TWI678009B - Display panel and manufacturing method thereof - Google Patents
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Abstract
一種顯示面板,包括基板、主動元件層設置於基板上、絕緣層設置於主動元件層上、多個第一電極彼此分離、多個介電圖案彼此分離且分別設置於第一電極上、多個有機發光圖案以及第二電極設置於有機發光圖案上。絕緣層具有多個第一區和第一區之間的第二區。第一電極分別設置於絕緣層的第一區上。介電圖案分別設置於第一電極上,且具有多個開口。開口分別與第一電極重疊。有機發光圖案分別設置於介電圖案上及開口中,且介電圖案之間的間隙與絕緣層的第二區重疊。一種顯示面板的製作方法亦被提出。A display panel includes a substrate, an active element layer disposed on the substrate, an insulating layer disposed on the active element layer, a plurality of first electrodes separated from each other, a plurality of dielectric patterns separated from each other and disposed on the first electrode, a plurality of The organic light emitting pattern and the second electrode are disposed on the organic light emitting pattern. The insulating layer has a plurality of first regions and a second region between the first regions. The first electrodes are respectively disposed on the first regions of the insulating layer. The dielectric patterns are respectively disposed on the first electrodes and have a plurality of openings. The openings overlap the first electrodes, respectively. The organic light emitting patterns are respectively disposed on the dielectric pattern and in the opening, and a gap between the dielectric patterns overlaps the second region of the insulating layer. A method for manufacturing a display panel is also proposed.
Description
本發明是有關於一種顯示面板及其製作方法,且特別是有關於一種具有介電圖案的顯示面板及其製作方法。 The present invention relates to a display panel and a manufacturing method thereof, and in particular to a display panel with a dielectric pattern and a manufacturing method thereof.
有機發光二極體(Organic light emitting diode;OLED)具有諸如壽命長、厚度薄、對比高、低熱產生及低功率消耗等優點,因此已被廣泛應用於家用及各種設備中的指示器或光源。 Organic light emitting diodes (OLEDs) have advantages such as long life, thin thickness, high contrast, low heat generation, and low power consumption, so they have been widely used as indicators or light sources in homes and various devices.
噴墨塗佈技術(Ink Jet Printing,IJP)在OLED的製程上能夠提升材料利用率以降低製程成本,但在進行噴墨塗佈之前需形成對應畫素設置的疏水擋牆(bank),以定義每一畫素的區域。然而,在液滴噴塗於擋牆所構成的容置空間內時,液體的表面張力與擋牆側壁附著力的不同導致後續經乾燥製程所形成之薄膜的厚度均勻度不佳,致使畫素周圍的亮度及色度與中心有明顯差異。 Ink Jet Printing (IJP) can improve the material utilization rate in the OLED manufacturing process to reduce the process cost, but before inkjet coating, a hydrophobic bank (pixels) corresponding to the pixel settings must be formed to Defines the area of each pixel. However, when liquid droplets are sprayed into the accommodating space formed by the retaining wall, the difference between the surface tension of the liquid and the adhesion of the side wall of the retaining wall causes the thickness uniformity of the film formed by the subsequent drying process to be poor, resulting in the surrounding pixels The brightness and chroma are significantly different from the center.
本發明提供一種顯示面板,可以改善開口率及膜厚均勻 度,提供良好的顯示品質。 The invention provides a display panel, which can improve the aperture ratio and film thickness uniformity. Degrees to provide good display quality.
本發明的顯示面板,包括基板、主動元件層設置於基板上、絕緣層設置於主動元件層上且具有多個第一區和第一區之間的第二區、多個第一電極彼此分離且分別設置於絕緣層的第一區上、多個介電圖案彼此分離且分別設置於第一電極上且具有多個開口、多個有機發光圖案分別設置於介電圖案上及開口中、以及第二電極設置於有機發光圖案上。開口分別與第一電極重疊。介電圖案之間的間隙與絕緣層的第二區重疊。 The display panel of the present invention includes a substrate, an active element layer disposed on the substrate, an insulating layer disposed on the active element layer, and a plurality of first regions and a second region between the first regions, and a plurality of first electrodes are separated from each other. And disposed on the first region of the insulating layer, a plurality of dielectric patterns are separated from each other and are respectively disposed on the first electrode and have a plurality of openings, a plurality of organic light emitting patterns are disposed on and in the dielectric patterns, and The second electrode is disposed on the organic light emitting pattern. The openings overlap the first electrodes, respectively. A gap between the dielectric patterns overlaps the second region of the insulating layer.
本發明的顯示面板的製作方法包括以下步驟。提供基板。設置主動元件層於基板上。設置絕緣層於主動元件層上,絕緣層具有多個第一區和第一區之間的第二區。設置多個第一電極於絕緣層上,第一電極彼此分離且分別位於第一區上。設置多個介電圖案於第一電極上,介電圖案彼此分離且具有多個開口。開口分別與第一電極重疊,介電圖案之間的間隙與絕緣層的第二區重疊,且間隙暴露絕緣層。間隙暴露的絕緣層進行表面處理。設置多個有機發光圖案分別於介電圖案上及開口中。以及,設置第二電極於有機發光圖案上。 The manufacturing method of the display panel of the present invention includes the following steps. Provide a substrate. An active device layer is disposed on the substrate. An insulating layer is disposed on the active device layer, and the insulating layer has a plurality of first regions and a second region between the first regions. A plurality of first electrodes are disposed on the insulating layer, and the first electrodes are separated from each other and are respectively located on the first region. A plurality of dielectric patterns are disposed on the first electrode. The dielectric patterns are separated from each other and have a plurality of openings. The openings respectively overlap the first electrodes, a gap between the dielectric patterns overlaps a second region of the insulating layer, and the gap exposes the insulating layer. Surface treatment of the exposed insulation layer. A plurality of organic light emitting patterns are disposed on the dielectric pattern and in the openings, respectively. And, a second electrode is disposed on the organic light emitting pattern.
