CN203606461U - A coaxial type semiconductor testing apparatus - Google Patents
A coaxial type semiconductor testing apparatus Download PDFInfo
- Publication number
- CN203606461U CN203606461U CN201320672083.XU CN201320672083U CN203606461U CN 203606461 U CN203606461 U CN 203606461U CN 201320672083 U CN201320672083 U CN 201320672083U CN 203606461 U CN203606461 U CN 203606461U
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- Prior art keywords
- pin
- bearing seat
- needle stand
- load bearing
- chaining
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 239000004020 conductor Substances 0.000 claims abstract description 28
- 238000009413 insulation Methods 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 8
- 230000002452 interceptive effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008054 signal transmission Effects 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
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Abstract
The utility model discloses a coaxial type semiconductor testing apparatus comprising a pin seat, a bearing seat and a plurality of testing pins. A plurality of pin holes penetrate through the pin seat, and the pin seat is made of conductive materials. An insulating layer wraps the surface of the pin seat. The bearing seat is arranged on the upper end of the pin seat, and a plurality of perforated holes, corresponding to the pin holes, are arranged in the bearing seat. The bearing seat is made of conductive materials, and an insulating layer wraps the surface of the bearing seat. The plurality of testing pins are all inserted into the pin hole portions, and the both ends of the testing pins are respectively completely surrounded by the pin holes and the perforated holes of the bearing seat. The testing pins are in contact with a to-be-tested chip as ends of the bearing seat and are connected with a testing platform as the ends of the pin seat. Shield forms by means of interference signals which are generated by the pin seat and the bearing made of the conductive materials and interfering with the testing pins, so that the accuracy degree of test results is effectively raised.
Description
Technical field
The utility model has about a kind of semiconductor test apparatus, and espespecially a kind of effectively shielded signal disturbs to improve the coaxial-type semiconductor test apparatus of test accuracy.
Background technology
When the source impedance of input end, when the load of output terminal is not mated with line characteristic impedance, signal will produce attenuation losses through transmission line transmission, the characteristic of reflection, as insertion loss (Insertion loss) or reflection loss (Return loss), this loss also can form in transmission line place electromagnetic wave, in the higher semiconductor test of precision, this electromagnetic wave phase is when easily forming and disturb mutually, make its test result produce error, and current known semiconductor test apparatus, as " the high speed test joint design " of TaiWan, China letters patent book number No. M332849, it comprises a chaining pin, one needle stand and a needle stand lid, this needle stand utilizes needle stand fixed screw to be fixed on test carrier plate, needle stand is implemented Drilling operation according to the to-be-measured integrated circuit pin position of to-be-measured integrated circuit, and in hole, insert chaining pin, the purposes of the signal that this chaining pin carries according to chaining pin is divided into ground connection chaining pin and two kinds of implantation forms of signal chaining pin, this needle stand lid is to utilize needle stand lid fixed screw to be fixed on needle stand, be drilled with and permitted multiporous good matter insulator thin slice, be used for limiting the chaining pin of implanting needle stand, the tip of chaining pin is exposed, now utilize signal transmission can complete test, by analyzing and learn in its claim and accompanying drawing, it still has following shortcoming:
(1), its insulation course and needle stand lid range of defilade are limited, the overwhelming majority of ground connection chaining pin and signal stylus tip still can outer be exposed at not in the scope of conductive material, and cannot effectively eliminate the signal of phase mutual interference, allow test result easily produce error, obviously have the shortcoming of test accuracy deficiency.
(2), this ground connection chaining pin is that electrical contact by needle stand forms earthing effect, will reduce its measuring stability.
Utility model content
In view of this, the technical matters that the utility model institute wish solves is the above-mentioned shortcoming existing for prior art, provides a kind of and tests accurately and the coaxial-type semiconductor test apparatus having good stability.
For achieving the above object, the utility model provides a kind of coaxial-type semiconductor test apparatus, and it comprises a needle stand, and this needle stand is penetrated with a plurality of pin holes, and this needle stand is that conductive material is made, and is coated with an insulation course in the surface of needle stand;
One load bearing seat, this load bearing seat is arranged at needle stand upper end, and the corresponding pin hole of this load bearing seat offers a plurality of perforation, and this load bearing seat is that conductive material is made again, and is coated with an insulation course in the surface of load bearing seat;
A plurality of chaining pins, those chaining pins are all inserted in pin hole place, and the two ends of this chaining pin be subject to respectively the pin hole of needle stand and the perforation of load bearing seat institute completely around, this chaining pin is with load bearing seat end in contact chip to be measured again, and this chaining pin is connected with a test platform with needle stand end.
The perforation of this load bearing seat is scalariform towards needle stand end, and with perforation restriction chaining pin, it cannot be passed by load bearing seat end.
The pin hole of this needle stand is scalariform towards load bearing seat end, and with pin hole restriction chaining pin, it cannot be passed by needle stand end.
Between this needle stand and load bearing seat, be folded with a metal spacer, and the corresponding described pin hole of this metal spacer offers plurality of through holes, in this through hole, be all filled with an insulation course again, described chaining pin can run through the insulation course of this through hole, and coordinates described chaining pin length to change the spacing of needle stand and load bearing seat.
This chaining pin includes signal pin and grounding pin, and the diameter of this signal pin and grounding pin is all less than the aperture of pin hole.
Test platform is coated with a ground plane in inside, and between ground plane and grounding pin, is connected with a conductor wire, and this grounding pin is by this conductor wire and the direct conducting ground connection of ground plane.
Between this needle stand, load bearing seat and test platform, be equipped with a plurality of metallic sheaths, and form the fixing of needle stand, load bearing seat and test platform by metallic sheath, and this metallic sheath and ground plane be connected to each other, needle stand, load bearing seat and ground plane are conducting state.
All make with conductive material at needle stand of the present utility model and load bearing seat place, and the surface in needle stand and load bearing seat is coated with insulation course, can effectively prevent from forming electrical contact between needle stand, load bearing seat and chaining pin, and by the pin hole of needle stand and the perforation of load bearing seat completely around chaining pin two ends, undesired signal chaining pin being produced by needle stand and the load bearing seat of conductive material shields, effectively to improve the accuracy of test result.
Grounding pin of the present utility model is connected directly to the ground plane of test platform by conductor wire, make grounding pin and ground plane can directly form the electrical contact of zero potential, can improve its measuring stability.
The 3rd fundamental purpose of the present utility model is, between this needle stand and load bearing seat, be folded with a metal spacer, and the corresponding pin hole of this metal spacer offers plurality of through holes, in this through hole, be all filled with an insulation course again, make chaining pin can run through the insulation course of through hole, so as to coordinating the spacing of chaining pin length change needle stand and load bearing seat, to improve its application.
Other object, advantage and novel characteristics of the present utility model will more obvious in following detailed description to relevant accompanying drawing.
Accompanying drawing explanation
Fig. 1 is the top view of the utility model coaxial-type semiconductor test apparatus;
Fig. 2 is the cut-open view of the utility model along A-A hatching line in Fig. 1;
Fig. 3 is the partial enlarged drawing of Fig. 2 of the present utility model;
Fig. 4 is another use view of the utility model coaxial-type semiconductor test apparatus.
Description of reference numerals
Needle stand-----10
Pin hole-----11
Insulation course----12
Metallic sheath----13 (43)
Load bearing seat----20
Perforation-----21
Insulation course----22
Chaining pin-----30
Signal pin----31
Grounding pin----32
Test platform---40
Ground plane----41
Conductor wire----42
Metal spacer---50
Through hole-----51
Insulation course----52.
