WO2011147787A2 - Inertial rotation sensor having a simple structure - Google Patents
Inertial rotation sensor having a simple structure Download PDFInfo
- Publication number
- WO2011147787A2 WO2011147787A2 PCT/EP2011/058385 EP2011058385W WO2011147787A2 WO 2011147787 A2 WO2011147787 A2 WO 2011147787A2 EP 2011058385 W EP2011058385 W EP 2011058385W WO 2011147787 A2 WO2011147787 A2 WO 2011147787A2
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- Prior art keywords
- base
- sensor
- resonator
- metal
- electrode
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
Definitions
- the present invention relates to an inertial ro ⁇ tation sensor used for example as a gyroscope or as a gyro.
- the invention relates more particularly ⁇ a hemispherical resonator sensor or HRM.
- Such a sensor comprises a base on which is mounted via piles an electrode-holder plate which is integral with a vibrating hemispherical resonator.
- the vibrating hemispherical resonator has a foot cen tral ⁇ fixed on the electrode holder plate and an edge annu lar ⁇ free extending opposite electrodes of the pla ⁇ electrode holder.
- the resonator is made of silica and is partially covered with a metal layer facing the electrodes of the electrode-holder plate to define therewith transducers distributed in a control channel and a detection channel which are re ⁇ related to a processing circuit.
- the processing circuit ⁇ ment extends from one side of the opposite base to the resonator and is contained, as the resonator and the dead-electrode plate, in a vacuum containment enclosure attached to the base.
- Such sensors have good performan ⁇ those making them suitable for most applications and especially to their location in central inert tial embedded navigation in vehicles such as aircraft.
- their cost is high, which limits their use to vehicles whose cost justifies such an investment.
- sensors rota ⁇ comprising a base on which is mounted a re ⁇ sonateur comprising vibrating columns arranged in square and parallel to each other.
- a transducer is associated with each column and connected to a processing circuit.
- Such sensors exhibit more modest performance but are much cheaper than heading ⁇ HRM type tors. Their performances, however, are in ⁇ adequate for steering applications of Por- tor or short navigation
- An object of the invention is to provide a sensor having performance and cost adapted to such ap ⁇ applications.
- an inertial rotation sensor comprising a base on which is mounted a vibrating hemispherical resonator associated with transducers defining at least two control channels and two detection channels which are re ⁇ related to at least one processing circuit, the sensor comprising a vacuum containment enclosure mounted on the base to surround the resonator.
- the resonator comprises a cap and a foot are made my ⁇ metal piece niere.
- the transducers comprise electrodes which are arranged opposite a flat annular edge of the cap and which extend substantially in a plane parallel to the annular edge.
- a metal piece resonator is easy to usi ⁇ ner and does not need to be covered with a conductive layer. The absence of assembly between the foot and the cap also makes it possible to obtain a stiffness and an elimination of the games between these in the zone of their connection.
- a metal resonator is further partially immunized against the tank migration problems ⁇ ges surface encountered in the silica resonators and which disturb the distribution of electric field ⁇ stick.
- a metal resonator is also little subject to the problems of electrical damping (joule losses resulting from the circulation of electric currents caused by the combined action of the vibration and the bias voltage). This partially compensates the greater mechanical damping of the metal resonator and allows the sensor to have suf ⁇ izing performance in the targeted applications.
- the realization of planar electrodes and the connection thereof to the processing circuit are relatively simple.
- the processing circuit is mounted outside the enclosure on a face of the base op ⁇ posed to the enclosure.
- the absence of vacuum containment of the processing circuit makes it possible to simplify the sensor structure without compromising the expected ⁇ per formance thereof.
- the resonator is secured to an electrode plate fixed to the base by means of piles and, advantageously, the electrode-holder plate is made of ceramic, preferably ceramic multilayer. -cuite.
- This embodiment is relatively simple.
- the RESONA ⁇ tor has a central foot attached directly to the base which is provided with at least one electrode cha ⁇ transducer and, preferably, the base is in ⁇ ceramics, preferably multilayer ceramic co-fired.
