JP2006237339A - Manufacturing method of nitride-based semiconductor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a nitride-based semiconductor element which facilitates device separation by forming an separation trench in a nitride-based semiconductor layer, by a method where no damage is introduced into a crystal owing to collision of plasma and active ions or the like and no much time is required. <P>SOLUTION: The manufacturing method of a nitride-based semiconductor element comprises a region preparation process of preparing a first region 20a and a second region 20b where crystal growth is more difficult to occur than the first region 20a on a principal surface, by applying predetermined processing to the principal surface of a main substrate 20; a crystal growth process of forming a nitride-based semiconductor layer 1 on the principal surface through crystal growth; and a separation process of separating the main substrate 20 at the second region 20b perpendicularly to the principal surface for every first region 20a. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a nitride semiconductor device.

  In recent years, in the semiconductor industry, the development of nitride-based semiconductor elements such as nitride-based light-emitting diode elements including a nitride-based semiconductor layer has been actively conducted. Nitride-based semiconductor devices are strongly demanded to improve the light output and increase the current for future lighting alternative applications.

  On the other hand, in the semiconductor industry, it is always desired to increase the number of effective elements, which is the number of elements manufactured from a single wafer, with the increase in functionality, performance, and miniaturization of electronic equipment and cost reduction.

  In order to increase the number of effective elements, it is necessary to refine the separation grooves that separate the elements from the wafer. Therefore, various elementization techniques for producing the separation groove have been proposed (see, for example, Patent Document 1).

In this Patent Document 1, a recess that reaches the main substrate as a separation groove is formed in a nitride-based semiconductor layer grown on a growth substrate (main substrate), and then a conductive substrate is bonded. A method of performing the separation is shown. This method facilitates element isolation by creating an isolation groove in advance and then attaching it to a conductive substrate.
JP 2001-244503 A (page 4, FIG. 3)

  As described above, the method of forming the recess as the isolation groove in the nitride-based semiconductor layer facilitates element isolation.

  However, in the method for manufacturing a nitride-based semiconductor element described above, it is necessary to form an isolation groove using an etching technique after crystal growth.

  Etching of the nitride semiconductor layer is extremely difficult due to the high chemical stability and high hardness of the nitride semiconductor layer. For example, when a nitride-based semiconductor layer is etched by plasma etching or reactive ion etching (RIE), which is generally used, the etching process is extremely slow and requires a lot of time because of its high hardness. And Further, the etching process has a problem of giving damage to the crystal due to collision of plasma or active ions due to the etching process for a long time.

 Therefore, the present invention has been made in view of the above problems, and by forming isolation grooves in the nitride-based semiconductor layer in a method that does not damage the crystal and does not require much time, It is an object of the present invention to provide a method for manufacturing a nitride-based semiconductor device that facilitates device isolation.

In order to solve the above problems, a feature of the method for manufacturing a nitride-based semiconductor device according to the present invention is that the main surface of the main substrate is subjected to a predetermined treatment, whereby the first region is formed on the main surface, and A region manufacturing step of manufacturing a second region in which crystal growth is less likely to occur than in the first region;
A crystal growth step of forming a nitride-based semiconductor layer on the main surface by crystal growth;
And a separation step of separating the main substrate for each of the first regions in a direction perpendicular to the main surface in the second region.

  According to this feature, it is difficult to form a nitride-based semiconductor layer in the second region by forming the second region in which crystal growth hardly occurs. Thus, since the above-described manufacturing method uses the second region as the separation groove, the separation groove can be formed simultaneously with the formation of the nitride-based semiconductor layer by crystal growth.

  In other words, nitriding facilitates device isolation by forming isolation trenches in the nitride-based semiconductor layer by a method that does not damage crystals due to collisions with plasma or active ions and does not require much time. A physical semiconductor device can be manufactured.

  In addition, since it is not necessary to process the nitride-based semiconductor layer, cracking and chipping of the element can be reduced and yield can be improved.

In addition, a feature of the method for manufacturing a nitride-based semiconductor element according to the feature of the present invention is that the main surface of the main substrate is subjected to a predetermined treatment, whereby the first region and the first region are formed on the main surface. A region forming step of forming a second region in which crystal growth is less likely to occur, a crystal growing step of forming a nitride-based semiconductor layer on the main surface by crystal growth, the nitride-based semiconductor layer, and the main surface A bonding step of attaching a support substrate on the other main surface side to the surface to which the main substrate is bonded, a peeling step of peeling the main substrate from the nitride-based semiconductor layer, and the second region, And a separation step of separating the main substrate for each of the first regions in a direction perpendicular to the main surface.

  According to this feature, it is difficult to form a nitride-based semiconductor layer in the second region by producing the second region in which crystal growth is unlikely to occur. Thus, since the above-described manufacturing method uses the second region as the separation groove, the separation groove can be formed simultaneously with the formation of the nitride-based semiconductor layer by crystal growth.

