CN114244183B - X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof - Google Patents
X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof Download PDFInfo
- Publication number
- CN114244183B CN114244183B CN202111605668.5A CN202111605668A CN114244183B CN 114244183 B CN114244183 B CN 114244183B CN 202111605668 A CN202111605668 A CN 202111605668A CN 114244183 B CN114244183 B CN 114244183B
- Authority
- CN
- China
- Prior art keywords
- driving
- foot
- movement
- negative
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 14
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 6
- 230000002457 bidirectional effect Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a bidirectional-driving X-shaped structure resonance type piezoelectric actuator and an actuating method thereof. The actuator is excited by single-phase sinusoidal voltage, a first-order resonance mode of the driving foot is excited, and the driving track is stirred to realize large-stroke linear driving. The positive driving foot and the negative driving foot of the actuator have different rigidity characteristics, and the mode of driving the foot in a certain direction can be stimulated by changing the frequency selection of a single-phase signal so as to realize the control of the driving direction. Compared with other resonant actuators driven by piezoelectric materials, the invention has the characteristics of simple structure, simple driving signal and easy miniaturization.
Description
Technical Field
The invention relates to an actuating device, in particular to a piezoelectric actuator which has an X-shaped structure, is driven by adopting a resonance principle and can perform bidirectional large-stroke linear displacement and an actuating method thereof.
Background
In recent years, piezoelectric driving devices are continuously developed, the development and construction of important industries such as national defense, aerospace and mechanical manufacturing are supported, various piezoelectric actuating devices are derived, and piezoelectric actuators driven by a resonance principle are widely focused by people due to the characteristics of high actuating speed and large thrust-weight ratio. In the resonant type piezoelectric actuator capable of being driven bidirectionally, a plurality of groups of driving elements and multiple driving control signals are needed to realize bidirectional motion in a single degree of freedom, for example, two-phase driving signals with phase differences are adopted in patents CN101420190, CN102355157, CN106160566 and CN104485837 to realize driving and driving direction control of the actuator. The problems of complicated control of driving signals, high cost and adverse microminiaturization exist. There is a strong need for a resonant actuator that can be actuated using a single electrical signal to achieve bi-directional actuation on the resonant principle.
Disclosure of Invention
In order to meet the requirements, the invention aims to provide the X-shaped structure resonant piezoelectric actuator capable of being driven in two directions and the actuating method thereof, a group of piezoelectric ceramics and one path of driving control signals are used, the resonant driving principle is adopted to realize the control of the two-way actuation, and the actuator has the characteristics of simple structure, high actuating speed and simple driving control.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
the X-type structure resonance type piezoelectric actuator capable of being driven in two directions comprises a first driving track 1, a second driving track 2 parallel to the first driving track 1, a first negative movement driving foot 3, a first negative movement contact foot 3-1, a second negative movement driving foot 4, a second positive movement contact foot 6-1, a first positive movement driving foot 5-1, a second positive movement driving foot 6-1, a first positive movement driving foot 7 and a second negative movement driving foot 7, wherein the first negative movement contact foot 3-1 is positioned at the end part of the first negative movement driving foot 3 and is in contact with the first driving track 1, the second negative movement driving foot 4 is symmetrically arranged relative to the central axis of the first driving track 1 and the second driving track 2, the second negative movement contact foot 4-1 is positioned at the end part of the second negative movement driving foot 4 and is in contact with the second driving track 2, the first positive movement driving foot 5-1 is positioned at the end part of the first positive movement driving foot 5 and is in contact with the first driving track 1, the second positive movement driving foot 6-is symmetrically arranged relative to the central axis of the first positive movement driving track 2, the second positive movement driving foot 6-the second positive movement driving foot 6 is arranged between the first positive movement driving foot 3 and the second positive movement driving foot 7 and the second negative driving foot 8, and the first negative driving foot 8 is arranged between the first positive driving foot and the second driving foot 7 and the second driving foot 8; the first negative driving foot 3, the first positive driving foot 5, the second negative driving foot 4 and the second positive driving foot 6 form an X-shaped structure.
The X-shaped structure resonance type piezoelectric actuator has a geometric structure symmetrical about a central axis of a motion direction, and the piezoelectric driving element 7 and the piezoelectric driving element 8 are also symmetrically arranged.
