CN206756681U - Laser ultrasonic detection system and galvanometer scanning device - Google Patents

Laser ultrasonic detection system and galvanometer scanning device Download PDF

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Publication number
CN206756681U
CN206756681U CN201720390393.0U CN201720390393U CN206756681U CN 206756681 U CN206756681 U CN 206756681U CN 201720390393 U CN201720390393 U CN 201720390393U CN 206756681 U CN206756681 U CN 206756681U
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China
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laser
bottom plate
galvanometer
transverse bottom
workpiece
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CN201720390393.0U
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Inventor
马健
陈建伟
赵扬
刘帅
南钢洋
宋江峰
郭锐
王启武
张振振
孙继华
周英丽
巨阳
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Jining high tech Keda Technology Project Service Co.,Ltd.
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Laser Institute of Shandong Academy of Science
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Abstract

The utility model provides a kind of laser ultrasonic detection system and galvanometer scanning device, is related to laser-ultrasound technical field of nondestructive testing.The system includes apparatus for adjusting position, laser generator, galvanometer scanning device, supersonic sounding device and industrial computer.Laser generator, galvanometer scanning device are respectively arranged on apparatus for adjusting position.Supersonic sounding device is connected with apparatus for adjusting position.Industrial computer electrically connects with laser generator, galvanometer scanning device, the supersonic sounding device respectively.Industrial computer is used to send laser trigger signal to laser generator, so that laser generator exports laser, and send control signal to galvanometer scanning device so that galvanometer scanning device is received laser and controls the movement locus of laser to be realized with this encourages ultrasonic wave on the workpiece surface to be detected.Detection ultrasonic wave is carried out by supersonic sounding device again, the contactless quick detection of workpiece to be detected is realized with this.

Description

Laser ultrasonic detection system and galvanometer scanning device
Technical field
Laser-ultrasound technical field of nondestructive testing is the utility model is related to, in particular to a kind of laser ultrasonic detection System and galvanometer scanning device.
Background technology
The metal works of laser-ultrasound the cannot-harm-detection device detection at present, but there is some shortcomings.Swash for example with laser Encourage-mode of laser pick-off carries out the ultrasound examination of metal works, but for ultrasound signal receipt interferometer easily by Environmental disturbances and cost is higher;Ultrasonic signal is received using Air Coupling surface wave probe, realizes the method for rapidly positioning of defect, But Air Coupling decay is excessive, and applicable frequency range only up to act in 1MHz, and operating distance is short, narrow bandwidth;Profit Scanning is realized in the position for changing electromagnetic ultrasonic probe with three-dimensional machinery step device, and stepper motor can then make an uproar to what measurement was brought Sound.For realizing the relative motion between hot spot and electromagnetic ultrasonic probe, in flexibility, speed etc., all there is lack Fall into.
Utility model content
The purpose of this utility model is to provide a kind of laser ultrasonic detection system and galvanometer scanning device, and it can change Kind above mentioned problem.To achieve these goals, the technical scheme that the utility model is taken is as follows:
In a first aspect, the utility model embodiment provides a kind of laser ultrasonic detection system, including apparatus for adjusting position, Laser generator, galvanometer scanning device, supersonic sounding device and industrial computer.The laser generator, the galvanometer Scanning means is respectively arranged on the apparatus for adjusting position.The supersonic sounding device connects with the apparatus for adjusting position Connect.The industrial computer is electrically connected with the laser generator, the galvanometer scanning device, the supersonic sounding device respectively Connect.The apparatus for adjusting position is used for the horizontal level and height for adjusting the laser generator and the galvanometer scanning device Degree so that workpiece to be detected is in the scanning area of the galvanometer scanning device.The industrial computer is used to produce to the laser Generating apparatus sends laser trigger signal so that the laser generator exports laser, and is sent out to the galvanometer scanning device Send control signal so that the galvanometer scanning device is received the laser and controls the movement locus of the laser to be realized with this Ultrasonic wave is encouraged on the workpiece surface to be detected, and then scans the workpiece to be detected.The supersonic sounding device is used for The ultrasonic wave is obtained, and is that electric signal is sent to the industrial computer by the Ultrasonic transformation.The industrial computer is additionally operable to locate The electric signal is managed to obtain the testing result of the workpiece to be detected.