基於上述,本發明一實施例的顯示面板,由於顯示面板在第一電極上設置介電圖案,且介電圖案具有親水及/或親墨性,而介電圖案之間的間隙所暴露的絕緣層可透過表面處理而具有疏水及/或疏墨性。因此,有機發光圖案可固定至介電圖案上。如此,本顯示面板不需藉由習知的擋牆結構即可定義出多個畫素結構, 且可以避免相鄰的有機發光圖案的混合或混色,更可以提升顯示面板的開口率,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案的膜厚可以一致且均勻,使顯示面板可以提供均勻的亮度及良好的顯示品質。 Based on the above, in the display panel according to an embodiment of the present invention, since the display panel is provided with a dielectric pattern on the first electrode, and the dielectric pattern has hydrophilicity and / or ink affinity, the insulation exposed by the gap between the dielectric patterns The layer can be hydrophobic and / or ink repellent through surface treatment. Therefore, the organic light emitting pattern can be fixed to the dielectric pattern. In this way, the display panel can define multiple pixel structures without the need for a conventional retaining wall structure. In addition, the mixing or color mixing of adjacent organic light emitting patterns can be avoided, and the aperture ratio of the display panel can be improved, and the display quality can be improved. In addition, since a conventional barrier wall structure is not required in this embodiment, the film thickness of the organic light emitting pattern can be uniform and uniform, so that the display panel can provide uniform brightness and good display quality.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.
10、10A、10B‧‧‧顯示面板 10, 10A, 10B‧‧‧ display panel
12‧‧‧第一區 12‧‧‧ District 1
14‧‧‧第二區 14‧‧‧Second District
100‧‧‧基板 100‧‧‧ substrate
120‧‧‧主動元件層 120‧‧‧Active component layer
140‧‧‧絕緣層 140‧‧‧ Insulation
142A、142B‧‧‧凸起結構 142A, 142B‧‧‧ raised structure
150‧‧‧第一電極 150‧‧‧first electrode
160‧‧‧介電圖案 160‧‧‧ Dielectric pattern
162‧‧‧開口 162‧‧‧ opening
170‧‧‧電子傳輸層 170‧‧‧ electron transmission layer
180‧‧‧第二電極 180‧‧‧Second electrode
200‧‧‧有機發光圖案 200‧‧‧Organic luminous pattern
200’‧‧‧有機發光材料 200’‧‧‧Organic luminescent material
300‧‧‧表面處理 300‧‧‧ Surface treatment
A-A’‧‧‧剖面線 A-A’‧‧‧ hatching
D‧‧‧間隙 D‧‧‧ Clearance
H1A‧‧‧高度 H1A‧‧‧height
W1‧‧‧第一距離 W1‧‧‧First distance
W2‧‧‧第二距離 W2‧‧‧Second Distance
圖1A至圖1F繪示為本發明一實施例中顯示面板的製作流程的剖面示意圖。 1A to 1F are schematic cross-sectional views illustrating a manufacturing process of a display panel according to an embodiment of the present invention.
圖2A繪示為本發明一實施例中設置多個介電圖案前的顯示面板的局部上視示意圖。 FIG. 2A is a schematic partial top view of a display panel before a plurality of dielectric patterns are provided according to an embodiment of the present invention.
圖2B繪示為本發明一實施例的顯示面板的局部上視示意圖。 FIG. 2B is a schematic partial top view of a display panel according to an embodiment of the present invention.
圖3A繪示為本發明另一實施例的顯示面板的剖面示意圖。 3A is a schematic cross-sectional view of a display panel according to another embodiment of the present invention.
圖3B繪示為本發明又一實施例的顯示面板的剖面示意圖。 3B is a schematic cross-sectional view of a display panel according to another embodiment of the present invention.
在附圖中,為了清楚起見,放大了層、膜、面板、區域等的厚度。在整個說明書中,相同的附圖標記表示相同的元件。應當理解,當諸如層、膜、區域或基板的元件被稱為在另一元件”上”或”連接到”另一元件時,其可以直接在另一元件上或與另一元 件連接,或者中間元件可以也存在。相反,當元件被稱為”直接在另一元件上”或”直接連接到”另一元件時,不存在中間元件。如本文所使用的,”連接”可以指物理及/或電性連接。再者,”電性連接”或”耦合”係可為二元件間存在其它元件。 In the drawings, the thicknesses of layers, films, panels, regions, etc. are exaggerated for clarity. Throughout the description, the same reference numerals denote the same elements. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" another element, it can be directly on or in conjunction with another element. Piece connections, or intermediate elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to a physical and / or electrical connection. Furthermore, "electrically connected" or "coupled" means that there are other elements between the two elements.
應當理解,儘管術語”第一”、”第二”、”第三”等在本文中可以用於描述各種元件、部件、區域、層及/或部分,但是這些元件、部件、區域、及/或部分不應受這些術語的限制。這些術語僅用於將一個元件、部件、區域、層或部分與另一個元件、部件、區域、層或部分區分開。因此,下面討論的”第一元件”、”部件”、”區域”、”層”或”部分”可以被稱為第二元件、部件、區域、層或部分而不脫離本文的教導。 It should be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various elements, components, regions, layers and / or sections, these elements, components, regions, and / or sections, and / Or in part should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a "first element," "component," "region," "layer," or "portion" discussed below may be referred to as a second element, component, region, layer, or section without departing from the teachings herein.
除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。 Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted to have meanings consistent with their meanings in the context of the related art and the present invention, and will not be interpreted as idealized or excessive Formal meaning unless explicitly defined as such in this article.
