EP0931624A3 - Surface polishing apparatus with upper surface plate elevating mechanism - Google Patents

Surface polishing apparatus with upper surface plate elevating mechanism Download PDF

Info

Publication number
EP0931624A3
EP0931624A3 EP99300410A EP99300410A EP0931624A3 EP 0931624 A3 EP0931624 A3 EP 0931624A3 EP 99300410 A EP99300410 A EP 99300410A EP 99300410 A EP99300410 A EP 99300410A EP 0931624 A3 EP0931624 A3 EP 0931624A3
Authority
EP
European Patent Office
Prior art keywords
surface plate
elevating mechanism
polishing apparatus
plate elevating
stop
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99300410A
Other languages
German (de)
French (fr)
Other versions
EP0931624A2 (en
Inventor
Shiro Furusawa
Kichihiro Chujo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Publication of EP0931624A2 publication Critical patent/EP0931624A2/en
Publication of EP0931624A3 publication Critical patent/EP0931624A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

A surface polishing apparatus is provided with an upper surface plate elevating mechanism that can use a small elevating mechanism to simply and accurately raise and lower an upper surface plate 3 and stop it at a specified position even if the total weight of the upper surface plate, including associated equipment, is large. A plurality of air cylinders 15 constantly support part of the load of the upper surface plate assembly 3A, which includes the upper surface plate 3 and a surface plate supporting frame 5. A servo motor 16 is used to raise and lower the upper surface plate assembly 3A and to stop it at a specified position.
EP99300410A 1998-01-22 1999-01-20 Surface polishing apparatus with upper surface plate elevating mechanism Withdrawn EP0931624A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2509498A JPH11207608A (en) 1998-01-22 1998-01-22 Upper surface plate elevating and lowering mechanism in surface grinding device
JP2509498 1998-01-22

Publications (2)

Publication Number Publication Date
EP0931624A2 EP0931624A2 (en) 1999-07-28
EP0931624A3 true EP0931624A3 (en) 2000-11-08

Family

ID=12156351

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99300410A Withdrawn EP0931624A3 (en) 1998-01-22 1999-01-20 Surface polishing apparatus with upper surface plate elevating mechanism

Country Status (2)

Country Link
EP (1) EP0931624A3 (en)
JP (1) JPH11207608A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106406032A (en) * 2015-07-29 2017-02-15 上海微电子装备有限公司 Six-freedom-degree adjustment apparatus of heavy-duty substrate table

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101572103B1 (en) 2014-09-11 2015-12-04 주식회사 엘지실트론 An apparatus for polishing a wafer
CN111037385A (en) * 2019-12-26 2020-04-21 涡阳县幸福门业有限公司 Timber sand light soot blower
CN114888717A (en) * 2022-04-17 2022-08-12 北京特思迪设备制造有限公司 Lifting support device for outer ring of grinding machine

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2603041A (en) * 1945-09-27 1952-07-15 Alfred J Bowen Surface grinder
US5036625A (en) * 1988-12-07 1991-08-06 Anatoly Gosis Lapping plate for a lapping and polishing machine
US5317837A (en) * 1988-04-07 1994-06-07 Staehli Arthur W Device on a double disk lapping machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2603041A (en) * 1945-09-27 1952-07-15 Alfred J Bowen Surface grinder
US5317837A (en) * 1988-04-07 1994-06-07 Staehli Arthur W Device on a double disk lapping machine
US5036625A (en) * 1988-12-07 1991-08-06 Anatoly Gosis Lapping plate for a lapping and polishing machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106406032A (en) * 2015-07-29 2017-02-15 上海微电子装备有限公司 Six-freedom-degree adjustment apparatus of heavy-duty substrate table
CN106406032B (en) * 2015-07-29 2018-03-30 上海微电子装备（集团）股份有限公司 A kind of six degree of freedom adjusting apparatus of heavily loaded Substrate table

Also Published As

Publication number Publication date
JPH11207608A (en) 1999-08-03
EP0931624A2 (en) 1999-07-28

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