The first negative driving foot 3 and the second negative driving foot 4 have the same geometric dimension and the negative driving first order natural frequency f1, the first positive driving foot 5 and the second positive driving foot 6 have the same geometric dimension and the positive driving first order natural frequency f2, the rigidity of the first positive driving foot 5 and the second positive driving foot 6 is larger compared with the rigidity of the first negative driving foot 3 and the second negative driving foot 4, and the negative driving first order natural frequency f1 is higher than the positive driving first order natural frequency f2; in order to reduce the coupling influence generated by the deformation of the structure along the non-first-order mode direction in the driving process, other high-order natural modes of the structure are higher than f1 and f2 and are not integer multiples of f1 and f2, so that the coupling motion in the resonance driving process is reduced.
According to the actuating method of the X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions, the piezoelectric actuator can control the movement direction of the actuator by changing the driving frequency under the driving of a single-phase sinusoidal alternating current signal; when the frequency of sinusoidal alternating current signals applied to the first piezoelectric driving element 7 and the second piezoelectric driving element 8 is f1, the natural modes of the first negative driving foot 3 and the second negative driving foot 4 are excited, the first negative movement contact foot 3-1 positioned at the end part of the first negative driving foot 3 is driven by the first-order resonance mode of the first negative driving foot 3 to obtain oblique movement, and the oblique movement is synthesized by the movement vertical to the first driving track 1 and the movement parallel to the first driving track 1; the second negative movement contact foot 4-1 positioned at the end part of the second negative driving foot 4 is driven by the first-order resonance mode of the first negative driving foot 4 to obtain oblique movement, and the oblique movement is synthesized by the movement vertical to the second driving track 2 and the movement parallel to the second driving track 2; under the same excitation signal and symmetrical structure design, the oblique movement of the first negative movement contact foot 3-1 and the second negative movement contact foot 4-1 is symmetrical relative to the central axis of the movement direction, and has the same phase, positive pressure is generated by the vertical movement between the first negative movement contact foot 3-1 and the first driving track 1 and between the second negative movement contact foot 4-1 and the second driving track 2, and a movement trend generating friction force is provided by the parallel movement between the first negative movement contact foot 3-1 and the first driving track 1 and between the second negative movement contact foot 4-1 and the second driving track 2, so that the first negative movement contact foot 3-1 dials the first driving track 1 and the second negative movement contact foot 4-1 dials the second driving track 2, and the X-structure resonant piezoelectric actuator is jointly pushed to move towards the negative directions relative to the first driving track 1 and the second driving track 2;
when the frequency of sinusoidal alternating current signals applied to the first piezoelectric driving element 7 and the second piezoelectric driving element 8 is f2, the natural modes of the first forward driving foot 5 and the second forward driving foot 6 are excited, the first forward driving contact foot 5-1 positioned at the end part of the first forward driving foot 5 is driven by the first-order resonance mode of the first forward driving foot 5 to obtain oblique movement, and the oblique movement is synthesized by the movement vertical to the first driving track 1 and the movement parallel to the first driving track 1; the second forward driving contact foot 6-1 is positioned at the end part of the second forward driving foot 6, and is driven by a first-order resonance mode of the second forward driving foot 6 to obtain oblique movement, wherein the oblique movement is synthesized by movement vertical to the second driving track 2 and movement parallel to the second driving track 2; under the same excitation signal and symmetrical structure design, the oblique movement of the first forward driving contact foot 5-1 and the second forward driving contact foot 6-1 is symmetrical relative to the central axis of the movement direction, and has the same phase, the vertical movement between the first forward driving contact foot 5-1 and the first driving track 1, the vertical movement between the second forward driving contact foot 6-1 and the second driving track 2 generates positive pressure, the parallel movement between the first forward driving contact foot 5-1 and the first driving track 1, and the parallel movement between the second forward driving contact foot 6-1 and the second driving track 2 provides a movement trend for generating friction force, so that the first forward driving contact foot 5-1 dials the first driving track 1, the second forward driving contact foot 6-1 dials the second driving track 2, and the X-shaped structural resonant piezoelectric actuator is jointly pushed to move forward relative to the first driving track 1 and the second driving track 2.
Compared with the prior art, the invention has the following advantages:
1. the actuator is driven by adopting a resonance principle, and has high actuating speed and high thrust-weight ratio.
2. The actuator can realize bidirectional large-stroke driving only by using single-phase alternating current signals, and the control of driving signals is simple.
