WO1994015187A1 - Tactile sensor arrangement - Google Patents

Tactile sensor arrangement Download PDF

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Publication number
WO1994015187A1
WO1994015187A1 PCT/EP1993/003620 EP9303620W WO9415187A1 WO 1994015187 A1 WO1994015187 A1 WO 1994015187A1 EP 9303620 W EP9303620 W EP 9303620W WO 9415187 A1 WO9415187 A1 WO 9415187A1
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WO
WIPO (PCT)
Prior art keywords
arrangement according
film
sensors
sensor
light
Prior art date
Application number
PCT/EP1993/003620
Other languages
German (de)
French (fr)
Inventor
Peter Marten
Peter Urban
Karl Holdik
Klaus Rohwer
Original Assignee
Daimler Benz Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daimler Benz Ag filed Critical Daimler Benz Ag
Publication of WO1994015187A1 publication Critical patent/WO1994015187A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/081—Touching devices, e.g. pressure-sensitive
    • B25J13/084—Tactile sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/247—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet using distributed sensing elements, e.g. microcapsules

Definitions

  • the invention relates to a button sensor arrangement according to the preamble of patent claim 1.
  • Such pushbutton sensor arrangements are of particular importance in robotics, on the one hand, to point to an object, e.g. by manipulating with a gripper to quantitatively detect the pressure exerted and, on the other hand, to be able to detect the shape and position of an object from the pressure distribution with a flat contact.
  • Push-button sensor arrangements with light-guiding foils are described in which a pressure transmission foil, when subjected to external pressure from an object, locally touches the light-guiding foil and interferes with its light-guiding properties at the contact surfaces added.
  • the arrangement can only be used with severe restrictions with regard to the spatial conditions and, in particular, can hardly be used in robotics for gripping devices.
  • the invention is therefore based on the object of specifying a tactile sensor arrangement which is of compact construction and can be used in a variety of ways.
  • the design as a three-layer film results in a flexible sensor arrangement which can be adapted to largely any contours and whose space requirement is negligible. Since the sensors can be produced in small structures using known methods, in particular from microelectronics, a high surface resolution can be achieved.
  • photoconductors, phototransistors or photovoltaic elements come in as optoelectric sensors
  • sensors made of organic material compared to semiconductor crystalline material such as silicon or Compound semiconductors have the advantage of simpler film processing.
  • suitable organic materials for photoconductors are poly-N-vinyl carbazole (PVC, n-type) and trinitro-fluorene (TNF, p-type).
  • Photovoltaic cells made of organic material are known as dye-photovoltaic cells for converting solar energy, particularly on curved surfaces. Compared to the organic photoconductors, they advantageously show a higher conversion efficiency and an adjustable absorption band. The low resistance to swelling improves interference immunity against interference. In addition, there is no need for organic photoconductors. considerable operating voltage.
  • the individual sensors separated in the surface of the sensor film are advantageously individually addressable.
  • the sensor signals are read out to an evaluation device, preferably in time multiplex, for which purpose a matrix arrangement of the sensors with row and column leads is particularly favorable.
  • the light guide film is preferably illuminated by means of an array arrangement of light-emitting diodes or semiconductor lasers. Pulsed operation of the light sources allows, on the one hand, to detect dark current effects of the sensors in the pulse pauses and to compensate in the sensor signals, and on the other hand to increase the illuminance without increasing the thermal load. In addition, by synchronous rectification (lock-in) the electrical sensor signals an increase in the signal-to-noise ratio can be achieved.
  • FIG. 1 the structure of the push button sensor arrangement according to the invention is outlined as a cross section through the individual film layers.
  • a pressure transmission film 1 which is made of silicone rubber, for example, shows a smooth first surface 11 and a second surface 12 with a return structure.
  • the structured side of the pressure transmission film lies on a light guide film 2.
  • the light guide film 2 is flooded with light from a light source arrangement 4, which is preferably operated in pulsed fashion. The light is guided in this by total reflection on the surfaces of the light guide film. The total reflection is disturbed on surfaces on which the pressure transmission foil touches the surface of the light guide foil, and light is scattered on the contact surface and emerges from the light guide foil on the opposite side.
  • a sensor film 3 with a plurality of individual sensors 31 separated in the surface of the sensor film is arranged on this opposite side of the light-guiding film 2.
  • the sensors 31 can be arranged on the surface of the film or embedded therein. If necessary, an intermediate layer ensuring the light-conducting properties of the film 2 can be inserted between the sensor film 3 and the light-conducting film 2.
  • the contact surfaces of the relief structure which in the example outlined consists of hemispheres, are minimal and the light scattering can be neglected.
  • local pressure F With local pressure F, the affected hemispherical elements of the pressure transmission film 1 deform and form a larger contact surface on the light guide film, which leads to increased light scattering.
  • the intensity of the scattered light is a measure of the local pressure.
  • the scattered light strikes the optoelectric sensors 31 arranged opposite one another in the sensor film 3, light being generally only exposed to directly opposite sensors. Steady light incident on the sensors leads to corresponding electrical sensor signals, which can thus be evaluated as a measure of the pressure acting locally on the pressure transmission film.
  • FIG. 2 shows an advantageous right-angled matrix arrangement of sensors, preferably organic thin-film solar cells 32, which are contacted with row lines 33 and column lines 34 as thin-film lines.
  • the row and column lines are insulated from one another at the intersection points 35.
  • the grid dimension of the matrix is approximately 0.5 mm, for example.
  • a multiplex readout arrangement for the in FIG. 2 outlined matrix arrangement shows the FIG. 3.
  • An individual sensor element is selected by selecting a column line and a row line in the multiplexer arrangement 5.
  • the photocurrent Iph of a selected sensor element is converted into an output voltage in a current-voltage converter 7, for example, value U nm is a measure of the pressure at the point of intersection of column n and row m.
  • the invention is particularly advantageous as a sensor face in gripping devices, for example as a "sensor skin” for the gripping hand of MIT-Utah known as “dexterous hand” in Gripping hands of simulators and suitable for surface scanning in automation technology, and enables both the detection of local pressure maxima and the detection of the position and shape of an object via surface distribution of the detected pressure.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Human Computer Interaction (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

