TWI567009B - Conveyor belt device - Google Patents
Conveyor belt device Download PDFInfo
- Publication number
- TWI567009B TWI567009B TW103136772A TW103136772A TWI567009B TW I567009 B TWI567009 B TW I567009B TW 103136772 A TW103136772 A TW 103136772A TW 103136772 A TW103136772 A TW 103136772A TW I567009 B TWI567009 B TW I567009B
- Authority
- TW
- Taiwan
- Prior art keywords
- conveyor belt
- conveyed
- conveyance
- belt portion
- support
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/005—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes comprising two or more co-operating conveying elements with parallel longitudinal axes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Relays Between Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Warehouses Or Storage Devices (AREA)
Description
本發明係關於一種輸送帶裝置。 The present invention relates to a conveyor belt device.
作為搬送被搬送物之搬送裝置，已知有輸送帶裝置。此外，半導體製造裝置、液晶製造裝置所使用之晶圓及玻璃基板等之被搬送物，有時被收容於已規格化之容器之一的FOUP(Front-Opening Unified Pod)；前開式晶圓輸送盒等內後進行搬送。於搬送此種被搬送物之搬送裝置中，為了抑制搬送途中被搬送物之破損等，要求減少搬送中之振動及晃動，於穩定之狀態下進行搬送。 A conveyor device is known as a conveying device that conveys a conveyed object. In addition, a conveyed object such as a wafer or a glass substrate used in a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus may be housed in a FOUP (Front-Opening Unified Pod) of one of the standardized containers; After the inside of the box, etc., it is transported. In order to suppress the damage of the conveyed material during the conveyance, it is required to reduce the vibration and the sway during the conveyance, and to carry it in a stable state.
例如，專利文獻1(日本專利特公平6-2527號公報)中揭示有一種為了如上述般能於穩定之狀態下搬送被搬送物而發明之輸送帶裝置。於專利文獻1中揭示有一種輸送帶裝置，其沿著搬送方向排列有複數台藉由被驅動裝置驅動旋轉之驅動帶輪而使皮帶朝一方向移行之輸送帶單元。並且，於該輸送帶裝置中，於輸送帶單元之間設置輔助輸送帶，並藉由暫時支撐被搬送物而將被搬送物對鄰接之搬送裝置進行交接。 A conveyor belt device invented in order to convey a conveyed object in a stable state as described above is disclosed in Japanese Laid-Open Patent Publication No. Hei 6-2527. Patent Document 1 discloses a conveyor belt device in which a plurality of conveyor belt units that move a belt in one direction by a drive pulley that is driven to rotate by a drive unit are arranged along a conveyance direction. Further, in the conveyor apparatus, an auxiliary conveyor belt is provided between the conveyor belt units, and the conveyed objects are delivered to the adjacent conveying device by temporarily supporting the conveyed objects.
專利文獻1：日本專利特公平6-2527號公報 Patent Document 1: Japanese Patent Special Fair 6-2527
近年來，已導入一種輸送帶裝置，其係於搬送路徑上配置使輸送帶部於大致矩形之本體部上迴旋，用以改變被搬送物之行進方向之迴旋輸送帶。於此種輸送帶裝置中，要求穩定地將被搬送物對鄰接於迴旋輸送帶之部分進行交接。然而，若單純將上述習知之輔助輸送帶配置於迴旋輸送帶及與迴旋輸送帶鄰接之部分之間，因迴旋輸送帶之迴旋部分之迴旋區域的關係，無法將輔助輸送帶靠近於迴旋輸送帶而配置。因此，難以穩定地將被搬送物對鄰接於迴旋輸送帶之部分進行交接。 In recent years, a conveyor belt device has been introduced which is provided with a convoluted conveyor belt for rotating the conveyor belt portion on a substantially rectangular main body portion for changing the traveling direction of the conveyed object. In such a conveyor belt device, it is required to stably transfer the object to be conveyed to a portion adjacent to the swirling conveyor belt. However, if the above-mentioned auxiliary conveyor belt is simply disposed between the convoluted conveyor belt and the portion adjacent to the convoluted conveyor belt, the auxiliary conveyor belt cannot be brought close to the convoluted conveyor belt due to the relationship of the swirling region of the convoluted portion of the convoluted conveyor belt. And configuration. Therefore, it is difficult to stably transfer the object to be conveyed to the portion adjacent to the swirling conveyor.
因此，本發明之目的在於提供一種可穩定地將被搬送物對鄰接於迴旋輸送帶之部分進行交接之輸送帶裝置。 Accordingly, it is an object of the present invention to provide a conveyor belt apparatus which can stably convey a conveyed object to a portion adjacent to a rotary conveyor belt.
本發明一態樣之輸送帶裝置，其具備有：第1輸送帶部，其具有第1支撐搬送部，該第1支撐搬送部係支撐被搬送物之底面，而搬送被搬送物；迴旋部，其支撐第1輸送帶部，並且使第1輸送帶部迴旋，而使被搬送物之行進方向產生變化；及第2輸送帶部，其具有一對第2支撐搬送部，該一對第2支撐搬送部係設置鄰接於第1輸送帶部，且在被搬送物之底面，支撐與搬送方向交叉之寬度方向上的兩端部，而進行搬送被搬送物。在第2輸送帶部中之一對第2支撐搬送部、及將驅動力傳遞至在第2輸送帶部中之一對第2支撐搬送部的驅動傳遞部，係設置在俯視時第1輸送帶部之迴旋半徑之外側。此外，使在第2輸送帶部中之被搬送物之搬送區域與第1輸送帶部之迴旋區域於俯視時相互地重疊之方式，配置第1輸送帶部及第2輸送帶部。 A conveyor belt device according to a first aspect of the present invention includes: a first conveyor belt portion having a first support conveyance portion that supports a bottom surface of the conveyed object and conveys the conveyed object; and a swing portion And supporting the first conveyor belt portion, and rotating the first conveyor belt portion to change the traveling direction of the conveyed object; and the second conveyor belt portion having a pair of second support conveying portions, the pair of first The support conveyance unit is provided adjacent to the first conveyor belt portion, and supports both ends in the width direction intersecting with the conveyance direction on the bottom surface of the conveyed object, and conveys the conveyed object. One of the second conveyor belt portions and the second support conveyance portion and the drive transmission portion that transmits the driving force to one of the second conveyor belt portions to the second support conveyance portion are provided in the first conveyance in a plan view. The outer side of the radius of the circle of the belt. In addition, the first conveyor belt portion and the second conveyor belt portion are disposed such that the conveyed region of the conveyed object in the second conveyor belt portion and the swirling region of the first conveyor belt portion overlap each other in a plan view.
