WO2010095215A1 - Work transfer apparatus and vacuum bonding method - Google Patents

Work transfer apparatus and vacuum bonding method Download PDF

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Publication number
WO2010095215A1
WO2010095215A1 PCT/JP2009/052701 JP2009052701W WO2010095215A1 WO 2010095215 A1 WO2010095215 A1 WO 2010095215A1 JP 2009052701 W JP2009052701 W JP 2009052701W WO 2010095215 A1 WO2010095215 A1 WO 2010095215A1
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WO
WIPO (PCT)
Prior art keywords
work
flexible sheet
plate
works
vacuum
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Application number
PCT/JP2009/052701
Other languages
French (fr)
Japanese (ja)
Inventor
道也 横田
豊 今川
Original Assignee
信越エンジニアリング株式会社
新光エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 信越エンジニアリング株式会社, 新光エンジニアリング株式会社 filed Critical 信越エンジニアリング株式会社
Priority to JP2009519079A priority Critical patent/JP4417432B1/en
Priority to PCT/JP2009/052701 priority patent/WO2010095215A1/en
Publication of WO2010095215A1 publication Critical patent/WO2010095215A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to, for example, glass substrates used for flat panel displays (FPD) such as liquid crystal displays (LCDs), organic EL displays (OLEDs), plasma displays (PDPs), flexible displays, etc., or polarized light adhered to the surfaces thereof.
  • FPD flat panel displays
  • LCDs liquid crystal displays
  • OLEDs organic EL displays
  • PDPs plasma displays
  • a flexible thin plate is stretched and fixed so as to close the opening of a pair of upper and lower surface plates, and a sealed space is formed between these thin plates.
  • the pair of flexible thin plates sandwiching the pair of glass substrates which has been previously aligned and temporarily fixed, is held by the pair of flexible thin plates so that the glass substrates are held in the sealed space, and the reduced pressure in the sealed space Atmospheric pressure acts to pressurize the glass substrate, and heat is generated by energization of a heating element provided on the flexible thin plate to heat, pressurize and cure the sealing material interposed between the glass substrates.
  • Patent Document 1 There is one (see, for example, Patent Document 1).
  • a glass substrate carried by two glass substrates is carried toward the substrate holding surface of the surface plate by the substrate transfer robot, and a plurality of lift pins are provided so as to move up and down through the surface plate.
  • a plurality of lift pins are provided so as to move up and down through the surface plate.
  • An object of the present invention is to easily transfer a plate-like work with a work conveying means only by partial bending of a flexible sheet.
  • the present invention provides a flexible sheet provided on a work holding table, a pressing means for partially pressing a part of the flexible sheet against a plate-like work, and the pressing means.
  • a control unit for controlling the operation of the unit, the control unit pressing the flexible sheet by the pressing unit to partially bend the flexible sheet, and the partial curved portion is conveyed by the work conveying unit; It is characterized in that it reaches the work.
  • the tip of the pressing means is formed to be curved so as to protrude toward the flexible sheet.
  • a backing plate is partially fixed to a portion of the flexible sheet facing the pressing means.
  • an air vent is pierced through the flexible sheet and the backing plate.
  • the work transfer device described above is disposed in a vacuum chamber, and the two plate-like works are transferred by the work transfer means into the vacuum chamber, and two spaces are formed by sandwiching the flexible sheet. According to the present invention, after the plate-like workpieces are bonded in a vacuum state due to the pressure difference, the plate-like workpieces bonded together are transported to the outside of the vacuum chamber by the workpiece transport means.
  • a pressing means for partially pressing a portion of a flexible sheet provided on a work holding table toward a plate-like work, and a flexible sheet being pressed by the pressing means
  • the partially curved portion of the flexible sheet abuts, is supported, and can be received, and when carrying out the work, both plate-like works bonded together are pushed by the partially curved portion to the work unloading start position of the work conveying means Can be delivered.
  • the delivery of the plate-like work with the work conveying means can be easily performed only by the partial bending of the flexible sheet.
  • the plate-like work can be carried in and out reliably with respect to the flexible sheet, and the plate-like work is assuredly performed.
  • the manufacturing cost can also be reduced because a complicated mechanism for clamping is not required.
  • the distal end of the pressing means when the distal end of the pressing means is curved to protrude toward the flexible sheet, when the curved distal end of the pressing means abuts on the flexible sheet, the curve of the distal end Curve along the surface. Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.
  • the tip of the pressing means abuts the flexible sheet via the backing plate, and the flexible sheet Makes an euphemism. Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.
  • the vent opened in the flexible sheet is not expanded with the elastic deformation of the flexible sheet.
  • only the plate-like work in contact with the plate-like work or the two plate-like works bonded to each other through the air holes are adsorbed and held immovably against the flexible sheet 2. Therefore, positional deviation of the plate-like work relative to the flexible sheet can be prevented.
  • a work transfer device is disposed in a vacuum chamber, and the two plate-like works are transferred by the work transfer means into the vacuum chamber, and two spaces formed by sandwiching the flexible sheet.
  • the work transfer means When the both plate-like works bonded together are transported to the outside of the vacuum chamber by the work transfer means after bonding the plate-like works together in a vacuum state due to the pressure difference, the work is carried out when the work is carried in
  • the partial curved portion of the flexible sheet abuts on and is supported and can be received by one of the two plate-like workpieces carried in by the conveying means, and the two plate-like workpieces bonded together when carrying out the workpiece are
  • the partial folding portion can be pushed and delivered to the workpiece unloading start position by the workpiece transport means and can be delivered.
  • the delivery of the plate-like work with the work conveying means can be easily performed only by the partial bending of the flexible sheet.
  • the plate-like work can be carried in and out reliably with respect to the flexible sheet, and the plate-like work is assuredly performed.
  • the manufacturing cost can also be reduced because a complicated mechanism for clamping is not required.
  • FIG. 2 is a cross-sectional plan view taken along line (2)-(2) of FIG. 1 (b). It is a partial expansion longitudinal cross-sectional front view which shows an example of a press means. It is a vertical front view which shows the time of thermocompression bonding. It is a vertical front view showing the vacuum chamber before opening. It is a vertical front view which shows the vacuum chamber after opening. It is a longitudinal front view which shows the time of workpiece removal.
  • the embodiment of the work transfer apparatus comprises a flexible sheet provided on a work holding table, a pressing means for partially pressing a part of the flexible sheet against a plate-like work, and the pressing means. And a control unit for controlling the operation, the control unit pressing the flexible sheet by the pressing unit to partially bend the flexible sheet, and the plate-like workpiece having the partially curved section conveyed by the work conveying unit To reach the
  • the embodiment of the vacuum bonding method using this work transfer apparatus is, as shown in FIGS. 1 to 9, a smooth member 1 and a flexible sheet 2 whose opposing surfaces are smooth and arranged in parallel, and these smooth members 1 And a work conveying means 3 for conveying two plate-like works A and B between the flexible sheets 2, and the work conveyance means 3 carries the sheet between the smooth member 1 and the flexible sheet 2 from the outside.
  • the two plate-like works A and B are pressed together in a vacuum state by the pressure difference between the two first spaces S1 and second spaces S2 formed with the flexible sheet 2 interposed therebetween, and
  • the two plate-like works A and B bonded together are carried out by the work conveying means 3 from between the smooth member 1 and the flexible sheet 2 to the outside.
  • the second space S2 formed behind the flexible sheet 2 is provided with pressing means 4 for partially pressing the part of the flexible sheet 2 toward the plate-like works A and B.
  • the flexible sheet 2 is partially bent toward the plate-like works A and B by controlling operation of the pressing means 4 by the control unit 6 described later, and the partial bent portion 2 b is conveyed by the work conveying means 3.
  • both the plate-like works A and B bonded together are pushed to the work unloading start position by the work conveying means 3 by the partial bending portion 2b.
  • the smooth member 1 is formed in a flat plate shape of a rigid material or formed in a sheet shape of an elastic material.
  • the flexible sheet 2 is formed in a sheet shape, for example, of an elastic material excellent in heat resistance such as fluorine rubber or silicon rubber.
  • the backing plate 2c is partially fixed to the portion of the work facing portion 2a of the flexible sheet 2 facing the tip end 4a of the pressing means 4 as necessary, thereby the tip end 4a of the pressing means 4 It is preferable to increase the strength of the portion where the contact is made to make it difficult to break.
  • the smooth member 1 and the flexible sheet 2 are assembled in an openable and closable chamber, and are formed behind the flexible sheet 2 opposite to the internal pressure of the first space S1 in which the smooth member 1 is disposed.
  • the internal pressure of the second space S2 is adjustable.
  • the openable and closable chambers are a pair of vacuum chambers 5a and 5b provided so as to be able to open and close in directions to approach or separate from each other, and the smooth member 1 is disposed inside one of the vacuum chambers 5a.
  • the flexible sheet 2 is disposed so as to cover the opening of the other vacuum chamber 5b, and an annular seal 5c such as an O-ring is provided between the opening edges of the vacuum chambers 5a and 5b, At the time of the closing movement, a region surrounded by the flexible sheet 2 and one of the vacuum chambers 5a is preferably the first space S1.
  • air passages 5d, 5e communicating with the outside of the vacuum chambers 5a, 5b are opened, and pressure adjusting portions 5f are provided for taking out gas in and out of them.
  • Ambient air pressure by suctioning air from the spaces S1 and S2 to the outside of the vacuum chambers 5a and 5b to a predetermined vacuum state and supplying air to the spaces S1 and S2 from the outside of the vacuum chambers 5a and 5b). It is preferable to return to the same state as atmospheric pressure).
  • the work transfer means 3 comprises, for example, a transfer robot, and is preferably provided with a transfer hand 3a for scooping up and holding the bottom surfaces of the two plate-like works A and B, that is, the bottom of the plate-like work B located below. .