圖1A至圖1F繪示為本發明一實施例中顯示面板的製作流程的剖面示意圖。圖2A繪示為本發明一實施例中設置多個介電圖案前的顯示面板的局部上視示意圖。圖2B繪示為本發明一實施例的顯示面板的局部上視示意圖。圖2A及圖2B為了方便說明及觀察,僅示意性地繪示部分構件。在本實施例中,顯示面板10(繪 示於圖1F)包括基板100、主動元件層120、絕緣層140、多個第一電極150、多個介電圖案160、多個有機發光圖案200以及第二電極180。以下將以一實施例說明顯示面板10的製作方法。 1A to 1F are schematic cross-sectional views illustrating a manufacturing process of a display panel according to an embodiment of the present invention. FIG. 2A is a schematic partial top view of a display panel before a plurality of dielectric patterns are provided according to an embodiment of the present invention. FIG. 2B is a schematic partial top view of a display panel according to an embodiment of the present invention. FIG. 2A and FIG. 2B only illustrate some components schematically for the convenience of description and observation. In this embodiment, the display panel 10 (drawing (Shown in FIG. 1F) includes a substrate 100, an active device layer 120, an insulating layer 140, a plurality of first electrodes 150, a plurality of dielectric patterns 160, a plurality of organic light emitting patterns 200, and a second electrode 180. Hereinafter, a method for manufacturing the display panel 10 will be described with an embodiment.
請參考圖1A,首先提供基板100。基板100的材料可以是玻璃、石英、有機聚合物、不透光/反射材料(例如:導電材料、金屬、晶圓、陶瓷或其它可適用的材料)或是其它可適用的材料。若使用導電材料或金屬時,則在基板100上覆蓋一層絕緣材料(未繪示),以避免短路問題。 Referring to FIG. 1A, a substrate 100 is first provided. The material of the substrate 100 may be glass, quartz, organic polymers, opaque / reflective materials (eg, conductive materials, metals, wafers, ceramics, or other applicable materials) or other applicable materials. If a conductive material or metal is used, the substrate 100 is covered with a layer of insulating material (not shown) to avoid short circuit problems.
接著,設置主動元件層120於基板100上。主動元件層120可例如是主動元件陣列(未繪示),其中上述的主動元件陣列包括多個薄膜電晶體(thin film transistor,TFT)(未繪示)。薄膜電晶體例如為低溫多晶矽薄膜電晶體(low temperature poly-Si,LTPS)或非晶矽薄膜電晶體(amorphous Si,a-Si),但本發明不以此為限。 Next, an active device layer 120 is disposed on the substrate 100. The active device layer 120 may be, for example, an active device array (not shown), wherein the active device array includes a plurality of thin film transistors (not shown). The thin film transistor is, for example, a low temperature polycrystalline silicon (LTPS) or an amorphous silicon thin film (a-Si), but the invention is not limited thereto.
再來,設置絕緣層140於主動元件層120上。絕緣層140具有多個第一區12和這些第一區12之間的第二區14。在本實施例中,絕緣層140的材料包括無機材料。無機材料包括氮化矽(SiNx)或其他合適材料,本發明不以此為限。 Then, an insulating layer 140 is disposed on the active device layer 120. The insulating layer 140 has a plurality of first regions 12 and a second region 14 between the first regions 12. In this embodiment, a material of the insulating layer 140 includes an inorganic material. The inorganic material includes silicon nitride (SiN x ) or other suitable materials, and the present invention is not limited thereto.
然後,設置多個第一電極150於絕緣層140上。這些第一電極150彼此分離且分別位於第一區12上。請同時參考圖1A及圖2A,在本實施例中,每一第一電極150分別設置於每一第一區12上,且多個第一區12由第二區14隔開以彼此獨立。在本實 施例中,每一第一電極150位於對應的第一區12中彼此獨立以陣列方式排列,但本發明不以此為限。在其他實施例中,每一第一電極150也可以一預先設計的圖案形狀排列。 Then, a plurality of first electrodes 150 are disposed on the insulating layer 140. These first electrodes 150 are separated from each other and are respectively located on the first region 12. Please refer to FIG. 1A and FIG. 2A at the same time. In this embodiment, each first electrode 150 is disposed on each first region 12, and a plurality of first regions 12 are separated by the second region 14 to be independent of each other. In this real In the embodiment, each first electrode 150 is located in the corresponding first region 12 and arranged in an array manner independently of each other, but the present invention is not limited thereto. In other embodiments, each of the first electrodes 150 may be arranged in a predetermined pattern shape.
於一實施例中,第一電極150可以是單層、雙層或多層結構。第一電極150的材料可為導體材料,例如:鋁(Al)、銀(Ag)、鉻(Cr)、銅(Cu)、鎳(Ni)、鈦(Ti)、鉬(Mo)、鎂(Mg)、鉑(Pt)、金(Au)等,又或例如可為為金屬氧化物,例如:銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物、銦鎵氧化物等,又或是其它適當材料、或者是上述至少二者的堆疊層。舉例而言,第一電極150可以是由ITO/Ag/ITO所構成的三層結構,但本發明不以此為限。在其他實施例中,第一電極150也可以是Ti/Al/Ti或是由Mo/Al/Mo所構成的三層結構。在一些實施例中,第一電極150的形成方法可以是化學氣相沉積(CVD)、物理氣相沉積(PVD)、原子層沉積(ALD)、蒸鍍(VTE)、濺鍍(SPT)或其組合。在一些實施例中,第一電極150可作為有機發光圖案200的陽極(anode),但本發明不以此為限。 In one embodiment, the first electrode 150 may have a single-layer, double-layer or multi-layer structure. The material of the first electrode 150 may be a conductive material, such as: aluminum (Al), silver (Ag), chromium (Cr), copper (Cu), nickel (Ni), titanium (Ti), molybdenum (Mo), magnesium ( Mg), platinum (Pt), gold (Au), etc., or may be, for example, metal oxides, such as: indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, indium gallium oxide Etc., or another suitable material, or a stacked layer of at least two of the above. For example, the first electrode 150 may have a three-layer structure composed of ITO / Ag / ITO, but the present invention is not limited thereto. In other embodiments, the first electrode 150 may be Ti / Al / Ti or a three-layer structure composed of Mo / Al / Mo. In some embodiments, the method for forming the first electrode 150 may be chemical vapor deposition (CVD), physical vapor deposition (PVD), atomic layer deposition (ALD), evaporation (VTE), sputtering (SPT), or Its combination. In some embodiments, the first electrode 150 may serve as an anode of the organic light emitting pattern 200, but the present invention is not limited thereto.