  In other words, nitride that facilitates device isolation by forming isolation grooves in the nitride-based semiconductor layer by a method that does not damage the crystal by collision with plasma or active ions and does not require much time. A semiconductor device can be produced.

  In addition, since it is not necessary to process the nitride-based semiconductor layer, cracking and chipping of the element can be reduced and yield can be improved.

Further, by separating the main substrate from the nitride-based semiconductor layer, the nitride-based semiconductor layer can be separated if only the support substrate is cut in the separation step. Thereby, in the separation step, cracks and chips of the nitride-based semiconductor layer can be reduced, and the yield can be improved.

Further, the nitride semiconductor device manufacturing method according to the feature of the present invention may be characterized in that the predetermined process is a process of irradiating the main surface with a laser beam.

  According to such a feature, the second region dissolved locally by the laser beam becomes a region having a different lattice constant, thermal expansion coefficient, and the like by being doped with impurities. Thereby, the second region becomes a region where crystal growth hardly occurs.

  Further, the nitride semiconductor device fabrication method according to the feature of the present invention may be characterized in that the predetermined process is a process of implanting ions into the main surface.

  According to this feature, for example, the second region doped with impurities by ion implantation of Si, B, P, As, or the like becomes a region having a different lattice constant, thermal expansion coefficient, or the like by the subsequent heat treatment. Thereby, the second region becomes a region where crystal growth hardly occurs.

  Further, the nitride semiconductor device manufacturing method according to the feature of the present invention may be characterized in that the predetermined process is a process of forming a growth inhibition layer on the main surface.

  According to such a feature, the second region in which the growth prevention layer is formed on the main surface is a region where crystal growth hardly occurs.

 Further, the nitride semiconductor device manufacturing method according to the feature of the present invention is characterized in that the predetermined process includes a process of alternately manufacturing the first region and the second region on the main surface. Good.

  According to such a feature, it is possible to facilitate the processing of the nitride-based semiconductor element after the element isolation (separation process) by alternately producing the first region and the second region.

  Thereby, the yield can be improved by reducing the cracks and chips of the nitride-based semiconductor element.

  Further, according to a feature of the method for manufacturing a nitride semiconductor device according to the feature of the present invention, the growth prevention layer may be made of a dielectric or a metal.

  According to this feature, by using a dielectric or metal for the growth prevention layer, a material different from the composition of the nitride-based semiconductor layer formed in the first region can be obtained. In other words, the lattice constant and the thermal expansion coefficient of the growth prevention layer and the lattice constant and the thermal expansion coefficient of the nitride-based semiconductor layer are greatly different. It becomes difficult to form a layer.

  In addition, according to a feature of the method for manufacturing a nitride semiconductor device according to the feature of the present invention, the dielectric and the metal may be formed of a multilayer film.

  According to such a feature, by forming the dielectric and the metal in the multilayer film, it is possible to obtain a material having different thermal expansion coefficients step by step from the main substrate to each layer. Thereby, it is possible to make the material in which the nitride-based semiconductor layer is difficult to be formed step by step.

  That is, the surface of the growth prevention layer is made of a material that is more difficult to form a nitride-based semiconductor layer, so that it is possible to easily form a separation groove simultaneously with the formation of the nitride-based semiconductor layer by crystal growth.

  In addition, the nitride semiconductor device manufacturing method according to the feature of the present invention is characterized in that, in the crystal growth step, the nitride semiconductor layer may be formed on the main surface on which the release layer is formed.

  According to such a feature, the release layer can reduce the breakage or chipping of the nitride-based semiconductor layer during peeling by facilitating the release of the main substrate and the nitride-based semiconductor layer.

  Further, the release layer can facilitate reuse of the main substrate by facilitating release from the main substrate.

  Further, according to a feature of the method for manufacturing a nitride semiconductor device according to the feature of the present invention, the release layer may be made of a metal thin film.

  In the metal thin film, the temperature of the metal thin film is likely to rapidly increase due to heat treatment or laser light irradiation. Thereby, the peeling of the main substrate and the nitride-based semiconductor layer can be facilitated by the deformation of the peeling layer.

  Further, the peeling layer can be removed by selectively etching the metal thin film by etching or the like. Thereby, peeling between the main substrate and the nitride-based semiconductor layer can be facilitated.

In addition, according to a feature of the method for manufacturing a nitride semiconductor device according to the feature of the present invention, the release layer may be an amorphous layer.

  According to this feature, the amorphous amorphous layer has poor crystallinity and does not bond to the nitride semiconductor layer, and therefore can be easily separated from the nitride semiconductor layer.

  In addition, since the amorphous layer easily absorbs laser light, the temperature rapidly increases due to laser light irradiation. The amorphous layer can be easily peeled off from the main substrate and the nitride-based semiconductor layer by being deformed by a rapid temperature change.

  In addition, the release layer can be removed by selectively etching the amorphous layer by etching or the like. Thereby, peeling between the main substrate and the nitride-based semiconductor layer can be facilitated.

