CN102166685B - Three-coordinate galvanometer scanning laser processing head - Google Patents
Three-coordinate galvanometer scanning laser processing head Download PDFInfo
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- CN102166685B CN102166685B CN 201110106793 CN201110106793A CN102166685B CN 102166685 B CN102166685 B CN 102166685B CN 201110106793 CN201110106793 CN 201110106793 CN 201110106793 A CN201110106793 A CN 201110106793A CN 102166685 B CN102166685 B CN 102166685B
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Abstract
The invention provides a three-coordinate galvanometer scanning laser processing head, which comprises an XY two-axis laser galvanometer system, a clamping mechanism, a Z-axis moving mechanism, a laser displacement sensor and a control system, wherein the Z-axis moving mechanism comprises a fixed part and a moving part, and the clamping mechanism is fixedly mounted on the fixed part of the Z-axis moving mechanism; and the XY two-axis laser galvanometer system and the laser displacement sensor are fixedly mounted on the moving part of the Z-axis moving mechanism, and the laser displacement sensor, the Z-axis moving mechanism and the XY two-axis laser galvanometer system are all electrically connected with the control system. The laser processing head has the function of dynamic focal length setting, and has an independent and compact structure; the laser processing head has the broach interface design of a standard numerically-controlled machine tool, which enables the laser processing head to be easily assembled for processing with commercialized multi-axis synchronous numerically-controlled machine tools of a three-axis type, a five-axis type, and the like; and technological flexibility is greatly enhanced, and a conventional multi-axis synchronous numerically-controlled machine tool can be conveniently changed into a galvanometer scanning laser processing machine tool with compatible functions, thereby the three-coordinate galvanometer scanning laser processing head has important practical value.
Description
Technical field
The invention belongs to the laser processing application field, particularly a kind of three-coordinate galvanometer scanning laser processing head.
Background technology
In recent years, laser processing technology based on the vibration mirror scanning mode (hereinafter to be referred as the vibration mirror scanning Laser Processing), due to characteristics such as its high efficiency, high accuracy, noncontact, high flexibility degree, strong adaptability for materials (can process superhard, super crisp, ultra-thin etc. special substance), makes it be widely applied in precision manufacture field.
The vibration mirror scanning laser process equipment generally comprises laser instrument, leaded light light path, galvanometer scanning type laser machining head and the several parts of lathe, its system principle is: after the laser beam that will export from laser resonant cavity completes beam-expanding collimation by the leaded light light path, enter galvanometer scanning type laser machining head, the XY diaxon laser galvanometer system in laser Machining head is realized the focusing of laser beam and accurately deflection scanning motion.Specifically, galvanometer scanning type laser machining head mainly comprises XY diaxon laser galvanometer system and auxiliary body, wherein XY diaxon laser galvanometer system generally comprises two laser plane speculums and scanning focused lens, laser beam successively passes through at right angle setting, by the reflection of a pair of laser plane speculum (being called X, Y-axis laser plane speculum) of driven by servomotor, after entering scanning focused lens (being called again F-theta object lens or telecentric lens) and focusing on, output action is on object to be processed.The rotation of X, Y-axis laser plane speculum is moved respectively the Laser Focusing hot spot on working face on X, Y-axis, two minute surface co-operatings make the Laser Focusing hot spot can be on working face the movement of accomplish linear and various curves, facula position on beam incident angle and image planes meets linear relationship, thereby controls the position of hot spot on image planes by the scan angle of controlling incident beam.