  • a specific example of the pressing means 4 includes a tip portion 4a in contact with the flexible sheet 2 and a drive source 4b for reciprocating the plate, and the tip portion 4a is a plate conveyed by the work conveying means 3 It arrange
  • the tip portion 4 a is curved in a circular arc shape so as to protrude toward the flexible sheet 2 so that when the tip portion 4 a abuts on the flexible sheet 2, the curved surface thereof It is preferable to make the hole difficult to open at this contact point by bending along the
  • a control unit 6 to be described later is electrically connected to the drive source 4 b of the pressing means 4, and the operation control is performed based on the control unit 6 so that the flexible sheet 2 is not pressed by the leading end 4 a
  • the standby position which is arranged to be smooth, and the tip 4a are most moved toward the flexible sheet 2, and the workpiece facing part 2a of the flexible sheet 2 is partially pressed and elastically deformed It reciprocates over the operation position arranged to reach the plate-like works A and B conveyed by the conveying means 3.
  • the control unit 6 includes not only the drive source 4b of the pressing means 4 but also the drive source (not shown) of the work transfer means 3 described above, the pressure adjustment section 5f connected by piping to the air passages 5d and 5f, and the vacuum chamber 5a, It is also electrically connected to the drive source 5g for opening and closing 5b, etc., and the two plates are formed immediately after the plate-like works A and B are carried in by the work transfer means 3 and by the pressure difference between the first space S1 and the second space S2.
  • the tip 4a of the pressing means 4 is moved from the standby position to the operating position only immediately after the workpieces A and B are attached to each other, and after delivery of the workpiece with the workpiece conveying means 3, the reverse position is returned from the operating position to return to the standby position. It is like that.
  • embodiments of the present invention will be described based on the drawings.
  • the vacuum bonding method using the work transfer apparatus is characterized in that the flat plate made of a rigid material as the smooth member 1 is placed above the vacuum
  • the flexible sheet 2 is disposed so as to cover the opening of the vacuum chamber 5b disposed inside the chamber 5a and disposed below, and when the upper and lower vacuum chambers 5a and 5b are opened, the plate-like work A, A vacuum laminate in which a sealing material C interposed therebetween is heated and cured while pressurizing both of them by carrying in a pair of glass substrates previously aligned and temporarily fixed as B. It shows the case of use in the device.
  • the surface plate 1 is provided with a heating element 7, and the heating element 8 is disposed behind the flexible sheet 2 as well.
  • the operation control is performed by the control unit 6, and the upper and lower vacuum chambers 5a and 5b are closed after loading of the plate-like works A and B, and the internal pressure of the second space S2 formed behind the flexible sheet 2 is loaded.
  • the heating elements 7 and 8 are caused to generate heat substantially simultaneously with raising the internal pressure of the first space S1 in which the two plate-like works A and B are placed, and the smooth surface 1a below the platen 1 and The temperature of the flexible sheet 2 is raised to the curing temperature of the sealing material C.
  • the flexible sheet 2 is formed in a rectangular shape, and a frame 2 d formed in a frame shape, for example, of metal or the like is integrally fixed to the outer periphery thereof.
  • the entire flexible sheet 2 is stretched by connecting 2 d to the opening edge of the lower vacuum chamber 5 b, and an annular seal 5 c such as an O-ring is disposed on the upper surface of the frame 2 d.
  • an annular seal 5 c such as an O-ring is disposed on the upper surface of the frame 2 d.
  • the outer peripheral edge of the flexible sheet 2 made of an elastic material is connected to the opening edge of the lower vacuum chamber 5b without providing the frame 2c, or the annular seal portion 5c is connected to the upper vacuum chamber 5a. It is also possible to arrange so that it can not drop out with respect to the opening edge of.
  • the tip portions 4a of the pressing means 4 are formed so as to extend near substantially the entire length of one side of the plate-like works A and B, and a plurality of tip portions 4a are arranged at appropriate intervals in the direction of the other side.
  • a support portion 4c formed in, for example, a plate shape or a rod shape is continuously provided at the tip end portion 4a of the pressing means 4, and the support portion 4c It is vertically movably supported through the hole 8a and vertically penetrates the bottom wall of the lower vacuum chamber 5b so as to protrude outward in an airtight manner, and the drive source 4b is disposed around the periphery.
  • the tip 4a of the pressing means 4 is formed in a semicircular cross-section that is much larger than the width dimension of the support 4c, and the case where the support 4c and the drive source 4b are rodless cylinders is assumed. Although shown, it is also possible to use drive sources 4b of other structures.
  • a backing plate 2c formed in a sheet shape with a rigid material or an elastic material is fixed on the back surface of the work-facing portion 2a of the flexible sheet 2 facing the tip portion 4a of the pressing means 4 to increase strength. ing.
  • the distal end portion 4a of the pressing means 4 is not curved in a circular arc shape in cross section, and the substantially smooth distal end surface is abutted against the backing plate 2c or the backing plate 2c is not provided. It is also possible to strike directly on the back of the
  • the plate-like works A and B are supported by the apexes of the partial curved portions 2b, and a gap is formed between the portion excluding the partial curved portion 2b of the flexible sheet 2 and the lower plate-like work B. Even if S3 is empty, the plate-like works A and B do not fall even if the hand 3a of the work transfer means 3 is removed.
  • each pressing means 4 starts to descend, and while maintaining the support state of the lower plate-like work B, each partial curved portion 2b is gradually eliminated, as shown in FIG. 1 (b)
  • the entire flexible sheet 2 returns to be smooth.
  • the sheet-like works A and B are received from the work conveying means 3 onto the flexible sheet 2 only by the partial bending of the flexible sheet 2, and the loading process is completed.
  • the pressure adjustment unit 5f is activated, and suction is started from the second space S2 already formed behind the flexible sheet 2 through the air passage 5e, and the plate-like work A,
  • the approaching movement of the upper and lower vacuum chambers 5a and 5b is started by the opening / closing driving source 5g.
  • the pressure adjusting portion 5f arranges the surface plate of the smoothing member 1 Suction is started from one space S1 through the air passage 5d, and a predetermined degree of vacuum is achieved, and the heating element 7 provided on the surface plate of the smooth member 1 and the back of the flexible sheet 2 are disposed.
  • the heating element 8 is heated.
  • the first space S1 is opened to the atmosphere by the pressure adjusting unit 5f, and suction deformation is released from the second space S2 to release the expansion deformation of the flexible sheet 2 Meanwhile, the separation movement of the upper and lower vacuum chambers 5a and 5b is started.
  • the vacuum laminating method of the present invention is replaced with the vacuum laminating apparatus, and the surface plate of the smooth member 1 and the flexible sheet 2 are used.
  • Work holding means (not shown) for detachably holding the two plate-like works A and B carried in by the work conveying means 3 are provided, and the plate-like works A and B held by these are mutually
  • the configuration used for a vacuum substrate bonding apparatus such as a liquid crystal display, etc., which is aligned and pressed to a predetermined gap between them, is different from that of the first embodiment shown in FIGS. Is the same as that of the first embodiment shown in FIGS.
  • one or both of the upper and lower vacuum chambers 5a and 5b are disposed movably in the horizontal (XY ⁇ ) direction, and the upper plate-like work A is held on the lower smooth surface 1a of the smooth member 1, After holding the lower plate-like work B on the flexible sheet 2, after the first space S1 around it reaches a predetermined degree of vacuum, the upper and lower vacuum chambers 5a, 5b are relatively adjusted and moved in the XY ⁇ direction. Thereby, rough alignment and fine alignment are sequentially performed as alignment between the plate-like works A and B.
  • the plate-like work A at the upper side is peeled off from the lower smooth surface 1 a of the smooth member 1 and stacked on the lower plate-like work B via the sealing material C in vacuum, and these are accommodated
  • the pressure difference between the both plate-like works A and B is pressed to a predetermined gap by the pressure difference generated inside and outside the both plate-like works A and B, and the sealing material C is It cures and adheres.
  • the lower plate-like work B carried in from the outside by the work conveying means 3 is transferred to the flexible sheet 2 as described above.
  • a plurality of portions of the work facing portion 2a of the flexible sheet 2 are partially bent by the operation control of the pressing unit 4 by the control unit 6, and the vertexes of the partially curved portions 2b are downward
  • the portion of the flexible sheet 2 is formed by projecting toward, abutting, and supporting the plate-like workpiece B and gradually eliminating the partially curved portion 2b while maintaining this supported state. It is possible to receive the lower plate-like work B from the work transfer means 3 on the flexible sheet 2 only by bending and complete the loading process.
  • an electrostatic chuck a suction chuck, an adhesive chuck, a combination thereof, or the like is used.
  • a suction chuck is provided on the workpiece facing portion 2a of the flexible sheet 2, for example, as shown in FIG. 9, the backing plate 2c is fixed to the location where the suction chuck is disposed.
  • vent hole 2e is pierced through the workpiece facing portion 2a and the backing plate 2c, and the vacuum passage 2f is piped to the vent hole 2e, whereby the vent hole 2e opened in the flexible sheet 2 is
  • the flexible sheet 2 is prevented from spreading along with the elastic deformation, and the plate-like work B or the two plate-like works A and B bonded together move relative to the flexible sheet 2 through the air holes 2e. It is preferable to be able to be incapable of being adsorbed and held.
  • vacuum substrate bonding apparatuses such as a vacuum laminating apparatus and a liquid crystal display
  • a vacuum bonding method which used the workpiece conveyance apparatus of this invention in the above-mentioned Example
  • Other apparatuses may be used as long as the two plate-like works A and B are vacuum bonded using the flexible sheet 2.
