WO2010023706A1

WO2010023706A1 - Quadrupole mass spectrometer and adjusting method therefor

Info

Publication number: WO2010023706A1
Application number: PCT/JP2008/002289
Authority: WO
Inventors: 水谷司朗
Original assignee: 株式会社島津製作所
Priority date: 2008-08-25
Filing date: 2008-08-25
Publication date: 2010-03-04
Also published as: JPWO2010023706A1; JP5152335B2

Abstract

A conventional quadrupole mass spectrometer required to set a threshold voltage in a discriminator (52) of a detection circuit portion (5) high because the radiation noise from a quadrupole mass filter (2) to which a high-frequency voltage is applied comes into an ion detector (3). Therefore, amplitudes in high-frequency voltage generating sections (41, 44) for generating high-frequency voltages applied to rod electrodes (21 to 24) are adapted to be adjustable. The two high-frequency voltage derived radiation noises coming into the ion detector (3) can negate each other by properly adjusting the amplitudes of the high-frequency voltages in mutually opposite phases to reduce a high-frequency noise appearing in an output signal of the ion detector (3). With this, the threshold voltage in the discriminator (52) can be made smaller and the voltages applied to the ion detector (3) can be suppressed to extend the life of the ion detector (3).

Description

Quadrupole mass spectrometer and method for adjusting quadrupole mass spectrometer

The present invention relates to a quadrupole mass spectrometer using a quadrupole mass filter as a mass separator that separates ions according to m / z values, and a method for adjusting the quadrupole mass spectrometer.

In a quadrupole mass spectrometer, various ions generated from a sample are introduced into a quadrupole mass filter, and only ions having a specific mass (strictly m / z) are selectively passed through. The detected ions are detected by an ion detector, and a signal corresponding to the amount of ions is acquired. The mass of ions that can pass through the quadrupole mass filter depends on the high-frequency voltage and the DC voltage applied to the rod electrode. Therefore, by scanning the voltage applied to the rod electrode within a predetermined range, the mass of ions passing through the quadrupole mass filter is scanned over the predetermined mass range, and based on the signal obtained by the ion detector at that time. Thus, a mass spectrum having the horizontal axis as m / z and the vertical axis as the ion intensity can be created.

As an ion detector for a mass spectrometer, roughly divided, a direct current type detector that measures an average value and an integral value of an ion current, a pulse count type detector that counts the number of reached ions as a pulse signal, Is known (see

Patent Documents

1 and 2, etc.). In general, the former DC type detector is often used. However, when the signal intensity is low and the chemical noise is small, the latter pulse count type is advantageous for measuring the amount of minute ions. A detector is used. For example, in LC / MS / MS that performs MS / MS analysis (also referred to as tandem analysis) of components in a sample solution separated by liquid chromatography, a pulse count type detector is often used.

FIG. 5 shows a schematic configuration of a pulse count type detector disclosed in Patent Document 3 and the like. The ions are first incident on the conversion dynode 31 in the ion detector 3 to be converted into electrons, and the electrons are introduced into a secondary electron multiplier (EM) 32, and the number of electrons is multiplied to correspond to each electron. A signal is output. The peak value of the pulse-like output signal from the secondary electron multiplier 32 is amplified by the preamplifier 51 in the detection circuit unit 5 at the subsequent stage, and further, the peak value of the pulse signal is smaller than the predetermined threshold voltage VTL by the discriminator 52. After being removed as noise, the waveform is shaped. In this example, as described in FIG. 5, the output signal pulse from the secondary electron multiplier 32 is generated downward (negative direction) from the baseline. The noise-removed pulse signal is input to the counting unit 53, and the counting unit 53 counts the pulse signal obtained within a certain time width, and the count value is detection data corresponding to the number of ions incident on the ion detector 3. Is output as

A high voltage (hereinafter referred to as “detector voltage”) is applied to the secondary electron multiplier 32 in order to multiply electrons, and the peak value of the output signal pulse depends on the detector voltage. If the detector voltage is too low, the peak value of the output signal pulse from the secondary electron multiplier 32 is small, and the number of ions cannot be accurately counted. On the other hand, if the detector voltage is increased too much, the life of the secondary electron multiplier 32 is shortened. For this reason, in general, a plateau region (a region where the count value is substantially constant with respect to changes in the detector voltage) in a state where an appropriate threshold voltage VTL is set so that noise can be accurately removed by the discriminator 52. The detector voltage is set to operate at FIG. 6 is a diagram showing an example of the relationship between the detector voltage and the count value. In this example, the range of about 2.2 to 2.9 [kV] is the plateau region.

However, in practice, it is difficult to set a threshold voltage VTL that appropriately removes noise when the detector voltage is appropriately suppressed so as to extend the life of the secondary electron multiplier 32. As the cause, the inventor of the present application focused on the high frequency noise superimposed on the output signal from the secondary electron multiplier 32. That is, in general, in a quadrupole mass spectrometer, a quadrupole mass filter to which a high-frequency voltage having a relatively large amplitude is applied and an ion detector are arranged close to each other. Radiation noise derived from voltage jumps into the secondary electron multiplier, and noise having a high frequency component (hereinafter referred to as “high frequency noise”) is superimposed on the output signal obtained from the secondary electron multiplier. FIG. 7 shows an output signal waveform of the ion detector in a state where such high frequency noise is superimposed.

In the pulse count type detector, since the signal rise characteristic is important, the preamplifier 51 of the detection circuit unit 5 is required to have a wide band characteristic, and a high-frequency cut-off filter or the like cannot be inserted. Therefore, it is difficult to remove the high-frequency noise as described above in a circuit. If the threshold voltage VTL of the discriminator 52 is set large so that such high-frequency noise can be removed, the detector voltage when operating in the plateau region becomes too high, and the life of the secondary electron multiplier may be shortened. is there.

In other words, when a pulse-count detector is used in a conventional quadrupole mass spectrometer, if the detector voltage is kept low in order to extend the life of the secondary electron multiplier, the counting efficiency is reduced and the analysis is performed. Sensitivity is lowered, or noise cannot be sufficiently removed, and analysis accuracy is lowered. On the other hand, in order to increase analysis sensitivity and analysis accuracy, the detector voltage is increased to sacrifice the life of the secondary electron multiplier.

On the other hand, when a DC detector is used in a quadrupole mass spectrometer, if chemical noise is ignored, noise in the electrical circuit after the ion detector becomes noise contributing to S / N. The high frequency noise as described above becomes an obstacle when improving the S / N ratio.

JP-A-6-118176 JP-A-9-251079 JP-A-6-267497

The present invention has been made in order to solve the above-mentioned problems, and its main purpose is noise superimposed on an output signal of an ion detector in a quadrupole mass spectrometer using a pulse count type detector. Quadrupole mass spectrometry that can reduce the threshold voltage of the discriminator and reduce the detector voltage as much as possible, thereby ensuring both analytical sensitivity and accuracy and extending the life of the ion detector. The present invention provides an apparatus and a method for adjusting a quadrupole mass spectrometer.

Another object of the present invention is to improve the S / N ratio by suppressing noise superimposed on the output signal of the ion detector in a quadrupole mass spectrometer using a DC detector. An object of the present invention is to provide a method for adjusting a quadrupole mass spectrometer and a quadrupole mass spectrometer.

In order to solve the above problems, a first invention is a quadrupole mass filter including four rod electrodes disposed so as to surround an ion optical axis, and an ion of the four rod electrodes. A set of two electrodes facing each other across the optical axis is applied to two sets of electrodes adjacent to each other around the ion optical axis as a superposition of a high-frequency voltage whose phase is reversed and a DC voltage whose polarity is reversed. In a quadrupole mass spectrometer comprising a voltage generator and an ion detector that detects ions that have passed through the quadrupole mass filter,
The voltage generator includes an adjusting unit capable of independently adjusting the amplitude value of the high-frequency voltage whose phase is inverted, and is guided to the ion detector by adjusting the balance between the amplitude values of the two high-frequency voltages by the adjusting unit. High frequency noise can be reduced.