請參考圖1B及圖2A,接著,設置多個介電層160於這些第一電極150上。舉例而言,這些介電圖案160於垂直基板100的方向上部分重疊這些第一電極150,且介電圖案160的部分位於第二區14中。這些介電圖案160彼此分離且具有多個開口162。這些開口162位於第一區12中,且在垂直基板100的方向上,分別與對應的第一電極150重疊。具體而言,這些開口162暴露出 這些第一電極150。在本實施例中,這些介電圖案160之間的間隙D與絕緣層140的第二區14重疊,且間隙D暴露絕緣層140。在本實施例中,介電圖案160的形成方法例如先將介電材料(未繪示)整面地形成於絕緣層140上並覆蓋第一電極150。再透過例如黃光微影製程圖案化介電材料以形成多個彼此分離的介電圖案160及對應的開口162,但本發明不以此為限。 Please refer to FIG. 1B and FIG. 2A. Next, a plurality of dielectric layers 160 are disposed on the first electrodes 150. For example, the dielectric patterns 160 partially overlap the first electrodes 150 in a direction perpendicular to the substrate 100, and a portion of the dielectric patterns 160 is located in the second region 14. These dielectric patterns 160 are separated from each other and have a plurality of openings 162. These openings 162 are located in the first region 12 and overlap the corresponding first electrodes 150 in the direction perpendicular to the substrate 100. Specifically, these openings 162 are exposed These first electrodes 150. In this embodiment, the gap D between the dielectric patterns 160 overlaps the second region 14 of the insulating layer 140, and the gap D exposes the insulating layer 140. In this embodiment, a method for forming the dielectric pattern 160 is, for example, firstly forming a dielectric material (not shown) on the entire surface of the insulating layer 140 and covering the first electrode 150. The dielectric material is patterned by, for example, a yellow light lithography process to form a plurality of dielectric patterns 160 and corresponding openings 162 separated from each other, but the present invention is not limited thereto.
值得一提的是,請參考圖1C,然後,於間隙D暴露的絕緣層140進行表面處理300。舉例而言,進行表面處理300的步驟包括以四氟甲烷(CF4)作為工作氣體對絕緣層140進行電漿處理。在本實施例中,在進行表面處理300的步驟後,於間隙D暴露的絕緣層140對於丙二醇甲醚醋酸酯(Propylene glycol methyl ether acetate,PGMEA)具有高接觸角度,且接觸角度大於40°。換句話說,間隙D所暴露的絕緣層140具有疏水及/或疏墨性。具體而言,上述所暴露的絕緣層140具有疏水性表面。如此一來,相較於習知透過擋牆結構以形成定義畫素結構的容置空間,本實施例不需設置擋牆結構以容置後續形成的有機發光圖案200,即可定義出畫素結構並避免相鄰介電圖案160上的有機發光圖案200的混合或混色。 It is worth mentioning that please refer to FIG. 1C, and then perform a surface treatment 300 on the insulating layer 140 exposed on the gap D. For example, the step of performing the surface treatment 300 includes performing a plasma treatment on the insulating layer 140 by using tetrafluoromethane (CF 4 ) as a working gas. In this embodiment, after the surface treatment step 300 is performed, the insulating layer 140 exposed at the gap D has a high contact angle with Propylene glycol methyl ether acetate (PGMEA), and the contact angle is greater than 40 °. In other words, the insulating layer 140 exposed by the gap D is hydrophobic and / or ink-repellent. Specifically, the exposed insulating layer 140 described above has a hydrophobic surface. In this way, compared with the conventional method of forming a receiving space through a retaining wall structure to define a pixel structure, the embodiment does not need to provide a retaining wall structure to accommodate a subsequently formed organic light emitting pattern 200, and can define pixels Structure and avoid mixing or color mixing of the organic light emitting patterns 200 on the adjacent dielectric patterns 160.
接著,請參考圖1D、圖1E及圖2B,設置多個有機發光圖案200分別於介電圖案160上及這些開口162中。請先參考圖1D,在本實施例中,為了提升材料的利用率以降低顯示面板10的製造成本,可藉由噴墨塗佈(ink jet printing,IJP)製程來形成有 機發光圖案200。舉例而言,有機發光材料200’可由噴墨塗佈製程設置於介電圖案160上且位於開口162中並接觸第一電極150。有機發光材料200’例如為作為畫素的有機發光圖案200的液態材料。 Next, referring to FIG. 1D, FIG. 1E, and FIG. 2B, a plurality of organic light emitting patterns 200 are disposed on the dielectric pattern 160 and the openings 162, respectively. Please refer to FIG. 1D first. In this embodiment, in order to improve the utilization rate of materials to reduce the manufacturing cost of the display panel 10, an ink jet printing (IJP) process may be used to form Machine light pattern 200. For example, the organic light-emitting material 200 'can be disposed on the dielectric pattern 160 by the inkjet coating process and located in the opening 162 and contacting the first electrode 150. The organic light emitting material 200 'is, for example, a liquid material of the organic light emitting pattern 200 as a pixel.