3. The actuator is simple in structure, convenient to miniaturize and improve and convenient to assemble and adjust.
Drawings
FIG. 1 is a schematic view of an actuator device of the present invention.
FIG. 2 is a schematic diagram of a negative drive of an actuator device according to the present invention.
FIG. 3 is a schematic view of the forward drive of an actuator device of the present invention.
Detailed Description
The invention is described in further detail below with reference to the drawings and the detailed description.
As shown in fig. 1, the X-type structure resonance piezoelectric actuator capable of being driven in two directions comprises a first driving track 1, a second driving track 2 parallel to the first driving track 1, a first negative movement driving foot 3, a first negative movement contact foot 3-1 arranged at the end part of the first negative movement driving foot 3 and in contact with the first driving track 1, a second negative movement driving foot 4 symmetrically arranged relative to the central axes of the first driving track 1 and the second driving track 2, a second negative movement contact foot 4-1 arranged at the end part of the second negative movement driving foot 4 and in contact with the second driving track 2, a first positive driving foot 5, a first positive movement driving foot 5-1 arranged at the end part of the first positive driving foot 5 and in contact with the first driving track 1, a second positive movement driving foot 6 symmetrically arranged relative to the central axes of the first positive movement driving foot 5 and the second driving track 2, a second positive movement driving foot 6-1 arranged at the end part of the second positive movement driving foot 6 and in contact with the central axes of the first driving track 2, a second positive movement driving foot 6-1 arranged between the first positive driving foot and the second positive driving foot 7 and the second driving foot 8, and a second positive driving foot 7 arranged between the first positive driving foot and the second driving foot 4 and the second driving foot 8 and the second driving element; the first negative driving foot 3, the first positive driving foot 5, the second negative driving foot 4 and the second positive driving foot 6 form an X-shaped structure.
As a preferred embodiment of the invention, the X-shaped resonant piezoelectric actuator has a geometry symmetrical about the central axis of the direction of motion, and the piezoelectric driving element 7 and the piezoelectric driving element 8 are also symmetrically arranged.
As a preferred embodiment of the present invention, the first negative driving foot 3 and the second negative driving foot 4 have the same geometric dimension and the negative driving first order natural frequency f1, the first positive driving foot 5 and the second positive driving foot 6 have the same geometric dimension and the positive driving first order natural frequency f2, the first negative driving foot 3 and the second negative driving foot 4 have higher rigidity than the first positive driving foot 5 and the second positive driving foot 6, and the negative driving first order natural frequency f1 is higher than the positive driving first order natural frequency f2; in order to reduce the coupling influence generated by the deformation of the structure along the non-first-order mode direction in the driving process, other high-order natural modes of the structure are higher than f1 and f2 and are not integer multiples of f1 and f2, so that the coupling motion in the resonance driving process is reduced.
According to the actuating method of the X-shaped structure resonant piezoelectric actuator capable of being driven in two directions, the piezoelectric actuator can control the movement direction of the actuator by changing the driving frequency under the driving of a single-phase sinusoidal alternating current signal; as shown in fig. 2, when the frequency of the sinusoidal ac signal applied to the first piezoelectric driving element 7 and the second piezoelectric driving element 8 is f1, the natural modes of the first negative driving foot 3 and the second negative driving foot 4 are excited, the first negative motion contact foot 3-1 located at the end of the first negative driving foot 3 is driven by the first-order resonance mode of the first negative driving foot 3 to obtain an oblique motion, and the oblique motion is synthesized by a motion perpendicular to the first driving track 1 and a motion parallel to the first driving track 1; the second negative movement contact foot 4-1 positioned at the end part of the second negative driving foot 4 is driven by the first-order resonance mode of the first negative driving foot 4 to obtain oblique movement, and the oblique movement is synthesized by the movement vertical to the second driving track 2 and the movement parallel to the second driving track 2; under the same excitation signal and symmetrical structure design, the oblique movement of the first negative movement contact foot 3-1 and the second negative movement contact foot 4-1 is symmetrical relative to the central axis of the movement direction, and has the same phase, positive pressure is generated by the vertical movement between the first negative movement contact foot 3-1 and the first driving track 1 and between the second negative movement contact foot 4-1 and the second driving track 2, and a movement trend generating friction force is provided by the parallel movement between the first negative movement contact foot 3-1 and the first driving track 1 and between the second negative movement contact foot 4-1 and the second driving track 2, so that the first negative movement contact foot 3-1 dials the first driving track 1 and the second negative movement contact foot 4-1 dials the second driving track 2, and the X-structure resonant piezoelectric actuator is jointly pushed to move towards the negative directions relative to the first driving track 1 and the second driving track 2;