根據該輸送帶裝置，由於第2輸送帶部之一對第2支撐搬送部、與將驅動力傳遞至第2輸送帶部之一對第2支撐搬送部之驅動傳遞部，係設於以俯視時第1輸送帶部之迴旋區域之外側，因此第2輸送帶部不會阻礙第1輸送帶部之迴旋。此外，第2輸送帶部之第2支撐搬送部並非設為可支撐被搬送物之搬送區域之全面，而是設為僅可支撐搬送區域寬度方向之兩側部分。因此，可以一面避免以俯視時第1輸送帶部之迴旋區域與第2支撐搬送部重疊，一面使第1輸送帶部之迴旋區域重疊於第2輸送帶部之被搬送物之搬送區域之方式，配置第1輸送帶部及第2輸送帶部。藉此，於將被搬送物自第1輸送帶部朝鄰接之部分送出時，可使第2輸送帶部之第2支撐搬送部與第1輸送帶部之第1支撐搬送部接近。其結果，由於可經由不是迴旋輸送帶之第2輸送帶部對鄰接於作為迴旋輸送帶之第1輸送帶部之部分送出被搬送物，因此可穩定地交接被搬送物。 According to the conveyor belt device, one of the second conveyor belt portions is provided to the second support conveyance portion and the drive transmission force is transmitted to one of the second conveyor belt portions and the second transmission conveyance portion is driven in a plan view. At the time of the outer side of the turning area of the first conveyor belt portion, the second conveyor belt portion does not hinder the rotation of the first conveyor belt portion. In addition, the second support conveyance unit of the second conveyor belt portion is not limited to the entire area in which the conveyance region of the conveyed object can be supported, but is provided to support only the both side portions in the width direction of the conveyance region. Therefore, it is possible to avoid the manner in which the swirling region of the first conveyor belt portion is overlapped with the conveyance region of the conveyed object of the second conveyor belt portion while overlapping the swirling region of the first conveyor belt portion and the second support conveyance portion in plan view. The first conveyor belt portion and the second conveyor belt portion are disposed. When the conveyed object is fed from the first conveyor belt portion to the adjacent portion, the second support conveyance portion of the second conveyor belt portion can be brought close to the first support conveyance portion of the first conveyor belt portion. As a result, the object to be conveyed can be conveyed to the portion adjacent to the first conveyor belt portion as the turning conveyor belt via the second conveyor belt portion that is not the convoluted conveyor belt, so that the conveyed object can be stably delivered.
此外，於一實施形態中，第1輸送帶部亦可具有一對第1支撐搬送部，該一對第1支撐搬送部係在被搬送物之底面，支撐與搬送方向交叉之寬度方向上的兩端部，而進行搬送被搬送物。 Further, in the first embodiment, the first conveyor belt portion may have a pair of first support conveyance portions that are supported on the bottom surface of the conveyed object and that support the width direction of the conveyance direction. The conveyed objects are conveyed at both ends.
此外，於一實施形態中，第1輸送帶部亦可相對於設置在第1輸送帶部之下方之本體部而進行迴旋，第2輸送帶部亦可設置在基部之上方，並且配置在於俯視時與本體部產生重疊，而該基部係設置鄰接於本體部。 Further, in one embodiment, the first conveyor belt portion may be rotated with respect to the main body portion provided below the first conveyor belt portion, and the second conveyor belt portion may be disposed above the base portion and disposed in a plan view. The overlap with the body portion is provided, and the base portion is disposed adjacent to the body portion.
根據該輸送帶裝置，由於可使基部及第2輸送帶部成為獨立於輸送帶裝置或第1輸送帶部之構件，因此作為輸送帶裝置其可容易地進行配置變更及維護。 According to the conveyor belt device, since the base portion and the second conveyor belt portion can be members independent of the conveyor belt device or the first conveyor belt portion, the belt assembly can be easily changed and maintained.
此外，於一實施形態中，第2支撐搬送部亦可具有與被 搬送物之搬送面大致呈平行之被搬送物支撐面。 Further, in an embodiment, the second support transport unit may have a The conveyance surface of the conveyed object is substantially parallel to the conveyed object support surface.
根據該輸送帶裝置，由於可確保第2支撐搬送部與被搬送物之接觸面積，因此可進行穩定之被搬送物之搬送。 According to the conveyor belt device, since the contact area between the second support conveyance unit and the object to be conveyed can be secured, stable conveyance of the conveyed object can be performed.
根據本發明，可穩定地將被搬送物對鄰接於迴旋輸送帶之部分進行交接。 According to the present invention, the object to be conveyed can be stably transferred to the portion adjacent to the swirling conveyor belt.
1‧‧‧搬送系統 1‧‧‧Transportation system
5‧‧‧FOUP(被搬送物) 5‧‧‧FOUP (transported)
10‧‧‧階層間搬送裝置 10‧‧‧Inter-class transport device
20‧‧‧搬送輸送帶 20‧‧‧Transport conveyor belt
21‧‧‧輸送帶部 21‧‧‧Conveyor belt
30‧‧‧旋轉輸送帶 30‧‧‧Rotary conveyor belt
31‧‧‧本體部 31‧‧‧ Body Department
33‧‧‧旋轉機構 33‧‧‧Rotating mechanism
39‧‧‧輸送帶部 39‧‧‧Conveyor belt
50‧‧‧輸送帶裝置 50‧‧‧Conveyor belt device
51‧‧‧第1輸送帶部 51‧‧‧1st conveyor belt
53‧‧‧第1皮帶(第1支撐搬送部) 53‧‧‧1st belt (1st support conveyance part)
55‧‧‧滾輪 55‧‧‧Roller
61‧‧‧迴旋部 61‧‧‧Swing
63‧‧‧本體部 63‧‧‧ Body Department
71‧‧‧第2輸送帶部 71‧‧‧2nd conveyor belt
73‧‧‧第2皮帶(第2支撐搬送部) 73‧‧‧2nd belt (2nd support conveyance part)
73A‧‧‧支撐面(被搬送物支撐面) 73A‧‧‧Support surface (support surface for conveyed objects)
75‧‧‧驅動滾輪 75‧‧‧ drive roller
77‧‧‧從動滾輪 77‧‧‧Driver wheel
79‧‧‧搬送滾輪(第2支撐搬送部) 79‧‧‧Transport roller (2nd support conveyor)
81‧‧‧驅動部 81‧‧‧ Drive Department
83‧‧‧驅動軸(驅動傳遞部) 83‧‧‧Drive shaft (drive transmission part)
85‧‧‧基部 85‧‧‧ base
91‧‧‧高架移行車 91‧‧‧Elevated moving vehicle
93‧‧‧移行軌道 93‧‧‧Move track
A1‧‧‧迴旋區域 A1‧‧‧ gyration zone
A2‧‧‧搬送區域 A2‧‧‧Transport area
P1~P4‧‧‧移載部位 P1~P4‧‧‧Transfer site
圖1為具備一實施形態之輸送帶裝置之搬送系統之構成圖。 Fig. 1 is a configuration diagram of a conveying system including a conveyor belt device according to an embodiment.