然後,請參考圖1D、圖1E及圖2B,透過一固化程序(未繪示),將液態的有機發光材料200’乾燥後形成固態的有機發光圖案200。在一些實施例中,有機發光圖案200可為多層結構,包括電洞注入層(hole injection layer,HIL)、電洞傳輸層(hole transfer layer,HTL)和發光層(emission layer,EL)。圖1E為了方便說明及清楚表示,僅以一層結構表示。 Then, referring to FIG. 1D, FIG. 1E, and FIG. 2B, a solid organic light emitting pattern 200 is formed by drying a liquid organic light emitting material 200 'through a curing process (not shown). In some embodiments, the organic light emitting pattern 200 may be a multilayer structure, including a hole injection layer (HIL), a hole transfer layer (HTL), and an emission layer (EL). FIG. 1E is shown with only one layer structure for convenience of explanation and clear representation.
在一些實施例中,電洞注入層的材料例如是苯二甲藍銅、星狀芳胺類、聚苯胺、聚乙烯二氧噻吩或其他適合的材料。電洞傳輸層的材料例如是三芳香胺類、交叉結構二胺聯苯、二胺聯苯衍生物或其他適合的材料。發光層可以是紅色有機發光圖案、綠色有機發光圖案、藍色有機發光圖案或是混合各頻譜的光產生的不同顏色(例如白、橘、黃等)發光圖案。 In some embodiments, the material of the hole injection layer is, for example, xylylene blue copper, star-shaped aromatic amines, polyaniline, polyethylene dioxythiophene, or other suitable materials. The material of the hole transport layer is, for example, triarylamines, cross-structured diamine biphenyls, diamine biphenyl derivatives, or other suitable materials. The light-emitting layer may be a red organic light-emitting pattern, a green organic light-emitting pattern, a blue organic light-emitting pattern, or a light-emitting pattern of different colors (for example, white, orange, yellow, etc.) generated by mixing light of various spectrums.
值得注意的是,基於液體的表面張力與擋牆結構之吸附力的不同會導致液滴乾燥過程有膜厚不均的狀況,故以上述習知製程所形成的有機發光圖案的厚度隨著靠近擋牆結構漸增,而導致膜厚不均勻。由於本發明一實施例的顯示面板10透過在第一電極150上設置介電圖案160,且介電圖案160的PGMEA接觸角度為小於10°。換句話說,介電圖案160具有親水及/或親墨性。因 此,液滴狀的有機發光材料200’可以吸附至介電圖案160上,並透過疏水及/或疏墨性的絕緣層140而固定在介電圖案160。如此,本實施例不需習知的擋牆結構以容置這些有機發光材料200’,即可定義出多個畫素結構。因此,介電圖案160除了可避免相鄰介電圖案160上的有機發光圖案200的混合或混色更可以提升顯示面板10的開口率,提升顯示品質。此外,由於本實施例不需設置習知的擋牆結構,如此,固化有機發光材料200’後形成的有機發光圖案200的膜厚可以一致且均勻,以提供均勻的亮度及良好的顯示品質。 It is worth noting that the difference between the surface tension of the liquid and the adsorption force of the retaining wall structure will cause the film thickness to be uneven during the drying process of the droplets. Therefore, the thickness of the organic light-emitting pattern formed by the above-mentioned conventional process will gradually increase as the thickness approaches. The structure of the retaining wall is increasing, resulting in uneven film thickness. The display panel 10 according to an embodiment of the present invention provides a dielectric pattern 160 on the first electrode 150, and the PGMEA contact angle of the dielectric pattern 160 is less than 10 °. In other words, the dielectric pattern 160 has hydrophilicity and / or ink affinity. because Accordingly, the droplet-shaped organic light-emitting material 200 'can be adsorbed on the dielectric pattern 160 and fixed to the dielectric pattern 160 through the hydrophobic and / or ink-repellent insulating layer 140. In this way, this embodiment does not need a conventional retaining wall structure to accommodate these organic light-emitting materials 200 ', and a plurality of pixel structures can be defined. Therefore, in addition to avoiding the mixing or color mixing of the organic light emitting patterns 200 on the adjacent dielectric patterns 160, the dielectric patterns 160 can improve the aperture ratio of the display panel 10 and improve the display quality. In addition, since a conventional barrier wall structure is not required in this embodiment, the thickness of the organic light emitting pattern 200 formed after curing the organic light emitting material 200 'can be uniform and uniform, so as to provide uniform brightness and good display quality.
請參考圖1F及圖2B,圖1F繪示為圖2B的顯示面板10沿著剖面線A-A’的剖面示意圖。然後,設置第二電極180於有機發光圖案200上。在本實施例中,於設置第二電極180的步驟之前,可更包括設置電子傳輸層170於有機發光圖案200與第二電極180之間。電子傳輸層170舉例是藉由熱蒸鍍製程形成於有機發光圖案200上,以降低有機發光圖案200的驅動電壓。電子傳輸層170例如是整面的設置於絕緣層140上並覆蓋介電圖案160,並於第二區14中接觸間隙D所暴露的絕緣層140。在本實施例中,電子傳輸層170的材料可以是噁唑衍生物及其樹狀物、金屬螯合物(例如Alq3)、唑類化合物、二氮蒽衍生物、含矽雜環化合物或其他適合的材料。 Please refer to FIG. 1F and FIG. 2B. FIG. 1F is a schematic cross-sectional view of the display panel 10 of FIG. 2B along the section line A-A '. Then, a second electrode 180 is disposed on the organic light emitting pattern 200. In this embodiment, before the step of disposing the second electrode 180, the method may further include disposing an electron transport layer 170 between the organic light emitting pattern 200 and the second electrode 180. For example, the electron transport layer 170 is formed on the organic light emitting pattern 200 by a thermal evaporation process to reduce the driving voltage of the organic light emitting pattern 200. The electron transport layer 170 is, for example, disposed on the entire surface of the insulating layer 140 and covering the dielectric pattern 160, and contacts the insulating layer 140 exposed by the gap D in the second region 14. In this embodiment, the material of the electron transport layer 170 may be an oxazole derivative and a tree thereof, a metal chelate (for example, Alq3), an azole compound, a diazanthrene derivative, a silicon-containing heterocyclic compound, or other Suitable material.
在本實施例中,第二電極180可以整面的方式設置在有機發光圖案200上並重疊介電圖案160、有機發光圖案200及第一 電極150,但本發明不以此為限。第二電極180的材料可為透明的導體材料,例如銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物或銦鍺鋅氧化物等金屬氧化物。在一些實施例中,第二電極180的形成方法可以是化學氣相沉積(CVD)、物理氣相沉積(PVD)、原子層沉積(ALD)、蒸鍍(VTE)、濺鍍(SPT)或其組合。在一些實施例中,第二電極180可作為有機發光圖案200的陰極(cathode)。 In this embodiment, the second electrode 180 may be disposed on the organic light emitting pattern 200 on the entire surface and overlap the dielectric pattern 160, the organic light emitting pattern 200, and the first The electrode 150 is not limited thereto. The material of the second electrode 180 may be a transparent conductive material, such as a metal oxide such as indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, or indium germanium zinc oxide. In some embodiments, the method of forming the second electrode 180 may be chemical vapor deposition (CVD), physical vapor deposition (PVD), atomic layer deposition (ALD), evaporation (VTE), sputtering (SPT), or Its combination. In some embodiments, the second electrode 180 may serve as a cathode of the organic light emitting pattern 200.
簡言之,由於本發明一實施例的顯示面板10在第一電極150上設置介電圖案160,且介電圖案160具有親水及/或親墨性,而介電圖案160之間的間隙D所暴露的絕緣層140可透過表面處理300而具有疏水及/或疏墨性。因此,液滴狀的有機發光材料200’可以吸附至介電圖案160上,並被絕緣層140的間隙D的疏水及/或疏墨性推開而固定在介電圖案160上。如此,本顯示面板10不需藉由習知的擋牆結構以容置這些有機發光材料200’,即可定義出多個畫素結構。因此,介電圖案160除了可避免相鄰介電圖案160上的有機發光圖案200的混合或混色更可以提升顯示面板10的開口率,提升顯示品質。此外,顯示面板10的製程還可被簡化,並降低製作成本。另外,由於本實施例不需設置習知的擋牆結構,如此,固化有機發光材料200’後形成的有機發光圖案200的膜厚可以一致且均勻,使顯示面板10可以提供均勻的亮度及良好的顯示品質。 In short, since the display panel 10 according to an embodiment of the present invention provides a dielectric pattern 160 on the first electrode 150, and the dielectric pattern 160 has hydrophilicity and / or ink affinity, and the gap D between the dielectric patterns 160 is The exposed insulating layer 140 may be hydrophobic and / or oleophobic through the surface treatment 300. Therefore, the droplet-shaped organic light-emitting material 200 'can be adsorbed on the dielectric pattern 160 and pushed away by the hydrophobicity and / or ink repellency of the gap D of the insulating layer 140 to be fixed on the dielectric pattern 160. In this way, the display panel 10 can define a plurality of pixel structures without using a conventional retaining wall structure to accommodate these organic light-emitting materials 200 '. Therefore, in addition to avoiding the mixing or color mixing of the organic light emitting patterns 200 on the adjacent dielectric patterns 160, the dielectric patterns 160 can improve the aperture ratio of the display panel 10 and improve the display quality. In addition, the manufacturing process of the display panel 10 can be simplified and the manufacturing cost can be reduced. In addition, since a conventional retaining wall structure is not required in this embodiment, the thickness of the organic light emitting pattern 200 formed after curing the organic light emitting material 200 ′ can be uniform and uniform, so that the display panel 10 can provide uniform brightness and good performance. Display quality.
在結構上,請參考圖1F及圖2B,顯示面板10包括,基 板100、主動元件層120設置於基板100上、絕緣層140設置於主動元件層120上、多個第一電極150、多個介電圖案160、多個有機發光圖案200以及第二電極180設置於有機發光圖案200上。絕緣層140具有多個第一區12和這些第一區12之間的第二區14。這些第一電極150彼此分離且分別設置於絕緣層140的這些第一區12上。這些介電圖案160彼此分離且分別設置於這些第一電極150上,且具有多個開口162。這些開口162於垂直基板100的方向上分別與這些第一電極150重疊。這些有機發光圖案200分別設置於這些介電圖案160上及這些開口162中,且這些介電圖案160之間的間隙D與絕緣層140的第二區14重疊。第二電極180設置於有機發光圖案200上。在本實施例中,顯示面板10更包括電子傳輸層170設置於有機發光圖案200與第二電極180之間。電子傳輸層170接觸絕緣層140。 Structurally, please refer to FIG. 1F and FIG. 2B. The display panel 10 includes: The board 100, the active element layer 120 are disposed on the substrate 100, the insulating layer 140 is disposed on the active element layer 120, a plurality of first electrodes 150, a plurality of dielectric patterns 160, a plurality of organic light emitting patterns 200, and a second electrode 180 are disposed On the organic light emitting pattern 200. The insulating layer 140 has a plurality of first regions 12 and a second region 14 between the first regions 12. The first electrodes 150 are separated from each other and are respectively disposed on the first regions 12 of the insulating layer 140. The dielectric patterns 160 are separated from each other and are respectively disposed on the first electrodes 150 and have a plurality of openings 162. The openings 162 overlap the first electrodes 150 in a direction perpendicular to the substrate 100. The organic light emitting patterns 200 are respectively disposed on the dielectric patterns 160 and in the openings 162, and the gap D between the dielectric patterns 160 overlaps the second region 14 of the insulating layer 140. The second electrode 180 is disposed on the organic light emitting pattern 200. In this embodiment, the display panel 10 further includes an electron transport layer 170 disposed between the organic light emitting pattern 200 and the second electrode 180. The electron transport layer 170 contacts the insulating layer 140.
