Cybart et al., 2009 - Google Patents
Very large scale integration of nanopatterned YBa2Cu3O7− δ Josephson junctions in a two-dimensional arrayCybart et al., 2009
View PDF- Document ID
- 832884700033842716
- Author
- Cybart S
- Anton S
- Wu S
- Clarke J
- Dynes R
- Publication year
- Publication venue
- Nano letters
External Links
Snippet
Very large scale integration of Josephson junctions in a two-dimensional series− parallel array has been achieved by ion irradiating a YBa2Cu3O7− δ film through slits in a nanofabricated mask created with electron beam lithography and reactive ion etching. The …
- 150000002500 ions 0 abstract description 53
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
- H01L39/22—Devices comprising a junction of dissimilar materials, e.g. Josephson-effect devices
- H01L39/223—Josephson-effect devices
- H01L39/225—Josephson-effect devices comprising high Tc ceramic materials
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