A tactile sensor arrangement is made of a flexible multilayered arrangement of several foils comprising a pressure transmitting foil (1), a light transmitting foil (2) and a sensor foil (3), which is adaptable to various contours. The sensor foil contains a plurality of individual sensors (31) distributed on the foil surface, preferably designed as organic dye solar cells produced by thin film technology and individually controllable by time multiplexing. The tactile sensor arrangement is particularly advantageous for gripping members of robots and automated devices.

Description

Beschreibungdescription
TastsensoranordnunσPush button arrangement
Die Erfindung betrifft eine Taεtsensoranordnung nach dem Oberbegriff des Patentanspruchs 1.The invention relates to a button sensor arrangement according to the preamble of patent claim 1.
Derartige Tastsensoranordnungen sind insbesondere von Be¬ deutung in der Robotik um einerseits den auf ein Objekt, z.B. durch Handhabung mit einem Greifer, ausgeübten Druck quantitativ zu detektieren und anderseits aus der Druck- Verteilung bei flächiger Berührung auch Form und Lage ei¬ nes Objekts erfassen zu können.Such pushbutton sensor arrangements are of particular importance in robotics, on the one hand, to point to an object, e.g. by manipulating with a gripper to quantitatively detect the pressure exerted and, on the other hand, to be able to detect the shape and position of an object from the pressure distribution with a flat contact.
Ein Überblick über bekannte Lösungen oder Losungsansätze für Tastsensoranordnungen findet sich beispielsweise in "The International Journal of Roboticε Research", Vol. 8,An overview of known solutions or approaches for push-button sensor arrangements can be found, for example, in "The International Journal of Robotic Research", Vol. 8,
ORIGINAL UNTERLAGEN No. 1, S. 38-62, Feb. 1989. Unter anderem sind dort auchORIGINAL DOCUMENTS No. 1, pp. 38-62, Feb. 1989. Among other things, there are
Tastsensoranordnungen mit Lichtleitfolien beschrieben, bei welchen eine Druckübertragungsfolie bei externer Druckein¬ wirkung durch ein Objekt die Lichtleitfolie lokal berührt und an den Berührungsflächen deren Lichtleiteigenschaften stört.An diesen Berührungsflächen gestreutes Licht tritt an der gegenüberliegenden Fläche der Lichtleitfolie aus und wird als ein Tastbild mit einer Kamera aufgenommen. Die Anordnung ist damit aber nur mit starken Einschränkun- gen bezüglich der räumlichen Gegebenheiten einsetzbar und insbesondere in der Robotik bei Greifvorrichtungen kaum verwendbar.Push-button sensor arrangements with light-guiding foils are described in which a pressure transmission foil, when subjected to external pressure from an object, locally touches the light-guiding foil and interferes with its light-guiding properties at the contact surfaces added. However, the arrangement can only be used with severe restrictions with regard to the spatial conditions and, in particular, can hardly be used in robotics for gripping devices.
Der Erfindung liegt daher die Aufgabe zugrunde, eine Tast- sensoranordnung anzugeben, die kompakt aufgebaut und viel¬ seitig einsetzbar ist.The invention is therefore based on the object of specifying a tactile sensor arrangement which is of compact construction and can be used in a variety of ways.
Die Erfindung ist im Patentanspruch 1 beschrieben. Die Un- teransprüche enthalten vorteilhafte Ausgestaltungen und Weiterbildungen der Erfindung.The invention is described in claim 1. The subclaims contain advantageous refinements and developments of the invention.