  • the tip 4a in contact with the flexible sheet 2 is reciprocated as a specific example of the pressing means 4, the present invention is not limited to this, for example, using a fluid such as compressed air, the flexible sheet 2 It is possible to press a part of the part to partially bend it.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Provided is a work transfer apparatus by which a board-like work is easily transferred to and from a work transfer means only by partially sliding and bending a flexible sheet. The work transfer apparatus is provided with a pressing means (4) which presses a part of a flexible sheet (2) arranged on a work holding table (5b, 8) toward board-like works (A, B), and a control means (6), which controls operation so that the flexible sheet (2) is pressed by the pressing means (4) to be partially slid and bent, and that a slid and bent portion (2b) reaches the board-like works (A, B) transferred by means of the work transfer means (3). Thus, at the time of carrying in the work, the partially slid and bent portion (2b) of the flexible sheet (2) abuts to at least the board-like work (B) carried in by the work transfer means (3), and the board-like works are permitted to be received. At the time of carrying out the work, bonded board-like works (A, B) are pushed and transferred to a work carry-out start position of the work transfer means (3) by means of the partially slid and bent portion (2b) and the board-like works are permitted to be carried out.

Description

ワーク搬送装置及び真空貼り合わせ方法Work transfer apparatus and vacuum bonding method
　本発明は、例えば液晶ディスプレイ（ＬＣＤ）や有機ＥＬディスプレイ（ＯＬＥＤ）やプラズマディスプレイ（ＰＤＰ）やフレキシブルディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）に用いられるガラス製基板、又はそれらの表面に接着される偏光板などからなる二枚の板状ワークを、真空ラミネート法により、これら両板状ワーク間への気泡の混入を抑制しながら貼り合わせる真空貼り合わせ装置などに用いられるワーク搬送装置、及び、それを使用した真空貼り合わせ方法に関する。
　詳しくは、ワーク搬送手段で搬入・搬出される板状ワークをワーク保持テーブルに受け渡すワーク搬送装置及び真空貼り合わせ方法に関する。 The present invention relates to, for example, glass substrates used for flat panel displays (FPD) such as liquid crystal displays (LCDs), organic EL displays (OLEDs), plasma displays (PDPs), flexible displays, etc., or polarized light adhered to the surfaces thereof. A work transfer apparatus for use in a vacuum bonding apparatus and the like for bonding two plate-like works made of plates and the like while suppressing the mixing of air bubbles between these two plate-like works by vacuum laminating method, and It relates to the vacuum bonding method used.
More specifically, the present invention relates to a work transfer apparatus and a vacuum bonding method for transferring a plate-like work carried in and out by the work transfer means to a work holding table.
　従来、この種のワーク搬送装置及び真空貼り合わせ方法としては、上下一対の定盤の開口を閉鎖するように可撓性の薄板が張設固定され、これら薄板の間に密閉空間が形成され、前もって位置合せし且つ仮止めされた２枚１組のガラス基板を、前記一対の可撓性の薄板で挟着して、該ガラス基板が密閉空間内に保持され、この密閉空間内の減圧により大気圧が作用して前記ガラス基板を加圧し、前記可撓性の薄板に備えられた発熱体の通電により発熱して、ガラス基板間に介在されたシール材を加熱し、加圧して硬化させるものがある（例えば、特許文献１参照）。
　また、二枚のガラス製基板を基板搬送用ロボットにより定盤の基板保持面へ向けて搬入し、該定盤を貫通して昇降移動自在に複数配置されるリフトピンにより、搬入されたガラス製基板を空中で受け取って前記定盤の基板保持面にセットし、また貼り合わせが完了した両ガラス製基板は、前記基板保持面から前記リフトピンで持ち上げ、これを前記基板搬送用ロボットにより空中で受け取って搬出するものがある（例えば、特許文献２参照）。 Conventionally, as this type of work transfer apparatus and vacuum bonding method, a flexible thin plate is stretched and fixed so as to close the opening of a pair of upper and lower surface plates, and a sealed space is formed between these thin plates. The pair of flexible thin plates sandwiching the pair of glass substrates, which has been previously aligned and temporarily fixed, is held by the pair of flexible thin plates so that the glass substrates are held in the sealed space, and the reduced pressure in the sealed space Atmospheric pressure acts to pressurize the glass substrate, and heat is generated by energization of a heating element provided on the flexible thin plate to heat, pressurize and cure the sealing material interposed between the glass substrates. There is one (see, for example, Patent Document 1).
In addition, a glass substrate carried by two glass substrates is carried toward the substrate holding surface of the surface plate by the substrate transfer robot, and a plurality of lift pins are provided so as to move up and down through the surface plate. Are set in the substrate holding surface of the surface plate, and both glass substrates that have been bonded together are lifted by the lift pins from the substrate holding surface and received in the air by the substrate transfer robot There is one to carry out (see, for example, Patent Document 2).
特開平０８－１３６９３７号公報（第３－４頁、図７－８）Japanese Patent Application Laid-Open No. 08-136937 (page 3-4, FIG. 7-8) 特開２００５－１７５１５号公報（第４－９頁、図１－２）JP-A-2005-17515 (page 4-9, FIG. 1-2)
　しかし乍ら、上述した特許文献１の場合には、ガラス基板と対向する面全体が可撓性の薄板で密閉状に覆われるため、特許文献２のように基板搬送用ロボットとリフトピンを用いて板状ワークの受渡しが行われるようにすると、リフトピンが可撓性の薄板を貫通して昇降しなければならず、可撓性の薄板に複雑なシール機構を取り付けなければならない等、密閉空間を形成することが困難になるという問題があった。
　このような問題点を解決するため、リフトピンを使わずに基板搬送用ロボットのみで可撓性の薄板の上面に対してガラス基板を受け渡すには、ガラス基板の上面を吸着保持するか、又はガラス基板の対向する側面を挟持することが考えられる。
　しかし、前もって位置合せし且つ仮止めされた２枚１組のガラス基板の上面を吸着保持した場合には、位置ズレが発生し易くなるという問題があり、またガラス基板の対向する側面を挟持する場合には、確実に挟持するための複雑な機構が基板搬送用ロボットに必要になって製造コストが高くなるという問題があった。 However, in the case of Patent Document 1 described above, since the entire surface facing the glass substrate is covered in a sealing manner with a flexible thin plate, using a substrate transfer robot and lift pins as in Patent Document 2 If delivery of the plate-like work is to be performed, the lift pin must move up and down through the flexible thin plate, and a complicated sealing mechanism must be attached to the flexible thin plate, etc. There is a problem that it becomes difficult to form.
In order to solve such problems, in order to deliver the glass substrate to the upper surface of the flexible thin plate only by the robot for substrate transfer without using the lift pins, the upper surface of the glass substrate is held by suction or It is conceivable to hold the opposite side surfaces of the glass substrate.
However, in the case where the upper surface of a pair of glass substrates aligned and temporarily fixed in advance is held by suction, there is a problem that positional deviation is likely to occur, and the opposite side surfaces of the glass substrates are held. In this case, there is a problem that a complex mechanism for reliably holding the substrate is required for the substrate transfer robot, and the manufacturing cost is increased.
　本発明は、可撓性シートの部分褶曲のみでワーク搬送手段との板状ワークの受渡しを容易に行うことを目的としたものである。 An object of the present invention is to easily transfer a plate-like work with a work conveying means only by partial bending of a flexible sheet.
　前述した目的を達成するために、本発明は、ワーク保持テーブルに設けられる可撓性シートと、この可撓性シートの一部を板状ワークへ向け部分的に押圧する押圧手段と、この押圧手段を作動制御する制御部とを備え、この制御部は、前記押圧手段で前記可撓性シートを押圧して部分的に褶曲させ、この部分褶曲部がワーク搬送手段で搬送される前記板状ワークに届くようにしたことを特徴とするものである。
　前述した特徴に加えて、前記押圧手段の先端部を前記可撓性シートへ向けて突出するように湾曲形成したことを特徴とする。
　さらに前述した特徴に加えて、前記可撓性シートの前記押圧手段と対向する部分に裏打板を部分的に固着したことを特徴とする。
　さらに前述した特徴に加えて、前記可撓性シートと前記裏打板に亘って通気孔を貫通開穿したことを特徴とする。
　また前述したワーク搬送装置を真空チャンバ内に配置し、この真空チャンバの内部に前記ワーク搬送手段で二枚の前記板状ワークを搬送し、前記可撓性シートを挟んで形成される二つの空間の気圧差により、前記両板状ワークを真空状態にて貼り合わせた後に、これら貼り合わされた両板状ワークを前記ワーク搬送手段で前記真空チャンバの外部へ搬送することを特徴とする。 In order to achieve the above-described object, the present invention provides a flexible sheet provided on a work holding table, a pressing means for partially pressing a part of the flexible sheet against a plate-like work, and the pressing means. A control unit for controlling the operation of the unit, the control unit pressing the flexible sheet by the pressing unit to partially bend the flexible sheet, and the partial curved portion is conveyed by the work conveying unit; It is characterized in that it reaches the work.
In addition to the features described above, the tip of the pressing means is formed to be curved so as to protrude toward the flexible sheet.
Furthermore, in addition to the above-mentioned features, a backing plate is partially fixed to a portion of the flexible sheet facing the pressing means.
Furthermore, in addition to the above-mentioned feature, an air vent is pierced through the flexible sheet and the backing plate.
Further, the work transfer device described above is disposed in a vacuum chamber, and the two plate-like works are transferred by the work transfer means into the vacuum chamber, and two spaces are formed by sandwiching the flexible sheet. According to the present invention, after the plate-like workpieces are bonded in a vacuum state due to the pressure difference, the plate-like workpieces bonded together are transported to the outside of the vacuum chamber by the workpiece transport means.
