TWI737249B - Fingerprint identification chip packaging structure and manufacture method thereof - Google Patents

Fingerprint identification chip packaging structure and manufacture method thereof Download PDF

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TWI737249B
TWI737249B TW109111405A TW109111405A TWI737249B TW I737249 B TWI737249 B TW I737249B TW 109111405 A TW109111405 A TW 109111405A TW 109111405 A TW109111405 A TW 109111405A TW I737249 B TWI737249 B TW I737249B
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fingerprint recognition
layer
packaging
chip
fingerprint identification
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TW109111405A
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TW202139376A (en
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呂香樺
潘盈潔
倪慶羽
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虹晶科技股份有限公司
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Abstract

The present disclosure provides a fingerprint identification chip packaging structure, including: a packaging layer, a redistribution layer and a plurality of pins. The packaging layer includes a fingerprint identification chip, a plurality of conductive pillars and a packaging material layer covering the fingerprint identification chip and the conductive pillars. The redistribution layer located on a side of the packaging layer and is close to the front surface of the fingerprint identification chip. The redistribution layer includes a plurality of lines, the fingerprint identification chip is electrically connected to the plurality of conductive pillars by the plurality of lines. The plurality of pins are provided at a side of the packaging layer away from the redistribution layer. The plurality of pins correspond to the plurality of conductive pillars one by one. Each of the plurality of pins is electrically connected to one conductive pillar. The present disclosure also provides a manufacture method of the above-mentioned fingerprint identification chip packaging structure. The above-mentioned fingerprint recognition chip packaging structure does not need a substrate, therefore it is beneficial to reduce the thickness and manufacturing cost.

Description

指紋識別晶片封裝結構及其製作方法 Fingerprint identification chip packaging structure and manufacturing method thereof

本發明涉及晶片封裝技術領域,尤其涉及一種指紋識別晶片封裝結構及其製作方法。 The invention relates to the technical field of chip packaging, in particular to a fingerprint identification chip packaging structure and a manufacturing method thereof.

指紋識別技術被廣泛應用於顯示裝置、考勤設備、門鎖等電子裝置中。習知技術中對指紋識別晶片進行封裝時,由於避免厚度很小的指紋識別晶片在封裝過程中發生斷裂等損壞,常在一基板上封裝指紋識別晶片,該基板可為印刷電路板,指紋識別晶片及該基板電性連接。即,指紋識別晶片與該印刷電路版(基板)封裝在一起。在使用時,將該與基板封裝在一起的指紋識別晶片連接到母板(比如液晶顯示裝置的TFT基板)上去。然而,該基板的設置使得指紋識別晶片的整體封裝厚度較厚,不利於應用該指紋識別晶片的電子裝置的輕薄化。 Fingerprint recognition technology is widely used in electronic devices such as display devices, attendance equipment, and door locks. When the fingerprint recognition chip is packaged in the prior art, since the fingerprint recognition chip with a small thickness is prevented from breaking and other damages during the packaging process, the fingerprint recognition chip is often packaged on a substrate, which can be a printed circuit board, fingerprint recognition The chip and the substrate are electrically connected. That is, the fingerprint recognition chip is packaged with the printed circuit board (substrate). In use, the fingerprint recognition chip packaged with the substrate is connected to the motherboard (such as the TFT substrate of a liquid crystal display device). However, the arrangement of the substrate makes the overall package thickness of the fingerprint identification chip thicker, which is not conducive to the lightness and thinness of the electronic device using the fingerprint identification chip.

本發明第一方面提供一種指紋識別晶片封裝結構,包括:封裝層,包括指紋識別晶片、複數導電柱及包覆所述指紋識別晶片及所述導電柱的封裝材料;重佈線層,設置於所述封裝層的一側且靠近所述指紋識別晶片的正面,包括複數引線,所述指紋識別晶片藉由所述引線分別與對應的導電柱電性連接;以及接腳,設置於所述封裝層遠離所述重佈線層的一側,所述接腳與所述導電柱一一對應,每個接腳電性連接一條導電柱。 The first aspect of the present invention provides a fingerprint recognition chip packaging structure, including: a packaging layer including a fingerprint recognition chip, a plurality of conductive pillars, and packaging materials covering the fingerprint recognition chip and the conductive pillars; One side of the packaging layer close to the front surface of the fingerprint identification chip includes a plurality of leads, and the fingerprint identification chip is electrically connected to the corresponding conductive posts through the leads; and pins are arranged on the packaging layer On the side far away from the redistribution layer, the pins correspond to the conductive pillars one-to-one, and each pin is electrically connected to a conductive pillar.