圖2為表示圖1所包含第1輸送帶部之俯視圖。 Fig. 2 is a plan view showing a first conveyor belt portion included in Fig. 1;
圖3為沿著圖2所示第1輸送帶部之III-III線之剖視圖。 Fig. 3 is a cross-sectional view taken along line III-III of the first conveyor belt portion shown in Fig. 2;
圖4為表示圖1所包含第2輸送帶部之俯視圖。 Fig. 4 is a plan view showing a second conveyor belt portion included in Fig. 1;
圖5為沿著圖4所示第2輸送帶部之V-V線之剖視圖。 Fig. 5 is a cross-sectional view taken along line V-V of the second conveyor belt portion shown in Fig. 4;
以下，參照圖式對一實施形態進行說明。於圖式之說明中，對相同元件賦予相同之符號，並省略重複之說明。圖式之尺寸比例並不一定一致。 Hereinafter, an embodiment will be described with reference to the drawings. In the description of the drawings, the same components are denoted by the same reference numerals, and the description thereof will be omitted. The size ratio of the schema is not necessarily the same.
圖1為使用一實施形態之輸送帶裝置50之搬送系統1之構成圖。搬送系統1係將自階層間搬送裝置10搬送來之FOUP(Front-Opening Unified Pod)(被搬送物)5搬送至對高架移行車91交接之部位即移載部位P1~P4之任一者之系統。如圖1所示，於本實施形態之搬送系統1中，於4個部位設置有移載部位P1~P4。FOUP5例如為收容半導體製造裝置、液晶製造裝置所使用之晶圓及玻璃基板等之容器，為一種已規格化之容器。 Fig. 1 is a view showing the configuration of a transport system 1 using a conveyor device 50 according to an embodiment. The transport system 1 transports the FOUP (Front-Opening Unified Pod) (transported object) 5 transported from the inter-floor transport device 10 to any of the transfer sites P1 to P4 that are the locations where the overhead transfer vehicle 91 is handed over. system. As shown in Fig. 1, in the transport system 1 of the present embodiment, transfer sites P1 to P4 are provided at four locations. The FOUP 5 is, for example, a container for accommodating a semiconductor manufacturing apparatus, a wafer used for a liquid crystal manufacturing apparatus, and a glass substrate, and is a standardized container.
階層間搬送裝置10係藉由未圖示之移載裝置，於相互不同之階層間進行搬送。高架移行車91係於移載部位P1~P4與例如未圖示之裝載埠之間搬送FOUP5。高架移行車91可為OHT(Overhead Hoist Transport；懸吊式搬運車)，其係於移載部位P1~P4與裝載埠之間，於懸吊FOUP5之狀態下把持FOUP5並進行搬送。高架移行車91係沿著設置於無塵室之天花板等較地板高之位置之移行軌道93移行。 The inter-level transfer device 10 is transported between different levels by a transfer device (not shown). The overhead traveling vehicle 91 transports the FOUP 5 between the transfer sites P1 to P4 and, for example, a load magazine (not shown). The overhead traveling vehicle 91 may be an OHT (Overhead Hoist Transport), which is placed between the transfer parts P1 to P4 and the loading cassette, and holds the FOUP 5 and transports it while suspending the FOUP 5. The overhead traveling vehicle 91 is moved along the traveling rail 93 which is disposed at a position higher than the floor height such as the ceiling of the clean room.
以下，對使用一實施形態之輸送帶裝置50之搬送系統1進行說明。如圖1所示，搬送系統1具備有階層間搬送裝置10、搬送輸送帶20、旋轉輸送帶30及輸送帶裝置50。 Hereinafter, the transport system 1 using the conveyor device 50 of one embodiment will be described. As shown in FIG. 1 , the transport system 1 includes an inter-segment transport device 10 , a transport conveyor belt 20 , a rotary conveyor belt 30 , and a conveyor belt device 50 .
搬送輸送帶20具有支撐FOUP5底部寬度方向之兩端部而進行搬送之一對輸送帶部21。FOUP5係藉由該輸送帶部21支撐底面而被搬送。本實施形態之搬送輸送帶20，例如藉由未圖示之控制裝置而分別獨立地進行搬送控制。搬送輸送帶20係配置於階層間搬送裝置10與旋轉輸送帶30之間、及旋轉輸送帶30與輸送帶裝置50之間。 The conveyance conveyor 20 has one end of the FOUP 5 in the width direction of the bottom of the FOUP 5 and conveys one of the conveyor belt sections 21 . The FOUP 5 is conveyed by supporting the bottom surface of the conveyor belt portion 21. The conveyance belt 20 of the present embodiment is independently conveyed and controlled by, for example, a control device (not shown). The conveyance conveyor 20 is disposed between the inter-stage conveyance device 10 and the rotary conveyance belt 30, and between the rotary conveyance belt 30 and the conveyance belt device 50.
旋轉輸送帶30係改變FOUP5之搬送方向之朝向的部分，如圖1所示，其具有支撐FOUP5底部寬度方向之兩端部而進行搬送之一對輸送帶部39、支撐一對輸送帶部39並且可旋轉地設置之旋轉機構33、及支撐旋轉機構33之本體部31。例如，旋轉輸送帶30係將自圖1所示之上方搬送來之FOUP5朝配置於圖1所示右側方向之搬送輸送帶20送出。 The rotating conveyor belt 30 is a portion that changes the direction in which the FOUP 5 is oriented, and as shown in Fig. 1, it has a pair of end portions in the width direction of the bottom of the FOUP 5, and conveys one of the pair of belt portions 39 and supports the pair of belt portions 39. And a rotation mechanism 33 that is rotatably provided, and a body portion 31 that supports the rotation mechanism 33. For example, the rotating conveyor belt 30 sends the FOUP 5 conveyed from the upper side shown in FIG. 1 to the conveying conveyor belt 20 disposed in the right direction shown in FIG.
輸送帶裝置50係於搬送輸送帶20與移載部位P1~P4之間搬送FOUP5之裝置。如圖1所示，輸送帶裝置50主要具備有第1輸送帶部51、迴旋部61、及第2輸送帶部71。以下，參照圖2~圖4對輸送帶裝置50詳細地進行說明。 The conveyor device 50 is a device that transports the FOUP 5 between the conveyor belt 20 and the transfer sites P1 to P4. As shown in FIG. 1, the conveyor device 50 mainly includes a first conveyor belt portion 51, a turning portion 61, and a second conveyor belt portion 71. Hereinafter, the conveyor device 50 will be described in detail with reference to FIGS. 2 to 4 .