as shown in fig. 3, when the frequency of the sinusoidal ac signal applied to the first piezoelectric driving element 7 and the second piezoelectric driving element 8 is f2, the natural modes of the first forward driving foot 5 and the second forward driving foot 6 are excited, the first forward driving contact foot 5-1 located at the end of the first forward driving foot 5 is driven by the first order resonance mode of the first forward driving foot 5 to obtain an oblique motion, and the oblique motion is synthesized by the motion perpendicular to the first driving track 1 and the motion parallel to the first driving track 1; the second forward driving contact foot 6-1 is positioned at the end part of the second forward driving foot 6, and is driven by a first-order resonance mode of the second forward driving foot 6 to obtain oblique movement, wherein the oblique movement is synthesized by movement vertical to the second driving track 2 and movement parallel to the second driving track 2; under the same excitation signal and symmetrical structure design, the oblique movement of the first forward driving contact foot 5-1 and the second forward driving contact foot 6-1 is symmetrical relative to the central axis of the movement direction, and has the same phase, the vertical movement between the first forward driving contact foot 5-1 and the first driving track 1, the vertical movement between the second forward driving contact foot 6-1 and the second driving track 2 generates positive pressure, the parallel movement between the first forward driving contact foot 5-1 and the first driving track 1, and the parallel movement between the second forward driving contact foot 6-1 and the second driving track 2 provides a movement trend for generating friction force, so that the first forward driving contact foot 5-1 dials the first driving track 1, the second forward driving contact foot 6-1 dials the second driving track 2, and the X-shaped structural resonant piezoelectric actuator is jointly pushed to move forward relative to the first driving track 1 and the second driving track 2.
Claims (4)
1. The utility model provides a but X type structure resonance type piezoelectric actuator of two-way drive which characterized in that: comprises a first driving track (1), a second driving track (2) parallel to the first driving track (1), a first negative movement driving foot (3), a first negative movement contact foot (3-1) positioned at the end part of the first negative movement driving foot (3) and contacted with the first driving track (1), a second negative movement driving foot (4) symmetrically arranged relative to the central axis of the first driving track (1) and the second driving track (2) and positioned at the end part of the second negative movement driving foot (4) and contacted with the second driving track (2), a second negative movement contact foot (4-1) positioned at the end part of the second negative movement driving foot (4) and contacted with the second driving track (2), a first positive movement driving foot (5) positioned at the end part of the first positive movement driving foot (5) and contacted with the first driving track (1), a second positive movement driving foot (6) symmetrically arranged relative to the central axis of the first positive movement driving track (1) and the second driving track (2), a first positive movement driving foot (5) positioned at the end part of the second positive movement driving foot (6) and a second positive movement driving foot (6) positioned at the end part of the first positive movement driving foot (5) and contacted with the first positive movement driving foot (7) and the second driving foot (7), a second piezoelectric driving element (8) mounted between the second negative driving foot (4) and the second positive driving foot (6); the first negative driving foot (3), the first positive driving foot (5), the second negative driving foot (4) and the second positive driving foot (6) form an X-shaped structure.
2. The bi-directionally drivable X-shaped structure resonant piezoelectric actuator of claim 1, wherein: having a geometry symmetrical about the center axis of motion, the first piezoelectric drive element (7) and the second piezoelectric drive element (8) are also symmetrically arranged.
3. The bi-directionally drivable X-shaped structure resonant piezoelectric actuator of claim 1, wherein: the first negative driving foot (3) and the second negative driving foot (4) have the same geometric dimension and a negative driving first order natural frequency f1, the first positive driving foot (5) and the second positive driving foot (6) have the same geometric dimension and a positive driving first order natural frequency f2, compared with the first positive driving foot (5) and the second positive driving foot (4), the rigidity of the first positive driving foot (5) and the second positive driving foot (6) is higher, and the negative driving first order natural frequency f1 is higher than the positive driving first order natural frequency f2; in order to reduce the coupling influence generated by the deformation of the structure along the non-first-order mode direction in the driving process, other high-order natural modes of the structure are higher than f1 and f2 and are not integer multiples of f1 and f2, so that the coupling motion in the resonance driving process is reduced.
4. A method of actuating a bi-directionally drivable X-type structure resonant piezoelectric actuator as claimed in any one of claims 1 to 3, in which: the piezoelectric actuator can control the movement direction of the actuator by changing the driving frequency under the driving of a single-phase sinusoidal alternating current signal; when the frequency of sinusoidal alternating current signals applied to the first piezoelectric driving element (7) and the second piezoelectric driving element (8) is f1, the natural modes of the first negative driving foot (3) and the second negative driving foot (4) are excited, the first negative movement contact foot (3-1) positioned at the end part of the first negative driving foot (3) is driven by the first-order resonance mode of the first negative driving foot (3) to obtain oblique movement, and the oblique movement is synthesized by the movement vertical to the first driving track (1) and the movement parallel to the first driving track (1); the second negative movement contact foot (4-1) is positioned at the end part of the second negative driving foot (4), and is driven by the first-order resonance mode of the first negative driving foot (4) to obtain oblique movement, wherein the oblique movement is synthesized by movement perpendicular to the second driving track (2) and movement parallel to the second driving track (2); under the same excitation signal and symmetrical structure design, the oblique movement of the first negative movement contact foot (3-1) and the second negative movement contact foot (4-1) is symmetrical relative to the central axis of the movement direction, and has the same phase, the vertical movement between the first negative movement contact foot (3-1) and the first driving track (1), the vertical movement between the second negative movement contact foot (4-1) and the second driving track (2) generates positive pressure, the parallel movement between the first negative movement contact foot (3-1) and the first driving track (1), the parallel movement between the second negative movement contact foot (4-1) and the second driving track (2) provides a movement trend for generating friction force, so the first negative movement contact foot (3-1) dials the first driving track (1), the second negative movement contact foot (4-1) dials the second driving track (2), and the X-type structural resonant piezoelectric actuator is jointly pushed to move in the negative directions relative to the first driving track (1) and the second driving track (2);
when the frequency of sinusoidal alternating current signals applied to the first piezoelectric driving element (7) and the second piezoelectric driving element (8) is f2, the natural modes of the first positive driving foot (5) and the second positive driving foot (6) are excited, the first positive driving contact foot (5-1) positioned at the end part of the first positive driving foot (5) is driven by the first-order resonance mode of the first positive driving foot (5) to obtain oblique movement, and the oblique movement is synthesized by the movement perpendicular to the first driving track (1) and the movement parallel to the first driving track (1); the second forward driving contact foot (6-1) is positioned at the end part of the second forward driving foot (6), and is driven by a first-order resonance mode of the second forward driving foot (6) to obtain oblique movement, wherein the oblique movement is synthesized by movement vertical to the second driving track (2) and movement parallel to the second driving track (2); under the same excitation signal and symmetrical structural design, the oblique movement of the first forward driving contact foot (5-1) and the second forward driving contact foot (6-1) is symmetrical relative to the central axis of the movement direction, and the oblique movement has the same phase, the vertical movement between the first forward driving contact foot (5-1) and the first driving track (1), the vertical movement between the second forward driving contact foot (6-1) and the second driving track (2) generates positive pressure, the parallel movement between the first forward driving contact foot (5-1) and the first driving track (1), and the parallel movement between the second forward driving contact foot (6-1) and the second driving track (2) provides a movement trend for generating friction force, so the first forward driving contact foot (5-1) dials the first driving track (1), the second forward driving contact foot (6-1) dials the second driving track (2), and the X-type structural resonant piezoelectric actuator is jointly pushed to move forward relative to the first driving track (1) and the second driving track (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111605668.5A CN114244183B (en) | 2021-12-25 | 2021-12-25 | X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111605668.5A CN114244183B (en) | 2021-12-25 | 2021-12-25 | X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114244183A CN114244183A (en) | 2022-03-25 |