本發明第二方面提供一種指紋識別晶片封裝結構的製作方法,包括: 提供一承載板,將複數指紋識別晶片間隔設置於所述承載板上,其中所述指紋識別晶片的正面朝向所述承載板;在所述承載板上形成複數導電柱,每個指紋識別晶片對應至少一條導電柱;在所述承載板上形成封裝材料,使得所述封裝材料包覆所述指紋識別晶片及所述導電柱,以形成封裝層;對所述封裝材料遠離所述承載板的一側表面進行研磨,使得所述封裝材料遠離所述承載板的一側表面與所述導電柱遠離所述指紋識別晶片的一端的端面齊平;將所述承載板轉移至所述指紋識別晶片的另一側,在所述封裝層遠離所述承載板的一側表面形成重佈線層,在所述重佈線層中形成複數引線及填充所述引線之間的空隙的絕緣材料,所述引線電性連接所述指紋識別晶片及所述導電柱;在所述重佈線層遠離所述封裝層的一側貼附接合薄膜;將所述承載板剝離所述封裝層並移除所述承載板;在所述接合薄膜遠離所述重佈線層的一側表面貼附保護層;以及在所述封裝層遠離所述重佈線層的一側表面形成複數接腳,每個接腳電性連接一條導電柱,得到指紋識別封裝陣列;對所述指紋識別封裝陣列進行切割,得到複數包含至少一個指紋識別晶片的指紋識別晶片封裝結構。 The second aspect of the present invention provides a method for manufacturing a fingerprint identification chip packaging structure, including: A carrier board is provided, and a plurality of fingerprint recognition chips are arranged on the carrier board at intervals, wherein the front of the fingerprint recognition chip faces the carrier board; a plurality of conductive pillars are formed on the carrier board, and each fingerprint recognition chip corresponds to At least one conductive pillar; forming a packaging material on the carrier board so that the packaging material covers the fingerprint identification chip and the conductive pillar to form a packaging layer; Grind the side surface so that the surface of the packaging material away from the carrier board is flush with the end surface of the conductive column at the end away from the fingerprint recognition chip; transfer the carrier board to the fingerprint recognition chip On the other side, a redistribution layer is formed on the surface of the packaging layer away from the carrier board, and a plurality of leads and an insulating material filling the gaps between the leads are formed in the redistribution layer. Sexually connect the fingerprint recognition chip and the conductive post; attach a bonding film on the side of the redistribution layer away from the packaging layer; peel off the packaging layer from the carrier board and remove the carrier board; A protective layer is attached to the surface of the bonding film away from the redistribution layer; and a plurality of pins are formed on the surface of the encapsulation layer away from the redistribution layer, and each pin is electrically connected to a conductive line Column to obtain a fingerprint recognition package array; cutting the fingerprint recognition package array to obtain a plurality of fingerprint recognition chip package structures containing at least one fingerprint recognition chip.

上述指紋識別晶片封裝結構無需增加基板的結構,故有利於減少指紋識別晶片封裝結構的整體封裝厚度,有利於指紋識別晶片封裝結構的輕薄化發展,同時也有利於降低製造成本。上述指紋識別晶片封裝結構的製作方法,無需使用額外封裝基板,因此可以減小封裝厚度,減小製作成本,在此基礎上還可有效防止封裝過程中指紋識別晶片發生斷裂等損壞。 The fingerprint identification chip packaging structure does not need to increase the structure of the substrate, so it is beneficial to reduce the overall packaging thickness of the fingerprint identification chip packaging structure, is beneficial to the light and thin development of the fingerprint identification chip packaging structure, and is also beneficial to reduce the manufacturing cost. The manufacturing method of the fingerprint recognition chip packaging structure does not need to use an additional packaging substrate, so the package thickness can be reduced, and the manufacturing cost can be reduced. On this basis, the fingerprint recognition chip can be effectively prevented from breaking and other damages during the packaging process.

