JP2001025947A - Grinding machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To stop driving shafts for a solar gear, an upper surface plate, a lower surface plate, and an internal gear in a fixed position at the same time while keeping the rotational speed ratio of a final profile. SOLUTION: This grinding machine is provided with a rotatable lower surface plate 2, an upper surface plate rotatably mounted on the upper part of the lower surface plate 2, a solar gear 5 rotatably mounted in the center of the lower surface plate 2, an internal gear 6 rotatably mounted on the outer periphery of the lower surface plate 2, and a carrier 7 having a hole 8 for retaining a work engaged with the solar gear 5 and the internal gear 6. The amount of traveling required for stopping in a fixed position is applied to the driving shafts of the solar gear 5, the lower surface plate 2, the upper surface plate, and the internal gear 6 by changing machining time or the rotational speed at a first profile. When grinding gets on toward the final profile, the driving shafts of the solar gear 5, the lower surface plate 2, the upper surface plate, and the internal gear 6 stop in the fixed position at the same time at the rotational speed ratio of the final profile.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a polishing machine, and more particularly to a so-called forging machine in which a driving shaft of a lower surface plate, a driving shaft of an upper surface plate, a driving shaft of a sun gear and a driving shaft of an internal gear are independently driven. It relates to a weighing type polishing machine.

[0002]

2. Description of the Related Art Generally, a polishing machine of this kind is configured to temporarily suspend a work portion for polishing a surface of a work such as an aluminum substrate for a magnetic disk before transferring an unprocessed work to the work portion. The loading section to be placed, the unloading section to temporarily hold the processed work taken out from the processing section, and the unprocessed work to be taken out from the loading section and transferred to the processing section, and the processed work to be transferred from the processing section. And a transfer section for taking out and transferring to the unloading section.

In this case, the processing section includes a lower platen rotatably and vertically movable, an upper platen rotatably and vertically movable above the lower platen, and a rotatable center of the lower platen. And a driver that fits into the center of the upper stool when the upper stool is lowered, a sun gear rotatably provided on the outer periphery of the driver, and an internal gear rotatably provided on the outer periphery of the lower stool. And a carrier in which a plurality of gears are engaged with each other between the sun gear and the internal gear, and holes for holding a work are provided at a plurality of positions, respectively. The drive shafts of the gear and the internal gear are independently driven.

By stopping the rotation of the sun gear when the sun gear rotates an integral multiple of a predetermined rotation, each carrier can be stopped at a fixed position in the revolving direction and the rotation direction at the end of polishing. It is.

[0005] By stopping each carrier at a fixed position in the revolving direction and the rotation direction in this way, it is only necessary to move the transfer section in parallel between the loading section and the processing section.
One batch of unprocessed work on the table in the loading section can be transferred into the holes for holding each work in each carrier in the processing section, and the transfer section is translated between the unloading section and the processing section. Only by doing so, the processed work in the hole for holding each work of each carrier of the processing section can be transferred to the table of the unloading section.

However, in the conventional polishing machine having the above-described configuration, the drive shafts of the lower surface plate, the upper surface plate (driver), the sun gear, and the internal gear are independently driven to rotate, and the polishing is completed. After the polishing, each drive shaft is stopped independently, so after the polishing is completed, the sun gear and the internal gear are rotated multiple times, and the holes for holding each work of each carrier are positioned at the fixed positions in the revolving direction and the rotation direction. Must. For this reason, after the completion of polishing, rotation other than the rotation required for the original polishing is added to each carrier,
Variations occur in the finished state of the work. Also,
Extra time is required to position each carrier at a fixed position, which reduces production efficiency.

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art, and maintains the drive shafts of the lower stool, the upper stool, the sun gear and the internal gear while maintaining the rotation speed ratio of the final profile. By simultaneously stopping the polishing, it is possible to prevent rotation other than the rotation required for the original polishing from being applied to each carrier after polishing is completed, thereby keeping the finished state of the work constant and fixing each carrier. An object of the present invention is to provide a polishing machine that can increase production efficiency by eliminating extra time for positioning at a position.