Embodiment
For ease of having a better understanding and awareness the purpose of this utility model, feature and effect, below coordinate accompanying drawing to describe in detail as rear:
Referring to Fig. 1, shown in Fig. 2 and Fig. 3, a kind of coaxial-type semiconductor test apparatus, it includes: a needle stand 10, one load bearing seat 20 and a plurality of chaining pin 30, one needle stand 10 is penetrated with a plurality of pin holes 11, and this needle stand 10 is that conductive material is made, and be coated with an insulation course 12 in the surface of needle stand 10, one load bearing seat 20 is arranged at needle stand 10 upper ends, and put chip to be measured by load bearing seat 20, the corresponding pin hole 11 of this load bearing seat 20 offers a plurality of perforation 21, this load bearing seat 20 is that conductive material is made again, and be coated with an insulation course 22 in the surface of load bearing seat 20, a plurality of chaining pins 30 are all inserted in pin hole 11 places, this chaining pin 30 includes signal pin 31 and grounding pin 32, and the diameter of this signal pin 31 and grounding pin 32 is all less than the aperture of pin hole 11.Wherein, the pin hole 11 of this needle stand 10 is scalariform towards load bearing seat 20 ends, and limit chaining pin 30 with pin hole 11, it cannot be passed by needle stand 10 ends, and the perforation 21 of this load bearing seat 20 is scalariform towards needle stand 10 ends, and with the 21 restriction chaining pins 30 of boring a hole, it cannot be passed by load bearing seat 20 ends, again the two ends of this chaining pin 30 be subject to respectively 21 of the pin hole 11 of needle stand 10 and the perforation of load bearing seat 20 completely around, make this chaining pin 30 with load bearing seat 20 end in contact chip to be measured.And this chaining pin 30 is connected with a test platform 40 with needle stand 10 ends, test platform 40 is coated with a ground plane 41 in inside, and between ground plane 41 and grounding pin 32, be connected with a conductor wire 42, allow the direct conducting ground connection of grounding pin 32 by the conductor wire 42 of test platform 40 and ground plane 41, make grounding pin 32 and ground plane 41 can directly form the electrical contact of zero potential, improve whereby the stability of test.Another this needle stand 10, between load bearing seat 20 and test platform 40, be equipped with a plurality of metallic sheaths 13 (43), and form needle stand 10 by metallic sheath 13 (43), load bearing seat 20 is fixing with test platform 40, and this metallic sheath 13 (43) is connected to each other with ground plane 41, make needle stand 10, load bearing seat 20 is conducting state with ground plane 41, by said structure, it is made that this needle stand 10 and load bearing seat 20 are all conductive material, and by the pin hole 11 of needle stand 10 and the complete two ends around chaining pin 30 of the perforation of load bearing seat 20 21, and by the coated insulation course 12 of needle stand 10 insulation course 22 coated with load bearing seat 20, can effectively prevent needle stand 10, between load bearing seat 20 and chaining pin 30, form electrical contact, and form shielding by the needle stand 10 of conductive material with the undesired signal that load bearing seat 20 produces chaining pin 30, effectively to improve the accuracy of test result.
Effect of its actual use, shown in Fig. 1, Fig. 2, Fig. 3, this chaining pin 30 is all arranged in pin hole 11 places of needle stand 10, form the unidirectional spacing of chaining pin 30 by the pin hole 11 of needle stand 10, and this chaining pin 30 is divided into signal pin 31 and grounding pin 32 according to zone, be combined with different chaining pins 30 permutation and combination according to the kind of chip to be measured.These needle stand 10 upper ends are equiped with load bearing seat 20 again, perforation 21 by load bearing seat 20 provides wearing of chaining pin 30, and form the fixed effect of chaining pin 30 other ends with load bearing seat 20, finally this needle stand 10 is arranged at test platform 40, and form and fix with the metallic sheath 13 (43) of test platform 40 by needle stand 10, load bearing seat 20, allow signal pin 31 complete electrically conducting in needle stand 10 end in contact test platforms 40.This grounding pin 32 is coaxially connected in the conductor wire 42 of test platform 40, then by conductor wire 42 conducting ground planes 41.In the time wanting to carry out the test of chip to be measured, chip to be measured is placed in to load bearing seat 20 upper ends, and allow by the perforation 21 of load bearing seat 20 the conflict chip to be measured that chaining pin 30 can coaxial shape, this load bearing seat 20 can coordinate shape, volume or the metallic contact difference of chip to be measured and change even more noteworthy, and then improve its applicability, now by test platform 40, signal pin 31 is carried out to signal transmission, can complete test by the signal feedback of chaining pin 30.And its main effect of the utility model is to improve test accuracy and the stability of chip to be measured, because chaining pin 30 can produce insertion loss Insertion loss and reflection loss Return loss in the time carrying out signal transmission, therefore can be formed with electromagnetic wave in chaining pin 30 places, and cause the signal between chaining pin 30 to disturb, its test accuracy is declined, hereat, needle stand 10 of the present utility model is all made with conductive material with load bearing seat 20 places, and be coated with respectively insulation course 12 in needle stand 10 and the surface of load bearing seat 20, 22, can effectively prevent needle stand 10, between load bearing seat 20 and chaining pin 30, form electrical contact, and by the pin hole 11 of needle stand 10 and the perforation 21 of load bearing seat 20 completely around chaining pin 30 two ends, needle stand 10 by conductive material shields with the undesired signal that load bearing seat 20 produces chaining pin 30, effectively to improve the accuracy of test result.On the other hand, this grounding pin 32 is connected directly to the ground plane 41 of test platform 40 by conductor wire 42, its conductor wire 42 can be coaxial-type or transverse type with the connected mode of ground plane 41, make grounding pin 32 and ground plane 41 can directly form the electrical contact of zero potential, can improve its measuring stability.
Another use state of the present utility model, shown in Fig. 4, between this needle stand 10 and load bearing seat 20, be folded with a metal spacer 50, and the corresponding pin hole 11 of this metal spacer 50 offers plurality of through holes 51, in this through hole 51, be all filled with an insulation course 52 again, make chaining pin 30 can run through the insulation course 52 of through hole 51, the spacing so as to cooperation chaining pin 30 length change needle stands 10 with load bearing seat 20, to improve its application.
The above, be only a preferred embodiment of the present utility model, can not limit the scope that the utility model is implemented with this; Be that every equalization of doing according to the utility model claim scope changes and modifies, all should belong in the scope that the utility model patent contains.
Claims (7)
1. a coaxial-type semiconductor test apparatus, is characterized in that, it includes:
One needle stand, this needle stand is penetrated with a plurality of pin holes, and this needle stand is that conductive material is made, and is coated with an insulation course in the surface of needle stand;
One load bearing seat, this load bearing seat is arranged at needle stand upper end, and the corresponding pin hole of this load bearing seat offers a plurality of perforation, and this load bearing seat is that conductive material is made again, and is coated with an insulation course in the surface of load bearing seat; And
A plurality of chaining pins, those chaining pins are all inserted in pin hole place, and the two ends of this chaining pin be subject to respectively the pin hole of needle stand and the perforation of load bearing seat institute completely around, this chaining pin is with load bearing seat end in contact chip to be measured again, and this chaining pin is connected with a test platform with needle stand end.
2. coaxial-type semiconductor test apparatus according to claim 1, is characterized in that, the perforation of this load bearing seat is scalariform towards needle stand end, and limits this chaining pin it cannot be passed by load bearing seat end with perforation.
3. coaxial-type semiconductor test apparatus according to claim 1, is characterized in that, the pin hole of this needle stand is scalariform towards load bearing seat end, and limits this chaining pin with pin hole it cannot be passed by needle stand end.
4. coaxial-type semiconductor test apparatus according to claim 1, it is characterized in that, between this needle stand and load bearing seat, be folded with a metal spacer, and the corresponding described pin hole of this metal spacer offers plurality of through holes, in this through hole, be all filled with an insulation course again, described chaining pin can run through the insulation course of this through hole, and coordinates described chaining pin length to change the spacing of needle stand and load bearing seat.
5. coaxial-type semiconductor test apparatus according to claim 1, is characterized in that, this chaining pin includes signal pin and grounding pin, and this signal pin and grounding pin are all less than the aperture of described pin hole.
6. coaxial-type semiconductor test apparatus according to claim 5, it is characterized in that, this test platform is coated with a ground plane in inside, and between this ground plane and grounding pin, is connected with a conductor wire, and this grounding pin is by this conductor wire and the direct conducting ground connection of ground plane.
7. coaxial-type semiconductor test apparatus according to claim 6, it is characterized in that, between this needle stand, load bearing seat and test platform, be equipped with a plurality of metallic sheaths, and form the fixing of needle stand, load bearing seat and test platform by metallic sheath, and this metallic sheath and ground plane are connected to each other, this needle stand, load bearing seat and ground plane are conducting state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672083.XU CN203606461U (en) | 2013-10-29 | 2013-10-29 | A coaxial type semiconductor testing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320672083.XU CN203606461U (en) | 2013-10-29 | 2013-10-29 | A coaxial type semiconductor testing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203606461U true CN203606461U (en) | 2014-05-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320672083.XU Expired - Lifetime CN203606461U (en) | 2013-10-29 | 2013-10-29 | A coaxial type semiconductor testing apparatus |
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| Country | Link |
|---|---|
| CN (1) | CN203606461U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280678A (en) * | 2014-10-30 | 2015-01-14 | 南通富士通微电子股份有限公司 | Semiconductor testing fixture |
-
2013
- 2013-10-29 CN CN201320672083.XU patent/CN203606461U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280678A (en) * | 2014-10-30 | 2015-01-14 | 南通富士通微电子股份有限公司 | Semiconductor testing fixture |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140521 |
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| CX01 | Expiry of patent term |