Durch die Ausführung als dreilagige Folie ergibt sich eine flexible Sensoranordnung, die an weitgehend beliebige Kon¬ turen anpaßbar ist und deren Platzbedarf vernachlässigbar ist.Da die Sensoren mit bekannten Verfahren insbesondere aus der Mikroelektronik in kleinen Strukturen herstellbar sind, ist eine hohe Flächenauflösung erzielbar.The design as a three-layer film results in a flexible sensor arrangement which can be adapted to largely any contours and whose space requirement is negligible. Since the sensors can be produced in small structures using known methods, in particular from microelectronics, a high surface resolution can be achieved.
Als optoelektrische Sensoren kommen insbesondere Photolei- ter, Phototransistoren oder photovoltaische Elemente inIn particular, photoconductors, phototransistors or photovoltaic elements come in as optoelectric sensors
Betracht, wobei Sensoren aus organischem Material gegen¬ über halbleiterkristallinem Material wie Silizium oder Verbindungshalbleitern den Vorteil einfacherer Folienverarbeitung besitzen. Als organisches Material für Photoleiter käme beispielsweise Poly-N-Vinylkarbazol (PVK,n-leitend) und Trinitro-Fluoren (TNF,p-leitend) in Betracht.Consider, wherein sensors made of organic material compared to semiconductor crystalline material such as silicon or Compound semiconductors have the advantage of simpler film processing. Examples of suitable organic materials for photoconductors are poly-N-vinyl carbazole (PVC, n-type) and trinitro-fluorene (TNF, p-type).
Photovoltaische Zellen aus organischem Material sind als Farbεtoff-Photovoltaik-Zellen zur Solarenergiewandlung insbesondere auf gekrümmten Flächen bekannt. Gegenüber den organischen Photoleitern zeigen sie vorteilhafterweise eine höhere Konversionseffizienz und einstellbare Absorp¬ tionsbande. Durch den niederoh igen Quellwiderstand wird die Störsicherheit gegen Einstreuungen verbessert. Außer¬ dem entfällt die bei organischen Photoleitern z.T. be- trächtliche Betriebsspannung.Photovoltaic cells made of organic material are known as dye-photovoltaic cells for converting solar energy, particularly on curved surfaces. Compared to the organic photoconductors, they advantageously show a higher conversion efficiency and an adjustable absorption band. The low resistance to swelling improves interference immunity against interference. In addition, there is no need for organic photoconductors. considerable operating voltage.
Die in der Fläche der Sensorfolie getrennten Einzelsenso¬ ren sind vorteilhafterweise individuell adressierbar. Die Auslesung der Sensorsignale an eine Auswerteeinrichtung erfolgt bei hoher Sensorzahl vorzugsweise im Zeitmulti¬ plex, wofür eine Matrixanordnung der Sensoren mit Zeilen- und Spaltenzuleitungen besonders günstig ist.The individual sensors separated in the surface of the sensor film are advantageously individually addressable. When the number of sensors is high, the sensor signals are read out to an evaluation device, preferably in time multiplex, for which purpose a matrix arrangement of the sensors with row and column leads is particularly favorable.
Die Beleuchtung der Lichtleiterfolie erfolgt vorzugsweise mittels einer Array-Anordnung von Leuchtdioden oder Halb¬ leiterlasern. Gepulster Betrieb der Lichtquellen erlaubt zum einen, in den Impulspausen Dunkelstromeffekte der Sen¬ soren zu detektiven und in den Senεorsignalen zu kompen¬ sieren, und zum andern eine Steigerung der Beleuchtungs- εtärke ohne Erhöhung der thermischen Belastung. Darüber- hinaus kann durch Synchrongleichrichtung (Lock-in) der elektrischen Sensorsignale eine Erhöhung des Signal- Rausch-Abstands erzielt werden.The light guide film is preferably illuminated by means of an array arrangement of light-emitting diodes or semiconductor lasers. Pulsed operation of the light sources allows, on the one hand, to detect dark current effects of the sensors in the pulse pauses and to compensate in the sensor signals, and on the other hand to increase the illuminance without increasing the thermal load. In addition, by synchronous rectification (lock-in) the electrical sensor signals an increase in the signal-to-noise ratio can be achieved.
