WO2014109152A1 - Inlet nozzle and detoxification device - Google Patents

Inlet nozzle and detoxification device Download PDF

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Publication number
WO2014109152A1
WO2014109152A1 PCT/JP2013/082795 JP2013082795W WO2014109152A1 WO 2014109152 A1 WO2014109152 A1 WO 2014109152A1 JP 2013082795 W JP2013082795 W JP 2013082795W WO 2014109152 A1 WO2014109152 A1 WO 2014109152A1
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Prior art keywords
inlet nozzle
gas
inlet
nozzle
present
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PCT/JP2013/082795
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French (fr)
Japanese (ja)
Inventor
隆介 水谷
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エドワーズ株式会社
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Publication of WO2014109152A1 publication Critical patent/WO2014109152A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44—Details; Accessories
    • F23G5/442—Waste feed arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/44—Details; Accessories
    • F23G5/48—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2205/00—Waste feed arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23K—FEEDING FUEL TO COMBUSTION APPARATUS
    • F23K2400/00—Pretreatment and supply of gaseous fuel
    • F23K2400/20—Supply line arrangements

Definitions

  • the present invention relates to an inlet nozzle and an abatement apparatus. Specifically, the present invention relates to an inlet nozzle provided with an inclination inside, and a detoxification apparatus including the inlet nozzle.
  • a process gas such as silane gas (SiH 4 ) is used in a vacuum chamber for generating a Si film.
  • the exhaust gas after being used is exhausted to the outside from a reactor of a vacuum pump connected to a vacuum chamber, which is an apparatus for a semiconductor manufacturing process.
  • Examples of such exhaust gas include silane gas as described above, and six fluorocarbons.
  • Various toxic gases such as tungsten nitride (WF 6 ) and dichlorosilane (SiH 2 Cl 2 ) are often contained in the film forming process.
  • a detoxifying device is connected to the exhaust side of the vacuum pump to discharge such exhaust gas as harmless gas.
  • abatement devices such as a combustion type and a plasma type.
  • a poisonous gas is changed to a harmless gas by causing an oxidation reaction that burns and reacts with air (oxygen).
  • oxygen oxygen
  • silane gas SiH 4
  • silica SiO 2
  • This silica is a solid / powder, and is given energy when it is changed (to silica) by the oxidation reaction described above, and scatters in the space of the combustion furnace, which is a space where the oxidation reaction takes place. That is, since it does not fall straight and scatters, most of it adheres to the wall of the combustion furnace and accumulates over time. Therefore, it is necessary to perform regular maintenance (overhaul) to remove the deposit. Generally, this maintenance is performed about once every three months. In view of operation and cost, it is better that the interval from the maintenance to the next maintenance (free maintenance period) is longer. That is, it is desirable that the abatement apparatus has a structure in which deposits generated by the oxidation reaction are difficult to adhere.
  • Patent Document 1 describes a method of burning exhaust gas using an exhaust gas combustion nozzle connected to a combustion chamber of a combustion-type abatement apparatus. More specifically, the exhaust gas combustion nozzle of Patent Document 1 includes an exhaust gas nozzle, first and second combustion nozzles, and further an air supply nozzle, and prevents silica from adhering and accumulating at the tip of the nozzle. Therefore, it is configured such that a complete oxidation reaction occurs on the downstream side of the gas.
  • FIG. 6 is a view for explaining a conventional inlet nozzle 1.
  • FIG. 6A is a diagram showing a cross-sectional view in the axial direction of the conventional inlet nozzle 1
  • FIG. 6B is a view below the inlet head 2 in which the conventional inlet nozzle 1 is disposed (gas flows).
  • FIG. 6 (a) the inner diameter of the casing portion of the conventional inlet nozzle 1 is constant everywhere, and has a straight structure from the upstream side to the downstream side of the gas. *
  • An object of the present invention is to provide an inlet nozzle for reducing the amount of deposits adhering to the wall surface of a combustion furnace and prolonging the maintenance cycle, and a detoxifying device including the inlet nozzle.
  • the present invention according to claim 1 is an inlet nozzle for guiding an exhaust gas containing a gas to be abated to a chamber for abatement, wherein the inner circumference of the inner wall surface of the inlet nozzle is An inlet nozzle having an inclined portion that decreases from the upstream side toward the downstream side when the exhaust gas flows is provided.
  • the inlet nozzle according to claim 1 wherein the inclined portion is formed on the inner wall surface on the downstream side in the axial direction of the inlet nozzle.
  • the abatement chamber, the inlet nozzle according to the first or second aspect, and a plurality of holes for disposing the inlet nozzle, the abatement chamber there is provided a detoxifying device comprising a nozzle fixing member to be fitted.
  • the said nozzle fixing member can be removed,
  • the abatement apparatus of Claim 3 characterized by the above-mentioned is provided.
  • attachment adhering to the wall surface of a combustion furnace can be reduced, and the abatement apparatus provided with the inlet nozzle for extending the period of a maintenance and the said inlet nozzle can be provided.
  • the inlet nozzle according to the embodiment of the present invention includes an inclined portion inside the casing of the inlet nozzle, and due to this inclination, gas (harmful gas) and powder passing through the inlet nozzle.
  • the body flow is always constant inside the combustion chamber (combustion furnace). More specifically, in the inlet nozzle according to the embodiment of the present invention, a gas such as a detoxifying gas (exhaust gas) and a powder such as particulate dust generated by combustion decomposition flow in the center of the combustion chamber. A slope is provided inside.
  • the injection direction of the inlet nozzle for introducing the detoxifying gas is directed toward the center (i.e., the center line of the combustion furnace), and the flow of the gas in the center line direction component in the combustion chamber increases.
  • the probability of scattering to the inner wall surface side in the combustion chamber and adhering to and depositing on the inner wall surface can be reduced. That is, it becomes possible to fly the powder generated by the combustion decomposition to the upstream end of the cooling unit, which is the next step of the combustion chamber, without adhering to the inner wall surface of the combustion chamber.
  • the detoxification apparatus in which the inlet nozzle according to the embodiment of the present invention is disposed can reduce deposits adhering mainly to the side surface of the combustion chamber, so that the maintenance cycle is lengthened. Can do. *
  • FIG. 1 is a diagram showing a schematic configuration example for explaining a system layout in which an abatement apparatus 400 including an inlet nozzle 40 according to an embodiment of the present invention is disposed.
  • the abatement apparatus 400 provided with the inlet nozzle 40 is a combustion-type abatement apparatus as an example.
  • the abatement apparatus 400 in which the inlet nozzle 40 according to the embodiment of the present invention is disposed is not limited to the combustion type, and for example, other than the plasma type or gasoline engine type abatement apparatus 400 or the like. It can be arranged.
  • a process apparatus (process chamber) 100 such as a wafer film forming apparatus installed in the clean room 200 is connected to a dry pump 300 via a vacuum pipe 500.
  • the dry pump 300 is connected to the abatement apparatus 400 via the exhaust pipe 600.
  • the casing forming the exterior body of the abatement apparatus 400 has a substantially cylindrical shape, and an inlet head 403 (FIG. 2) is configured as a lid at the upper and lower ends.
  • the casing does not necessarily need to be substantially cylindrical, and may have a configuration in which the interior is isolated from the space and the outside. *
  • FIG. 2 is a diagram showing a schematic configuration example of the abatement apparatus 400 in which the inlet nozzle 40 according to the embodiment of the present invention is arranged, and an arrow G in the figure indicates a flow of gas containing the abatement gas.
  • Exhaust gas containing toxic gas discharged from the process apparatus 100 is transported to the abatement apparatus 400 through the vacuum pipe 500, the dry pump 300, and the exhaust pipe 600.
  • the inlet three-way valve 401 separates the gas discharged into the combustible exhaust duct and the gas sent to the combustor (combustion furnace) 404.
  • the embodiment of the present invention will be described following the flow of exhaust gas toward the combustor 404.
  • the exhaust gas is conveyed to the combustor 404 through the inlet pipe 402 and the inlet head (gas introduction unit) 403.
  • the combustor 404 is a space for burning a detoxifying gas including a toxic gas, and has an internal temperature of about 800 ° C.
  • the abatement apparatus 400 includes a combustor 404 that is a combustion furnace and a quench 405 that is a gas temperature cooling unit.
  • the combustor 404 is configured to process a combustible gas or a cleaning gas to be processed from a CVD (Chemical Vapor Deposition) apparatus (not shown) of a semiconductor manufacturing process through a vacuum pump (not shown).
  • CVD Chemical Vapor Deposition
  • the gas is introduced from an inlet head 403, which is an inlet of the abatement apparatus 400 via the inlet pipe 402 and disposed at the upstream end of the combustor 404, and is decomposed at a high temperature.
  • the flammable gas is a colorless and toxic silane gas (SiH 4 ), a colorless (yellow) toxic high-pressure gas such as tungsten hexafluoride (WF 6 ), dichlorosilane (SiH 2 Cl 2 ), etc., and a cleaning gas. Is ammonia (NH 3 ).
  • exhaust gas exhausted from the vacuum pump and introduced from the inlet head 403 is combusted and decomposed by the combustor 404.
  • Exhaust gas generated by this combustion decomposition is cooled from about 800 ° C. to about 80 ° C. by quench 405 which is a gas temperature cooling unit. Cooling water is used for cooling the exhaust gas. Then, the cooled exhaust gas and particulate dust generated by combustion decomposition are discharged from the discharge port (downstream end) of the combustor 404, and the packed tower which is a wet detoxification section passes through the cyclone 406 which is a powder removal section. 407. Water-soluble gases such as hydrogen fluoride (HF) and hydrogen chloride (HCl) are dissolved in this portion. In this embodiment, the cyclone 406 and the packed tower 407 are made of polypropylene.
  • an inclination is provided inside the inlet nozzle 40 provided in the inlet head 403 (about the inclination). Details will be described later).
  • the flow of gas and powder passing through the inlet nozzle 40 is always constant inside the combustor 404 by the inclination provided in the inlet nozzle 40. More specifically, an inclination is provided in the inlet nozzle 40 so that gas (exhaust gas / detoxification gas) and powder (fine particle dust) flow on the central axis of the combustor 404.
  • FIG. 3 is a view for explaining the vicinity of the inlet head 403 in the abatement apparatus 400 including the inlet nozzle 40 according to the embodiment of the present invention.
  • 3A is an enlarged view of FIG. 2 ⁇ (inlet pipe 402, inlet head 403, combustor 404, scraper 408, which will be described later), and shows a cross-sectional view in the axial direction, and FIG. The figure when the part (the inlet nozzle 40, the inlet head 403) is seen from the upstream of the flow of gas is shown.
  • the inlet head 403 is configured to have four introduction holes 409 in which the inlet nozzles 40 are disposed, but the number of introduction holes 409 may be set as necessary.
  • the material of the inlet head 403 according to the embodiment of the present invention is preferably stainless steel.
  • a scraper 408 for removing powder adhering to the downstream end (combustor 404 side) end of the inlet nozzle 40 is disposed.
  • FIG. 4 is a view for explaining the inlet nozzle 40 according to the embodiment of the present invention, and shows a sectional view in the axial direction of the inlet nozzle 40 according to the present invention.
  • the direction in which the gas flows is described as an “axial direction”, and the direction perpendicular to the axial direction is described as a “diameter (diameter / radius)”.
  • the material of the inlet nozzle 40 according to the embodiment of the present invention is desirably, for example, Inconel: Inconel (registered trademark) or Hastelloy (corrosion resistant) which is a nickel-based superalloy.
  • the inlet nozzle 40 is a part that allows the inlet piping 402 and the inlet head 403 to communicate with each other in the detoxifying apparatus 400, and is a substantially housing having a cavity therein, the flange portion 41, and the housing side portion. 42, an inclined portion 43, a bottom portion 44, and the like.
  • the flange portion 41 is located on the upper side in the axial direction of the inlet nozzle 40 (that is, on the upstream side of the flowing gas) and is fitted to the inlet pipe 402.
  • the housing side portion 42 constitutes the side surface of the inlet nozzle 40, and is a cylindrical housing in this embodiment, and is fitted into an introduction hole 409 provided in the inlet head 403.
  • the inclined portion 43 is formed on a part of the inside of the housing side portion 42 (that is, inside the inlet nozzle 40).
  • the inclined portion 43 is substantially tapered, and a bottom portion 44 having a side surface parallel to the housing side portion 42 is formed on the lower side in the axial direction (that is, the downstream side of the flowing gas).
  • the axial length L1 of the entire inlet nozzle 40 is about 76.6 mm
  • the axial length L2 excluding the bottom 44 is 71.6 mm
  • the length L3 in the axial direction of the bottom 44 is 5 mm
  • the length L4 in the axial direction from the end of the flange 41 (on the inlet pipe 402 side) to the portion where the inclined portion 43 starts to be inclined is 30 mm
  • the length L5 in the axial direction is 41.6 mm
  • the length L6 in the axial direction of the flange portion 41 is 6 mm.
  • the outer diameter d1 of the flange portion 41 of the inlet nozzle 40 is 33 mm
  • the diameter d3 of the space surrounded by the casing side portion 42 and the bottom portion 44 is 12 mm
  • the outer diameter d4 of the casing side portion 42 is 26.7 mm.
  • the inlet nozzle 40 As an inclined portion 43 on the inner wall surface of the inlet nozzle 40 (inner wall of the casing side portion 42), the gas passing through the inside (exhaust gas / harmful gas) is upstream.
  • a slope structure that gradually decreases the inner diameter of the inlet nozzle 40 from the side toward the downstream side is formed from the vicinity of the center of the wall surface in the axial direction toward the downstream side. That is, a structure like a slide is formed on a part of the inner wall of the casing (cylindrical body) constituting the inlet nozzle 40.
  • the taper angle ⁇ of the slope structure is configured as 8.21 degrees as an example.
  • the taper angle (inclination angle) ⁇ is preferably about 15 ° in view of the balance with the scraper 408.
  • the scraper 408 is an elastic body (spring), but is not limited thereto.
  • the scraper may have a rod shape, a blade shape, or a spatula shape.
  • FIG. 4 is a view of the inlet nozzle 40 according to the embodiment of the present invention shown in FIG. 4 as viewed from the direction of arrow A (that is, from the inlet piping 402 side).
  • 4 is a view of the inlet nozzle 40 according to the embodiment of the present invention shown in FIG. 4 as viewed from the direction of arrow B (that is, from the combustor 404 side).
  • 4 is a cross-sectional view in the direction of arrow C of the inlet nozzle 40 according to the embodiment of the present invention illustrated in FIG. That is, it is a cross-sectional view of a portion where the inclined portion 43 is not formed.
  • the inclined portion 43 of the inlet nozzle 40 is the inner wall of the casing (cylindrical body) constituting the inlet nozzle 40.
  • the inner circumference of the portion from the half in the axial direction of the inlet nozzle 40 to the upper side (the inlet pipe 402 side) has the same diameter, The slope structure is formed on one side (half of the inner circumference).
  • the detoxification apparatus 400 is provided in the inlet nozzle 40 through which a gas (toxic gas: silane gas, tungsten hexafluoride, dichlorosilane, etc.) contained in the exhaust gas and to be detoxified flows.
  • a gas toxic gas: silane gas, tungsten hexafluoride, dichlorosilane, etc.
  • An inclined portion 43 is provided.
  • the inlet nozzle 40 which concerns on embodiment of this invention set the position which provides the inclination part 43, ie, the position which begins to form a slope structure, from the position of the approximate center of the length of the axial direction of the inlet nozzle 40.
  • it is not limited to this.
  • the slope portion 43 may start to form a slope structure from the uppermost portion of the inlet nozzle 40, that is, a part of the inner diameter of the flange portion 41, or may be lower than the center position in the axial direction of the inlet nozzle 40. You may make it the structure which begins to form a slope structure from a part (combustor 404 side).
  • the ratio of L4: (L5 + L3) is preferably about 6: 4
  • the ratio of the diameter of d2: d3 is preferably about 2: 1.
  • the inclined portion 43 is formed on the inner wall of the inlet nozzle 40 by welding.
  • the method of forming the inclined portion 43 is not limited to this, and for example, cutting or casting is performed. It may be formed by a method. *
  • the exhaust gas introduced from the inlet pipe 402 passes through the four inlet holes 409 when passing through the inlet nozzle 40.
  • the traveling direction is always controlled to be a constant direction by the respective inclined portions 43 formed inside the inlet nozzle 40 disposed in the nozzle. More specifically, the exhaust gas introduced from the inlet pipe 402 is controlled so as to pass through the center inside the combustor 404.
  • the abatement apparatus 400 provided with the inlet nozzle 40 is configured such that the exhaust gas introduced from the inlet pipe 402 is the inlet nozzle 40.
  • the powder generated by being combusted and decomposed by the combustor 404 after passing through the air is allowed to fly to the upstream end of the quench 405 before scattering to the inner wall surface of the combustor 404 and adhering to the inner wall surface.
  • FIG. 5 is a view for explaining a modification of the inlet nozzle 40 according to the present invention.
  • the same number is attached
  • FIG. 5 is a view of an inlet head 403 provided with an inlet nozzle 50 according to a modification of the embodiment of the present invention as viewed from below (that is, the downstream side when exhaust gas flows).
  • the inlet nozzle 50 according to the modification of the embodiment of the present invention is not provided with a bottom portion 44 (FIG. 4) having a side surface parallel to the housing side portion 42 on the downstream side of the inclined portion 43. Instead, on the extension of the inclined portion 43, the bottom portion 54 coincides with the bottom surface of the inclined portion 43.
  • the bottom 44 (54) of the inlet nozzle 40 (50) according to the embodiment of the present invention can have various shapes. *
  • the inlet head 403 is configured to be removable with respect to the combustor 404, but the inlet head 403 and the combustor 404 may be configured integrally.
  • Inlet nozzle (conventional) 2 Inlet head (conventional) 40 Inlet nozzle 41 Flange part 42 Housing side part 43 Inclined part 44 Bottom part 50 Inlet nozzle 54 Bottom part 100 Process equipment 200 Clean room 300 Dry pump 400 Exhaust equipment 401 Inlet three-way valve 402 Piping 403 Inlet head 404 Combustor 405 Quench 406 Cyclone 407 Packed tower 408 Scraper 409 Introduction hole 500 Vacuum piping 600 Exhaust piping

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)

Abstract

An inclined part (43) is provided on the inside of an inlet nozzle (40) arranged on a detoxification device, thereby enabling a powder generated by combustion decomposition to fly to the upstream end of a cooling unit, which is the next stage after the combustion chamber, without adhering to the inner wall surface of the combustion chamber.

Description

インレットノズル、及び除害装置Inlet nozzle and abatement device
本発明は、インレットノズル、及び除害装置に関する。詳しくは、内部に傾斜が設けられたインレットノズル、及び当該インレットノズルを備える除害装置に関する。 The present invention relates to an inlet nozzle and an abatement apparatus. Specifically, the present invention relates to an inlet nozzle provided with an inclination inside, and a detoxification apparatus including the inlet nozzle.
半導体や太陽電池、液晶などを製造する際の工程の１つである成膜のための装置では、Ｓｉ膜を生成するための真空チャンバ内でシランガス（ＳｉＨ4）等のプロセスガスを使用する。　使用された後の排ガスは、半導体製造工程用の装置である真空チャンバに接続された真空ポンプの反応炉から外部に排気されるが、こうした排ガスには、上述したようなシランガスをはじめ、六フッ化タングステン（ＷＦ6）、ジクロルシラン（ＳｉＨ2Ｃｌ2）など、成膜工程により様々な有毒ガスが含まれることが多い。そのため、真空ポンプの排気側には、こうした排ガスを酸化することで無害なガスとして排出するための除害装置が接続される。　この除害装置は、燃焼式やプラズマ式など様々な種類がある。例えば燃焼式除害装置の場合、燃やして空気（酸素）と反応させる酸化反応を起こすことで、有毒ガスを無害なガスに変えている。例えば、シランガス（ＳｉＨ4）であれば、酸化反応の結果、無害な二酸化ケイ素；シリカ（ＳｉＯ2）が発生する。　このシリカは固体・粉体であり、上述した酸化反応によって（シリカに）変化する際にエネルギーが与えられ、酸化反応を起こす空間である燃焼炉の空間を飛散する。つまり、まっすぐに落下せずに飛散するので、その多くが燃焼炉の壁面に付着し、時間の経過とともに堆積してしまう。　そのため、当該堆積物を取り除くために定期的なメンテナンス（オーバーホール）の実施が必要になる。一般的に、このメンテナンスは三ヶ月に一度程度の頻度で実施される。なお、運用面・費用面を鑑みたときに、当該メンテナンスから次のメンテナンスを行う迄の間隔（フリーメンテナンス期間）は長ければ長い方がよい。つまり、除害装置は、酸化反応によって生成される堆積物が付着しにくい構造であることが望ましい。 In an apparatus for film formation, which is one of the processes when manufacturing semiconductors, solar cells, liquid crystals, and the like, a process gas such as silane gas (SiH 4 ) is used in a vacuum chamber for generating a Si film. The exhaust gas after being used is exhausted to the outside from a reactor of a vacuum pump connected to a vacuum chamber, which is an apparatus for a semiconductor manufacturing process. Examples of such exhaust gas include silane gas as described above, and six fluorocarbons. Various toxic gases such as tungsten nitride (WF 6 ) and dichlorosilane (SiH 2 Cl 2 ) are often contained in the film forming process. For this reason, a detoxifying device is connected to the exhaust side of the vacuum pump to discharge such exhaust gas as harmless gas. There are various types of abatement devices such as a combustion type and a plasma type. For example, in the case of a combustion-type abatement apparatus, a poisonous gas is changed to a harmless gas by causing an oxidation reaction that burns and reacts with air (oxygen). For example, in the case of silane gas (SiH 4 ), harmless silicon dioxide; silica (SiO 2 ) is generated as a result of the oxidation reaction. This silica is a solid / powder, and is given energy when it is changed (to silica) by the oxidation reaction described above, and scatters in the space of the combustion furnace, which is a space where the oxidation reaction takes place. That is, since it does not fall straight and scatters, most of it adheres to the wall of the combustion furnace and accumulates over time. Therefore, it is necessary to perform regular maintenance (overhaul) to remove the deposit. Generally, this maintenance is performed about once every three months. In view of operation and cost, it is better that the interval from the maintenance to the next maintenance (free maintenance period) is longer. That is, it is desirable that the abatement apparatus has a structure in which deposits generated by the oxidation reaction are difficult to adhere.
特開平１０－９５５１号公報Japanese Patent Laid-Open No. 10-9551
特許文献１には、燃焼式除害装置の燃焼室に接続された排ガス燃焼ノズルを用いて排ガスを燃焼する方法が記載されている。　より詳しくは、特許文献１の排ガス燃焼ノズルは、排ガス用ノズル、第１及び第２の燃焼ノズル、更に空気供給用のノズルを有し、ノズルの先端にシリカが付着・堆積するのを防止するために、完全な酸化反応がガスの下流側で起こるように構成されている。 Patent Document 1 describes a method of burning exhaust gas using an exhaust gas combustion nozzle connected to a combustion chamber of a combustion-type abatement apparatus. More specifically, the exhaust gas combustion nozzle of Patent Document 1 includes an exhaust gas nozzle, first and second combustion nozzles, and further an air supply nozzle, and prevents silica from adhering and accumulating at the tip of the nozzle. Therefore, it is configured such that a complete oxidation reaction occurs on the downstream side of the gas.
しかしながら、特許文献１に記載の排ガス燃焼ノズルでは、大量のガスを使用しなければならない。すると、そのための装置を別途配設する必要が生じ、その分の設備コストやランニングコストが増大するという問題があった。　また、本来除害したいガス（有毒ガス）以外のガスを大量に流すため、本来除害したい有毒ガスの一定時間の流量は相対的に減る。その結果、有毒ガスの除害能力（性能）が低下（劣化）してしまうという問題があった。　 However, in the exhaust gas combustion nozzle described in Patent Document 1, a large amount of gas must be used. Then, it is necessary to separately arrange a device for that, and there is a problem that the equipment cost and running cost increase accordingly. In addition, since a large amount of gas other than the gas (toxic gas) that is originally intended to be removed flows, the flow rate of the toxic gas that is originally desired to be removed is relatively reduced. As a result, there has been a problem that the abatement ability (performance) of toxic gas is reduced (deteriorated). *
図６は、従来のインレットノズル１を説明するための図である。　図６（ａ）は、従来のインレットノズル１の軸線方向断面図を示した図であり、図６（ｂ）は、従来のインレットノズル１が配設されたインレットヘッド２を下（ガスが流れた場合の下流側）から見た図である。　図６（ａ）に示したように、従来のインレットノズル１の筐体部分の内径はどこも一定であり、ガスの上流側から下流側に向かってストレートな構造になっている。　 FIG. 6 is a view for explaining a conventional inlet nozzle 1. FIG. 6A is a diagram showing a cross-sectional view in the axial direction of the conventional inlet nozzle 1, and FIG. 6B is a view below the inlet head 2 in which the conventional inlet nozzle 1 is disposed (gas flows). FIG. As shown in FIG. 6 (a), the inner diameter of the casing portion of the conventional inlet nozzle 1 is constant everywhere, and has a straight structure from the upstream side to the downstream side of the gas. *
本発明は、燃焼炉の壁面に付着する堆積物の量を低減させ、メンテナンスの周期を長くするためのインレットノズル、及び当該インレットノズルを備える除害装置を提供することを目的とする。 An object of the present invention is to provide an inlet nozzle for reducing the amount of deposits adhering to the wall surface of a combustion furnace and prolonging the maintenance cycle, and a detoxifying device including the inlet nozzle.
上記目的を達成するために、請求項１記載の本願発明では、除害されるガスを含む排出ガスを除害用チャンバへ案内するインレットノズルであって、前記インレットノズルの内側壁面の内周が、前記排出ガスを流した場合の上流側から下流側に向けて小さくなる傾斜部を有することを特徴とするインレットノズルを提供する。　請求項２記載の本願発明では、前記傾斜部は、前記インレットノズルの軸線方向において、前記下流側の前記内側壁面に形成されることを特徴とする請求項１に記載のインレットノズルを提供する。　請求項３記載の本願発明では、除害用チャンバと、請求項１又は請求項２に記載のインレットノズルと、前記インレットノズルを配設するための孔を複数有し、前記除害用チャンバと嵌合されるノズル固定部材と、を備えることを特徴とする除害装置を提供する。　請求項４記載の本願発明では、前記ノズル固定部材は、取り外しが可能であることを特徴とする請求項３に記載の除害装置を提供する。 To achieve the above object, the present invention according to claim 1 is an inlet nozzle for guiding an exhaust gas containing a gas to be abated to a chamber for abatement, wherein the inner circumference of the inner wall surface of the inlet nozzle is An inlet nozzle having an inclined portion that decreases from the upstream side toward the downstream side when the exhaust gas flows is provided. In the present invention according to claim 2, the inlet nozzle according to claim 1, wherein the inclined portion is formed on the inner wall surface on the downstream side in the axial direction of the inlet nozzle. According to a third aspect of the present invention, the abatement chamber, the inlet nozzle according to the first or second aspect, and a plurality of holes for disposing the inlet nozzle, the abatement chamber, There is provided a detoxifying device comprising a nozzle fixing member to be fitted. In this invention of Claim 4, the said nozzle fixing member can be removed, The abatement apparatus of Claim 3 characterized by the above-mentioned is provided.
本発明によれば、燃焼炉の壁面に付着する堆積物の量を低減させ、メンテナンスの周期を長くするためのインレットノズル、及び当該インレットノズルを備える除害装置を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the amount of the deposit | attachment adhering to the wall surface of a combustion furnace can be reduced, and the abatement apparatus provided with the inlet nozzle for extending the period of a maintenance and the said inlet nozzle can be provided.
本発明に係るインレットノズルを備える除害装置が配設されるシステム・レイアウトを説明するための概略構成例を示した図である。It is the figure which showed the schematic structural example for demonstrating the system layout by which the abatement apparatus provided with the inlet nozzle which concerns on this invention is arrange | positioned. 本発明に係るインレットノズルを備える除害装置の概略構成例を示した図である。It is the figure which showed the example of schematic structure of the abatement apparatus provided with the inlet nozzle which concerns on this invention. 本発明に係るインレットノズルを備える除害装置におけるインレットヘッド周辺を説明するための図である。It is a figure for demonstrating the inlet head periphery in an abatement apparatus provided with the inlet nozzle which concerns on this invention. 本発明に係るインレットノズルを説明するための図である。It is a figure for demonstrating the inlet nozzle which concerns on this invention. 本発明の変形例に係るインレットノズルを説明するための図である。It is a figure for demonstrating the inlet nozzle which concerns on the modification of this invention. 従来のインレットノズルを説明するための図である。It is a figure for demonstrating the conventional inlet nozzle.
（ｉ）実施形態の概要　本発明の実施形態に係るインレットノズルは、インレットノズルの筐体の内側に傾斜部を備えており、この傾斜により、インレットノズルを通過する気体（除害ガス）及び粉体の流れを、燃焼室（燃焼炉）内部において常に一定にする。　より詳しくは、本発明の実施形態に係るインレットノズルには、除害ガス（排出ガス）などの気体、及び、燃焼分解により発生した微粒子ダストなどの粉体が燃焼室の中心を流れるように、内部に傾斜が設けられる。　この構成により、除害ガス導入用のインレットノズルの噴射方向を中心（即ち、燃焼炉の中心線）側に向け、燃焼室における当該中心線方向成分の気体の流れが増えるので、粉体が、燃焼室における内部壁面側へ飛散し、当該内部壁面に付着して堆積してしまう確率を減らすことができる。つまり、燃焼分解により発生する粉体を、燃焼室の内部壁面に付着させることなく、燃焼室の次の工程である冷却部の上流端まで飛ばすことが可能になる。　このような構成により、本発明の実施形態に係るインレットノズルを配設する除害装置は、燃焼室の主に側面に付着する堆積物を低減することができるので、メンテナンスの周期を長くすることができる。　 (I) Outline of Embodiment The inlet nozzle according to the embodiment of the present invention includes an inclined portion inside the casing of the inlet nozzle, and due to this inclination, gas (harmful gas) and powder passing through the inlet nozzle. The body flow is always constant inside the combustion chamber (combustion furnace). More specifically, in the inlet nozzle according to the embodiment of the present invention, a gas such as a detoxifying gas (exhaust gas) and a powder such as particulate dust generated by combustion decomposition flow in the center of the combustion chamber. A slope is provided inside. With this configuration, the injection direction of the inlet nozzle for introducing the detoxifying gas is directed toward the center (i.e., the center line of the combustion furnace), and the flow of the gas in the center line direction component in the combustion chamber increases. The probability of scattering to the inner wall surface side in the combustion chamber and adhering to and depositing on the inner wall surface can be reduced. That is, it becomes possible to fly the powder generated by the combustion decomposition to the upstream end of the cooling unit, which is the next step of the combustion chamber, without adhering to the inner wall surface of the combustion chamber. With such a configuration, the detoxification apparatus in which the inlet nozzle according to the embodiment of the present invention is disposed can reduce deposits adhering mainly to the side surface of the combustion chamber, so that the maintenance cycle is lengthened. Can do. *
（ｉｉ）実施形態の詳細　以下、本発明の好適な実施の形態について、図１から図５を参照して詳細に説明する。　図１は、本発明の実施形態に係るインレットノズル４０を備える除害装置４００が配設されるシステム・レイアウトを説明するための概略構成例を示した図である。　なお、上述した本発明の実施形態では、インレットノズル４０が配設される除害装置４００は、一例として燃焼式の除害装置とする。しかし、本発明の実施形態に係るインレットノズル４０が配設される除害装置４００は燃焼式に限定されることはなく、例えば、他に、プラズマ式やガソリンエンジン式の除害装置４００などに配設することができる。　クリーンルーム２００内に設置されるウェハ成膜装置などのプロセス装置（プロセスチャンバ）１００は、真空配管５００を介してドライポンプ３００と連結される。そして、ドライポンプ３００は、排気配管６００を介して除害装置４００と連結される。　除害装置４００の外装体を形成するケーシングは、略円筒状の形状であり、上下端には蓋部としてインレットヘッド４０３（図２）が構成されている。なお、ケーシングは必ずしも略円筒状で有る必要はなく、内部が空間且つ外部から隔離されている構成であればよい。　 (Ii) Details of Embodiments Hereinafter, preferred embodiments of the present invention will be described in detail with reference to FIGS. 1 to 5. FIG. 1 is a diagram showing a schematic configuration example for explaining a system layout in which an abatement apparatus 400 including an inlet nozzle 40 according to an embodiment of the present invention is disposed. In the above-described embodiment of the present invention, the abatement apparatus 400 provided with the inlet nozzle 40 is a combustion-type abatement apparatus as an example. However, the abatement apparatus 400 in which the inlet nozzle 40 according to the embodiment of the present invention is disposed is not limited to the combustion type, and for example, other than the plasma type or gasoline engine type abatement apparatus 400 or the like. It can be arranged. A process apparatus (process chamber) 100 such as a wafer film forming apparatus installed in the clean room 200 is connected to a dry pump 300 via a vacuum pipe 500. The dry pump 300 is connected to the abatement apparatus 400 via the exhaust pipe 600. The casing forming the exterior body of the abatement apparatus 400 has a substantially cylindrical shape, and an inlet head 403 (FIG. 2) is configured as a lid at the upper and lower ends. In addition, the casing does not necessarily need to be substantially cylindrical, and may have a configuration in which the interior is isolated from the space and the outside. *
図２は、本発明の実施形態に係るインレットノズル４０が配設される除害装置４００の概略構成例を示した図であり、図中の矢印Ｇは除害ガスを含むガスの流れを示している。　プロセス装置１００から排出された有毒ガスを含む排出ガスは、真空配管５００を通ってドライポンプ３００を経由し、排気配管６００を通って除害装置４００へ運ばれる。　そして、インレット三方弁４０１により、可燃排気ダクトに排出されるガスとコンバスタ（燃焼炉）４０４へ送られるガスとに分かれる。　本発明の実施形態は、コンバスタ４０４へ向かう排出ガスの流れを追って説明する。　当該排出ガスは、インレット配管４０２を通ってインレットヘッド（ガス導入部）４０３を経由し、コンバスタ４０４へ運ばれる。　コンバスタ４０４は、有毒ガスを含む除害ガスを燃焼処理する空間であり、内部温度は約８００℃前後である。　本発明の実施形態に係る除害装置４００は、燃焼炉であるコンバスタ４０４とガス温度冷却部であるクエンチ４０５とを備えている。　コンバスタ４０４は、半導体製造工程の図示していないＣＶＤ（Ｃｈｅｍｉｃａｌ　Ｖａｐｏｒ　Ｄｅｐｏｓｉｔｉｏｎ：化学気相成長法）装置から真空ポンプ（図示しない）を介して排出される、可燃性ガスやクリーニングガスの処理対象ガスを、インレット配管４０２を介して、除害装置４００の導入口であり、コンバスタ４０４の上流端に配設されたインレットヘッド４０３から導入して高温で燃焼分解する。　なお、可燃性ガスは、無色の気体で有毒なシランガス（ＳｉＨ4）、無色（黄色）の毒性高圧ガスの六フッ化タングステン（ＷＦ6）、ジクロルシラン（ＳｉＨ2Ｃｌ2）などであり、クリーニングガスはアンモニア（ＮＨ3）などである。　本発明の実施形態では、真空ポンプから排気され、インレットヘッド４０３から導入された排出ガスをコンバスタ４０４で燃焼分解する。この燃焼分解によって、排出ガスに含まれていた有毒ガスが無害化される。　この燃焼分解によって生じた排出ガスは、ガス温度冷却部であるクエンチ４０５で約８００℃から約８０℃に冷却される。なお、排出ガスの冷却は冷却水を使用している。　そして、冷却済みの排出ガスや燃焼分解によって生じた微粒子ダストが、コンバスタ４０４の排出口（下流端）から排出され、粉体除去部であるサイクン４０６を経由し、湿式除害部であるパックドタワー４０７へ導入される。フッ化水素（ＨＦ）や塩化水素（ＨＣｌ）などの水溶性ガスは、この部分で溶解される。　なお、本実施形態では、サイクン４０６及びパックドタワー４０７はポリプロピレンで製造されている。　 FIG. 2 is a diagram showing a schematic configuration example of the abatement apparatus 400 in which the inlet nozzle 40 according to the embodiment of the present invention is arranged, and an arrow G in the figure indicates a flow of gas containing the abatement gas. ing. Exhaust gas containing toxic gas discharged from the process apparatus 100 is transported to the abatement apparatus 400 through the vacuum pipe 500, the dry pump 300, and the exhaust pipe 600. The inlet three-way valve 401 separates the gas discharged into the combustible exhaust duct and the gas sent to the combustor (combustion furnace) 404. The embodiment of the present invention will be described following the flow of exhaust gas toward the combustor 404. The exhaust gas is conveyed to the combustor 404 through the inlet pipe 402 and the inlet head (gas introduction unit) 403. The combustor 404 is a space for burning a detoxifying gas including a toxic gas, and has an internal temperature of about 800 ° C. The abatement apparatus 400 according to the embodiment of the present invention includes a combustor 404 that is a combustion furnace and a quench 405 that is a gas temperature cooling unit. The combustor 404 is configured to process a combustible gas or a cleaning gas to be processed from a CVD (Chemical Vapor Deposition) apparatus (not shown) of a semiconductor manufacturing process through a vacuum pump (not shown). The gas is introduced from an inlet head 403, which is an inlet of the abatement apparatus 400 via the inlet pipe 402 and disposed at the upstream end of the combustor 404, and is decomposed at a high temperature. The flammable gas is a colorless and toxic silane gas (SiH 4 ), a colorless (yellow) toxic high-pressure gas such as tungsten hexafluoride (WF 6 ), dichlorosilane (SiH 2 Cl 2 ), etc., and a cleaning gas. Is ammonia (NH 3 ). In the embodiment of the present invention, exhaust gas exhausted from the vacuum pump and introduced from the inlet head 403 is combusted and decomposed by the combustor 404. By this combustion decomposition, the toxic gas contained in the exhaust gas is rendered harmless. Exhaust gas generated by this combustion decomposition is cooled from about 800 ° C. to about 80 ° C. by quench 405 which is a gas temperature cooling unit. Cooling water is used for cooling the exhaust gas. Then, the cooled exhaust gas and particulate dust generated by combustion decomposition are discharged from the discharge port (downstream end) of the combustor 404, and the packed tower which is a wet detoxification section passes through the cyclone 406 which is a powder removal section. 407. Water-soluble gases such as hydrogen fluoride (HF) and hydrogen chloride (HCl) are dissolved in this portion. In this embodiment, the cyclone 406 and the packed tower 407 are made of polypropylene.
上述したＣＶＤ装置で使用される上述したプロセスガスを燃焼分解すると、微粒子ダストとして粉体が発生する。例えば、シランガス（ＳｉＨ4）やジクロルシラン（ＳｉＨ2Ｃｌ2）を燃焼分解すると二酸化ケイ素；シリカ（ＳｉＯ2）が発生し、六フッ化タングステン（ＷＦ6）を燃焼分解すると酸化タングステン（Ｗ2Ｏ3）が発生する。　これらの粉体がコンバスタ４０４の壁面に付着するのを防止するために、本発明の実施形態では、インレットヘッド４０３に配設されるインレットノズル４０の内部に傾斜が設けられている（傾斜についての詳細は後述する）。　本発明の実施形態では、インレットノズル４０の内部に設けられた傾斜によって、インレットノズル４０を通過するガスや粉体の流れを、コンバスタ４０４内部において常に一定にする。より詳しくは、気体（排出ガス・除害ガス）や粉体（微粒子ダスト）が、コンバスタ４０４の中心軸線上を流
れるように、インレットノズル４０の内部に傾斜を設ける。この構成により、コンバスタ４０４の内部壁面側へ粉体が飛散し、当該内部壁面に粉体が付着して堆積してしまう確率を減らすことができる。つまり、燃焼分解により発生する粉体を、コンバスタ４０４の内部壁面に付着させることなく、クエンチ４０５の上流端まで飛ばす構成になっている。　 When the above-described process gas used in the above-described CVD apparatus is combusted and decomposed, powder is generated as fine particle dust. For example, when silane gas (SiH 4 ) or dichlorosilane (SiH 2 Cl 2 ) is combusted and decomposed, silicon dioxide; silica (SiO 2 ) is generated, and when tungsten hexafluoride (WF 6 ) is combusted and decomposed, tungsten oxide (W 2 O 3). ) Occurs. In order to prevent these powders from adhering to the wall surface of the combustor 404, in the embodiment of the present invention, an inclination is provided inside the inlet nozzle 40 provided in the inlet head 403 (about the inclination). Details will be described later). In the embodiment of the present invention, the flow of gas and powder passing through the inlet nozzle 40 is always constant inside the combustor 404 by the inclination provided in the inlet nozzle 40. More specifically, an inclination is provided in the inlet nozzle 40 so that gas (exhaust gas / detoxification gas) and powder (fine particle dust) flow on the central axis of the combustor 404. With this configuration, it is possible to reduce the probability that the powder is scattered toward the inner wall surface side of the combustor 404 and the powder adheres to and accumulates on the inner wall surface. That is, the powder generated by the combustion decomposition is blown up to the upstream end of the quench 405 without adhering to the inner wall surface of the combustor 404.
図３は、本発明の実施形態に係るインレットノズル４０を備える除害装置４００におけるインレットヘッド４０３周辺を説明するための図である。　図３（ａ）は、図２α部（インレット配管４０２、インレットヘッド４０３、コンバスタ４０４、後述するスクレイパ４０８）の拡大図であって軸線方向の断面図を示し、図３（ｂ）は、図２α部（インレットノズル４０、インレットヘッド４０３）をガスの流れの上流側からみた場合の図を示している。　本発明の実施形態では、一例として、インレットヘッド４０３には、インレットノズル４０が配設される導入孔４０９が４つ設けられた構成にしているが、この導入孔４０９の数は、必要に応じて６つや８つ等と適宜変更することが可能である。　なお、本発明の実施形態に係るインレットヘッド４０３の材料は、一例として、ステンレススチールが望ましい。　インレットノズル４０内部には、インレットノズル４０の下流側（コンバスタ４０４側）の端に付着した粉体を除去するためのスクレイパ４０８が配設される。　 FIG. 3 is a view for explaining the vicinity of the inlet head 403 in the abatement apparatus 400 including the inlet nozzle 40 according to the embodiment of the present invention. 3A is an enlarged view of FIG. 2α (inlet pipe 402, inlet head 403, combustor 404, scraper 408, which will be described later), and shows a cross-sectional view in the axial direction, and FIG. The figure when the part (the inlet nozzle 40, the inlet head 403) is seen from the upstream of the flow of gas is shown. In the embodiment of the present invention, as an example, the inlet head 403 is configured to have four introduction holes 409 in which the inlet nozzles 40 are disposed, but the number of introduction holes 409 may be set as necessary. Thus, it can be appropriately changed to six or eight. Note that, as an example, the material of the inlet head 403 according to the embodiment of the present invention is preferably stainless steel. In the inlet nozzle 40, a scraper 408 for removing powder adhering to the downstream end (combustor 404 side) end of the inlet nozzle 40 is disposed. *
図４は、本発明の実施形態に係るインレットノズル４０を説明するための図であり、本発明に係るインレットノズル４０の軸線方向の断面図を示している。　なお本実施形態では、便宜上、気体が流れる方向を「軸線方向」、当該軸線方向と垂直な方向を「径（直径・半径）」として説明する。　また、本発明の実施形態に係るインレットノズル４０の材料は、一例として、ニッケル基超合金であるＩｎｃｏｎｅｌ：インコネル（登録商標）や、ハステロイ（耐食性のあるもの）が望ましい。　本発明の実施形態に係るインレットノズル４０は、除害装置４００においてインレット配管４０２とインレットヘッド４０３とを連通させる部品であり、内部に空洞を有する略筐体であり、フランジ部４１、筐体側部４２、傾斜部４３、底部４４などにより構成される。　フランジ部４１は、インレットノズル４０の軸線方向上側（即ち、流れる気体の上流側）に位置し、インレット配管４０２と嵌合される。　筐体側部４２はインレットノズル４０の側面を構成し、本実施形態では円筒体の筐体であり、インレットヘッド４０３に設けられた導入孔４０９に嵌合される。本発明の実施形態では、筐体側部４２の内側（即ち、インレットノズル４０の内部）の一部に、傾斜部４３が形成されている。傾斜部４３は略テーパ状であり、軸線方向下側（即ち、流れる気体の下流側）には、筐体側部４２と平行な側面を有する底部４４が形成されている。　 FIG. 4 is a view for explaining the inlet nozzle 40 according to the embodiment of the present invention, and shows a sectional view in the axial direction of the inlet nozzle 40 according to the present invention. In this embodiment, for the sake of convenience, the direction in which the gas flows is described as an “axial direction”, and the direction perpendicular to the axial direction is described as a “diameter (diameter / radius)”. In addition, the material of the inlet nozzle 40 according to the embodiment of the present invention is desirably, for example, Inconel: Inconel (registered trademark) or Hastelloy (corrosion resistant) which is a nickel-based superalloy. The inlet nozzle 40 according to the embodiment of the present invention is a part that allows the inlet piping 402 and the inlet head 403 to communicate with each other in the detoxifying apparatus 400, and is a substantially housing having a cavity therein, the flange portion 41, and the housing side portion. 42, an inclined portion 43, a bottom portion 44, and the like. The flange portion 41 is located on the upper side in the axial direction of the inlet nozzle 40 (that is, on the upstream side of the flowing gas) and is fitted to the inlet pipe 402. The housing side portion 42 constitutes the side surface of the inlet nozzle 40, and is a cylindrical housing in this embodiment, and is fitted into an introduction hole 409 provided in the inlet head 403. In the embodiment of the present invention, the inclined portion 43 is formed on a part of the inside of the housing side portion 42 (that is, inside the inlet nozzle 40). The inclined portion 43 is substantially tapered, and a bottom portion 44 having a side surface parallel to the housing side portion 42 is formed on the lower side in the axial direction (that is, the downstream side of the flowing gas). *
本発明の実施形態に係るインレットノズル４０では、一例として、インレットノズル４０全体の軸線方向の長さＬ１を約７６．６ミリ、底部４４を除いた軸線方向の長さＬ２を７１．６ミリ、底部４４の軸線方向の長さＬ３を５ミリ、フランジ部４１の端先（インレット配管４０２側）から傾斜部４３の傾斜が始まる部分迄の軸線方向の長さＬ４を３０ミリ、傾斜部４３の軸線方向の長さＬ５を４１．６ミリ、フランジ部４１の軸線方向の長さＬ６を６ミリとして構成した。　また、本発明の実施形態に係るインレットノズル４０では、一例として、インレットノズル４０のフランジ部４１の外径ｄ１を３３ミリ、フランジ部４１の内径（インレットノズル４１の筐体上部の内径）ｄ２を２４ミリ、筐体側部４２と底部４４とで囲まれる空間の直径ｄ３を１２ミリ、筐体側部４２の外径ｄ４を２６．７ミリとして構成した。　 In the inlet nozzle 40 according to the embodiment of the present invention, as an example, the axial length L1 of the entire inlet nozzle 40 is about 76.6 mm, the axial length L2 excluding the bottom 44 is 71.6 mm, The length L3 in the axial direction of the bottom 44 is 5 mm, the length L4 in the axial direction from the end of the flange 41 (on the inlet pipe 402 side) to the portion where the inclined portion 43 starts to be inclined is 30 mm, The length L5 in the axial direction is 41.6 mm, and the length L6 in the axial direction of the flange portion 41 is 6 mm. Moreover, in the inlet nozzle 40 according to the embodiment of the present invention, as an example, the outer diameter d1 of the flange portion 41 of the inlet nozzle 40 is 33 mm, and the inner diameter of the flange portion 41 (the inner diameter of the upper portion of the casing of the inlet nozzle 41) d2. The diameter d3 of the space surrounded by the casing side portion 42 and the bottom portion 44 is 12 mm, and the outer diameter d4 of the casing side portion 42 is 26.7 mm. *
本発明の実施形態に係るインレットノズル４０には、インレットノズル４０の内側の壁面（筐体側部４２の内壁）に、傾斜部４３として、内部を通過する気体（排出ガス・除害ガス）の上流側から下流側へ向かってインレットノズル４０の内径を徐々に小さくするスロープ構造が、当該壁面の軸線方向の中央付近から下流側に向かって形成されている。つまり、インレットノズル４０を構成する筐体（円筒体）の内壁の一部にすべり台のような構造が形成されている。　なお、当該スロープ構造のテーパ角度θは、一例として８．２１度として構成されている。このテーパ角度（傾斜角度）θは、スクレイパ４０８との兼ね合いを鑑み、最大傾斜角度は１５°程度であることが望ましい。　なお、本実施形態では、スクレイパ４０８は弾性体（バネ）の構成としたが、これに限られることはない。例えば、スクレイパを棒状、刃状、へら状の構成にしてもよい。　 In the inlet nozzle 40 according to the embodiment of the present invention, as an inclined portion 43 on the inner wall surface of the inlet nozzle 40 (inner wall of the casing side portion 42), the gas passing through the inside (exhaust gas / harmful gas) is upstream. A slope structure that gradually decreases the inner diameter of the inlet nozzle 40 from the side toward the downstream side is formed from the vicinity of the center of the wall surface in the axial direction toward the downstream side. That is, a structure like a slide is formed on a part of the inner wall of the casing (cylindrical body) constituting the inlet nozzle 40. The taper angle θ of the slope structure is configured as 8.21 degrees as an example. The taper angle (inclination angle) θ is preferably about 15 ° in view of the balance with the scraper 408. In the present embodiment, the scraper 408 is an elastic body (spring), but is not limited thereto. For example, the scraper may have a rod shape, a blade shape, or a spatula shape. *
図４の矢視Ａ図は、同図に図示された本発明の実施形態に係るインレットノズル４０を矢印Ａ方向から（即ち、インレット配管４０２側から）見た図である。　図４の矢視Ｂ図は、同図に図示された本発明の実施形態に係るインレットノズル４０を矢印Ｂ方向から（即ち、コンバスタ４０４側から）見た図である。　図４の断面Ｃ図は、同図に図示された本発明の実施形態に係るインレットノズル４０の矢印Ｃ方向断面図を示した図である。つまり、傾斜部４３が形成されていない部分の断面図である。　矢視Ａ図、矢視Ｂ図、及び断面Ｃ図に示したように、本発明の実施形態に係るインレットノズル４０の傾斜部４３は、インレットノズル４０を構成する筐体（円筒体）の内壁における全内周にわたってスロープ構造が形成されている構成ではなく、インレットノズル４０の軸線方向の長さの半分から上（インレット配管４０２側）の部分の内周は同径であり、半分から下の部分であり、且つ、片面（内周の半分）にスロープ構造が形成されている構成である。　このように、本発明の実施形態に係る除害装置４００は、排出ガスに含まれ、除害する対象となるガス（有毒ガス：シランガス、六フッ化タングステン、ジクロルシランなど）が流れるインレットノズル４０に傾斜部４３を設けている。　また、本発明の実施形態に係るインレットノズル４０は、傾斜部４３を設ける位置、即ち、スロープ構造を形成しはじめる位置を、インレットノズル４０の軸線方向の長さの略中央の位置からに設定したが、これに限られることはない。例えば、傾斜部４３として、インレットノズル４０の最上部、即ち、フランジ部４１の内径の一部からスロープ構造を形成しはじめても良いし、或いは、インレットノズル４０の軸線方向中央の位置よりも下側（コンバスタ４０４側）の一部からスロープ構造を形成し始める構成にしてもよい。　なお、最良の実施形態としては、Ｌ４：（Ｌ５＋Ｌ３）の比は６：４くらいが望ましく、また、ｄ２：ｄ３の直径の比は２：１くらいが望ましい。　更に、本発明の実施形態では、溶接にてインレットノズル４０の内壁に傾斜部４３を形成したが、傾斜部４３の形成方法はこれに限られることはなく、例えば、削りだし、或いは鋳物などの方法で形成してもよい。　 4 is a view of the inlet nozzle 40 according to the embodiment of the present invention shown in FIG. 4 as viewed from the direction of arrow A (that is, from the inlet piping 402 side). 4 is a view of the inlet nozzle 40 according to the embodiment of the present invention shown in FIG. 4 as viewed from the direction of arrow B (that is, from the combustor 404 side). 4 is a cross-sectional view in the direction of arrow C of the inlet nozzle 40 according to the embodiment of the present invention illustrated in FIG. That is, it is a cross-sectional view of a portion where the inclined portion 43 is not formed. As shown in arrow A, arrow B, and cross section C, the inclined portion 43 of the inlet nozzle 40 according to the embodiment of the present invention is the inner wall of the casing (cylindrical body) constituting the inlet nozzle 40. Rather than the configuration in which the slope structure is formed over the entire inner circumference, the inner circumference of the portion from the half in the axial direction of the inlet nozzle 40 to the upper side (the inlet pipe 402 side) has the same diameter, The slope structure is formed on one side (half of the inner circumference). As described above, the detoxification apparatus 400 according to the embodiment of the present invention is provided in the inlet nozzle 40 through which a gas (toxic gas: silane gas, tungsten hexafluoride, dichlorosilane, etc.) contained in the exhaust gas and to be detoxified flows. An inclined portion 43 is provided. Moreover, the inlet nozzle 40 which concerns on embodiment of this invention set the position which provides the inclination part 43, ie, the position which begins to form a slope structure, from the position of the approximate center of the length of the axial direction of the inlet nozzle 40. However, it is not limited to this. For example, the slope portion 43 may start to form a slope structure from the uppermost portion of the inlet nozzle 40, that is, a part of the inner diameter of the flange portion 41, or may be lower than the center position in the axial direction of the inlet nozzle 40. You may make it the structure which begins to form a slope structure from a part (combustor 404 side). In the best embodiment, the ratio of L4: (L5 + L3) is preferably about 6: 4, and the ratio of the diameter of d2: d3 is preferably about 2: 1. Furthermore, in the embodiment of the present invention, the inclined portion 43 is formed on the inner wall of the inlet nozzle 40 by welding. However, the method of forming the inclined portion 43 is not limited to this, and for example, cutting or casting is performed. It may be formed by a method. *
上述した構成により、本発明の実施形態に係るインレットノズル４０が配設された除害装置４００では、インレット配管４０２から導入される排出ガスは、インレットノズル４０を通り抜けるときに、４つの導入孔４０９に配設されたインレットノズル４０の内部に形成されたそれぞれの傾斜部４３によって進行方向が常に一定方向になるように制御される。より詳しくは、インレット配管４０２から導入される排出ガスは、コンバスタ４０４の内部中央を通過するように制御される。　インレットノズル４０に形成された傾斜部４３による上述した制御により、本発明の実施形態に係るインレットノズル４０が配設された除害装置４００は、インレット配管４０２から導入された排出ガスがインレットノズル４０を通過後にコンバスタ４０４で燃焼分解されて発生する粉体が、コンバスタ４０４の内部壁面側へ飛散して内部壁面に付着してしまう前に、クエンチ４０５の上流端まで飛ばすことが可能になる。　このように、粉体がコンバスタ４０４の内部壁面側に飛散する確率を減らすことができるので、コンバスタ４０４の内部壁面に粉体が付着して形成される堆積物の量を低減させることができ、その結果、除害装置４００のメンテナンス周期を長くすることができるという効果を得られる。　 With the configuration described above, in the abatement apparatus 400 in which the inlet nozzle 40 according to the embodiment of the present invention is disposed, the exhaust gas introduced from the inlet pipe 402 passes through the four inlet holes 409 when passing through the inlet nozzle 40. The traveling direction is always controlled to be a constant direction by the respective inclined portions 43 formed inside the inlet nozzle 40 disposed in the nozzle. More specifically, the exhaust gas introduced from the inlet pipe 402 is controlled so as to pass through the center inside the combustor 404. By the above-described control by the inclined portion 43 formed in the inlet nozzle 40, the abatement apparatus 400 provided with the inlet nozzle 40 according to the embodiment of the present invention is configured such that the exhaust gas introduced from the inlet pipe 402 is the inlet nozzle 40. The powder generated by being combusted and decomposed by the combustor 404 after passing through the air is allowed to fly to the upstream end of the quench 405 before scattering to the inner wall surface of the combustor 404 and adhering to the inner wall surface. Thus, since the probability that the powder is scattered on the inner wall surface side of the combustor 404 can be reduced, the amount of deposits formed by the powder adhering to the inner wall surface of the combustor 404 can be reduced, As a result, the effect that the maintenance cycle of the abatement apparatus 400 can be lengthened can be obtained. *
（ｉｉｉ）変形例　本実施形態では、インレットノズル４０の傾斜部４３の下流側に底部４４を設け、更にその一部がワイヤカットにより加工されて半円状となる構成としたが、インレットノズル４０の傾斜部４３の下流側は、この形状に限定される必要はない。　図５は、本発明に係るインレットノズル４０の変形例を説明するための図である。　なお、図１から図４と同じ構成については同じ番号を付して説明を省略する。　図５は、本発明の実施形態の変形例に係るインレットノズル５０が配設されたインレットヘッド４０３を下（即ち、排出ガスが流れた場合の下流側）から見た図である。　本発明の実施形態の変形例に係るインレットノズル５０には、傾斜部４３の下流側に、筐体側部４２と平行な側面を有する底部４４（図４）は設けられていない。その代わり、傾斜部４３の延長上に、当該傾斜部４３の底面と一致する底部５４を有する。　このように、本発明の実施形態に係るインレットノズル４０（５０）の底部４４（５４）は、様々な形状にすることが可能である。　 (Iii) Modification In the present embodiment, the bottom 44 is provided on the downstream side of the inclined portion 43 of the inlet nozzle 40, and a part thereof is processed by wire cutting into a semicircular shape. The downstream side of the inclined portion 43 need not be limited to this shape. FIG. 5 is a view for explaining a modification of the inlet nozzle 40 according to the present invention. In addition, the same number is attached | subjected about the same structure as FIGS. 1-4, and description is abbreviate | omitted. FIG. 5 is a view of an inlet head 403 provided with an inlet nozzle 50 according to a modification of the embodiment of the present invention as viewed from below (that is, the downstream side when exhaust gas flows). The inlet nozzle 50 according to the modification of the embodiment of the present invention is not provided with a bottom portion 44 (FIG. 4) having a side surface parallel to the housing side portion 42 on the downstream side of the inclined portion 43. Instead, on the extension of the inclined portion 43, the bottom portion 54 coincides with the bottom surface of the inclined portion 43. As described above, the bottom 44 (54) of the inlet nozzle 40 (50) according to the embodiment of the present invention can have various shapes. *
本発明の実施形態に係る除害装置４００では、インレットヘッド４０３は、コンバスタ４０４に対して取り外し可能な構成としたが、インレットヘッド４０３とコンバスタ４０４とを一体型に構成してもよい。 In the abatement apparatus 400 according to the embodiment of the present invention, the inlet head 403 is configured to be removable with respect to the combustor 404, but the inlet head 403 and the combustor 404 may be configured integrally.
１　インレットノズル（従来）　　　２　インレットヘッド（従来）　　４０　インレットノズル　　４１　フランジ部　　４２　筐体側部　　４３　傾斜部　　４４　底部　　５０　インレットノズル　　５４　底部　１００　プロセス装置　２００　クリーンルーム　３００　ドライポンプ　４００　除害装置　４０１　インレット三方弁　４０２　インレット配管　４０３　インレットヘッド　４０４　コンバスタ　４０５　クエンチ　４０６　サイクン　４０７　パックドタワー　４０８　スクレイパ　４０９　導入孔　５００　真空配管　６００　排気配管 1 Inlet nozzle (conventional) 2 Inlet head (conventional) 40 Inlet nozzle 41 Flange part 42 Housing side part 43 Inclined part 44 Bottom part 50 Inlet nozzle 54 Bottom part 100 Process equipment 200 Clean room 300 Dry pump 400 Exhaust equipment 401 Inlet three-way valve 402 Piping 403 Inlet head 404 Combustor 405 Quench 406 Cyclone 407 Packed tower 408 Scraper 409 Introduction hole 500 Vacuum piping 600 Exhaust piping

Claims (4)

  1. 除害されるガスを含む排出ガスを除害用チャンバへ案内するインレットノズルであって、　前記インレットノズルの内側壁面の内周が、前記排出ガスを流した場合の上流側から下流側に向けて小さくなる傾斜部を有することを特徴とするインレットノズル。  An inlet nozzle that guides exhaust gas containing gas to be removed to a chamber for abatement, wherein the inner periphery of the inner wall surface of the inlet nozzle is directed from the upstream side to the downstream side when the exhaust gas flows. An inlet nozzle having an inclined portion that becomes smaller.
  2. 前記傾斜部は、前記インレットノズルの軸線方向において、前記下流側の前記内側壁面に形成されることを特徴とする請求項１に記載のインレットノズル。  The inlet nozzle according to claim 1, wherein the inclined portion is formed on the inner wall surface on the downstream side in the axial direction of the inlet nozzle.
  3. 除害用チャンバと、　請求項１又は請求項２に記載のインレットノズルと、　前記インレットノズルを配設するための孔を複数有し、前記除害用チャンバと嵌合されるノズル固定部材と、を備えることを特徴とする除害装置。  A detoxification chamber; an inlet nozzle according to claim 1 or claim 2; a nozzle fixing member having a plurality of holes for disposing the inlet nozzle, and being fitted to the detoxification chamber; An abatement device comprising:
  4. 前記ノズル固定部材は、取り外しが可能であることを特徴とする請求項３に記載の除害装置。 The abatement apparatus according to claim 3, wherein the nozzle fixing member is removable.
PCT/JP2013/082795 2013-01-11 2013-12-06 Inlet nozzle and detoxification device WO2014109152A1 (en)

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