FR2812405B1 - Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi - Google Patents

Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi

Info

Publication number
FR2812405B1
FR2812405B1 FR0009851A FR0009851A FR2812405B1 FR 2812405 B1 FR2812405 B1 FR 2812405B1 FR 0009851 A FR0009851 A FR 0009851A FR 0009851 A FR0009851 A FR 0009851A FR 2812405 B1 FR2812405 B1 FR 2812405B1
Authority
FR
France
Prior art keywords
integrated circuit
interconnection system
optical interconnection
circuit made
self substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0009851A
Other languages
English (en)
Other versions
FR2812405A1 (fr
Inventor
Suzette Laval
Alain Koster
Daniel Pascal
Francois Anceau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0009851A priority Critical patent/FR2812405B1/fr
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to PCT/FR2001/002456 priority patent/WO2002010816A2/fr
Priority to CA002417143A priority patent/CA2417143A1/fr
Priority to KR10-2003-7000960A priority patent/KR20030018060A/ko
Priority to JP2002515489A priority patent/JP2004505310A/ja
Priority to US10/333,223 priority patent/US20030156778A1/en
Priority to AU2001279919A priority patent/AU2001279919A1/en
Priority to EP01958187A priority patent/EP1303773A2/fr
Publication of FR2812405A1 publication Critical patent/FR2812405A1/fr
Application granted granted Critical
Publication of FR2812405B1 publication Critical patent/FR2812405B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Light Receiving Elements (AREA)
FR0009851A 2000-07-27 2000-07-27 Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi Expired - Fee Related FR2812405B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0009851A FR2812405B1 (fr) 2000-07-27 2000-07-27 Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi
CA002417143A CA2417143A1 (fr) 2000-07-27 2001-07-26 Systeme d'interconnexion optique dans un circuit microelectronique realise sur un substrat soi
KR10-2003-7000960A KR20030018060A (ko) 2000-07-27 2001-07-26 에스 오 아이 기판 상에 제조된 극소 전자 회로의 광 배선시스템
JP2002515489A JP2004505310A (ja) 2000-07-27 2001-07-26 Ｓｏｉ基板上に形成されたマイクロエレクトロニクス回路における光学的相互接続システム
PCT/FR2001/002456 WO2002010816A2 (fr) 2000-07-27 2001-07-26 Systeme d'interconnexion optique dans un circuit microelectronique realise sur un substrat soi
US10/333,223 US20030156778A1 (en) 2000-07-27 2001-07-26 Optical interconnection system in a microelectronic circuit produced on a soi substrate
AU2001279919A AU2001279919A1 (en) 2000-07-27 2001-07-26 Optical interconnection system in a microelectronic circuit produced on a soi substrate
EP01958187A EP1303773A2 (fr) 2000-07-27 2001-07-26 Systeme d'interconnexion optique dans un circuit microelectronique realise sur un substrat soi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0009851A FR2812405B1 (fr) 2000-07-27 2000-07-27 Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi

Publications (2)

Publication Number Publication Date
FR2812405A1 FR2812405A1 (fr) 2002-02-01
FR2812405B1 true FR2812405B1 (fr) 2003-06-20

Family

ID=8852974

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0009851A Expired - Fee Related FR2812405B1 (fr) 2000-07-27 2000-07-27 Systeme d'interconnexion optique pour circuit integre realise sur un substrat soi

Country Status (8)

Country Link
US (1) US20030156778A1 (fr)
EP (1) EP1303773A2 (fr)
JP (1) JP2004505310A (fr)
KR (1) KR20030018060A (fr)
AU (1) AU2001279919A1 (fr)
CA (1) CA2417143A1 (fr)
FR (1) FR2812405B1 (fr)
WO (1) WO2002010816A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1625424A4 (fr) 2003-04-23 2009-04-15 Siophcal Inc Dispositifs a ondes lumineuses plans et submicroniques formes sur une plate-forme optique soi (silicium sur isolant)
JP5130621B2 (ja) * 2005-11-24 2013-01-30 ソニー株式会社 半導体基板の製造方法
JP4438835B2 (ja) * 2007-07-20 2010-03-24 ソニー株式会社 高周波信号生成方法および高周波信号生成装置
KR20100061607A (ko) * 2008-11-29 2010-06-08 한국전자통신연구원 고속 광배선 소자
FR2979169B1 (fr) * 2011-08-19 2014-04-25 Soitec Silicon On Insulator Systèmes semi-conducteurs intégrés en trois dimensions comportant des dispositifs photo-actifs
US8842945B2 (en) 2011-08-09 2014-09-23 Soitec Methods of forming three dimensionally integrated semiconductor systems including photoactive devices and semiconductor-on-insulator substrates

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5057022A (en) * 1989-03-20 1991-10-15 Miller Robert O Method of making a silicon integrated circuit waveguide
US5394490A (en) * 1992-08-11 1995-02-28 Hitachi, Ltd. Semiconductor device having an optical waveguide interposed in the space between electrode members
US5367585A (en) * 1993-10-27 1994-11-22 General Electric Company Integrated microelectromechanical polymeric photonic switch
DE19503641A1 (de) * 1995-02-06 1996-08-08 Forschungszentrum Juelich Gmbh Schichtstruktur mit einer Silicid-Schicht, sowie Verfahren zur Herstellung einer solchen Schichtstruktur
US5559912A (en) * 1995-09-15 1996-09-24 International Business Machines Corporation Wavelength-selective devices using silicon-on-insulator
US5986331A (en) * 1996-05-30 1999-11-16 Philips Electronics North America Corp. Microwave monolithic integrated circuit with coplaner waveguide having silicon-on-insulator composite substrate
US5838870A (en) * 1997-02-28 1998-11-17 The United States Of America As Represented By The Secretary Of The Air Force Nanometer-scale silicon-on-insulator photonic componets
JP3853905B2 (ja) * 1997-03-18 2006-12-06 株式会社東芝 量子効果装置とｂｌトンネル素子を用いた装置
US5987196A (en) * 1997-11-06 1999-11-16 Micron Technology, Inc. Semiconductor structure having an optical signal path in a substrate and method for forming the same
GB2339919B (en) * 1998-07-17 2002-12-11 Bookham Technology Ltd Thermo-optic semiconductor device
GB2343293B (en) * 1998-10-23 2003-05-14 Bookham Technology Ltd Manufacture of a silicon waveguide structure

Also Published As

Publication number Publication date
EP1303773A2 (fr) 2003-04-23
WO2002010816A3 (fr) 2002-05-23
US20030156778A1 (en) 2003-08-21
FR2812405A1 (fr) 2002-02-01
CA2417143A1 (fr) 2002-02-07
JP2004505310A (ja) 2004-02-19
AU2001279919A1 (en) 2002-02-13
WO2002010816A2 (fr) 2002-02-07
KR20030018060A (ko) 2003-03-04

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20080331