圖2為表示第1輸送帶部51之俯視圖。圖3為沿著圖2所示第1輸送帶部51之III-III線之剖視圖。圖4為表示第2輸送帶部71之俯視圖，且針對第1輸送帶部51，表示在與第2輸送帶部71之間交接FOUP5時之狀態。圖5為沿著圖4所示第2輸送帶部71之V-V線之剖視圖，且針對第1輸送帶部51，顯示在與第2輸送帶部71之間交接FOUP5時之狀態。 FIG. 2 is a plan view showing the first conveyor belt portion 51. Fig. 3 is a cross-sectional view taken along line III-III of the first conveyor belt portion 51 shown in Fig. 2 . 4 is a plan view showing the second conveyor belt portion 71, and the first conveyor belt portion 51 shows a state in which the FOUP 5 is transferred between the second conveyor belt portion 71 and the second conveyor belt portion 71. 5 is a cross-sectional view taken along line V-V of the second conveyor belt portion 71 shown in FIG. 4, and shows a state in which the FOUP 5 is transferred between the second conveyor belt portion 71 and the second conveyor belt portion 71.
如圖2及圖3所示，第1輸送帶部51具有支撐FOUP5底部寬度方向之兩端部而進行搬送之一對第1皮帶(第1支撐搬送部)53。一對第1皮帶53係環狀之循環皮帶，第1皮帶53各自繞掛於2個滾輪55、55上。各個第1皮帶53係藉由未圖示之驅動部對至少一側之滾輪55、55進行驅動而朝一方向旋轉，而搬送所支撐之FOUP5。 As shown in FIG. 2 and FIG. 3, the first conveyor belt portion 51 has a pair of first belts (first support conveyance portions) 53 that support both ends of the FOUP 5 in the width direction. The pair of first belts 53 are loop-shaped endless belts, and the first belts 53 are wound around the two rollers 55 and 55, respectively. Each of the first belts 53 is driven to rotate in one direction by at least one of the rollers 55 and 55 by a driving unit (not shown), and conveys the supported FOUP 5 .
迴旋部61係支撐第1輸送帶部51，並且使第1輸送帶部51迴旋而改變FOUP5之行進方向。迴旋部61係藉由未圖示之驅動部而旋轉，從而使所支撐之第1輸送帶部51迴旋。迴旋部61係支撐於本體部63之上面。換言之，支撐於迴旋部61之第1輸送帶部51係相對於本體部63可迴旋地設置。 The turning portion 61 supports the first conveyor belt portion 51 and rotates the first conveyor belt portion 51 to change the traveling direction of the FOUP 5. The turning portion 61 is rotated by a driving portion (not shown) to swing the supported first conveyor portion 51. The turning portion 61 is supported on the upper surface of the body portion 63. In other words, the first conveyor belt portion 51 supported by the turning portion 61 is rotatably provided with respect to the body portion 63.
如圖5所示，第2輸送帶部71係設在與第1輸送帶部51之本體部63鄰接而設之基部85之上方。此外，如圖4所示，第2輸送帶部71係設為以俯視時與本體部63重疊。如圖4及圖5所示，第2輸送帶部71具有於FOUP5之底面支撐與搬送方向交叉之寬度方向的兩端部而搬送FOUP5之一對第2皮帶(第2支撐搬送部)73、驅動滾輪75、從動滾輪77、及搬送滾輪(第2支撐搬送部)79。 As shown in FIG. 5, the second conveyor belt portion 71 is provided above the base portion 85 provided adjacent to the main body portion 63 of the first conveyor belt portion 51. Moreover, as shown in FIG. 4, the 2nd conveyance belt part 71 is overlap with the main-body part 63 in planar view. As shown in FIG. 4 and FIG. 5, the second conveyor belt unit 71 has one end portion in the width direction that intersects the conveyance direction on the bottom surface of the FOUP 5, and conveys one of the FOUPs 5 to the second belt (second support conveyance unit) 73, The drive roller 75, the driven roller 77, and the transport roller (second support transport unit) 79 are driven.
如圖4及圖5所示，一對第2皮帶73係環狀之循環皮帶，第2皮帶73各自繞掛於2個滾輪(驅動滾輪75及從動滾輪77)上。 驅動滾輪75係經由驅動軸(驅動傳遞部)83而藉由驅動部81所驅動。第2皮帶73具有大致平行於FOUP5之搬送面之支撐面(被搬送物支撐面)73A。搬送滾輪79係無驅動力傳遞之自由滾輪，且形成FOUP5之搬送面之一部分。 As shown in FIGS. 4 and 5, the pair of second belts 73 are loop-shaped endless belts, and the second belts 73 are wound around the two rollers (the drive roller 75 and the driven roller 77). The drive roller 75 is driven by the drive unit 81 via a drive shaft (drive transmission portion) 83. The second belt 73 has a support surface (conveyed object support surface) 73A that is substantially parallel to the transport surface of the FOUP 5. The transport roller 79 is a free roller that has no driving force transmission, and forms a part of the transport surface of the FOUP 5.
於本實施形態中，如圖4所示，第2輸送帶部71之一對第2皮帶73與將驅動力傳遞至第2皮帶73之驅動軸83，係設置於以俯視時第1輸送帶部51之迴旋區域A1(圖4所示之斜剖面線)之外側，換言之，係設置於與迴旋區域A1不重疊之位置。 In the present embodiment, as shown in FIG. 4, one of the second conveyor belt portions 71 is provided to the first conveyor belt in the plan view, and the second belt 73 and the drive shaft 83 that transmits the driving force to the second belt 73. The outer side of the turning area A1 (the oblique hatching line shown in FIG. 4) of the portion 51, in other words, is disposed at a position that does not overlap the turning area A1.
此外，於本實施形態中，如圖4所示，以俯視時使第2輸送帶部71之FOUP5之搬送區域A2(圖4所示之著色部)與第1輸送帶部51之迴旋區域A1(圖4所示之斜剖面線)相互重疊之方式，配置第1輸送帶部51及第2輸送帶部71。 Further, in the present embodiment, as shown in FIG. 4, the transport area A2 (the coloring portion shown in FIG. 4) of the FOUP 5 of the second conveyor belt portion 71 and the swirling area A1 of the first conveyor belt portion 51 are formed in a plan view. The first conveyor belt portion 51 and the second conveyor belt portion 71 are disposed so as to overlap each other (the oblique hatching line shown in FIG. 4).
其次，對將FOUP5自階層間搬送裝置10搬送至移載部位P2之情形時之搬送系統1之動作進行說明。於該情形時之輸送帶裝置50之FOUP5係依照以下之路徑。亦即，如圖1所示，FOUP5係依照第1輸送帶部51A→第2輸送帶部71A→第1輸送帶部51B→第2輸送帶部71B→第1輸送帶部51C之順序進行搬送。其中，將階層間搬送裝置10側作為上游側，並將移載部位P2作為下游側進行說明。 Next, the operation of the transport system 1 when the FOUP 5 is transported from the inter-story transport apparatus 10 to the transfer site P2 will be described. The FOUP 5 of the conveyor belt unit 50 in this case is in accordance with the following route. In other words, as shown in Fig. 1, the FOUP 5 is transported in the order of the first conveyor belt portion 51A → the second conveyor belt portion 71A → the first conveyor belt portion 51B → the second conveyor belt portion 71B → the first conveyor belt portion 51C. . In addition, the side of the inter-layer conveyance apparatus 10 is an upstream side, and the transfer site P2 is a downstream side.
