FR2559688A1 - LIQUID CLEANING SYSTEM - Google Patents

Abstract

A PLATE-SHAPED PARTS 37 LIQUID CLEANING PLANT, INCLUDING A BOX-SHAPED ENCLOSURE 11, A SUPPORT 29, WHICH CAN BE INSERTED IN THE ENCLOSURE AND ON WHICH THE PLATE-SHAPED PARTS 37 CAN BE HELD AT A AT A CERTAIN DISTANCE FROM ONE ANOTHER, AND FROM THE SPRINKLER NOZZLES 146, MOUNTED INSIDE THE ENCLOSURE, ALLOWS THE CLEANING ACTION TO BE INTENSIFIED WHILE REDUCING THE CONSUMPTION OF LIQUID BECAUSE THE SUPPORT 29 CAN ROTATE IN THE ENVELOPE. THIS ROTATION IS PRODUCED BY A DRIVE DEVICE 24, 26, THE ROTATION SPEED BEING ADAPTED TO THE WAY IN WHICH THE SPRINKLER NOZZLES ARE CONTROLLED. THE SPRINKLER NOZZLES 146 ARE ORIENTED IN THE RADIAL DIRECTION OF THE PARTS 37 SO THAT THEY ROTATE WITH THEM.

Description

The present invention relates to an ins-

  liquid cleaning plant for shaped parts

of plates.

  These plate-shaped parts are mostly platelets like the ones we generally use -

  for the manufacture of electronic printed circuits

  trotechnical. These plates are subjected to several mechanical and chemical treatments and in particular are housed therein, for the insertion of switching elements,

  holes with diameters from 0.5 to 1.2 mm. The installation

  The cleaning action must make it possible to rid these plates of both mechanical impurities and chemical substances which could be troublesome during subsequent treatments. This is also how to remove the attack reagents. The

  numerous small holes made in plates made up of

  then kill a source of difficulty, because these substances

  chemicals are easily concentrated there.

  In the usual cleaning installations

  liquid cleaning and of the type initially described, the net-

  toyage is carried out in two operations. First, the wafers are arranged in layers, at a certain distance from each other, in a basket, which is

  then inserted from above into an envelope. In-

  next, we spray the cleaning liquid on the plates

  bowls by sprinkler nozzles. During this time, the discharge opening is open. In these conditions,

  most of the impurities are entrained. We close in-

  following the emptying orifice and a second cleaning liquid is introduced through a supply channel with which the closed envelope is filled until all the wafers are completely submerged. Above the plates, the device has an overflow, so that the dirt particles which rise to the surface of the liquid, in particular the foam, can be removed via this outlet. This operation reduces the concentration of chemical residues in the holes to a reasonable value. After

  a certain immersion time, the cover of the

  loppe is open and the basket and the plates are removed from above. At the same time, we open the opening

envelope emptying.

  The disadvantage of this process is that the cleaning effect is insufficient, especially in small holes. In addition, this cleaning requires a lot of time, on the one hand because it takes two operations

  successive cleaning and, on the other hand, the speed-

  the filling of the envelope is limited. Another drawback is that the consumption of liquid is high. In fact, 1 m3 / h of water is needed for the first watering phase and around 10 m3 / h for the second immersion phase. So we have come to reuse water as much as possible for the second phase, that is to say the immersion phase, which requires

  to install a filtering or ion exchange device.

  It is clear that the reuse of water reduces the

  costs inherent in the supply of fresh water and the evacuation-

  sewage so that the price of the installation

  tion is almost paid off in one year, but it takes an extra

  permanent monitoring of the ion exchanger. This com-

  Comparison of cost prices also overlooks the fact that this preparation of water requires a lot of space

  whereas this place could be used in a ma-

  more productive. Water preparation requires,

  in addition, the use of circulation pumps and other

  very devices subject to operating incidents which, when they are faulty, can stop manufacturing

platelets.

  Another drawback of these devices is

  insists that the platelets cannot be extracted

  only in the wet state, which means that an

separate drying plant.

  The object of the invention is to allow the

  setting up of a liquid cleaning installation of the type initially defined which improves the cleaning efficiency and reduces the consumption of

cleaning fluid.

