Wang et al., 2013 - Google Patents

Direct modification of silicon surface by nanosecond laser interference lithography

Wang et al., 2013

View HTML
Document ID
1167263505771064003
Author
Wang D
Wang Z
Zhang Z
Yue Y
Li D
Maple C
Publication year
Publication venue
Applied Surface Science

External Links

Snippet

Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate the structures in various research fields. In this work, we take …
Continue reading at www.osti.gov (HTML) (other versions)

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GASES [GHG] EMISSION, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/54—Material technologies
    • Y02E10/549—Material technologies organic PV cells

Similar Documents

Publication Publication Date Title
Wang et al. Direct modification of silicon surface by nanosecond laser interference lithography
Xu et al. Fabrication of moth-eye structures on silicon by direct six-beam laser interference lithography
Li et al. O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment
Lin et al. Realization of∼ 10 nm features on semiconductor surfaces via femtosecond laser direct patterning in far field and in ambient air
Chen et al. Rapid focused ion beam milling based fabrication of plasmonic nanoparticles and assemblies via “sketch and peel” strategy
Bergmair et al. Single and multilayer metamaterials fabricated by nanoimprint lithography
Seniutinas et al. Tipping solutions: emerging 3D nano-fabrication/-imaging technologies
CN105108342B (en) Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing
Hu et al. Bi2Se3-functionalized metasurfaces for ultrafast all-optical switching and efficient modulation of terahertz waves
Zhao et al. Antireflection silicon structures with hydrophobic property fabricated by three-beam laser interference
Wang et al. Visualizing light scattering in silicon waveguides with black phosphorus photodetectors
Wang et al. Both antireflection and superhydrophobicity structures achieved by direct laser interference nanomanufacturing
Meng et al. Simple fabrication of closed-packed IR microlens arrays on silicon by femtosecond laser wet etching
Huang et al. Self-aligned plasmonic lithography for maskless fabrication of large-area long-range ordered 2D nanostructures
Lin et al. Microsphere femtosecond laser sub-50 nm structuring in far field via non-linear absorption
Giordano et al. Self-organized tailoring of faceted glass nanowrinkles for organic nanoelectronics
Luo et al. Fabrication of high aspect ratio subwavelength gratings based on X-ray lithography and electron beam lithography
Garg et al. Rapid prototyping of highly ordered subwavelength silicon nanostructures with enhanced light trapping
Li et al. Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching
Han et al. Continuous control of microlens morphology on Si based on the polarization-dependent femtosecond laser induced periodic surface structures modulation
Kim et al. Mie resonance-mediated antireflection effects of Si nanocone arrays fabricated on 8-in. wafers using a nanoimprint technique
Ahsan et al. Formation mechanism of nanostructures in soda–lime glass using femtosecond laser
Zhang et al. Polarization sensitive anisotropic structuring of silicon by ultrashort light pulses
Murphy-DuBay et al. Nanolithography using high transmission nanoscale ridge aperture probe
Wang et al. Light-controlled nanoswitches: from fabrication to photoelectric switching