首先，自階層間搬送裝置10交接到FOUP5之搬送輸送帶20，係對輸送帶部21施加驅動，而朝下游方向搬送FOUP5。若FOUP5被搬送至鄰接於上游側之搬送輸送帶20，下游側之搬送輸送帶20就會對輸送帶部21施加驅動。下游側之旋轉輸送帶30係於使輸送帶部39面向FOUP5被搬送來之側的狀態下，等待FOUP5被搬送而來。 First, the inter-floor conveyance device 10 is transferred to the conveyance belt 20 of the FOUP 5, and the conveyance belt portion 21 is driven to convey the FOUP 5 in the downstream direction. When the FOUP 5 is transported to the transport conveyor 20 adjacent to the upstream side, the transport belt 20 on the downstream side drives the transport belt section 21. The downstream conveyance belt 30 is in a state in which the conveyor belt portion 39 faces the side on which the FOUP 5 is conveyed, and waits for the FOUP 5 to be conveyed.
若FOUP5被搬送而來到鄰接於上游側之搬送輸送帶 20，旋轉輸送帶30就會對輸送帶部39施加驅動。自搬送輸送帶20交接到FOUP5之旋轉輸送帶30，係於將FOUP5搬送至輸送帶部39之中央部後，暫時停止對輸送帶部39提供驅動。接著，旋轉輸送帶30係對旋轉機構33施加驅動，使輸送帶部39繞逆時針方向旋轉，而成為使輸送帶部39面向鄰接於下游側之搬送輸送帶20之狀態。然後再次對輸送帶部39施加驅動，而朝搬送輸送帶20送出FOUP5。 If the FOUP 5 is transported, it will come to the transport conveyor adjacent to the upstream side. 20, the rotating conveyor belt 30 applies driving to the conveyor belt portion 39. The self-transporting conveyor 20 is transferred to the rotating conveyor belt 30 of the FOUP 5, and after the FOUP 5 is conveyed to the central portion of the conveyor belt portion 39, the driving of the conveyor belt portion 39 is temporarily stopped. Then, the rotating conveyor belt 30 drives the rotation mechanism 33 to rotate the conveyor belt portion 39 in the counterclockwise direction, and the conveyor belt portion 39 faces the conveyance belt 20 adjacent to the downstream side. Then, the belt portion 39 is driven again, and the FOUP 5 is sent toward the conveyance belt 20.
若FOUP5被搬送而來到鄰接於上游側之旋轉輸送帶30，搬送輸送帶20就會對輸送帶部21施加驅動。自旋轉輸送帶30交接到FOUP5之搬送輸送帶20，係將FOUP5朝鄰接於下游側之輸送帶裝置50搬送。 When the FOUP 5 is conveyed and comes to the rotary conveyor 30 adjacent to the upstream side, the conveyance belt 20 drives the conveyance belt unit 21. The self-rotating conveyor belt 30 is transferred to the transport conveyor belt 20 of the FOUP 5, and the FOUP 5 is conveyed toward the conveyor belt device 50 adjacent to the downstream side.
輸送帶裝置50之第1輸送帶部51A，係對迴旋部61A施加驅動，而成為使第1皮帶53面向FOUP5被搬送來之側的狀態，等待FOUP5被搬送而來。若FOUP5被搬送而來到鄰接於上游側之搬送輸送帶20，第1輸送帶部51A就會對第1皮帶53施加驅動。自搬送輸送帶20交接到FOUP5之第1輸送帶部51A，係將FOUP5搬送至與下游側鄰接而配置之第2輸送帶部71A。 The first conveyor belt portion 51A of the belt conveyor 50 is driven to the swing portion 61A, and the first belt 53 is placed facing the side where the FOUP 5 is conveyed, and waits for the FOUP 5 to be conveyed. When the FOUP 5 is transported to the transport conveyor 20 adjacent to the upstream side, the first conveyor belt 51A drives the first belt 53. The self-transporting conveyor 20 is transferred to the first conveyor belt portion 51A of the FOUP 5, and the FOUP 5 is conveyed to the second conveyor belt portion 71A disposed adjacent to the downstream side.
若FOUP5被搬送而來到鄰接於上游側之第1輸送帶部51A，第2輸送帶部71A就會對第2皮帶73施加驅動。自第1輸送帶部51A交接到FOUP5之第2輸送帶部71，係將FOUP5搬送至與下游側鄰接而配置之第1輸送帶部51B。下游側之第1輸送帶部51B係對迴旋部61B施加驅動，而成為使第1皮帶53面向FOUP5被搬送來之側的狀態，等待FOUP5被搬送而來。 When the FOUP 5 is transported to the first conveyor belt portion 51A adjacent to the upstream side, the second conveyor belt portion 71A drives the second belt 73. When the first conveyor belt portion 51A is delivered to the second conveyor belt portion 71 of the FOUP 5, the FOUP 5 is conveyed to the first conveyor belt portion 51B disposed adjacent to the downstream side. The first conveyor belt portion 51B on the downstream side is driven to the turning portion 61B, and the first belt 53 faces the side where the FOUP 5 is conveyed, and waits for the FOUP 5 to be conveyed.
若FOUP5被搬送而來到鄰接於上游側之第2輸送帶部71A，第1輸送帶部51B就會對第1皮帶53施加驅動。自第2輸送帶 部71A交接到FOUP5之第1輸送帶部51B，係於將FOUP5搬送至第1皮帶53之中央部後，暫時停止對第1皮帶53提供驅動。接著，第1輸送帶部51B係對迴旋部61B施加驅動，使第1皮帶53繞逆時針方向旋轉，而成為使第1皮帶53面向鄰接於下游側之第2輸送帶部71B之狀態。然後再次對第1皮帶53施加驅動，而朝第2輸送帶部71B送出FOUP5。 When the FOUP 5 is conveyed and comes to the second conveyor belt portion 71A adjacent to the upstream side, the first conveyor belt portion 51B applies driving to the first belt 53. From the 2nd conveyor belt The portion 71A is delivered to the first conveyor belt portion 51B of the FOUP 5, and after the FOUP 5 is conveyed to the central portion of the first belt 53, the driving of the first belt 53 is temporarily stopped. Then, the first conveyor belt portion 51B drives the turning portion 61B to rotate the first belt 53 in the counterclockwise direction, and the first belt 53 faces the second conveyor belt portion 71B adjacent to the downstream side. Then, the first belt 53 is driven again, and the FOUP 5 is sent toward the second belt portion 71B.
其中，如圖4所示，由於鄰接於下游側之第2輸送帶部71B之第2皮帶73、搬送滾輪79及驅動軸83，係配置於第1輸送帶部51之搬送區域A2之外側，因此不會阻礙第1皮帶53逆時針旋轉時之旋轉。又，於第1輸送帶部51B中，在成為使第1皮帶53面向鄰接於下游側之第2輸送帶部71B之狀態時，如圖4所示，可使第1皮帶53靠近第2輸送帶部71B之第2皮帶73及搬送滾輪79。因此，可穩定地朝第2輸送帶部71B送出FOUP5。 In addition, as shown in FIG. 4, the second belt 73, the conveyance roller 79, and the drive shaft 83 which are adjacent to the second conveyor belt portion 71B on the downstream side are disposed outside the conveyance area A2 of the first conveyor belt portion 51, Therefore, the rotation of the first belt 53 when it rotates counterclockwise is not hindered. In the first conveyor belt portion 51B, when the first belt 53 faces the second conveyor belt portion 71B adjacent to the downstream side, as shown in FIG. 4, the first belt 53 can be brought closer to the second conveyor. The second belt 73 of the belt portion 71B and the conveying roller 79. Therefore, the FOUP 5 can be stably sent to the second conveyor belt portion 71B.
若FOUP5被搬送而來到鄰接於上游側之第1輸送帶部51B，第2輸送帶部71B就會對第2皮帶73施加驅動。自第1輸送帶部51B交接到FOUP5之第2輸送帶部71B，係將FOUP5搬送至鄰接於下游側之第1輸送帶部51C。下游側之第1輸送帶部51C係對迴旋部61C施加驅動，而成為使第1皮帶53面向FOUP5被搬送而來之側，等待FOUP5被搬送而來。 When the FOUP 5 is conveyed and comes to the first conveyor belt portion 51B adjacent to the upstream side, the second conveyor belt portion 71B drives the second belt 73. When the first conveyor belt portion 51B is delivered to the second conveyor belt portion 71B of the FOUP 5, the FOUP 5 is conveyed to the first conveyor belt portion 51C adjacent to the downstream side. The first conveyor belt portion 51C on the downstream side is driven to the turning portion 61C, and is placed on the side where the first belt 53 is conveyed toward the FOUP 5, and waits for the FOUP 5 to be conveyed.
若FOUP5被搬送而來到鄰接於上游側之第2輸送帶部71B，第1輸送帶部51C就會對第1皮帶53施加驅動。自第2輸送帶部71B交接到FOUP5之第1輸送帶部51C，係於將FOUP5搬送至第1皮帶53之中央部、即移載部位P2後，暫時停止朝第1皮帶53提供驅動。停止於移載部位P2之FOUP5係藉由高架移行車91把持而被朝 既定之裝載埠搬送。 When the FOUP 5 is transported to the second conveyor belt portion 71B adjacent to the upstream side, the first conveyor belt portion 51C drives the first belt 53. When the second conveyor belt portion 71B is transferred to the first conveyor belt portion 51C of the FOUP 5, the FOUP 5 is conveyed to the center portion of the first belt 53, that is, the transfer portion P2, and the driving of the first belt 53 is temporarily stopped. The FOUP5 stopped at the transfer site P2 is held by the overhead transfer vehicle 91 The scheduled loading and delivery.
根據以上所說明上述實施形態之輸送帶裝置50，如圖4所示，由於第2輸送帶部71之一對第2皮帶73及搬送滾輪79、與用以將驅動力傳遞至第2皮帶73之驅動軸83，係設於以俯視時第1輸送帶部51之迴旋區域A1(圖4所示之斜剖面線)之外側，因此第2輸送帶部71不會阻礙第1輸送帶部51之迴旋。此外，第2輸送帶部71之第2皮帶73並非設為可支撐FOUP5之搬送區域A2(圖4所示之著色部)之全面，而是設為僅可支撐搬送區域A2寬度方向上之兩側部分。因此，可以一面避免以俯視時第1輸送帶部51之迴旋區域A1與第2皮帶73及搬送滾輪79重疊，一面使第1輸送帶部51之迴旋區域A1重疊於第2輸送帶部71之FOUP5之搬送區域A2之方式，配置第1輸送帶部51及第2輸送帶部71。藉此，於將FOUP5自第1輸送帶部51對鄰接之部分送出時，可使第2輸送帶部71之第2皮帶73及搬送滾輪79與第1輸送帶部51之第1皮帶53接近。其結果，由於可經由不是迴旋輸送帶之第2輸送帶部71而對鄰接於作為迴旋輸送帶之第1輸送帶部51之部分送出FOUP5，因此可穩定地交接FOUP5。 According to the conveyor belt device 50 of the above-described embodiment, as shown in FIG. 4, one of the second conveyor belt portions 71 is used to transmit the driving force to the second belt 73. The drive shaft 83 is disposed on the outer side of the turning area A1 (the oblique cross-sectional line shown in FIG. 4) of the first conveyor belt portion 51 in plan view, so that the second conveyor belt portion 71 does not obstruct the first conveyor belt portion 51. The roundabout. In addition, the second belt 73 of the second conveyor belt portion 71 is not limited to the entire width of the transport area A2 (the coloring unit shown in FIG. 4). Side part. Therefore, it is possible to prevent the turning area A1 of the first conveyor belt portion 51 from overlapping the second conveyor belt portion 71 while overlapping the turning area A1 of the first conveyor belt portion 51 with the second belt 73 and the conveying roller 79 in plan view. In the manner of the transport area A2 of the FOUP 5, the first conveyor belt portion 51 and the second conveyor belt portion 71 are disposed. When the FOUP 5 is fed from the first conveyor belt portion 51 to the adjacent portion, the second belt 73 of the second conveyor belt portion 71 and the conveyance roller 79 can be brought close to the first belt 53 of the first conveyor belt portion 51. . As a result, the FOUP 5 can be fed to the portion adjacent to the first conveyor belt portion 51 as the turning conveyor belt via the second conveyor belt portion 71 that is not the turning conveyor belt, so that the FOUP 5 can be stably delivered.
此外，如圖5所示，上述實施形態之第1輸送帶部51係相對於設在第1輸送帶部51之下方之本體部63進行迴旋，第2輸送帶部71係設置於與本體部63相鄰而設置之基部85之上方，並且以俯視時與本體部63重疊之方式配置。因此，由於可使基部及第2輸送帶部71成為獨立於輸送帶裝置50或第1輸送帶部51之構件，因此作為輸送帶裝置而可容易地進行配置變更及維護。 Further, as shown in FIG. 5, the first conveyor belt portion 51 of the above embodiment is rotated with respect to the main body portion 63 provided below the first conveyor belt portion 51, and the second conveyor belt portion 71 is provided to the main body portion. 63 is disposed above the base portion 85 that is adjacent to each other, and is disposed to overlap the body portion 63 in plan view. Therefore, since the base portion and the second conveyor belt portion 71 can be made separate from the belt conveyor device 50 or the first conveyor belt portion 51, the arrangement change and maintenance can be easily performed as the conveyor belt device.
此外，由於上述實施形態之第2輸送帶部71具有與FOUP5之搬送面大致平行之支撐面73A，因此可確保第2輸送帶部71 與FOUP5之接觸面積，從而可進行穩定之FOUP5之搬送。 Further, since the second conveyor belt portion 71 of the above-described embodiment has the support surface 73A substantially parallel to the transport surface of the FOUP 5, the second conveyor belt portion 71 can be secured. The contact area with the FOUP5 enables stable FOUP5 transfer.
以上，雖然已對本發明之一實施形態進行說明，惟本發明並不限定於上述實施形態，可於未超出發明主旨之範疇內進行各種變更。 The embodiments of the present invention have been described above, but the present invention is not limited to the embodiments described above, and various modifications may be made without departing from the spirit of the invention.
於上述實施形態之輸送帶裝置50中，雖然已以第2輸送帶部71之第2支撐部係由第2皮帶73及搬送滾輪79構成為例進行說明，惟本發明並不限定於此。例如，也可構成為於圖4所示之俯視時，藉由第2皮帶73搬送由搬送滾輪79搬送FOUP5之部分。 In the conveyor belt device 50 of the above-described embodiment, the second support portion of the second conveyor belt portion 71 is configured by the second belt 73 and the transport roller 79, but the present invention is not limited thereto. For example, in the plan view shown in FIG. 4, the portion of the FOUP 5 transported by the transport roller 79 may be transported by the second belt 73.
於上述實施形態之輸送帶裝置50中，雖然已以設置一對第1皮帶53作為第1輸送帶部51為例進行說明，惟本發明並不限定於此，例如，也可設置可支撐FOUP(被搬送物)5之底面整體之一條皮帶。 In the conveyor belt device 50 of the above-described embodiment, the pair of first belts 53 are provided as the first conveyor belt portion 51 as an example. However, the present invention is not limited thereto, and for example, a FOUP may be provided. One of the belts on the bottom surface of the (transported object) 5.
於上述實施形態之輸送帶裝置50中，雖然已以於圖1所示之上下方向配置3個第1輸送帶部51及迴旋部61、與2個第2輸送帶部71，並於左右方向配置2列該等之組合，再於該等之組合間配置第2輸送帶部71為例進行說明，惟本發明並不限定於此。例如，也可為輸送帶裝置50具備至少1個第1輸送帶部51、使該第1輸送帶部51迴旋之迴旋部61、及與第1輸送帶部鄰接而配置之至少1個第2輸送帶部71之構成。 In the conveyor belt device 50 of the above-described embodiment, the three first conveyor belt portions 51, the turning portion 61, and the two second conveyor belt portions 71 are disposed in the vertical direction as shown in FIG. The combination of the two rows is arranged, and the second conveyor belt portion 71 is disposed between the combinations, but the present invention is not limited thereto. For example, the conveyor belt device 50 may include at least one first conveyor belt portion 51, a swing portion 61 that rotates the first conveyor belt portion 51, and at least one second portion that is disposed adjacent to the first conveyor belt portion. The configuration of the conveyor belt portion 71.
51‧‧‧第1輸送帶部 51‧‧‧1st conveyor belt
53‧‧‧第1皮帶(第1支撐搬送部) 53‧‧‧1st belt (1st support conveyance part)
55‧‧‧滾輪 55‧‧‧Roller
63‧‧‧本體部 63‧‧‧ Body Department
71‧‧‧第2輸送帶部 71‧‧‧2nd conveyor belt
73‧‧‧第2皮帶(第2支撐搬送部) 73‧‧‧2nd belt (2nd support conveyance part)
73A‧‧‧支撐面(被搬送物支撐面) 73A‧‧‧Support surface (support surface for conveyed objects)
75‧‧‧驅動滾輪 75‧‧‧ drive roller
77‧‧‧從動滾輪 77‧‧‧Driver wheel
79‧‧‧搬送滾輪(第2支撐搬送部) 79‧‧‧Transport roller (2nd support conveyor)
83‧‧‧驅動軸(驅動傳遞部) 83‧‧‧Drive shaft (drive transmission part)
85‧‧‧基部 85‧‧‧ base
Claims (4)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013223475 | 2013-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201529451A TW201529451A (en) | 2015-08-01 |
| TWI567009B true TWI567009B (en) | 2017-01-21 |
Family
ID=53003881
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103136772A TWI567009B (en) | 2013-10-28 | 2014-10-24 | Conveyor belt device |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9670002B2 (en) |
| EP (1) | EP3064455A4 (en) |
| JP (1) | JP6288103B2 (en) |
| KR (1) | KR101869813B1 (en) |
| CN (1) | CN105658551B (en) |
| SG (1) | SG11201603110PA (en) |
| TW (1) | TWI567009B (en) |
| WO (1) | WO2015064268A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3336021B1 (en) | 2016-12-19 | 2020-08-19 | Carl Zeiss Vision International GmbH | Transfer device for a transport container |
| DE102016225485B4 (en) | 2016-12-19 | 2022-08-25 | Carl Zeiss Vision International Gmbh | Safe conveyor system |
| EP3336022A1 (en) * | 2016-12-19 | 2018-06-20 | Carl Zeiss Vision International GmbH | Manufacturing system for spectacle lenses |
| JP6861432B2 (en) * | 2017-02-10 | 2021-04-21 | 伊東電機株式会社 | Conveyor device and conveyor unit |
| CH715069A1 (en) | 2018-06-05 | 2019-12-13 | Ruggli Projects Ag | Conveyor and method for conveying tampon applicators. |
| CH715307A2 (en) | 2018-09-10 | 2020-03-13 | Ruggli Projects Ag | Device and method for equipping tampon applicators with tampons. |
| EP3875405A4 (en) * | 2018-11-02 | 2022-08-10 | Murata Machinery, Ltd. | Conveyor system |
| JP7473201B2 (en) | 2020-05-18 | 2024-04-23 | アイカム株式会社 | Food and beverage conveying system |
| EP3922205A1 (en) * | 2020-06-12 | 2021-12-15 | Gibotech A/S | System for arranging containers and container lids on a rack in a sterile processing department |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841725U (en) * | 1981-09-14 | 1983-03-19 | 松下電工株式会社 | Conveyance device |
| JPH03281186A (en) * | 1990-03-28 | 1991-12-11 | Tokyo Autom Mach Works Ltd | Tie-in robot |
| TWM324648U (en) * | 2007-06-08 | 2008-01-01 | Contrel Technology Co Ltd | Air-levitation conveyor capable of changing feeding direction of board |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE793146A (en) * | 1972-02-03 | 1973-04-16 | Windmoeller & Hoelscher | TRANSPORT SECTION INTENDED TO TRANSPORT PACKAGES OF PARTS FOR THE MANUFACTURE OF BAGS |
| JPS57166250A (en) * | 1981-04-03 | 1982-10-13 | Dainippon Screen Mfg Co Ltd | Conveyance positioning device of sheet material |
| NL8103964A (en) | 1981-08-26 | 1983-03-16 | Shell Int Research | PROCESS FOR EXTRACTING FIVE-VALUE VANADIUM COMPOUNDS FROM ACID CATALYST EXTRACTS |
| JPH062527B2 (en) | 1984-04-27 | 1994-01-12 | 株式会社東芝 | Transport system for clean room |
| DE4013793A1 (en) * | 1990-04-28 | 1991-10-31 | Palitex Project Co Gmbh | Yarn reel transport system |
| JPH062527A (en) | 1992-06-16 | 1994-01-11 | Toyota Motor Corp | Exhaust gas purifying device for internal combustion engine |
| IT1257840B (en) * | 1992-06-23 | 1996-02-13 | Gd Spa | METHOD AND DEVICE TO FEED A SUCCESSION OF SPOOLS TO A COLLECTION STATION |
| JPH09255144A (en) * | 1996-03-21 | 1997-09-30 | Komatsu Giken Kk | Substrate turning device |
| US6223886B1 (en) * | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
| US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
| US6572321B1 (en) * | 2000-10-05 | 2003-06-03 | Applied Materials, Inc. | Loader conveyor for substrate processing system |
| DE10157161A1 (en) * | 2001-11-22 | 2003-06-12 | Knapp Logistik Automation | Conveyor for conveying goods on pallets or the like with a change of direction |
| JP2003285924A (en) * | 2002-03-28 | 2003-10-07 | Nec Machinery Corp | Work cutting and distributing system |
| JP4178835B2 (en) | 2002-05-28 | 2008-11-12 | 株式会社ダイフク | Branch equipment |
| JP2005212948A (en) * | 2004-01-28 | 2005-08-11 | Shinmei Ind Co Ltd | Conveyor device |
| DE102005033946B4 (en) * | 2005-07-20 | 2018-06-28 | Bosch Rexroth Aktiengesellschaft | conveyor system |
| JP2007217078A (en) * | 2006-02-14 | 2007-08-30 | Asyst Shinko Inc | Direction changing device |
| ITUD20070197A1 (en) * | 2007-10-24 | 2009-04-25 | Baccini S P A | DEVICE AND ALIGNMENT PROCEDURE TO ALIGN PLATES FOR ELECTRONIC CIRCUITS |
| DE102008010317A1 (en) * | 2008-02-21 | 2009-09-03 | Grenzebach Maschinenbau Gmbh | Method and device for conveying and rotating shock-sensitive plates in clean rooms |
| JP2009280333A (en) * | 2008-05-21 | 2009-12-03 | Fdk Engineering:Kk | Roller conveyer device |
| JP5513137B2 (en) * | 2010-01-05 | 2014-06-04 | トーヨーカネツソリューションズ株式会社 | Accumulation conveyor |
| JP5563397B2 (en) * | 2010-07-21 | 2014-07-30 | 大塚電子株式会社 | Conveyed object rotating device |
| US8776983B2 (en) * | 2012-06-26 | 2014-07-15 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Turntable device for substrate and substrate transporting system |
| US8550228B1 (en) * | 2013-03-01 | 2013-10-08 | Anko Food Machine Co., Ltd. | Direction change device for conveyance of dough |
| CA2873752C (en) * | 2014-01-24 | 2021-03-09 | Axium Inc. | Product orientor |
-
2014
- 2014-09-29 SG SG11201603110PA patent/SG11201603110PA/en unknown
- 2014-09-29 CN CN201480057228.2A patent/CN105658551B/en not_active Expired - Fee Related
- 2014-09-29 EP EP14857155.7A patent/EP3064455A4/en not_active Withdrawn
- 2014-09-29 KR KR1020167011313A patent/KR101869813B1/en active IP Right Grant
- 2014-09-29 WO PCT/JP2014/075930 patent/WO2015064268A1/en active Application Filing
- 2014-09-29 US US15/030,343 patent/US9670002B2/en not_active Expired - Fee Related
- 2014-09-29 JP JP2015544879A patent/JP6288103B2/en not_active Expired - Fee Related
- 2014-10-24 TW TW103136772A patent/TWI567009B/en not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841725U (en) * | 1981-09-14 | 1983-03-19 | 松下電工株式会社 | Conveyance device |
| JPH03281186A (en) * | 1990-03-28 | 1991-12-11 | Tokyo Autom Mach Works Ltd | Tie-in robot |
| TWM324648U (en) * | 2007-06-08 | 2008-01-01 | Contrel Technology Co Ltd | Air-levitation conveyor capable of changing feeding direction of board |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3064455A4 (en) | 2017-06-21 |
| CN105658551B (en) | 2018-10-26 |
| US20160236872A1 (en) | 2016-08-18 |
| WO2015064268A1 (en) | 2015-05-07 |
| TW201529451A (en) | 2015-08-01 |
| KR101869813B1 (en) | 2018-06-21 |
| KR20160064199A (en) | 2016-06-07 |
| CN105658551A (en) | 2016-06-08 |
| US9670002B2 (en) | 2017-06-06 |
| JP6288103B2 (en) | 2018-03-07 |
| JPWO2015064268A1 (en) | 2017-03-09 |
| SG11201603110PA (en) | 2016-05-30 |
| EP3064455A1 (en) | 2016-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI567009B (en) | Conveyor belt device | |
| JP6690497B2 (en) | Goods transport facility | |
| US11476141B2 (en) | Rail-guided trolley system, and rail-guided trolley | |
| JP5316907B2 (en) | Goods transport equipment | |
| WO2020095571A1 (en) | Ceiling-hung shelf | |
| JP4615015B2 (en) | Container transport system | |
| TWI763871B (en) | Transport system and transport method | |
| JP2006315865A (en) | Chain conveyor with roller for changing direction | |
| WO2017029873A1 (en) | Conveyor car system | |
| JP5401842B2 (en) | Transport system | |
| WO2017043234A1 (en) | Transport system and transport method | |
| JP4858673B2 (en) | Carrying system for suspended lift carriage | |
| KR101504145B1 (en) | Overhead hoist system and carrier thereof | |
| JP5344366B2 (en) | Transport system | |
| TWI743294B (en) | Article transport facility | |
| TWM623380U (en) | Article container conveying mechanism | |
| JP2017197306A (en) | Transfer device and conveyance device | |
| KR20240146417A (en) | Block module conveyor | |
| JP2018193222A (en) | Storage system | |
| TW202233497A (en) | Transport system | |
| TW202421548A (en) | Conveyance device and storage device | |
| JP2018090339A (en) | Transfer device, belt-like conveying means, belt suspension structure, and belt engaging member | |
| WO2005100214A1 (en) | Continuous vertical carrying apparatus | |
| WO2010143451A1 (en) | Device and method for transfer between conveyance systems that use conveyors | |
| JPH1059520A (en) | Circulating chain conveyor device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |