CN111855812A - Laser electromagnetic ultrasonic imaging system and method - Google Patents
Laser electromagnetic ultrasonic imaging system and method Download PDFInfo
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Abstract
The application discloses laser electromagnetic ultrasonic imaging system and method, and the system comprises: a pulsed laser controller; the pulse laser is electrically connected with the pulse laser controller; the scanning galvanometer is electrically connected with the pulse laser; an electromagnetic ultrasonic transducer for receiving the echo signal; the electromagnetic ultrasonic post-processing module is electrically connected with the electromagnetic ultrasonic transducer; and the industrial personal computer is respectively and electrically connected with the pulse laser controller, the scanning galvanometer and the electromagnetic ultrasonic post-processing module. The laser electromagnetic ultrasonic detection device aims to solve the problems that the existing laser electromagnetic ultrasonic detection device is only limited to detecting and collecting defect signals of a detected workpiece, and the defect signals of the detected workpiece need to be uploaded to other computers for analysis and storage, so that the defect position in the detected workpiece cannot be visually displayed.
Description
Technical Field
The application relates to the technical field of laser electromagnetic ultrasonic detection, in particular to a laser electromagnetic ultrasonic imaging system and a laser electromagnetic ultrasonic imaging method.
Background
Electromagnetic ultrasound is used as a novel nondestructive testing means, and has the advantages of non-contact, no need of a coupling agent, low requirement on the surface of a tested body, various excitation waveforms and the like; however, the electromagnetic ultrasonic body excitation system has high requirement on the instantaneous power of a power supply and low energy conversion efficiency, so that more energy loss is easily caused, and the difficulty in manufacturing the whole detection system is increased. The laser ultrasonic is characterized in that pulse laser is utilized to locally heat a detected body, and the ultrasonic is generated by generating vibration through local thermal expansion, so that the laser ultrasonic has the characteristics of non-contact, high sensitivity and the like, and can realize the detection of extremely tiny defects; however, the current laser ultrasonic detection and measurement system has a complex structure. Therefore, the combination of the laser ultrasonic excitation technology and the electromagnetic ultrasonic receiving technology can overcome the defects that the electromagnetic ultrasonic technology has low excitation and transduction efficiency and low sensitivity when used for testing metal defects, thickness and residual stress, and a receiving device of the laser ultrasonic technology has high manufacturing cost, large volume, complex structure, easy environmental influence and the like.
However, the current laser electromagnetic ultrasonic detection device is limited to detect and collect the defect signal of the detected workpiece, and the defect signal of the detected workpiece needs to be uploaded to other computers for analysis and storage, so that the defect position in the detected workpiece cannot be visually displayed.
Disclosure of Invention
The application provides a laser electromagnetic ultrasonic imaging system and a laser electromagnetic ultrasonic imaging method, which aim to solve the problems that the existing laser electromagnetic ultrasonic detection device is only limited to detecting and collecting defect signals of a detected workpiece, and the defect signals of the detected workpiece need to be uploaded to other computers for analysis and storage, so that the defect position in the detected workpiece cannot be visually displayed.
In one aspect, a laser electromagnetic ultrasound imaging system includes:
a pulsed laser controller;
the pulse laser is electrically connected with the pulse laser controller and is used for generating laser under the control of the pulse laser controller;
the scanning galvanometer is electrically connected with the pulse laser; the scanning galvanometer is used for emitting laser, the emitted laser irradiates the surface of a workpiece to be measured to form an excitation point, and the body wave of the excitation point generates an echo signal in the workpiece to be measured;
an electromagnetic ultrasonic transducer for receiving the echo signal;
the electromagnetic ultrasonic post-processing module is electrically connected with the electromagnetic ultrasonic transducer and is used for preprocessing the echo signal;
the industrial personal computer is respectively and electrically connected with the pulse laser controller, the scanning galvanometer and the electromagnetic ultrasonic post-processing module; the industrial personal computer is used for controlling the pulse laser controller, the scanning galvanometer and the electromagnetic ultrasonic post-processing module and constructing an internal image of the workpiece to be detected.
In another aspect, a laser electromagnetic ultrasound imaging method includes:
starting the laser electromagnetic ultrasonic imaging system, establishing a three-dimensional coordinate system by taking a measured workpiece as a reference object, and dividing the measured workpiece into a plurality of three-dimensional grids;
the surface of one side of the workpiece to be measured is irradiated by laser to form an excitation point, and the body wave of the excitation point is transmitted to each three-dimensional grid to generate a plurality of echo signals;
preprocessing a plurality of the echo signals;
calculating a transit time, which is a sum of time that the bulk wave travels from the excitation point to the three-dimensional grid and the echo signal travels to the electromagnetic ultrasonic transducer;
performing delay superposition on all the echo signals corresponding to each three-dimensional grid to obtain delay superposed wave signals;
and constructing an internal image of the workpiece to be detected according to the delayed superposed wave signals of all the three-dimensional grids. According to the technical scheme, the laser electromagnetic ultrasonic imaging system and the laser electromagnetic ultrasonic imaging method provided by the application comprise the following steps: a pulsed laser controller; the pulse laser is electrically connected with the pulse laser controller and is used for generating laser under the control of the pulse laser controller; the scanning galvanometer is electrically connected with the pulse laser; the scanning galvanometer is used for emitting laser, the emitted laser irradiates the surface of a workpiece to be measured to form an excitation point, and the body wave of the excitation point generates an echo signal in the workpiece to be measured; an electromagnetic ultrasonic transducer for receiving the echo signal; the electromagnetic ultrasonic post-processing module is electrically connected with the electromagnetic ultrasonic transducer and is used for preprocessing the echo signal; the industrial personal computer is respectively and electrically connected with the pulse laser controller, the scanning galvanometer and the electromagnetic ultrasonic post-processing module; the industrial personal computer is used for controlling the pulse laser controller, the scanning galvanometer and the electromagnetic ultrasonic post-processing module and constructing an internal image of the workpiece to be detected.
According to the laser electromagnetic ultrasonic imaging system and method, a workpiece to be measured is divided into a plurality of three-dimensional grids, each three-dimensional grid is used as a pixel point, body waves excited by laser are transmitted inside the workpiece to be measured, echo signals are generated, different excitation points or receiving points correspond to one echo signal, the positions of a scanning galvanometer or an electromagnetic ultrasonic transducer are moved, the excitation points or the receiving points can be generated, all the echo signals of each three-dimensional grid are delayed and superposed to obtain delayed superposed wave signals, and then coordinates of all the three-dimensional grids are used as pixel point coordinates. And constructing an image by taking each delayed superposition wave signal as a pixel attribute value, wherein the image is an internal image of the workpiece to be detected. When the detected workpiece has a defect, the delayed superposed wave signal of the three-dimensional grid where the defect is located is greatly different from the delayed superposed wave signals of other surrounding three-dimensional grids, so that the position where the defect is located can be visually observed in the image, and the coordinate information of the position of the defect is obtained. Can carry out accurate location, swift and high-efficient to the defect of being surveyed the work piece inside.
Drawings
In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a structural diagram of a laser electromagnetic ultrasonic imaging system according to an embodiment of the present application;
FIG. 2 is an internal image of a workpiece under test output by the laser electromagnetic ultrasonic imaging system shown in FIG. 1;
fig. 3 is a schematic flow chart of a laser electromagnetic ultrasonic imaging method according to an embodiment of the present application;
fig. 4 is a schematic two-dimensional location of the defect shown in fig. 2.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Fig. 1 is a structural diagram of a laser electromagnetic ultrasonic imaging system according to an embodiment of the present application. As shown in fig. 1, the present embodiment provides a laser electromagnetic ultrasonic imaging system, including: a pulse laser controller 1; the pulse laser 2 is electrically connected with the pulse laser controller 1, and the pulse laser 2 is used for generating laser under the control of the pulse laser controller 1; the scanning galvanometer 3 is electrically connected with the pulse laser 2, the scanning galvanometer 3 is used for guiding out laser generated by the pulse laser 2, and the emitted laser irradiates the surface of the workpiece A to be detected to form an excitation point 01; the body wave of the excitation point 01 is transmitted in the workpiece A to be measured, and an echo signal is generated in the transmission process; an electromagnetic ultrasonic transducer 4 for receiving an echo signal; the electromagnetic ultrasonic transducer 4 may include an electromagnetic ultrasonic transverse transducer and an electromagnetic ultrasonic longitudinal transducer; the electromagnetic ultrasonic post-processing module 5 is electrically connected with the electromagnetic ultrasonic transducer 4 and is used for preprocessing the echo signal; the preprocessing may include a filtering process and an amplification process; the industrial personal computer 6 is respectively and electrically connected with the pulse laser controller 1, the scanning galvanometer 3 and the electromagnetic ultrasonic post-processing module 5; the industrial personal computer 6 can establish a three-dimensional coordinate system by taking the workpiece A to be measured as a reference object, and acquire the coordinates of the excitation point 01 and the electromagnetic ultrasonic transducer 4 in the three-dimensional coordinate system in real time; the industrial personal computer 6 is also used for controlling the pulse laser controller 1, and the pulse laser controller 1 controls the pulse laser 2 to generate the required laser; the industrial personal computer 6 can control whether the scanning galvanometer 3 emits laser or not, and the scanning galvanometer 3 transmits the coordinate of the excitation point 01 back to the industrial personal computer 6; the industrial personal computer 6 can control the electromagnetic ultrasonic post-processing module 5 to preprocess the echo signal, receive the preprocessed echo signal, correspondingly calculate and process the echo signal, and finally construct an internal image of the detected workpiece A. The industrial personal computer 6 may include a host 61 and a display 62, the host 61 plays a role of overall control, and the display 62 is used for displaying images. The industrial personal computer 6 can also be electrically connected with the electromagnetic ultrasonic transducer 4 and can control the electromagnetic ultrasonic transducer 4 to move. The relative position of the workpiece A to be detected and the excitation point 01 can be fixed; under the control of the industrial personal computer 6, the relative position of the electromagnetic ultrasonic transducer 4 and the workpiece A to be detected is variable. The scanning galvanometer 3 and the electromagnetic ultrasonic transducer 4 may be located on the same side of the workpiece a to be measured, or may be located on different sides, and the present application is not particularly limited.
When the laser electromagnetic ultrasonic imaging system is started, the pulse laser controller 1 controls the pulse laser 2 to generate laser, the laser is emitted from the scanning galvanometer 3 and irradiates the surface of the workpiece A to be detected to form a laser spot, the laser spot is used as an excitation point 01, the body wave of the excitation point 01 is transmitted inside the workpiece A to be detected, the industrial personal computer 6 further divides the workpiece A to be detected into a plurality of three-dimensional grids 02 under a three-dimensional coordinate system established by the industrial personal computer 6, each time the body wave meets one three-dimensional grid 02, a group of echo signals are generated, the echo signals are received by the electromagnetic ultrasonic transducer 4 and are transmitted to the electromagnetic ultrasonic post-processing module 5, and the electromagnetic ultrasonic post-processing module 5 filters and amplifies the echo signals, so that interference can be removed, and subsequent processing of the echo signals is facilitated. When the position of the excitation point 01 on the measured workpiece a is fixed and the relative position of the electromagnetic ultrasonic transducer 4 and the measured workpiece a is variable, the coordinates of the excitation point 01 are unique, and there are a plurality of receiving points 03 for the electromagnetic ultrasonic transducer 4 to receive the echo signals. The industrial personal computer 6 can acquire the coordinates of the excitation point 01, the coordinates of the receiving points 03 and the time of the electromagnetic ultrasonic transducer 4 receiving each echo signal in real time, and is used for calculating the corresponding transit time of each receiving point 03, wherein the transit time is the sum of the time of generating the echo signal when the body wave of the excitation point 01 propagates to any three-dimensional grid 02 and the time of propagating the echo signal to the receiving point 03. It will be readily appreciated that each receiving point 03 corresponds to one time of flight and each three-dimensional grid 02 corresponds to a plurality of time of flights. And performing delay superposition processing on a plurality of transit times corresponding to each three-dimensional grid 02 to obtain a delay superposed wave signal. Each three-dimensional grid 02 is used as a pixel, and all delay superposed wave signals of all the three-dimensional grids 02 are integrated together, so that an internal image of the workpiece to be measured can be constructed. When the defect 04 exists in one three-dimensional grid 02, the delayed superposed wave signal of the three-dimensional grid 02 is greatly different from the delayed superposed wave signals of other three-dimensional grids 02, and the difference is displayed on the built internal image of the workpiece A to be detected, so that the position of the defect 04 can be visually seen on the internal image of the workpiece A to be detected, the coordinate parameter of the defect 04 can be locked, and the defect 04 in the workpiece A to be detected can be accurately positioned, quickly and efficiently. Fig. 1 only illustrates the existence of defects 04 in a three-dimensional grid 02, and fig. 2 is an internal image of a workpiece to be measured output by the laser electromagnetic ultrasonic imaging system shown in fig. 1. Fig. 2 shows an internal image of the workpiece a shown in fig. 1, which is generated when a defect 04 exists inside the workpiece a.
With continued reference to FIG. 1, the relative position of the workpiece A to be tested to the excitation point 01 is variable; the relative position of the workpiece A to be measured and the electromagnetic ultrasonic transducer 4 is fixed. The industrial personal computer 6 controls the displacement of the scanning galvanometer 3, at the moment, the number of the excitation points 01 can be multiple, the number of the receiving points 03 is one, and therefore each excitation point 01 corresponds to one transit time.
As shown in fig. 1, in the testing process, the position of the scanning galvanometer 3 may be fixed, and the electromagnetic ultrasonic transducer 4 moves according to a set path under the control of the industrial personal computer 6; or the position of the electromagnetic ultrasonic transducer 4 is fixed, and the scanning galvanometer 3 moves according to a set path under the control of the industrial personal computer 6; both ways can test the defect location inside the workpiece a under test.
Fig. 3 is a schematic flow chart of a laser electromagnetic ultrasonic imaging method according to an embodiment of the present application. As shown in fig. 3, the laser electromagnetic ultrasonic imaging method provided by this embodiment includes:
s1: and starting the laser electromagnetic ultrasonic imaging system, establishing a three-dimensional coordinate system by taking the detected workpiece as a reference object, and dividing the detected workpiece into a plurality of three-dimensional grids. The coordinates of the geometric center point of each three-dimensional grid can be used as the coordinates of the three-dimensional grid, and the origin of coordinates of the three-dimensional coordinate system can be set arbitrarily and is not limited specifically.
S2: the surface of one side of the measured workpiece is irradiated by laser to form an excitation point, and the body wave of the excitation point is propagated to each three-dimensional grid to generate a plurality of echo signals.
S3: the plurality of echo signals are preprocessed. The preprocessing may include a filtering process and an amplification process.
S4: and calculating the transit time, wherein the transit time is the sum of the time for the body wave to propagate from the excitation point to the three-dimensional grid and the time for the echo signal to propagate to the electromagnetic ultrasonic transducer.
When the relative position of the workpiece to be measured and the excitation point is fixed and unchanged and the relative position of the workpiece to be measured and the electromagnetic ultrasonic transducer is variable; the number of the excitation points is one, the number of the receiving points for receiving echo signals by the electromagnetic ultrasonic transducer is m, and the coordinates of the excitation points are (x) in a three-dimensional coordinate system taking a measured workpiece as a reference objectT,yT,zT) The coordinates of the excitation point can be the coordinates of the center point of the laser spotThe coordinates of the ith receiving point are
The coordinates of the kth three-dimensional grid are (x)k,yk,zk) The coordinates of the three-dimensional grid can be represented by the coordinates of the geometric center point of the three-dimensional grid, and the corresponding transit time delta tau of each receiving point is calculated according to the following formulak,i：
Wherein i is 1,2,3 … m, the number of three-dimensional grids is a b c, k is 1,2,3 …, a b c;
c1and c2Satisfies one of the following relationships:
c1＝c2＝cl，
c1＝c2＝cs，
c1＝cs,c2＝cl，
or c1＝cl,c2＝cs，
clIs the propagation velocity of the longitudinal wave, csIs the propagation velocity of the transverse wave.
When the relative position of the workpiece to be measured and the excitation point is variable; when the relative position of the workpiece to be measured and the electromagnetic ultrasonic transducer is fixed, the number of the excitation points is n, and the number of the receiving points is one; in a three-dimensional coordinate system taking a measured workpiece as a reference object, the coordinate of the jth excitation point is
The coordinates of the receiving point are (x)R,yR,zR) The coordinates of the kth three-dimensional grid are (x)k,yk,zk) The transit time Δ τ corresponding to each excitation point is calculated according to the following equationk,j：
Wherein j is 1,2,3 … n, the number of three-dimensional grids is a, b, c, k is 1,2,3 …, a, b, c;
c1and c2Satisfies one of the following relationships:
c1＝c2＝cl，
c1＝c2＝cs，
c1＝cs,c2＝cl，
or c1＝cl,c2＝cs，
clIs the propagation velocity of the longitudinal wave, csIs the propagation velocity of the transverse wave.
S5: and performing delay superposition on all echo signals corresponding to each three-dimensional grid to obtain delay superposed wave signals.
When the bulk wave of the excitation point is s (t), all echo signals generated by the kth three-dimensional grid are subjected to delay superposition according to the following formula to obtain a delay superposed wave signal Ik(t)：
Or
S6: and constructing an internal image of the workpiece to be detected according to the delayed superposed wave signals of all the three-dimensional grids.
Taking each three-dimensional grid as a pixel, and adding all delay superposed wave signals I of all three-dimensional gridsk(t) when integrated, an internal image of the workpiece under test can be constructed, as shown in FIG. 2. Delayed superposition wave signal I of a three-dimensional grid when a defect exists in the three-dimensional gridk(t) the delay superposed wave signals of other three-dimensional grids have larger difference, and the difference is presented on the built internal image of the detected workpiece, so that the defects can be visually seen on the internal image of the detected workpieceIn the position of (c). The internal image of the workpiece to be measured is actually a two-dimensional image, the coordinates of the defect are also two-dimensional coordinates, as shown in fig. 2, the position coordinates of the defect are (0, -30), the coordinate unit is mm, the position relationship of the corresponding defect on the workpiece to be measured is shown in fig. 4, and fig. 4 is a two-dimensional position schematic diagram of the defect shown in fig. 2.
The laser electromagnetic ultrasonic imaging system and method divide a workpiece to be measured into a plurality of three-dimensional grids, each three-dimensional grid is used as a pixel point, body waves excited by laser propagate inside the workpiece to be measured and generate echo signals, different excitation points or receiving points correspond to one echo signal, a plurality of excitation points or receiving points can be generated by moving a scanning galvanometer or an electromagnetic ultrasonic transducer, all the echo signals of each three-dimensional grid are delayed and superposed to obtain delayed superposed wave signals, and then coordinates of all the three-dimensional grids are used as pixel point coordinates. And constructing an image by taking each delayed superposition wave signal as a pixel attribute value, wherein the image is an internal image of the workpiece to be detected. When the detected workpiece has a defect, the delayed superposed wave signal of the three-dimensional grid where the defect is located is greatly different from the delayed superposed wave signals of other surrounding three-dimensional grids, so that the position where the defect is located can be visually observed in the image, and the coordinate information of the position of the defect is obtained. Can carry out accurate location, swift and high-efficient to the defect of being surveyed the work piece inside.
Those skilled in the art will readily appreciate that the techniques of the embodiments of the present invention may be implemented as software plus a required general purpose hardware platform. Based on such understanding, the technical solutions in the embodiments of the present invention may be essentially or partially implemented in the form of a software product, which may be stored in a storage medium, such as ROM/RAM, magnetic disk, optical disk, etc., and includes several instructions for enabling a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method according to the embodiments or some parts of the embodiments.
The same and similar parts in the various embodiments in this specification may be referred to each other. In particular, for the embodiments, since they are substantially similar to the method embodiments, the description is simple, and the relevant points can be referred to the description in the method embodiments.
Claims (10)
1. A laser electromagnetic ultrasound imaging system, comprising:
a pulsed laser controller (1);
the pulse laser (2) is electrically connected with the pulse laser controller (1), and the pulse laser (2) is used for generating laser under the control of the pulse laser controller (1);
the scanning galvanometer (3) is electrically connected with the pulse laser (2); the scanning galvanometer (3) is used for emitting laser, the emitted laser irradiates the surface of a workpiece to be measured (A) to form an excitation point (01), and the bulk wave of the excitation point (01) generates an echo signal in the workpiece to be measured (A);
an electromagnetic ultrasound transducer (4) for receiving the echo signal;
the electromagnetic ultrasonic post-processing module (5) is electrically connected with the electromagnetic ultrasonic transducer (4), and the electromagnetic ultrasonic post-processing module (5) is used for preprocessing the echo signal;
the industrial personal computer (6) is respectively and electrically connected with the pulse laser controller (1), the scanning galvanometer (3) and the electromagnetic ultrasonic post-processing module (5); the industrial personal computer (6) is used for controlling the pulse laser controller (1), the scanning galvanometer (3) and the electromagnetic ultrasonic post-processing module (5) and constructing an internal image of the workpiece to be detected (A).
2. The laser electromagnetic ultrasound imaging system of claim 1, wherein the industrial personal computer (6) is electrically connected with the electromagnetic ultrasound transducer (4);
the relative position of the workpiece (A) to be measured and the excitation point (01) is fixed and unchanged; the relative position of the workpiece (A) to be measured and the electromagnetic ultrasonic transducer (4) is variable.
3. The laser electromagnetic ultrasonic imaging system according to claim 1, wherein the relative position of the workpiece under test (a) and the excitation point (01) is variable; the relative position of the workpiece (A) to be measured and the electromagnetic ultrasonic transducer (4) is fixed.
4. The laser electromagnetic ultrasound imaging system of claim 2 or 3, characterized in that the industrial personal computer (6) comprises a control host (61) and a display (62);
the electromagnetic ultrasonic transducer (4) comprises an electromagnetic ultrasonic transverse transducer and an electromagnetic ultrasonic longitudinal transducer.
5. A laser electromagnetic ultrasound imaging method, comprising:
starting the laser electromagnetic ultrasonic imaging system, establishing a three-dimensional coordinate system by taking a measured workpiece as a reference object, and dividing the measured workpiece into a plurality of three-dimensional grids;
the surface of one side of the workpiece to be measured is irradiated by laser to form an excitation point, and the body wave of the excitation point is transmitted to each three-dimensional grid to generate a plurality of echo signals;
preprocessing a plurality of the echo signals;
calculating a transit time, which is a sum of time that the bulk wave travels from the excitation point to the three-dimensional grid and the echo signal travels to the electromagnetic ultrasonic transducer;
performing delay superposition on all the echo signals corresponding to each three-dimensional grid to obtain delay superposed wave signals;
and constructing an internal image of the workpiece to be detected according to the delayed superposed wave signals of all the three-dimensional grids.
6. The laser electromagnetic ultrasonic imaging method according to claim 5, wherein when the relative position of the workpiece to be measured and the excitation point is fixed and unchanged, the relative position of the workpiece to be measured and the electromagnetic ultrasonic transducer is variable; the number of the excitation points is one, and the electromagnetic ultrasonic transducer receives the receiving points of the echo signalsThe number of the excitation points is m, and the coordinates of the excitation points are (x) in a three-dimensional coordinate system taking the measured workpiece as a reference objectT,yT,zT) The coordinates of the ith receiving point are
The coordinates of the kth three-dimensional grid are (x)k,yk,zk) Calculating the transit time Δ τ corresponding to each of the receiving points according to the following equationk,i：
Wherein i is 1,2,3 … m, the number of the three-dimensional grids is a, b, c, k is 1,2,3 …, a, b, c;
c1and c2Satisfies one of the following relationships:
c1＝c2＝cl，
c1＝c2＝cs，
c1＝cs,c2＝cl，
or c1＝cl,c2＝cs，
clIs the propagation velocity of the longitudinal wave, csIs the propagation velocity of the transverse wave.
7. The laser electromagnetic ultrasonic imaging method of claim 5, wherein when the relative position of the workpiece to be measured and the excitation point is variable; when the relative positions of the workpiece to be measured and the electromagnetic ultrasonic transducer are fixed and unchanged, the number of the excitation points is n, and the number of the receiving points for receiving the echo signals by the electromagnetic ultrasonic transducer is one; in a three-dimensional coordinate system taking the measured workpiece as a reference object, the coordinate of the jth excitation point is
Of said receiving pointThe coordinate is (x)R,yR,zR) The coordinates of the kth three-dimensional grid are (x)k,yk,zk) Calculating the transit time Δ τ corresponding to each of the excitation points according to the following equationk,j：
Wherein j is 1,2,3 … n, the number of the three-dimensional grids is a, b, c, k is 1,2,3 …, a, b, c;
c1and c2Satisfies one of the following relationships:
c1＝c2＝cl，
c1＝c2＝cs，
c1＝cs,c2＝cl，
or c1＝cl,c2＝cs，
clIs the propagation velocity of the longitudinal wave, csIs the propagation velocity of the transverse wave.
8. The laser electromagnetic ultrasonic imaging method of claim 6, wherein when the bulk wave of the excitation point is s (t), all the echo signals generated by the kth three-dimensional grid are delay-superposed according to the following formula to obtain a delay-superposed wave signal Ik(t)：
9. The laser electromagnetic ultrasonic imaging method of claim 7, wherein when the bulk wave of the excitation point is s (t), all the echo signals generated by the kth three-dimensional grid are delay-superposed according to the following formula to obtain a delay-superposed wave signal Ik(t)：
10. The laser electromagnetic ultrasonic imaging method according to claim 5, wherein the preprocessing in the preprocessing step for the plurality of echo signals includes a filtering process and an amplifying process.
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