  This object is achieved, according to the invention, because the installation comprises, in an envelope,

  a rotary support carrying the pieces in the form of plates.

  Due to the rotational movement, the cleaning liquid sprayed on the plates flows onto the surface

  plates with a higher speed than that at the-

  which it would flow into a static device under the

  simple action of gravity. In addition, there are the tur-

  bulges and vibrations which also ensure better rinsing of small holes. As a result, the overall cleaning action obtained during the watering phase is greatly improved, it is no longer necessary

  then to carry out a washing by immersion. We eco

  therefore names in these conditions all the amount of liquid that would be necessary for this immersion, as well as all the costs necessary for the regeneration of the liquid. Therefore, the liquid cleaning installation according to the invention ensures, at the same time as a

  improved cleaning action, reduced

  considerable operating costs of the installation.

  In addition, the cleaning time is shorter because it

  no need to wait for the envelope to be replaced

plaice of liquid.

  The invention also relates to advantageous embodiments of the support carrying the plate-shaped parts and advantageous embodiments

  of the holding device as well as modes of realization

  advantageous position associated with a control device

  and allowing a particularly advantageous use

2S59688

  cleaning installation manager.

  The invention is described below in a ma-

  more detailed by means of exemplary embodiments

  preferred with reference to the drawing.

  Fig. 1 is a schematic sectional elevation

  than an installation according to the invention.

  Fig. 2 is a similar sectional elevation

in fig. 1 of a variant.

  The liquid cleaning system shown

  felt by fig. 1 first has an envelope 11

  having a cover 12 which includes an opening for

  trée 14 which can be closed by the plates 13. The

  walls 16 of the envelope define an approximate space

  matively cubic and at its lower part, the casing 11 is closed by a bottom 17. The fixed supports by which the casing 11 is supported have not been shown

floor.

  In the middle of the bottom 17 of the envelope, the provision

  sitive comprises a shaft bearing 18 in which is mounted a shaft 19 which rises perpendicularly to the cover 12 of the envelope. The shaft bearing 18 is fixed in a flange extension 21 which rises a few centimeters above the bottom. Applied against the shaft 19, a socket 22 has a lower marginal zone 23 which covers like a cap,

  but without contact, the extension 21 of the flange.

  This arrangement makes it possible to produce a sealing ring

  labyrinth-like sheaty that prevents penetration of

liquid in the shaft bearing 18.

  The lower end of the shaft 19 is re-

  linked, for example by means of a V-belt drive 24, to a motor 26. The shaft 19 rotates around the axis of rotation 27. The end

  upper part of tree 19 has the shape of a pyra- trunk

mide 28.

  Fig. also represents a support 29 dis-

  placed inside the envelope 11. This support consists essentially of a saddle device 31 which has, at its lower part, a recess of shape corresponding to that of the trunk of pyramid 28 and which, consequently, can be easily pushed onto the shaft 19 to which its shape corresponds. Starting from this assembly device 31 and forming an acute angle with respect to the axis of rotation 27, two first support arms 32 and 33, arranged symmetrically, are directed

  towards the bottom 17 of the envelope. Their ends bear

  each try a second arm 34 or 36 perpendicular to the first arm and extending radially. In this way, a device is obtained in which the first arms 32 and 33 form one with the other a V while a first and a second arm together form an L. These support arms include holding devices intended for the pieces 37 in the form of plates and made up

  for example by horizontal bars 38. These bars

  rails have transverse grooves, which

  puts, symmetrically on both sides of the axis of rotation, the installation of a package consisting of several pieces 37 in the form of plates. Each package can consist of approximately 40 pieces in the form of plates which are kept at a distance of approximately 10 mm from one another. In the second support arms 34 or 36, a branch 39 of an L-shaped holding bracket 41 is mounted and guided telescopically. The other

  end of the retaining stirrup 41 comprises a passage

  horizontal pour 42 which can be applied against the outer edge of the plate-shaped parts 37 and, therefore, holds the packages against the support. We

  can obviously imagine yet other modes of

  reading packages. We can for example use eg-

  Cassettes which, when completely filled, are connected to the support. If the cassette has a suitable shape, the second support arm can be dispensed with, if the support function which it fulfills is

assumed by the cassette.