In order to solve the above problems, a second invention is a quadrupole mass filter including four rod electrodes arranged so as to surround an ion optical axis, and an ion of the four rod electrodes. A set of two electrodes facing each other across the optical axis is applied to two sets of electrodes adjacent to each other around the ion optical axis as a superposition of a high-frequency voltage whose phase is reversed and a DC voltage whose polarity is reversed. An adjustment method in a quadrupole mass spectrometer comprising: a voltage generator; and an ion detector that detects ions that have passed through the quadrupole mass filter,
An adjustment means is provided in the voltage generator, which can independently adjust the amplitude value of the high-frequency voltage whose phase is inverted, and the ion detector is adjusted to balance the amplitude value of the two high-frequency voltages by the adjustment means. It is characterized by reducing induced high frequency noise.

In the first invention and the second invention, when the voltage generator includes a high-frequency voltage generator and an LC resonance circuit that amplifies the amplitude of the high-frequency voltage generated by the high-frequency voltage generator, The adjusting means is means for adjusting the amplitude of the voltage generated by the high-frequency voltage generator, or means for adjusting the value of the L (inductance) component or C (capacitor) component that affects the Q value of the LC resonance circuit, etc. And it is sufficient. Specifically, in the latter case, an inductance variable coil or a capacitance variable capacitor may be used. On the other hand, in the former case, the amplitude may be adjusted in an analog manner using, for example, a variable resistor, but the high frequency voltage generator reads a digitized voltage value (or a digital signal processing circuit), In the case of a D / A converter, a power amplifier, or the like, the amplitude can be adjusted digitally in a CPU or a digital signal processing circuit.

In the output signal of the ion detector, the manifestation status of radiation noise derived from the high frequency voltage applied to the rod electrode of the quadrupole mass filter is the distance between the quadrupole mass filter and the ion detector, the positional relationship between the two, The arrangement and material of surrounding members mainly depend on the configuration and structure. Since the phase of the high frequency voltage applied to the two pairs of rod electrodes is opposite to each other, if radiation noise derived from both of the high frequency voltages jumps into the ion detector equally, both radiations The noise should cancel out. In other words, it is considered that high-frequency noise appears in the output signal of the ion detector when one of both radiation noises is larger than the other depending on the configuration / structure. Therefore, in the first invention and the second invention, by intentionally changing the balance of the amplitude of the high frequency voltage applied to the two sets of rod electrodes, both radiation noises jumping into the ion detector cancel each other.

Of course, the high-frequency voltage applied to the rod electrode affects the mass of ions that pass through the quadrupole mass filter, so if you change the amplitude of the high-frequency voltages that are out of phase with each other, the behavior of ions passing through May be affected. Therefore, it is preferable that the adjustment by the adjusting means is possible within a range without such influence. As described above, since the expression of radiation noise derived from high-frequency voltage in the output signal of the ion detector mainly depends on the configuration and structure, the balance adjustment of the amplitude values of the two high-frequency voltages by the adjusting means is the main adjustment. A manufacturer that manufactures the quadrupole mass spectrometer according to the invention may be performed at the final stage of apparatus adjustment. Of course, the appearance of radiation noise derived from a high-frequency voltage is also affected by subsequent factors such as the degree of contamination of the rod electrode, so the adjustment means may be adjusted on the user side.

According to a third aspect of the present invention, there is provided a quadrupole mass filter including four rod electrodes disposed so as to surround an ion optical axis, and an ion of the four rod electrodes. A set of two electrodes facing each other across the optical axis is applied to two sets of electrodes adjacent to each other around the ion optical axis as a superposition of a high-frequency voltage whose phase is reversed and a DC voltage whose polarity is reversed. In a quadrupole mass spectrometer comprising a voltage generator and an ion detector that detects ions that have passed through the quadrupole mass filter,
a) high frequency induction means for inducing radiated electromagnetic waves derived from the high frequency voltage generated by the voltage generator;
b) a computing means for adding a high frequency signal obtained by the high frequency induction means to the output signal of the ion detector or subtracting it from the output signal to reduce high frequency noise superimposed on the output signal;
It is characterized by having.

