FI894010A - Foerfarande foer kontrollering av en tillvaextprocess foer en med fosfor dopad kiseldioxidfilm. - Google Patents

Foerfarande foer kontrollering av en tillvaextprocess foer en med fosfor dopad kiseldioxidfilm. Download PDF

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Publication number
FI894010A
FI894010A FI894010A FI894010A FI894010A FI 894010 A FI894010 A FI 894010A FI 894010 A FI894010 A FI 894010A FI 894010 A FI894010 A FI 894010A FI 894010 A FI894010 A FI 894010A
Authority
FI
Finland
Prior art keywords
foer
tillvaextprocess
kiseldioxidfilm
dopad
fosfor
Prior art date
Application number
FI894010A
Other languages
English (en)
Other versions
FI894010A0 (fi
Inventor
Markku Tammenmaa
Original Assignee
Micronas Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronas Oy filed Critical Micronas Oy
Priority to FI894010A priority Critical patent/FI894010A/fi
Publication of FI894010A0 publication Critical patent/FI894010A0/fi
Priority to EP19900309320 priority patent/EP0414562A3/en
Publication of FI894010A publication Critical patent/FI894010A/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FI894010A 1989-08-25 1989-08-25 Foerfarande foer kontrollering av en tillvaextprocess foer en med fosfor dopad kiseldioxidfilm. FI894010A (fi)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI894010A FI894010A (fi) 1989-08-25 1989-08-25 Foerfarande foer kontrollering av en tillvaextprocess foer en med fosfor dopad kiseldioxidfilm.
EP19900309320 EP0414562A3 (en) 1989-08-25 1990-08-24 A method of monitoring a process of growing a film of silicon dioxide doped with phosphorus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI894010A FI894010A (fi) 1989-08-25 1989-08-25 Foerfarande foer kontrollering av en tillvaextprocess foer en med fosfor dopad kiseldioxidfilm.

Publications (2)

Publication Number Publication Date
FI894010A0 FI894010A0 (fi) 1989-08-25
FI894010A true FI894010A (fi) 1991-02-26

Family

ID=8528891

Family Applications (1)

Application Number Title Priority Date Filing Date
FI894010A FI894010A (fi) 1989-08-25 1989-08-25 Foerfarande foer kontrollering av en tillvaextprocess foer en med fosfor dopad kiseldioxidfilm.

Country Status (2)

Country Link
EP (1) EP0414562A3 (fi)
FI (1) FI894010A (fi)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2199110C2 (ru) * 1997-04-24 2003-02-20 Баранов Александр Михайлович Способ контроля параметров пленочных покрытий и поверхностей в процессе их изменения и устройство его осуществления
RU2180439C2 (ru) 2000-02-11 2002-03-10 Кумахов Мурадин Абубекирович Способ получения изображения внутренней структуры объекта с использованием рентгеновского излучения и устройство для его осуществления
EP2666544B1 (en) * 2012-05-24 2017-11-01 Vito NV Process for deposition and characterization of a coating
CN103472080A (zh) * 2013-09-02 2013-12-25 贵州天义电器有限责任公司 一种锌白铜的无氰化分析测定方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2716689A1 (de) * 1977-04-15 1978-10-19 Ibm Deutschland Herstellung von eichstandards fuer die roentgenfluoreszenzanalyse

Also Published As

Publication number Publication date
EP0414562A2 (en) 1991-02-27
FI894010A0 (fi) 1989-08-25
EP0414562A3 (en) 1991-07-24

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Legal Events

Date Code Title Description
FD Application lapsed

Owner name: MICRONAS OY