Galvanometer scanning type laser machining head generally is fixedly mounted on lathe, by the yaw motion of controlling light beam, can realize X, the Laser Processing of Y X-Y scheme in laser galvanometer system sweep limits.Therefore, by galvanometer scanning type laser machining head be arranged on can straight-line X-Y-Z multi-axis NC Machine Tools on, can realize the body laser inner carving of large format workpiece, laser weld, laser ablation, many laser processing applications such as laser marking, method is that the zone of needs processing is divided into to several sub-blocks (size of sub-block area is determined by the sweep limits of galvanometer scanning type laser machining head), utilize the galvanometer scanning type laser machining head process velocity fast, the characteristics that precision is high, realize each sub-block figure processing, and lathe is mainly to drive galvanometer scanning type laser machining head to next sub-block Working position.As the patent No. Chinese patent " galvanometer head engraving cutting multi-purpose laser engraving machine " that is 200320116332.3, the patent of invention document that number of patent application is 201020026191.6 " a kind of ultraviolet laser cutting machine tool ", and the patent documentation " CCD mirror-vibrating laser welder and method " that number of patent application is 200910215372.5 has reported that employing XY diaxon laser galvanometer system carries out the application such as flat-plate laser cutting, etching and welding of various material.
Yet, in current vibration mirror scanning laser process equipment, the structure of galvanometer scanning type laser machining head is comparatively simple, except XY diaxon laser galvanometer system, only have some smoke abatements, the auxiliary bodies such as CCD processing monitoring, all that XY two-dimensional laser galvanometer system and multi-axis NC Machine Tools are fixed and are connected design, owing to not possessing modularization and stand-alone interface characteristic, make and be difficult for removing and installing, and the adjusting of focal length must rely on the Z axis motion of multi-axis NC Machine Tools and realize, the function association degree is high, be difficult to realize the complex curved surface part needs frequent process requirements of adjusting the processing focal length in real time.Further, now also still end have bibliographical information self to possess processing focometry and the integrated galvanometer scanning type laser machining head of regulatory function.
Summary of the invention
The object of the invention is to propose a kind of three-coordinate galvanometer scanning laser processing head, this laser Machining head have processing unit module, easy to assemble, can with multiple business Digit Control Machine Tool combination processing, simple and reliable process, to the strong advantage of applicability of various planes, complex curved surface part processed and applied.
The invention provides a kind of three-coordinate galvanometer scanning laser processing head, comprise XY diaxon laser galvanometer system; For this laser Machining head being mounted to the clamping mechanism of multi-shaft linkage numerical control machine; For regulating XY diaxon laser galvanometer system Z axis position ZZhou travel mechanism; For controlling the control system of Z axis travel mechanism and the motion of XY diaxon laser galvanometer system; Described Z axis travel mechanism comprises a fixed part and a moving component, clamping mechanism is fixedly mounted on the fixed part of Z axis travel mechanism, XY diaxon laser galvanometer system is fixedly mounted on the moving component of Z axis travel mechanism, the light beam exit direction of XY diaxon laser galvanometer system is parallel with the direction of motion of Z axis travel mechanism moving component, and Z axis travel mechanism and XY diaxon laser galvanometer system all are electrically connected to control system.
Further, it also comprises that one for measuring Z-direction spacing between XY diaxon laser galvanometer system and processing work, and this Z-direction spacing being exported to the laser displacement sensor of control system, this laser displacement sensor is fixedly mounted on the moving component of Z axis travel mechanism, with control system, is electrically connected to.
Further, the fixed part of described Z axis travel mechanism is a guide rail, and moving component is a slide block, and slide block is arranged on guide rail, and can move up and down along guide rail.
Further, the setting angle of laser displacement sensor makes its laser displacement measurement direction parallel with the light beam exit direction of XY diaxon laser galvanometer system.
Further, described multi-shaft linkage numerical control machine is three axles or 5-shaft linkage numerical control lathe.
What existing vibration mirror scanning laser process equipment generally adopted is the whole fixing structure of XY two-dimensional laser galvanometer system and multi-axis NC Machine Tools, its Z axis laser spot regulatory function must rely on the cooperation of multi-axis NC Machine Tools, therefore processing head is difficult for removing and installing, and applicability is not high.Three-coordinate galvanometer scanning laser processing head provided by the invention, possess " 2+1 axle " structure of XY diaxon laser galvanometer system, Z axis travel mechanism, and the Z axis travel mechanism carried by inside can realize the processing focal length self-regulating function of laser galvanometer system.This processing head structure is independent, compact, clamping mechanism is according to criterion numeral controlled machine broaching tool Interface design, make the combination processing of the commercialization multi-shaft linkage numerical control machines such as itself and three axles, five axles very simple and easy, greatly improved craft flexibility, can easily conventional multi-shaft linkage numerical control machine be changed over to the vibration mirror scanning type laser process machine, and therefore the function compatibility has important practical value.
In addition, this processing head is also with high precision laser displacement sensor, Z axis travel mechanism, high precision laser displacement sensor and control system form the closed-loop feedback control system of Laser Processing focal length, make processing head self possess kinetic measurement and the regulatory function of processing focal length.
The accompanying drawing explanation
Fig. 1 is three-coordinate galvanometer scanning laser processing head structural representation of the present invention;
Each label implication in figure; 1 is the standard clamping structure coordinated with industrial Digit Control Machine Tool, and 2 is Z axis travel mechanism, and 3 is support, 4 is XY diaxon laser galvanometer system, and 5 is laser displacement sensor, and 6 is processing work, 7 is laser beam, and 8 is control system, and 201 is that vertical rail, 202 is slide block.
The specific embodiment
Below by accompanying drawing and example, exemplary embodiment of the present invention is elaborated.
Three-coordinate galvanometer scanning laser processing head of the present invention, its structure as shown in Figure 1, comprising: clamping mechanism 1, Z axis travel mechanism 2, support 3, XY diaxon laser galvanometer system 4, laser displacement sensor 5 and control system 8.Z axis travel mechanism 2, XY diaxon laser galvanometer system 4, laser displacement sensor 5 all are electrically connected to control system 8.The bottom of clamping mechanism 1 is arranged on support 3, and it is for being mounted to multi-shaft linkage numerical control machine by this laser Machining head; Z axis travel mechanism 2 also is arranged on support 3, and for regulating the Z axis position of XY diaxon laser galvanometer system, it can move up and down along Z-direction; Support 3 is for being fixedly connected with Z axis travel mechanism 2 with clamping mechanism 1; XY diaxon laser galvanometer system 4 is exported at processing work 6 after laser beam is focused on, and controls the laser focusing bundles by control system 8 and press the scanning motion of XY X-Y scheme; Laser displacement sensor 5 is for measuring the Z-direction spacing of XY diaxon laser galvanometer system 4 and processing work 6, and feeds back to control system 8; The moving component that control system 8 is controlled Z axis travel mechanism 2 moves in Z-direction, to regulate the Laser Processing focal length.
Concretely, Z axis travel mechanism 2 comprises a fixed part and a moving component, be vertical rail 201 and slide block 202, vertical rail 201 is fixedly connected on support 3, slide block 202 is arranged on vertical rail 201 by lifter wheel, and control system 8 moves up and down along vertical rail 201 by controlling driven by servomotor slide block 202.The moving component that XY diaxon laser galvanometer system 3 is fixedly mounted on Z axis travel mechanism 2 is on slide block 202, XY diaxon laser galvanometer system 4 installation positions make the light beam exit direction parallel with the direction that moves up and down (being Z-direction) of slide block 202, therefore, the diaxon galvanometer XY X-Y scheme scanning motion ability of XY diaxon laser galvanometer system 4 and the Z axis linear motion capability of slide block 202 are combined into complete XYZ rectangular coordinate system motor function, realize self three-dimensional vibration mirror scanning type Laser Processing campaign.The fixed part of Z axis travel mechanism 2 is fixedly connected with clamping mechanism 1 by support 3, the function of clamping mechanism 1 is that this laser Machining head is mounted on the standard broaching tool tool rest of multi-shaft linkage numerical control machine, multi-shaft linkage numerical control machine can be the three-shaft linkage Digit Control Machine Tool, can be also 5-shaft linkage numerical control lathe etc.
Laser displacement sensor 5 is fixedly mounted on the slide block 202 of Z axis travel mechanism 2, adjacent XY diaxon laser galvanometer system 4 fixed installations, and setting angle makes its laser displacement measurement direction parallel with the light beam exit direction (being Z-direction) of XY diaxon laser galvanometer system 4.Laser displacement sensor 5, Z axis travel mechanism 2 and control system 8 form closed-loop feedback control system, and according to XY diaxon laser galvanometer system 4 and laser displacement sensor 5 fixing installation site conversion relation, can realize in process the processing focal length kinetic measurement of laser beam 7 and adjust function.
The structure of clamping mechanism 1, according to the design of international standard broaching tool head, can be circular broach, keyway broach, rectangle or hexagonal hole type broaching tool etc., by the broaching tool tool rest of the multi-shaft linkage numerical control machine configuration that will install, determines concrete model.
Z axis travel mechanism 2 can be the structure that servomotor or step-by motor driven lead screw guide rails add slide block, can also be that the driving line slideway of linear electric motors adds slide block structure, and requirement can realize that Z axis slide block movement repetitive positioning accuracy is higher than 0.05mm.
XY diaxon laser galvanometer system 4 can be the widely used any XY diaxon laser galvanometer system of industrial circle, after the clear aperture of X, Y laser plane mirror size, scanning focused lens and focal length are determined, the parameters such as vibration mirror scanning scope, processing focal length and output beam characteristic are also correspondingly determined.
Laser displacement sensor 5 can be any laser displacement measurement device that can realize that accurate distance is measured, and certainty of measurement requires higher than 0.05mm, and the widely used high precision laser displacement sensor of industrial circle can meet this requirement at present.
Three-coordinate galvanometer scanning laser processing head of the present invention is mounted to commercial three axles or 5-shaft linkage numerical control lathe by clamping mechanism 1, can form what is called " 3+3 " axle or " 5+3 " axle laser process machine, drive laser Machining head by three axles or 5-shaft linkage numerical control lathe and be positioned to the position that the large format surface of the work need to be processed, then utilize laser Machining head to complete vibration mirror scanning Laser Processing campaign, can realize the Laser Processing of flat work pieces or curve surface work pieces.Concretely, be that the laser beam launched of laser instrument is after light-conducting system, laser beam 7 enters XY diaxon laser galvanometer system 4 in this laser Machining head, and the reflection through two X, Y-axis laser plane speculum, enter scanning focused lens and focus on processing work 6.In the process to flat work pieces, when slide block 202 drives XY diaxon laser galvanometer systems 4 and laser displacement sensor 5 and moves up and down along Z-direction, but the Z-direction spacing of laser displacement sensor 5 real-time measurement sensors and surface of the work 6, and feed back to control system, because the relative bearing of laser displacement sensor 5 and XY diaxon laser galvanometer system 4 is changeless, therefore can control by control system 8 the Z axis position of Z axis travel mechanism 2 real-time adjusting sliders 202, thereby make XY diaxon laser galvanometer system 4 and the Z-direction spacing of surface of the work 6 remain default processing focal length.In the process to curve surface work pieces, at first according to the relative bearing conversion relation of laser displacement sensor 5 and XY diaxon laser galvanometer system 4, utilize multi-shaft linkage numerical control machine to drive the laser Machining head motion, the measuring beam of laser displacement sensor 5 is moved in the machining area to be scanned of XY diaxon laser galvanometer system 4, and it is default processing focal length that the Z-direction spacing of measuring transducer and surface of the work 6, the Z axis position that feeds back to control system 8 and control to adjust slide blocks 202 by control system 8 make XY diaxon laser galvanometer system 4 and the Z-direction spacing of surface of the work 6; Then, utilize three axles or 5-shaft linkage numerical control lathe to drive the laser Machining head motion, make XY diaxon laser galvanometer system 4 move to machining area to be scanned, by laser Machining head, complete vibration mirror scanning Laser Processing campaign.
Embodiments of the present invention are not limited to the content of the above-mentioned specific embodiment, can combine the equipment of processing with this three-coordinate galvanometer scanning laser processing head and be not limited to industrial three axles or 5-shaft linkage numerical control lathe, can be also any workpiece positioner of designed, designed.Persons skilled in the art, according to content disclosed by the invention, can adopt other multiple specific embodiment to implement the present invention.Therefore, every employing technical scheme of the present invention and thinking, only do some substitutions and modifications known in those skilled in the art, all within protection scope of the present invention.
Claims (1)
1. a three-coordinate galvanometer scanning laser processing head, comprise XY diaxon laser galvanometer system, it is characterized in that, it also comprises:
For this laser Machining head being mounted to the clamping mechanism of multi-shaft linkage numerical control machine;
For regulating XY diaxon laser galvanometer system Z axis position ZZhou travel mechanism;
For controlling the control system of Z axis travel mechanism and the motion of XY diaxon laser galvanometer system;
Described Z axis travel mechanism comprises a fixed part and a moving component, clamping mechanism is fixedly mounted on the fixed part of Z axis travel mechanism, XY diaxon laser galvanometer system is fixedly mounted on the moving component of Z axis travel mechanism, the light beam exit direction of XY diaxon laser galvanometer system is parallel with the direction of motion of Z axis travel mechanism moving component, and Z axis travel mechanism and XY diaxon laser galvanometer system all are electrically connected to control system;
It also comprises that one for measuring Z-direction spacing between XY diaxon laser galvanometer system and processing work, and this Z-direction spacing is exported to the laser displacement sensor of control system, this laser displacement sensor is fixedly mounted on the moving component of Z axis travel mechanism, with control system, is electrically connected to;
The fixed part of described Z axis travel mechanism is a guide rail, and moving component is a slide block, and slide block is arranged on guide rail, and can move up and down along guide rail; The setting angle of laser displacement sensor makes its laser displacement measurement direction parallel with the light beam exit direction of XY diaxon laser galvanometer system;
Described multi-shaft linkage numerical control machine is three axles or 5-shaft linkage numerical control lathe;
Drive laser Machining head by three axles or 5-shaft linkage numerical control lathe and be positioned to the position that the large format surface of the work need to be processed, then utilize laser Machining head to complete vibration mirror scanning Laser Processing campaign, for realizing the Laser Processing of flat work pieces or complex curved surface part;
In the process to flat work pieces, when slide block drives XY diaxon laser galvanometer system and laser displacement sensor and moves up and down along Z-direction, the Z-direction spacing of laser displacement sensor real-time measurement sensor and surface of the work, and feed back to control system, because the relative bearing of laser displacement sensor and XY diaxon laser galvanometer system is changeless, control the Z axis position of the real-time adjusting slider of Z axis travel mechanism by control system, thereby make the Z-direction spacing of XY diaxon laser galvanometer system and surface of the work remain default processing focal length;
In the process to curve surface work pieces, at first according to the relative bearing conversion relation of laser displacement sensor and XY diaxon laser galvanometer system, utilize multi-shaft linkage numerical control machine to drive the laser Machining head motion, the measuring beam of laser displacement sensor is moved in the machining area to be scanned of XY diaxon laser galvanometer system, and the Z-direction spacing of measuring transducer and surface of the work, to feed back to control system and made the Z-direction spacing of XY diaxon laser galvanometer system and surface of the work by the Z axis position that control system controls to adjust slide block be default processing focal length; Then, utilize three axles or 5-shaft linkage numerical control lathe to drive the laser Machining head motion, make XY diaxon laser galvanometer system move to machining area to be scanned, by laser Machining head, complete vibration mirror scanning Laser Processing campaign.
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