Yamashita et al., 2021 - Google Patents
Ultra-thin PZT/Si chip integrated on paper substratesYamashita et al., 2021
- Document ID
- 10553405584973955149
- Author
- Yamashita T
- Takeshita T
- Oouchi A
- Kobayashi T
- Publication year
- Publication venue
- Japanese Journal of Applied Physics
External Links
Snippet
This paper presents the integration process of an ultra-thin PZT/Si chip on paper and that it functions as a simple speaker by applying a voltage in the audible frequency range. The PZT/Si chip used is only 5 μm thick, so it does not interfere with the flexibility of the substrate …
- 239000000758 substrate 0 title abstract description 31
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