　前述した特徴を有する本発明は、ワーク保持テーブルに設けられる可撓性シートの一部を、板状ワークへ向け部分的に押圧する押圧手段と、この押圧手段で可撓性シートを押圧して部分的に褶曲させ、この部分褶曲部がワーク搬送手段で搬送される板状ワークに届くように作動制御する制御部を備えることにより、ワーク搬入時には、ワーク搬送手段で搬入された少なくとも板状ワークに、可撓性シートの部分褶曲部が当接し支持されて受け取り可能となり、またワーク搬出時には、貼り合わせた両板状ワークが、該部分褶曲部でワーク搬送手段のワーク搬出開始位置まで押送されて受渡し可能となる。
　したがって、可撓性シートの部分褶曲のみでワーク搬送手段との板状ワークの受渡しを容易に行うことができる。
　その結果、従来のようにリフトピンを使わずに可撓性シートにより密閉空間を形成しつつ、可撓性シートに対して板状ワークの搬入・搬出を確実に行えるとともに、板状ワークを確実に挟持するための複雑な機構も必要としないから製造コストの低減化も図れる。 According to the present invention having the above-mentioned features, a pressing means for partially pressing a portion of a flexible sheet provided on a work holding table toward a plate-like work, and a flexible sheet being pressed by the pressing means At least a plate-like work carried in by the work conveying means at the time of carrying in the work by including a control portion which is partially bent and operated so that the partial bending portion reaches the plate-like work conveyed by the work conveying means The partially curved portion of the flexible sheet abuts, is supported, and can be received, and when carrying out the work, both plate-like works bonded together are pushed by the partially curved portion to the work unloading start position of the work conveying means Can be delivered.
Therefore, the delivery of the plate-like work with the work conveying means can be easily performed only by the partial bending of the flexible sheet.
As a result, while the sealed space is formed by the flexible sheet without using the lift pins as in the prior art, the plate-like work can be carried in and out reliably with respect to the flexible sheet, and the plate-like work is assuredly performed. The manufacturing cost can also be reduced because a complicated mechanism for clamping is not required.
　さらに、押圧手段の先端部を可撓性シートへ向けて突出するように湾曲形成した場合には、押圧手段の湾曲した先端部が可撓性シートに当接した際に、この先端部の湾曲面に沿って褶曲する。
　したがって、押圧手段の当接にて破れることなく可撓性シートを確実に弾性変形させることができる。 Furthermore, when the distal end of the pressing means is curved to protrude toward the flexible sheet, when the curved distal end of the pressing means abuts on the flexible sheet, the curve of the distal end Curve along the surface.
Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.
　さらに、可撓性シートの押圧手段と対向する部分に裏打板を部分的に固着した場合には、可撓性シートに押圧手段の先端部が裏打板を介して当接し、該可撓性シートが褶曲する。
　したがって、押圧手段の当接にて破れることなく可撓性シートを確実に弾性変形させることができる。 Furthermore, when the backing plate is partially fixed to the portion of the flexible sheet facing the pressing means, the tip of the pressing means abuts the flexible sheet via the backing plate, and the flexible sheet Makes an euphemism.
Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.
　さらに、可撓性シートと裏打板に亘って通気孔を貫通開穿した場合には、可撓性シートに開穿した通気孔が、該可撓性シートの弾性変形に伴って広がらないようにするとともに、該通気孔を通してそれと接する板状ワークのみ又は貼り合わされた二枚の板状ワークが可撓性シート２に対して移動不能に吸着保持される。
　したがって、可撓性シートに対する板状ワークの位置ズレを防止することができる。 Furthermore, when the vent is pierced through the flexible sheet and the backing plate, the vent opened in the flexible sheet is not expanded with the elastic deformation of the flexible sheet. At the same time, only the plate-like work in contact with the plate-like work or the two plate-like works bonded to each other through the air holes are adsorbed and held immovably against the flexible sheet 2.
Therefore, positional deviation of the plate-like work relative to the flexible sheet can be prevented.
　また、ワーク搬送装置を真空チャンバ内に配置し、この真空チャンバの内部に前記ワーク搬送手段で二枚の前記板状ワークを搬送し、前記可撓性シートを挟んで形成される二つの空間の気圧差により、前記両板状ワークを真空状態にて貼り合わせた後に、これら貼り合わされた両板状ワークを前記ワーク搬送手段で前記真空チャンバの外部へ搬送する場合には、ワーク搬入時には、ワーク搬送手段で搬入された二枚の板状ワークのどちらか一方に、可撓性シートの部分褶曲部が当接し支持されて受け取り可能となり、またワーク搬出時には、貼り合わせた両板状ワークが、該部分褶曲部でワーク搬送手段によるワーク搬出開始位置まで押送されて受渡し可能となる。
　したがって、可撓性シートの部分褶曲のみでワーク搬送手段との板状ワークの受渡しを容易に行うことができる。
　その結果、従来のようにリフトピンを使わずに可撓性シートにより密閉空間を形成しつつ、可撓性シートに対して板状ワークの搬入・搬出を確実に行えるとともに、板状ワークを確実に挟持するための複雑な機構も必要としないから製造コストの低減化も図れる。 Further, a work transfer device is disposed in a vacuum chamber, and the two plate-like works are transferred by the work transfer means into the vacuum chamber, and two spaces formed by sandwiching the flexible sheet. When the both plate-like works bonded together are transported to the outside of the vacuum chamber by the work transfer means after bonding the plate-like works together in a vacuum state due to the pressure difference, the work is carried out when the work is carried in The partial curved portion of the flexible sheet abuts on and is supported and can be received by one of the two plate-like workpieces carried in by the conveying means, and the two plate-like workpieces bonded together when carrying out the workpiece are The partial folding portion can be pushed and delivered to the workpiece unloading start position by the workpiece transport means and can be delivered.
Therefore, the delivery of the plate-like work with the work conveying means can be easily performed only by the partial bending of the flexible sheet.
As a result, while the sealed space is formed by the flexible sheet without using the lift pins as in the prior art, the plate-like work can be carried in and out reliably with respect to the flexible sheet, and the plate-like work is assuredly performed. The manufacturing cost can also be reduced because a complicated mechanism for clamping is not required.
本発明のワーク搬送装置及び真空貼り合わせ方法の一実施例を示す縦断正面図であり、（ａ）がワーク搬入時を示し、（ｂ）がワーク受渡し後を示し、（ｃ）が真空チャンバ閉塞後を示している。BRIEF DESCRIPTION OF THE DRAWINGS It is a longitudinal cross-sectional front view which shows one Example of the workpiece conveyance apparatus and vacuum bonding method of this invention, (a) shows the time of workpiece loading, (b) shows after workpiece delivery, (c) vacuum chamber closing. Show after. 図１（ｂ）の（２）－（２）線に沿える横断平面図である。FIG. 2 is a cross-sectional plan view taken along line (2)-(2) of FIG. 1 (b). 押圧手段の一例を示す部分拡大縦断正面図である。It is a partial expansion longitudinal cross-sectional front view which shows an example of a press means. 加熱圧着時を示す縦断正面図である。It is a vertical front view which shows the time of thermocompression bonding. 真空チャンバ開放前を示す縦断正面図である。It is a vertical front view showing the vacuum chamber before opening. 真空チャンバ開放後を示す縦断正面図である。It is a vertical front view which shows the vacuum chamber after opening. ワーク搬出時を示す縦断正面図である。It is a longitudinal front view which shows the time of workpiece removal. 本発明のワーク搬送装置及び真空貼り合わせ方法の他の実施例を示す縦断正面図であり、（ａ）がワーク受渡し後を示し、（ｂ）がワーク搬出時を示している。It is a longitudinal cross-sectional front view which shows the other Example of the workpiece conveyance apparatus and vacuum bonding method of this invention, (a) shows after workpiece | work delivery, (b) has shown the time of workpiece | work unloading. 可撓性シートの変形例を示す部分拡大縦断正面図である。It is a partial expansion longitudinal elevation front view which shows the modification of a flexible sheet.
　本発明のワーク搬送装置の実施形態は、ワーク保持テーブルに設けられる可撓性シートと、この可撓性シートの一部を板状ワークへ向け部分的に押圧する押圧手段と、この押圧手段を作動制御する制御部とを備え、この制御部は、前記押圧手段で前記可撓性シートを押圧して部分的に褶曲させ、この部分褶曲部が前記ワーク搬送手段で搬送される前記板状ワークに届くようにしている。 The embodiment of the work transfer apparatus according to the present invention comprises a flexible sheet provided on a work holding table, a pressing means for partially pressing a part of the flexible sheet against a plate-like work, and the pressing means. And a control unit for controlling the operation, the control unit pressing the flexible sheet by the pressing unit to partially bend the flexible sheet, and the plate-like workpiece having the partially curved section conveyed by the work conveying unit To reach the
　このワーク搬送装置を使用する真空貼り合わせ方法の実施形態は、図１～図９に示す如く、対向面が平滑で平行に配置される平滑部材１及び可撓性シート２と、これら平滑部材１及び可撓性シート２の間に二枚の板状ワークＡ，Ｂを搬送するワーク搬送手段３とを備え、このワーク搬送手段３で外部から平滑部材１と可撓性シート２の間に搬入された二枚の板状ワークＡ，Ｂを、該可撓性シート２を挟んで形成される二つの第一空間Ｓ１及び第二空間Ｓ２の気圧差により加圧して真空状態で貼り合わせ、この貼り合わされた両板状ワークＡ，Ｂを、ワーク搬送手段３で平滑部材１及び可撓性シート２の間から外部へ搬出している。 The embodiment of the vacuum bonding method using this work transfer apparatus is, as shown in FIGS. 1 to 9, a smooth member 1 and a flexible sheet 2 whose opposing surfaces are smooth and arranged in parallel, and these smooth members 1 And a work conveying means 3 for conveying two plate-like works A and B between the flexible sheets 2, and the work conveyance means 3 carries the sheet between the smooth member 1 and the flexible sheet 2 from the outside. The two plate-like works A and B are pressed together in a vacuum state by the pressure difference between the two first spaces S1 and second spaces S2 formed with the flexible sheet 2 interposed therebetween, and The two plate-like works A and B bonded together are carried out by the work conveying means 3 from between the smooth member 1 and the flexible sheet 2 to the outside.