請參考圖1F、圖2A及圖2B,在本實施例中,各第一電極150於基板100上的正投影在各介電圖案160於基板100上的正投影內。換句話說,介電圖案160的一部分可以重疊並接觸第一電極150,且另一部份重疊並接觸絕緣層140。此外,有機發光圖案200重疊介電圖案160。介電圖案160於基板100上的正投影外邊緣在有機發光圖案200於基板100上的正投影邊緣內。有機發光圖案200於間隙D中與絕緣層140接觸。在上述的設置下,有機發光圖案200可固定至介電圖案160上。如此,本顯示面板10不需藉由習知的擋牆結構即可定義出多個畫素結構,且可以避 免相鄰的有機發光圖案200的混合或混色,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案200的膜厚可以一致且均勻,使顯示面板10可以提供均勻的亮度及良好的顯示品質。 Please refer to FIGS. 1F, 2A, and 2B. In this embodiment, the orthographic projection of each first electrode 150 on the substrate 100 is within the orthographic projection of each dielectric pattern 160 on the substrate 100. In other words, a part of the dielectric pattern 160 may overlap and contact the first electrode 150, and another part may overlap and contact the insulating layer 140. In addition, the organic light emitting pattern 200 overlaps the dielectric pattern 160. The orthographic projection outer edge of the dielectric pattern 160 on the substrate 100 is within the orthographic projection edge of the organic light emitting pattern 200 on the substrate 100. The organic light emitting pattern 200 is in contact with the insulating layer 140 in the gap D. Under the above arrangement, the organic light emitting pattern 200 may be fixed to the dielectric pattern 160. In this way, the display panel 10 can define multiple pixel structures without using a conventional retaining wall structure, and can avoid The mixing or color mixing of the adjacent organic light emitting patterns 200 is avoided, and the display quality is improved. In addition, since a conventional barrier wall structure is not required in this embodiment, the film thickness of the organic light emitting pattern 200 can be uniform and uniform, so that the display panel 10 can provide uniform brightness and good display quality.
在本實施例中,於垂直基板100的方向上,開口162的邊緣至第二區14的距離W1為大於等於1微米,且小於等於5微米。此外,第一電極150的邊緣至介電圖案160的外邊緣的距離W2為大於等於1微米,且小於等於5微米。在上述的設置下,開口162的尺寸可以調整以提升開口率,且相鄰的有機圖案200之間的距離可以更進一步地縮小,以增加畫素結構的數量,因此更可以提升顯示面板10的顯示品質。 In this embodiment, the distance W1 from the edge of the opening 162 to the second region 14 in the direction perpendicular to the substrate 100 is 1 μm or more and 5 μm or less. In addition, the distance W2 from the edge of the first electrode 150 to the outer edge of the dielectric pattern 160 is 1 μm or more and 5 μm or less. Under the above settings, the size of the opening 162 can be adjusted to increase the aperture ratio, and the distance between adjacent organic patterns 200 can be further reduced to increase the number of pixel structures, so the display panel 10 can be further improved. Display quality.
簡言之,由於本發明一實施例的顯示面板10在第一電極150上設置介電圖案160,且介電圖案160具有親水及/或親墨性,而介電圖案160之間的間隙D所暴露的絕緣層140可透過表面處理300而具有疏水及/或疏墨性。因此,有機發光圖案200可固定至介電圖案160上。如此,本顯示面板10不需藉由習知的擋牆結構即可定義出多個畫素結構,且可以避免相鄰的有機發光圖案200的混合或混色,更可以提升顯示面板10的開口率,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案200的膜厚可以一致且均勻,使顯示面板10可以提供均勻的亮度及良好的顯示品質。 In short, since the display panel 10 according to an embodiment of the present invention provides a dielectric pattern 160 on the first electrode 150, and the dielectric pattern 160 has hydrophilicity and / or ink affinity, and the gap D between the dielectric patterns 160 is The exposed insulating layer 140 may be hydrophobic and / or oleophobic through the surface treatment 300. Therefore, the organic light emitting pattern 200 may be fixed on the dielectric pattern 160. In this way, the display panel 10 can define multiple pixel structures without using a conventional retaining wall structure, and can avoid mixing or color mixing of adjacent organic light emitting patterns 200, and can further improve the aperture ratio of the display panel 10. To improve display quality. In addition, since a conventional barrier wall structure is not required in this embodiment, the film thickness of the organic light emitting pattern 200 can be uniform and uniform, so that the display panel 10 can provide uniform brightness and good display quality.
下述實施例沿用前述實施例的元件標號與部分內容,其 中採用相同的標號來表示相同或近似的元件,關於省略了相同技術內容的部分說明可參考前述實施例,下述實施例中不再重複贅述。 In the following embodiments, the component numbers and parts of the foregoing embodiments are used. The same reference numerals are used to denote the same or similar elements. For the descriptions that omit the same technical content, reference may be made to the foregoing embodiments, which will not be repeated in the following embodiments.
圖3A繪示為本發明另一實施例的顯示面板的剖面示意圖。本實施例所示的顯示面板10A與圖1F所示的顯示面板10類似,主要的差異在於:絕緣層140的第二區14具凸起結構142A,且凸起結構142A於基板100上的正投影與第一電極150於基板100上的正投影分離。在本實施例中,凸起結構142A與絕緣層140為同一膜層。舉例而言,絕緣層140於形成後,可透過黃光微影製程對絕緣層140進行圖案化,以在第二區14形成凸起結構142A。在上述的設置下,凸起結構142A可以形成於相鄰的第一電極150之間,並協助介電圖案160定義出多個畫素結構。具體而言,凸起結構142A可進一步避免相鄰的有機發光圖案200因流動產生的混合或混色。此外,凸起結構142A位於第一電極150之間不具有發光功能的第二區14,因此不會影響顯示面板10A的開口率。如此,顯示面板10A可獲致與上述實施例類似的技術功效。 3A is a schematic cross-sectional view of a display panel according to another embodiment of the present invention. The display panel 10A shown in this embodiment is similar to the display panel 10 shown in FIG. 1F. The main difference is that the second region 14 of the insulating layer 140 has a convex structure 142A, and the convex structure 142A is on the substrate 100. The projection is separated from the orthographic projection of the first electrode 150 on the substrate 100. In this embodiment, the protruding structure 142A and the insulating layer 140 are the same film layer. For example, after the insulating layer 140 is formed, the insulating layer 140 may be patterned through a yellow light lithography process to form a convex structure 142A in the second region 14. Under the above arrangement, the convex structure 142A may be formed between the adjacent first electrodes 150 and assist the dielectric pattern 160 to define a plurality of pixel structures. Specifically, the protruding structure 142A can further avoid mixing or color mixing of adjacent organic light emitting patterns 200 due to flow. In addition, the convex structure 142A is located in the second region 14 having no light-emitting function between the first electrodes 150, so it does not affect the aperture ratio of the display panel 10A. As such, the display panel 10A can obtain technical effects similar to those of the above embodiments.
在本實施例中,凸起結構142A的高度H1A為大於等於0.1微米,且小於等於10微米。舉例而言,凸起結構142A的高度H1A為凸起結構142A的頂面143A至絕緣層140的表面的高度。在上述的設置下,凸起結構142A的高度H1A可以調整至類似於有機發光圖案200的厚度。因此,有機發光圖案200的膜厚可以均勻,更可以減少漏電流的產生,使顯示面板10可以提供均勻的 亮度及良好的顯示品質。 In this embodiment, the height H1A of the protruding structure 142A is 0.1 μm or more and 10 μm or less. For example, the height H1A of the protruding structure 142A is the height from the top surface 143A of the protruding structure 142A to the surface of the insulating layer 140. Under the above setting, the height H1A of the protruding structure 142A can be adjusted to a thickness similar to that of the organic light emitting pattern 200. Therefore, the film thickness of the organic light emitting pattern 200 can be uniform, and the generation of leakage current can be reduced, so that the display panel 10 can provide a uniform Brightness and good display quality.
圖3B繪示為本發明又一實施例的顯示面板的剖面示意圖。本實施例所示的顯示面板10B與圖3A所示的顯示面板10A類似,主要的差異在於:顯示面板10B的凸起結構142B的剖面形狀為圓弧形,而顯示面板10A的凸起結構142A的剖面形狀為梯形。如此,顯示面板10B可獲致與上述實施例類似的技術功效。 3B is a schematic cross-sectional view of a display panel according to another embodiment of the present invention. The display panel 10B shown in this embodiment is similar to the display panel 10A shown in FIG. 3A. The main difference is that the cross-sectional shape of the convex structure 142B of the display panel 10B is circular, and the convex structure 142A of the display panel 10A The cross-sectional shape is trapezoidal. In this way, the display panel 10B can obtain technical effects similar to those of the above embodiment.
綜上所述,本發明一實施例的顯示面板及其製作方法,由於顯示面板在第一電極上設置介電圖案,且介電圖案具有親水及/或親墨性,而介電圖案之間的間隙所暴露的絕緣層可透過表面處理而具有疏水及/或疏墨性。因此,有機發光圖案可固定至介電圖案上。如此,本顯示面板不需藉由習知的擋牆結構即可定義出多個畫素結構,且可以避免相鄰的有機發光圖案的混合或混色,更可以提升顯示面板的開口率,提升顯示品質。另外,由於本實施例不需設置習知的擋牆結構,因此有機發光圖案的膜厚可以一致且均勻,使顯示面板可以提供均勻的亮度及良好的顯示品質。此外,相鄰的第一電極之間可以形成凸起結構,以進一步避免相鄰的有機發光圖案因流動產生的混合或混色。此外,凸起結構位於第一電極之間不具有發光功能的第二區,因此不會影響顯示面板的開口率。另外,凸起結構的高度更可以調整至類似於有機發光圖案的厚度。因此,有機發光圖案的膜厚可以均勻,更可以減少漏電流的產生,使顯示面板可以提供均勻的亮度及良好的顯示品質。 In summary, a display panel and a manufacturing method thereof according to an embodiment of the present invention, because the display panel is provided with a dielectric pattern on the first electrode, and the dielectric pattern has hydrophilicity and / or ink affinity, and the dielectric pattern is between the dielectric patterns. The insulation layer exposed by the gap can be hydrophobic and / or ink repellent through surface treatment. Therefore, the organic light emitting pattern can be fixed to the dielectric pattern. In this way, the display panel can define multiple pixel structures without the need for a conventional retaining wall structure, and can avoid mixing or color mixing of adjacent organic light emitting patterns, and can further improve the aperture ratio of the display panel and the display. quality. In addition, since a conventional barrier wall structure is not required in this embodiment, the film thickness of the organic light emitting pattern can be uniform and uniform, so that the display panel can provide uniform brightness and good display quality. In addition, a convex structure may be formed between adjacent first electrodes to further avoid mixing or color mixing of adjacent organic light emitting patterns due to flow. In addition, the raised structure is located in the second region having no light-emitting function between the first electrodes, so it does not affect the aperture ratio of the display panel. In addition, the height of the raised structure can be adjusted to a thickness similar to the organic light emitting pattern. Therefore, the film thickness of the organic light emitting pattern can be uniform, and the leakage current can be reduced, so that the display panel can provide uniform brightness and good display quality.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.
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