In the utility model preferred embodiment, above-mentioned galvanometer scanning device includes scanning galvanometer and laser ranging senses Device.The scanning galvanometer be installed on the apparatus for adjusting position and with the industry control mechatronics.The laser ranging sensing Device is arranged on the first surface of the scanning galvanometer.The laser range sensor be used for measure the scanning galvanometer with it is described The distance between workpiece to be detected, the positioning of the scanning galvanometer is realized with this.The scanning galvanometer is used to receive the laser And control the movement locus of the laser to be realized with this and ultrasonic wave is encouraged on the workpiece surface to be detected, and then described in scanning Workpiece to be detected.
In the utility model preferred embodiment, above-mentioned supersonic sounding device includes photodiode, electromagnetic acoustic Probe, clamping device and data acquisition module.The clamping device includes first support, vertical with the first support connected The second support for connecing and being parallel to each other and the 3rd support.The first support is connected with the apparatus for adjusting position.It is described photosensitive Diode is arranged in the second support.The electromagnetic ultrasonic probe is arranged on the 3rd support, is realized with this described Electromagnetic ultrasonic probe and the workpiece to be detected are non-contact.The data acquisition module respectively with the photodiode, described Electromagnetic ultrasonic probe, the industry control mechatronics.The photodiode is used to provide triggering letter to the data acquisition module Number.The data acquisition module is used under the trigger signal, obtains the ultrasonic wave that the electromagnetic ultrasonic probe detects, and It is that electric signal is sent to the industrial computer by the Ultrasonic transformation.
In the utility model preferred embodiment, above-mentioned data acquisition module include microprocessor and with the microprocessor The mixed-media network modules mixed-media of device electrical connection.The data acquisition module is connected by the mixed-media network modules mixed-media with the industrial computer communication.
In the utility model preferred embodiment, above-mentioned laser generator includes laser and laser control mould Block.The laser is installed on the apparatus for adjusting position.The laser control module respectively with the laser, described Industry control mechatronics.The laser control module is used to receive described in the laser trigger signal that the industrial computer is sent and control Laser exports laser.
In the utility model preferred embodiment, above-mentioned apparatus for adjusting position includes base, elevating mechanism and horizontal fortune Motivation structure.The base includes the first transverse bottom plate, the second transverse bottom plate and multiple support columns.First transverse bottom plate is led to Cross the multiple support column and be connected to second transverse bottom plate, and be in be oppositely arranged.The elevating mechanism includes the 3rd laterally Bottom plate, the first handwheel, turbine screw component, multiple vertical guides and the multiple methods for being sheathed on the multiple vertical guide one by one Blue linear bearing.Second transverse bottom plate is flexibly connected with the 3rd transverse bottom plate by the multiple vertical guide.Institute The first surface for stating the second transverse bottom plate is provided with through hole.The turbine screw component includes turbine and turbine screw mandrel.The whirlpool Wheel is arranged at one end of the turbine screw mandrel.The turbine is connected with first handwheel.The turbine screw mandrel passes through described logical Hole respectively with second transverse bottom plate, the 3rd transverse bottom plate vertical connection.When rotating first handwheel, the whirlpool The axial direction that wheel screw mandrel drives the 3rd transverse bottom plate to prolong the turbine screw mandrel moves up and down.The horicontal motion mechanism Including the second handwheel, ball screw assembly, two cylindrical linear rail pairs, the 4th transverse bottom plate.Described two cylindrical linear rails Pair is in be relatively arranged on the first surface of the 3rd transverse bottom plate.The ball screw assembly, includes ball-screw and is sheathed on Nut on the ball screw.The ball-screw is arranged on the first surface of the 3rd transverse bottom plate and with described two The secondary axial direction of individual cylindrical linear rail is parallel.Second handwheel is arranged at one end of the ball-screw.Described 4th Transverse bottom plate is flexibly connected by the nut with the ball screw assembly,.When rotating second handwheel, the ball wire The axial direction that thick stick drives the 4th transverse bottom plate to prolong the ball-screw moves horizontally.
In the utility model preferred embodiment, above-mentioned base also includes multiple rollers.Each roller is arranged at One end away from second transverse bottom plate on each support column.
In the utility model preferred embodiment, above-mentioned base also includes multiple feet screws, each feet spiral shell Nail is arranged in first transverse bottom plate.
In the utility model preferred embodiment, above-mentioned laser ultrasonic detection system also includes display, the display Device and the industry control mechatronics, the display are used for the testing result for showing the workpiece to be detected.
Second aspect, the utility model embodiment provide a kind of galvanometer scanning device, including scanning galvanometer and Laser Measuring Away from sensor.The laser range sensor is arranged on the first surface of the scanning galvanometer.The laser range sensor For measuring the distance between the scanning galvanometer and workpiece to be detected, the positioning of the scanning galvanometer is realized with this.
A kind of laser ultrasonic detection system and galvanometer scanning device that the utility model embodiment provides, the system bag Include apparatus for adjusting position, laser generator, galvanometer scanning device, supersonic sounding device and industrial computer.The laser production Generating apparatus, the galvanometer scanning device are respectively arranged on the apparatus for adjusting position.The supersonic sounding device with it is described Apparatus for adjusting position connects.The industrial computer respectively with the laser generator, the galvanometer scanning device, the ultrasonic wave Detection device electrically connects.The apparatus for adjusting position is used for the water for adjusting the laser generator and the galvanometer scanning device Prosposition is put and height so that workpiece to be detected is in the scanning area of the galvanometer scanning device.The industrial computer be used for The laser generator sends laser trigger signal so that and the laser generator exports laser, and to the galvanometer Scanning means sends control signal so that the galvanometer scanning device receives the laser and controls the movement locus of the laser Realized with this and ultrasonic wave is encouraged on the workpiece surface to be detected, and then scan the workpiece to be detected.The ultrasonic wave is visited Survey device to be used to obtain the ultrasonic wave, and be that electric signal is sent to the industrial computer by the Ultrasonic transformation.The industry control Machine is additionally operable to handle the electric signal to obtain the testing result of the workpiece to be detected.Realized by galvanometer scanning device to be checked Survey the ultrasonic exciting of diverse location and supersonic sounding device on workpiece and carry out detection ultrasonic wave, work to be detected is realized with this The contactless quick detection of part.
Brief description of the drawings
, below will be to required use in embodiment in order to illustrate more clearly of the technical scheme of the utility model embodiment Accompanying drawing be briefly described, it will be appreciated that the following drawings illustrate only some embodiments of the present utility model, therefore should not be by Regard the restriction to scope as, for those of ordinary skill in the art, on the premise of not paying creative work, may be used also To obtain other related accompanying drawings according to these accompanying drawings.
Fig. 1 is the structured flowchart for the laser ultrasonic detection system that the utility model first embodiment provides;
Fig. 2 is the structure chart for the laser ultrasonic detection system that the utility model first embodiment provides;
Fig. 3 is the application environment for the laser ultrasonic detection system that the utility model first embodiment provides;
Fig. 4 is the structured flowchart for the galvanometer scanning device that the utility model second embodiment provides.
In figure:10- laser ultrasonic detection systems;20- apparatus for adjusting position;200- bases;The transverse bottom plates of 201- first; The transverse bottom plates of 202- second;202a- through holes;203- support columns;204- rollers;205- feet screws;210- elevating mechanisms;211- 3rd transverse bottom plate;The handwheels of 212- first;213- turbine screw components;213a- turbines;213b- turbine screw mandrels;214- is vertically led Rail;215- flange linear bearings;220- horicontal motion mechanisms;The handwheels of 221- second;222- ball screw assembly,s;223- cylinder straight lines Guideway;The transverse bottom plates of 224- the 4th;30- laser generators;31- lasers;32- laser control modules;40- galvanometers are swept Imaging apparatus;41- scanning galvanometers;42- laser range sensors;50- supersonic sounding devices;51- photodiodes;52- electromagnetism Ultrasonic probe;53- clamping devices;53a- first supports;53b- second supports;The supports of 53c- the 3rd;54- data acquisition modules; 55- metal works;60- industrial computers;61- displays;The wires of 70- first;The wires of 71- second;72- privates;73- the 4th is led Line;The wires of 74- the 5th.
Embodiment
It is new below in conjunction with this practicality to make the purpose, technical scheme and advantage of the utility model embodiment clearer Accompanying drawing in type embodiment, the technical scheme in the embodiment of the utility model is clearly and completely described, it is clear that is retouched The embodiment stated is the utility model part of the embodiment, rather than whole embodiments.Generally here described in accompanying drawing and The component of the utility model embodiment shown can be configured to arrange and design with a variety of.
Therefore, the detailed description of the embodiment of the present utility model to providing in the accompanying drawings is not intended to limit requirement below The scope of the utility model of protection, but it is merely representative of selected embodiment of the present utility model.Based in the utility model Embodiment, the every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all Belong to the scope of the utility model protection.