10:指紋識別晶片封裝結構 10: Fingerprint recognition chip package structure

111:指紋識別晶片 111: Fingerprint recognition chip

112:導電柱 112: Conductive column

113:封裝材料 113: Packaging materials

120:重佈線層 120: Redistribution layer

121:引線 121: Lead

123:絕緣材料 123: Insulation material

130:接腳 130: pin

140:保護層 140: protective layer

150:接合薄膜 150: Bonding film

160:承載板 160: carrier board

170:指紋識別封裝陣列 170: Fingerprint Identification Package Array

圖1為本發明實施例提供的指紋識別晶片封裝結構的結構示意圖。 FIG. 1 is a schematic structural diagram of a fingerprint identification chip package structure provided by an embodiment of the present invention.

圖2為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S1時的剖面示意圖。 2 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S1 in the manufacturing process.

圖3為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S2時的剖面示意圖。 3 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S2 in the manufacturing process.

圖4為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S3時的剖面示意圖。 4 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S3 in the manufacturing process.

圖5為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S4時的剖面示意圖。 5 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S4 in the manufacturing process.

圖6為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S5時的剖面示意圖。 6 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S5 in the manufacturing process.

圖7為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S6時的剖面示意圖。 FIG. 7 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S6 in the manufacturing process.

圖8為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S7時的剖面示意圖。 FIG. 8 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S7 in the manufacturing process.

圖9為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S8時的剖面示意圖。 9 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S8 in the manufacturing process.

圖10為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S9時的剖面示意圖。 10 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S9 in the manufacturing process.

為了能夠更清楚地理解本發明的上述目的、特徵及優點,下面結合附圖及具體實施例對本發明進行詳細描述。需要說明的是,在不衝突的情況下,本申請的實施例及實施例中的特徵可以相互組合。 In order to be able to understand the above objectives, features and advantages of the present invention more clearly, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the embodiments of the application and the features in the embodiments can be combined with each other if there is no conflict.

在下面的描述中闡述了很多具體細節以便於充分理解本發明,所描述的實施例僅是本發明一部分實施例,而不是全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有做出創造性勞動前提下所獲得的所有其他實施例,都屬本發明保護的範圍。 In the following description, many specific details are set forth in order to fully understand the present invention. The described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

除非另有定義,本文所使用的所有的技術及科學術語與屬本發明的技術領域的技術人員通常理解的含義相同。本文中在本發明的說明書中所使用的術語只是為了描述具體的實施例的目的,不是旨在於限制本發明。 Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments, and are not intended to limit the present invention.

請參閱圖1,本發明實施例的指紋識別晶片封裝結構10包括封裝層,所述封裝層包括指紋識別晶片111、複數導電柱112以及包覆指紋識別晶片 111及導電柱112封裝材料113。指紋識別晶片111的一表面相對於封裝材料113露出,所述導電柱112的兩端相對於封裝材料113露出。指紋識別晶片111的類型比如可以是光學式指紋識別晶片、電容式指紋識別晶片或超聲波式指紋識別晶片。導電柱112的材質可為導電性能較好的金屬或合金,比如銅或其合金。封裝材料113的材質為聚醯亞胺、矽膠以及環氧樹脂中的至少一種,但不以此為限制。 Please refer to FIG. 1, the fingerprint recognition chip packaging structure 10 of the embodiment of the present invention includes a packaging layer including a fingerprint recognition chip 111, a plurality of conductive pillars 112, and a encapsulating fingerprint recognition chip 111 and conductive pillar 112 packaging material 113. One surface of the fingerprint identification chip 111 is exposed to the packaging material 113, and two ends of the conductive pillar 112 are exposed to the packaging material 113. The type of the fingerprint recognition chip 111 may be, for example, an optical fingerprint recognition chip, a capacitive fingerprint recognition chip or an ultrasonic fingerprint recognition chip. The material of the conductive pillar 112 may be a metal or alloy with good conductivity, such as copper or its alloy. The material of the packaging material 113 is at least one of polyimide, silicone and epoxy, but it is not limited thereto.