  Fig. shows that the saddle device

  31 is in a corner which corresponds to the upper edge

  laughing plates when the format of the plates is the largest of those that we may have to process. Therefore, the support 29 is in a situation

very stable balance.

  The assembly device 31 extends slightly upwards and comprises at its upper end two radial gripping tenons 43. Gripping claws, not shown, of a lifting and transport installation can grip these gripping tenons from below 43 and lift the support 29 out of the envelope 11 and transport it to another treatment station. For the extraction or the installation of the support 29 loaded in the envelope 11, the support must be turned 90 relative to the position shown in fig., Which then allows to pass into the opening of entry 14 which has a form

  rectangular and extends in practice over the entire pro-

casing caster.

  On the side, near the entrance opening 14,

  below the cover 12 of the envelope, the installation

  tion comprises a connection frame 44 which supplies

  lie a series of sprinkler nozzles 46. There may be

  a whole area of sprinkler nozzles. These water nozzles

  wise are turned to the plate-shaped parts 37.

  The connection frame 44 is connected, by a cana-

  connection 47 which is only shown diagrammatically, with two valves 48 and 49. The valve 49 is directly connected, at its other end, to a supply fitting 51 in which the cleaning liquid constituted for example

  by fresh water comes under pressure. The other rac-

  valve cord 48 is connected to this supply fitting

  51 by means of a heat exchanger 52.

  This means that the cleaning liquid that arrives along this route can be heated. Magnets

  operation 53 and 54 are connected to a device for

  command 56 via control lines indicated above

  bend. In the opposite zone of the casing 12, under the cover, the installation comprises a connection frame 57 from which the air nozzles face the parts 37 in the form of a plate. Likewise, the connection frame 57 is connected, by means of a

  duct 58 summarily shown, to a fan of

  heating 59. This can be controlled in a known manner and the corresponding control pipe also leads to the control installation 56 as

indicates the drawing.

  The motor 26 is also controlled by the ins-

  tallation 56, which is also shown schematically-

  through the corresponding control line. The bottom part 17 of the envelope comprises, in its part the

  lower, two evacuation fittings 61 and 62, each

  one of which corresponds to a valve 63 or 64. The operating magnets 68 and 67 of these valves 63 and 64

  are connected by control lines to the ins-

  control tallation 56. The pipe 65 which starts from the valve 63 terminates, crossing a first

  wastewater treatment plant, not shown

  smelled, in a waste water pipe, while the cana-

  Lization 66 which starts from the valve 64 also ends at this wastewater pipe after having passed through a second wastewater treatment installation. Wastewater treatment plants can be specialized, i.e. in one of them we can treat water containing complexes (for example copper compounds) and in the other the water freed from these complexes can be purified so as to make it comply with legal requirements. Depending on the nature of the impurities, we can therefore choose the appropriate route. The operating mode of the cleaning installation can be described as follows. We can assume that the support 29 is loaded outside the envelope 11 in a filling station at

  by means of the two packages of pieces 37 in the form of a plate.

  At this stage of the operation, the platelets are

  drilled and are then subjected to a series of treat-

  chemical elements. Then the support 29 is seized at

  level of its gripping studs 43, transported

  above a first treatment bath and immersed in it

  bath. After this treatment the support is resumed, remove

  from the treatment bath and transported to the ins

  cleaning plant. The valves 13 are open and the support is introduced through the inlet opening 14 in the envelope 11, the saddle device 31 being

  placed on the pyramid trunk 28 of the tree 19. The dis-

  gripping positive is brought up and the

  valves 13 are closed. This operation also triggers

  as soon as in the control installation 56, a cycle of

scheduled cleaning.

  Motor 26 starts to run with low

  speed and valve 49 and one of the

  popes 63, 64 are open. Under these conditions, the plate-shaped parts 37 pass under the nozzles 46 and are vigorously watered. A large part of the surface impurities is then removed. After this watering phase, the duration of which can be adjusted, the speed of rotation of the motor 26 is increased continuously or in stages. As a result, the component of horizontal movement of the parts 37 with respect to the drops of water increases to such an extent that the water penetrates by force into the holes. When the

  angular velocity continues to increase the centering effect

  trifugation eventually predetermine and the water flows with considerable kinetic energy in the direction

  radial towards the outside on the surfaces of the parts 37.

