Accomazzo et al., 1986 - Google Patents
Mechanisms and devices for filtration of critical process gasesAccomazzo et al., 1986
- Document ID
- 187915551105760168
- Author
- Accomazzo M
- Grant D
- Publication year
External Links
Snippet
The particle capture mechanisms in aerosol filtration result in a most penetrating particle size for process gases used by the microelectronics industry. The most penetrating particle size for fibrous filter media and microporous membrane filter media have been measured to …
- 239000007789 gas 0 title abstract description 52
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