　そして、可撓性シート２の背後に形成される第二空間Ｓ２には、該可撓性シート２の一部を板状ワークＡ，Ｂへ向け部分的に押圧する押圧手段４を設け、この押圧手段４を後述する制御部６で作動制御することにより、該可撓性シート２を板状ワークＡ，Ｂへ向け部分的に褶曲させ、この部分褶曲部２ｂがワーク搬送手段３で搬送される板状ワークＡ，Ｂに届くような配置として、ワーク搬入時には、ワーク搬送手段３で搬入された板状ワークＡ，Ｂに、可撓性シート２の部分褶曲部２ｂを当接させて支持し、またワーク搬出時には、貼り合わせた両板状ワークＡ，Ｂを、該部分褶曲部２ｂでワーク搬送手段３によるワーク搬出開始位置まで押送するようにしている。 The second space S2 formed behind the flexible sheet 2 is provided with pressing means 4 for partially pressing the part of the flexible sheet 2 toward the plate-like works A and B. The flexible sheet 2 is partially bent toward the plate-like works A and B by controlling operation of the pressing means 4 by the control unit 6 described later, and the partial bent portion 2 b is conveyed by the work conveying means 3. Supports the partial curved portion 2b of the flexible sheet 2 in contact with the plate-like works A and B carried in by the work conveying means 3 so as to reach the plate-like works A and B At the time of carrying out the work, both the plate-like works A and B bonded together are pushed to the work unloading start position by the work conveying means 3 by the partial bending portion 2b.
　平滑部材１は、剛性材料で平板状に形成されるか又は弾性材料でシート状に形成される。
　可撓性シート２は、例えばフッ素ゴムやシリコンゴムなどの耐熱性に優れた弾性材料でシート状に形成される。
　この可撓性シート２のワーク対向部２ａにおいて押圧手段４の先端部４ａと対向する部分には、必要に応じて裏打板２ｃを部分的に固着することにより、該押圧手段４の先端部４ａが当接する箇所の強度をアップして破れ難くすることが好ましい。 The smooth member 1 is formed in a flat plate shape of a rigid material or formed in a sheet shape of an elastic material.
The flexible sheet 2 is formed in a sheet shape, for example, of an elastic material excellent in heat resistance such as fluorine rubber or silicon rubber.
The backing plate 2c is partially fixed to the portion of the work facing portion 2a of the flexible sheet 2 facing the tip end 4a of the pressing means 4 as necessary, thereby the tip end 4a of the pressing means 4 It is preferable to increase the strength of the portion where the contact is made to make it difficult to break.
　これら平滑部材１及び可撓性シート２は、開閉可能な室内に組み付けられて、平滑部材１が配置される第一空間Ｓ１の内圧と、それと逆の可撓性シート２の背後に形成される第二空間Ｓ２の内圧を夫々調整自在にしている。 The smooth member 1 and the flexible sheet 2 are assembled in an openable and closable chamber, and are formed behind the flexible sheet 2 opposite to the internal pressure of the first space S1 in which the smooth member 1 is disposed. The internal pressure of the second space S2 is adjustable.
　その具体例としては、開閉可能な室が、互い接近又は離隔される方向へ開閉移動自在に設けられる一対の真空チャンバ５ａ，５ｂであり、その一方の真空チャンバ５ａの内部に平滑部材１を配置し、他方の真空チャンバ５ｂの開口を覆うように可撓性シート２が配置されるとともに、これら真空チャンバ５ａ，５ｂの開口縁の間には、例えばＯリングなどの環状シール部５ｃを設け、その閉動時において、可撓性シート２と一方の真空チャンバ５ａとで囲まれる領域を第一空間Ｓ１とすることが好ましい。 As a specific example, the openable and closable chambers are a pair of vacuum chambers 5a and 5b provided so as to be able to open and close in directions to approach or separate from each other, and the smooth member 1 is disposed inside one of the vacuum chambers 5a. And the flexible sheet 2 is disposed so as to cover the opening of the other vacuum chamber 5b, and an annular seal 5c such as an O-ring is provided between the opening edges of the vacuum chambers 5a and 5b, At the time of the closing movement, a region surrounded by the flexible sheet 2 and one of the vacuum chambers 5a is preferably the first space S1.
　さらに、これら第一空間Ｓ１及び第二空間Ｓ２には、真空チャンバ５ａ，５ｂの外部と連通する通気路５ｄ，５ｅを開設して、それらの内外へ気体を出し入れする圧力調整部５ｆが夫々設けられ、各空間Ｓ１，Ｓ２から真空チャンバ５ａ，５ｂの外部へ吸気することにより所定の真空状態にし、また真空チャンバ５ａ，５ｂの外部から各空間Ｓ１，Ｓ２へ給気することにより、周囲気圧（大気圧）と同じ状態に戻すことが好ましい。 Further, in the first space S1 and the second space S2, air passages 5d, 5e communicating with the outside of the vacuum chambers 5a, 5b are opened, and pressure adjusting portions 5f are provided for taking out gas in and out of them. Ambient air pressure (by suctioning air from the spaces S1 and S2 to the outside of the vacuum chambers 5a and 5b to a predetermined vacuum state and supplying air to the spaces S1 and S2 from the outside of the vacuum chambers 5a and 5b). It is preferable to return to the same state as atmospheric pressure).
　ワーク搬送手段３は、例えば搬送ロボットなどからなり、二枚の板状ワークＡ，Ｂの底面、即ち下方に位置する板状ワークＢの底面をすくい上げて保持する受け渡し用ハンド３ａを備えることが好ましい。 The work transfer means 3 comprises, for example, a transfer robot, and is preferably provided with a transfer hand 3a for scooping up and holding the bottom surfaces of the two plate-like works A and B, that is, the bottom of the plate-like work B located below. .
　押圧手段４の具体例としては、可撓性シート２と接触する先端部４ａと、それを往復移動させる駆動源４ｂとを有し、この先端部４ａを、ワーク搬送手段３により搬送される板状ワークＡ，Ｂを支える受け渡し用ハンド３ａの動作位置と干渉しないように配置している。
　この先端部４ａの形状は、該可撓性シート２に向けて突出するように断面円弧状に湾曲形成することにより、該先端部４ａが可撓性シート２に当接した時に、その湾曲面に沿って褶曲させ、この当接箇所に孔が空き難くすることが好ましい。 A specific example of the pressing means 4 includes a tip portion 4a in contact with the flexible sheet 2 and a drive source 4b for reciprocating the plate, and the tip portion 4a is a plate conveyed by the work conveying means 3 It arrange | positions so that it may not interfere with the operation | movement position of the hand 3a for delivery which supports the shape work A and B. FIG.
The tip portion 4 a is curved in a circular arc shape so as to protrude toward the flexible sheet 2 so that when the tip portion 4 a abuts on the flexible sheet 2, the curved surface thereof It is preferable to make the hole difficult to open at this contact point by bending along the
　また、押圧手段４の駆動源４ｂには、後述する制御部６が電気的に接続され、この制御部６に基づいて作動制御することにより、先端部４ａで可撓性シート２を押圧せず平滑となるように配置される待機位置と、先端部４ａを可撓性シート２へ向け最も移動し、該可撓性シート２のワーク対向部２ａを部分的に押圧して弾性変形させ、ワーク搬送手段３で搬送される板状ワークＡ，Ｂに届くように配置される動作位置とに亘って、往復動させる。 Further, a control unit 6 to be described later is electrically connected to the drive source 4 b of the pressing means 4, and the operation control is performed based on the control unit 6 so that the flexible sheet 2 is not pressed by the leading end 4 a The standby position, which is arranged to be smooth, and the tip 4a are most moved toward the flexible sheet 2, and the workpiece facing part 2a of the flexible sheet 2 is partially pressed and elastically deformed It reciprocates over the operation position arranged to reach the plate-like works A and B conveyed by the conveying means 3.
　この制御部６は、押圧手段４の駆動源４ｂだけでなく、上述したワーク搬送手段３の駆動源（図示しない）、通気路５ｄ，５ｆに配管接続される圧力調整部５ｆ、真空チャンバ５ａ，５ｂの開閉用駆動源５ｇなどにも電気的に接続され、ワーク搬送手段３により板状ワークＡ，Ｂが搬入された直後と、第一空間Ｓ１及び第二空間Ｓ２の気圧差により両板状ワークＡ，Ｂが貼り合わされた直後のみ、押圧手段４の先端部４ａを待機位置から動作位置まで移動させ、ワーク搬送手段３とのワーク受渡し後は、動作位置から逆移動させて待機位置に戻すようにしている。
　以下、本発明の各実施例を図面に基づいて説明する。 The control unit 6 includes not only the drive source 4b of the pressing means 4 but also the drive source (not shown) of the work transfer means 3 described above, the pressure adjustment section 5f connected by piping to the air passages 5d and 5f, and the vacuum chamber 5a, It is also electrically connected to the drive source 5g for opening and closing 5b, etc., and the two plates are formed immediately after the plate-like works A and B are carried in by the work transfer means 3 and by the pressure difference between the first space S1 and the second space S2. The tip 4a of the pressing means 4 is moved from the standby position to the operating position only immediately after the workpieces A and B are attached to each other, and after delivery of the workpiece with the workpiece conveying means 3, the reverse position is returned from the operating position to return to the standby position. It is like that.
Hereinafter, embodiments of the present invention will be described based on the drawings.
　この実施例１は、図１～図７に示す如く、本発明のワーク搬送装置を使用した真空貼り合わせ方法が、前記平滑部材１として剛性材料からなる定盤を、上方に配置される前記真空チャンバ５ａの内部に配置し、下方に配置される前記真空チャンバ５ｂの開口を覆うように前記可撓性シート２が配置され、これら上下真空チャンバ５ａ，５ｂの開放時に、前記板状ワークＡ，Ｂとして、前もって位置合せし且つ仮止めされた二枚１組のガラス基板などを搬入することで、これら両者を加圧しつつ、両者間に介在されたシール材Ｃを加熱して硬化させる真空ラミネート装置に使用した場合を示すものである。 In the first embodiment, as shown in FIGS. 1 to 7, the vacuum bonding method using the work transfer apparatus according to the present invention is characterized in that the flat plate made of a rigid material as the smooth member 1 is placed above the vacuum The flexible sheet 2 is disposed so as to cover the opening of the vacuum chamber 5b disposed inside the chamber 5a and disposed below, and when the upper and lower vacuum chambers 5a and 5b are opened, the plate-like work A, A vacuum laminate in which a sealing material C interposed therebetween is heated and cured while pressurizing both of them by carrying in a pair of glass substrates previously aligned and temporarily fixed as B. It shows the case of use in the device.
　定盤１には、図１（ａ）～（ｃ）に示す如く、発熱体７が備えられ、可撓性シート２の背後にも発熱体８が配設され、これら発熱体７，８は前記制御部６により作動制御され、板状ワークＡ，Ｂの搬入後に上下真空チャンバ５ａ，５ｂを閉塞し、可撓性シート２の背後に形成される前記第二空間Ｓ２の内圧を、搬入した二枚の板状ワークＡ，Ｂが載置される前記第一空間Ｓ１の内圧よりも高くするのと略同時に該発熱体７，８を発熱させて、定盤１の下方の平滑面１ａと可撓性シート２が、シール材Ｃの硬化温度まで温度上昇するようにしている。 As shown in FIGS. 1 (a) to 1 (c), the surface plate 1 is provided with a heating element 7, and the heating element 8 is disposed behind the flexible sheet 2 as well. The operation control is performed by the control unit 6, and the upper and lower vacuum chambers 5a and 5b are closed after loading of the plate-like works A and B, and the internal pressure of the second space S2 formed behind the flexible sheet 2 is loaded. The heating elements 7 and 8 are caused to generate heat substantially simultaneously with raising the internal pressure of the first space S1 in which the two plate-like works A and B are placed, and the smooth surface 1a below the platen 1 and The temperature of the flexible sheet 2 is raised to the curing temperature of the sealing material C.
　図示例では、図２に示す如く、可撓性シート２が矩形状に形成され、その外周には、例えば金属などで額縁状に形成された枠体２ｄが一体的に固着され、この枠体２ｄを下真空チャンバ５ｂの開口縁に連結することで、該可撓性シート２全体が張架され、この枠体２ｄの上面には、例えばＯリングなどの環状シール部５ｃを配置している。
　その他の例として図示しないが、枠体２ｃを設けずに弾性材料からなる可撓性シート２の外周縁を、下真空チャンバ５ｂの開口縁に連結したり、環状シール部５ｃを上真空チャンバ５ａの開口縁に対して脱落不能に配置することも可能である。 In the illustrated example, as shown in FIG. 2, the flexible sheet 2 is formed in a rectangular shape, and a frame 2 d formed in a frame shape, for example, of metal or the like is integrally fixed to the outer periphery thereof. The entire flexible sheet 2 is stretched by connecting 2 d to the opening edge of the lower vacuum chamber 5 b, and an annular seal 5 c such as an O-ring is disposed on the upper surface of the frame 2 d. .
Although not illustrated as another example, the outer peripheral edge of the flexible sheet 2 made of an elastic material is connected to the opening edge of the lower vacuum chamber 5b without providing the frame 2c, or the annular seal portion 5c is connected to the upper vacuum chamber 5a. It is also possible to arrange so that it can not drop out with respect to the opening edge of.
　さらに、押圧手段４の先端部４ａは、板状ワークＡ，Ｂの一辺の略全長近くまで延びるように形成され、他辺の方向へ適宜間隔を空けて複数配置されている。
　これら押圧手段４の先端部４ａには、図３に示す如く、例えば板状又は棒状などに形成される支持部４ｃを連設し、この支持部４ｃは、発熱体８に開穿される通孔８ａを貫通して上下方向へ昇降自在に支持され、下真空チャンバ５ｂの底壁を気密状に貫通して外部へ突出し、その周囲には前記駆動源４ｂを配設している。 Furthermore, the tip portions 4a of the pressing means 4 are formed so as to extend near substantially the entire length of one side of the plate-like works A and B, and a plurality of tip portions 4a are arranged at appropriate intervals in the direction of the other side.
As shown in FIG. 3, a support portion 4c formed in, for example, a plate shape or a rod shape is continuously provided at the tip end portion 4a of the pressing means 4, and the support portion 4c It is vertically movably supported through the hole 8a and vertically penetrates the bottom wall of the lower vacuum chamber 5b so as to protrude outward in an airtight manner, and the drive source 4b is disposed around the periphery.
　図示例では、押圧手段４の先端部４ａを、支持部４ｃの幅寸法よりも遙かに大きな断面半円形状に形成し、この支持部４ｃ及び駆動源４ｂがロッドレスレスシリンダである場合を示しているが、その他の構造の駆動源４ｂを使用することも可能である。
　また、押圧手段４の先端部４ａと対向する可撓性シート２のワーク対向部２ａの裏面には、剛性材料又は弾性材料でシート状に形成される裏打板２ｃを固着して強度アップを図っている。 In the illustrated example, the tip 4a of the pressing means 4 is formed in a semicircular cross-section that is much larger than the width dimension of the support 4c, and the case where the support 4c and the drive source 4b are rodless cylinders is assumed. Although shown, it is also possible to use drive sources 4b of other structures.
In addition, a backing plate 2c formed in a sheet shape with a rigid material or an elastic material is fixed on the back surface of the work-facing portion 2a of the flexible sheet 2 facing the tip portion 4a of the pressing means 4 to increase strength. ing.
　その他の例として図示しないが、押圧手段４の先端部４ａと対向する可撓性シート２のワーク対向部２ａの裏面部分のみを部分的に肉厚に形成して、箇所の強度アップを図ることも可能である。
　さらに、押圧手段４の先端部４ａを断面円弧状に湾曲形成せず、略平滑な先端面を裏打板２ｃに突き当てたり、裏打板２ｃを設けず、可撓性シート２のワーク対向部２ａの裏面に直接突き当てることも可能である。 Although not shown as another example, only part of the back surface portion of the workpiece facing portion 2a of the flexible sheet 2 facing the tip portion 4a of the pressing means 4 is partially thickened to increase the strength of the portion. Is also possible.
Furthermore, the distal end portion 4a of the pressing means 4 is not curved in a circular arc shape in cross section, and the substantially smooth distal end surface is abutted against the backing plate 2c or the backing plate 2c is not provided. It is also possible to strike directly on the back of the
　次に、斯かるワーク搬送装置を用いた真空貼り合わせ方法について工程順に従って説明する。
　先ず、図１（ａ）に示す如く、上下真空チャンバ５ａ，５ｂが上下方向へ離隔移動した開放時に、その外部からワーク搬送手段３により、前工程で正確に位置合わせされて仮止めされた二枚の板状ワークＡ，Ｂが、平滑部材１の定盤及び可撓性シート２の間の所定位置に搬入され、該ワーク搬送手段３の受け渡し用ハンド３ａで、可撓性シート２と接触することなく空中に支えられる。 Next, a vacuum bonding method using such a work transfer apparatus will be described according to the order of steps.
First, as shown in FIG. 1 (a), when the upper and lower vacuum chambers 5a, 5b are separated and moved in the vertical direction, the work transfer means 3 from the outside accurately aligns them in the previous step and temporarily fixes them. Sheet-like work pieces A and B are carried to a predetermined position between the surface plate of the smooth member 1 and the flexible sheet 2 and brought into contact with the flexible sheet 2 by the transfer hand 3a of the work transfer means 3 Can be supported in the air without
　この状態で、複数箇所に配置された押圧手段４の先端部４ａが夫々上昇開始して、該板状ワークＡ，Ｂと対向する可撓性シート２のワーク対向部２ａの複数箇所に突き当たり、そのまま上方へ押圧する。
　それにより、可撓性シート２のワーク対向部２ａにおいて、各押圧手段４の先端部４ａで押圧する部分のみが、ワーク搬送手段３の受け渡し用ハンド３ａと干渉しないように部分的に褶曲して、それらの頂点部分が下方の板状ワークＢの底面に夫々当接する。 In this state, the tip portions 4a of the pressing means 4 arranged at a plurality of places start to rise, respectively, and abut against the plurality of places of the work facing part 2a of the flexible sheet 2 facing the plate-like works A and B, Press it upward as it is.
Thereby, in the workpiece facing portion 2 a of the flexible sheet 2, only the portion pressed by the leading end 4 a of each pressing means 4 is partially bent so as not to interfere with the transfer hand 3 a of the workpiece conveying means 3 The tops of these parts respectively abut on the bottom of the lower plate-like workpiece B.
　その結果、これら部分褶曲部２ｂの頂点部分で板状ワークＡ，Ｂが支えられ、可撓性シート２の部分褶曲部２ｂを除いた箇所と、下方の板状ワークＢとの間には隙間Ｓ３が空き、ワーク搬送手段３の受け渡し用ハンド３ａを外されても板状ワークＡ，Ｂは落下しない。 As a result, the plate-like works A and B are supported by the apexes of the partial curved portions 2b, and a gap is formed between the portion excluding the partial curved portion 2b of the flexible sheet 2 and the lower plate-like work B. Even if S3 is empty, the plate-like works A and B do not fall even if the hand 3a of the work transfer means 3 is removed.
　その後、各押圧手段４の先端部４ａが下降開始して、下方の板状ワークＢの支持状態を保ちながら、各部分褶曲部２ｂを徐々に消滅させ、図１（ｂ）に示す如く、可撓性シート２の全体が平滑に戻る。
　それにより、可撓性シート２の部分褶曲のみでワーク搬送手段３から板状ワークＡ，Ｂを該可撓性シート２上に受け取って搬入工程が完了する。 Thereafter, the leading end 4a of each pressing means 4 starts to descend, and while maintaining the support state of the lower plate-like work B, each partial curved portion 2b is gradually eliminated, as shown in FIG. 1 (b) The entire flexible sheet 2 returns to be smooth.
