Lien et al., 2017 - Google Patents

DEVICE PERFORMANCE OF POLY-Si THIN-FILM TRANSISTORS FABRICATED ON YSZ CRYSTALLIZATION-INDUCTION LAYER VIA A TWO-STEP IRRADIATION …

Lien et al., 2017

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Document ID
14416458000388676309
Author
Lien M
Horita S
et al.
Publication year
Publication venue
UED Journal of Social Sciences, Humanities and Education

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In this study, we fabricated and investigated device performance of poly-Si thin-film transistors (TFTs) via a two-step pulsed-laser annealing (PLA) method on two kinds of substrates namely glass and YSZ*/glass. It was found that TFTs on YSZ/glass exhibited …
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