[0008]

Means for Solving the Problems To solve the above problems, the present invention provides a lower platen rotatably provided,
An upper platen rotatably and vertically movable above the lower platen, a sun gear rotatably provided at the center of the lower platen, an internal gear rotatably provided on the outer peripheral side of the lower platen, and a sun. A plurality of gears are meshed between a gear and an internal gear, and holes for holding a work are provided at a plurality of positions, respectively, and the polishing machine includes a carrier that revolves and rotates when the sun gear rotates. The upper shaft, the sun gear, and the drive shaft of the internal gear employ a means in which the processing time or the rotation speed is changed in the initial profile to add a moving amount necessary for stopping at a fixed position.

[0009]

According to the present invention, the drive means of the lower surface plate, the upper surface plate, the sun gear, and the internal gear is changed in the initial profile by changing the processing time or the rotation speed by adopting the above means. The movement amount required for the fixed position stop is added. Accordingly, the drive shafts of the lower stool, the upper stool, the sun gear, and the internal gear stop at the same time while maintaining the rotation speed ratio of the final profile.

[0010]

Embodiments of the present invention shown in the drawings will be described below. 1 and 2 show an embodiment of a polishing machine according to the present invention. The polishing machine shown in this embodiment includes a processing section 1 and a loading section 1.
1, unloading unit 15, and transport unit (not shown)
, A transfer unit 18 and a control unit 26.

The processing unit 1 includes a lower platen 2 rotatably provided in a horizontal direction, an upper platen 3 rotatably and vertically movable above the lower platen 2, and a rotatable center of the lower platen 2. A driver (not shown) fitted to the center of the upper surface plate 3 when the upper surface plate 3 is lowered, a sun gear 5 rotatably provided on the outer peripheral side of the driver, and a lower surface plate 2 An internal gear 6 rotatably provided on the outer peripheral side of the sun gear 5 and a carrier 7 which meshes with the sun gear 5 and revolves and rotates when the sun gear 5 rotates.

[0012] Ten carriers 7 are provided at equal intervals between the sun gear 5 and the internal gear 6, and each carrier 7 revolves and rotates when the sun gear 5 rotates.

Each carrier 7 has 5
A hole 8 for holding a work is provided at a location, and a work 10 such as an aluminum substrate for a magnetic disk is provided in each hole 8 for holding a work.
Are loaded respectively.

The gear ratio of the sun gear 5, the carrier 7, and the internal gear 6 is set to 3: 1: 5.
The number of revolutions and the number of revolutions of the carrier 7 can be obtained from the number of revolutions of the sun gear 5, the number of revolutions of the internal gear 6, the number of the carriers 7, the number of the holes 8 for holding the work, and the like.

That is, the number of revolutions and the number of revolutions of the carrier 7 can be expressed by the following equations. Number of revolutions Kr1 of carrier 7 = (number of teeth of internal gear 6 × number of rotations of internal gear 6 + number of teeth of sun gear 5 × number of rotations of sun gear 5) / 2 × (number of teeth of sun gear 5 + number of teeth of carrier 7) Number of teeth) ... Number of rotations Kr2 of carrier 7 = (Number of revolutions-Number of rotations of sun gear 5) x (Number of teeth of sun gear 5 / Number of teeth of carrier 7) ...

In this embodiment, the number of the carriers 7 is ten, and each carrier 7 is provided with holes 8 for holding a work at five places.
Is rotated to a fixed position in the revolving direction every time it rotates around 1/10. If this is expressed by the rotation of the sun gear 5,
From the equation: 0.1 = (5 × 0 + 3 × x) / 2 × (1 + 3) 0.1 = 3 × x / 8 x = 0.8 / 3 x = 4/15, and the sun gear 5 Each time the carrier 7 rotates 15 times, each carrier 7 is located at a fixed position in the revolution direction (a position rotated 1/10 in the revolution direction).

The number of rotations of the carrier 7 when the sun gear 5 makes 4/15 rotations is, from the above equation, the number of rotations = (0.1 × y−4 / 15 × y) × 3 = 1 y = 2 Each time the sun gear 5 rotates 8/15, each carrier 7 is located at a fixed position in the revolution direction and the rotation direction.

Here, it is desirable that the upper stool 3, the lower stool 2 and the carrier 7 are simultaneously stopped at fixed positions at the rotation speed ratio of the final profile. For this reason, as shown in FIG. 3, by changing the machining time or the number of revolutions in the first profile to the four drive shafts of the sun gear 5, the upper stool 3, the lower stool 2, and the internal gear 6, The correction movement amount necessary for the fixed position stop is added.

For example, when one axis (the driving axis of the sun gear 5) is used as a reference axis, the following procedure is followed. (1) Calculate the total movement amount of the reference axis and calculate the shortage with respect to the fixed position. (2) The shortage of the reference axis is converted into time, and this time is set as a correction amount A. (3) The deceleration time at the time of stop is calculated from the final profile of the reference axis. (4) Two axes (upper surface plate 3) using the time corrected in (1)
, The total movement amount of three axes (the drive axis of the lower stool 2) and the fourth axis (the drive axis of the internal gear 6) is calculated (however, the final deceleration time (the time to stop from the final profile) is the reference axis). Calculated according to). (5) Calculate the insufficiency of each of the fixed positions of the two axes, three axes, and four axes, and convert this for each axis. (6) The speeds converted in (5) are used as correction amounts B, C, and D. (7) By correcting the speed, the profile following the corrected profile has a different moving amount from the first calculation (calculated in (4)). Therefore, by changing the acceleration time of this profile, , The amount of movement (4)
(B, c, d).

Here, Vh is determined by assuming that a moving amount required for stopping a fixed position of an arbitrary axis (for example, a driving axis of the upper stool) other than the reference axis is Sh and a correction speed at that time is Vh (FIG. 4). reference). Assuming that the maximum rotation speed of the shaft is Vmax and the acceleration parameter is a, Th can be obtained from the following equation (the positioning unit reaches (sets in proportion to) the set maximum rotation speed with the set acceleration parameter). Therefore, the acceleration time a 'for an arbitrary speed V' is Vma
x: V '= a: a' is satisfied).

(Equation 1) Thus, the movement amount S1 can be obtained from the following equation.

(Equation 2) The movement amount (area) for each step is calculated using Expression 2, and the total movement amount is defined as St. Further, assuming that the moving amount (area) required for the fixed position stop is K, the following equation is established.

(Equation 3) The correction movement amount Sh is obtained using Expression 3. From these,
Expressing the relationship of FIG.

(Equation 4) Becomes Since Th is (a × Vh) / Vmax,

(Equation 5) And a quadratic equation for Vh. Solving this for Vh gives

(Equation 6) Becomes Therefore, by using Equation 6, the correction speed Vh in FIG. 4 can be obtained.

Next, from the correction speed Vh in the first step shown in FIG.
In the case of acceleration to 2, as shown in FIG. 5, the amount of movement (area) Sx in the frame of the dotted line is different, and this is corrected by changing the acceleration time in the T2 step. If the speed is converted without changing the acceleration time from the corrected rotation speed Vh to the set speed V2 at T2, the movement amount (area) Sx in the dotted frame is added to the actual movement amount. The acceleration time ah is set so that S2 = S2 '. Here, the following relationship is established as described above.

(Equation 7) Therefore, the correction acceleration time ah obtained here is obtained from the following equation (however, the unit is not adjusted here).

(Equation 8) Solving Equation 8 for ah gives:

(Equation 9) Becomes Therefore, the correction acceleration time ah can be obtained by using Expression 9.

By developing software that satisfies the above conditions, simultaneous stoppage of the four drive shafts with the same deceleration time can be achieved.

