US3684585A - Method for forming adherent titanium carbide coatings on metal or composite substrates - Google Patents
Method for forming adherent titanium carbide coatings on metal or composite substrates Download PDFInfo
- Publication number
- US3684585A US3684585A US54362A US3684585DA US3684585A US 3684585 A US3684585 A US 3684585A US 54362 A US54362 A US 54362A US 3684585D A US3684585D A US 3684585DA US 3684585 A US3684585 A US 3684585A
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- United States
- Prior art keywords
- titanium
- titanium carbide
- carbon
- substrate
- reaction
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12063—Nonparticulate metal component
- Y10T428/12069—Plural nonparticulate metal components
- Y10T428/12076—Next to each other
- Y10T428/12083—Nonmetal in particulate component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12014—All metal or with adjacent metals having metal particles
- Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
- Y10T428/12063—Nonparticulate metal component
- Y10T428/1209—Plural particulate metal components
Definitions
- This invention relates to the formation of titanium carbide coatings on metal and composite substrates. More particularly it relates to the formation of titanium carbide by the reaction of a titanium halide with a hydrocarbon gas at elevated temperatures to form a dense, adherent coating of titanium carbide on metal and composite substrates, and more particularly to methods of treating such substrates prior to the deposition of titanium carbide thereon for the formation of a tenacious bond between the substrate material and the titanium carbide coating.
- titanium carbide by the vapor phase reaction of a titanium halide and a volatile hydrocarbon is well known. Since titanium carbide has a low coeificient of friction and a hardness approximately equivalent to onehalf of that of diamond, it is highly desirable to form titanium carbides on tools, machine parts, wear surfaces and the like which are subject to excessive wear and abrasion, thereby substantially lengthening and improving their serviceable life.
- the reactions involved in vapor phase reaction of titanium halides and volatile hydrocarbons are well known, prior attempts to form titanium carbides on tool steels and the like have met with very limited success.
- extremely hard, dense, impermeable coatings of titanium carbide may be formed on practically any steel surface and composite surfaces such assintered tungsten carbide in cobalt or the like.
- Firmly adherent, dense, impermeable coatings of titanium carbide may be formed on these surfaces by the reaction process described hereinafter if the surface of the substrate is first carburized sufficiently to form a layer of carbon-rich material at the surface. Due to the prior carburization of the surface of the substrate sufficient reactive carbon is present at the carbide-forming surface to promote the formation of an integrally bonded titanium carbide coating.
- an interlayer containing carbon the material of the substrate, titanium and/ or titanium carbide is formed adjacent the surface of the substrate being coated.
- Titanium halides in the gas phase react with the more active carbon the carburized surface in a gas-solid reaction to form titanium and titanium carbide in the carburized surface forming an interlayer on which titanium carbide is deposited and firmly adheres.
- an integrally bonded dense, impermeable bulk coating of titanium carbide is uniformly deposited on the surface of the substrate at rates up to as high as 0.001 inch per hour at temperatures as low as 950 C.
- FIG. 1 is a schematic drawing of a process system for producing titanium carbide coatings on substrates in accordance with the present invention.
- FIG. 2 is a diagrammatic illustration of a sectional view of a portion of a substrate coated with titanium carbide in accordance with the process of this invention.
- the rate of deposition of titanium carbide by the gas phase reaction of titanium halides and a hydrocarbon in hydrogen will be largely dependent upon the concentration of reactants at the surface of the substrate and the activation energies of the individual reactions.
- the activation energies will be primarily controlled by the physical state of the solid surface such as the defect crystalline structure rather than the surface composition.
- most surfaces on which a chemical reaction is proceeding contain active sites on which the reaction has a low activation energy as compared to other sites in the surface. These active sites are often associated with crystalline defects such as the exposed edge at the surface between two crystal planes or at a dislocation. The reaction proceeds preferentialy at these active sites, depositing a second solid phase which grows from these sites.
- High concentrations of reactive carbon are made available at or near the surface of the substrate by carburizing the surface prior to deposition of titanium carbide thereon, thereby producing a surface enriched in reactive carbon which promotes the gas-solid reaction and the formation of TiC by reacting titanium from the gas phase with carbon in the solid phase.
