WO2004055377A1

WO2004055377A1 - Vacuum pumping system and method of operating a vacuum pumping arrangement

Info

Publication number: WO2004055377A1
Application number: PCT/GB2003/005380
Authority: WO
Inventors: Nigel Paul Schofield
Original assignee: The Boc Group Plc
Priority date: 2002-12-17
Filing date: 2003-12-09
Publication date: 2004-07-01
Also published as: JP2006509955A; AU2003288452A1; US20060153715A1; KR20050084359A; EP1573205B1; GB0229353D0; JP4567462B2; EP1573205A1; TW200420837A; DE60334732D1; TWI353419B; ATE486221T1; US7896625B2

Abstract

A vacuum pumping system comprises a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising turbomolecular pumping means; and a backing pumping mechanism. The drive shaft drives said molecular pumping mechanism and said backing pumping mechanism. The system also comprises evacuation means, such as a load lock pump, for evacuating at least., said turbomolecular pumping means.

Description

VACUUM PUMPING SYSTEM AND

METHOD OF OPERATING A VACUUM PUMPING ARRANGEMENT

The present invention relates to a vacuum pumping system comprising

a vacuum pumping arrangement and a method of operating a vacuum

pumping arrangement.

A known vacuum pumping arrangement for evacuating a chamber comprises a molecular pump which may include: molecular drag pumping

means; or turbomolecular pumping means; or both molecular drag pumping

means and turbomolecular pumping means. If both pumping means are included the turbomolecular pumping means are connected in series with the molecular drag pumping means. The pumping arrangement is capable of

evacuating the chamber to very low pressures in the region of lxlO^"6 mbar.

The compression ratio achieved by the molecular pump is not sufficient to achieve such low pressures whilst at the same time exhausting to atmosphere

and therefore a backing pump is provided to reduce pressure at the exhaust of

the molecular pump and hence permit very low pressures to be achieved at the inlet thereof.

The turbomolecular pumping means of a molecular pump comprises a

circumferential array of angled blades supported at a generally cylindrical

rotor body. During normal operation the rotor is rotated between 20,000 and

200,000 revolutions per minute during which time the rotor blades collide

with molecules in a gas urging them towards the pump outlet. Normal operation occurs therefore at molecular flow conditions at pressures of less

than about 0.01 mbar. As it will be appreciated, the turbomolecular pumping

means does not work effectively at high pressures, at which the angled rotor

blades cause undesirable windage, or resistance to rotation of the rotor. This

problem is particularly acute at start up conditions close to or at atmospheric

pressure, when it is difficult if not impossible to rotate the rotor of the

turbomolecular pumping means at high speed. Therefore, it is desirable to evacuate the turbomolecular pumping means to relatively low pressures by

operating the backing pump before starting rotation of the molecular pump. An alternative but undesirable solution to the problem of turbo stage start-up,

would be the provision of a much more powerful motor for driving the rotor, that would be able to overcome the windage caused by the angled rotors

blades at atmospheric pressure. This solution is undesirable because, generally, a^ molecular pumpy^; especially when used in the semiconductor

processing industry, is kept running most of the time, and is shut down only

during power failures, for servicing etc. Accordingly, a powerful motor would be needed only for a relatively small amount of the pump's operating

time and therefore the increased cost of such a motor cannot be justified.

Hereto, a molecular pump and a backing pump thereof are separate

units of the same vacuum pumping arrangement, the pumps being associated

with respective drive shafts which are driven by respective motors. As

described above, it is desirable initially to operate the backing pump to

evacuate the molecular pump, prior to start-up of the molecular pump. Clearly, this would be possible only if the two pumps can be driven

separately.

It is desirable to provide an improved vacuum pumping system and

method of operating a vacuum pumping arrangement.

The present invention provides a vacuum pumping system comprising

a vacuum pumping arrangement comprising: a drive shaft; a motor for driving

said drive shaft; a molecular pumping mechanism comprising turbomolecular

pumping means; and a backing pumping mechanism, wherein said drive shaft

is for driving said molecular pumping mechanism and said backing pumping mechanism, and the system comprises evacuation means for evacuating at least said turbomolecular pumping means.

The present invention also provides a method of operating a vacuum pumping arrangement comprising: a drive shaft; a motor for driving said drive

shaft; a molecular pumping¹ mechanism comprising turbomolecular' pumping means; and a backing pumping mechanism, said drive shaft being for driving

said molecular pumping mechanism and said backing pumping mechanism,

the method comprising the steps of operating an evacuation means connected

to the arrangement to evacuate the arrangement to a predetermined pressure

and operating the motor to start rotation of the drive shaft.

Other aspects of the present invention are defined in the accompanying

claims. In order that the present invention may be well understood, some

embodiments thereof, which are given by way of example only, will now be

described with reference to the accompanying drawings, in which:

Figure 1 is a cross-sectional view of a vacuum pumping arrangement

shown schematically;

Figure 2 is an enlarged cross-sectional view of a portion of a regenerative pump of the arrangement shown in Figure 1;

Figure 3 is a diagram of a control system;

Figure 4 is a schematic representation of a vacuum pumping system;

Figure 5 is a schematic representation of another vacuum pumping

system; and

Figures 6 to 8 are cross-sectional views of further vacuum pumping

arrangements all shown schematically.

Referring to Figure 1, a vacuum pumping arrangement 10 is shown

schematically, which comprises a molecular pumping mechanism 12 and a

backing pumping mechanism 14. The molecular pumping mechanism comprises turbomolecular pumping means 16 and molecular drag, or friction,

pumping means 18. Alternatively, the molecular pumping mechanism may

comprise turbomolecular pumping means only or molecular drag pumping

means only. The backing pump 14 comprises a regenerative pumping

mechanism. A further drag pumping mechanism 20 may be associated with

the regenerative pumping mechanism and provided between drag pumping

mechanism 18 and regenerative pumping mechanism 14. Drag pumping mechanism 20 comprises three drag pumping stages in series, whereas drag

pumping mechanism 18 comprises two drag pumping stages in parallel.

Vacuum pumping arrangement 10 comprises a housing, which is

formed in three separate parts 22, 24, 26, and which houses the molecular

pumping mechanism 12, drag pumping mechanism 20 and regenerative

pumping mechanism 14. Parts 22 and 24 may form the inner surfaces of the

molecular pumping mechanism 12 and the drag pumping mechanism 20, as

shown. Part 26 may form the stator of the regenerative pumping mechanism

14. Part 26 defines a counter-sunk recess 28 which receives a lubricated bearing 30 for supporting a drive shaft 32, the bearing 30 being at a first end portion of the drive shaft associated with regenerative pumping mechanism

14. Bearing 30 may be a rolling bearing such as a ball bearing and may be lubricated, for instance with grease, because it is in a part of the pumping

arrangement 10 distal from the inlet of the pumping arrangement. The inlet of

the pumping arrangement may be in fluid connection with a semiconductor processing chamber in which a clean environment is required.

Drive shaft 32 is driven by motor 34 which as shown is supported by

parts 22 and 24 of the housing. The motor may be supported at any

convenient position in the vacuum pumping arrangement. Motor 34 is

adapted to be able to drive simultaneously the regenerative pumping

mechanism 14, and the drag pumping mechanism 20 supported thereby, and

also the molecular pumping mechanism 12. Generally, a regenerative pumping mechanism requires more power for operation than a molecular

pumping mechanism, the regenerative pumping mechanism operating at

pressures close to atmosphere where windage and air resistance is relatively

high. A molecular pumping mechanism requires relatively less power for

operation, and therefore, a motor selected for powering a regenerative

pumping mechanism is also generally suitable for powering a molecular

pumping mechanism. Means are provided for controlling the rotational

speeds of the backing pumping mechanism and the molecular pumping mechanism so that pressure in a chamber connected to, or operatively

associated with, the arrangement can be controlled. A suitable control system diagram for controlling speed of the motor 34 is shown in Figure 3 and

includes a pressure gauge 35 for measuring pressure in a chamber 33 and a controller 37 connected to the pressure gauge for controlling the pump's

rotational speed. Regenerative pumping mechanism 14 comprises a stator comprising a

plurality of circumferential pumping channels disposed concentrically about a

longitudinal axis A of the drive shaft 32 and a rotor comprising a plurality of

arrays of rotor blades extending axially into respective said circumferential

pumping channels. More specifically, regenerative pumping mechanism 14

comprises a rotor fixed relative to drive shaft 32. The regenerative pumping

mechanism 14 comprises three pumping stages, and for each stage, a

circumferential array of rotor blades 38 extends substantially orthogonally

from one surface of the rotor body 36. The rotor blades 38 of the three arrays extend axially into respective circumferential pumping channels 40 disposed

concentrically in part 26 which constitutes the stator of the regenerative

pumping mechanism 14. During operation, drive shaft 32 rotates rotor body

36 which causes the rotor blades 38 to travel along the pumping channels,

pumping gas from inlet 42 in sequence along the radially outer pumping

channel, radially middle pumping channel and radially inner pumping channel

where it is exhausted from pumping mechanism 14 via exhaust 44 at pressures close to or at atmospheric pressure.

