Lee et al., 2013 - Google Patents

Planar InGaAs pin photodiodes with transparent-conducting-based antireflection and double-path reflector

Lee et al., 2013

Document ID
8253793763132391457
Author
Lee Y
Huang C
Ho C
Wu M
Publication year
Publication venue
IEEE electron device letters

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Snippet

In this letter, we report on the design of large-area planar InP/InGaAs/InP heterostructure pin photodiodes (PIN-PDs) with gallium-doped zinc oxide (GZO)/SiO x antireflective bilayer and AuGe/Au double-path reflectors for the enhancement in the position sensitivity and device …
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