- the apparatus includes a scalable deposition chamber 7 comprised of an upper portion 71 and a lower portion 72.
- the upper and lower portions are removeably secured together by conventional means such as bolts 73, clamps or the like.
- Chamber 70 has an exhaust port 74 connected to an exhaust line 75 which is in turn connected to a conventional vacuum pump or the like for removing gases from the deposition chamber.
- a rotatable table 77 is mounted on a shaft 76 which passes transversely through the bottom of the deposition chamber 70 and is adapted for rotation by conventional means.
- Rotatable table 77 is preferably constructed of a relatively inert material such as graphite or the like while the deposition chamber may be constructed of steel or any other suitable material.
- a radiant heater 89 is secured below rotatable table 77 and interconnected with a suitable power source 90 for heating the material in the deposition chamber.
- Reactants are injected into the reaction chamber through lines 78 and 79 by way of control valves 80 and 81, respectively, and injected into the deposition chamber by way of nozzle 82.
- Nozzle 82 projects into the upper portion of the deposition chamber and directs the reactants toward the surface of the rotatable table 77.
- the substrate work-pieces 83 to be coated are positioned on rotatable table 77 as illustrated in FIG. 1.
- workpieces 83 may be supported on suitable racks, hangers or the like within the deposition chamber.
- the deposition chamber is closed and sealed, evacuated and refilled with purified hydrogen through inlet 79, valve 81 and nozzle 82.
- purified hydrogen through inlet 79, valve 81 and nozzle 82.
- the chamber 70 is filled with dry hydrogen exhaust port 74 is opened and hydrogen allowed to flow through the chamber 70 at a rate of about 25 to about 50 liters per minute.
- heater 89 With hydrogen flowing through the chamber 70 at essentially atmospheric pressure heater 89 is activated by passing current therethrough from current source 90.
- the workpiece 83 is heated to a temperature between about 900 and 1200 C. in the flowing hydrogen and maintained at this temperature for about 15 to about 30 minutes to assure complete cleaning and outgasing of the workpieces.
- rotatable table 77 is rotated at a rate of about 1 to about 15 r.p.m. and is uniformly heated by radiant energy from the heater 89. All workpieces 83 are therefore maintained at a relatively constant temperature.
- a mixture of a volatile hydrocarbon and hydrogen is introduced into the chamber to carburize the surface of the workpieces 83.
- the ratio of hydrocarbon to hydrogen is about 0.01:1 carbon to hydrogen (1 carbon atom per 100 H molecules).
- the hydrocarbon is cracked or decomposed at the heated workpiece surface depositing pure carbon thereon.
- the carbon deposited on the workpiece diffuses into the surface, thereby carburizing the workpiece surface.
- the above condition is maintained for about 5 to about 45 minutes whereby a carburized layer is formed adjacent the surface of the workpiece which is approximately 0.005 inch thick, depending on the rate of diffusion of the carbon into the material of the workpiece and the temperature of the workpiece.
- a reactant gas containing hydrogen and monochlorobenzene is introduced into the chamber '70 through line 79, valve 81 and nozzle 82.
- a mixture of hydrogen and titanium tetrachloride (TiCl is introduced through line 78, valve and into nozzle 82.
- the composition of reactant gas entering the deposition chamber 70 through nozzle 82 is approximately 0.75 to about 1.5 mole percent TiCl 0.125 to about 0.25 mole percent monochlorobenzene, and the remainder hydrogen.
- the titanium carbide coating does not bond directly to the surface of the substrate but, instead, is bonded thereto through an intermediate layer or interlayer as illustrated diagrammatically in FIG. 2. It is believed that the formation of the interlayer as described hereinafter is the result of carburization of the metal substrate surface prior to the.deposition reaction and contains material of the substrate, carbon from the carburization process, and titanium from the titanium halide gas. It. is further believed that the titanium carbide-forming reaction takes place, not in the gas phase, but with free carbon atoms or reactive carbides in the interlayer which act as active sites for the formation of titanium carbide.
- Carburization of the surface prior to the deposition of titanium carbide thereon results in the formation of an interlayer which affects the concentration of chemical
- the chemical potential of carbon at the surface changes as a result of diffusion thereof into the body of the substrate, dissolution thereof into the metal from the gas phase carbon source, and reaction with a titanium halide to form titaniumcarbide.
- the carbon potential at the surface of the substrate therefore is increased by dissolution of carbon into the metal from the gas phase carbon source.
- the carbon potential is decreased by diffusion of the carbon into the body of the substrate or reaction of carbon with a titanium halide to form a titanium carbide. Accordingly, if the carbon potential is initially near zero, then the rate of reaction of carbon with the titanium halide will likewise be near zero.
- Any titanium carbide formed would be by direct reaction between the gas phase carbon source and the titanium halide at the surface. Such a direct reaction, however, must compete with the dissolution rate of carbon into the metal from the gas phase carbon source. The presence of carbon-free metal at the surface therefore will inhibit the direct reaction. Also, since the substrate surface does not participate in the direct reaction, a chemical bond between the resulting titanium carbide and the substrate surface would not be expected.
- reaction conditions on the surface are vastly changed.
- rate of reaction of carbon with titanium halide to form a titanium carbide is greatly increased due to the increased carbon potential. Accordingly, the rate of titanium carbide deposition during the initial coating period will be greatly increased.
- the initial reaction actually forms a ternary system, Ti C-M, where M represents the metal substrate. This ternary system forms as an interlayer between the surface of the metal and the titanium carbide coating and acts as a source of active carbon sites for the formation of TiC.
- the ternary system will be Ti-C-Fe and will consist primarily of a two phase mixture of or iron and (Ti,Fe) C.
- the carbide, M C is essentially Fe C in which titanium has been partially substituted for iron in the lattice. Therefore the interlayer provides a surface upon which titanium carbide may be formed and to which the titanium carbide is chemically bonded.
- the substrate is a cemented carbide such as tungsten carbide in cobalt.
- the interlayer Upon injecting the titanium halide and hydrocarbon into the system, the interlayer is formed upon which the titanium carbide readily forms by virtue of the reaction of TiCl with the carbon in the substrate surface.
- the interlayer therefore, not only provides means for promoting the reaction between TiCl and carbon to initiate and promote the reaction and formation of titanium carbide, but also provides an intermediate bonding agent chemically attaching the titanium carbide coating to the substrate surface.
- the thickness and composition of the interlayer is, of course, determined by the composition of the substrate materials and the degree of carburization prior to the formation of titanium carbide thereon. Furthermore, the separate regions in the finished product, as illustrated in FIG. 2, do not show distinct boundaries.
- the substrate material, illustrated at 10 in FIG. 2 is first carburized at the surface to form a carbon-rich layer 11. Since the carbon is dilfused and dissolved in the surface of the substrate, the transition from the virgin metal to the carburized surface is not clear and distinct, but is a gradual transition.
- a titanium carbide layer 13 forms on the surface of the interlayer. Since the transi tion from the interlayer of pure titanium carbide is gradual, the precise transition point is diflicult to establish. It should be noted, however, that upon inspection of a section of a substrate coated as described herein, each of the layers 11, 12 and 13 are clearly observed. Furthermore, while the exact point of transition from one layer to the other is not easily determined, it should be noted that the surface of layer 13 is a reproduction of the original surface of the metal substrate. Therefore if the metal substrate was originally a smooth polished surface, the surface of the titanium carbide layer 13 formed as, described herein will also be a smooth polished surface.
- EXAMPLE I A specimen of 4130 steel was cleaned and placed in deposition apparatus such as that described with reference to FIG. 1. The steel specimen was heated at 1050 C. in flowing hydrogen for 30 minutes. A gaseous mixture of monochlorobenzene, titanium tetrachloride and hydrogen having a carbon to titanium ratio of 1:1 was then introduced into the reaction chamber and continuously flowed through the chamber for four hours. Throughout the reaction process the temperature of the substrate was maintained at about 1050 C. A titanium carbide coating about 0.0002 inch thick formed nonuniformly on the steel substrate. No interlayer between the steel surface and the coating was formed.
- EXAMPLE II A second specimen of 4130 steel identical to the one used in Example I was treated similarly and placed in the same apparatus. The steel specimen was heated at 1050" C. in flowing hydrogen for 30 minutes. Immediately thereafter, a mixture of hydrogen and monochlorobenzene wherein the carbon to H ratio was 0.01:1 was passed through the deposition chamber for 35 minutes while maintaining the specimen at 1050 C. to carburize the surface of the steel specimen. Immediately thereafter deposition conditions were established as set forth in Example I and maintained for four hours. A uniform adherent coating of TiC 0.00041 inch was formed on the specimen. Upon sectioning and inspection an intermediate layer was observed between the carburized surface of the specimen and the coating. The coating was bonded to the interlayer which was in turn bonded to the steel surface, the interlayer forming a chemical bond to the TiC and the steel.
- uniform coatings of TiC have been formed on the full range of carbon steels, such as the 1000 series steels, 410 stainless steel and the 4000 series steels. Likewise similar results have been obtained on selected chromium, molybdenum and nickel containing steels.
- the process has also been found to be effective for forming TiC coating on cemented tungsten carbide and cemented tungsten and titanium carbides in cobalt, and other materials such as powder metallurgy materials, martensitic stainless steels, age hardening steels, and most tool steels. In all cases the immediate prior carburization of the substrate surface causes formation of the described interlayer which promotes formation of uniform adherent coatings of TiC.
- the surface of said substrate is carburized by (i) heating said substrate to a temperature between about 900 C. and about 1200 C. in a hydrogen atmosphere;
- said interlayer is formed by reacting a titanium halide with carbon in the surface of said substrate," thereby producing titanium and titanium carbide which is dissolved in the surface of said substrate.
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Abstract
DEPOSITING A COATING OF TIC ON THE INTERLAYER BY CHEMICAL VAPOR DEPOSITION.
Description
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US5436270A | 1970-07-13 | 1970-07-13 |
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US54362A Expired - Lifetime US3684585A (en) | 1970-07-13 | 1970-07-13 | Method for forming adherent titanium carbide coatings on metal or composite substrates |
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Cited By (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3874900A (en) * | 1973-08-13 | 1975-04-01 | Materials Technology Corp | Article coated with titanium carbide and titanium nitride |
US3964937A (en) * | 1973-08-13 | 1976-06-22 | Materials Technology Corporation | Method of making a composite coating |
US3969130A (en) * | 1973-02-05 | 1976-07-13 | General Atomic Company | Carbon-coated articles and method of making same |
US4040870A (en) * | 1973-05-07 | 1977-08-09 | Chemetal Corporation | Deposition method |
US4052530A (en) * | 1976-08-09 | 1977-10-04 | Materials Technology Corporation | Co-deposited coating of aluminum oxide and titanium oxide and method of making same |
DE2727250A1 (en) * | 1976-06-18 | 1977-12-29 | Sumitomo Electric Industries | SURFACE-COATED SINTER HARD METAL OBJECTS AND A PROCESS FOR THEIR PRODUCTION |
US4097711A (en) * | 1976-09-16 | 1978-06-27 | Ingersoll-Rand Company | Roller shell hard coating |
US4101703A (en) * | 1972-02-04 | 1978-07-18 | Schwarzkopf Development Corporation | Coated cemented carbide elements |
US4107352A (en) * | 1977-01-13 | 1978-08-15 | Westinghouse Canada Limited | Chemical vapor deposition |
US4153483A (en) * | 1975-06-19 | 1979-05-08 | Chemetal Corporation | Deposition method and products |
US4162338A (en) * | 1972-02-04 | 1979-07-24 | Schwarzkopf Development Corporation | Coated cemented carbide elements and their manufacture |
US4239819A (en) * | 1978-12-11 | 1980-12-16 | Chemetal Corporation | Deposition method and products |
DE2943585A1 (en) * | 1979-10-29 | 1981-04-30 | Hollingsworth Gmbh, 7265 Neubulach | METHOD FOR INCREASING THE HARDNESS AND WEAR RESISTANCE OF THE SURFACE OF A STEEL WORKPIECE |
US4337300A (en) * | 1979-08-09 | 1982-06-29 | Mitsubishi Kinzoku Kabushiki Kaisha | Surface-coated blade member for cutting tools and process for producing same |
US4343865A (en) * | 1981-06-24 | 1982-08-10 | General Electric Company | Hard metal body and method of making same |
US4406670A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Nitride coated composite modified silicon aluminum oxynitride cutting tools |
US4406667A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Nitride coated composite silicon nitride cutting tools |
US4406669A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Carbonitride coated composite modified silicon aluminum oxynitride cutting tools |
US4406668A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Nitride coated silicon nitride cutting tools |
US4409004A (en) * | 1982-05-20 | 1983-10-11 | Gte Laboratories Incorporated | Carbonitride coated composite silicon nitride cutting tools |
US4409003A (en) * | 1982-05-20 | 1983-10-11 | Gte Laboratories Incorporated | Carbonitride coated silicon nitride cutting tools |
DE3221388A1 (en) * | 1982-06-05 | 1983-12-08 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München | Process for coating a tool made of deposition-hardening material with hard substances by the CVD technique |
US4431431A (en) * | 1982-05-20 | 1984-02-14 | Gte Laboratories Incorporated | Carbide coated silicon nitride cutting tools |
US4436775A (en) | 1981-06-24 | 1984-03-13 | General Electric Company | Hard metal body and method of making same |
US4441894A (en) * | 1983-09-26 | 1984-04-10 | Gte Laboratories Incorporated | Coated composite silicon nitride cutting tools |
US4450205A (en) * | 1979-10-26 | 1984-05-22 | Mitsubishi Kinzoku Kabushiki Kaisha | Surface-coated blade member of super hard alloy for cutting tools and process for producing same |
US4497874A (en) * | 1983-04-28 | 1985-02-05 | General Electric Company | Coated carbide cutting tool insert |
US4525389A (en) * | 1982-12-11 | 1985-06-25 | Aktiengesellschaft M.A.N. Maschinenfabrik Augsburg-Nurnberg | Method for conveying and treating a gas employed for the coating of workpieces by means of a chemical, heterogeneous vapor-phase reaction |
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US4873115A (en) * | 1982-08-13 | 1989-10-10 | Toa Nenryo Kogyo K.K. | Method of sythesizing carbon film and carbon particles in a vapor phase |
US4892788A (en) * | 1988-03-28 | 1990-01-09 | Air Products And Chemicals, Inc. | Graphite brazing fixture coated with composite layers of titanium carbide and titanium nitride |
US5156725A (en) * | 1991-10-17 | 1992-10-20 | The Dow Chemical Company | Method for producing metal carbide or carbonitride coating on ceramic substrate |
US5232522A (en) * | 1991-10-17 | 1993-08-03 | The Dow Chemical Company | Rapid omnidirectional compaction process for producing metal nitride, carbide, or carbonitride coating on ceramic substrate |
US5300951A (en) * | 1985-11-28 | 1994-04-05 | Kabushiki Kaisha Toshiba | Member coated with ceramic material and method of manufacturing the same |
US5308707A (en) * | 1991-10-07 | 1994-05-03 | Nitruvid | Treatment process for depositing a layer of carbon in vapour phase on the surface of a metal article and article thus obtained |
US5458754A (en) * | 1991-04-22 | 1995-10-17 | Multi-Arc Scientific Coatings | Plasma enhancement apparatus and method for physical vapor deposition |
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US20030126945A1 (en) * | 2000-03-24 | 2003-07-10 | Yixiong Liu | Cemented carbide tool and method of making |
US6638474B2 (en) | 2000-03-24 | 2003-10-28 | Kennametal Inc. | method of making cemented carbide tool |
US20060093407A1 (en) * | 2004-11-04 | 2006-05-04 | Konica Minolta Business Technologies, Inc. | Image forming method and image forming apparatus |
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US20180323427A1 (en) * | 2015-11-09 | 2018-11-08 | Kabushiki Kaisha Toyota Jidoshokki | Negative electrode active material |
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-
1970
- 1970-07-13 US US54362A patent/US3684585A/en not_active Expired - Lifetime
Cited By (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4162338A (en) * | 1972-02-04 | 1979-07-24 | Schwarzkopf Development Corporation | Coated cemented carbide elements and their manufacture |
US4101703A (en) * | 1972-02-04 | 1978-07-18 | Schwarzkopf Development Corporation | Coated cemented carbide elements |
US3969130A (en) * | 1973-02-05 | 1976-07-13 | General Atomic Company | Carbon-coated articles and method of making same |
US4040870A (en) * | 1973-05-07 | 1977-08-09 | Chemetal Corporation | Deposition method |
US3874900A (en) * | 1973-08-13 | 1975-04-01 | Materials Technology Corp | Article coated with titanium carbide and titanium nitride |
US3964937A (en) * | 1973-08-13 | 1976-06-22 | Materials Technology Corporation | Method of making a composite coating |
US4153483A (en) * | 1975-06-19 | 1979-05-08 | Chemetal Corporation | Deposition method and products |
DE2727250A1 (en) * | 1976-06-18 | 1977-12-29 | Sumitomo Electric Industries | SURFACE-COATED SINTER HARD METAL OBJECTS AND A PROCESS FOR THEIR PRODUCTION |
US4112148A (en) * | 1976-08-09 | 1978-09-05 | Materials Technology Corporation | Method of co-deposit coating aluminum oxide and titanium oxide |
US4052530A (en) * | 1976-08-09 | 1977-10-04 | Materials Technology Corporation | Co-deposited coating of aluminum oxide and titanium oxide and method of making same |
US4097711A (en) * | 1976-09-16 | 1978-06-27 | Ingersoll-Rand Company | Roller shell hard coating |
US4107352A (en) * | 1977-01-13 | 1978-08-15 | Westinghouse Canada Limited | Chemical vapor deposition |
US4239819A (en) * | 1978-12-11 | 1980-12-16 | Chemetal Corporation | Deposition method and products |
US4337300A (en) * | 1979-08-09 | 1982-06-29 | Mitsubishi Kinzoku Kabushiki Kaisha | Surface-coated blade member for cutting tools and process for producing same |
US4450205A (en) * | 1979-10-26 | 1984-05-22 | Mitsubishi Kinzoku Kabushiki Kaisha | Surface-coated blade member of super hard alloy for cutting tools and process for producing same |
DE2943585A1 (en) * | 1979-10-29 | 1981-04-30 | Hollingsworth Gmbh, 7265 Neubulach | METHOD FOR INCREASING THE HARDNESS AND WEAR RESISTANCE OF THE SURFACE OF A STEEL WORKPIECE |
US4436775A (en) | 1981-06-24 | 1984-03-13 | General Electric Company | Hard metal body and method of making same |
US4343865A (en) * | 1981-06-24 | 1982-08-10 | General Electric Company | Hard metal body and method of making same |
US4409004A (en) * | 1982-05-20 | 1983-10-11 | Gte Laboratories Incorporated | Carbonitride coated composite silicon nitride cutting tools |
US4406668A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Nitride coated silicon nitride cutting tools |
US4409003A (en) * | 1982-05-20 | 1983-10-11 | Gte Laboratories Incorporated | Carbonitride coated silicon nitride cutting tools |
US4431431A (en) * | 1982-05-20 | 1984-02-14 | Gte Laboratories Incorporated | Carbide coated silicon nitride cutting tools |
US4406669A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Carbonitride coated composite modified silicon aluminum oxynitride cutting tools |
US4406667A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Nitride coated composite silicon nitride cutting tools |
US4406670A (en) * | 1982-05-20 | 1983-09-27 | Gte Laboratories Incorporated | Nitride coated composite modified silicon aluminum oxynitride cutting tools |
DE3221388A1 (en) * | 1982-06-05 | 1983-12-08 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München | Process for coating a tool made of deposition-hardening material with hard substances by the CVD technique |
US4873115A (en) * | 1982-08-13 | 1989-10-10 | Toa Nenryo Kogyo K.K. | Method of sythesizing carbon film and carbon particles in a vapor phase |
US4525389A (en) * | 1982-12-11 | 1985-06-25 | Aktiengesellschaft M.A.N. Maschinenfabrik Augsburg-Nurnberg | Method for conveying and treating a gas employed for the coating of workpieces by means of a chemical, heterogeneous vapor-phase reaction |
US4497874A (en) * | 1983-04-28 | 1985-02-05 | General Electric Company | Coated carbide cutting tool insert |
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US4441894A (en) * | 1983-09-26 | 1984-04-10 | Gte Laboratories Incorporated | Coated composite silicon nitride cutting tools |
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