  Further, as a feature of the method for manufacturing a nitride-based semiconductor element according to the feature of the present invention, the release layer may include a void.

  According to such a feature, the release layer can generate a crack with the gap as a base point by applying a force in the main surface direction. Thereby, peeling between the main substrate and the nitride-based semiconductor layer can be further facilitated.

  In addition, a nitride-based semiconductor element manufacturing method according to the present invention is characterized in that the nitride-based semiconductor layer includes at least one of gallium nitride, aluminum nitride, indium nitride, boron nitride, or thallium nitride, or a combination thereof. A mixed crystal may be included.

  According to such a feature, such a group III-V nitride-based semiconductor layer can further improve the yield of nitride-based semiconductor device fabrication by facilitating selective growth.

 According to the present invention, element isolation is facilitated by forming an isolation groove in a nitride-based semiconductor layer by a method that does not damage the crystal due to collision of plasma or active ions and does not require much time. A method for manufacturing a nitride-based semiconductor device can be provided.

  Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic and ratios of dimensions and the like are different from actual ones.

  Accordingly, specific dimensions and the like should be determined in consideration of the following description. Moreover, it is a matter of course that portions having different dimensional relationships and ratios are included between the drawings.

(First embodiment)
A method for manufacturing the nitride-based light-emitting diode element according to the first embodiment of the present invention will be described below. 1 and 2 are cross-sectional views showing a method for manufacturing the nitride-based light-emitting diode element of the first embodiment.

  In the first step shown in FIG. 1A, a second region 20b in which crystal growth hardly occurs in the main substrate 20 which is a growth substrate is formed by laser processing or ion implantation. As a result, the first region 20a and the second region 20b in which crystal growth hardly occurs are formed on the surface of the main substrate 20.

  For example, a GaN substrate or the like is used for the main substrate 20.

  When the second region 20b is formed by laser processing, specifically, a region where it is desired to make crystal growth difficult is irradiated with laser light. For example, the main substrate 20 is irradiated with a laser beam having a wavelength that is substantially the same as or higher than the band gap energy of the main substrate 20. At this time, the main substrate 20 is locally dissolved by doping the impurity element by adjusting the irradiation position, intensity, irradiation time, use frequency, and the like.

Further, the second region 20b may be formed by ion implantation. Specifically, ion implantation is performed using Si, B, P, As, or the like as an impurity element. For example, ion implantation is performed with an implantation energy of 200 KeV and an ion implantation amount of 5 × 10 ¹⁸ / cm ² , and after the implantation, heat treatment is performed at 1000 ° C. to 1200 ° C. in a nitrogen atmosphere.

  The first regions 20a and the second regions 20b may be produced alternately. Specifically, as shown in FIG. 3A, the first region 20a and the second region 20b are formed in a stripe shape. Alternatively, as shown in FIG. 3B, the first region 20a and the second region 20b are preferably formed in a stripe shape perpendicular to each other.

  In the second step shown in FIG. 1B, the nitride-based semiconductor layer 1 is formed by crystal growth, for example, by metal organic chemical vapor deposition (MOCVD). The nitride-based semiconductor layer 1 has an element structure, for example, an n-contact layer, an n-cladding layer, an active layer, a cap layer, a p-cladding layer, and a p-contact from the side close to the main substrate 20 like an LED structure. Having a layer. Thereafter, the p-clad layer and the p-contact layer are made p-type by performing heat treatment or electron beam irradiation.

  In the third step shown in FIG. 1C, a p-type electrode 2 including an ohmic electrode is formed on the nitride-based semiconductor layer 1 using a vacuum deposition method or the like.

  The p-type electrode 2 may be a transparent ohmic electrode and an electrode that reflects light. Further, the electrode may be formed on the entire upper surface or only a part of the nitride-based semiconductor layer 1. In addition, when forming an electrode only in part, it is more desirable to form the film | membrane which reflects light. Further, a pad electrode may be provided in order to increase the adhesive force with the conductive substrate. When solder is used for bonding, a barrier metal such as Pt or Pd may be formed to protect the ohmic electrode.

  In the fourth step shown in FIG. 1 (d), the support substrate 10 is bonded on the p-type electrode 2. For example, the support substrate 10 is a substrate made of copper and copper oxide. The support substrate 10 does not necessarily need to be made of copper and a copper oxide, and is conductive in order to ensure the vertical conductivity of the nitride-based semiconductor element even when the main substrate 20 is not conductive. It is more preferable. In addition, the support substrate 10 is preferably made of a material having high thermal conductivity in order to ensure the light efficiency of the nitride-based semiconductor layer 1. Furthermore, the support substrate 10 is preferably made of a material having a thermal expansion coefficient close to that of the nitride-based semiconductor layer 1 in order to prevent warping and the like after bonding to the nitride-based semiconductor layer 1. The support substrate 10 is preferably made of a material having a low Young's modulus.

