Millard et al., 1992 - Google Patents

Noncontact testing of circuits via a laser-induced plasma electrical pathway

Millard et al., 1992

Document ID
6541325999850778019
Author
Millard D
Umstadter K
Block R
Publication year
Publication venue
IEEE Design & Test of Computers

External Links

Snippet

Systems using the three most popular probes applied to functional electrical testing, mechanical, electron beam, and laser, are reviewed. A system of noncontact testing that uses a laser-induced plasma'switch'to provide the electrical pathway for AD and DC …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/319Tester hardware, i.e. output processing circuit
    • G01R31/31903Tester hardware, i.e. output processing circuit tester configuration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/305Contactless testing using electron beams
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/308Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2853Electrical testing of internal connections or -isolation, e.g. latch-up or chip-to-lead connections
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/02Testing of electric apparatus, lines or components, for short-circuits, discontinuities, leakage of current, or incorrect line connection
    • G01R31/024Arrangements for indicating continuity or short-circuits in electric apparatus or lines, leakage or ground faults
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/02Testing of electric apparatus, lines or components, for short-circuits, discontinuities, leakage of current, or incorrect line connection
    • G01R31/04Testing connections, e.g. of plugs, of non-disconnectable joints
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

Similar Documents

Publication Publication Date Title
KR900007993B1 (en) Semiconductor detective apparatus and method
Wolfgang Electron beam testing
US5138266A (en) Single-probe charge measurement testing method
JPH06326165A (en) Method and system for noncontact testing on wiring network
US5179279A (en) Non-contact electrical pathway
Wolfgang et al. Electron-beam testing of VLSI circuits
US5747999A (en) Feed control element used in substrate inspection and method and apparatus for inspecting substrates
Holloway et al. Study of basic effects of HPM pulses in digital CMOS integrated circuit inputs
CN115420979A (en) Precise injection system and test method for electrostatic discharge pulse in integrated circuit space
US6798212B2 (en) Time domain reflectometer probe having a built-in reference ground point
Yang et al. Field-circuit co-simulation method for electrostatic discharge investigation in electronic products
US4786864A (en) Photon assisted tunneling testing of passivated integrated circuits
Millard et al. Noncontact testing of circuits via a laser-induced plasma electrical pathway
TW200918914A (en) Testing system module
JP2001527206A (en) Method and apparatus for loading a pulsed strong current into integrated circuits and structures
Wang et al. ESD susceptibility characterization of an EUT by using 3D ESD scanning system
Millard Contactless testing of printed wiring boards
Kehayias et al. Electronics Failure Analysis Demonstrations using a Quantum Diamond Microscope
Umstadter et al. Applications of a laser-induced plasma pathway to testing of electronic modules
Swaminathan et al. A survey of test techniques for MCM substrates
Sun et al. Automated Calibration Method of Loadboard of Integrated Circuit ATE
Bencivinni et al. Characterization and modeling of the electromagnetic behavior of ICs and packages
JP2648947B2 (en) Inspection equipment for semiconductor devices
JP2006003135A (en) Method for diagnosing failure of semiconductor integrated circuit
Millard Noncontact testing of electronic components using laser-induced conductive pathways