An enlarged cross-section of a single stage of the regenerative pumping mechanism is shown in Figure 2. For efficient operation of the regenerative pumping mechanism 14, it is important that the radial clearance

"C" between rotor blades 38 and stator 26 is closely controlled, and preferably kept to no more than 200 microns or less, and preferably less than 80 microns, during operation. An increase in clearance "C" would lead to significant

seepage of gas out of pumping channel 40 and reduce efficiency of

regenerative pumping mechanism 14. Therefore, regenerative pumping

mechanism 14 is associated with the lubricated rolling bearing 30 which

substantially resists radial movement of the drive shaft 32 and hence rotor

body 36. However, if there is radial movement of the drive shaft at an end

thereof distal from the lubricated bearing 30, this may also cause radial

movement of the rotor of the regenerative pumping mechanism, resulting in

loss of efficiency. In other words, bearing 30 may act as a pivot about which

some radial movement may take place. To avoid loss of efficiency, the rotor 36 of the regenerative pumping mechanism is connected to the drive shaft 32

so as to be sufficiently close to the lubricated bearing 30 (i.e. the pivot) so that

radial movement of distal end of the drive shaft translates substantially to

axial movement of the rotor blades relative to respective circumferential

pumping channels 40. Preferably, the bearing 30 is substantially axially

aligned with the circumferential pumping channels so that any radial

movement of the rotor blades 38 does not cause significant seepage. As

shown, the stator 26 of the regenerative pumping mechanism 14 defines the

recess for the bearing 30 and the rotor body 36 is, as it will be appreciated, adjacent the stator 26. Accordingly, the bearing 30, which resists radial

movement, prevents significant radial movement of the rotor body 36 and also hence of the rotor blades 38. Therefore, clearance "C" between the rotor blades 38 and stator 26 can be kept within tolerable limits.

Extending' orthogonally from the rotor body 36 are two cylindrical •

drag cylinders 46 which together form rotors of drag pumping mechanism 20.

The drag cylinders 46 are made from carbon fibre reinforced material which is

both strong and light. The reduction in mass when using carbon fibre drag

cylinders, as compared with the use of aluminium drag cylinders, produces

less inertia when the drag pumping mechanism is in operation. Accordingly,

the rotational speed of the drag pumping mechanism is easier to control.

The drag pumping mechanism 20 shown schematically is a Holweck

type drag pumping mechanism in which stator portions 48 define a spiral

channel between the inner surface of housing part 24 and the drag cylinders 46. Three drag stages are shown, each of which provides a spiral path for gas

flow between the rotor and the stator. The operation and structure of a

Holweck drag pumping mechanism is well known. The gas flow follows a

tortuous path flowing consecutively through the drag stages in series.

The molecular pumping mechanism 12 is driven at a distal end of

drive shaft 32 from the regenerative pumping mechanism 14. A back up

bearing may be provided to resist extreme radial movement of the drive shaft

32 during, for instance, power failure. As shown, the lubricant free bearing is a magnetic bearing 54 provided between rotor body 52 and a cylindrical

portion 56 fixed relative to the housing 22. A passive magnetic bearing is shown in which like poles of a magnet repel each other resisting excessive

radial movement of rotor body 52 relative to the central axis A. In practice, the drive shaft may move about 0.1 mm.

A small amount of radial movement of- the rotor of a molecular

pumping mechanism does not significantly affect the pumping mechanism's

performance. However, if it is desired to further resist radial movement, an

active magnetic bearing may be adopted. In an active magnetic bearing,

electro magnets are used rather than permanent magnets in passive magnetic

bearings. Further provided is a detection means for detecting radial

movement and for controlling the magnetic field to resist the radial

movement. Figures 6 to 8 show an active magnetic bearing.

A circumferential array of angled rotor blades 58 extend radially

outwardly from rotor body 52. At approximately half way along the rotor blades 58 at a radially intermediate portion of the array, a cylindrical support

ring 60 is provided, to which is connected drag cylinder 62 of drag pumping

mechanism 18. Drag pumping mechanism 18 comprises two drag stages in

parallel with a single drag cylinder 62, which may be made from carbon fibre

to reduce inertia. Each of the stages is comprised of stator portions 64

forming with the tapered inner walls 66 of the housing 22 a spiral molecular

gas flow channel. An outlet 68 is provided to exhaust gas from the drag

pumping mechanism 18.

During normal operation, inlet 70 of pump arrangement 10 is

connected to a chamber, the pressure of which it is desired to reduce. Motor

34 rotates drive shaft 32 which in turn drives rotor body 36 and rotor body 52.

Gas in molecular flow conditions is drawn in through inlet 70 to the turbomolecular pumping means 16 which urges molecules into the molecular

drag pumping means 18 along both parallel drag pumping stages and through! outlet 68. Gas is then drawn through the three stages in series of the drag

pumping mechanism 20 and into the regenerative pumping mechanism through inlet 42. Gas is exhausted at atmospheric pressure or thereabouts

through exhaust port 44.

Regenerative pumping mechanism 14 is required to exhaust gas at

approximately atmospheric pressure. Accordingly, the gas resistance to

passage of the rotor blades 38 is considerable and therefore the power and

torque characteristics of motor 34 must be selected to meet the requirements

of the regenerative pumping mechanism 14. The resistance to rotation encountered by the molecular pumping mechanism 12 is relatively little, since

the molecular pumping mechanism operates at relatively low pressures.

Furthermore, the structure of the drag pumping mechanism 18 with its only

moving part being a cylinder rotated about axis A does not suffer significantly

from gas resistance to rotation. Therefore, once power and torque

characteristics for motor 34 have been selected for regenerative pumping

mechanism 14, only a relatively small proportion of extra capacity is needed

so that the motor also meets the requirements of molecular pumping

mechanism 12. In other words, a 200w motor, which is typically used for a molecular pumping mechanism, is significantly less powerful than motor 34

which preferably is a 2kw motor. L the prior art, the typical motor is not powerful enough so that pressure change in a chamber can be controlled by controlling the rotational speed of the pump. However, since a powerful

motor is selected to drive regenerative pumping -mechanism 14, the-* additional* power can also be used to control rotational speed of the molecular pumping

mechanism and thereby control pressure.

A typical turbomolecular pumping means is evacuated to relatively

low pressures before it is started up. In the prior art, a backing pumping

mechanism is used for this purpose. Since the backing pumping mechanism

and turbomolecular pumping means are associated with the same drive shaft

in vacuum pumping arrangement 10, this start up procedure is not possible.

Accordingly, the vacuum pumping arrangement forms part of a vacuum

pumping system which comprises additional evacuation means to evacuate at least the molecular pumping mechanism 12 prior to start up to a

predetermined pressure. Preferably, the molecular pumping mechanism is

evacuated to less than 500 mbar prior to start up. Conveniently, the whole

vacuum pumping arrangement is evacuated prior to start up, as shown in

Figures 4 and 5. The evacuation means may be provided by an additional

pump, although this is not preferred since an additional pump would increase

costs of the system. When the pumping arrangement 10 is used as part of a

semi-conductor processing assembly, it is convenient to make use of a pump or pumping means associated with the system such as the pump for the load

lock chamber. Figure 4 shows the arrangement of a semiconductor processing system, in which the load lock pump 74 is, in normal use, used to evacuate pressure from load lock chamber 76. A valve 78 is provided between load

lock chamber 76 and load lock pump 74. Load lock pump 74 is connected to the exhaust of -pumping arrangement 10_' via valve 80 ^•-^■ A further valve -82 -is

provided downstream of exhaust 44 of pumping arrangement 10. During start

up, valve 78 and valve 82 are closed whilst valve 80 is opened. Load lock

pump 74 is operated to evacuate gas from arrangement 10 and therefore from turbomolecular pumping means 16. During normal operation, valves 82 and

78 are opened whilst valve 80 is closed. Arrangement 10 is operated to

evacuate pressure from vacuum chamber 84.

Alternatively, vacuum pumping arrangement 10 can be started up as

described with reference to Figure 5. The additional evacuation means

comprises a high pressure nitrogen supply which is connected to an ejector pump 90 via valve 88. Valve 88 is opened so that high pressure nitrogen is

ejected to evacuate arrangement 10 and therefore turbomolecular pumping

means 16. Nitrogen is a relatively inert gas at normal operating temperatures

of the system and does not contaminate the system.