Thus, the sheet-like works A and B are received from the work conveying means 3 onto the flexible sheet 2 only by the partial bending of the flexible sheet 2, and the loading process is completed.
　この状態では、圧力調整部５ｆが作動して、既に可撓性シート２の背後に形成される第二空間Ｓ２から通気路５ｅを通って吸引が開始されており、上述した板状ワークＡ，Ｂの受渡しの完了を確認したところで、上下真空チャンバ５ａ，５ｂの開閉用駆動源５ｇにより、それらの接近移動が開始される。 In this state, the pressure adjustment unit 5f is activated, and suction is started from the second space S2 already formed behind the flexible sheet 2 through the air passage 5e, and the plate-like work A, When it is confirmed that the delivery of B has been completed, the approaching movement of the upper and lower vacuum chambers 5a and 5b is started by the opening / closing driving source 5g.
　これに続いて、図１（ｃ）に示す如く、上下真空チャンバ５ａ，５ｂが環状シール部５ｃを介して閉塞されると、圧力調整部５ｆにより、平滑部材１の定盤が配置される第一空間Ｓ１から通気路５ｄを通って吸引が開始され、所定の真空度にするとともに、この平滑部材１の定盤に備えられた発熱体７と、可撓性シート２の背後に配設された発熱体８が加熱される。 Subsequently, as shown in FIG. 1 (c), when the upper and lower vacuum chambers 5a and 5b are closed via the annular seal portion 5c, the pressure adjusting portion 5f arranges the surface plate of the smoothing member 1 Suction is started from one space S1 through the air passage 5d, and a predetermined degree of vacuum is achieved, and the heating element 7 provided on the surface plate of the smooth member 1 and the back of the flexible sheet 2 are disposed. The heating element 8 is heated.
　その後、図４に示す如く、圧力調整部５ｆにより第二空間Ｓ２への給気が開始されて、第一空間Ｓ１との間に気圧差が発生する。
　それにより、弾性変形可能な可撓性シート２が板状ワークＡ，Ｂを挟んで平滑部材１の下方の平滑面１ａへ向け押圧され、該平滑面１ａに沿って板状ワークＡ，Ｂを均一に加圧する。 Thereafter, as shown in FIG. 4, air supply to the second space S2 is started by the pressure adjusting unit 5f, and a pressure difference is generated between the first space S1 and the second space S2.
Thereby, the elastically deformable flexible sheet 2 is pressed toward the lower smooth surface 1a of the smooth member 1 with the plate-like works A and B interposed therebetween, and the plate-like works A and B are formed along the smooth surface 1a. Pressurize uniformly.
　これと同時に、平滑部材１の定盤に備えられた発熱体７と、可撓性シート２の背後に配設された発熱体８で、板状ワークＡ，Ｂの間に介在されたシール材Ｃを加熱して硬化させる。
　それにより、板状ワークＡ，Ｂが真空状に貼り合わされて、両者間に気泡が混入しない。 At the same time, a sealing material interposed between the plate-like works A and B by the heating element 7 provided on the surface plate of the smooth member 1 and the heating element 8 disposed behind the flexible sheet 2 Heat and cure C.
As a result, the plate-like works A and B are attached in a vacuum state, and air bubbles are not mixed between the two.
　このような貼り合わせ工程が完了した後は、図５に示す如く、圧力調整部５ｆにより第一空間Ｓ１が大気開放され、第二空間Ｓ２から吸引して可撓性シート２の膨張変形を解除しつつ、上下真空チャンバ５ａ，５ｂの離隔移動が開始される。 After such a bonding step is completed, as shown in FIG. 5, the first space S1 is opened to the atmosphere by the pressure adjusting unit 5f, and suction deformation is released from the second space S2 to release the expansion deformation of the flexible sheet 2 Meanwhile, the separation movement of the upper and lower vacuum chambers 5a and 5b is started.
　その後、図６に示す如く、上下真空チャンバ５ａ，５ｂの開放が完了すると、各記押圧手段４の先端部４ａが夫々上昇開始されて、図７に示す如く、可撓性シート２のワーク対向部２ａの複数箇所に突き当たり、そのまま上方へ押圧して部分的に褶曲する。
　それにより、貼り合わせが完了した板状ワークＡ，Ｂを水平状に支えながら持ち上げて空中で支持し、この支持状態を保ちつつ可撓性シート２の部分褶曲部２ｂを除いた箇所と、下方の板状ワークＢとの間には隙間Ｓ３が空く。 Thereafter, as shown in FIG. 6, when the opening and closing of the upper and lower vacuum chambers 5a and 5b is completed, the leading end 4a of each pressing means 4 is started to ascend, and as shown in FIG. It strikes at a plurality of places of the part 2a and is pressed upward as it is to partially bend it.
As a result, the plate-like works A and B which have been bonded together are lifted horizontally while being supported horizontally and supported in the air, and a portion from which the partially curved portion 2b of the flexible sheet 2 is removed while maintaining this supported state A gap S3 is opened between the plate-like workpiece B and the plate-like workpiece B.
　この支持状態で、該隙間Ｓ３にワーク搬送手段３の受け渡し用ハンド３ａを挿入すれば、可撓性シート２の部分褶曲部２ｂと干渉しないため、板状ワークＡ，Ｂを落下させずにすくい上げられ、該ワーク搬送手段３の受け渡し用ハンド３ａでそのまま上下真空チャンバ５ａ，５ｂの外部へ搬出される。
　その結果、可撓性シート２の部分褶曲のみでその上から板状ワークＡ，Ｂをワーク搬送手段３に受け渡して搬出される。
　それ以降は上述した作動が繰り返される。 In this supported state, if the transfer hand 3a of the work transfer means 3 is inserted into the gap S3, the plate-like works A and B are not dropped but scooped up because they do not interfere with the partially curved portion 2b of the flexible sheet 2. Then, they are carried out of the upper and lower vacuum chambers 5a and 5b as they are by the hand 3a for transfer of the work transfer means 3.
As a result, the plate-like works A and B are delivered to the work conveying means 3 from above only by partial bending of the flexible sheet 2 and carried out.
After that, the above-described operation is repeated.
　この実施例２は、図８（ａ）（ｂ）に示す如く、本発明の真空貼り合わせ方法を前記真空ラミネート装置に代えて、前記平滑部材１の定盤と前記可撓性シート２とに、前記ワーク搬送手段３で搬入される二枚の板状ワークＡ，Ｂを夫々着脱自在に保持するワーク保持手段（図示しない）を設け、これらに保持された板状ワークＡ，Ｂを相互に位置合わせし、両者間を所定のギャップまで潰して貼り合わせる液晶ディスプレーなどの真空基板貼り合わせ装置に使用した構成が、前記図１～図７に示した実施例１とは異なり、それ以外の構成は図１～図７に示した実施例１と同じものである。 In this second embodiment, as shown in FIGS. 8 (a) and 8 (b), the vacuum laminating method of the present invention is replaced with the vacuum laminating apparatus, and the surface plate of the smooth member 1 and the flexible sheet 2 are used. Work holding means (not shown) for detachably holding the two plate-like works A and B carried in by the work conveying means 3 are provided, and the plate-like works A and B held by these are mutually The configuration used for a vacuum substrate bonding apparatus such as a liquid crystal display, etc., which is aligned and pressed to a predetermined gap between them, is different from that of the first embodiment shown in FIGS. Is the same as that of the first embodiment shown in FIGS.
　図示例では、上下真空チャンバ５ａ，５ｂのどちらか一方又は両方を水平（ＸＹθ）方向へ移動自在に配置し、平滑部材１の下方の平滑面１ａに上方の板状ワークＡを保持し、可撓性シート２上に下方の板状ワークＢを保持した後、その周囲の第一空間Ｓ１が所定の真空度に達してから、上下真空チャンバ５ａ，５ｂを相対的にＸＹθ方向へ調整移動させることにより、両板状ワークＡ，Ｂ同士の位置合わせとして粗合わせと微合わせが順次行われる。 In the illustrated example, one or both of the upper and lower vacuum chambers 5a and 5b are disposed movably in the horizontal (XYθ) direction, and the upper plate-like work A is held on the lower smooth surface 1a of the smooth member 1, After holding the lower plate-like work B on the flexible sheet 2, after the first space S1 around it reaches a predetermined degree of vacuum, the upper and lower vacuum chambers 5a, 5b are relatively adjusted and moved in the XYθ direction. Thereby, rough alignment and fine alignment are sequentially performed as alignment between the plate-like works A and B.
　その後、平滑部材１の下方の平滑面１ａから上方の板状ワークＡが剥離され、真空中でシール材Ｃを介して下方の板状ワークＢ上に重ね合わせた後、これらが収容される第一空間Ｓ１を大気開放することにより、両板状ワークＡ，Ｂの内外に生じる気圧差で両板状ワークＡ，Ｂの間を所定のギャップまで加圧し、この加圧状態でシール材Ｃを硬化させて接着している。 Thereafter, the plate-like work A at the upper side is peeled off from the lower smooth surface 1 a of the smooth member 1 and stacked on the lower plate-like work B via the sealing material C in vacuum, and these are accommodated By opening one space S1 to the atmosphere, the pressure difference between the both plate-like works A and B is pressed to a predetermined gap by the pressure difference generated inside and outside the both plate-like works A and B, and the sealing material C is It cures and adheres.