It should be noted that:Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi It is defined, then it further need not be defined and explained in subsequent accompanying drawing in individual accompanying drawing.
In description of the present utility model, it is necessary to explanation, term " on ", " vertical ", " level ", the instruction such as " interior " Orientation or position relationship are based on orientation shown in the drawings or position relationship, or are usually put during the utility model product use The orientation or position relationship put, it is for only for ease of description the utility model and simplifies description, rather than indicates or imply and be signified Device or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this practicality New limitation.In addition, term " first ", " second ", " the 3rd " etc. are only used for distinguishing description, and it is not intended that instruction or dark Show relative importance.
In addition, the term such as term " level ", " vertical " is not offered as requiring part abswolute level or pendency, but can be slightly Low dip.Such as " level " only refers to that its direction is more horizontal with respect to for " vertical ", is not to represent that the structure must be complete It is complete horizontal, but can be slightly tilted.
In description of the present utility model, it is also necessary to which explanation, unless otherwise clearly defined and limited, term " are set Put ", " installation ", " connection " should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integratedly Connection;Can be mechanical connection or electrical connection;Can be joined directly together, can also be indirectly connected by intermediary, It can be the connection of two element internals.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition Concrete meaning of the language in the utility model.
First embodiment
Referring to Fig. 1, the present embodiment provides a kind of laser ultrasonic detection system 10, it includes apparatus for adjusting position 20, swashed Light generating device 30, galvanometer scanning device 40, supersonic sounding device 50 and industrial computer 60.The laser generator 30, The galvanometer scanning device 40 is respectively arranged on the apparatus for adjusting position 20.The supersonic sounding device 50 and institute's rheme Adjusting means 20 is put to connect.The industrial computer 60 respectively with the laser generator 30, galvanometer scanning device 40, described Supersonic sounding device 50 electrically connects.
The apparatus for adjusting position 20 is used for the water for adjusting the laser generator 30 and the galvanometer scanning device 40 Prosposition is put and height so that workpiece to be detected is in the scanning area of the galvanometer scanning device 40.
The industrial computer 60 is used to send laser trigger signal to the laser generator 30 so that the laser produces Device 30 exports laser, and sends control signal to the galvanometer scanning device 40 so that the galvanometer scanning device 40 connects Receive the laser and control the movement locus of the laser to be realized with this and encourage ultrasonic wave on the workpiece surface to be detected, enter And scan the workpiece to be detected.
The supersonic sounding device 50 is used to obtain the ultrasonic wave, and the Ultrasonic transformation is sent for electric signal To the industrial computer 60.
The industrial computer 60 is additionally operable to handle the electric signal to obtain the testing result of the workpiece to be detected.
Referring to Fig. 2, the utility model provides a kind of laser ultrasonic detection system 10.The industrial computer 60 respectively with institute Laser generator 30 is stated to electrically connect by the first wire 70, be electrically connected by the second wire 71 with the galvanometer scanning device 40 Connect, electrically connected with the supersonic sounding device 50 by privates 72.
Laser generator 30 includes laser 31 and laser control module 32.The laser 31 is installed on institute's rheme Put in adjusting means 20.The laser control module 32 electrically connects with the laser 31, the industrial computer 60 respectively.It is described Laser control module 32 is used to receive the laser trigger signal that the industrial computer 60 is sent and controls the laser 31 to export Laser.
As a kind of embodiment, the laser 31 can be pulse laser.Preferably, the laser 31 can be with For Nd:YAG laser.Nd:YAG is writing a Chinese character in simplified form for Neodymium-doped Yttrium Aluminium Garnet, referred to as yttrium Aluminum carbuncle crystal.Yag crystal is its activated material, and the Nd atom contents in crystal are 0.6~1.1%, belong to solid Laser, can excitation pulse laser or continous way laser, the laser of transmitting is 1.064 μm of IR wavelength.Correspondingly, the laser Device control module 32 is pulse laser cooling and control system.
The galvanometer scanning device 40 includes scanning galvanometer 41 and laser range sensor 42.The scanning galvanometer 41 is installed Electrically connected in the apparatus for adjusting position 20 and with the industrial computer 60.The laser range sensor 42 is arranged at the scanning On the first surface of galvanometer 41.The laser range sensor 42 is used to measure between the scanning galvanometer 41 and workpiece to be detected Distance, the positioning of the scanning galvanometer 41 is realized with this.The scanning galvanometer 41 is used to receive described in the laser and control The movement locus of laser is realized with this encourages ultrasonic wave on the workpiece surface to be detected, and then scans the work to be detected Part.
In the present embodiment, the LE8618 of the model Wuhan Li Er Science and Technology Ltd.s of scanning galvanometer 41, x eyeglasses, y mirrors The visual angle of piece is that the focal length of ± 20, F-theta scanning lenses is 900mm, and its depth of field is ± 3mm.Laser range sensor 42 is Model ZX1-LD600A61 Omron laser range sensor, for measuring the distance between workpiece to be detected, to realize The fast positioning of scanning galvanometer 41.
Supersonic sounding device 50 is adopted including photodiode 51, electromagnetic ultrasonic probe 52, clamping device 53 and data Collect module 54.The clamping device 53 includes first support 53a, with the first support 53a vertical connections and being parallel to each other Second support 53b and the 3rd support 53c.The first support 53a is connected with the apparatus for adjusting position 20.Described photosensitive two Pole pipe 51 is arranged on the second support 53b.The electromagnetic ultrasonic probe 52 is arranged on the 3rd support 53c, with this Realize that the electromagnetic ultrasonic probe 52 and the workpiece to be detected are non-contact.The data acquisition module 54 respectively with it is described photosensitive Diode 51, the electromagnetic ultrasonic probe 52, the industrial computer 60 electrically connect.The data acquisition module 54 respectively with the light Quick diode 51 is electrically connected by privates 73, electrically connected with the electromagnetic ultrasonic probe 52 by the 5th wire 74.
The photodiode 51 is used to provide trigger signal to the data acquisition module 54.The data acquisition module 54 are used under the trigger signal, obtain the ultrasonic wave that the electromagnetic ultrasonic probe 52 detects, and the ultrasonic wave is turned Electric signal is turned to send to the industrial computer 60.
Data acquisition module 54 includes microprocessor and the mixed-media network modules mixed-media electrically connected with the microprocessor.The data are adopted Collect module 54 to connect by the mixed-media network modules mixed-media and the industrial computer 60 communication.
In the present embodiment, data acquisition module 54 uses " ARM+FPGA " framework, and height is respectively adopted in wherein ARM, FPGA Performance S3C6410, Cyclone technical grade series of products are designed, and index is 14 sampling precisions, and sampled point number is 16384, sample frequency 80M, the sampling time length of useful signal is 200us, is entered by 100M network interfaces and industrial computer 60 Row communication.The industrial computer 60 refers to that model IPC-610H's grinds magnificent industrial computer., can be right using the software in industrial computer 60 Ultrasonic signal is analyzed and processed, and such as filtering process and defect location, is finally realized contactless in workpiece to be detected Non-Destructive Testing.
Referring to Fig. 2, for expanded sweep region, apparatus for adjusting position 20 includes base 200, elevating mechanism 210 and water Flat motion 220.The base 200 includes the first transverse bottom plate 201, the second transverse bottom plate 202 and multiple support columns 203.First transverse bottom plate 201 is connected to second transverse bottom plate 202 by the multiple support column 203, and is in phase To setting.
The elevating mechanism 210 includes the 3rd transverse bottom plate 211, the first handwheel 212, turbine screw component 213, multiple perpendicular Direction guiding rail 214 and the multiple flange linear bearings 215 for being sheathed on the multiple vertical guide 214 one by one.Described second laterally Bottom plate 202 is flexibly connected with the 3rd transverse bottom plate 211 by the multiple vertical guide 214.First transverse bottom plate 201st, the second transverse bottom plate 202, the 3rd transverse bottom plate 211 are parallel to each other.Second transverse bottom plate 202 and the first support 53a connections.The first surface of second transverse bottom plate 202 is provided with through hole 202a.The turbine screw component 213 includes whirlpool Take turns 213a and turbine screw mandrel 213b.The turbine 213a is arranged at one end of the turbine screw mandrel 213b.The turbine 213a with First handwheel 212 connects.The turbine screw mandrel 213b by the through hole 202a respectively with second transverse bottom plate 202nd, the vertical connection of the 3rd transverse bottom plate 211.When rotating first handwheel 212, the turbine screw mandrel 213b drivings The axial direction that 3rd transverse bottom plate 211 prolongs the turbine screw mandrel 213b moves up and down, i.e., lifts along the y-axis direction Guide effect is played in motion, multiple vertical guides 214 and the combination of multiple flange linear bearings 215.
