TWI737249B - Fingerprint identification chip packaging structure and manufacture method thereof - Google Patents
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Abstract
Description
本發明涉及晶片封裝技術領域,尤其涉及一種指紋識別晶片封裝結構及其製作方法。 The invention relates to the technical field of chip packaging, in particular to a fingerprint identification chip packaging structure and a manufacturing method thereof.
指紋識別技術被廣泛應用於顯示裝置、考勤設備、門鎖等電子裝置中。習知技術中對指紋識別晶片進行封裝時,由於避免厚度很小的指紋識別晶片在封裝過程中發生斷裂等損壞,常在一基板上封裝指紋識別晶片,該基板可為印刷電路板,指紋識別晶片及該基板電性連接。即,指紋識別晶片與該印刷電路版(基板)封裝在一起。在使用時,將該與基板封裝在一起的指紋識別晶片連接到母板(比如液晶顯示裝置的TFT基板)上去。然而,該基板的設置使得指紋識別晶片的整體封裝厚度較厚,不利於應用該指紋識別晶片的電子裝置的輕薄化。 Fingerprint recognition technology is widely used in electronic devices such as display devices, attendance equipment, and door locks. When the fingerprint recognition chip is packaged in the prior art, since the fingerprint recognition chip with a small thickness is prevented from breaking and other damages during the packaging process, the fingerprint recognition chip is often packaged on a substrate, which can be a printed circuit board, fingerprint recognition The chip and the substrate are electrically connected. That is, the fingerprint recognition chip is packaged with the printed circuit board (substrate). In use, the fingerprint recognition chip packaged with the substrate is connected to the motherboard (such as the TFT substrate of a liquid crystal display device). However, the arrangement of the substrate makes the overall package thickness of the fingerprint identification chip thicker, which is not conducive to the lightness and thinness of the electronic device using the fingerprint identification chip.
本發明第一方面提供一種指紋識別晶片封裝結構,包括:封裝層,包括指紋識別晶片、複數導電柱及包覆所述指紋識別晶片及所述導電柱的封裝材料;重佈線層,設置於所述封裝層的一側且靠近所述指紋識別晶片的正面,包括複數引線,所述指紋識別晶片藉由所述引線分別與對應的導電柱電性連接;以及接腳,設置於所述封裝層遠離所述重佈線層的一側,所述接腳與所述導電柱一一對應,每個接腳電性連接一條導電柱。 The first aspect of the present invention provides a fingerprint recognition chip packaging structure, including: a packaging layer including a fingerprint recognition chip, a plurality of conductive pillars, and packaging materials covering the fingerprint recognition chip and the conductive pillars; One side of the packaging layer close to the front surface of the fingerprint identification chip includes a plurality of leads, and the fingerprint identification chip is electrically connected to the corresponding conductive posts through the leads; and pins are arranged on the packaging layer On the side far away from the redistribution layer, the pins correspond to the conductive pillars one-to-one, and each pin is electrically connected to a conductive pillar.
本發明第二方面提供一種指紋識別晶片封裝結構的製作方法,包括: 提供一承載板,將複數指紋識別晶片間隔設置於所述承載板上,其中所述指紋識別晶片的正面朝向所述承載板;在所述承載板上形成複數導電柱,每個指紋識別晶片對應至少一條導電柱;在所述承載板上形成封裝材料,使得所述封裝材料包覆所述指紋識別晶片及所述導電柱,以形成封裝層;對所述封裝材料遠離所述承載板的一側表面進行研磨,使得所述封裝材料遠離所述承載板的一側表面與所述導電柱遠離所述指紋識別晶片的一端的端面齊平;將所述承載板轉移至所述指紋識別晶片的另一側,在所述封裝層遠離所述承載板的一側表面形成重佈線層,在所述重佈線層中形成複數引線及填充所述引線之間的空隙的絕緣材料,所述引線電性連接所述指紋識別晶片及所述導電柱;在所述重佈線層遠離所述封裝層的一側貼附接合薄膜;將所述承載板剝離所述封裝層並移除所述承載板;在所述接合薄膜遠離所述重佈線層的一側表面貼附保護層;以及在所述封裝層遠離所述重佈線層的一側表面形成複數接腳,每個接腳電性連接一條導電柱,得到指紋識別封裝陣列;對所述指紋識別封裝陣列進行切割,得到複數包含至少一個指紋識別晶片的指紋識別晶片封裝結構。 The second aspect of the present invention provides a method for manufacturing a fingerprint identification chip packaging structure, including: A carrier board is provided, and a plurality of fingerprint recognition chips are arranged on the carrier board at intervals, wherein the front of the fingerprint recognition chip faces the carrier board; a plurality of conductive pillars are formed on the carrier board, and each fingerprint recognition chip corresponds to At least one conductive pillar; forming a packaging material on the carrier board so that the packaging material covers the fingerprint identification chip and the conductive pillar to form a packaging layer; Grind the side surface so that the surface of the packaging material away from the carrier board is flush with the end surface of the conductive column at the end away from the fingerprint recognition chip; transfer the carrier board to the fingerprint recognition chip On the other side, a redistribution layer is formed on the surface of the packaging layer away from the carrier board, and a plurality of leads and an insulating material filling the gaps between the leads are formed in the redistribution layer. Sexually connect the fingerprint recognition chip and the conductive post; attach a bonding film on the side of the redistribution layer away from the packaging layer; peel off the packaging layer from the carrier board and remove the carrier board; A protective layer is attached to the surface of the bonding film away from the redistribution layer; and a plurality of pins are formed on the surface of the encapsulation layer away from the redistribution layer, and each pin is electrically connected to a conductive line Column to obtain a fingerprint recognition package array; cutting the fingerprint recognition package array to obtain a plurality of fingerprint recognition chip package structures containing at least one fingerprint recognition chip.
上述指紋識別晶片封裝結構無需增加基板的結構,故有利於減少指紋識別晶片封裝結構的整體封裝厚度,有利於指紋識別晶片封裝結構的輕薄化發展,同時也有利於降低製造成本。上述指紋識別晶片封裝結構的製作方法,無需使用額外封裝基板,因此可以減小封裝厚度,減小製作成本,在此基礎上還可有效防止封裝過程中指紋識別晶片發生斷裂等損壞。 The fingerprint identification chip packaging structure does not need to increase the structure of the substrate, so it is beneficial to reduce the overall packaging thickness of the fingerprint identification chip packaging structure, is beneficial to the light and thin development of the fingerprint identification chip packaging structure, and is also beneficial to reduce the manufacturing cost. The manufacturing method of the fingerprint recognition chip packaging structure does not need to use an additional packaging substrate, so the package thickness can be reduced, and the manufacturing cost can be reduced. On this basis, the fingerprint recognition chip can be effectively prevented from breaking and other damages during the packaging process.
10:指紋識別晶片封裝結構 10: Fingerprint recognition chip package structure
111:指紋識別晶片 111: Fingerprint recognition chip
112:導電柱 112: Conductive column
113:封裝材料 113: Packaging materials
120:重佈線層 120: Redistribution layer
121:引線 121: Lead
123:絕緣材料 123: Insulation material
130:接腳 130: pin
140:保護層 140: protective layer
150:接合薄膜 150: Bonding film
160:承載板 160: carrier board
170:指紋識別封裝陣列 170: Fingerprint Identification Package Array
圖1為本發明實施例提供的指紋識別晶片封裝結構的結構示意圖。 FIG. 1 is a schematic structural diagram of a fingerprint identification chip package structure provided by an embodiment of the present invention.
圖2為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S1時的剖面示意圖。 2 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S1 in the manufacturing process.
圖3為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S2時的剖面示意圖。 3 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S2 in the manufacturing process.
圖4為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S3時的剖面示意圖。 4 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S3 in the manufacturing process.
圖5為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S4時的剖面示意圖。 5 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S4 in the manufacturing process.
圖6為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S5時的剖面示意圖。 6 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S5 in the manufacturing process.
圖7為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S6時的剖面示意圖。 FIG. 7 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S6 in the manufacturing process.
圖8為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S7時的剖面示意圖。 FIG. 8 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S7 in the manufacturing process.
圖9為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S8時的剖面示意圖。 9 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S8 in the manufacturing process.
圖10為本發明實施例提供的指紋識別晶片封裝結構在製作過程中步驟S9時的剖面示意圖。 10 is a schematic cross-sectional view of the fingerprint identification chip package structure provided by an embodiment of the present invention at step S9 in the manufacturing process.
為了能夠更清楚地理解本發明的上述目的、特徵及優點,下面結合附圖及具體實施例對本發明進行詳細描述。需要說明的是,在不衝突的情況下,本申請的實施例及實施例中的特徵可以相互組合。 In order to be able to understand the above objectives, features and advantages of the present invention more clearly, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the embodiments of the application and the features in the embodiments can be combined with each other if there is no conflict.
在下面的描述中闡述了很多具體細節以便於充分理解本發明,所描述的實施例僅是本發明一部分實施例,而不是全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有做出創造性勞動前提下所獲得的所有其他實施例,都屬本發明保護的範圍。 In the following description, many specific details are set forth in order to fully understand the present invention. The described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
除非另有定義,本文所使用的所有的技術及科學術語與屬本發明的技術領域的技術人員通常理解的含義相同。本文中在本發明的說明書中所使用的術語只是為了描述具體的實施例的目的,不是旨在於限制本發明。 Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments, and are not intended to limit the present invention.
請參閱圖1,本發明實施例的指紋識別晶片封裝結構10包括封裝層,所述封裝層包括指紋識別晶片111、複數導電柱112以及包覆指紋識別晶片
111及導電柱112封裝材料113。指紋識別晶片111的一表面相對於封裝材料113露出,所述導電柱112的兩端相對於封裝材料113露出。指紋識別晶片111的類型比如可以是光學式指紋識別晶片、電容式指紋識別晶片或超聲波式指紋識別晶片。導電柱112的材質可為導電性能較好的金屬或合金,比如銅或其合金。封裝材料113的材質為聚醯亞胺、矽膠以及環氧樹脂中的至少一種,但不以此為限制。
Please refer to FIG. 1, the fingerprint recognition
指紋識別晶片封裝結構10還包括重佈線層120,重佈線層120設置於所述封裝層的一側且靠近指紋識別晶片111露出於封裝材料113的表面,重佈線層120包括複數引線121(在圖2所示的剖面視圖中僅能看到兩條),指紋識別晶片111藉由所述引線121分別與對應的導電柱112電性連接。引線121的材質為導電性能較好的金屬或合金,例如可以為銅、鋁、鎳、金、銀及鈦中的至少一種。在一種實施例中,導電柱112的材質可與引線121的材質相同。重佈線層120還包括填充引線121之間的空隙使得引線121相互絕緣間隔的絕緣材料123,絕緣材料123可例如為環氧樹脂、矽膠、聚醯亞胺(PI)、聚對苯撐苯並雙惡唑(PBO)、苯並環丁烯(BCB)、氧化矽或磷矽玻璃。絕緣材料123完全覆蓋引線121,可保護引線121不受損壞且不影響每條引線121進行單獨的訊號傳輸。本實施例中,指紋識別晶片封裝結構10包含一個指紋識別晶片111。在其他實施例中,指紋識別晶片封裝結構10可包括複數指紋識別晶片111,具體數量可根據實際需求進行設計。
The fingerprint identification
指紋識別晶片封裝結構10還包括接腳130,接腳130設置於所述封裝層遠離重佈線層120的一側且與導電柱112一一對應,每個接腳130電性連接一條導電柱112,引線121、導電柱112以及接腳130相互配合以使指紋識別晶片111與外部電路電性連接。所述外部電路用於驅動指紋識別晶片111工作(比如為指紋識別晶片111供電等),外部電路也可接收指紋識別晶片111發出的指紋識別訊號。接腳130的材質為金屬或合金,比如可為鉛、錫及銀中的至少一種,或者為包括鉛、錫或銀的合金,但不以此為限制。本實施例中,接腳130呈凸球狀。
The fingerprint recognition
指紋識別晶片封裝結構10還包括保護層140,保護層140設置於重佈線層120遠離所述封裝層的一側,用於對重佈線層120進行防護,具有防刮的作用。保護層140的材質可為高介電常數材料,例如為藍寶石、玻璃、陶瓷、石英、亞克力及塑膠中的至少一種,但不以此為限制。
The fingerprint recognition
保護層140及重佈線層120之間設置有接合薄膜150,接合薄膜150用於黏接所述保護層140與所述重佈線層120。接合薄膜150的材質可為具有較高透光度、不易氧化的膠黏劑,例如為B階段(B-stage)高分子聚合物膠材或FOW(Film-over-wire)膜。
A
本發明實施例提供的指紋識別晶片封裝結構10無需增加基板的結構,故有利於減少指紋識別晶片封裝結構10的整體封裝厚度,有利於指紋識別晶片封裝結構10的輕薄化發展,同時也有利於降低由於基板造成的成本。具體地,指紋識別晶片封裝結構10的整體封裝厚度可降至1mm以下。
The fingerprint identification
本發明實施例還提供了上述指紋識別晶片封裝結構10的製作方法。本發明實施例的指紋識別晶片封裝結構10的製作方法,包括如下步驟:
The embodiment of the present invention also provides a manufacturing method of the above-mentioned fingerprint identification
S1:提供一承載板160,將複數指紋識別晶片111間隔設置於承載板160上,其中指紋識別晶片111的正面朝向承載板160,如圖2所示。承載板160可為塑料或者玻璃板。
S1: A
S2:在承載板160上形成複數導電柱112,每個指紋識別晶片111對應至少一條導電柱112,如圖3所示。
S2: A plurality of
本實施例中,沿垂直於承載板160方向,導電柱112的高度大於指紋識別晶片111的高度,即,導電柱112遠離承載板160的一端超出指紋識別晶片111遠離承載板160的端面。具體地,導電柱112可使用柱狀的導電材料(例如,銅柱)直接設置於承載板160上,也可藉由先在承載板160上形成金屬層再對所述金屬層進行圖案化蝕刻而成,本發明對此不作限定。
In this embodiment, along the direction perpendicular to the
S3:在承載板160上形成封裝材料113,使得封裝材料113封裝包覆指紋識別晶片111及導電柱112,以形成封裝層。也即,本實施例中,所述封裝層包括指紋識別晶片111、導電柱112及封裝材料113,如圖4所示。
S3: The
S4:對封裝材料113遠離承載板160的一側表面進行研磨,使得封裝材料113遠離承載板160的一側表面與導電柱112遠離指紋識別晶片111的一端的端面齊平,如圖5所示。
S4: Grind the surface of the
S5:將承載板160轉移至指紋識別晶片111的另一側,即與封裝材料113被研磨的一側接觸而與指紋識別晶片111,並在所述封裝層遠離承載板160的一側表面形成重佈線層120,在重佈線層120中形成複數引線121及填充引線121之間的
空隙的絕緣材料123,引線121電性連接指紋識別晶片111及導電柱112,如圖6所示。
S5: Transfer the
S6:在重佈線層120遠離所述封裝層的一側貼附接合薄膜150,如圖7所示。接合薄膜150具有兩相對設置且具有黏性的黏貼面,其中一黏貼面黏貼於重佈線層120遠離所述封裝層的一側。
S6: Attach the
S7:將承載板160剝離所述封裝層並移除承載板160,如圖8所示。
S7: Peel the
S8:在接合薄膜150遠離重佈線層120的一側表面貼附保護層140,如圖9所示。接合薄膜150的另一黏貼面黏貼保護層140。
S8: Attach a
S9:在所述封裝層遠離重佈線層120的一側表面形成複數接腳130,每個接腳130電性連接一條導電柱112,得到指紋識別封裝陣列170,如圖10所示。
S9: A plurality of
S10:對指紋識別封裝陣列170進行切割,得到複數如圖1所示的包含至少一f個指紋識別晶片111的指紋識別晶片封裝結構10。
S10: Cutting the fingerprint
可以理解,S10步驟中是否對指紋識別封裝陣列170進行切割以及切割後每個指紋識別晶片封裝結構10包含多少個指紋識別晶片111是可以根據實際需求進行調整的。
It can be understood that whether the fingerprint
對於本領域技術人員而言,顯然本發明不限於上述示範性實施例的細節,而且在不背離本發明的精神或基本特徵的情況下,能夠以其他的具體形式實現本發明。因此,無論從哪一點來看,均應將實施例看作是示範性的,而且是非限制性的,本發明的範圍由所附請求項而不是上述說明限定,因此旨在將落在請求項的等同要件的含義及範圍內的所有變化涵括在本發明內。不應將請求項中的任何附圖標記視為限制所涉及的請求項。此外,顯然“包括”一詞不排除其他單元或步驟,單數不排除複數。裝置請求項中陳述的複數裝置也可以由同一個裝置或系統藉由軟件或者硬件來實現。第一,第二等詞語用來表示名稱,而並不表示任何特定的順序。 For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present invention is defined by the appended claims rather than the above description, and therefore it is intended to fall within the claims. The meaning of the equivalent elements and all changes within the scope are included in the present invention. Any reference signs in the request shall not be regarded as the request item involved in the restriction. In addition, it is obvious that the word "including" does not exclude other units or steps, and the singular does not exclude the plural. The plural devices stated in the device request item can also be implemented by the same device or system by software or hardware. Words such as first and second are used to denote names, but do not denote any specific order.
本技術領域之普通技術人員應當認識到,以上之實施方式僅是用來說明本發明,而並非用作為對本發明之限定,只要於本發明之實質精神範圍之內,對以上實施例所作之適當改變及變化均落於本發明要求保護之範圍之內。 Those of ordinary skill in the art should realize that the above embodiments are only used to illustrate the present invention, and not to limit the present invention. As long as they fall within the essential spirit of the present invention, the above embodiments are appropriately made. Changes and changes fall within the scope of protection of the present invention.
10:指紋識別晶片封裝結構 10: Fingerprint recognition chip package structure
111:指紋識別晶片 111: Fingerprint recognition chip
112:導電柱 112: Conductive column
113:封裝材料 113: Packaging materials
120:重佈線層 120: Redistribution layer
121:引線 121: Lead
123:絕緣材料 123: Insulation material
130:接腳 130: pin
140:保護層 140: protective layer
150:接合薄膜 150: Bonding film
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Citations (4)
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US20180061747A1 (en) * | 2016-08-31 | 2018-03-01 | Siliconware Precision Industries Co., Ltd. | Package structure and method for fabricating the same |
EP3418941A1 (en) * | 2016-11-07 | 2018-12-26 | Shenzhen Goodix Technology Co., Ltd. | Fingerprint recognition module and fingerprint recognition chip packaging structure |
TW201917860A (en) * | 2017-10-19 | 2019-05-01 | 南韓商三星電機股份有限公司 | Fan-out sensor package and optical-type fingerprint sensor module including the same |
TW202002753A (en) * | 2018-06-29 | 2020-01-01 | 同欣電子工業股份有限公司 | Fingerprint sensing package module and manufacturing method thereof includes a substrate, a fingerprint sensing chip, a plurality of metal wires, and an insulating package |
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Patent Citations (4)
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US20180061747A1 (en) * | 2016-08-31 | 2018-03-01 | Siliconware Precision Industries Co., Ltd. | Package structure and method for fabricating the same |
EP3418941A1 (en) * | 2016-11-07 | 2018-12-26 | Shenzhen Goodix Technology Co., Ltd. | Fingerprint recognition module and fingerprint recognition chip packaging structure |
TW201917860A (en) * | 2017-10-19 | 2019-05-01 | 南韓商三星電機股份有限公司 | Fan-out sensor package and optical-type fingerprint sensor module including the same |
TW202002753A (en) * | 2018-06-29 | 2020-01-01 | 同欣電子工業股份有限公司 | Fingerprint sensing package module and manufacturing method thereof includes a substrate, a fingerprint sensing chip, a plurality of metal wires, and an insulating package |
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