In FIG. 1 ist der Aufbau der erfindungsgemäßen Tastsenso- ranordnung als Querschnitt durch die einzelnen Folien¬ schichten εkizziert. Eine Druckübertragungsfolie 1, die beispielεweiεe auε Silikongummi beεteht, zeigt eine glatte erεte Oberfläche 11 und eine zweite Oberfläche 12 mit Re¬ liefεtruktur. Die Druckübertragungεfolie liegt mit ihrer strukturierten Seite auf einer Lichtleitfolie 2 auf. Die Lichtleitfolie 2 ist mit Licht von einer vorzugsweise ge¬ pulst betriebenen Lichtquellenanordnung 4 geflutet. Durch Totalreflexion an den Oberflächen der Lichtleitfolie wird das Licht in dieser geführt. Die Totalreflexion ist an Flächen, an denen die Druckübertragungsfolie die Ober¬ fläche der Lichtleitfolie berührt, gestört und Licht wird an der Berührungsfläche gestreut und tritt auf der gegen¬ überliegenden Seite aus der Lichtleitfolie aus. An dieser gegenüberliegenden Seite der Lichtleitfolie 2 ist eine Sensorfolie 3 mit einer Mehrzahl in der Fläche der Sen¬ sorfolie getrennter Einzelsensoren 31 angeordnet.Die Sen¬ soren 31 können auf der Oberfläche der Folie angeordnet oder in diese eingebettet sein. Zwischen Sensorfolie 3 und Lichtleitfolie 2 kann erforderlichenfalls eine die licht- leitenden Eigenschaften der Folie 2 gewährleistende Zwi¬ schenschicht eingefügt sein. Ohne Druckeinwirkung auf die Druckübertragungsfolie 1 sind die Auflageflächen der Reli¬ efεtruktur, die im εkizzierten Beiεpiel aus Halbkugeln be¬ steht, minimal und die Lichtstreuung ist vernachläsεigbar. Bei lokaler Druckeinwirkung F verformen εich die betroffe¬ nen Halbkugelelemente der Druckübertragungεfolie 1 und bilden eine größere Auflagefläche auf der Lichtleitfolie, was zu verstärkter Lichtstreuung führt. Die Intensität des gestreuten Lichts ist ein Maß für den lokal einwirkenden Druck. Das gestreute Licht trifft auf die gegenüberliegend in der Sensorfolie 3 angeordneten optoelektrischen Senso- ren 31, wobei im weεentlichen nur direkt gegenüberliegende Senεoren mit Licht beaufεchlagt werden. Auf die Senεoren einfallendeε Steulicht führt zu entsprechenden elektri¬ schen Sensorεignalen, die εomit alε ein Maß für den lokal auf die Druckübertragungεfolie einwirkenden Druck ausge- wertet werden können.In FIG. 1 the structure of the push button sensor arrangement according to the invention is outlined as a cross section through the individual film layers. A pressure transmission film 1, which is made of silicone rubber, for example, shows a smooth first surface 11 and a second surface 12 with a return structure. The structured side of the pressure transmission film lies on a light guide film 2. The light guide film 2 is flooded with light from a light source arrangement 4, which is preferably operated in pulsed fashion. The light is guided in this by total reflection on the surfaces of the light guide film. The total reflection is disturbed on surfaces on which the pressure transmission foil touches the surface of the light guide foil, and light is scattered on the contact surface and emerges from the light guide foil on the opposite side. A sensor film 3 with a plurality of individual sensors 31 separated in the surface of the sensor film is arranged on this opposite side of the light-guiding film 2. The sensors 31 can be arranged on the surface of the film or embedded therein. If necessary, an intermediate layer ensuring the light-conducting properties of the film 2 can be inserted between the sensor film 3 and the light-conducting film 2. Without the pressure acting on the pressure transmission film 1, the contact surfaces of the relief structure, which in the example outlined consists of hemispheres, are minimal and the light scattering can be neglected. With local pressure F, the affected hemispherical elements of the pressure transmission film 1 deform and form a larger contact surface on the light guide film, which leads to increased light scattering. The intensity of the scattered light is a measure of the local pressure. The scattered light strikes the optoelectric sensors 31 arranged opposite one another in the sensor film 3, light being generally only exposed to directly opposite sensors. Steady light incident on the sensors leads to corresponding electrical sensor signals, which can thus be evaluated as a measure of the pressure acting locally on the pressure transmission film.
FIG. 2 zeigt eine vorteilhafte rechtwinklige Matrixanord¬ nung von Sensoren, vorzugsweise organischen Dünnfilm- Solarzellen 32, die mit Zeilenleitungen 33 und Spaltenlei- tungen 34 als Dünnfilmleitungen kontaktiert sind. Die Zei- len-und Spaltenleitungen sind an den Kreuzungspunkten 35 gegeneinander isoliert. Das Rastermaß der Matrix betrage beispielεweise ca. 0,5mm.FIG. 2 shows an advantageous right-angled matrix arrangement of sensors, preferably organic thin-film solar cells 32, which are contacted with row lines 33 and column lines 34 as thin-film lines. The row and column lines are insulated from one another at the intersection points 35. The grid dimension of the matrix is approximately 0.5 mm, for example.
Eine Multiplex-Ausleseanordnung für die in FIG. 2 skiz¬ zierte Matrixanordnung zeigt die FIG. 3. Die Auswahl eines individuellen Sensorelements erfolgt durch Auswahl einer Spalten-und einer Zeilenleitung in der Multiplexeranord- nung 5. Der Photostrom Iph eines ausgewählten Sensorele- ments wird beispielsweise in einem Strom-Spannungs-Wandler 7 in eine Ausgangsspannung umgesetzt, die alε Spannungε- wert Unm ein Maß für den Druck am Ort deε Kreuzungεpunktε von Spalte n und Zeile m ist.A multiplex readout arrangement for the in FIG. 2 outlined matrix arrangement shows the FIG. 3. An individual sensor element is selected by selecting a column line and a row line in the multiplexer arrangement 5. The photocurrent Iph of a selected sensor element is converted into an output voltage in a current-voltage converter 7, for example, value U nm is a measure of the pressure at the point of intersection of column n and row m.
Die Erfindung ist inεbeεondere vorteilhaft als Sensorf.la¬ che in GreifVorrichtungen, z.B. als "Sensorhaut" für die alε "dexterous hand" bekannte Greifhand deε MIT-Utah, in Greifhänden von Simulatoren und zur Oberflächenabtastun in der Automatisierungstechnik geeignet, und ermöglicht sowohl die Erkennung lokaler Druckmaxima als auch über Flächenverteilung des detektierten Druckε die Erkennung von Lage und Form eines Objekts. The invention is particularly advantageous as a sensor face in gripping devices, for example as a "sensor skin" for the gripping hand of MIT-Utah known as "dexterous hand" in Gripping hands of simulators and suitable for surface scanning in automation technology, and enables both the detection of local pressure maxima and the detection of the position and shape of an object via surface distribution of the detected pressure.