- This embodiment is even simpler than the first.
- the metal has a coefficient of linear dila ⁇ tion between 4 ppm / ° C and 10ppm / ° C envi ⁇ ron.
- the metal comes from the group com ⁇ taking:
- Figure 1 is a perspective view with cutaway of a sensor according to a first embodiment of Réali ⁇ tion of the invention
- FIG. 2 is a diagrammatic sectional view along the plane II of FIG. 1,
- FIG. 3 is a view similar to FIG. 1 of a sensor according to a second embodiment of the invention.
- FIG. 4 is a diagrammatic sectional view along plane IV of FIG.
- the senor according to the invention comprises a base 1 on which is fixed via piles 2 a welding plate 3.
- the base 1 and the electrode carrier plate 3 are fabri cated in ⁇ multilayer ceramic co-fired type HTCC.
- the sensor further comprises a resonator generally designated 4 including a cap 5 hampsphé ⁇ America having a 5.1 pole from which extends axially a foot ment 6 having a free end attached to the pla ⁇ electrode holder 3.
- the cap 5 has an edge ⁇ free nulaire 5.2, planar shape, extending opposite the electrode carrier plate 3 and parallel thereto.
- the foot 6 and the cap 5 are made of material and made here by machining a metal block to obtain a monoblock structure of the resonator.
- the resonator is thus made of metal and, more specifically, of a metal having a coefficient of linear expansion of between 4 ppm / ° C. and approximately 10 ppm / ° C.
- the metal used here is titanium.
- the electrode carrier plate 3 carries electrodes which are arranged facing the free annular edge 5.2 of the cap 5 and extend substantially in a plane parallel to the free annular edge 5.2.
- the foot 6 and the electrodes of the electrode carrier plate 3 are connected to a processing circuit 7 so that a free annular edge 5.2 of the shell 5 and the electrodes form emperatpraducers ⁇ c defining two control channels and two channels detector, each transducer selectively acting as actuator and detector.
- the milking circuit ⁇ 7 is fixed on the base 1 on a face of this der ⁇ niere opposite to the electrode carrier plate 3 and the reso nator ⁇ 4.
- the components of the processing circuit are connected by ultrasonic welding in a welding process known in itself type "lease bonding" or "wedge bonding".
- An enclosure 8 of vacuum containment is fixed on the base 1 on one side thereof opposite the processing circuit 7 so as to surround the resonator 7 and the electrode holder plate 3.
- vacuum one means a controlled atmosphere comprising at least party ⁇ cules can antagonize the functioning of TRANSDUC ⁇ electrostatic tors.
- the sensor com ⁇ takes, as previously, a base 1, a resonator 4, a processing circuit 7 and an enclosure 8.
- the electrodes are arranged directly on the base 1 which plays the role of electrode plate.
- the foot 6 of the resonator 4 is directly fixed to the base 1.
- the base and / or the electrode plate may be made of materials different from those mentioned.
- the base and / or the electrode holder plate may for example be made of metal, the elec ⁇ trodes and the connecting conductors must then be electrically isolated from the base and the electrode holder plate.
- the metal of the resonator may be different from ti ⁇ tane and may be a metal or a metal alloy appar ⁇ relating in particular to the fourth period in the periodic table, for example:
- the electrode plate or the base may comprise one or more guard electrodes.
- the treatment circuit could be received in a containment chamber or, advantageously, embedded in a resin to avoid in particular the presence of liquid water on the treatment circuit.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention relates to an inertial rotation sensor including a base (1) on which a hemispherical vibrating resonator (4) is mounted, said hemispherical vibrating resonator being combined with transducers defining at least two control paths and two detection paths connected to at least one processing circuit (7), wherein the sensor includes a containment housing (8) under vacuum mounted on the base so as to surround the resonator. The resonator is made of metal and the processing circuit is mounted outside the housing on the surface of the base opposite said housing.
Description
Capteur de rotation inertiel à structure simple Inertial rotation sensor with simple structure
La présente invention concerne un capteur de ro¬ tation inertiel utilisable par exemple comme gyroscope ou comme gyromètre. L'invention concerne plus particulière¬ ment un capteur à résonateur hémisphérique ou GRH. The present invention relates to an inertial ro ¬ tation sensor used for example as a gyroscope or as a gyro. The invention relates more particularly ¬ a hemispherical resonator sensor or HRM.
Un tel capteur comprend une embase sur laquelle est montée via des pilotis une plaque porte-électrodes dont est solidaire un résonateur hémisphérique vibrant. Le résonateur hémisphérique vibrant possède un pied cen¬ tral fixé sur la plaque porte-électrodes et un bord annu¬ laire libre s' étendant en regard d'électrodes de la pla¬ que porte-électrodes. Le résonateur est réalisé en silice et est partiellement recouvert d'une couche métallique en regard des électrodes de la plaque porte-électrodes pour définir avec celles-ci des transducteurs répartis en une voie de commande et une voie de détection qui sont re¬ liées à un circuit de traitement. Le circuit de traite¬ ment s'étend d'un côté de l'embase opposé au résonateur et est contenu, comme le résonateur et la plaque morte- électrodes, dans une enceinte de confinement sous vide fixée à l'embase. Such a sensor comprises a base on which is mounted via piles an electrode-holder plate which is integral with a vibrating hemispherical resonator. The vibrating hemispherical resonator has a foot cen tral ¬ fixed on the electrode holder plate and an edge annu lar ¬ free extending opposite electrodes of the pla ¬ electrode holder. The resonator is made of silica and is partially covered with a metal layer facing the electrodes of the electrode-holder plate to define therewith transducers distributed in a control channel and a detection channel which are re ¬ related to a processing circuit. The processing circuit ¬ ment extends from one side of the opposite base to the resonator and is contained, as the resonator and the dead-electrode plate, in a vacuum containment enclosure attached to the base.
De tels capteurs présentent de bonnes performan¬ ces les rendant adaptés à la plupart des applications et notamment à leur implantation dans des centrales iner- tielles de navigation embarquées à bord des véhicules comme des aéronefs. En revanche, leur coût est élevé, ce qui limite leur utilisation aux véhicules dont le coût justifie un tel investissement. Such sensors have good performan ¬ those making them suitable for most applications and especially to their location in central inert tial embedded navigation in vehicles such as aircraft. On the other hand, their cost is high, which limits their use to vehicles whose cost justifies such an investment.
II est par ailleurs connu des capteurs de rota¬ tion comportant une embase sur laquelle est monté un ré¬ sonateur comportant des colonnes vibrantes disposées en carré et parallèles les unes aux autres. Un transducteur est associé à chaque colonne et relié à un circuit de traitement.
De tels capteurs présentent des performances plus modestes mais sont nettement moins coûteux que les cap¬ teurs de type GRH. Leurs performances sont toutefois in¬ suffisantes pour des applications de pilotage d'un por- teur ou de navigation de courte durée It is also known sensors rota ¬ comprising a base on which is mounted a re ¬ sonateur comprising vibrating columns arranged in square and parallel to each other. A transducer is associated with each column and connected to a processing circuit. Such sensors exhibit more modest performance but are much cheaper than heading ¬ HRM type tors. Their performances, however, are in ¬ adequate for steering applications of Por- tor or short navigation
Un but de l'invention est de fournir un capteur ayant des performances et un coût adaptés à de telles ap¬ plications . An object of the invention is to provide a sensor having performance and cost adapted to such ap ¬ applications.
A cet effet, on prévoit, selon l'invention, un capteur de rotation inertiel comprenant une embase sur laquelle est monté un résonateur hémisphérique vibrant associé à des transducteurs définissant au moins deux voies de commande et deux voies de détection qui sont re¬ liées à au moins un circuit de traitement, le capteur comprenant une enceinte de confinement sous vide montée sur l'embase pour entourer le résonateur. Le résonateur comprend une calotte et un pied qui sont réalisés de ma¬ nière monobloc en métal. Les transducteurs comportent des électrodes qui sont disposées en regard d'un bord annu- laire plan de la calotte et qui s'étendent sensiblement dans un plan parallèle au bord annulaire. For this purpose, according to the invention, an inertial rotation sensor is provided comprising a base on which is mounted a vibrating hemispherical resonator associated with transducers defining at least two control channels and two detection channels which are re ¬ related to at least one processing circuit, the sensor comprising a vacuum containment enclosure mounted on the base to surround the resonator. The resonator comprises a cap and a foot are made my ¬ metal piece niere. The transducers comprise electrodes which are arranged opposite a flat annular edge of the cap and which extend substantially in a plane parallel to the annular edge.
Un résonateur monobloc en métal est facile à usi¬ ner et n'a pas besoin d'être recouvert d'une couche conductrice. L'absence d'assemblage entre le pied et la calotte permet également d'obtenir une raideur et une élimination des jeux entre ceux-ci dans la zone de leur liaison. Un résonateur en métal est en outre partiellement immunisé contre les problèmes de migration de char¬ ges en surface qu'on rencontre dans les résonateurs en silice et qui perturbent la distribution du champ élec¬ trique. Un résonateur en métal est de plus peu sujet aux problèmes d'amortissement électrique (pertes par effet joule résultant de la circulation de courants électriques provoqués par l'action combinée de la vibration et de la tension de polarisation) . Ceci compense en partie
l'amortissement mécanique plus important du résonateur en métal et permet au capteur d' avoir des performances suf¬ fisantes dans les applications visées. La réalisation d'électrodes planes et le raccordement de celles-ci au circuit de traitement sont relativement simples. A metal piece resonator is easy to usi ¬ ner and does not need to be covered with a conductive layer. The absence of assembly between the foot and the cap also makes it possible to obtain a stiffness and an elimination of the games between these in the zone of their connection. A metal resonator is further partially immunized against the tank migration problems ¬ ges surface encountered in the silica resonators and which disturb the distribution of electric field ¬ stick. A metal resonator is also little subject to the problems of electrical damping (joule losses resulting from the circulation of electric currents caused by the combined action of the vibration and the bias voltage). This partially compensates the greater mechanical damping of the metal resonator and allows the sensor to have suf ¬ izing performance in the targeted applications. The realization of planar electrodes and the connection thereof to the processing circuit are relatively simple.
De préférence, le circuit de traitement est monté à l'extérieur de l'enceinte sur une face de l'embase op¬ posée à l'enceinte. L'absence d'enceinte de confinement sous vide sur le circuit de traitement permet de simpli- fier la structure du capteur sans compromettre les per¬ formances attendues de celui-ci. Preferably, the processing circuit is mounted outside the enclosure on a face of the base op ¬ posed to the enclosure. The absence of vacuum containment of the processing circuit makes it possible to simplify the sensor structure without compromising the expected ¬ per formance thereof.
Selon un premier mode de réalisation, le résonateur est solidaire d'une plaque porte-électrodes fixée sur l'embase par l'intermédiaire de pilotis et, avanta- geusement, la plaque porte-électrodes est en céramique, de préférence en céramique multicouche co-cuite. According to a first embodiment, the resonator is secured to an electrode plate fixed to the base by means of piles and, advantageously, the electrode-holder plate is made of ceramic, preferably ceramic multilayer. -cuite.
Ce mode de réalisation est relativement simple. This embodiment is relatively simple.
Selon un deuxième mode de réalisation, le résona¬ teur possède un pied central fixé directement sur l'embase qui est pourvue d'au moins une électrode de cha¬ que transducteur et, avantageusement, l'embase est en cé¬ ramique, de préférence en céramique multicouche co-cuite. According to a second embodiment, the RESONA ¬ tor has a central foot attached directly to the base which is provided with at least one electrode cha ¬ transducer and, preferably, the base is in ¬ ceramics, preferably multilayer ceramic co-fired.
Ce mode de réalisation est encore plus simple que le premier. This embodiment is even simpler than the first.
De préférence, le métal a un coefficient de dila¬ tation linéaire compris entre 4 ppm/°C et 10 ppm/°C envi¬ ron . Preferably, the metal has a coefficient of linear dila ¬ tion between 4 ppm / ° C and 10ppm / ° C envi ¬ ron.
Ceci permet l'obtention de relativement bonnes performances eu égard à la structure du capteur. This makes it possible to obtain relatively good performance with regard to the structure of the sensor.
Avantageusement, le métal est issu du groupe com¬ prenant : Advantageously, the metal comes from the group com ¬ taking:
- le titane, - titanium,
- un alliage de titane, an alloy of titanium,
- un alliage de fer et de nickel, an alloy of iron and nickel,
- un alliage de fer, de nickel et de cobalt.
D'autres caractéristiques et avantages de l'invention ressortiront à la lecture de la description qui suit de modes de réalisation particuliers non limita¬ tifs de l'invention. an alloy of iron, nickel and cobalt. Other features and advantages of the invention will become apparent from reading the following description of non-confined particular embodiments of the invention ¬ tive.
II sera fait référence aux dessins annexés, parmi lesquels : Reference will be made to the appended drawings, among which:
la figure 1 est une vue en perspective avec écorché d'un capteur conforme à un premier mode de réali¬ sation de l'invention, Figure 1 is a perspective view with cutaway of a sensor according to a first embodiment of Réali ¬ tion of the invention,
- la figure 2 est vue schématique en coupe selon le plan II de la figure 1, FIG. 2 is a diagrammatic sectional view along the plane II of FIG. 1,
- la figure 3 est une vue analogue à la figure 1 d'un capteur conforme à un deuxième mode de réalisation de l'invention, FIG. 3 is a view similar to FIG. 1 of a sensor according to a second embodiment of the invention,
- la figure 4 est une vue schématique en coupe selon le plan IV de la figure 3. FIG. 4 is a diagrammatic sectional view along plane IV of FIG.
En référence aux figures 1 et 2, le capteur conforme à l'invention comprend une embase 1 sur laquelle est fixée via des pilotis 2 une plaque porte-électrodes 3. L'embase 1 et la plaque porte-électrodes 3 sont fabri¬ quées en céramique multicouche co-cuite de type HTCC. Referring to Figures 1 and 2, the sensor according to the invention comprises a base 1 on which is fixed via piles 2 a welding plate 3. The base 1 and the electrode carrier plate 3 are fabri cated in ¬ multilayer ceramic co-fired type HTCC.
Le capteur comprend en outre un résonateur généralement désigné en 4 comportant une calotte 5 hémisphé¬ rique ayant un pôle 5.1 à partir duquel s'étend axiale- ment un pied 6 ayant une extrémité libre fixée à la pla¬ que porte-électrodes 3. La calotte 5 possède un bord an¬ nulaire libre 5.2, de forme plane, s' étendant en regard de la plaque porte-électrodes 3 et parallèlement à celle- ci. Le pied 6 et la calotte 5 sont issus de matière et réalisé ici par usinage d'un bloc de métal pour obtenir une structure monobloc du résonateur. Le résonateur est ainsi réalisé en métal et, plus précisément, en un métal ayant un coefficient de dilatation linéaire compris entre 4 ppm/°C et 10 ppm/°C environ. Le métal utilisé est ici le titane.
La plaque porte-électrodes 3 porte des électrodes qui sont disposées en regard du bord annulaire libre 5.2 de la calotte 5 et s'étendent sensiblement dans un plan parallèle au bord annulaire libre 5.2. The sensor further comprises a resonator generally designated 4 including a cap 5 hémisphé ¬ America having a 5.1 pole from which extends axially a foot ment 6 having a free end attached to the pla ¬ electrode holder 3. The cap 5 has an edge ¬ free nulaire 5.2, planar shape, extending opposite the electrode carrier plate 3 and parallel thereto. The foot 6 and the cap 5 are made of material and made here by machining a metal block to obtain a monoblock structure of the resonator. The resonator is thus made of metal and, more specifically, of a metal having a coefficient of linear expansion of between 4 ppm / ° C. and approximately 10 ppm / ° C. The metal used here is titanium. The electrode carrier plate 3 carries electrodes which are arranged facing the free annular edge 5.2 of the cap 5 and extend substantially in a plane parallel to the free annular edge 5.2.
Le pied 6 et les électrodes de la plaque porte- électrodes 3 sont reliés à un circuit de traitement 7 de manière que le bord annulaire libre 5.2 de la calotte 5 et les électrodes forment des transducteurs électrostati¬ ques définissant deux voies de commande et deux voies de détection, chaque transducteur jouant sélectivement le rôle d' actionneur et de détecteur. Le circuit de traite¬ ment 7 est fixé sur l'embase 1 sur une face de cette der¬ nière opposée à la plaque porte-électrodes 3 et au réso¬ nateur 4. Les composants du circuit de traitement sont connectés par soudure ultrasonique selon un procédé de soudage connu en lui-même de type « bail bonding » ou « wedge bonding ». The foot 6 and the electrodes of the electrode carrier plate 3 are connected to a processing circuit 7 so that a free annular edge 5.2 of the shell 5 and the electrodes form électrostati transducers ¬ c defining two control channels and two channels detector, each transducer selectively acting as actuator and detector. The milking circuit ¬ 7 is fixed on the base 1 on a face of this der ¬ niere opposite to the electrode carrier plate 3 and the reso nator ¬ 4. The components of the processing circuit are connected by ultrasonic welding in a welding process known in itself type "lease bonding" or "wedge bonding".
Une enceinte 8 de confinement sous vide est fixé sur l'embase 1 d'un côté de celle-ci opposé au circuit de traitement 7 de manière à entourer le résonateur 7 et la plaque porte-électrodes 3. Par « sous vide », on entend une atmosphère contrôlée comportant un minimum de parti¬ cules pouvant contrarier le fonctionnement des transduc¬ teurs électrostatiques. An enclosure 8 of vacuum containment is fixed on the base 1 on one side thereof opposite the processing circuit 7 so as to surround the resonator 7 and the electrode holder plate 3. By "vacuum", one means a controlled atmosphere comprising at least party ¬ cules can antagonize the functioning of TRANSDUC ¬ electrostatic tors.
Le fonctionnement du capteur est classique et ne sera pas décrit ici. The operation of the sensor is conventional and will not be described here.
Les éléments identiques ou analogues à ceux dé¬ crits précédemment porteront la même référence numérique dans la description qui suit du deuxième mode de réalisa- tion. Identical or similar elements to those previously ¬ writings bear the same reference numeral in the following description of the second achievements tion mode.
En référence aux figures3 et 4, le capteur com¬ prend comme précédemment une embase 1, un résonateur 4, un circuit de traitement 7 et une enceinte 8. With reference to FIGS. 3 and 4, the sensor com ¬ takes, as previously, a base 1, a resonator 4, a processing circuit 7 and an enclosure 8.
Toutefois, dans ce mode de réalisation, les élec- trodes sont disposées directement sur l'embase 1 qui joue
le rôle de plaque porte-électrodes. However, in this embodiment, the electrodes are arranged directly on the base 1 which plays the role of electrode plate.
Le pied 6 du résonateur 4 est directement fixé à 1 ' embase 1. The foot 6 of the resonator 4 is directly fixed to the base 1.
Bien entendu, l'invention n'est pas limitée aux modes de réalisation décrits mais englobe toute variante entrant dans le champ de l'invention telle que définie par les revendications. Of course, the invention is not limited to the embodiments described but encompasses any variant within the scope of the invention as defined by the claims.
En particulier, l'embase et/ou la plaque porte- électrodes peuvent être réalisées en des matériaux diffé- rents de ceux mentionnés. L'embase et/ou la plaque porte- électrodes peuvent par exemple être en métal, les élec¬ trodes et les conducteurs de liaison devant alors être électriquement isolés de l'embase et de la plaque porte- électrodes . In particular, the base and / or the electrode plate may be made of materials different from those mentioned. The base and / or the electrode holder plate may for example be made of metal, the elec ¬ trodes and the connecting conductors must then be electrically isolated from the base and the electrode holder plate.
Le métal du résonateur peut être différent du ti¬ tane et peut être un métal ou un alliage de métaux appar¬ tenant notamment à la quatrième période du tableau de Mendeleiev, par exemple : The metal of the resonator may be different from ti ¬ tane and may be a metal or a metal alloy appar ¬ relating in particular to the fourth period in the periodic table, for example:
- un alliage de titane, an alloy of titanium,
- un alliage de fer et de nickel, an alloy of iron and nickel,
- un alliage de fer, de nickel et de cobalt du type de celui dénommé KOVAR. an iron, nickel and cobalt alloy of the type known as KOVAR.
La plaque porte-électrodes ou l'embase peuvent comporter une ou plusieurs électrodes de garde. The electrode plate or the base may comprise one or more guard electrodes.
Le circuit de traitement pourrait être reçu dans une enceinte de confinement ou, avantageusement, enrobé dans une résine pour éviter notamment la présence d'eau liquide sur le circuit de traitement.
The treatment circuit could be received in a containment chamber or, advantageously, embedded in a resin to avoid in particular the presence of liquid water on the treatment circuit.
Claims
1. Capteur de rotation inertiel comprenant une embase (1) sur laquelle est monté un résonateur (4) hé- misphérique vibrant associé à des transducteurs définissant au moins deux voies de commande et deux voies de détection qui sont reliées à au moins un circuit de traitement (7) , le capteur comprenant une enceinte (8) de confinement sous vide montée sur l'embase pour entourer le résonateur, caractérisé en ce que le résonateur comprend une calotte (5) et un pied (6) qui sont réalisés de manière monobloc en métal, en ce que les transducteurs comportent des électrodes qui sont disposées en regard d'un bord annulaire plan (5.2) de la calotte et qui s'étendent sensiblement dans un plan parallèle au bord annulaire . 1. Inertial rotation sensor comprising a base (1) on which is mounted a vibrating hemispherical resonator (4) associated with transducers defining at least two control channels and two detection channels which are connected to at least one control circuit. treatment (7), the sensor comprising a vacuum containment enclosure (8) mounted on the base to surround the resonator, characterized in that the resonator comprises a cap (5) and a foot (6) which are made in a manner monobloc metal, in that the transducers comprise electrodes which are arranged opposite a flat annular edge (5.2) of the cap and which extend substantially in a plane parallel to the annular edge.
2. Capteur selon la revendication 1, dans lequel le circuit de traitement est monté à l'extérieur de l'enceinte sur une face de l'embase opposée à l'enceinte. 2. Sensor according to claim 1, wherein the processing circuit is mounted outside the enclosure on a face of the base opposite the enclosure.
3. Capteur selon la revendication 1, dans lequel le résonateur (4) est solidaire d'une plaque porte- électrodes (3) fixée sur l'embase par l'intermédiaire de pilotis (2) . 3. Sensor according to claim 1, wherein the resonator (4) is integral with an electrode plate (3) fixed on the base by means of piles (2).
4. Capteur selon la revendication 1, dans lequel la plaque porte-électrodes (3) est en céramique, de préférence en céramique multicouche co- cuite. 4. Sensor according to claim 1, wherein the electrode holder plate (3) is ceramic, preferably multilayered ceramic cookie.
5. Capteur selon la revendication 1, dans lequel le résonateur (4) possède un pied central (6) fixé directement sur l'embase (1) qui est pourvue d'au moins une électrode de chaque transducteur. 5. The sensor of claim 1, wherein the resonator (4) has a central foot (6) fixed directly on the base (1) which is provided with at least one electrode of each transducer.
6. Capteur selon la revendication 1, dans lequel l'embase (1) est en céramique, de préférence en céramique multicouche co-cuite. 6. Sensor according to claim 1, wherein the base (1) is ceramic, preferably multilayer ceramic co-fired.
7. Capteur selon la revendication 1, dans lequel le métal a un coefficient de dilatation linéaire compris entre 4 ppm/°C et 10 ppra/°C environ. The sensor of claim 1, wherein the metal has a linear coefficient of expansion inclusive between 4 ppm / ° C and 10 ppra / ° C approximately.
8. Capteur selon la revendication 1, dans lequel le métal est issu du groupe comprenant : The sensor of claim 1, wherein the metal is from the group consisting of:
- le titane, - titanium,
- un alliage de titane, an alloy of titanium,
- un alliage de fer et de nickel, an alloy of iron and nickel,
- un alliage de fer, de nickel et de cobalt. an alloy of iron, nickel and cobalt.
9. Capteur selon la revendication 1, dans lequel le circuit électronique (7) a des composants connectés par soudure ultrasonique de type « bail bonding » ou « wedge bonding » . 9. The sensor of claim 1, wherein the electronic circuit (7) has components connected by ultrasonic welding type "lease bonding" or "wedge bonding".
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1002235 | 2010-05-26 | ||
| FR1002235A FR2960635B1 (en) | 2010-05-26 | 2010-05-26 | INERTIAL ROTATION SENSOR WITH SINGLE STRUCTURE |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2011147787A2 true WO2011147787A2 (en) | 2011-12-01 |
| WO2011147787A3 WO2011147787A3 (en) | 2012-06-14 |
Family
ID=43806810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2011/058385 WO2011147787A2 (en) | 2010-05-26 | 2011-05-23 | Inertial rotation sensor having a simple structure |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2960635B1 (en) |
| WO (1) | WO2011147787A2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017101813A1 (en) * | 2015-12-18 | 2017-06-22 | 东南大学 | Micro three-dimensional shell resonant gyroscope |
| CN110440813A (en) * | 2019-08-14 | 2019-11-12 | 深圳市琦美创科技有限公司 | A kind of shock-absorbing type onboard navigation system with dedusting function |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2851041B1 (en) * | 2003-02-06 | 2005-03-18 | Sagem | METHOD FOR IMPLEMENTING A RESONATOR UNDER THE EFFECT OF ELECTROSTATIC FORCES |
| FR2936049B1 (en) * | 2008-09-16 | 2010-09-17 | Sagem Defense Securite | PARTIALLY METALLIZING RESONATOR FOR ANGULAR PARAMETER DETECTOR. |
-
2010
- 2010-05-26 FR FR1002235A patent/FR2960635B1/en active Active
-
2011
- 2011-05-23 WO PCT/EP2011/058385 patent/WO2011147787A2/en active Application Filing
Non-Patent Citations (1)
| Title |
|---|
| None |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017101813A1 (en) * | 2015-12-18 | 2017-06-22 | 东南大学 | Micro three-dimensional shell resonant gyroscope |
| US10527422B2 (en) | 2015-12-18 | 2020-01-07 | Southeast University | Micro three-dimensional shell resonator gyroscope |
| CN110440813A (en) * | 2019-08-14 | 2019-11-12 | 深圳市琦美创科技有限公司 | A kind of shock-absorbing type onboard navigation system with dedusting function |
| CN110440813B (en) * | 2019-08-14 | 2021-06-18 | 苏州芯智谷智能科技有限公司 | Shock attenuation type vehicle navigation with dust removal function |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2960635A1 (en) | 2011-12-02 |
| FR2960635B1 (en) | 2012-05-18 |
| WO2011147787A3 (en) | 2012-06-14 |
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