  As a bonding method between the p-type electrode 2 and the support substrate 10, a pressure welding method, a brazing method, an adhesion method using an epoxy resin or a UV curable resin, or the like can be used. However, the bonding method is preferably a brazing method using thermocompression bonding, direct bonding, or eutectic bonding in order to maintain the conductivity of the nitride-based semiconductor element.

  In the fifth step shown in FIG. 2A, the n-electrode 3 is formed in a predetermined region on the exposed surface of the n-type contact layer using a vacuum deposition method or the like. The n-electrode 3 is preferably disposed at a position that does not hinder light extraction from the nitride-based semiconductor element. The n electrode 3 is preferably a transparent electrode and partly has a pad electrode.

  In the sixth step shown in FIG. 2B, in the second region 20b, the elements are separated along the separation line 100 for each first region 20a in the direction perpendicular to the main substrate 20. By this element separation, the element can be separated. Specifically, the main substrate 20 is separated by dicing or cracking a part of the second region 20b.

  According to the method for manufacturing the nitride-based light-emitting diode element according to the first embodiment of the present invention described above, the nitride-based light-emitting diode element is formed in the second region 20b by forming the second region 20b in which crystal growth hardly occurs. It is difficult to form the semiconductor layer 1.

  A method for manufacturing the nitride-based light-emitting diode element according to the first embodiment of the present invention will be described.

  For example, the second region 20b locally dissolved by the laser light is a region having a different lattice constant, thermal expansion coefficient, and the like due to doping with impurities.

  For example, the second region 20b doped with impurities by ion implantation of Si, B, P, As, or the like becomes a region having a different lattice constant, thermal expansion coefficient, or the like by the subsequent heat treatment. As a result, the second region 20b becomes a region in which crystal growth hardly occurs.

  Thereby, since the above-described manufacturing method uses the second region 20b as the separation groove, the nitride-based semiconductor having the separation groove can be manufactured simultaneously with the formation of the nitride-based semiconductor layer 1 by crystal growth.

  In other words, device isolation can be facilitated by forming an isolation groove in the nitride-based semiconductor layer 1 by a method that does not introduce damage to the crystal due to collision of plasma or active ions and does not require much time. Thus, a nitride-based semiconductor device can be manufactured.

  In addition, by alternately forming the first regions 20a and the second regions 20b, the above-described manufacturing method can facilitate the processing of the nitride-based semiconductor element after the separation step.

  Thereby, the manufacturing method mentioned above can improve a yield by reducing the crack and notch | chip of a nitride-type semiconductor element.

(Second Embodiment)
A method for manufacturing the nitride-based light-emitting diode element according to the second embodiment of the present invention will be described below. The second embodiment is the same as that of the nitride-based light-emitting diode device according to the first embodiment except that sapphire, Si, or GaAs is used for the main substrate 20 and the device structure of the nitride-based semiconductor layer 1 is different. It is produced in the same manner as the first to fourth steps (FIGS. 1A to 1D). Therefore, here, the fifth and subsequent steps will be mainly described.

  Note that the nitride-based semiconductor layer 1 of the second embodiment has an element structure, for example, a buffer layer made of AlGaN or GaN, or undoped GaN from the side close to the main substrate 20 like an LED structure. It has a GaN layer, an n contact layer, an n clad layer, an active layer, a cap layer, a p clad layer, and a p contact layer.

  FIG. 4 is a cross-sectional view showing the fifth and subsequent steps in the method for manufacturing a nitride-based light emitting diode device according to the second embodiment.

  As shown in FIG. 4A, in the fifth step, the main substrate 20 is removed from the nitride-based semiconductor layer 1 by polishing or laser light irradiation. Thereafter, the buffer layer and the GaN layer included in the nitride-based semiconductor layer 1 are removed by dry etching or wet etching. When Si or GaAs is used for the main substrate 20, wet etching is particularly effective as a method for removing the main substrate 20 and the like.

  Further, the main substrate 20 and the like may be removed by a method of separating the main substrate 20 and the nitride-based semiconductor layer 1 by irradiating laser light from the main substrate 20 side.

  As shown in FIG. 4B, in the sixth step, an n electrode is formed on a predetermined region on the exposed surface of the n-type contact layer, which is the lowermost layer of the nitride-based semiconductor layer 1, using a vacuum deposition method or the like. 3 is formed. The n-electrode 3 is preferably disposed at a position that does not hinder light extraction from the nitride-based semiconductor element. The n electrode 3 is preferably a transparent electrode and partly has a pad electrode.

  As shown in FIG. 4C, in the seventh step, in the second region 20b, the elements are separated along the separation line 100 for each first region 20a in the direction perpendicular to the main substrate 20. By this element separation, the element can be separated. Specifically, the support substrate 10 is separated by dicing or cracking a part of the support substrate 10.