Claims

Patentansprüche Claims
1. Tastsenεoranordnung mit einer Lichtleitfolie und mit einer Druckübertragungsfolie, dadurch gekennzeichnet.daß an der der Druckübertragungsfolie (1) abgewandten Oberflä¬ che der Lichtleitfolie (2) eine Senεorfolie (3) mit einer Mehrzahl in der Fläche getrennter optoelektriεcher Senεo¬ ren (31) angeordnet iεt.1. Key sensor arrangement with a light-guiding film and with a pressure transmission film, characterized in that on the surface of the light-guiding film (2) facing away from the pressure transmission film (1) a sensor film (3) with a plurality of opto-electrical sensors (31) separated in area. arranged iεt.
2. Anordnung nach Anspruch 1, dadurch gekennzeichnet, daß die Sensoren als photovoltaische Zellen ausgeführt sind. 2. Arrangement according to claim 1, characterized in that the sensors are designed as photovoltaic cells.
3. Anordnung nach Anspruch 1, dadurch gekennzeichnet, daß die Sensoren als photoleitende Flächenelemente ausgeführt sind.3. Arrangement according to claim 1, characterized in that the sensors are designed as photoconductive surface elements.
4. Anordnung nach einem der Ansprüche 1 bis 3 , dadurch gekennzeichnet, daß die Sensoren als Dünnfilm-Elemente ausgeführt sind.4. Arrangement according to one of claims 1 to 3, characterized in that the sensors are designed as thin film elements.
5. Anordnung nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Sensoren aus organischem Material bestehen.5. Arrangement according to one of claims 1 to 4, characterized in that the sensors consist of organic material.
6. Anordnung nach einem der Anεprüche 1 bis 5, dadurch gekennzeichnet, daß die Sensoren individuell adresεierbar sind.6. Arrangement according to one of claims 1 to 5, characterized in that the sensors are individually addressable.
7. Anordnung nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, daß die Sensoren in Matrixanordnung in der Fläche der Sensorfolie verteilt sind.7. Arrangement according to one of claims 1 to 6, characterized in that the sensors are distributed in a matrix arrangement in the surface of the sensor film.
8. Anordnung nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, daß die Ausleεung der elektrischen Sensor¬ signale im Zeitmultiplex erfolgt.8. Arrangement according to one of claims 1 to 7, characterized in that the readout of the electrical Sensor¬ signals takes place in time-division multiplex.
9. Anordnung nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, daß zur Lichtflutung der Lichtleitfolie eine oder mehrere Lichtquellen im Impulsbetrieb vorgesehen sind.9. Arrangement according to one of claims 1 to 8, characterized in that one or more light sources are provided in pulse mode for flooding the light guide film.
10. Anordnung nach Anspruch 9, dadurch gekennzeichnet, daß Auεwerteeinrichtungen in den Impulεpauεen Punkelεtromeffekte der Senεoren detektieren und die Sen¬ sorsignale bei Beleuchtung entsprechend korrigieren.10. The arrangement according to claim 9, characterized in that evaluation devices in the impulse intervals Detect point current effects of the sensors and correct the sensor signals accordingly when illuminated.
11. Anordnung nach Anspruch 9 oder 10, dadurch gekenn- zeichnet, daß die Sensorεignale einer Synchrongleichrich¬ tung (Lock-in) unterworfen werden.11. Arrangement according to claim 9 or 10, characterized in that the sensor signals are subjected to a synchronous rectification (lock-in).
12. Anordnung nach einem der Anεprüche 1 biε 11, gekenn¬ zeichnet durch ein Leuchtdioden-oder Halbleiterlaεer-Array als Lichtquelle.12. Arrangement according to one of claims 1 to 11, characterized by a light-emitting diode or semiconductor laser array as the light source.
13. Anordnung nach einem der Ansprüche 1 bis 12, dadurch gekennzeichnet, daß die der Lichtleitfolie zugewandte Oberfläche der Druckübertragungsfolie eine durch Druck re- versibel deformierbare ReliefStruktur aufweist. 13. Arrangement according to one of claims 1 to 12, characterized in that the surface of the pressure transmission film facing the light guide film has a relief structure which can be reversibly deformed by pressure.
PCT/EP1993/003620 1992-12-23 1993-12-20 Tactile sensor arrangement WO1994015187A1 (en)

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DEP4243832.2 1992-12-23
DE19924243832 DE4243832A1 (en) 1992-12-23 1992-12-23 Push button arrangement

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