  This film of water flowing outwards produces a suction effect which releases the small holes. As the parts 37 act like radial vanes, there is in addition a large current of air which at the same time exerts a suction action with regard to the small holes and pushes the liquid towards the outer edge of the plates. In other words from

  a certain angular speed, which depends on the large

  Deur des plaques, the sprinkler nozzles 46 no longer produce any noticeable action, since they are dominated by the air flow and the centrifugal force. This limit zone naturally depends on the construction method of the sprinkler nozzles and the water pressure available. Therefore as long as the rooms need to be watered

  with fresh water, maintain the speed an-

  gular below this indicated limit value.

  After this watering phase, it is therefore rec-

  commanded to increase the speed of rotation of the motor to the final centrifugation speed and to stop

the arrival of the cleaning liquid.

  When parts subjected to centrifugation

  are not yet dry enough for further processing

  You can then activate the heating fan 59 which sends, through the connection frame 57, air heated to a suitable temperature between

the pieces 37 in the form of a plate.

  The drawing shows that the plate-shaped parts 37 must be kept, in the cleaning installation, constantly in a position such that their

  lower edge is inclined relative to the horizontal.

  It follows in fact that during centrifugation, the last remainder of the film of liquid escapes along the lower edge of the plate or along the outer edge of the plate to go to the corner 69 which is the most far outside and from there be chased under the well known corner effect. By

  against if during the first watering phase, the

  angular size is still very low, the water can collect by following the lower edge of the plates and

  the inside edge of the plates to reach the corner

  70 to also leave under the action of

the corner effect.

  This drying by means of hot air which has just been described can also be obtained by a variant

  of the operating mode which is described below.

  This variant consists in that, after cleaning by spraying and before the motor 26 reaches its

  angular speed of terminal centrifugation, the

  valve 49 is closed and valve 48 is open. Hot water (hot water) therefore arrives on the plate-shaped parts 37. After a certain time, adjustable, which is determined in such a way that the parts are sufficiently heated, the valve 48 is closed and the

  motor 26 is then accelerated to its angular speed

  final centrifuge area. The combination of this centrifugation and prior heating with water

  very hot also gives a very good drying effect.

  Drying can be carried out either by one

  or by the other of the methods described or by a combination

  sound of both. It is obvious that one can completely dispense with the heat exchanger 52 and the valve.

  48 if you want to operate the single installation-

  with air drying. Conversely, we can re-

  it is completely dedicated to the frame 57 and to the fan 59

  if you don't want to use air drying.

  When you don't want to use reinforcement 57

  instead of this frame, you can use two

  analogous to frame 44. It is then possible, above the two packages of parts 37, to install a zone of sprinkler nozzles 46. In this case, it is not absolutely essential to rotate the support 29 for the initial watering phase. It is also possible during this start phase to order the

  motor 26 in such a way that the two packages oppo-

  ses are moved very little in a back and forth movement under the areas of the nozzles which are located above them, so as to ensure a distribution

water uniform.

  Obviously cleaning takes place faster if you use twice as many spray nozzles

  in envelope 11. Indeed, in the embodiment

  tion represented by the drawing, each package which

  takes about 40 pieces (37) in the form of plates which are located next to each other at a distance of about 10 mm from each other is only found during part of its rotational movement in the

  spray nozzle action area 46.

  Another variant has not been shown which consists of the cleaning liquid arriving at the supply fitting 51 under a variable pressure which can also be modified by the control installation 56 according to a determined program, so that

  when the angular speed of the motor increases, the pressure

  watering also increases, so as to compensate

  the deviation effect da to the centrifugal force and to the

flow of air.

  The drawing represents a cleaning installation

  yage at a scale approximately ten times less.

  Under these conditions, the envelope 11 has a side length

  about 1.6 m wide. The maximum angular speed of the support 29 is of the order of 200 to 300 revolutions per minute. The water consumption is about the same order of magnitude as for the cleaning phase by

  watering applied in the state of the art, that is to say

say about 1 m3 / h.

