Go et al., 2014 - Google Patents

Microscale gas breakdown: ion-enhanced field emission and the modified Paschen's curve

Go et al., 2014

Document ID
5665371542457689065
Author
Go D
Venkattraman A
Publication year
Publication venue
Journal of Physics D: Applied Physics

External Links

Snippet

Gas breakdown at microscale dimensions has been of great interest to the microelectromechanical systems (MEMS) and plasma communities for nearly 15 years as the first reports of deviations from traditional theory began to emerge. Since those first …
Continue reading at iopscience.iop.org (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the ionisation of gases; by investigating electric discharges, e.g. emission of cathode

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