Then, like the upper surface plate 3, the lower surface plate 2,
The amount of movement of the sun gear 5 and the internal gear 6 is obtained, and in the first profile, the processing time or the number of revolutions of the sun gear 5, the upper stool 3, the lower stool 2, and the internal gear 6 is changed to stop the fixed position. By adding the moving amount, the sun gear 5, the upper stool 3, the lower stool 2, and the internal gear 6 are maintained while maintaining the rotation speed ratio of the final profile.
Can be simultaneously stopped at a fixed position.

The transport unit (not shown) is used for the work 1 before processing.
0, an unloading cassette for storing the processed work 10, and a transport belt for transporting the loading cassette and the unloading cassette in the horizontal direction.

The loading section 11 is composed of a rotatable loading table 12 connected to the processing section 1 and a loading robot 13 provided between the loading table and the transport section. By operating, the work 10 before processing can be taken out from the loading cassette of the transport unit and arranged on the loading table 12.

The unloading section 15 includes a rotatable unloading table 16 connected to the processing section 1,
An unloading robot 17 provided between the unloading table 16 and the transport unit. The unloaded robot 17 is operated so that the processed work 10 placed on the unloading table 16 is processed. It can be stored in the unloading cassette of the transport section.

The transfer section 18 is provided in parallel with the processing section 1, the loading section 11 and the unloading section 15. The guide section 19 is provided in parallel with the processing section 1, the loading section 11 and the unloading section 15. And a rotatable loading head 20 that is supported by the guide 19 and that is reciprocally movable in the horizontal direction between the processing unit 1 and the loading unit 11 and that is vertically movable. In addition, a rotatable unloading-side head 23 is provided so as to be capable of reciprocating in the horizontal direction and vertically moving between the processing section 1 and the unloading section 15.

Each carrier 7 of the processing section 1 on the lower surface side of the loading side head 20 and the unloading side head 23
The substrates 21 and 24 are rotatably provided in portions corresponding to the above, and chucks 22 and 25 are provided in portions corresponding to the respective work holding holes 8 of the respective carriers 7 of the respective substrates 21 and 24. It has become.

Then, in order to polish the surface of the work 10 such as an aluminum disk substrate using the polishing machine having the above-mentioned configuration, first, the loading robot 13 of the loading section 11 is operated, and the loading robot of the transport section is moved from the loading cassette. The work 10 before processing is taken out and arranged on the loading table 12. In this case, the workpieces 10 are arranged on the loading table 12 so as to correspond to the workpiece holding holes 8 of the carriers 7 located at the origin of the processing section 1.

Next, the loading side head 20 of the transfer section 18 waiting above the loading table 12 is lowered, and the chuck 22 is used to load the loading table 1.
2 and grip the workpiece 10 on the loading side head 20
And moving it in the horizontal direction to
And the loading side head 2
0 is lowered, each work 10 is loaded into each work holding hole 8 of each carrier 7, and the work 1 is
Release the gripping state of 0.

Next, the loading side head 20 is raised and moved in the horizontal direction to stand by at a predetermined position. The upper platen 3 of the processing section 1 is lowered, and a driver is placed at the center of the upper platen 3. The upper platen 3, the lower platen 2, the sun gear 5 and the internal gear 6 are rotated to fit both platens 3, 2
In between, each carrier 7 revolves and rotates, and the surface of each work 10 is polished.

In this case, as described above, the sun gear 5,
In the first profile, the amount of movement required for stopping at a fixed position is added to the four drive shafts of the upper stool 3, the lower stool 2, and the internal gear 6 by changing the processing time or the number of revolutions in the initial profile.

When the polishing by the processing section 1 approaches the final profile, the four drive shafts of the sun gear 5, the upper stool 3, the lower stool 2, and the internal gear 6 maintain the rotation speed ratio of the final profile. At the same time, the carrier 7 stops at the fixed position, and each carrier 7 stops at the fixed position in the revolution direction and the rotation direction.

Then, while raising the upper platen 3,
The unloading head 23 of the transfer unit 18 is moved in the horizontal direction to be positioned above the lower platen 2 of the processing unit 1, the unloading head 23 is lowered, and each work of each carrier 7 is held by the chuck 25. Each work 10 in the hole 8 for use is grasped.