  The air flow caused by the rotation pro-

  also reduces micro vibrations of the parts, which further increases the cleaning effect in the small holes. The liquid cleaning system is

  especially designed for cleaning wafers. However

  It is obvious that we can clean other plate-shaped parts with it. In addition, these plates do not need to have a symmetrical rectangle shape or to have a flat surface. It is obvious that the device for holding the pieces must be adapted to the shape of the pieces and that consequently the method of construction of the support 29 can also vary. As cleaning liquid we mainly use water but we can also use any

other cleaning fluid.

  A preferred embodiment of the invention is shown in FIG. 2. The construction method is essentially the same as in the previous example so that similar parts are designated by the

  same references. It is therefore necessary to refer also to

  the previous description.

  The difference lies first of all in the method of mounting the sprinkler nozzles. For this, a modified shaft 119 is used which comprises a conduit 120 projecting from the lower end zone situated outside the bottom 17 of the envelope to the zone of parts 37 in the form of a plate. A connection armature 144 for each package with sprinkler nozzles 146 is mounted in this area so as not to rotate relative to the shaft 119, so that each package of

  pieces 37 in the form of a plate corresponds to a sufficient number

  sprinkling nozzles 146. In the terminal area

  lower, a rotary connector 130 of a mode of cons-

  truction known is mounted to be able to turn on the

  bre 119 and is connected to the fixed pipe 47 (from the previous example). This path is followed by the cleaning liquid to go to the conduit 120 and to the sprinkler nozzles 146. It is obvious that the conduit 120

is closed from the outside.

  The particular advantage of this embodiment

  tion lies in the fact that since the spray nozzles

  sage 146 are also rotary, the cleaning liquid

  yage can be better distributed over the shaped parts 37

  plate and the cleaning action is improved

liorée.

  Another advantage compared to the pre-

  cendant lies in the shape of the support 29 which makes the inclination of the lower edge of the plates is such that the corner 70 which is near the axis is higher than the corner 69 which is far from the axis. As a result of this arrangement, especially due to the fact that the nozzles

  have a central position, we get a better

  their flow of cleaning liquid on the parts

37 before evacuation.

S9688

Claims (15)

  1 - Liquid cleaning installation,   characterized in that it comprises, in an envelope (11) a rotary support (29) for parts (37) in the form of plates. 2 - Liquid cleaning installation for plate-shaped parts which comprises a casing-shaped envelope, a support which can be placed in the envelope and on which plate-shaped parts can be kept at a certain distance from each other others, an entrance opening, located in the area   of the envelope cover and capable of being closed   mée, by which the support can be engaged from above in the envelope, a holding device, which is located in the envelope and on which the support can be mounted, the plane of the pieces in the form of plates   being substantially vertical, sprinkler nozzles placed   created in the envelope and turned to the pieces,   connection fittings with valves, for the   born from the cleaning liquid to the sprinkler nozzles, and evacuation fittings also comprising valves, in the area of the bottom of the casing, for the evacuation of the cleaning liquid, characterized in that the support ( 29) is mounted so that it can rotate on the holding device inside   the casing (11), its axis of rotation (27) being sensitive   vertically vertical and the plane of the plate-shaped parts (37) being oriented at least approximately in the radial direction with respect to the axis of rotation, and in this   that the installation includes a drive device   ment (24, 26) of the support (29) in place.   3 - Liquid cleaning installation   vant claim 2, characterized in that the sup-   port (29) is designed to receive two packages arranged symmetrically with respect to the axis of rotation (27), each package being formed by several pieces (37) in the form of plates, held parallel to each other   others & a certain distance next to each other   very and in that the plane of the plate-shaped middle part of each package is oriented at least approximately in the radial direction with respect to the axis of rotation.   4 - Liquid cleaning installation   vant one of claims 2 or 3, characterized in that   that the plate-shaped parts (37) can be held on the support (29) so that the lower edge of the plates is inclined relative to the horizontal. - Liquid cleaning installation   vant one of claims 3 or 4, characterized in that   that a package includes about 40 pieces (37) in the form of plates which are located next to each other   at a distance of approximately 10 m from each other.   6 - Liquid cleaning installation   vant one of claims 1 to 5, characterized in that   that the holding device comprises a shaft (19) mounted so as to be able to rotate in the bottom region (17) of the casing and one end of which is oriented vertically in the direction of the cover (12) of the envelope, the support (29) being able to be placed, by a saddle device (31) on this end (28).   7 - Liquid cleaning installation   vant claim 6, characterized in that the shaft (1.9) through its bottom end through the bottom (17) of the envelope and, therefore, is connected to a device drive (24, 26).   8 - Liquid cleaning installation   vant claim 7, characterized in that a joint located between the bottom of the envelope (17, 21) and the shaft   (19, 23) is a labyrinth seal ring.   9 - Liquid cleaning installation   vant claim 6, characterized in that the sup-   port (29) comprises two first support arms (32,33) fixed on the saddle device (31) so as to be symmetrical with respect to the axis of rotation (27) and   to form an acute angle with this axis and comprising each   at each end, a second support arm (34, 36), oriented at right angles to them in the radial direction, and in that the support arms include holding elements (38) for the parts (37 ) in form of plates.   - Liquid cleaning installation   before claim 9, characterized in that the device   positive to saddle (31) extends upwards in the direction of the axis of rotation (27) and comprises at its end gripping pins (43) arranged in the radial direction.   11 - Liquid cleaning installation which   vant claim 9, characterized in that the lon-   and the method of mounting the first support arms (32, 33) is determined so that when the pieces (37) in the form of plates placed are   of the largest format that can be processed, the   positive to saddle (31) is in a plane which corresponds to the upper edge of the plates, the parts (37) bearing, by the lower edge of the plates,   in the plane of the second support arm (34, 36).   12 - Liquid cleaning installation   vant one of claims 1 to 11, characterized in   what it includes a control installation (56) designed to adjust the spray pressure of the spray nozzles (46) and the angular speed of the device drive (26).   13 - Liquid cleaning installation   before claim 12, characterized in that the device   control unit (56) is designed to open the ar-   mature valves (49) ensuring the supply of cleaning liquid in the event of stopping or slowing down the rotation of the support (29) to increase the rotation speed, after a determined watering duration,   up to the final centrifugation speed, the arma-   valve tures (49) being closed at the latest when   the final centrifugation speed is reached.   14 - Liquid cleaning installation   before claim 13, characterized in that in   the interval preceding the time when the speed of cent   final trifugation is reached other reinforcements of   valves (48) are opened by the device   nozzle (56) for supplying a heated cleaning liquid to the spray nozzles (46), while   the cold cleaning liquid supply is stopped.   - Liquid cleaning installation   vant claim 13, characterized in that, in the area located under the cover (12) of the envelope, it also comprises air nozzles which are connected to connection fittings (57) comprising valves for the supply heated air, these fittings being opened by the control device (56) at least before stopping operation when the speed of rotation is that of the final centrifugation.   16 - Liquid cleaning installation   vant one of claims 1 to 15, characterized in   which it comprises at least two discharge fittings provided with valves (61, 62, 63, 64) for orienting the   circulation of cleaning fluid containing impurities-   taking into account the mode of disposal of waste water.   17 - Liquid cleaning installation which   vant claim 2, characterized in that the bu-   its projection (146) are oriented in the direction ra-   dial to the plate-shaped parts (37) and rotate with them.   18 - Liquid cleaning installation   vant claims 6 and 17, characterized in that   the shaft (119) comprises a conduit (120) which starts from the lower end part outside the bottom (17) of the envelope and goes to the area of the plate-shaped parts (37), what the sprinkler nozzles (146)   are mounted on the shaft (119) so as not to   see turn relative to it and are connected to the con-   duit (120) and in that in its lower end part   the shaft (119) carries a pivoting connection (130)   to which a fixed pipe (47) can be connected   ensuring the supply of cleaning fluid.   19 - Liquid cleaning installation   before claim 4, characterized in that the in-   clinching of the lower edge of the shaped parts (37)   plate is determined by the support (29) of such ma-   niere that the corner (70) located closest to the axis is higher than the corner (69) which is farthest from the axis.