指紋識別晶片封裝結構10還包括重佈線層120,重佈線層120設置於所述封裝層的一側且靠近指紋識別晶片111露出於封裝材料113的表面,重佈線層120包括複數引線121(在圖2所示的剖面視圖中僅能看到兩條),指紋識別晶片111藉由所述引線121分別與對應的導電柱112電性連接。引線121的材質為導電性能較好的金屬或合金,例如可以為銅、鋁、鎳、金、銀及鈦中的至少一種。在一種實施例中,導電柱112的材質可與引線121的材質相同。重佈線層120還包括填充引線121之間的空隙使得引線121相互絕緣間隔的絕緣材料123,絕緣材料123可例如為環氧樹脂、矽膠、聚醯亞胺(PI)、聚對苯撐苯並雙惡唑(PBO)、苯並環丁烯(BCB)、氧化矽或磷矽玻璃。絕緣材料123完全覆蓋引線121,可保護引線121不受損壞且不影響每條引線121進行單獨的訊號傳輸。本實施例中,指紋識別晶片封裝結構10包含一個指紋識別晶片111。在其他實施例中,指紋識別晶片封裝結構10可包括複數指紋識別晶片111,具體數量可根據實際需求進行設計。 The fingerprint identification chip packaging structure 10 also includes a redistribution layer 120, which is disposed on one side of the packaging layer and is exposed on the surface of the packaging material 113 close to the fingerprint identification chip 111. The redistribution layer 120 includes a plurality of leads 121 (in In the cross-sectional view shown in FIG. 2, only two can be seen), the fingerprint identification chip 111 is electrically connected to the corresponding conductive pillar 112 through the leads 121 respectively. The material of the lead 121 is a metal or alloy with good electrical conductivity, for example, it may be at least one of copper, aluminum, nickel, gold, silver, and titanium. In an embodiment, the material of the conductive pillar 112 may be the same as the material of the lead 121. The redistribution layer 120 also includes an insulating material 123 that fills the gaps between the leads 121 to insulate the leads 121 from each other. The insulating material 123 may be, for example, epoxy resin, silicone, polyimide (PI), polyparaphenylene benzo Bisoxazole (PBO), benzocyclobutene (BCB), silica or phosphosilicate glass. The insulating material 123 completely covers the lead 121, which can protect the lead 121 from damage and does not affect the individual signal transmission of each lead 121. In this embodiment, the fingerprint identification chip package structure 10 includes a fingerprint identification chip 111. In other embodiments, the fingerprint identification chip packaging structure 10 may include a plurality of fingerprint identification chips 111, and the specific number may be designed according to actual requirements.

指紋識別晶片封裝結構10還包括接腳130,接腳130設置於所述封裝層遠離重佈線層120的一側且與導電柱112一一對應,每個接腳130電性連接一條導電柱112,引線121、導電柱112以及接腳130相互配合以使指紋識別晶片111與外部電路電性連接。所述外部電路用於驅動指紋識別晶片111工作(比如為指紋識別晶片111供電等),外部電路也可接收指紋識別晶片111發出的指紋識別訊號。接腳130的材質為金屬或合金,比如可為鉛、錫及銀中的至少一種,或者為包括鉛、錫或銀的合金,但不以此為限制。本實施例中,接腳130呈凸球狀。 The fingerprint recognition chip packaging structure 10 further includes pins 130. The pins 130 are arranged on the side of the packaging layer away from the redistribution layer 120 and correspond to the conductive pillars 112 one by one. Each of the pins 130 is electrically connected to a conductive pillar 112. , The leads 121, the conductive posts 112 and the pins 130 cooperate with each other to electrically connect the fingerprint identification chip 111 with the external circuit. The external circuit is used to drive the fingerprint recognition chip 111 to work (such as powering the fingerprint recognition chip 111, etc.), and the external circuit can also receive the fingerprint recognition signal sent by the fingerprint recognition chip 111. The material of the pin 130 is metal or alloy, such as at least one of lead, tin, and silver, or an alloy including lead, tin, or silver, but it is not limited thereto. In this embodiment, the pin 130 has a convex spherical shape.

指紋識別晶片封裝結構10還包括保護層140,保護層140設置於重佈線層120遠離所述封裝層的一側,用於對重佈線層120進行防護,具有防刮的作用。保護層140的材質可為高介電常數材料,例如為藍寶石、玻璃、陶瓷、石英、亞克力及塑膠中的至少一種,但不以此為限制。 The fingerprint recognition chip packaging structure 10 further includes a protective layer 140, which is disposed on the side of the redistribution layer 120 away from the encapsulation layer, and is used to protect the redistribution layer 120 and has a scratch-proof effect. The material of the protective layer 140 can be a high dielectric constant material, such as at least one of sapphire, glass, ceramic, quartz, acrylic, and plastic, but it is not limited thereto.

