Gimeno et al., 1998 - Google Patents

Adherence experiments on cBN films

Gimeno et al., 1998

Document ID
12443268673055126445
Author
Gimeno S
Munoz J
Lousa A
Publication year
Publication venue
Diamond and related materials

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Boron nitride thin films were deposited by tuned substrate rf magnetron sputtering from an h- BN target. Pure Ar, 85% Ar+ 15% N2 and Ar+ 10%< H2< 30% were used as processing gases. A threshold value of momentum per deposited atom was found, around 600 eV 1 2 …
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