Liao et al., 2024 - Google Patents
Theory and method of pulsed ion beam single crystal silicon reshaping based on controllable time-varying removal functionLiao et al., 2024
- Document ID
- 8368672280042386316
- Author
- Liao R
- Qiao T
- Tian Z
- Wang Y
- Li G
- Qiao D
- Song C
- Peng X
- Publication year
- Publication venue
- Seventh Global Intelligent Industry Conference (GIIC 2024)
External Links
Snippet
With the continuous improvement of optical performance requirements, weaponry, space observation, laser fusion, extreme ultraviolet lithography, and other fields of optical components of increasing precision requirements, the number of requirements is …
- 238000010884 ion-beam technique 0 title abstract description 57
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