保護層140及重佈線層120之間設置有接合薄膜150,接合薄膜150用於黏接所述保護層140與所述重佈線層120。接合薄膜150的材質可為具有較高透光度、不易氧化的膠黏劑,例如為B階段(B-stage)高分子聚合物膠材或FOW(Film-over-wire)膜。 A bonding film 150 is provided between the protection layer 140 and the redistribution layer 120, and the bonding film 150 is used for bonding the protection layer 140 and the redistribution layer 120. The material of the bonding film 150 can be an adhesive with high light transmittance and not easily oxidized, for example, a B-stage (B-stage) high molecular polymer adhesive or a FOW (Film-over-wire) film.

本發明實施例提供的指紋識別晶片封裝結構10無需增加基板的結構,故有利於減少指紋識別晶片封裝結構10的整體封裝厚度,有利於指紋識別晶片封裝結構10的輕薄化發展,同時也有利於降低由於基板造成的成本。具體地,指紋識別晶片封裝結構10的整體封裝厚度可降至1mm以下。 The fingerprint identification chip packaging structure 10 provided by the embodiment of the present invention does not require an increase in the structure of the substrate, so it is beneficial to reduce the overall packaging thickness of the fingerprint identification chip packaging structure 10, and is beneficial to the light and thin development of the fingerprint identification chip packaging structure 10, and is also beneficial to Reduce the cost due to the substrate. Specifically, the overall packaging thickness of the fingerprint identification chip packaging structure 10 can be reduced to less than 1 mm.

本發明實施例還提供了上述指紋識別晶片封裝結構10的製作方法。本發明實施例的指紋識別晶片封裝結構10的製作方法,包括如下步驟: The embodiment of the present invention also provides a manufacturing method of the above-mentioned fingerprint identification chip packaging structure 10. The manufacturing method of the fingerprint identification chip packaging structure 10 of the embodiment of the present invention includes the following steps:

S1:提供一承載板160,將複數指紋識別晶片111間隔設置於承載板160上,其中指紋識別晶片111的正面朝向承載板160,如圖2所示。承載板160可為塑料或者玻璃板。 S1: A carrier board 160 is provided, and a plurality of fingerprint identification chips 111 are arranged on the carrier board 160 at intervals, wherein the front side of the fingerprint identification chip 111 faces the carrier board 160, as shown in FIG. 2. The carrying plate 160 may be a plastic or glass plate.

S2:在承載板160上形成複數導電柱112,每個指紋識別晶片111對應至少一條導電柱112,如圖3所示。 S2: A plurality of conductive pillars 112 are formed on the carrier board 160, and each fingerprint identification chip 111 corresponds to at least one conductive pillar 112, as shown in FIG. 3.

本實施例中,沿垂直於承載板160方向,導電柱112的高度大於指紋識別晶片111的高度,即,導電柱112遠離承載板160的一端超出指紋識別晶片111遠離承載板160的端面。具體地,導電柱112可使用柱狀的導電材料(例如,銅柱)直接設置於承載板160上,也可藉由先在承載板160上形成金屬層再對所述金屬層進行圖案化蝕刻而成,本發明對此不作限定。 In this embodiment, along the direction perpendicular to the carrier board 160, the height of the conductive pillar 112 is greater than the height of the fingerprint identification chip 111, that is, the end of the conductive pillar 112 away from the carrier board 160 exceeds the end surface of the fingerprint identification chip 111 away from the carrier board 160. Specifically, the conductive pillars 112 may be directly disposed on the carrier board 160 using a pillar-shaped conductive material (for example, copper pillars), or a metal layer may be formed on the carrier board 160 first, and then the metal layer may be patterned and etched. As a result, the present invention does not limit this.

S3:在承載板160上形成封裝材料113,使得封裝材料113封裝包覆指紋識別晶片111及導電柱112,以形成封裝層。也即,本實施例中,所述封裝層包括指紋識別晶片111、導電柱112及封裝材料113,如圖4所示。 S3: The packaging material 113 is formed on the carrier board 160, so that the packaging material 113 encapsulates the fingerprint identification chip 111 and the conductive pillar 112 to form a packaging layer. That is, in this embodiment, the packaging layer includes a fingerprint identification chip 111, a conductive pillar 112, and a packaging material 113, as shown in FIG. 4.

S4:對封裝材料113遠離承載板160的一側表面進行研磨,使得封裝材料113遠離承載板160的一側表面與導電柱112遠離指紋識別晶片111的一端的端面齊平,如圖5所示。 S4: Grind the surface of the packaging material 113 away from the carrier plate 160, so that the surface of the packaging material 113 away from the carrier plate 160 is flush with the end surface of the conductive column 112 at the end away from the fingerprint recognition chip 111, as shown in FIG. 5 .

S5:將承載板160轉移至指紋識別晶片111的另一側,即與封裝材料113被研磨的一側接觸而與指紋識別晶片111,並在所述封裝層遠離承載板160的一側表面形成重佈線層120,在重佈線層120中形成複數引線121及填充引線121之間的 空隙的絕緣材料123,引線121電性連接指紋識別晶片111及導電柱112,如圖6所示。 S5: Transfer the carrier board 160 to the other side of the fingerprint recognition chip 111, that is, contact with the ground side of the packaging material 113 to contact the fingerprint recognition chip 111, and form on the surface of the packaging layer away from the carrier board 160 The redistribution layer 120 is formed in the redistribution layer 120 between the plurality of leads 121 and the filling leads 121 The insulating material 123 in the gap and the lead 121 are electrically connected to the fingerprint identification chip 111 and the conductive pillar 112, as shown in FIG. 6.

S6:在重佈線層120遠離所述封裝層的一側貼附接合薄膜150,如圖7所示。接合薄膜150具有兩相對設置且具有黏性的黏貼面,其中一黏貼面黏貼於重佈線層120遠離所述封裝層的一側。 S6: Attach the bonding film 150 to the side of the redistribution layer 120 away from the encapsulation layer, as shown in FIG. 7. The bonding film 150 has two adhesive surfaces arranged opposite to each other, and one of the adhesive surfaces is adhered to the side of the redistribution layer 120 away from the encapsulation layer.

S7:將承載板160剝離所述封裝層並移除承載板160,如圖8所示。 S7: Peel the carrier board 160 off the packaging layer and remove the carrier board 160, as shown in FIG. 8.

S8:在接合薄膜150遠離重佈線層120的一側表面貼附保護層140,如圖9所示。接合薄膜150的另一黏貼面黏貼保護層140。 S8: Attach a protective layer 140 to the surface of the bonding film 150 away from the redistribution layer 120, as shown in FIG. 9. The protective layer 140 is stuck on the other sticking surface of the bonding film 150.

S9:在所述封裝層遠離重佈線層120的一側表面形成複數接腳130,每個接腳130電性連接一條導電柱112,得到指紋識別封裝陣列170,如圖10所示。 S9: A plurality of pins 130 are formed on the surface of the packaging layer away from the redistribution layer 120, and each pin 130 is electrically connected to a conductive pillar 112 to obtain a fingerprint recognition package array 170, as shown in FIG. 10.

S10:對指紋識別封裝陣列170進行切割,得到複數如圖1所示的包含至少一f個指紋識別晶片111的指紋識別晶片封裝結構10。 S10: Cutting the fingerprint recognition package array 170 to obtain a plurality of fingerprint recognition chip package structures 10 including at least one f fingerprint recognition chip 111 as shown in FIG. 1.

可以理解,S10步驟中是否對指紋識別封裝陣列170進行切割以及切割後每個指紋識別晶片封裝結構10包含多少個指紋識別晶片111是可以根據實際需求進行調整的。 It can be understood that whether the fingerprint recognition package array 170 is cut in step S10 and how many fingerprint recognition chips 111 each fingerprint recognition chip package structure 10 contains after cutting can be adjusted according to actual needs.

對於本領域技術人員而言,顯然本發明不限於上述示範性實施例的細節,而且在不背離本發明的精神或基本特徵的情況下,能夠以其他的具體形式實現本發明。因此,無論從哪一點來看,均應將實施例看作是示範性的,而且是非限制性的,本發明的範圍由所附請求項而不是上述說明限定,因此旨在將落在請求項的等同要件的含義及範圍內的所有變化涵括在本發明內。不應將請求項中的任何附圖標記視為限制所涉及的請求項。此外,顯然“包括”一詞不排除其他單元或步驟,單數不排除複數。裝置請求項中陳述的複數裝置也可以由同一個裝置或系統藉由軟件或者硬件來實現。第一,第二等詞語用來表示名稱,而並不表示任何特定的順序。 For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description, and therefore it is intended to fall within the claims. The meaning of the equivalent elements and all changes within the scope are included in the present invention. Any reference signs in the request shall not be regarded as the request item involved in the restriction. In addition, it is obvious that the word "including" does not exclude other units or steps, and the singular does not exclude the plural. The plural devices stated in the device request item can also be implemented by the same device or system by software or hardware. Words such as first and second are used to denote names, but do not denote any specific order.

本技術領域之普通技術人員應當認識到,以上之實施方式僅是用來說明本發明,而並非用作為對本發明之限定,只要於本發明之實質精神範圍之內,對以上實施例所作之適當改變及變化均落於本發明要求保護之範圍之內。 Those of ordinary skill in the art should realize that the above embodiments are only used to illustrate the present invention, and not to limit the present invention. As long as they fall within the essential spirit of the present invention, the above embodiments are appropriately made. Changes and changes fall within the scope of protection of the present invention.

10:指紋識別晶片封裝結構 10: Fingerprint recognition chip package structure

111:指紋識別晶片 111: Fingerprint recognition chip

112:導電柱 112: Conductive column

113:封裝材料 113: Packaging materials

120:重佈線層 120: Redistribution layer

121:引線 121: Lead

123:絕緣材料 123: Insulation material

130:接腳 130: pin

140:保護層 140: protective layer

150:接合薄膜 150: Bonding film

Claims (9)

一種指紋識別晶片封裝結構,其改良在於,包括:封裝層,包括指紋識別晶片、複數導電柱及包覆所述指紋識別晶片及所述導電柱的封裝材料,所述指紋識別晶片的一表面相對所述封裝層裸露;重佈線層,設置於所述封裝層的一側且靠近所述指紋識別晶片相對所述封裝層裸露的表面,所述重佈線層包括複數引線和絕緣材料,所述絕緣材料填充所述複數引線之間的空隙且完全覆蓋並直接接觸所述指紋識別晶片相對所述封裝層裸露的表面,所述指紋識別晶片相對所述封裝層裸露的表面藉由所述引線分別與對應的導電柱電性連接;以及接腳,設置於所述封裝層遠離所述重佈線層的一側,所述接腳與所述導電柱一一對應,每個接腳電性連接一條導電柱。 A fingerprint identification chip packaging structure, which is improved in that it includes: a packaging layer including a fingerprint identification chip, a plurality of conductive pillars, and packaging materials covering the fingerprint identification chip and the conductive pillars. One surface of the fingerprint identification chip is opposite to The encapsulation layer is exposed; the redistribution layer is arranged on one side of the encapsulation layer and is close to the exposed surface of the fingerprint recognition chip with respect to the encapsulation layer. The redistribution layer includes a plurality of leads and insulating materials, and the insulation The material fills the gaps between the plurality of leads and completely covers and directly contacts the exposed surface of the fingerprint identification chip with respect to the packaging layer, and the exposed surface of the fingerprint identification chip with respect to the packaging layer is respectively connected with Corresponding conductive posts are electrically connected; and pins are arranged on the side of the packaging layer away from the redistribution layer, the pins correspond to the conductive posts one-to-one, and each pin is electrically connected to a conductive line column. 如請求項1所述的指紋識別晶片封裝結構,其中,所述引線、所述導電柱以及所述接腳相互配合以使所述指紋識別晶片與外部電路電性連接,所述外部電路用於驅動所述指紋識別晶片工作。 The fingerprint identification chip packaging structure according to claim 1, wherein the leads, the conductive posts, and the pins cooperate with each other to electrically connect the fingerprint identification chip to an external circuit, and the external circuit is used for Drive the fingerprint recognition chip to work. 如請求項1所述的指紋識別晶片封裝結構,其中,所述指紋識別晶片為一個或複數,每個指紋識別晶片藉由對應的所述引線與對應的導電柱電性連接。 The fingerprint recognition chip package structure according to claim 1, wherein the fingerprint recognition chip is one or more, and each fingerprint recognition chip is electrically connected to the corresponding conductive pillar through the corresponding lead. 如請求項1所述的指紋識別晶片封裝結構,其中,所述指紋識別晶片封裝結構還包括保護層,所述保護層設置於所述重佈線層遠離所述封裝層的一側。 The fingerprint identification chip packaging structure according to claim 1, wherein the fingerprint identification chip packaging structure further includes a protective layer disposed on a side of the redistribution layer away from the packaging layer. 如請求項4所述的指紋識別晶片封裝結構,其中,所述保護層的材質為藍寶石、玻璃、陶瓷、石英、亞克力及塑膠中的至少一種。 