In the quadrupole mass spectrometer according to the third invention, the high-frequency induction means includes, for example, a resistor, a capacitor, a coil, and the like, and is disposed in the vicinity of the high-frequency voltage output terminal of the voltage generator. When the high frequency induction means receives radiation energy derived from a high frequency voltage, a high frequency signal is induced in the high frequency induction means. The phase of the high-frequency signal is determined by the positional relationship between the high-frequency induction means and the voltage generator (high-frequency voltage output terminal), and is usually in phase with or opposite to the high-frequency noise superimposed on the output signal of the ion detector. Either. If the phase is the same, an operation unit that performs subtraction may be prepared, and if the phase is reversed, an operation unit that performs addition may be prepared. The arithmetic means includes an amplifier that amplifies the high-frequency signal so that the high-frequency signal induced by the high-frequency induction means and the high-frequency noise have substantially the same amplitude.

In the quadrupole mass spectrometer according to the third aspect of the invention, high frequency noise is superimposed on the output signal of the ion detector, but the high frequency noise is canceled out by the computing means, and the noise level is lowered. In the case of the pulse count type detector, the signal after the high frequency noise is reduced by the computing means is input to the discriminator, and the pulsed noise other than the high frequency noise is removed.

For example, when there is a phase lag or phase advance in a circuit such as a preamplifier or a high-frequency induction unit in the subsequent stage of the ion detector, the high-frequency noise and the high-frequency signal are in phase at the time of addition or subtraction by the calculation unit Or it may not be out of phase. In that case, the phase for correcting the phase so that the phase of the high-frequency signal obtained by the high-frequency induction means is the same as or opposite to the phase of the high-frequency noise superimposed on the output signal of the ion detector. What is necessary is just to set it as the structure further provided with a correction means. As the phase correction means, an RC filter circuit using a resistor and a capacitor is used, and the phase shift can be adjusted by changing the resistance value or the capacitance.

According to the quadrupole mass spectrometer according to the first and third inventions and the adjustment method of the quadrupole mass spectrometer according to the second invention, the high-frequency voltage applied to the rod electrode of the quadrupole mass filter The high frequency noise that appears in the output signal of the ion detector due to the above can be reduced. As a result, when a pulse count type detector is used, the threshold voltage of the discriminator for noise removal can be reduced. As a result, the detector voltage for operating the ion detector in the plateau region is also reduced. You don't have to make it big. Therefore, the lifetime of the ion detector (secondary electron multiplier) can be extended to increase the reliability of the apparatus and reduce the analysis cost. At the same time, it is possible to reduce counting omission of ions incident on the ion detector and prevent erroneous counting due to noise, thereby improving analysis sensitivity and analysis accuracy.

In the case of using a DC detector, the S / N ratio is improved by reducing the high frequency noise appearing in the output signal of the ion detector, and the analysis sensitivity and accuracy can be improved.

The block diagram of the principal part of the quadrupole-type mass spectrometer which is one Example of this invention. The figure which shows an example of a structure of a high frequency voltage generation part. The block diagram of the principal part of the quadrupole-type mass spectrometer which is another Example of this invention. The block diagram of the principal part of the quadrupole-type mass spectrometer which is another Example of this invention. The schematic block diagram of the conventional general pulse count type | mold detector. The figure which shows an example of the relationship between a detector voltage and a count value. The figure which shows the output signal waveform of the ion detector of a state with which the high frequency noise was superimposed.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Ion source 2 ... Quadrupole mass filter 21-24 ... Rod electrode 3 ... Ion detector 31 ... Conversion dynode 32 ... Secondary electron multiplier 4 ... Quadrupole

voltage generation part

41, 44 ... High frequency voltage generation part 411 ... Control circuit 412 ... Voltage value data table 413 ... Digital / analog converter 414 ...

Power amplifiers

42, 43 ...

DC voltage generators

45, 47 ...

Coils

46, 48 ... Capacitor 49 ... Control unit 5 ... Detection circuit unit 51 ... Preamplifier 52 ... discriminator 53 ... counter 54 ... high frequency induction unit 55 ... high frequency amplifier 56 ... adder

[First embodiment]
A quadrupole mass spectrometer that is an embodiment of the present invention (hereinafter referred to as “first embodiment”) will be described in detail with reference to the accompanying drawings. FIG. 1 is a configuration diagram of a main part of the quadrupole mass spectrometer. In the figure, the same components as those already described in FIG. 5 are denoted by the same reference numerals, and detailed description thereof is omitted.

In the quadrupole mass spectrometer of the present embodiment, molecules and atoms in the target sample are ionized by the ion source 1 and are constituted by four rod electrodes 21 to 24 arranged so as to surround the ion optical axis C. The quadrupole mass filter 2 is introduced. As shown in FIG. 1, the four rod electrodes 21 to 24 are connected as a pair of two electrodes facing each other across the ion optical axis C, and two rod electrodes (one set of

reference numerals

21 and 23, Different voltages are applied from the quadrupole voltage generator 4 to one set of

reference numerals

22 and 24. Of the various ions introduced into the quadrupole mass filter 2, only ions having a specific mass (strictly m / z) corresponding to the voltage applied to the rod electrodes 21 to 24 are included in the quadrupole mass filter 2. , And reaches the ion detector 3, and other ions diverge on the way.

The quadrupole voltage generator 4 includes

DC voltage generators

42 and 43, high

frequency voltage generators

41 and 44, an LC resonance circuit including a coil 45 and a capacitor 46, and an LC resonance circuit including a coil 47 and a capacitor 48. The

DC voltage generators

42 and 43 generate DC voltages + U and −U, respectively, and the voltage values are controlled by the controller 49. The high-

frequency voltage generators

41 and 43 basically generate high-frequency voltages v · cosωt and −v · cosωt, respectively, and their amplitudes are controlled by the control unit 49. The high frequency voltage v · cos ωt generated by the high frequency voltage generator 41 is amplified to V · cos ωt by the LC resonance circuit and added to the direct current voltage + U generated by the direct current voltage generator 42 to obtain a rod as U + V · cos ωt. Applied to the

electrodes

21, 23. Further, the high frequency voltage −v · cos ωt generated by the high frequency voltage generator 44 is amplified to −V · cos ωt by the LC resonance circuit, and is added to the DC voltage −U generated by the DC voltage generator 43 to obtain − It is applied to the

rod electrodes

22 and 24 as (U + V · cosωt). Since the mass of ions passing through the quadrupole mass filter 2 depends on U and V (or v), when performing mass scanning, the control unit 49 causes U and V to change within a predetermined range. The voltage generators 41 to 44 are controlled.

Although not shown here for the sake of complexity, each of the rod electrodes 21 to 24 includes, in addition to the above-described ion selection voltage, an ion source 1 in the front stage, an ion lens (not shown), or a rear stage. In general, an appropriate DC bias voltage is applied in order to appropriately guide ions by a DC potential difference with an ion detector or an aperture electrode (not shown).

In the conventional quadrupole mass spectrometer, the high-frequency voltage + V · cos ωt and −V · cos ωt have the same amplitude and the inverted phase, whereas the quadrupole mass analysis of the present embodiment. In the apparatus, the amplitude of the high-frequency voltage generated by the two high-

frequency voltage generators

41 and 44 can be adjusted within a predetermined range. That is, (v + Δv1) · cosωt is generated in the high-frequency voltage generation unit 41, and − (v + Δv2) · cosωt is generated in the high-frequency voltage generation unit 44, and Δv1 and Δv2 can be adjusted within a predetermined range. The Δv1 and Δv2 can be adjusted by a variable resistor, for example, but here, digital adjustment is performed as follows.

FIG. 2 is a diagram showing a schematic configuration of the high-

frequency voltage generators

41 and 44. The control circuit 411 includes a digital signal processing circuit such as a CPU or FPGA (Field Programmable Gate Gate Array), reads out data stored in the voltage value data table 412 at predetermined time intervals, and performs a digital / analog converter (DAC). To 413. The DAC 413 converts the input data into an analog voltage value, and the power amplifier 414 amplifies it and outputs it.

That is, in this configuration, the amplitude of the high-frequency voltage is determined by data read from the voltage value data table 412 and sent to the DAC 413 in the control circuit 411. Therefore, for example, the control circuit 411 is configured to multiply the data read from the voltage value data table 412 by a predetermined adjustment coefficient, and the adjustment coefficient can be set within a predetermined range, thereby adjusting the amplitude of the high-frequency voltage. Can do. Of course, analog adjustment such as adjusting the gain of the power amplifier 414 with a variable resistor is also possible.

In addition, by adjusting the Q value of the LC oscillation circuit instead of adjusting the amplitude of the high-frequency voltage generated by the high-

frequency voltage generators

41 and 44, the amplitudes of the two high-frequency voltages can be adjusted in the same manner as described above. It is. The Q value of the LC oscillation circuit can be adjusted by adjusting the inductances of the

coils

45 and 47, or by adjusting the capacitances of the

capacitors

46 and 48, respectively.

When any one of the above-described configurations is used, the amplitude of the high-frequency voltage applied to the

rod electrodes

21 and 23 and the amplitude of the high-frequency voltage applied to the

rod electrodes

22 and 24 are not the same, and are adjusted appropriately. The magnitude of radiation noise that jumps into the ion detector 3 changes. Therefore, for example, the manufacturer of the apparatus monitors the output signal of the ion detector 3 as shown in FIG. 7 while monitoring the output signal of the ion detector 3 as shown in FIG. 7, and minimizes the high-frequency noise superimposed on the output signal. Adjust the balance of the amplitude of the high frequency voltage. As a result, high frequency noise in the output signal is reduced, so that sufficient noise removal can be performed even if the threshold voltage VTL is reduced by the discriminator 52.

[Second Embodiment]
Next, a quadrupole mass spectrometer according to a second embodiment of the present invention will be described with reference to FIG. In FIG. 3, the same components as those already described in FIGS. 1 and 5 are denoted by the same reference numerals, and detailed description thereof is omitted.

In the quadrupole mass spectrometer of the first embodiment, the high-frequency noise that appears in the output signal of the ion detector 3 is reduced by adjusting the voltage applied to the quadrupole mass filter 2. In the embodiment, high-frequency noise appearing in the output signal of the ion detector 3 is reduced by canceling the detection circuit unit 5.

In the quadrupole mass spectrometer of the second embodiment, the detection circuit unit 5 includes a high frequency (RF) induction unit 54, a high frequency amplifier 55 whose amplification degree can be adjusted, and an adder (or subtractor) 56. And comprising. The high frequency induction unit 54 includes, for example, a resistor, a capacitor, and a coil, and detects electromagnetic waves derived from a high frequency voltage radiated from the quadrupole voltage generation unit 4, particularly from the high frequency voltage output end of the quadrupole voltage generation unit 4. Induces high frequency current. The phase of the high-frequency current depends on the installation position of the high-frequency induction unit 54 and the like. Here, it is assumed that the phase of the induced high frequency current is opposite to the high frequency noise superimposed on the output signal of the ion detector 3.

The high-frequency amplifier 55 converts the high-frequency current into current / voltage and amplifies it with an appropriate amplification degree. When the amplified high-frequency signal is added to the output signal of the preamplifier 51 in the adder 56, the high-frequency signal and the high-frequency noise superimposed on the output signal are opposite in phase, so that they cancel each other. For example, in the final adjustment stage of the manufacturer of the device, the amplification degree of the high frequency amplifier 55 is adjusted while monitoring the output signal of the adder 56 so that the high frequency noise is minimized. In this manner, the high frequency noise superimposed on the output signal of the ion detector 3 can be reduced before the discriminator 52.

Depending on the installation position of the high-frequency induction unit 54, the phase of the high-frequency current induced in the high-frequency induction unit 54 is the same as the high-frequency noise superimposed on the output signal of the ion detector 3. In this case, if a subtracter is used instead of the adder 56, the high frequency noise can be canceled in the same manner as described above.