　それにより、図８（ａ）（ｂ）に示す実施例２は、ワーク搬送手段３によって外部から搬入された下方の板状ワークＢを可撓性シート２上へ受け渡す際には、上述した実施例１と同様に、前記制御部６による押圧手段４の作動制御で、可撓性シート２のワーク対向部２ａの複数箇所を部分的に褶曲し、これら部分褶曲部２ｂの頂点部分を下方の板状ワークＢへ向け突出し当接させて支えるとともに、この支持状態を保ちながら該部分褶曲部２ｂを徐々に消滅させることにより、図８（ａ）に示す如く、可撓性シート２の部分褶曲のみでワーク搬送手段３から下方の板状ワークＢを該可撓性シート２上に受け取って搬入工程を完了させることができる。 Thus, in the second embodiment shown in FIGS. 8A and 8B, the lower plate-like work B carried in from the outside by the work conveying means 3 is transferred to the flexible sheet 2 as described above. As in the first embodiment, a plurality of portions of the work facing portion 2a of the flexible sheet 2 are partially bent by the operation control of the pressing unit 4 by the control unit 6, and the vertexes of the partially curved portions 2b are downward As shown in FIG. 8 (a), the portion of the flexible sheet 2 is formed by projecting toward, abutting, and supporting the plate-like workpiece B and gradually eliminating the partially curved portion 2b while maintaining this supported state. It is possible to receive the lower plate-like work B from the work transfer means 3 on the flexible sheet 2 only by bending and complete the loading process.
　さらに、貼り合わせが完了した両板状ワークＡ，Ｂをワーク搬送手段３によって外部へ搬出する際には、上述した実施例１と同様に、図８（ｂ）に示す如く、前記制御部６による押圧手段４の作動制御で、可撓性シート２のワーク対向部２ａの複数箇所を部分的に褶曲し、これら部分褶曲部２ｂの頂点部分で板状ワークＡ，Ｂを支えながら突出させることにより、可撓性シート２の部分褶曲のみでその上から板状ワークＡ，Ｂをワーク搬送手段３に受け渡して搬出することができる。 Furthermore, when carrying out both plate-like works A and B to which bonding has been completed to the outside by the work conveying means 3, as shown in FIG. In the operation control of the pressing means 4 according to the present invention, a plurality of portions of the work facing portion 2a of the flexible sheet 2 are partially bent, and the plate-like works A and B are supported while protruding at the apexes of these partially bent portions 2b. Thus, the plate-like workpieces A and B can be delivered to the workpiece conveyance means 3 from there and carried out only by the partial bending of the flexible sheet 2.
　また、ワーク保持手段としては、静電チャックや吸引チャックや粘着チャック又はそれらの組み合わせなどが用いられる。
　可撓性シート２のワーク対向部２ａに吸引チャックを設ける場合には、例えば図９に示す如く、この吸引チャックが配置される箇所に前記裏打板２ｃを固着して、これら可撓性シート２のワーク対向部２ａと裏打板２ｃに亘って通気孔２ｅを貫通開穿し、この通気孔２ｅに真空路２ｆを配管することにより、可撓性シート２に開穿した通気孔２ｅが、該可撓性シート２の弾性変形に伴って広がらないようにするとともに、該通気孔２ｅを通して板状ワークＢ又は貼り合わされた二枚の板状ワークＡ，Ｂが可撓性シート２に対して移動不能に吸着保持されるようにすることが好ましい。 Further, as the workpiece holding means, an electrostatic chuck, a suction chuck, an adhesive chuck, a combination thereof, or the like is used.
In the case where a suction chuck is provided on the workpiece facing portion 2a of the flexible sheet 2, for example, as shown in FIG. 9, the backing plate 2c is fixed to the location where the suction chuck is disposed. The vent hole 2e is pierced through the workpiece facing portion 2a and the backing plate 2c, and the vacuum passage 2f is piped to the vent hole 2e, whereby the vent hole 2e opened in the flexible sheet 2 is The flexible sheet 2 is prevented from spreading along with the elastic deformation, and the plate-like work B or the two plate-like works A and B bonded together move relative to the flexible sheet 2 through the air holes 2e. It is preferable to be able to be incapable of being adsorbed and held.
　それにより、可撓性シート２の漏れを防止しつつ該可撓性シート２に対する板状ワークＡ，Ｂの位置ズレを防止できるという利点がある。 Thereby, there is an advantage that positional deviation of the plate-like works A and B with respect to the flexible sheet 2 can be prevented while preventing leakage of the flexible sheet 2.
　なお、前示実施例では、本発明のワーク搬送装置を使用した真空貼り合わせ方法として真空ラミネート装置や液晶ディスプレーなどの真空基板貼り合わせ装置の場合を説明したが、これに限定されず、搬入された二枚の板状ワークＡ，Ｂが可撓性シート２を用いて真空状に貼り合わされるものであれば、他の装置であっても良い。
　さらに、押圧手段４の具体例として、可撓性シート２と接触する先端部４ａを往復移動させたが、これに限定されず、例えは圧縮空気などの流体を用いて、可撓性シート２の一部を押圧し部分的に褶曲させても良い。 In addition, although the case of vacuum substrate bonding apparatuses, such as a vacuum laminating apparatus and a liquid crystal display, was demonstrated as a vacuum bonding method which used the workpiece conveyance apparatus of this invention in the above-mentioned Example, it is not limited to this, Other apparatuses may be used as long as the two plate-like works A and B are vacuum bonded using the flexible sheet 2.
Furthermore, although the tip 4a in contact with the flexible sheet 2 is reciprocated as a specific example of the pressing means 4, the present invention is not limited to this, for example, using a fluid such as compressed air, the flexible sheet 2 It is possible to press a part of the part to partially bend it.
符号の説明Explanation of sign
　Ａ，Ｂ　板状ワーク　　　　　　　　　Ｃ　シール材
　Ｓ１，Ｓ２　空間　　　　　　　　　　Ｓ３　隙間
　１　平滑部材（定盤）　　　　　　　　１ａ　平滑面
　２　可撓性シート　　　　　　　　　　２ａ　ワーク対向部
　２ｂ　部分褶曲部　　　　　　　　　　２ｃ　裏打板
　２ｄ　枠体　　　　　　　　　　　　　２ｅ　通気孔
　２ｆ　真空路　　　　　　　　　　　　３　ワーク搬送手段
　３ａ　受け渡し用ハンド　　　　　　　４　押圧手段
　４ａ　先端部　　　　　　　　　　　　４ｂ　駆動源
　４ｃ　支持部　　　　　　　　　　　　５ａ，５ｂ　真空チャンバ
　５ｃ　環状シール部　　　　　　　　　５ｄ，５ｅ　通気路
　５ｆ　圧力調整部　　　　　　　　　　５ｇ　開閉用駆動源
　６　制御部　　　　　　　　　　　　　７，８　発熱体 A, B Plate-like work C Sealing material S1, S2 Space S3 Clearance 1 Smooth member (surface plate) 1a Smooth surface 2 Flexible sheet 2a Work facing part 2b Partially curved part 2c Backing plate 2d Frame 2e Air hole 2f Vacuum path Reference Signs List 3 work transfer means 3a delivery hand 4 pressing means 4a tip 4b drive source 4c support portion 5a, 5b vacuum chamber 5c annular seal portion 5d, 5e air passage 5f pressure adjustment portion 5g drive source for opening and closing 6 control portion 7, 8 heat generation body

Claims (5)

  1. ワーク搬送手段で搬入・搬出される板状ワークをワーク保持テーブルに受け渡すワーク搬送装置であって、
    　前記ワーク保持テーブルに設けられる可撓性シートと、この可撓性シートの一部を前記板状ワークへ向け部分的に押圧する押圧手段と、この押圧手段を作動制御する制御部とを備え、
    　この制御部は、前記押圧手段で前記可撓性シートを押圧して部分的に褶曲させ、この部分褶曲部が前記ワーク搬送手段で搬送される前記板状ワークに届くようにしたことを特徴とするワーク搬送装置。     A work transfer apparatus for transferring a plate-like work carried in / out by a work transfer means to a work holding table, comprising:
    The flexible sheet provided on the work holding table, pressing means for partially pressing the part of the flexible sheet toward the plate-like work, and a control unit for controlling operation of the pressing means.
    The control unit causes the pressing means to press the flexible sheet so as to partially bend the flexible sheet so that the partial curved portion reaches the plate-like work conveyed by the work conveying means. Work transport device.
  2. 前記押圧手段の先端部を前記可撓性シートへ向けて突出するように湾曲形成した請求項１記載のワーク搬送装置。 The work conveying apparatus according to claim 1, wherein the tip portion of the pressing means is formed to be curved so as to protrude toward the flexible sheet.
  3. 前記可撓性シートの前記押圧手段と対向する部分に裏打板を部分的に固着した請求項１記載のワーク搬送装置。 The work conveying apparatus according to claim 1, wherein a backing plate is partially fixed to a portion of the flexible sheet facing the pressing means.
  4. 前記可撓性シートと前記裏打板に亘って通気孔を貫通開穿した請求項３記載のワーク搬送装置。 The workpiece transfer apparatus according to claim 3, wherein an air vent is pierced through the flexible sheet and the backing plate.
  5. 請求項１～４の何れか一つに記載のワーク搬送装置を真空チャンバ内に配置し、この真空チャンバの内部に前記ワーク搬送手段で二枚の前記板状ワークを搬送し、前記可撓性シートを挟んで形成される二つの空間の気圧差により、前記両板状ワークを真空状態にて貼り合わせた後に、これら貼り合わされた両板状ワークを前記ワーク搬送手段で前記真空チャンバの外部へ搬送することを特徴とする真空貼り合わせ方法。 The work transfer apparatus according to any one of claims 1 to 4 is disposed in a vacuum chamber, and the two plate-like works are transferred to the inside of the vacuum chamber by the work transfer means, and the flexibility is set. After the two plate-like workpieces are bonded in a vacuum state by the pressure difference between the two spaces formed by sandwiching the sheet, the bonded plate-like workpieces are transferred to the outside of the vacuum chamber by the workpiece transfer means. A vacuum bonding method characterized by conveying.
PCT/JP2009/052701 2009-02-17 2009-02-17 Work transfer apparatus and vacuum bonding method WO2010095215A1 (en)

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CN103715125A (en) * 2012-09-28 2014-04-09 株式会社日立高新技术 Plate-shaped member holding mechanism, substrate bonding device and substrate bonding method
JP2016212277A (en) * 2015-05-11 2016-12-15 株式会社日立製作所 Ultraviolet irradiation apparatus, and base plate assembly system
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