The fingerprint recognition chip packaging structure according to claim 4, wherein the material of the protective layer is at least one of sapphire, glass, ceramic, quartz, acrylic, and plastic. 如請求項4所述的指紋識別晶片封裝結構,其中,所述保護層及所述重佈線層之間設置有接合薄膜,所述接合薄膜用於黏接所述保護層及所述重佈線層。 The fingerprint recognition chip packaging structure according to claim 4, wherein a bonding film is provided between the protection layer and the redistribution layer, and the bonding film is used to bond the protection layer and the redistribution layer . 如請求項1所述的指紋識別晶片封裝結構,其中,所述指紋識別晶片是光學式指紋識別晶片、電容式指紋識別晶片或超聲波式指紋識別晶片中的一種。 The fingerprint recognition chip packaging structure according to claim 1, wherein the fingerprint recognition chip is one of an optical fingerprint recognition chip, a capacitive fingerprint recognition chip or an ultrasonic fingerprint recognition chip. 如請求項1所述的指紋識別晶片封裝結構,其中,所述封裝材料的材質為聚醯亞胺、矽膠以及環氧樹脂中的至少一種。 The fingerprint recognition chip packaging structure according to claim 1, wherein the material of the packaging material is at least one of polyimide, silicone and epoxy. 一種指紋識別晶片封裝結構的製作方法,其改良在於,包括:提供一承載板,將複數指紋識別晶片間隔設置於所述承載板上,其中所述指紋識別晶片的正面朝向所述承載板;在所述承載板上形成複數導電柱,每個指紋識別晶片對應至少一條導電柱;在所述承載板上形成封裝材料,使得所述封裝材料包覆所述指紋識別晶片及所述導電柱,以形成封裝層;對所述封裝材料遠離所述承載板的一側表面進行研磨,使得所述封裝材料遠離所述承載板的一側表面與所述導電柱遠離所述指紋識別晶片的一端的端面齊平;將所述承載板轉移至所述指紋識別晶片的另一側,在所述封裝層遠離所述承載板的一側表面形成重佈線層,在所述重佈線層中形成複數引線及填充所述引線之間的空隙的絕緣材料,所述引線電性連接所述指紋識別晶片及所述導電柱;在所述重佈線層遠離所述封裝層的一側貼附接合薄膜;將所述承載板剝離所述封裝層並移除所述承載板;在所述接合薄膜遠離所述重佈線層的一側表面貼附保護層;在所述封裝層遠離所述重佈線層的一側表面形成複數接腳,每個接腳電性連接一條導電柱,得到指紋識別封裝陣列;以及對所述指紋識別封裝陣列進行切割,得到複數包含至少一個指紋識別晶片的指紋識別晶片封裝結構。 A method for manufacturing a fingerprint recognition chip packaging structure, the improvement is that it includes: providing a carrier board, and arranging a plurality of fingerprint recognition chips on the carrier board at intervals, wherein the front side of the fingerprint recognition chip faces the carrier board; A plurality of conductive pillars are formed on the carrier board, and each fingerprint identification chip corresponds to at least one conductive pillar; a packaging material is formed on the carrier board so that the packaging material covers the fingerprint identification chip and the conductive pillars to Form an encapsulation layer; grind the side surface of the encapsulation material away from the carrier board so that the side surface of the encapsulation material away from the carrier board and the end surface of the conductive column at one end away from the fingerprint recognition chip Flush; transfer the carrier board to the other side of the fingerprint recognition chip, a redistribution layer is formed on the surface of the packaging layer away from the carrier board, and a plurality of leads and wires are formed in the redistribution layer An insulating material for filling the gaps between the leads, the leads electrically connecting the fingerprint recognition chip and the conductive pillars; attaching a bonding film on the side of the redistribution layer away from the packaging layer; The carrier board peels off the encapsulation layer and removes the carrier board; attach a protective layer on the surface of the bonding film away from the redistribution layer; on the side of the encapsulation layer away from the redistribution layer A plurality of pins are formed on the surface, and each pin is electrically connected to a conductive post to obtain a fingerprint recognition package array; and the fingerprint recognition package array is cut to obtain a plurality of fingerprint recognition chip package structures containing at least one fingerprint recognition chip.
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