  According to the method for manufacturing a nitride-based light-emitting diode element according to the second embodiment of the present invention described above, the above-described manufacturing method is performed in the separation step by peeling the main substrate 20 from the nitride-based semiconductor layer 1. If only the support substrate 10 is cut, the nitride-based semiconductor layer 1 can be separated.

  Thereby, the manufacturing method mentioned above can improve a yield by reducing the crack and notch | chip of a nitride-type semiconductor element in a isolation | separation process.

(Third embodiment)
A method for fabricating the nitride-based semiconductor laser device according to the third embodiment of the present invention will be described below. 5 and 6 are cross-sectional views showing a method for fabricating the nitride-based semiconductor laser device of the third embodiment.

In the first step shown in FIG. 5A, a growth prevention layer 22 in which crystal growth hardly occurs on the main substrate 20 as a growth substrate is produced. For example, a SiC substrate or the like is used for the main substrate 20. The growth blocking layer 22 is made of a dielectric film such as SiO ₂ or SiN, or a refractory metal such as tantalum (Ta), tungsten (W), or titanium (Ti). The growth blocking layer 22 may have a multilayer structure.

  For example, the growth inhibition layer 22 formed in a lattice shape having a thickness of about 0.2 μm is formed on a SiC substrate by sputtering. At this time, the growth preventing layer 22 may be formed of another metal, and the refractory metal film may be formed only on the surface by sputtering.

  In the second step shown in FIG. 5B, the nitride-based semiconductor layer 1 is formed by crystal growth, for example, by metal organic chemical vapor deposition (MOCVD).

  The nitride-based semiconductor layer 1 has an element structure. For example, as in an LD element structure, from the side close to the main substrate 20, a buffer layer made of AlGaN or GaN, a GaN layer made of undoped GaN, an n contact layer , An n-clad layer, an n-side guide layer, an active layer, a cap layer, a p-side guide layer, a p-clad layer, and a p-contact layer. At this time, as shown in FIG. 5B, the nitride-based semiconductor layer 1 is not easily formed in the growth inhibition layer 22.

In the third step shown in FIG. 5C, the nitride-based semiconductor layer 1 is formed into a ridge structure by dry etching with CF ₄ gas or the like or wet etching with hot phosphoric acid solution or the like.

  Hereinafter, the 4th process-the 7th process (Drawing 5 (d), Drawing 6 (a)-Drawing 6 (c)) are the 3rd process-the 6th process (Drawing 1 (c), (c) of a 1st embodiment. d) Since it is carried out in the same manner as FIGS. 2 (a) and 2 (b), the description thereof is omitted here.

  According to the method for manufacturing the nitride-based semiconductor laser device according to the third embodiment of the present invention described above, the above-described manufacturing method uses the growth blocking layer 22 to cause crystal growth in the second region. It can be a difficult area.

  Further, in the above-described manufacturing method, a material having a composition different from the composition of the nitride-based semiconductor layer 1 formed in the first region 20a is formed by using a dielectric or a refractory metal for the growth prevention layer 22. It can be.

  That is, the above-described manufacturing method has a further difference between the lattice constant and the thermal expansion coefficient of the growth prevention layer 22 and the lattice constant and the thermal expansion coefficient of the nitride-based semiconductor layer 1. The nitride-based semiconductor layer 1 is hardly formed.

  For example, in the crystal growth process, when tungsten is used for the growth prevention layer 22 and the chamber is kept at a high temperature of about 1200 ° C., the tungsten does not reach the melting point and therefore does not deform.

The linear thermal expansion coefficients of tungsten and silicon carbide are greatly different. The linear thermal expansion coefficient of tungsten is 4.44 × 10 ⁻⁷ / K, and the linear thermal expansion coefficient of SiC, which is the main substrate 20, is 6.2 × 10 ⁻⁶ / K. . Crystal growth, such as the epitaxial growth method, requires that the lattice constant and the thermal expansion coefficient be the same between the main substrate and the growth layer. Therefore, the nitride-based semiconductor layer 1 is formed in the growth inhibition layer 22 in the crystal growth process. It becomes difficult to be done.

  Further, by forming the dielectric and the metal in the multilayer film, it is possible to make the materials having different thermal expansion coefficients step by step from the main substrate to each layer. As a result, the surface of the growth prevention layer becomes a material in which the nitride-based semiconductor layer 1 is more difficult to be formed, and the nitride-based semiconductor layer 1 having separation grooves can be easily formed simultaneously with the formation of the nitride-based semiconductor layer 1 by crystal growth. can do.

(Fourth embodiment)
A method for manufacturing the nitride-based light-emitting diode element according to the fourth embodiment of the present invention will be described below. 7 and 8 are cross-sectional views showing a method for fabricating the nitride-based light emitting diode device of the fourth embodiment.

  In the first step shown in FIG. 7A, a growth prevention layer 22 in which crystal growth hardly occurs on the main substrate 20 as a growth substrate is produced. In the first step of the fourth embodiment, the growth prevention layer 22 is formed in the same manner as in the first step of the third embodiment (FIG. 5A), so the description thereof is omitted here.

 In the second step shown in FIG. 7B, release layers 23 are formed on the main substrate 20 so as to be alternately arranged with the growth inhibition layers 22. Specifically, the release layer 23 can be a foil, a thin film formed by physical vapor deposition, chemical vapor deposition, or the like. For example, the peeling layer 23 is a metal thin film, an amorphous layer, or a layer having a void.

  The third to fifth steps shown in FIGS. 7C, 7 </ b> D, and 8 </ b> A are the same as those in the first embodiment except for the portion where the nitride-based semiconductor layer 1 is formed on the release layer 23. Since the second step to the fourth step (FIG. 1 (b) to FIG. 1 (d)) are performed, the description is omitted here. In this case, for example, the nitride-based semiconductor layer 1 is formed on the release layer 23 by metal organic chemical vapor deposition (MOCVD).

  In the sixth step shown in FIG. 8B, the peeling layer 23 is peeled from the nitride-based semiconductor layer 1. Specifically, as the peeling method, stress in the principal surface direction, laser light irradiation from the nitride-based semiconductor layer 1 side, temperature change due to rapid heating, selective etching, or the like is effective.

  For example, when an amorphous layer is used as the release layer 23, the amorphous layer is deformed and the nitride semiconductor layer 1 is peeled off when laser light having a wavelength that is absorbed by the amorphous layer is irradiated from the nitride semiconductor layer 1 side. Note that the release layer 23 may adhere to the nitride-based semiconductor layer 1 after peeling, and in this case, the nitride-based semiconductor layer 1 is exposed by polishing or the like.

 The seventh step and the eighth step shown in FIGS. 8C and 8D are the same as the sixth step and the seventh step (FIGS. 4B to 1C) of the second embodiment. The description is omitted here.

 According to the method for manufacturing the nitride-based light emitting diode element according to this embodiment, the growth prevention layer 22 is manufactured in the first step shown in FIG. 7A, and in the second step shown in FIG. Although the peeling layer 23 was produced, it is not necessarily in this order. For example, the release layer 23 may be formed on the entire main surface of the main substrate 20 in the first step shown in FIG. 7A, and the growth inhibition layer 22 may be provided on the upper surface of the release layer 23 in the second step.

  According to the method for manufacturing the nitride-based light-emitting diode element according to the fourth embodiment of the present invention described above, it is possible to easily separate the main substrate 20 and the nitride-based semiconductor layer 1 by forming the release layer 23. can do. Thereby, the crack and the chip | tip of the nitride type semiconductor layer 1 which arise in the case of peeling can be reduced.

  For example, by using a metal thin film for the release layer 23, a columnar structure with many voids is formed when the release layer is formed by vacuum deposition or the like. can do. Further, by using a metal thin film for the release layer 23, the temperature of the metal thin film is rapidly increased by heat treatment or laser light irradiation. Thereby, the peeling of the peeling layer 23 can facilitate peeling of the main substrate 20 and the nitride-based semiconductor layer 1.

  For example, by using an amorphous layer for the release layer 23, it becomes easier to absorb laser light due to laser light irradiation. The peeling layer 23 can be easily peeled off from the main substrate 20 and the nitride-based semiconductor layer 1 by the temperature rising rapidly due to the absorption of the laser light and by being deformed. The amorphous amorphous layer has poor crystallinity and does not bond to the nitride-based semiconductor layer 1, and therefore can be easily separated from the nitride-based semiconductor layer 1.

  Moreover, the peeling layer 23 can easily produce a crack in the principal surface direction with the void as a base point by using a layer having a void. Thereby, peeling with the main board | substrate 20 and the nitride-type semiconductor layer 1 can be made easy.

 The peeling layer 23 facilitates the peeling of the nitride-based semiconductor layer 1 from the main substrate 20, thereby enabling the reuse of the main substrate 20 that has been conventionally removed only by polishing or the like.

(Fifth embodiment)
A method for fabricating the nitride-based semiconductor laser device according to the fifth embodiment of the present invention will be described below. 9 and 10 are cross-sectional views showing a method for fabricating the nitride-based semiconductor laser device of the fifth embodiment.

  In the first step shown in FIG. 9A, a release layer 23 is formed on the main substrate 20 which is a growth substrate. In addition, the specific manufacturing method of the peeling layer 23 produces the peeling layer 23 similarly to the 2nd process (FIG.7 (b)) of 4th Embodiment.

  In the second step shown in FIG. 9B, a growth prevention layer 22 is formed on the upper surface of the release layer 23 where crystal growth hardly occurs. A specific method for producing the growth inhibition layer 22 is the same as in the first step (FIG. 7A) of the fourth embodiment.

