Maninder et al., 2010 - Google Patents

Low loss STS based SPDT for X—Band applications

Maninder et al., 2010

View PDF
Document ID
8537914357573890077
Author
Maninder K
Sharma A
Kumar D
Singh S
Rangra K
Publication year
Publication venue
Procedia Engineering

External Links

Snippet

An approach to optimize the electromechanical parameters of RF MEMS SPDT designed for operation at 10 GHz, using high dielectric constant material (HfO2) is presented and the results are compared to those for silicon dioxide—the conventional dielectric used for …
Continue reading at www.sciencedirect.com (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/20—Frequency-selective devices, e.g. filters
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezo-electric relays
    • H—ELECTRICITY
    • H03—BASIC ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of micro-electro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H3/00—Mechanisms for operating contacts
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/38—Multiple capacitors, e.g. ganged

Similar Documents

Publication Publication Date Title
Ma et al. Comprehensive study on RF-MEMS switches used for 5G scenario
Hah et al. A low-voltage actuated micromachined microwave switch using torsion springs and leverage
JPWO2006011239A1 (en) Capacitive MEMS element, manufacturing method thereof, and high-frequency device
US8120443B2 (en) Radiofrequency or hyperfrequency circulator
US8018307B2 (en) Micro-electromechanical device and module and method of manufacturing same
Cho et al. Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold
Strohm et al. RF-MEMS switching concepts for high power applications
Lahiri et al. RF MEMS SWITCH: An overview at-a-glance
Maninder et al. On characterization of symmetric type capacitive RF MEMS switches
Tang et al. A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches
Maninder et al. Low loss STS based SPDT for X—Band applications
Sravani et al. Design, simulation and analysis of RF MEMS capacitive shunt switches with high isolation and low pull-in-voltage
Karthick et al. Review on radio frequency micro electro mechanical systems (RF-MEMS) switch
Sharma et al. Microelectromechanical system (MEMS) switches for radio frequency applications-a review
Nasserddine Millimeter-wave phase shifters based on tunable transmission lines in MEMS technology post-CMOS process
Angira et al. A Novel Approach for low insertion Loss, multi-band, capacitive shunt RF–MEMS switch
Schauwecker et al. Toggle-Switch-A new type of RF MEMS switch for power applications
Vaha-Heikkila et al. $ G $-Band Distributed Microelectromechanical Components Based on CMOS Compatible Fabrication
Purtova et al. Overview of RF MEMS technology and applications
Manohar et al. Optimization of structures of DC RF MEMS series switches for low actuation
Maninder et al. Parametric optimization of symmetric toggle RF MEMS switch for X-band applications
Angira et al. A novel interdigitated, inductively tuned, capacitive shunt RF—MEMS switch for X and K bands applications
Park Fabrication and measurements of direct contact type RF MEMS switch
Rottenberg et al. Filter-through device: a distributed RF-MEMS capacitive series switch
Rao et al. Design and simulation of capacitive SPDT RF MEMS switch to improve its isolation