| CN114244183B true CN114244183B (en) | 2023-08-15 |
Family
ID=80763052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111605668.5A Active CN114244183B (en) | 2021-12-25 | 2021-12-25 | X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114244183B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002058266A (en) * | 2000-08-08 | 2002-02-22 | Minolta Co Ltd | Ultrasonic driving device |
| JP2002101676A (en) * | 2000-09-25 | 2002-04-05 | Minolta Co Ltd | Actuator |
| WO2010058985A2 (en) * | 2008-11-19 | 2010-05-27 | (주)하이소닉 | Laminated piezoelectric element, a driver using a piezoelectric element, and a miniature camera drive device using the same |
| CN102437783A (en) * | 2011-12-22 | 2012-05-02 | 哈尔滨工业大学 | Paster type I-shaped four-foot linear ultrasonic motor vibrator |
| CN109617449A (en) * | 2018-12-05 | 2019-04-12 | 南京航空航天大学 | Six sufficient actuator and its working method based on Piezoelectric Driving |
| CN112803829A (en) * | 2021-01-13 | 2021-05-14 | 吉林大学 | Friction asymmetric inertia piezoelectric linear driving device and method |
| EP3836390A1 (en) * | 2019-12-13 | 2021-06-16 | Miniswys Sa | Method for operating a drive unit and drive unit |
-
2021
- 2021-12-25 CN CN202111605668.5A patent/CN114244183B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002058266A (en) * | 2000-08-08 | 2002-02-22 | Minolta Co Ltd | Ultrasonic driving device |
| JP2002101676A (en) * | 2000-09-25 | 2002-04-05 | Minolta Co Ltd | Actuator |
| WO2010058985A2 (en) * | 2008-11-19 | 2010-05-27 | (주)하이소닉 | Laminated piezoelectric element, a driver using a piezoelectric element, and a miniature camera drive device using the same |
| CN102437783A (en) * | 2011-12-22 | 2012-05-02 | 哈尔滨工业大学 | Paster type I-shaped four-foot linear ultrasonic motor vibrator |
| CN109617449A (en) * | 2018-12-05 | 2019-04-12 | 南京航空航天大学 | Six sufficient actuator and its working method based on Piezoelectric Driving |
| EP3836390A1 (en) * | 2019-12-13 | 2021-06-16 | Miniswys Sa | Method for operating a drive unit and drive unit |
| CN112803829A (en) * | 2021-01-13 | 2021-05-14 | 吉林大学 | Friction asymmetric inertia piezoelectric linear driving device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114244183A (en) | 2022-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6806621B2 (en) | Electroactive polymer rotary motors | |
| US7166953B2 (en) | Electroactive polymer rotary clutch motors | |
| CN103701358B (en) | Balance weight type variable contact force piezoelectric motor | |
| CN103427704A (en) | Double-foot driving piezoelectric linear motor and electric excitation mode | |
| CN109787505B (en) | Linear piezoelectric motor and driving method thereof | |
| CN113726216B (en) | Non-same-frequency double-stator driving piezoelectric motor | |
| CN106992712B (en) | Piezoelectricity-hydraulic hybrid linear type stepper motor and its working method | |
| CN114244183B (en) | X-shaped structure resonance type piezoelectric actuator capable of being driven in two directions and actuating method thereof | |
| Spanner et al. | Design of linear ultrasonic micro piezo motor for precision mechatronic systems | |
| CN111049422B (en) | Clamping control inertial impact motor | |
| CN110635711B (en) | Nanometer displacement linear stepping motor | |
| CN101860257A (en) | Miniature piezoelectric monocrystal linear motor | |
| CN113708660A (en) | High-speed resonance impact type piezoelectric motor | |
| CN102868316A (en) | Paster-type dual-feet ultrasound motor oscillator | |
| CN102569637B (en) | Piezoelectric drive and piezoelectric motor | |
| CN105811802B (en) | A kind of heavy load based on submissive foot driving, high accuracy, across yardstick piezoelectric linear motor | |
| CN102118118A (en) | Linear type ultrasonic micromotor | |
| CN214480332U (en) | Differential inertia type piezoelectric rotary driver | |
| CN109495011B (en) | Arc-shaped vibrator linear piezoelectric motor and driving method thereof | |
| CN219237205U (en) | Miniature piezoelectric bidirectional mobile robot | |
| CN105958861B (en) | A kind of piezo-electric motor with half-crescent shape elastomer | |
| CN114244181A (en) | High power density piezoelectric actuator and piezoelectric motor | |
| CN116155136B (en) | Two-degree-of-freedom decoupling large-stroke flexible structure micro-motion platform | |
| CN110752768B (en) | Piezoelectric precision driving device based on asymmetric triangular arc type flexible hinge mechanism | |
| WO2004082037A2 (en) | A motor combining a resonant vibration mode, a stepping mode and a direct positioning mode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |