Lee et al., 1999 - Google Patents

Gigantic Crystal Grain by Excimer Laser with a Pulse Duration of 200 ns and Its Application to TFT

Lee et al., 1999

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Document ID
15787882651083550013
Author
Lee K
Hwang J
Jung C
Ihn T
Yi S
Jeon H
Lee W
Choi D
Jang J
Zahorski D
Lee C
Publication year
Publication venue
JOURNAL-KOREAN PHYSICAL SOCIETY

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The large grain growth by excimer laser annealing was observed at multi-shots with a long laser pulse duration of 200 ns. The grain size of the polycrystalline Si increases up to~ 1.5/im with 20 shots at a laser energy density of 650 mJ/cm2, and (111) orientation is …
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