  In the third step shown in FIG. 9C, the nitride-based semiconductor layer 1 is formed as in the third step of the third embodiment, and the nitride-based semiconductor layer 1 is formed into a ridge structure by etching. The nitride-based semiconductor layer 1 has an element structure. For example, as in an LD element structure, from the side close to the main substrate 20, a buffer layer made of AlGaN or GaN, a GaN layer made of undoped GaN, an n contact layer , An n-clad layer, an n-side guide layer, an active layer, a cap layer, a p-side guide layer, a p-clad layer, and a p-contact layer.

In the fourth step shown in FIG. 9D, the p-type electrode 2 including at least an ohmic electrode is formed on the upper portion as in the third step of the first embodiment. After forming the p-type electrode 2, a protective film 4 is formed so as to be easily attached to the support substrate 10. Specifically, the protective film 4 is preferably formed of an insulating film such as SiO ₂ or SiN.

  The fifth to sixth steps shown in FIGS. 10A and 10B are the same as the fifth to sixth steps (FIGS. 8A and 8B) of the fourth embodiment. Adhere and peel off at the release layer 23.

 In the seventh step shown in FIG. 10C, as in the sixth step (FIG. 2B) of the first embodiment, the n electrode 3 is applied to the n contact layer, which is the lowest layer of the nitride-based semiconductor layer 1. Form. Further, the main substrate, which is a separate body separately manufactured in the same manner as in the first to fourth steps (FIGS. 9A to 9D) of the fifth embodiment, including the nitride-based semiconductor layer 1 is used. 24, affixed to the nitride-based semiconductor layer 5, the p-electrode 6, and the protective film 7. At this time, the nitride-based semiconductor layer 5 preferably has a structure having a laser wavelength different from that of the nitride-based semiconductor layer 1. For example, the nitride-based semiconductor layer 5 has a wavelength corresponding to a red laser and an infrared laser. Further, the nitride-based semiconductor layer 5 may be a two-wavelength laser or a three-wavelength laser manufactured in a hybrid manner.

 In the eighth step shown in FIG. 10D, the main substrate 24 and the support substrate 10 are moved along the separation line 101 in a region where an element having the nitride semiconductor layer 1 and the nitride semiconductor layer 5 is formed. To separate. Specifically, in the eighth step, the main substrate 24 and the support substrate 10 are separated in element units by cracking a part of the main substrate 24 and the support substrate 10 or by dicing.

  According to the method for manufacturing a nitride-based semiconductor laser device according to the fifth embodiment of the present invention described above, the nitride-based semiconductor layer 1 and other wavelengths are obtained by using the growth blocking layer 22 and the release layer 23. It is possible to easily produce a device having the nitride-based semiconductor layer 5 having. Therefore, according to such a method for manufacturing a nitride-based semiconductor device, a nitride-based semiconductor laser device having a multi-wavelength laser structure can be easily manufactured.

(Other embodiments)
Although the present invention has been described according to the above-described embodiments, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.

 For example, in the first to fifth embodiments, a method for manufacturing a light emitting diode or a semiconductor laser that mainly uses light emitted from the active layer of the nitride-based semiconductor layer 1 has been exemplified, but the present invention is not limited thereto. The present invention can also be used in the manufacture of a light emitting device that combines a phosphor that uses the light emitted from these light emitting devices as excitation light. Further, it can be applied to electronic devices such as HEMT (High Electron Mobility Transistor) having the nitride-based semiconductor layer 1, SAW (Surface Acoustic Wave) devices, and light receiving elements. Further, by applying the substrate replacement technique according to the present invention, it is possible to apply to a multi-wavelength semiconductor laser, thereby improving the yield of the emission point interval in the wafer plane in the multi-wavelength laser. .

 In the first to fifth embodiments, the nitride semiconductor layer 1 is crystal-grown using the MOCVD method. However, the present invention is not limited to this, and the HVPE method, the gas source MBE method, and the like are used. The nitride-based semiconductor layer 1 may be used for crystal growth. The crystal structure of the nitride-based semiconductor layer 1 may be a wurtzite type or a zinc blende type structure. Further, the growth plane orientation is not limited to (0001), and may be (11-20) or (1-100). In order to suppress lateral growth, the thickness, growth pressure, growth temperature, growth rate, etc. of the growth inhibition layer 22 may be changed.

 The nitride-based semiconductor layer 1 may have a current confinement structure such as a mesa structure or a ridge structure.

 In the first to fifth embodiments, the GaN substrate, the sapphire substrate, the Si, and the GaAs SiC substrate are used as the main substrate 20 that is the growth substrate for the nitride-based semiconductor layer 1. The substrate on which the nitride-based semiconductor layer 1 can be grown, for example, MgO, ZnO, spinel, etc. can be used.

