Zhang et al., 2012 - Google Patents

Toughness evaluation of hard coatings and thin films

Zhang et al., 2012

Document ID
14584159810600858178
Author
Zhang S
Zhang X
Publication year
Publication venue
Thin Solid Films

External Links

Snippet

Enormous progress has been achieved over the past decade in evaluating the toughness of hard coatings and thin films. This paper reviews methodologies developed based on indentation, bending, and microtensile testing. In addition, we discuss a recent development …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/025Geometry of the test
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/026Specifications of the specimen
    • G01N2203/0286Miniature specimen; Testing on micro-regions of a specimen
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/0202Control of the test
    • G01N2203/0212Theories, calculations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/06Indicating or recording means; Sensing means
    • G01N2203/0617Electrical or magnetic indicating, recording or sensing means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/026Specifications of the specimen
    • G01N2203/0262Shape of the specimen
    • G01N2203/0278Thin specimens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058Kind of property studied
    • G01N2203/0092Visco-elasticity, solidification, curing, cross-linking degree, vulcanisation or strength properties of semi-solid materials
    • G01N2203/0094Visco-elasticity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/022Environment of the test
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02Details not specific for a particular testing method
    • G01N2203/0202Control of the test
    • G01N2203/021Treatment of the signal; Calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014Type of force applied
    • G01N2203/0016Tensile or compressive
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/20Investigating strength properties of solid materials by application of mechanical stress by applying steady bending forces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40Investigating hardness or rebound hardness
    • G01N3/42Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • G01N3/04Chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by the preceding groups
    • G01N33/38Investigating or analysing materials by specific methods not covered by the preceding groups concrete; ceramics; glass; bricks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress in general
    • G01L1/25Measuring force or stress in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, e.g. due to impact, work, mechanical power, or torque, adapted for special purposes
    • G01L5/0047Apparatus for, or methods of, measuring force, e.g. due to impact, work, mechanical power, or torque, adapted for special purposes measuring forces due to residual stresses

Similar Documents

Publication Publication Date Title
Zhang et al. Toughness evaluation of hard coatings and thin films
Fang et al. Determining mean and gradient residual stresses in thin films using micromachined cantilevers
Espinosa et al. A methodology for determining mechanical properties of freestanding thin films and MEMS materials
Sebastiani et al. Depth-resolved residual stress analysis of thin coatings by a new FIB–DIC method
Chasiotis et al. The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations
Cho et al. Young's modulus, Poisson's ratio and failure properties of tetrahedral amorphous diamond-like carbon for MEMS devices
US7165463B2 (en) Determination of young's modulus and poisson's ratio of coatings from indentation data
Chicot et al. Influence of tip defect and indenter shape on the mechanical properties determination by indentation of a TiB2–60% B4C ceramic composite
Huang et al. Finite element analysis on nanoindentation with friction contact at the film/substrate interface
Pugno et al. Predictions of strength in MEMS components with defects––a novel experimental–theoretical approach
Sagadevan et al. Novel Analysis on the Influence of Tip Radius and Shape of the Nanoindenter on the Hardness of Materials
Chen et al. MEMS residual stress characterization: Methodology and perspective
Chasiotis Mechanics of thin films and microdevices
Ghorbal et al. Mechanical characterization of brittle materials using instrumented indentation with Knoop indenter
Jonnalagadda et al. Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS
Lapitskaya et al. The use of AFM in assessing the crack resistance of silicon wafers of various orientations
Hu et al. Nanomechanical characterization of porous anodic aluminum oxide films by nanoindentation
Park et al. Tensile and high cycle fatigue test of Al–3% Ti thin films
Tsou et al. Determination of thermal expansion coefficient of thermal oxide
Hazra et al. Demonstration of an in situ on-chip tensile tester
Herbert et al. Measuring the elastic modulus and residual stress of freestanding thin films using nanoindentation techniques
Arun Roy et al. J-dominance in mixed mode ductile fracture specimens
Li et al. Full field and microregion deformation measurement of thin films using electronic speckle pattern interferometry and array microindentation marker method
Ma et al. Evaluation of nanoindentation load-depth curve of MEMS bridge structures by calculating the critical elastic-plastic bending deflections
Matoy et al. Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers