Di Barba et al., 2020 - Google Patents

From MEMS to NEMS

Di Barba et al., 2020

Document ID
12090206250671682823
Author
Di Barba P
Wiak S
Gotszalk T
Publication year
Publication venue
MEMS: Field Models and Optimal Design

External Links

Snippet

Nanotechnology, as the scientific and technological discipline dealing with the design, fabrication and application of systems whose dimensions or tolerances are in the domain of nanometers, is becoming increasingly important in many industrial and scientific areas …
Continue reading at link.springer.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038—Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic means

Similar Documents

Publication Publication Date Title
Ekinci et al. Nanoelectromechanical systems
Li et al. Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications
US6094971A (en) Scanning-probe microscope including non-optical means for detecting normal tip-sample interactions
Pachkawade State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review
Poggio et al. An off-board quantum point contact as a sensitive detector of cantilever motion
Héritier et al. Nanoladder cantilevers made from diamond and silicon
JP2006506236A (en) Apparatus and method for use in vacuum-based sensors of micromechanical energy, force and mass
Sahoo et al. Scanning probe microscopy based on magnetoresistive sensing
Kim et al. SI traceability: Current status and future trends for forces below 10 microNewtons
Lulec et al. Simultaneous self-sustained actuation and parallel readout with MEMS cantilever sensor array
Dinh et al. Micromachined Mechanical Resonant Sensors: From Materials, Structural Designs to Applications
Zhang et al. Probing linear to nonlinear damping in 2D semiconductor nanoelectromechanical resonators toward a unified quality factor model
Gotszalk et al. Tip-based nano-manufacturing and-metrology
Valkering et al. A force sensor for atomic point contacts
Di Barba et al. From MEMS to NEMS
Raina Atomic force microscopy as a nanometrology tool: some issues and future targets
Kozinsky Nonlinear nanoelectromechanical systems
Gotszalk et al. Shear force microscopy using piezoresistive cantilevers in surface metrology
Boucher et al. A Non-Perturbative, Low-Noise Surface Coating for Sensitive Force-Gradient Detection of Electron Spin Resonance in Thin Films
Schmid et al. Transduction
Kwoka et al. Impedance spectroscopy of electrostatically driven MEMS resonators
Meyer et al. Force microscopy
Kunicki et al. Quartz tuning fork mass change sensing for FIB/SEM technology
Weng Nanomechanical sensors: analyzing effects of laser-nanowire interaction and electrodeposited clamps on resonance spectra
Xu et al. Recent Progress in Self-sensing Probe Technology in Atomic Force Microscope