The support substrate material is preferably conductive. In addition to the metal-metal oxide composite material used in the first to fourth embodiments, a conductive semiconductor (Si, SiC, GaAs, ZnO) is used. Etc.), metal or composite metal (Al, Fe-Ni, Cu-W, CU-Mo, etc.) can be used. In general, a metal-based material is superior to a semiconductor material in terms of mechanical properties and is not easily cracked, and thus is suitable as a support substrate material. Furthermore, more preferably, high conductivity and high mechanical strength are obtained by combining a highly conductive metal such as Cu, Ag, Au and a high hardness metal or metal oxide such as W, Mo, Ni, CuO. Is to use a material having both. In this case, for example, Cu—Co (Cu: 50 wt%, Co: 50 wt%), Cu—W (Cu: 50 wt%, W: 50 wt%), Cu—Mo (Cu: 50 wt%, Mo: 50% by weight) are 9 × 20 ⁻⁶ / K, 7 × 20 ⁻⁶ / K, and 7 × 20 ⁻⁶ / K, respectively. Examples of the adjustment layer material having a small thermal expansion coefficient with respect to the substrate material include Si, W, and Mo. In addition, examples of the adjustment layer material having a large thermal expansion coefficient with respect to the substrate material include Ni, Au, Cu, An—Sn, Ag, and Al.

  As described above, the present invention naturally includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

It is typical process sectional drawing which shows the flow of the process (1st process to 4th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 1st Embodiment and 2nd Embodiment of this invention. It is typical process sectional drawing which shows the flow of the process (5th process and 6th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 1st Embodiment of this invention. It is a top view of the main board which has the 1st field and the 2nd field concerning one embodiment of the present invention. It is typical process sectional drawing which shows the flow of the process (5th process-7th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 2nd Embodiment of this invention. It is typical process sectional drawing which shows the flow of the process (1st process to 4th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 3rd Embodiment of this invention. It is typical process sectional drawing which shows the flow of the process (5th process-7th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 3rd Embodiment of this invention. It is typical process sectional drawing which shows the flow of the process (1st process to 4th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 4th Embodiment of this invention. It is typical process sectional drawing which shows the flow of the process (5th process-8th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 4th Embodiment of this invention. It is typical process sectional drawing which shows the flow of the process (1st process to 4th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 5th Embodiment of this invention. It is typical process sectional drawing which shows the flow of the process (5th process-8th process) in the manufacturing method of the nitride-type semiconductor element which concerns on 5th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Nitride type semiconductor layer 2 ... p electrode 3 ... n electrode 4 ... protective film 5 ... nitride type semiconductor layer 6 ... p electrode 7 ... protective film 10 ... support substrate 20 ... main substrate 20a ... 1st area | region 20b ... 2nd Region 22 ... Growth inhibition layer 23 ... Release layer 24 ... Main substrate

Claims (13)

A region manufacturing step of manufacturing a first region 20a and a second region in which crystal growth is less likely to occur than the first region 20a on the main surface by performing predetermined processing on the main surface of the main substrate. When,
A crystal growth step of forming a nitride-based semiconductor layer on the main surface by crystal growth;
And a separation step of separating the main substrate for each of the first regions 20a in a direction perpendicular to the main surface in the second region. A region manufacturing step of forming a first region and a second region in which crystal growth is less likely to occur than the first region on the main surface by performing a predetermined process on the main surface of the main substrate;
A crystal growth step of forming a nitride-based semiconductor layer on the main surface by crystal growth;
An attaching step of attaching a support substrate on the formed nitride-based semiconductor layer;
A peeling step of peeling the main substrate from the nitride-based semiconductor layer;
And a separation step of separating the main substrate for each of the first regions in a direction perpendicular to the main surface in the second region.   The method for manufacturing a nitride semiconductor device according to claim 1, wherein the predetermined process is a process of irradiating the main surface with a laser beam.  The method for manufacturing a nitride semiconductor device according to claim 1, wherein the predetermined process is a process of implanting ions into the main surface. The method for manufacturing a nitride-based semiconductor element according to claim 1, wherein the predetermined process is a process of manufacturing a growth inhibition layer on the main surface.  The said predetermined process includes the process which produces the said 1st area | region and the said 2nd area | region alternately on the said main surface, The any one of Claims 1-5 characterized by the above-mentioned. Of manufacturing a nitride semiconductor device.  6. The method of manufacturing a nitride semiconductor device according to claim 5, wherein the growth blocking layer is made of a dielectric or a metal.  8. The method of manufacturing a nitride semiconductor device according to claim 7, wherein the dielectric and the metal are formed of a multilayer film.  9. The nitride-based semiconductor device according to claim 2, wherein the crystal-growing step forms the nitride-based semiconductor layer on the main surface on which a release layer is formed. Manufacturing method.  The method according to claim 9, wherein the release layer is made of a metal thin film.  The method for manufacturing a nitride semiconductor device according to claim 9, wherein the release layer is made of an amorphous layer.  The method for manufacturing a nitride-based semiconductor element according to claim 9, wherein the release layer includes voids.  13. The nitride semiconductor layer includes at least one of gallium nitride, aluminum nitride, indium nitride, boron nitride, and thallium nitride, or a mixed crystal thereof. 2. A method for manufacturing a nitride semiconductor device according to item 1.

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