CN102903730A - Mask frame assembly used for organic deposition and package, and manufacturing method and device thereof - Google Patents
Mask frame assembly used for organic deposition and package, and manufacturing method and device thereof Download PDFInfo
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- CN102903730A CN102903730A CN201210295635XA CN201210295635A CN102903730A CN 102903730 A CN102903730 A CN 102903730A CN 201210295635X A CN201210295635X A CN 201210295635XA CN 201210295635 A CN201210295635 A CN 201210295635A CN 102903730 A CN102903730 A CN 102903730A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 230000008021 deposition Effects 0.000 title claims abstract description 10
- 238000003466 welding Methods 0.000 claims abstract description 42
- 239000011521 glass Substances 0.000 claims abstract description 27
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 27
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 229910000679 solder Inorganic materials 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 10
- 238000005538 encapsulation Methods 0.000 claims description 8
- 230000007246 mechanism Effects 0.000 claims description 8
- 238000005452 bending Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 abstract description 4
- 229920001621 AMOLED Polymers 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 238000005755 formation reaction Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
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- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000011218 segmentation Effects 0.000 description 4
- 208000012271 tenesmus Diseases 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
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- 238000001704 evaporation Methods 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Electroluminescent Light Sources (AREA)
Abstract
The invention relates to a mask frame assembly used for organic deposition and package for manufacturing a white light OLED panel in a manufacturing process of a television used for white light OLED, a manufacturing method and a manufacturing device thereof. The manufacturing device of the mask frame assembly used for organic deposition and package is composed of a frame and mask supply device, a frame loading device, a glass matrix and loading apparatus, a mask supply device, a camera device used for aligning the positions of the mask and the glass matrix and a device for welding the mask on the frame. The assembly comprises a pair of oppositely disposed moving clamps of short edge (Y axis) of the frame, which clamp two ends of a mask band and can move along the short edge of the frame under the condition of applying a tensile force; and a pair of oppositely disposed moving clamps of long edge (X axis) of the frame, which clamp two ends of the mask band and can move along the long edge of the frame under the condition of applying a tensile force.
Description
Technical field
A kind of white light OLED that relates to of the present invention is done in the technique in order to make organic deposit and the encapsulation mask frame of white light OLED panel with tv mechanism, its manufacture method and making apparatus, more particularly relate to a kind of in order to maximize with the white light OLED that active matrix organic light-emitting diode (AMOLED) panel (AMOLED) gets most of the attention more than the 4th generation, and utilize the mask frame of a plurality of metal bar mask manufactures, with its manufacture method and making apparatus.
Background technology
The response speed of OLED (Organic Light Emitting Diode) is faster than Thin Film Transistor-LCD (TF T LCD).In addition, because self can be luminous, need not backlight, so thickness and weight can reduce 1/3rd, be time from generation to generation display with wide visual angle and low power consumption structure.
Such OLED is divided into AM mode (initiatively) and PM mode (passive).Passive matrix organic light emitting diode (AMOLED) panel (PMOLED) is than active matrix organic light-emitting diode (AMOLED) panel (AMOLED), low production cost, but be restricted in power consumption, life-span, resolution.AMOLED uses TFT and electric capacity in each pixel, all very outstanding on power consumption, life-span, resolution side, therefore ignored the high shortcoming of production cost that causes because TFT makes, in every field, be subject at present developing widely and in rapid succession volume production trial.The great advantage of AMOLED is its competitiveness on image quality.Than maximum contention adversary's LCD, its recall factor of checking colors has exceeded 30%, contrast even outstanding 20 times more than.The image image retention effects of LCD disadvantage also has no way of looking in AMOLED.This be because, in contrast to LCD, backlight be with indirect light source by liquid crystal, chromatic filter etc., for the picture disply of complexity, AMOLED is by the self-colored picture of the luminous direct reproduction of organic substance self.In addition, OLED is than LCD, and its structure is very simple, and is therefore also highly beneficial in the parts side.
But when checking OLED material original cost, drive circuit, drive IC price, the devaluation ratio of OLED arrives greatly unexpectedly, has accounted for half of total cost.This is because OLED universalness between the consumer not yet causes being difficult to play the effect that reduces production costs by large-scale production.
Because this realistic problem, white light OLED technology become recently emerging Display Technique.White light OLED is carried out simple declaration is exactly, the technology that the advantage of the advantage of LCD panel and AMOLED panel is merged.
That is, place white light OLED and the TFT with handoff functionality at the R/G/B of display color primary colors filter, the white light OLED that self is luminous switches to the Display Technique that TFT shows R/G/B primary colors color filter.
If this white light OLED panel can be realized maximizing, can provide other volume production yield of LCD level the popular high-quality display floater suitable with AMOLED.
But present truth is, also do not provide can produce in a large number LCD that present masses popularize or PDP level other more than 40 inches or the 8th generation above white light OLED panel technology, therefore popularizing high-quality display floater is remote truth.
Really be to possess large-sized coil to realize individual mode, but be difficult to utilize the mask of individual formation to realize that the reason that maximizes is, the size that the raw-material coil of mask is supplied with, not the size dimension production to maximize required.That is, because profitability problem, coil production merchant can not remove to produce the coil that white light OLED shows the required size of manufacturer.
In addition, for a large amount of white light OLED panels of making more than the 4th generation, if have fine, the white light OLED that can also deposit white light OLED is simultaneously laid the groundwork with the manufacturing technology of mask frame, just can overcome the yield problem and realize volume production, but the manufacturing technology of most mask frame or equipment all are for the purposes of LCD or the making of AMOLED panel, therefore are difficult to directly be applied as the white light OLED mask frame.
Concrete reason is that the AMOLED that formed the LCD of maximization in the past or developing the maximization technology is with in the manufacture method or making apparatus of mask frame, such as FMM Type OLED, for R/G/B is precipitated with organic substance, utilization has formed the metal mask (Fine Metal MASK) of corresponding intensive groove in each pixel, utilize open mask that Metal is deposited and encapsulates.But white light OLED is different with it, for corresponding R/G/B color, has used the filter that uses in the LCD manufacture craft, has therefore all utilized open mask in White organic deposition and metal deposition and packaging technology.Therefore, do not need the applied metal mask, multiaspect is got when making in individual inside that is produced on of open mask, can be because the restricted and very difficult application of Mask Coil Size.
In addition, as shown in figure 11, get the mode in the past that multiaspect is made in individual inside, be difficult to make mask in the situation that not tenesmus is kept tension force, critically settled, therefore, be difficult to produce large-area white light OLED mask frame.
That is, if mask does not have tension force, meeting cause central authorities' appearance of mask sagging because the position is accurate not, and is influential to shade (Shadow) and deposition position, so the white light OLED panel of fine can't be provided, and the problem that yield reduces occurs.
Summary of the invention
(technical problem that will solve)
In order to solve as mentioned above problem, the object of the present invention is to provide a kind of mask frame and preparation method thereof and making apparatus, in order to make the white light OLED panel more than the 4th generation obtain volume production, that the mask rod is mobile and navigate to groove is divided into the position that can hold required large picture frame area.For tenesmus etc. occurs the middle body that does not make mask, it is applied manufacture method and the making apparatus that welds behind the tension force when cutting apart, make mask frame with it.
(equipment of dealing with problems)
In order to reach as mentioned above purpose and removal shortcoming in the past, the object of the present invention is to provide white light OLED to do in the technique with tv mechanism, for the organic deposit of making the white light OLED panel and the manufacture method that encapsulates the usefulness mask frame, it is characterized in that, comprising:
(A) in order to determine the attachment position of mask band, and carry out the stage of glass basis location;
(B) in order to fix by the solder mask band, and carry out the stage that framework is written into;
(C) stage that limit (X-axis) mobile model anchor clamps are controlled is grown at framework minor face (Y-axis) mobile model anchor clamps or framework in the two ends of mask band;
(D) framework minor face (Y-axis) the mobile model anchor clamps at two ends are moved to pad along framework short side direction or the long limit (Z axis) of framework mobile model anchor clamps along the framework long side direction after, apply the stage that mask band display part that tension force forms at glass basis aligns;
(E) in order to prevent from keeping with the glass basis display part bending of the mask band that aligns, utilize the θ angular adjustment motor that possesses on framework minor face mobile model anchor clamps or long limit (X-axis) the mobile model anchor clamps to regulate the stage of θ angle;
(F) will determine that position and the two ends of having regulated the mask band of θ angle are welded in the stage on the framework;
(G) repeat the stage in (C) stage to (F) stage, so that need to be arranged on the minor face (Y-axis) of framework or the mask band number on the long limit (X-axis).
The present invention is as preferred embodiment, by described (F) or (G) in the stage, utilize the long limit (X-axis) of framework mobile model anchor clamps, after the two ends of determining the position and having regulated the mask band of θ angle are welded on the framework, consist of in the stage of framework minor face welding with the mask band cross part that has arranged.
The present invention is as preferred embodiment, and described welding sequence can connect the mask band in the long side weld of framework first again behind framework minor face solder mask band.
The present invention is as preferred embodiment, and the welding sequence on the minor face of described framework and the long limit can be welded with the direction from the inboard to the outside.
The present invention is as preferred embodiment, and in described a plurality of mask bands with the welding of framework short side direction, the mask band of both sides and the comprehensive engagement of long margin frame frame are also welded;
In described a plurality of mask bands with the welding of framework long side direction, the mask band of both sides and the comprehensive engagement of minor face framework and welding.
The present invention is with another example, provide white light OLED to do in the technique with tv mechanism, for the organic deposit of making the white light OLED panel and the making apparatus that encapsulates the usefulness mask frame, described white light OLED panel is made of the mask frame making apparatus and is made of with camera apparatus, equipment that mask is welded in framework the aligned in position of framework and mask supply arrangement, framework charging appliance, glass basis supply and charging appliance, mask supply arrangement, mask and glass basis, it is characterized in that, comprising:
A pair of opposed framework minor face (Y-axis) mobile model anchor clamps are controlled the two ends of mask band, can be in the situation that apply tension force and move along the framework short side direction;
The long limit (X-axis) of a pair of opposed framework mobile model anchor clamps are controlled the two ends of mask band, can be in the situation that apply tension force and move along the framework long side direction.
The present invention is as preferred embodiment, and the formation of the long limit (X-axis) of described framework minor face (Y-axis) mobile model anchor clamps and framework mobile model anchor clamps more comprises: θ angular adjustment motor, regulate the mask band θ angle that is transplanted on; The θ axle is regulated buffer device, in the other direction support, controls cylinder and cylinder section because of what contacting of the connecting rod that advances with the rotation of described θ angular adjustment motor rotated.
The present invention is as preferred embodiment, and the long limit (X-axis) of described framework minor face (Y-axis) mobile model anchor clamps and framework mobile model anchor clamps are installed on and carry out accurate reciprocating motion on the linear servo-actuator.
The present invention is with another example, provide white light OLED to do in the technique with tv mechanism, use mask frame for organic deposit and the encapsulation of making the white light OLED panel, it is characterized in that, comprise: made by described mask frame manufacture method, form peripheral framework;
More than one mask band welds setting across the inner space at long limit and the minor face of described framework;
The mask band is with long limit and minor face comprehensive engagement and the welding of described framework;
A plurality of white light OLEDs deposition grooves by the minor face of described framework or grow the mask band that welds on the limit, are formed at the inner space.
(effect of invention)
Aforesaid the present invention has, and in order to make the white light OLED panel of above large tracts of land of the 4th generation, provides organic deposit and the encapsulation advantage with mask frame;
In addition, utilize on the long limit of each pair of frames and the short side direction opposed altogether after four anchor clamps are controlled the mask band of supply, on the position of wanting with the advantage of mask band precision positioning;
In addition, can be when the mask band apply tension force and locate, regulate the θ angle and place bending and tenesmus, make thus the white light OLED panel of fine, prevent the useful invention of the advantage of shade phenomenon etc., its utilization industrially enjoys expectation.
Description of drawings
Fig. 1 is mask frame is used in expression according to the white light OLED of the use mask band slot segmentation of one embodiment of the invention floor map.
Fig. 2 is the floor map that represents the white light OL ED usefulness mask frame of use mask band slot segmentation according to another embodiment of the present invention.
Fig. 3 is that expression is according to the schematic flow sheet of solder mask in the framework that utilizes the mobile model anchor clamps of one embodiment of the invention.
Fig. 4 is that expression is according to the schematic diagram of the equipment of solder mask in the framework that utilizes the mobile model anchor clamps of one embodiment of the invention.
Fig. 5 is that expression is according to the integral body formation skeleton diagram of one embodiment of the invention.
Fig. 6 is that expression is according to the schematic diagram of the calibration equipment of the θ angle of one embodiment of the invention.
Fig. 7 is the schematic diagram that expression spurs up and down equipment according to framework and the glass basis of one embodiment of the invention.
Fig. 8 is that expression is according to the schematic diagram of the mask band charging appliance of one embodiment of the invention.
Fig. 9 is that expression is according to the image of one embodiment of the invention and the schematic diagram of laser welding apparatus.
Figure 10 is the manufacture method flow chart of expression mask frame of the present invention.
Figure 11 represents to get in individual inside multiaspect to make the schematic diagram that white light OLED is used mask frame in the past.
(description of reference numerals)
1: framework 2a, 2b: the mask band
3: groove 4a: framework minor face (Y-axis) mobile model anchor clamps
4b: the long limit (X-axis) of framework mobile model anchor clamps
5: linear servo- actuator 41a, 41b: cylinder
42a, 42b: control cylinder
6: the up and down pulling equipment of framework and glass basis
7: mask band charging appliance
8: image and laser welding apparatus
9: image and laser welding apparatus are transferred and are used linear servo-actuator
10: θ pivot hinge 11: θ angular adjustment motor
12: the θ axle is regulated buffer device 13: θ axle permanent plant
15: mobile model anchor clamps Up/Down motor
Embodiment
With reference to the accompanying drawings, formation and its effect of embodiments of the invention are specifically described.In addition, in explanation process of the present invention, think when judgement and to omit it and to specify may obscure main idea of the present invention to specifying of relevant well-known function or formation the time.
Fig. 1 is mask frame is used in expression according to the white light OLED of the use mask band slot segmentation of one embodiment of the invention floor map.Fig. 2 is the floor map that represents the white light OLED usefulness mask frame of use mask band slot segmentation according to another embodiment of the present invention.
As shown in the figure, the structure according to mask frame of the present invention comprises: the framework 1 that forms periphery; More than one mask band 2a is across the inner space of described framework and be welded on its long limit and the minor face; Mask band 2b is with long limit and minor face comprehensive engagement and the welding of described framework; A plurality of white light OLEDs deposition usefulness grooves 3 are formed at the framework inner space by the minor face that is welded in described framework or the mask band of growing the limit.
Described mask band 2a does not have for it is inner to cut apart mask such as the compression of the rectangular form of any processing such as groove.
Mask frame of the present invention is to be used in the organic deposit (Evapo ration) of making in the white light OLED and the mask frame that encapsulates (Passivation).
The framework that is applicable to described mask frame is deposition framework (Frame), and its material is used iron-nickel alloy (Invar36) and stainless steel (SUS420).The thickness that preferably use this moment is 30mmt and 20mmt, and thickness deviation is that 100 μ mt are following, flatness is below the 50 μ m.Certainly, this is the preferred example for proposing only, and the present invention is not limited in the aforesaid numerical value.
In addition, preferably to use the thickness that can weld be iron-nickel alloy (Invar), stainless steel (Stainless Steel), the nickel-cobalt alloy (Ni-Co Alloy) of 100 μ m mouths 10% to the material of described mask band.
In addition, when utilizing described framework and mask band to make mask frame, the impact that causes in order to minimize variations in temperature, framework preferably uses identical material with the mask band.
Because possessed the mask frame that consists of as mentioned above, so that can be by described white light OLED deposition groove 3 as organic white light OLED sedimentary origin, be deposited on the object glass substrate, make thus the making of above large tracts of land white light OLED panel of the 4th generation (benchmark of glass substrate is respectively the size of 780mm and the 920mm anyhow) possibility that becomes.If this white light OLED panel is made, can adhere in its front R/G/B primary colors filter, and during by white light OLED change action luminous, show with color representation.
Fig. 3 is the schematic flow sheet that represents according to solder mask in the framework that utilizes the mobile model anchor clamps of one embodiment of the invention, and Fig. 4 is that expression is according to the schematic diagram of the equipment of solder mask in the framework that utilizes the mobile model anchor clamps of one embodiment of the invention.
As shown in the figure, the fixed anchor clamps that mask frame of the present invention is different from the past, but utilize the mobile model anchor clamps that the mask band is consisted of in framework location and welding.
For this reason, mask frame of the present invention by, with lframe cross piece in the centre and opposed pair of frames minor face (Y-axis) mobile model anchor clamps 4a with lframe cross piece in the centre and long limit (X-axis) the mobile model anchor clamps 4b of opposed pair of frames consist of.Use altogether 4 mobile model anchor clamps with the mask Tape movement at the ad-hoc location of wanting to move to, apply on tension force and welding and the framework.
At this moment, preferred welding sequence is, first behind the minor face solder mask band of framework again the long side weld of framework connect the mask band, on minor face and the long limit by the direction welding of inboard to the outside.Specify welding sequence in the minor face according to an illustrated embodiment and serve as reasons that inboard 1., 2. direction 3. laterally, 4. the order of position is carried out in the position.In addition, grow welding sequence in the limit and serve as reasons that direction 6. laterally, 7. the order of position is carried out in inboard 5. position.If be not limited to order as above when cutting apart such as drawing.
But in a plurality of mask bands that described framework short side direction welds, the mask band of both sides always also welds with the comprehensive engagement of long margin frame frame; In a plurality of mask bands that described framework long side direction welds, the mask band of both sides always also welds with the comprehensive engagement of minor face framework.Consist of thus and prevent that width is than tenesmus or the distortion of the short mask band of length direction.
Weld as mentioned above, because framework does not have distortion to make the structure of the mask frame of finishing become firm.
If more specifically describe according to Fig. 4, be that long limit (X-axis) the mobile model anchor clamps 4b of pair of frames minor face (Y-axis) mobile model anchor clamps 4a and framework carries out critically back and forth movement being arranged on the linear servo-actuator of its underpart (Liner servo motor, 5) respectively.That is, these a pair of described framework minor face (Y-axis) mobile model anchor clamps motion that always on linear servo-actuator (Liner servo motor, 5), links.The long limit (X-axis) of pair of frames mobile model anchor clamps also as above are arranged at the motion that links on the linear servo-actuator.
In addition, long limit (X-axis) the mobile model anchor clamps 4b of framework minor face (Y-axis) mobile model anchor clamps 4a and framework not only can be at linear servo-actuator (Liner servo motor, 5) carry out back and forth movement on, also in order to seesaw in the direction of quadrature therewith, its inside consists of respectively cylinder 41a, 41b in order to control the mask band of loading, controls the mask band by controlling cylinder 42a, 42b after anchor clamps seesaw.After controlling, the mask band is done rectilinear motion at linear servo-actuator, is transplanted on the position of welding and stops.Behind mobile the stopping, with after image and the laser welding apparatus chatted move, align between the position that makes the mask band and glass basis and weld.
Can be according to order shown in Figure 3 when loading aforesaid mask band, first behind the minor face solder mask band of framework, connect the mask band in the long side weld of framework.
Fig. 5 is that expression is according to the integral body formation skeleton diagram of one embodiment of the invention, Fig. 6 is that expression is according to the schematic diagram of the calibration equipment of the θ angle of one embodiment of the invention, Fig. 7 is the schematic diagram that expression spurs up and down equipment according to framework and the glass basis of one embodiment of the invention, Fig. 8 is the schematic diagram that represents according to the mask band charging appliance of one embodiment of the invention, and Fig. 9 is that expression is according to the image of one embodiment of the invention and the schematic diagram of laser welding apparatus.
As shown in the figure, mask frame of the present invention, its formation comprises: image and glass basis spur up and down equipment 6, can load to comprise on the linear servo-actuator 5 that framework minor face (Y-axis) the mobile model anchor clamps 4a that arranges grows the integral device of limit (X-axis) mobile model anchor clamps 4b with framework and at its underpart Locating Glass matrix; Mask band charging appliance 7, the mask band that long limit (X-axis) the mobile model anchor clamps 4b of framework minor face (Y-axis) mobile model anchor clamps 4a and framework can be controlled and transfers spurs up and down; Image and laser welding apparatus 8, its inside possesses video camera, laser displacement sensor, laser welding apparatus, the mask band can be alignd with glass basis and framework and mask band are welded; Transfer with linear servo-actuator (Liner servo motor, 9) with image and laser welding apparatus, can transfer described image and laser welding apparatus.
In addition, can possess θ angular adjustment motor 11, fine regulate the θ angle that long limit (X-axis) the mobile model anchor clamps 4b of framework minor face (Y-axis) mobile model anchor clamps 4a or framework occurs in handover.
Namely, the long limit (X-axis) of framework minor face (Y-axis) mobile model anchor clamps 4a or framework though the mask band of mobile model anchor clamps 4b in controlling and transferring transfer by the linear servo-actuator of precision, also may be in the situation that trickle angle occurs and change and transferred.Be not directly welded in the mask frame that to produce poor quality on the framework if do not carry out in this state revisal, and can't use.Mode in the past, during if there is θ angle as mentioned above, can the mask band be adjusted back to initial position and re-start handover, such operation not only can be by increasing numerous and diverse technique number, the shortcoming of the time that increases consumption, can't ensure that also the θ angle correctly proofreaies and correct.In order to solve such problem, the present invention has possessed the calibration equipment that can implement the revisal operation on correspondence position.
Can substitute θ angular adjustment motor 11, can use the passive type micrometer, but use θ angular adjustment motor 11 can carry out precision control.This motor preferably uses such as the accurate control such as servomotor or stepping motor motor.
Specifically, the present invention is for revisal θ angle, centered by the θ pivot hinge 10 that is arranged on mobile model anchor clamps 4b bottom, the long limit (X-axis) of framework minor face (Y-axis) mobile model anchor clamps 4a or framework, θ angular adjustment motor 11 and θ axle are set regulate buffer device 12, described θ angular adjustment motor 11 rotary setting are controlled the part of cylinder 42a, 42b and cylinder 41a, 41b; With θ angular adjustment motor 11 opposed directions the θ axle is set and regulates buffer device 12, in the other direction support, control cylinder 42a, 42b and cylinder 41a, 41b section because of what contacting of the connecting rod 111 that advances with the rotation of described θ angular adjustment motor 11 rotated.
According to the θ angle that described θ angular adjustment motor 11 trickle rotarily drives before the connecting rod and then cause, rod-pulling type or the screw θ axle permanent plant 13 that can be positioned at the rear are fixed as the θ angle of adjusting.
Possess mobile model anchor clamps Up/Down motor 14 in mobile model anchor clamps 4b bottom, the long limit (X-axis) of described framework minor face (Y-axis) mobile model anchor clamps 4a or framework, utilize it to carry out the repeatedly degree that repeatedly Up/Down comes the measuring position.That is, after framework and glass basis spur up and down indicating device (Indicator-is not shown) are set on the equipment 6, with 20mm repeatedly long limit (X-axis) the mobile model anchor clamps 4b of movable frame minor face (Y-axis) mobile model anchor clamps 4a or framework come the measuring position.Measuring number of times is each anchor clamps (Gripper) about 20 times, and it is reached below the 10um.
It is the formations of carrying out lifting by a plurality of cylinders that described framework and glass basis spur up and down equipment 6, possess the anchor clamps of supporting frame and glass basis etc., as above constitute the formation of the general equipment that spurs up and down, technical staff with common knowledge can implement simply by drawing, therefore omits careful explanation.
Described mask band charging appliance 7 is the formations of carrying out lifting by a plurality of cylinders, possess the anchor clamps of support mask band etc., as above constitute the formation of general charging appliance, the technical staff with common knowledge can implement simply by drawing, therefore omits careful explanation.
Described image and laser welding apparatus 8; Transfer with linear servo-actuator (Liner servo motor with image and the laser welding apparatus of mobile described image and laser welding apparatus, 9) constitute common formation, technical staff with common knowledge can implement simply by drawing, therefore omits careful explanation.
According to the making apparatus of mask frame as mentioned above, for the manufacture method of the mask frame of making the white light OLED panel, carry out stage according to Figure 10 and be described as follows, by
(A) in order to determine the attachment position of mask band, and carry out the stage S100 of glass basis location;
(B) in order to fix by the solder mask band, and carry out the stage S200 that framework is written into;
(C) the stage S300 that limit (X-axis) mobile model anchor clamps are controlled is grown at framework minor face (Y-axis) mobile model anchor clamps or framework in the two ends of mask band;
(D) framework minor face (Y-axis) the mobile model anchor clamps at two ends are moved to pad along framework short side direction or the long limit (Z axis) of framework mobile model anchor clamps along the framework long side direction after, apply the stage S400 that mask band display part that tension force forms at glass basis aligns;
(E) in order to prevent from keeping with the glass basis display part bending of the mask band that aligns, utilize the θ angular adjustment motor that possesses on framework minor face (Y-axis) mobile model anchor clamps or long limit (X) the mobile model anchor clamps to regulate the stage S500 of θ angle;
(F) will determine that position and the two ends of having regulated the mask band of θ angle are welded in the stage S600 on the framework;
(G) be arranged on as required the minor face (Y-axis) of framework or the mask band number on the long limit (X-axis), the stage S700 that repeats (C) stage to (F) stage consists of.
Described (F) or (G) in the stage utilizes the long limit (X-axis) of framework mobile model anchor clamps to determine the position and after the two ends of having regulated the mask band of θ angle are welded on the framework, in the stage of framework minor face welding with the mask band cross part that has arranged.
Welding sequence on the minor face of described framework and the long limit is welded with the direction from the inboard to the outside.
In described a plurality of mask bands with the welding of framework short side direction, the mask band of both sides and the comprehensive engagement of long margin frame frame and welding; In described a plurality of mask bands with the welding of framework long side direction, the mask band of both sides and the comprehensive engagement of minor face framework and welding.
The present invention is not limited to above-mentioned specific preferred embodiment, the general technical staff of the technical field of the invention is to be understood that, within not breaking away from claims scope in the desired main idea situation of the present invention, can therefrom realize various deformation enforcement, as above change is in the scope of claim scope record.
Claims (9)
1. the manufacture method of a mask frame, it is used for white light OLED and does organic deposit and the encapsulation that technique is made the white light OLED panel with tv mechanism, it is characterized in that, comprising:
(A) in order to determine the attachment position of mask band, and carry out the stage of glass basis location;
(B) in order to fix by the solder mask band, and carry out the stage that framework is written into;
(C) stage that limit (X-axis) mobile model anchor clamps are controlled is grown at framework minor face (Y-axis) mobile model anchor clamps or framework in the two ends of mask band;
(D) framework minor face (Y-axis) the mobile model anchor clamps at two ends are moved to pad along framework short side direction or the long limit (Z axis) of framework mobile model anchor clamps along the framework long side direction after, apply the stage that mask band display part that tension force forms at glass basis aligns;
(E) in order to prevent from keeping with the glass basis display part bending of the mask band that aligns, utilize the θ angular adjustment motor that possesses on framework minor face mobile model anchor clamps or long limit (X-axis) the mobile model anchor clamps to regulate the stage of θ angle;
(F) will determine that position and the two ends of having regulated the mask band of θ angle are welded in the stage on the framework;
(G) repeat the stage in (C) stage to (F) stage, so that need to be arranged on the minor face (Y-axis) of framework or the mask band number on the long limit (X-axis).
2. the manufacture method of mask frame according to claim 1 is characterized in that,
Described (F) or (G) in the stage, after the two ends that utilize the long limit (X-axis) of framework mobile model anchor clamps to determine the position and regulated the mask band of θ angle are welded on the framework, consist of in the stage of framework minor face welding with the mask band cross part that has arranged.
3. the manufacture method of mask frame according to claim 1 is characterized in that,
Described welding sequence is for connecing the mask band in the long side weld of framework more first behind framework minor face solder mask band.
4. the manufacture method of mask frame according to claim 1 is characterized in that,
Welding sequence on the minor face of described framework and the long limit can be welded with the direction from the inboard to the outside.
5. the manufacture method of mask frame according to claim 1 is characterized in that,
In described a plurality of mask bands with the welding of framework short side direction, the mask band of both sides and the comprehensive engagement of long margin frame frame and welding;
In described a plurality of mask bands with the welding of framework long side direction, the mask band of both sides and the comprehensive engagement of minor face framework and welding.
6. the making apparatus of a mask frame, it is used for, and white light OLED is made technique with tv mechanism in order to make organic deposit and the encapsulation of white light OLED panel, this equipment is made of with camera apparatus, equipment that mask is welded in framework the aligned in position of framework and mask supply arrangement, framework charging appliance, glass basis supply and charging appliance, mask supply arrangement, mask and glass basis, it is characterized in that, comprising:
A pair of opposed framework minor face (Y-axis) mobile model anchor clamps are controlled the two ends of mask band, can be in the situation that apply tension force and move along the framework short side direction;
The long limit (X-axis) of a pair of opposed framework mobile model anchor clamps are controlled the two ends of mask band, can be in the situation that apply tension force and move along the framework long side direction.
7. the making apparatus of mask frame according to claim 6 is characterized in that, the formation of the long limit (X-axis) of described framework minor face (Y-axis) mobile model anchor clamps and framework mobile model anchor clamps more comprises:
θ angular adjustment motor is regulated the mask band θ angle that is transplanted on;
The θ axle is regulated buffer device, in the other direction support, controls cylinder and cylinder section because of what contacting of the connecting rod that advances with the rotation of described θ angular adjustment motor rotated.
White light OLED according to claim 6 with tv mechanism do in the technique for the organic deposit of making the white light OLED panel and encapsulation with the making apparatus of mask frame, it is characterized in that,
The long limit (X-axis) of described framework minor face (Y-axis) mobile model anchor clamps and framework mobile model anchor clamps are installed on and carry out accurate reciprocating motion on the linear servo-actuator (Liner servo motor).
9. a white light OLED of being made by the mask frame man assembly making method of any one in the described claim 1 to 5 is made organic deposit and encapsulation mask frame in order to make the white light OLED panel in the technique with tv mechanism, it is characterized in that, comprising:
Form peripheral framework;
More than one mask band welds setting across the inner space at long limit and the minor face of described framework;
The mask band is with long limit and minor face comprehensive engagement and the welding of described framework;
A plurality of white light OLEDs deposition grooves by the minor face of described framework or grow the mask band that welds on the limit, are formed at the inner space.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2011-0082895 | 2011-08-19 | ||
| KR1020110082895A KR101295354B1 (en) | 2011-08-19 | 2011-08-19 | Mask frame assembly for evaporation and pssivation for manufacturing White OLED panel, manufacturing method and apparatus thereof |
Publications (2)
| Publication Number | Publication Date |
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| CN102903730A true CN102903730A (en) | 2013-01-30 |
| CN102903730B CN102903730B (en) | 2016-07-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210295635.XA Active CN102903730B (en) | 2011-08-19 | 2012-08-17 | Organic deposit and encapsulation mask frame, its manufacture method and equipment |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101295354B1 (en) |
| CN (1) | CN102903730B (en) |
| TW (1) | TWI488541B (en) |
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Also Published As
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| TWI488541B (en) | 2015-06-11 |
| KR101295354B1 (en) | 2013-08-12 |
| TW201306651A (en) | 2013-02-01 |
| CN102903730B (en) | 2016-07-06 |
| KR20130020325A (en) | 2013-02-27 |
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