Cybart et al., 2009 - Google Patents

Very large scale integration of nanopatterned YBa2Cu3O7− δ Josephson junctions in a two-dimensional array

Cybart et al., 2009

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Document ID
832884700033842716
Author
Cybart S
Anton S
Wu S
Clarke J
Dynes R
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Very large scale integration of Josephson junctions in a two-dimensional series− parallel array has been achieved by ion irradiating a YBa2Cu3O7− δ film through slits in a nanofabricated mask created with electron beam lithography and reactive ion etching. The …
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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L39/00Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
    • H01L39/22Devices comprising a junction of dissimilar materials, e.g. Josephson-effect devices
    • H01L39/223Josephson-effect devices
    • H01L39/225Josephson-effect devices comprising high Tc ceramic materials

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