When the phase of the high-frequency current detected by the high-frequency induction unit 54 is in phase or anti-phase with the high-frequency noise superimposed on the output signal of the ion detector 3, the above configuration may be used, but it is not in phase or anti-phase In some cases, high frequency noise cannot be removed even if subtraction or addition is performed as it is. Such a phase shift is often caused by a phase around a circuit such as the preamplifier 51, the high frequency induction unit 54, and the high frequency amplifier 55. Therefore, if there is such a phase shift, a phase correction unit 57 is inserted between the high-frequency amplifier 55 and the adder (or subtractor) 56 as shown in FIG. The phase correction unit 57 can be an RC filter circuit using a resistor and a capacitor, for example, and the phase shift amount can be adjusted by using a variable resistor. After the phase of the high-frequency signal is adjusted to the same or opposite phase as the high-frequency noise by the phase correction unit 57, the high-frequency noise can be appropriately canceled by appropriately adjusting the amplification degree by the high-frequency amplifier 55.

In each of the above embodiments, a pulse count type detector is used to detect ions. However, an arithmetic process for integrating or averaging the ion current obtained by the secondary electron multiplier 32 within a predetermined time is executed. Even when a direct current detector is used, the same method can be applied. In that case, the output of the preamplifier 51 or the output of the adder 56 may be directly introduced into a hardware circuit such as a CPU or an integrator in the detection circuit unit 5 for processing.

Further, the above-described embodiment is merely an example of the present invention, and it is obvious that even if changes, modifications, and additions are made as appropriate within the scope of the present invention, they are included in the scope of the claims of the present application. For example, in the above embodiment, the present invention is applied to a quadrupole mass spectrometer having a simple configuration. However, as long as the mass spectrometer uses a quadrupole mass filter, a triple quadrupole is required. The application range is not particularly limited, such as a type mass spectrometer, a gas chromatograph mass spectrometer, and a liquid chromatograph mass spectrometer.

Claims

A quadrupole mass filter composed of four rod electrodes arranged so as to surround the ion optical axis and two electrodes facing each other across the ion optical axis of the four rod electrodes as one set A voltage generator for applying a high-frequency voltage whose phase is reversed and a DC voltage whose polarity is reversed to two sets of electrodes adjacent to each other around the ion optical axis, and ions that have passed through the quadrupole mass filter A quadrupole mass spectrometer having an ion detector for detecting
Adjusting means capable of independently adjusting the amplitude value of the high-frequency voltage whose phase is inverted in the voltage generating section, and reducing the high-frequency noise induced in the ion detector by adjusting the amplitude value balance by the adjusting means A quadrupole mass spectrometer characterized by being made possible.
A quadrupole mass filter composed of four rod electrodes arranged so as to surround the ion optical axis and two electrodes facing each other across the ion optical axis of the four rod electrodes as one set A voltage generator for applying a high-frequency voltage whose phase is reversed and a DC voltage whose polarity is reversed to two sets of electrodes adjacent to each other around the ion optical axis, and ions that have passed through the quadrupole mass filter An adjustment method in a quadrupole mass spectrometer comprising:
An adjustment means is provided in the voltage generator, which can independently adjust the amplitude value of the high-frequency voltage whose phase is inverted, and the ion detector is adjusted to balance the amplitude value of the two high-frequency voltages by the adjustment means. A method for adjusting a quadrupole mass spectrometer characterized by reducing induced high frequency noise.
A quadrupole mass filter composed of four rod electrodes arranged so as to surround the ion optical axis and two electrodes facing each other across the ion optical axis of the four rod electrodes as one set A voltage generator for applying a high-frequency voltage whose phase is reversed and a DC voltage whose polarity is reversed to two sets of electrodes adjacent to each other around the ion optical axis, and ions that have passed through the quadrupole mass filter In a quadrupole mass spectrometer having an ion detector for detecting
a) high frequency induction means for inducing radiated electromagnetic waves derived from the high frequency voltage generated by the voltage generator;
b) a computing means for adding a high frequency signal obtained by the high frequency induction means to the output signal of the ion detector or subtracting it from the output signal to reduce high frequency noise superimposed on the output signal;
A quadrupole mass spectrometer.
The quadrupole mass spectrometer according to claim 3,
Phase correction means for correcting the phase is further provided so that the phase of the high frequency signal obtained by the high frequency induction means is the same as or opposite to the phase of the high frequency noise superimposed on the output signal of the ion detector. A quadrupole mass spectrometer characterized by that.