Next, the unloading head 23 is raised and moved in the horizontal direction to be positioned above the unloading table 16, and the unloading head 23 is lowered to place the work 10 on the unloading table 16. The unloaded head 23 is lifted up and moved in the horizontal direction to stand by at a predetermined position.

Then, the unloading robot 17 of the unloading section 15 is operated to grasp the work 10 on the unloading table 16 and store it in the unloading cassette of the transport section. The polishing of the work 10 is completed.

By repeating such operations, the workpieces 10 for a plurality of batches can be continuously polished.

In the polishing machine according to the present embodiment configured as described above, when the polishing of the workpiece 10 by the processing section 1 approaches the final profile, the sun gear 5, the upper stool 3, the lower stool 2, and Since the four drive shafts of the internal gear 6 stop at the same position at the same time while maintaining the rotation speed ratio of the final profile, each carrier 7 stops at the fixed position in the revolution direction and the rotation direction. Become. Therefore, it is not necessary to drive the drive shafts of the sun gear 5 and the internal gear 6 again after the polishing to position the respective carriers 7 at the fixed positions in the revolving direction and the rotation direction. No rotation other than the rotation required for polishing the workpiece is added, and the work 10
Can be kept constant. In addition, since the time required for positioning each carrier 7 at a fixed position after polishing is not required, production efficiency can be improved.

[0039]

According to the present invention, as described above, the drive shafts of the sun gear, the upper stool, the lower stool and the internal gear are provided with a fixed position stop by changing the processing time or the rotation speed in the first profile. By approaching the final profile, the drive shafts of the sun gear, upper stool, lower stool and internal gear are simultaneously driven while maintaining the final profile rotation speed ratio by approaching the final profile. It will stop at the fixed position. Therefore, each carrier is stopped at a fixed position in the revolving direction and the rotation direction.After the polishing is completed, the driving shafts of the sun gear and the internal gear are driven again, and each carrier is moved in the revolving direction and the rotation direction. There is no need to position it in a fixed position. As a result, after the polishing is completed, rotation other than the rotation necessary for the original polishing is not applied to each carrier, so that the finished state of the work can be kept constant. Further, since no time is required for positioning each carrier at a fixed position, the tact time can be shortened, and the production efficiency can be improved.

[Brief description of the drawings]

FIG. 1 is a front view showing an entire embodiment of a polishing machine according to the present invention.

FIG. 2 is a plan view of what is shown in FIG.

FIG. 3 shows one axis (drive axis of a sun gear), two axes (drive axis of an upper stool), three axes (drive axis of a lower stool), and four axes (a drive axis of an internal gear) shown in FIGS. It is explanatory drawing which showed the relationship between the processing time of a drive shaft), and rotation speed.

FIG. 4 is an explanatory diagram showing how to calculate a corrected speed Vh.

FIG. 5 is an explanatory diagram showing how to determine an acceleration time a such that S2 = S2 ′.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Processing part 2 ... Lower surface plate 3 ... Upper surface plate 5 ... Sun gear 6 ... Internal gear 7 ... Carrier 8 ... Hole for work holding 10 ... Work 11 ... Loading part 12 ... Loading table 13 Loading robot 15 Unloading section 16 Unloading table 17 Unloading robot 18 Transfer section 19 Guide guide 20 Loading head 21, 24 Substrates 22, 25 … Chuck 23… Unloading side head 26… Control unit

Claims (1)

[Claims] 1. A lower platen rotatably provided, an upper platen rotatably and vertically movable above the lower platen, a sun gear rotatably provided at the center of the lower platen, and a lower platen A plurality of internal gears rotatably provided on the outer peripheral side of the sun gear are meshed between the sun gear and the internal gear, and holes for holding a work are provided at each of a plurality of locations, and revolve when the sun gear rotates, In a polishing machine equipped with a rotating carrier, it is necessary to stop the fixed position by changing the processing time or rotation speed in the first profile on the drive shaft of the lower platen, upper platen, sun gear and internal gear. Polishing machine characterized by adding a large amount of movement.