Although the pumping arrangement 10 may be evacuated prior to start

up, it is also possible to evacuate the arrangement after or during start up,

since the arrangement can be stalled but will not reach suitable rotational speeds until evacuation is performed. However, if the arrangement and in

particular the turbomolecular pumping means is started prior to or during

evacuation, torque of the motor is preferably limited to prevent overloading until evacuation is performed.

There now follows a description of three further embodiments of the present invention. For brevity, the further embodiments will be discussed only in relation- to the- parts thereof which are different to the firs embodiment

and like reference numerals will be used for like parts.

Figure 6 shows a vacuum pumping arrangement 100 comprising an

active magnetic bearing in which a cylindrical pole of the magnetic bearing 54

is mounted to the drive shaft 32 with a like pole being positioned on housing

22. The rotor body 52 of the turbomolecular pumping means 16 of the

molecular pumping mechanism, is disc-shaped and the overall size of the

arrangement 100 is reduced as compared with the first embodiment.

In Figure 7, a vacuum pumping arrangement 200 is shown in which

the turbomolecular pumping means 12 comprises two turbomolecular pumping stages 16. A stator 92 extends radially inwardly from housing part 22 between the two turbo stages 16.

In Figure 8, a vacuum pumping arrangement 300 is shown in which molecular drag pumping mechanism 20 has been omitted.

Claims

1. A vacuum pumping system comprising a vacuum pumping

arrangement comprising: a drive shaft; a motor for driving said drive shaft; a

molecular pumping mechanism comprising turbomolecular pumping means;

and a backing pumping mechanism, wherein said drive shaft is for driving

said molecular pumping mechanism and said backing pumping mechanism,

and the system comprises evacuation means for evacuating at least said turbomolecular pumping means.

2. A system as claimed in claim 1, wherein the vacuum pumping arrangement forms part of a semiconductor processing assembly and said evacuation means comprises a pump associated with said semiconductor

processing assembly.

3. A system as claimed in claim 2, wherein said pump is a pump for a

load lock chamber of the semiconductor processing assembly.

4. A system as claimed in claim 1, wherein said evacuation means

comprises an ejector pump.

5. A system as claimed in any one of claims 1 to 4, wherein the backing

pumping mechanism comprises a regenerative pumping mechanism.

6. A system as claimed in any one of the preceding claims, wherein said

molecular pumping mechanism comprises molecular drag pumping means.

7. A system as claimed in any one of the preceding claims, wherein said

evacuation means is for evacuating the vacuum pumping arrangement.

8. A method of operating a vacuum pumping arrangement comprising: a

drive shaft; a motor for driving said drive shaft; a molecular pumping mechanism comprising turbomolecular pumping means; and a backing

pumping mechanism, said drive shaft being for driving said molecular pumping mechanism and said backing pumping mechanism, the method comprising the step of operating an evacuation means connected to the

arrangement to evacuate at least the turbomolecular pumping 'means tb a

predetermined pressure and operating the motor to start rotation of the drive

shaft.

9. A method as claimed in claim 8, wherein the motor is operated to start

rotation of the drive shaft when said predetermined pressure has been attained.

10. A method as claimed in claim 8, wherein the method comprises: the

step of starting the motor before or during evacuating said at least the

turbomolecular pumping means to said predetermined pressure and limiting the torque of the motor to prevent overloading before evacuation; and the step

of operating the evacuation means to evacuate at least the turbomolecular

pumping means to said predetermined pressure.

11. A method as claimed in any one of claims 8 to 10, wherein the vacuum

pumping arrangement forms part of a semiconductor processing assembly having a pump associated therewith which forms said evacuation means, and

the method comprises connecting the pump to the arrangement and operating

the pump to evacuate at least the turbomolecular pumping means to said

predetermined pressure.

12. A method as claimed in any one of claims 8 to 10, wherein the

evacuation means comprises an ejector pump and the method comprises connecting said- ejector pump -to the arrangement and Operating' the ejector-'

pump to evacuate at least the turbomolecular pumping means to said predetermined pressure.

13. A method as claimed in any one of claims 8 to 12, wherein said

vacuum pumping arrangement is evacuated to said predetermined pressure.

14. A method as claimed in any one of claims 8 to 13, wherein said

predetermined pressure is 500 mbar or less.