The horicontal motion mechanism 220 includes 222, two the second handwheel 221, ball screw assembly, cylindrical linear rail pairs 223rd, the 4th transverse bottom plate 224.Described two cylindrical linear rail pairs 223 are in be relatively arranged on the 3rd transverse bottom plate 211 First surface on.The ball screw assembly, 222 includes ball-screw and the nut being sheathed on the ball screw.The rolling Ballscrew be arranged on the first surface of the 3rd transverse bottom plate 211 and with the axle of described two cylindrical linear rail pairs 223 It is parallel to direction.Second handwheel 221 is arranged at one end of the ball-screw.4th transverse bottom plate 224 passes through institute Nut is stated to be flexibly connected with the ball screw assembly, 222.When rotating second handwheel 221, the ball-screw drives institute State the 4th transverse bottom plate 224 and prolong the axial direction of the ball-screw and move horizontally, i.e., move horizontally along the x-axis direction, Two cylindrical linear rail pairs 223 play guide effect.
For the ease of the movement and positioning of apparatus for adjusting position 20, base 200 also includes multiple rollers 204.It is each described Roller 204 is arranged at one end away from second transverse bottom plate 202 on each support column 203.Base 200 also includes more Individual feet screw 205, each feet screw 205 are arranged in first transverse bottom plate 201.Realize that large scale is treated with this Detect the detection of workpiece.
Laser ultrasonic detection system 10 also includes display 61.The display 61 electrically connects with the industrial computer 60.Institute State the testing result that display 61 is used to show the workpiece to be detected.
Fig. 3 is refer to, the utility model embodiment provides a kind of application environment of laser ultrasonic detection system 10, to be checked Survey workpiece is metal works 55.Metal works 55 are fixed on a position, close to electromagnetic ultrasonic probe 52 so that metal works 55 Face to be detected be in x/y plane, adjust the He of laser generator 30 using elevating mechanism 210 and horicontal motion mechanism 220 The height (y directions) and horizontal level (x directions) of the galvanometer scanning device 40 so that metal works 55 are in the galvanometer and swept In the scanning area of imaging apparatus 40, to carry out further contactless Non-Destructive Testing.
The operation principle for the laser ultrasonic detection system 10 that the utility model embodiment provides is as follows:
The laser generator 30 and the vibration mirror scanning are adjusted using elevating mechanism 210 and horicontal motion mechanism 220 The height (y directions) and horizontal level (x directions) of device 40 so that workpiece to be detected is in sweeping for the galvanometer scanning device 40 Retouch in region.The industrial computer 60 sends laser trigger signal to the laser control module 32 so that the laser 31 Laser is exported, and control signal is sent to the galvanometer scanning device 40 so that the galvanometer scanning device 40 receives described Laser simultaneously controls the movement locus of the laser to realize with this to encourage ultrasonic wave on the workpiece surface to be detected, and then scans The workpiece to be detected.
The photodiode 51 provides trigger signal to the data acquisition module 54, and the data acquisition module 54 exists Under the trigger signal, the ultrasonic wave that the electromagnetic ultrasonic probe 52 detects is obtained, and is telecommunications by the Ultrasonic transformation Number send to the industrial computer 60.The industrial computer 60 also handles the electric signal to obtain the detection knot of the workpiece to be detected Fruit, to realize the contactless Non-Destructive Testing of workpiece to be detected.
A kind of laser ultrasonic detection system 10 that the utility model embodiment provides, realized and treated by galvanometer scanning device 40 Detect the ultrasonic exciting of diverse location and supersonic sounding device 50 on workpiece and carry out the contactless of defect diffracted signal Receive, the contactless quick detection of workpiece to be detected is realized with this.
Second embodiment
Fig. 2 and Fig. 4 are please referred to, the utility model embodiment provides a kind of galvanometer scanning device 40, the galvanometer Scanning means 40 includes scanning galvanometer 41 and laser range sensor 42.The laser range sensor 42 is arranged at the scanning On the first surface of galvanometer 41.The laser range sensor 42 is used to measure between the scanning galvanometer 41 and workpiece to be detected Distance, the positioning of the scanning galvanometer 41 is realized with this.
As a kind of embodiment, the laser range sensor 42 can also be arranged at the housing of the scanning galvanometer 41 It is internal.
A kind of galvanometer scanning device 40 that the utility model embodiment provides, including scanning galvanometer 41 and laser ranging sensing Device 42.The laser range sensor 42 is arranged on the first surface of the scanning galvanometer 41.The laser range sensor 42 are used to measure the distance between the scanning galvanometer 41 and workpiece to be detected, and the positioning of the scanning galvanometer 41 is realized with this.
Preferred embodiment of the present utility model is the foregoing is only, is not limited to the utility model, for this For the technical staff in field, the utility model can have various modifications and variations.It is all in the spirit and principles of the utility model Within, any modification, equivalent substitution and improvements made etc., it should be included within the scope of protection of the utility model.

Claims (10)

1. a kind of laser ultrasonic detection system, it is characterised in that including apparatus for adjusting position, laser generator, vibration mirror scanning Device, supersonic sounding device and industrial computer, the laser generator, the galvanometer scanning device are respectively arranged in described On apparatus for adjusting position, the supersonic sounding device is connected with the apparatus for adjusting position, the industrial computer respectively with it is described Laser generator, the galvanometer scanning device, supersonic sounding device electrical connection;
The apparatus for adjusting position is used for the horizontal level and height for adjusting the laser generator and the galvanometer scanning device Degree so that workpiece to be detected is in the scanning area of the galvanometer scanning device;
The industrial computer is used to send laser trigger signal to the laser generator so that the laser generator output Laser, and send control signal to the galvanometer scanning device so that the galvanometer scanning device receives the laser and controlled The movement locus for making the laser is realized with this ultrasonic wave is encouraged on the workpiece surface to be detected, and then scans described to be checked Survey workpiece;
The supersonic sounding device is used to obtain the ultrasonic wave, and is that electric signal is sent to described by the Ultrasonic transformation Industrial computer;
The industrial computer is additionally operable to handle the electric signal to obtain the testing result of the workpiece to be detected.
2. laser ultrasonic detection system according to claim 1, it is characterised in that the galvanometer scanning device includes scanning Galvanometer and laser range sensor, the scanning galvanometer are installed on the apparatus for adjusting position and are electrically connected with the industrial computer Connect, the laser range sensor is arranged on the first surface of the scanning galvanometer;
The laser range sensor is used to measure the distance between the scanning galvanometer and the workpiece to be detected, is realized with this The positioning of the scanning galvanometer, the scanning galvanometer are used to receive the laser and control the movement locus of the laser with this reality Ultrasonic wave is encouraged on the present workpiece surface to be detected, and then scans the workpiece to be detected.
3. laser ultrasonic detection system according to claim 1, it is characterised in that the supersonic sounding device includes light Quick diode, electromagnetic ultrasonic probe, clamping device and data acquisition module, the clamping device include first support, with The first support vertical connection and the second support being parallel to each other and the 3rd support, the first support and the position adjustments Device is connected, and the photodiode is arranged in the second support, and the electromagnetic ultrasonic probe is arranged at described 3rd On frame, realize that the electromagnetic ultrasonic probe and the workpiece to be detected are non-contact with this, the data acquisition module respectively with institute State photodiode, the electromagnetic ultrasonic probe, the industry control mechatronics;
The photodiode is used to provide trigger signal to the data acquisition module;The data acquisition module is used in institute State under trigger signal, obtain the ultrasonic wave that the electromagnetic ultrasonic probe detects, and the Ultrasonic transformation is sent out for electric signal Deliver to the industrial computer.
4. laser ultrasonic detection system according to claim 3, it is characterised in that the data acquisition module includes micro- place Reason device and the mixed-media network modules mixed-media electrically connected with the microprocessor, the data acquisition module pass through the mixed-media network modules mixed-media and the work The communication connection of control machine.
5. laser ultrasonic detection system according to claim 1, it is characterised in that the laser generator includes laser Device and laser control module, the laser are installed on the apparatus for adjusting position, the laser control module difference With the laser, the industry control mechatronics, the laser control module is used to receive the laser that the industrial computer is sent Trigger signal simultaneously controls the laser output laser.
