table 9 on which the reticle is mounted.
a, a lower table 9b on which the frame cases (14, 15) are mounted, and a bottom 9c for mounting the whole on a rail for movement are arranged vertically with a predetermined space. However, the center portions of the upper table 9a and the lower table 9b are cut off as indicated by imaginary lines, and a space is secured so that the transfer arm 5b (arm finger 24) can freely move up and down. FIG. 7 is a view of the vicinity of the mechanism 12 as viewed from the front side of the apparatus. The arm fingers 24 of the transfer arm 5b hold the frame 16 with a pellicle horizontally. At this time, arm finger 2
The lower surface of 4 is defined so as to be located higher than the lower surface of the frame 16 (sheet material 17). Transfer arm 5b
Comes to a predetermined position in the y direction, the toggle rotating portion 12a of the gripping mechanism 12 stands upright, and the gripping portion 12b provided at the tip of the rotating portion 12a sandwiches the protrusion 17a of the protective sheet material 17 up and down. Thereafter, the DC motor 2 shown in FIG.
2 is driven, the entire arm finger 24 rotates as shown by the arrow B in FIG. 7, and the protective sheet material 17 is peeled off from the adhesive layer 30. The peeled sheet material 17 is dropped into a waste box (not shown). FIG. 8 is a perspective view showing an example of the structure of the pressing mechanism 11, in which two pressing plates 11 are arranged vertically.
a, 11b are movable in a direction approaching and moving away from each other, and the pressing butt portion 11c abuts the frame 16 of the reticle with pellicle from above and below, and the frame 16 temporarily attached to the upper and lower surfaces of the reticle is pressed at a predetermined pressure Adhere with.
The two pressure plates 11a and 11b are arranged so that the reticle with a pellicle mounted on the upper table 9a is carried into the space between them. The assembly table 9 is moved to a position A ″ in FIG.
, The upper pressure plate 11a may be kept fixed. In FIG. 1, a foreign matter inspection device main body 2 for optically inspecting a defect such as a foreign material attached to a glass surface or a pattern surface of a reticle is connected to the left side of the attaching device main body 1. The reticle carried out in the y-direction by the transfer arm 6b from the substrate stock unit 4 or the attachment of the frame 16 is completed and the transfer arm 7b
The reticle with a pellicle carried in the x direction is transferred to the arm 8b of the apparatus main body 2. The arm 8b moves horizontally in the x direction along the slider 8a, and performs the sub-scanning at the time of inspection. The main scanning is performed by scanning the spot of the laser beam on the reticle surface in the y direction. In the embodiment of the present invention, delivery of the tickle is possible between the arm 8b and the transfer arm 6b, but not between the arm 8b and the transfer arm 7b. Therefore, the reticle with a pellicle carried by the transfer arm 7b is once transferred to the transfer arm 6b, and then operated so as to be transferred to the arm 7b. Further, the arm 8b does not move up and down because it performs both the operation of loading the reticle into the apparatus main body 2 and the sub-scanning at the time of inspection. Next, the overall operation of the present apparatus will be described. First, as shown in FIG. 2, the manufacturer of the frame 16 with a pellicle attaches the frame 16 to the frame case (1).
4, 15). The operator puts the frame cases (14, 15) in that state into the main body 1 of the apparatus.
As shown in FIG. 4. The reticle to which the pellicle is to be attached is mounted on the substrate stock unit 4 while being housed in a known reticle case. Next, the transfer arm 5b (FIG. 5) adjusts the two arm fingers 24 to a predetermined interval, and
Into the space below the frame cases (14, 15). When the transfer arm 5b is moved slightly upward, the frame case (14, 15) is transferred from the step 3a of the stock portion 3 onto the projecting member 20 of the arm finger 24. Further, the two arm fingers 24 are slightly opened, and the projecting member 20 grasps the rib 14b on the lower surface of the tray portion 14 of the frame case (14, 15) from the inside. Next, the transfer arm 5b is connected to the frame case (1).
4 and 15) are pulled out of the stock unit 3, and the frame case is delivered to the lower table 9b of the assembly table 9 (FIG. 6) waiting at the position A. The lower table 9b vacuum-adsorbs the lower surface of the frame case and fixes it so as not to shift. Thereafter, the assembly table 9 moves to the position A ′, and the suction pad of the opening / closing mechanism 10 enters the space above the frame case below the upper table 9 a of the assembly table 9. The suction pad sucks the upper surface of the lid 15 of the frame case by vacuum and lifts it slightly upward. As a result, the lid 15 and the tray 14 are separated, and the assembly table 9 returns from the position A ′ to the position A while leaving the lid 15 on the suction pad. Next, the arm finger 24 of the transfer arm 5b is again turned on.
At the position A, the frame 16 with a pellicle on the tray section 14 is pinched as shown in FIG. 7, slightly lifted from the tray section 14, and then horizontally moved to the gripping mechanism 12. Then, as shown in FIG. 7, the protruding portion 17a of the sheet material 17 is grasped by the grasping portion 12b, and the arm finger 24 is rotated by the DC motor 22. As a result, the protective sheet material 17 is peeled off, and the arm finger 24 is returned to the horizontal position. On the other hand, the reticle is taken out of the reticle case set in the substrate stock section 4 by the transfer arm 6b. The reticle vacuum-adsorbed on the arm 6b is transferred to the transfer arm 8b of the inspection apparatus main body 2, and
The absence of foreign matter, the position of the foreign matter, the size of the foreign matter, and the like are inspected, and the inspection result is stored. At this time, if a foreign substance that interferes with the exposure is found, the reticle is returned to the empty reticle case of the substrate stock unit 4 and the operator is informed that maintenance such as cleaning is necessary, and the reticle is returned from another reticle case. Remove another reticle. If there is no problem as a result of the inspection, the reticle is transferred from the transfer arm 8b by the arm 6b and then transferred to the transfer arm 7b. The arm 7b carries the ladder to the position A and delivers it to the upper table 9a of the assembly table 9. The upper table 9a fixes the ladder by vacuum suction, and the arm 5b holding the frame 16 moves to a space above the assembly table 9. Thereafter, the transfer arm 5b is lowered by a predetermined amount to bring the adhesive layer 30 of the frame 16 with a pellicle into contact with the upper surface of the reticle. At this time, the upper table 9a holds the reticle via an elastic body (such as a slope spring) so as not to apply unnecessary stress to the reticle. Therefore, after the arm 5b descends and the frame 16 comes into contact with the reticle, the reticle is slightly escaped downward.
Next, the assembly table 9 moves from the position A to the position A ′,
Lid 15 held on suction pad of opening / closing mechanism 10
On the empty tray section 14. Then, the assembly table 9 is returned to the position A again, and the transport arm 5b enters the space below the empty frame cases (14, 15), receives the empty frame case, and returns it to the case stock unit 3. Next, the transfer arm 5b connects the frame 16 with a pellicle for the lower surface of the reticle to another frame case (14, 14).
Remove from 15). This sequence is based on the previous lid 15
And the sheet material 17 is peeled off,
The difference is that during this sequence, a reticle having a pellicle frame 16 attached to the upper surface is placed on the upper table 9a. When the second frame 16 is held by the transfer arm 5b in this manner, the arm finger 24
Is rotated by a motor 22, and the adhesive layer 3 of the frame 16 is
0 is inverted so that it faces upward. Thereafter, the frame 16 enters the space below the upper table 9a at the position A, and the transfer arm 5b is slightly moved upward.
And the adhesive layer 30 is brought into contact with the lower surface of the reticle.
This means that the pellicle-attached frame 16 has been attached to both the upper and lower surfaces of the reticle. Normally, the upper and lower frames are stuck so as to overlap one another with the same dimensions, and the outer shape of the frame is determined to be smaller than the outer periphery of the reticle. Next, the assembling table 9 moves from the position A to the position A '' from the position A ', and the pressing mechanism 11 (FIG. 8) raises and lowers the upper and lower pellicle-equipped frames 16 at a predetermined pressure. Sandwich it. When the pressing is completed, the assembly table 9 returns to the position A from the position A '. At this time, at the position A ′, the suction pad is lowered so that the lid 15 held by the suction pad of the opening / closing mechanism 10 is overlapped on the tray section 14 placed on the lower table 9b. Therefore, the reticle on which both sides of the frame with the pellicle have been attached is placed on the upper table 9a of the assembly table 2 returning to the position A, and the empty frame cases (14, 15) are placed on the lower table 9b. ing.
In this manner, the lower empty frame cases (14, 15) are returned to the case stock unit 3 by the transfer arm 5b, and the upper reticle-attached reticle is removed by the transfer arm 7b and the transfer arm 6.
b, and is transferred to the transfer arm 8b, where the foreign substance is inspected. In this case, the foreign substance inspection is performed through the pellicles on the upper and lower surfaces, so that the detection sensitivity (particularly, the size of the foreign substance) should be corrected in the case of the inspection of the naked reticle. Further, if necessary, it is determined whether or not the frame with the pellicle has been appropriately attached by checking the previously stored inspection result of the naked reticle. The reticle with pellicle which has been inspected in this way is returned to the empty reticle case by the transfer arm 6b, and the quality of the pasting is displayed to the operator. As described above, the embodiment of the present invention has been described with respect to the double-sided sticking of the pellicle. In the embodiment of the present invention, the transfer arm 5b
It is also used for transporting the frame cases (14, 15), transporting the frame 16 with a pellicle, bonding the frame 16 to the reticle, and peeling off the protective sheet material 17, so that the entire apparatus becomes very compact. There are advantages. As described above, according to the present invention, it is possible to reliably handle the storage case storing the frame with the pellicle (dustproof film). Therefore, when attaching the pellicle, it is possible to handle the storage case at a predetermined position of the automatic pellicle attaching apparatus which is maintained at an appropriate cleanness without manual operation.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram schematically showing an overall configuration of an automatic pellicle attaching apparatus according to an embodiment of the present invention. FIG. 2 is a diagram showing a configuration of a dustproof case for a frame with a pellicle. Figure [Figure 3]: Diagram showing the structure of the frame with pellicle suitable for automatic transport [Figure 4]: Front view showing the structure of the stock part of the frame case [Figure 5]: Transfer arm of the frame case and frame with pellicle FIG. 6 is a perspective view schematically showing the structure of an assembly table. FIG. 7 is a view schematically showing a mechanism for peeling a protective sheet material of a frame with a pellicle. FIG. It is a perspective view which shows a schematic structure. [Description of Signs of Main Parts] 1 ... Veryicle sticking device main body, 2 ... Contamination inspection device main body, 3
... Stock part of frame case, 4 ... Stock part of reticle case, 5b, 6b, 7b, 8b ... Transfer arm, 9
... Assembly table, 10 ... Open / close mechanism, 11 ... Pressure mechanism, 1
Reference numeral 2: gripping mechanism, 14: tray portion of frame, 15: lid portion, 16: frame with pellicle, 24: transfer arm 5b
Arm finger.

Claims (1)

(57) [Claims] In a pellicle storage container for storing a frame to which a pellicle is attached, a tray unit for placing a frame to which the pellicle is attached
When, less the outer wall of the pellicle container of the tray lower side
At least a pair of projections, and the at least one pair of projections each has a surface that engages with a transport unit for transporting the pellicle storage container, and the engagement surface is A pellicle storage container, which is substantially parallel to each other . 2. The pellicle container according to claim 1, wherein the outer shape of the tray portion is formed in a substantially rectangular shape, and the engaging surface is parallel to one side of the outer shape of the tray portion. 3. A transport device that accommodates a frame to which a pellicle is attached and transports a pellicle storage container provided with a projection for engaging with a transport unit, wherein the transport unit includes a predetermined surface of the projection. A transport device for a pellicle storage container having an engaging surface. 4. The transfer means includes an arm portion facing each other, and an arm driving portion that opens and closes the opposing arm portion. The opening / closing operation of the arm portion causes a predetermined surface of the arm portion and the pellicle housing 4. The method according to claim 3, wherein a predetermined surface of the projection provided on the container is engaged.
A transport device for the pellicle storage container according to the above. 5. The transport device according to claim 4, wherein the arm portion includes a surface that engages with a predetermined surface of the protrusion, and a surface that engages with the frame. 6. A transport method for transporting a pellicle storage container that stores a frame to which a pellicle is attached and has a projection for engaging a transport unit, wherein a surface of the projection provided on the pellicle storage container is provided. And a surface of the transfer means is engaged with the pellicle container to grip the pellicle storage container. 7. The transfer means has a configuration including two arms, and in the operation of gripping the pellicle storage container, a predetermined surface of the arm is changed by changing the interval between the two arms. The transporting method according to claim 6, wherein a predetermined surface of the projection provided on the storage container is engaged.