6. laser ultrasonic detection system according to claim 1, it is characterised in that the apparatus for adjusting position includes bottom Seat, elevating mechanism and horicontal motion mechanism, the base include the first transverse bottom plate, the second transverse bottom plate and multiple supports Post, first transverse bottom plate are connected to second transverse bottom plate by the multiple support column, and are in be oppositely arranged;
It is a set of that the elevating mechanism includes the 3rd transverse bottom plate, the first handwheel, turbine screw component, multiple vertical guides and one Located at multiple flange linear bearings of the multiple vertical guide, second transverse bottom plate passes through with the 3rd transverse bottom plate The multiple vertical guide is flexibly connected, and the first surface of second transverse bottom plate is provided with through hole, the turbine screw mandrel group Part includes turbine and turbine screw mandrel, and the turbine is arranged at one end of the turbine screw mandrel, the turbine and first handwheel Connection, the turbine screw mandrel by the through hole respectively with second transverse bottom plate, the 3rd transverse bottom plate vertical connection, When rotating first handwheel, the turbine screw mandrel driving the 3rd transverse bottom plate prolongs the axial direction of the turbine screw mandrel Move up and down;
The horicontal motion mechanism includes the second handwheel, ball screw assembly, two cylindrical linear rail pairs, the 4th transverse bottom plate, Secondary described two cylindrical linear rails are in be relatively arranged on the first surface of the 3rd transverse bottom plate, the ball screw assembly, Including ball-screw and the nut being sheathed on the ball screw, the ball-screw is arranged at the 3rd transverse bottom plate On first surface and parallel with the axial direction that described two cylindrical linear rails are secondary, second handwheel is arranged at the ball One end of leading screw, the 4th transverse bottom plate are flexibly connected by the nut with the ball screw assembly, when rotating described the During two handwheels, the axial direction that the ball-screw drives the 4th transverse bottom plate to prolong the ball-screw moves horizontally.
7. laser ultrasonic detection system according to claim 6, it is characterised in that the base also includes multiple rollers, Each roller is arranged at one end away from second transverse bottom plate on each support column.
8. laser ultrasonic detection system according to claim 7, it is characterised in that the base also includes multiple feet spiral shells Nail, each feet screw are arranged in first transverse bottom plate.
9. laser ultrasonic detection system according to claim 1, it is characterised in that the laser ultrasonic detection system is also wrapped Display, the display and the industry control mechatronics are included, the display is used for the detection for showing the workpiece to be detected As a result.
10. a kind of galvanometer scanning device, it is characterised in that the galvanometer scanning device includes scanning galvanometer and laser ranging senses Device, the laser range sensor are arranged on the first surface of the scanning galvanometer;The laser range sensor is used to survey The distance between the scanning galvanometer and workpiece to be detected are measured, the positioning of the scanning galvanometer is realized with this.
CN201720390393.0U 2017-04-13 2017-04-13 Laser ultrasonic detection system and galvanometer scanning device Active CN206756681U (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109164111A (en) * 2018-09-28 2019-01-08 东南大学 Based on shared galvanometer SLM in line laser defects detection equipment and method
CN109568810A (en) * 2018-11-23 2019-04-05 中国计量科学研究院 Automatically scanning Water ball system positioning performance measuring device
CN111239243A (en) * 2020-01-20 2020-06-05 南京大学 Nondestructive testing method for longitudinal defects of small-caliber thin-walled tube based on laser ultrasound and circumferential guided wave
CN111288924A (en) * 2020-04-07 2020-06-16 广东电网有限责任公司 Laser ultrasonic detection device and method based on synthetic aperture focusing imaging
CN111855812A (en) * 2020-07-31 2020-10-30 山东省科学院激光研究所 Laser electromagnetic ultrasonic imaging system and method
CN115684024A (en) * 2022-10-25 2023-02-03 北京翔博科技股份有限公司 Laser ultrasound-based residual stress distribution detection method and system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109164111A (en) * 2018-09-28 2019-01-08 东南大学 Based on shared galvanometer SLM in line laser defects detection equipment and method
CN109568810A (en) * 2018-11-23 2019-04-05 中国计量科学研究院 Automatically scanning Water ball system positioning performance measuring device
CN111239243A (en) * 2020-01-20 2020-06-05 南京大学 Nondestructive testing method for longitudinal defects of small-caliber thin-walled tube based on laser ultrasound and circumferential guided wave
CN111288924A (en) * 2020-04-07 2020-06-16 广东电网有限责任公司 Laser ultrasonic detection device and method based on synthetic aperture focusing imaging
CN111855812A (en) * 2020-07-31 2020-10-30 山东省科学院激光研究所 Laser electromagnetic ultrasonic imaging system and method
CN115684024A (en) * 2022-10-25 2023-02-03 北京翔博科技股份有限公司 Laser ultrasound-based residual stress distribution detection method and system
CN115684024B (en) * 2022-10-25 2023-08-08 北京翔博科技股份有限公司 Residual stress distribution detection method and system based on laser ultrasound

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