TWI503049B - Apparatus for manufacturing divided mask frame assembly for big size of amoled multi cell tv and mobile panel using horizontal moving type gripper and anticline lighting device - Google Patents

Description

Split mask frame assembly manufacturing device for active organic electroluminescent diode display (AMOLED) panel manufacturing

The present invention relates to a manufacturing apparatus for dividing a Mask Frame Assembly, the manufacturing apparatus comprising a holder device and a back-illumination device for use in an active organic electroluminescent diode display (Active Matrix) Organic Light Emitting Diode (AMOLED) in the masking frame assembly process for vapor deposition in the panel process, manufacturing a horizontal mask frame assembly for manufacturing a large screen television or a mobile AMOLED panel, in particular, for manufacturing a multi-faceted large screen A high-definition mask frame assembly manufacturing apparatus for a mask frame assembly, the manufacturing apparatus comprising: a movable type gripper that sequentially holds and supplies a split mask having only an X skirt or a Y-direction skirt on both sides; The holder is disposed on the movable holder to prevent the wide-divided split mask from being wrinkled in the width direction, and the Y-direction skirt is held in the upper direction and then stretched; the back-illuminating device, the precision measuring split mask The degree of positioning between the strip formed in the lattice and the pattern of the base glass increases the degree of positioning.

The response speed of an Organic Light Emitting Diode (OLED) is much faster than that of a Thin Film Transistor Liquid Crystal Display (TFT LCD). In addition, because it can emit light without a backlight, the thickness and weight can be reduced by one-third, which is a next-generation display with a wide viewing angle and low power consumption.

Such OLEDs are classified into Active Matrix (AM) and Passive Matrix (PM). The passive organic electroluminescent diode display (PMOLED) panel has lower production cost than the active organic light emitting diode display (AMOLED) panel, but is limited in power consumption, life, and resolution. AMOLED uses TFTs and capacitors in each pixel, which is excellent in terms of power consumption, lifetime, and resolution. Therefore, it ignores the disadvantages of high production cost due to TFT fabrication, and is currently widely developed in various fields. And try to mass production in succession.

The biggest advantage of AMOLED is its competitiveness in image quality. Compared to the LCD of the largest competitor, the reproduction rate of color is 30% higher, and the contrast is even 20 times better. The image residual phenomenon of the biggest drawback of LCD is also not found in AMOLED. This is because, contrary to the LCD, the backlight is an indirect light source that passes through a liquid crystal, a color filter, or the like. For a complicated picture display, the AMOLED is a picture that directly reproduces a natural color by the organic substance itself. In addition, OLEDs are very simple in construction compared to LCDs and are therefore very advantageous in terms of components.

However, when looking at the original price of OLED materials, the driving circuit, and the price of the driver IC, the devaluation ratio of OLED is actually large, accounting for half of the original original price. This is because OLED has not been popularized among consumers, making it difficult to reduce production costs through mass production. However, it can be expected that as time goes by, as the volume of the increase increases, the depreciation ratio will fall so that it can compete with the LCD at the price level. The reason for this is that since the backlight unit (Black Light Unit, BLU) and the color filter are not required by the self-illumination method, the number of components is small and simple, so that the cost can be sufficiently reduced.

Therefore, in order to make it competitive in price, it requires all efforts to reduce the depreciation ratio.

However, in order to achieve mass production, there are technical problems that need to be overcome. That is, it is necessary to overcome the fact that the manufacturing environment of the luminescent organic substance is very sensitive, making it difficult to manufacture a good display device with high quality, thus causing a problem of low number of cases; after that, the larger the size, the more difficult it is to ensure the systematic problem of the rate. .

Hereinafter, an attachment 2 showing a schematic diagram of manufacturing an AMOLED in an organic vapor deposition machine using a mask frame assembly of the original type will be described with reference to an AMOLED (Active Matrix/Organic Light Emitting Diode). A method of manufacturing a display panel is conventional.

The basic structure of the active AMOLED panel is ITO (Indium-Tin-Oxide) on which a positive electrode is formed on a glass substrate, on which R, G, and B organic substances are vapor-deposited, and then a negative electrode is formed thereon to make a positive electrode and a negative electrode. A simple construction that energizes and illuminates.

In order to manufacture a conventional mask stretching method having such a basic configuration, a Mask Stret ching method is a method of measuring a position of a target against a target position, and it is necessary to repeatedly perform a stripe position for measuring a mask frame assembly. And the flow of compensation (Flow) to carry out the method of pairing (Matching).

Therefore, it is possible to accurately induce the R, G, and B positions of the glass substrate member in the organic depositor and the opening portion of the mask, and evaporate the vapor deposition source (Source). The precision of the mask frame assembly that deposits organic matter between the membranes within the glass substrate element is very important.

This kind of mask frame assembly uses the stretching method of the original mask, because of the manufacturing error of the original mask (Mask), the low rate of the mask and the material. The manufacturer's mask size (Mask Coil Size) is limited to the current level of the 30" original TV level of the fourth generation, and the maximum size (Size) is 42". . However, because of the high cost of vapor deposition consumables, it is economically restrictive.

For this reason, most of the conventional AMOLEDs are small panel sizes. That is, the mask frame assembly is fabricated using a mask composed of one original shape, and thus the size of the large screen AMOLED is limited. The reason why it is difficult to increase the size of the mask made of one original state is that the supply size of the coil as the material of the mask is not required to be increased in size. That is, because of the profitability problem, coil manufacturers will not produce coils of the size required by AMOLED manufacturers.

On the other hand, the attachment 3 shows a schematic view of the extent to which the position is measured using the oblique illumination. As shown in the figure, in order to configure the tilting illumination in the lower portion, a camera for replacing the flash (not shown) is positioned on the upper portion of the mask frame group, and then irradiated in the downward direction. As described above, when the oblique illumination is performed, the camera captures the pattern on the base glass of the upper portion of the base glass fixing holder of the A1 material by dividing the gap space formed by the processing on the mask, by dividing the mask. A gap is formed in the grid to confirm whether the position of the pattern is positioned as a uniform interval. If it is impossible to accurately measure whether the position of the pattern is in the positive position through the gap, the split mask that is wrong with it may be welded to the frame. In this case, the organic source is fabricated to manufacture the AMOLED panel, and only the defective product is produced.

For this reason, although precise measurement is important, it is conventionally known that when the oblique illumination is used, there is noise due to scattering of the surface roughness of the split mask and uneven etching, which causes the brightness uniformity of the illumination to be low. The problem.

In addition, there is a problem that the increase in resolution causes the belt width to decrease, causing the shadow of the upper tribe oblique illumination to cause the boundary portion to be unrecognized, and the like, and the limit position on the confirmation position is encountered by the oblique oblique illumination method alone.

Therefore, even if the position of the base glass pattern is in the gap space portion of the belt, there is a possibility that an unmeasurable problem occurs.

In order to solve the problems as described above, it is an object of the present invention to provide a manufacturing apparatus for a high-definition split mask frame assembly, comprising: forming a large screen TV or a mobile AMOLED panel by using a split mask, preparing to form on both sides After the split mask of the Y-direction skirt, the holder is straight The gripper is gripped and moved to the welding position in order; the movable gripper has a Y-direction gripper that stretches the skirt in the Y direction and is stretched in the upward direction, and prevents the widening of the length in the width direction during welding. The wrinkles of the cover; the back-illuminated device, the moving split mask is used to improve the positioning between the strip formed on the lattice of the split mask and the base glass pattern before welding.

Further, another object of the present invention is to provide a manufacturing apparatus for splitting a mask frame assembly, which makes back-illumination by a base glass possible, and in order to prevent heating due to illumination, a quartz material is used as a base glass clip. Holder.

In addition, another object of the present invention is to provide a manufacturing apparatus for splitting a mask frame assembly, in order to reduce the positioning degree between the strip formed on the lattice of the split mask and the base glass pattern in the set back illumination illumination, the illumination heating The resulting degree of positioning error, the illumination consists of edge-type LED white light.

In order to achieve the above objects and to eliminate the disadvantages of the prior art, it is an object of the present invention to provide a manufacturing apparatus for splitting a mask frame assembly, the manufacturing apparatus comprising a holder device and a backfire illumination device, the manufacturing device being used for In the mask frame assembly process for vapor deposition in the AMOLED panel process, a horizontal type mask frame assembly is manufactured for manufacturing a large screen display or a moving AMOLED panel, and the manufacturing apparatus includes: a pair of linear servo motors for split mask transfer; A movable gripper includes: a plurality of split mask holders respectively mounted on the linear servo motor to apply tension after holding a split mask; a Y-direction gripper held and stretched Forming a Y direction of a Y-direction skirt formed at both ends of the split mask, such that the movable gripper horizontally moves the split mask to a set frame position; a base glass and a back-illumination pull-down device Loading a base glass and a back-illuminating device for illuminating a direction of a base glass in a direction of a lower portion of the fixedly disposed frame; Provided on an upper side of the linear servo motor for mask transfer, transferring an image and a laser welding device mounted on the lower portion in the X, Y, and Z directions; and the image and laser welding device, including the image The transfer device is provided with a camera, a laser displacement sensor and a laser welding device for setting a tilting illumination device.

According to a preferred embodiment of the present invention, the movable gripper has a structure in which a plurality of rails constituting the linear servo motor and an upper portion of the guide block disposed on an upper portion of the rail are arranged in a coordinated manner and moved. The split mask holder and a plurality of Y-direction holders disposed at both ends of the split mask holder.

In a preferred embodiment of the present invention, the Y-direction holder includes: a mask guide roller supported by a Y-direction skirt formed in the split mask; a one-liter descending roller unit on which the mask guide roller is pulled down; a mask holder that holds the Y-direction skirt; a mask holder a cylinder that operates the mask holder; a clamping block that carries the mask holder and the mask holder cylinder; and a stretching cylinder that causes the clamping block to perform a forward and backward movement To apply tensile force.

In a preferred embodiment of the present invention, the clamping block is provided with: a tilting block for performing a forward and backward movement in a tilting direction of the lower portion for guiding; and a guide rail for causing a guiding block coupled to a lower portion of the inclined block to follow The split mask holder slides in a forward and backward traveling direction.

According to a preferred embodiment of the present invention, the base glass has a structure in which a transparent base glass holder made of quartz is placed at a lower portion thereof and supported.

According to a preferred embodiment of the present invention, the backlight illumination device is an LED illumination device in which an LED is used as a light source.

According to a preferred embodiment of the present invention, the LED lighting device is an edge type LED lighting device provided with a light source from a side direction.

The present invention as described above has a split mask which forms a Y-direction skirt on both sides when a TV or a moving AM OLED panel for manufacturing a large screen is formed by a split mask, and the gripper directly holds it and sequentially Moving to the welding position, the number of grippers can be reduced, and the change in the size of the split mask can be dealt with at any time, and the split mask can be supplied to the correct frame position for positioning.

In addition, the Y-direction holder provided in the movable holder has a Y-direction skirt formed on the divided mask at an arbitrary angle in order to prevent wrinkles caused by the split mask in which the length in the width direction is increased. The direction is the advantage of holding the stretch to place the wrinkles.

In addition, it has a rear illumination illuminating device comprising a positioning degree between the belt formed on the lattice of the split mask and the base glass pattern, thereby making it possible to manufacture a high-definition split mask frame assembly.

In addition, the present invention further includes: when the back-illumination is set to measure the positioning degree between the strip formed on the grid of the split mask and the base glass pattern, the transparent base glass holder and the edge type LED white light of quartz are used to reduce the illumination. The positioning error caused by the heating makes it possible to manufacture a high-definition split mask frame assembly, and its industrial utilization is highly anticipated.

The constitution of the embodiment of the present invention and its action will be specifically described below with reference to the accompanying drawings. Further, in the course of explaining the present invention, when it is judged that the detailed description of the well-known functions or the constituents may be confused with the gist of the present invention, the detailed description thereof will be omitted.

1 is a schematic plan view showing a device for splitting a mask frame assembly according to an embodiment of the present invention, and FIG. 2 is a view showing a schematic front structure of a device for splitting a mask frame assembly according to an embodiment of the present invention. FIG. 3 is a schematic side structural view showing a device for dividing a mask frame assembly according to an embodiment of the present invention, and FIG. 4 is a view showing a mobile type in which a Y-direction holder is mounted according to an embodiment of the present invention. An enlarged schematic view of a portion of the holder, FIG. 5 is a schematic view showing the degree of measurement by back-illumination according to an embodiment of the present invention, and FIG. 6 is a view showing a frame constituting the backlight illumination device according to an embodiment of the present invention. FIG. 7 is a schematic view showing a base glass of a long-side direction and a pull-down illumination upper pull-down device, and FIG. 7 is a schematic view showing a base glass and a back-illumination upper pull-down device for forming a frame of a back-illuminated illumination device according to an embodiment of the present invention. . The part omitted in the drawing will be explained by enlarging the drawing.

As shown in the figure, the split mask frame assembly device of the present invention includes a pair of split-mask transfer linear servomotors 1 that transfer the movable gripper 2 mounted on the upper portion; and the movable gripper 2 The plurality of divided mask holders 21 are mounted on the upper portion of the linear servo motor 1 for split mask transfer, and the split mask 71 received from the split mask loading device 6 is gripped and moved horizontally to After the set frame position, the tensile force is applied to align the position; the Y-direction holder 22 is held and stretched in the Y direction of the Y-direction skirt formed at both ends of the split mask 71, so that the movable gripper 2, the split mask 71 is horizontally moved to the set frame position; the base glass and the back-illumination upper pull-down device 3 are fixed to the upper portion by the frame 72 transferred by the frame supply device (not shown), and are oriented toward the lower portion of the fixed frame. The base glass 31 is loaded, and the backlight illuminating device 32 that illuminates the lower portion of the base glass 31 is sequentially loaded. The transfer device 4 is placed on the upper portion of the linear servo motor for mask transfer and moved in the X, Y, and Z directions. The image and laser welding device 5 mounted on the lower portion; and the image and laser welding device 5 include a camera 51 including a tilting illumination device, a laser displacement sensor, and a laser welding device 52, and are mounted on the transfer device 4 The degree of positioning between the groove of the split mask 71 and the base glass pattern located at the lower portion thereof is measured and welded.

The movable gripper 2 includes: a guide rail 11 constituting the linear servo motor 1; a plurality of split mask holders 21 disposed at an upper portion of the guide block 12 at the upper portion of the guide rail 11, and a plurality of the split mask holders 21; The Y-direction holder 22 that is linked and transferred at both ends. Also unspecified The configuration of the cylinder in which the split mask holder 21 operates and the motor that moves forward and backward on the guide rail 11 are common knowledge, and therefore detailed description thereof will be omitted. In addition to the above-described structure of the movable gripper 2, the present invention is characterized in that, unlike the conventional configuration in which the split mask 71 is held and stretched at a position where the split mask holder 21 is fixed, a configuration is performed. Such a holding and stretching action is performed by mounting the position on the upper portion of the linear servo motor 1 and moving it in the longitudinal or short-side direction of the frame to move the split mask 71, and also to prevent the width from increasing. After folding the wrinkles of the mask 71 and preparing the split mask 71 in the Y-direction skirt, the Y-direction gripper 22 is held and stretched in the Y direction.

The configuration of the Y-direction holder according to an embodiment of the present invention will be specifically described below.

The Y-direction holder 22 includes a mask guide roller 2201 that supports the Y-direction skirt portion 711 formed on both sides of the both ends with reference to the longitudinal direction of the split mask 71; the lift-down roller unit 2203, up and down Pulling the roller support ball 2202 of the guide roller 2201; the support body 2205 is disposed on the guide block 2204, and supports the lift-down roller unit 2203; the cover holder 2206 is hinged and coupled to one side of the guide roller 2201 to hold it Y-direction skirt 711; mask holder cylinder 2207, one side of which is hingedly coupled to the upper portion of the mask holder 2206 to operate the mask holder 2206, and the other side hinge is coupled to the clamping block 2208; Block 2208, carrying mask holder 2206 and mask holder cylinder 2207; stretching cylinder 2209, causing clamping block 2208 to move forward and backward to apply a tensile force; tilting block 2210, tilting the lower portion of clamping block 2208 The front and rear movements are guided; and the guide rail 2211 slides the guide block 2204 coupled to the lower portion of the inclined block 2210 along the forward and backward movement directions of the divided mask holder.

The lift-down unit may use any one of a cylinder mode or a click mode.

The backlight illuminating device 32 is always mounted on the base glass and the back-illumination pull-down device 3, and illuminates the light in the upward direction to change the periphery of the pattern of the base glass 31, so that the camera under the oblique illumination obtains a clear image. At this time, the base glass holder 33 that supports the base glass 31 is a transparent holder made of quartz (Quarts), and the light of the backlight illuminating device 32 is irradiated to the base glass. Such a base glass holder 33 is for preventing illumination heating of the split mask caused by the backlight illuminating device 32.

The realization of the irradiation as described above causes the base glass other than the pattern to emit light, which makes the difference in brightness from the pattern larger. As described above, the sensitive difference between the pattern and the surface of the base glass outside the frame becomes large. In order to measure the pattern of the base glass and the positional alignment of the divided mask grooves (or belts), the camera is photographed correctly when shooting under the oblique illumination. profile.

At this time, the backlight illumination device of the present invention is constituted by an LED illumination device in which an LED of a general light source is used as a light source. In particular, the LED lighting device used in the present invention is an edge-type LED lighting device provided on the side surface in order to prevent illumination heating of a split mask or the like due to heat of the lighting device. The edge type LED lighting device is generally used for a well-known structure of a backlight such as a recent LCD TV, and any of commercially available product forms can be used, and thus the specific configuration and configuration are omitted.

For reference, the oblique illumination device is a ring type flash disposed around the lens of the camera or a flash lamp disposed at a position independent of the lens for illuminating in a downward direction.

Further, although the base glass and the back-illumination upper pull-down device are not described, they are configured to be raised and lowered by a plurality of cylinders, and have a structure including a support frame and a base glass. Further, a transfer device that transports the entire device in the horizontal direction is provided as described above, and is a configuration of a general pull-down device as described above. Even if it is shown or not shown, a person having ordinary knowledge can easily carry out the drawing. Therefore, a detailed explanation is omitted.

In addition, the devices loaded, positioned and supported by the base glass, the base glass holder and the back-illuminated device in the drawing seem to interfere with each other, but in fact only represent the operation of loading, the fact of which is that all loads After the operation, each illuminating device and the base glass are located at the upper part of the back-illuminating device, and a split mask that is transferred to the upper portion of the base glass and stretched and positioned is placed on the upper portion of the base glass.

The transfer device 4 that transfers in the X, Y, and Z directions has a pair of X-direction transfer devices 41 that are configured by guide rails and guide blocks that move in the same direction as the movable gripper, and a Y-direction transfer device 42 that The guide rail and the guide block formed between the guide blocks of the pair of X-direction transfer devices are configured, and the Z-direction transfer device 43 is disposed on the guide block of the Y-direction transfer device, and is configured to be vertically ascending and descending. A laser displacement sensor and a laser welding device are mounted on the Z-direction transfer device.

The driving principle of such a transfer device is still a general configuration, and those skilled in the art can easily implement the drawings by the drawings, and therefore a detailed description will be omitted.

Further, although not shown in the drawings, the apparatus of the present invention is configured in a clean room because an environment which is generally formed in a process of requiring a highly clean semiconductor, TV or mask frame, Therefore, the detailed description is omitted.

Fig. 8 is a view showing the stretching action of the Y skirt of the split type mask by the Y-direction holder according to an embodiment of the present invention. As can be seen from the figure, the cover guide roller 2201 is raised or lowered by the raising and lowering of the roller raising and lowering unit 2203, and the length direction reference of the split mask 71 is made. The Y-direction skirt portion 711 formed on both sides of both ends applies or releases tension to help mask the tensile force of the holder 2206. Without the above-described mask guide roller 2201, when the mask holder 2206 holds the Y-direction skirt portion 711 and stretches, there is a problem that the angle of the Y-direction skirt portion 711 is excessively bent and the holding of the split mask holder 21 The problem of a drop in force or breakage, but this problem can be solved by the presence of the mask guide roller 2201.

In addition, the mask holder 2206 can be gripped according to the operation of the mask holder cylinder 2207, with the upper portion of the holder being raised or lowered.

Further, the tensile force by the mask holder 2206 adjusts the stretching force for holding the skirt in the Y direction in accordance with the forward and backward movement of the stretching cylinder 2209. By this stretching force adjustment, the wrinkles of the split mask having a large width can be prevented. As described above, welding is performed in a state in which wrinkles are prevented, and since the tensile force of stretching after the end of welding is maintained, a high-definition mask frame assembly can be manufactured.

The Y-direction skirt needs to be removed after welding to eliminate interference with the adjacent split mask. The removal method is to use a laser welding device for cutting.

After the Y-direction skirt is removed as described above, the split mask is again taken over to measure the position and then soldered.

Fig. 9 is a view showing the Y-direction holder of the present invention stretching the Y skirt portion of the split type mask to greatly improve the wrinkles. From this, it can be seen that the effect of welding in the case where the Y-direction gripper applies a tensile force to the Y-direction skirt according to the present invention. The fold change in the line 1, line 2, and line 3 of the left split mask corresponds to the lines 1, 2, and 3 of the lower right figure in order, and the graphic values of the three lines can be known as the Min of each line (Line). The minimum) -Max height value is 20 μm. It can be seen that a significant improvement is obtained from the Min (minimum)-Max (maximum) height value of the conventional line of 120 μm. In the graph, the unit of the left Y-axis value is mm, and the value of 1 to 34 which is the right X-axis value is the number of points measured in each of the lines 1, 2, and 3 of the split mask shown on the left side.

Attachment 1 is a schematic diagram showing measurement results of Pixel Position Accuracy (PPA) taken under the backlight illumination of the present invention and measurement results of the conventional method.

As shown in Annex 1, when the oblique illumination is used, there is a problem that the noise caused by the surface roughness of the split mask and the uneven corrosion state causes the luminance uniformity of the illumination to be low. In addition, there is a problem that the increase in resolution causes the belt width to decrease, causing the shadow of the upper tribe oblique illumination to cause the boundary portion to be unrecognized, and the like, and the limit position on the confirmation position is encountered by the oblique oblique illumination method alone. Therefore, even if the position of the base glass pattern is on the gap space portion of the belt, there is There may be problems that cannot be measured.

However, according to the provision of the backlight illumination according to the present invention, it has been found that the problem caused by the surface roughness or the like in the conventional use of only the oblique illumination is solved, and the image captured by the camera has a clear and dark image. As described above, since the clear image having a uniform pitch is laid in the open space of the divided mask groove (or tape) by the pattern of the base glass, the split mask of the movable type holder of the present invention is sandwiched. The split mask can be positioned in the correct frame position in the gripped state and a tensile force is applied, where the Y-direction gripper applies a tensile force to the Y-direction skirt to create a high-precision mask frame assembly. That is, PPA Accuracy has been improved.

The present invention is not limited to the specific preferred embodiments described above, and it is to be understood by those skilled in the art that the invention can be practiced without departing from the scope of the invention as claimed. The changes are within the scope of the patent application.

1‧‧‧Linear servo motor

2‧‧‧Mobile gripper

3‧‧‧Base glass and back-illumination up-down device

4‧‧‧Transfer device

5‧‧‧Image and laser welding equipment

6‧‧‧Split mask loading device

11‧‧‧ Guide rail

12‧‧‧ Guide block

21‧‧‧Split mask holder

22‧‧‧Y direction holder

31‧‧‧Base glass

32‧‧‧Backlighting device

33‧‧‧Base glass holder

41‧‧‧X direction transfer device

42‧‧‧Y direction transfer device

43‧‧‧Z direction transfer device

51‧‧‧Camera

52‧‧‧Laser displacement sensor and laser welding device

71‧‧‧Split mask

72‧‧‧Frame

711‧‧‧Y direction skirt

2201‧‧‧mask guide roller

2202‧‧‧Roll support ball

2203‧‧‧Roller down unit

2204‧‧‧ Guide block

2205‧‧‧Support

2206‧‧‧mask holder

2207‧‧‧mask holder cylinder

2208‧‧‧Clamping block

2209‧‧‧ stretching cylinder

2210‧‧‧ tilt block

2211‧‧‧rail

1 is a schematic plan view showing a device for dividing a mask frame assembly according to an embodiment of the present invention; and FIG. 2 is a view showing a schematic front structure of a device for dividing a mask frame assembly according to an embodiment of the present invention; Figure 3 is a schematic side structural view showing a device for dividing a mask frame assembly according to an embodiment of the present invention; and Figure 4 is a view showing a moving folder with a Y-direction adhered thereto according to an embodiment of the present invention; An enlarged schematic view of a portion of the holder; FIG. 5 is a schematic view showing the degree of measurement by back-illumination according to an embodiment of the present invention; and FIG. 6 is a view showing the length of the frame constituting the backlight illumination device according to an embodiment of the present invention. FIG. 7 is a schematic view showing a base glass and a back-illumination upper pull-down device for forming a frame in a short-side direction of a backlight illumination device according to an embodiment of the present invention; Figure 8 is a view showing the stretching action of the Y-sleeve of the split type mask by the Y-direction holder according to an embodiment of the present invention; and Figure 9 is a view showing Y invention Y direction of the holder skirt split-type mask will be pulled Stretching thus greatly improves the pattern of wrinkles.

【annex】

Attachment 1 is a schematic diagram showing the Pixel Position Accuracy (PPA) measurement results taken under the backlight illumination of the present invention and the measurement results of the conventional method; and FIG. 2 is a view showing the conventional original mode mask frame assembly by organic evaporation. Schematic diagram of the principle of manufacturing AMOLED in the machine; and Annex 3 is a schematic diagram showing the extent to which the position is measured by the oblique illumination.

1‧‧‧Linear servo motor

2‧‧‧Mobile gripper

3‧‧‧Base glass and back-illumination up-down device

4‧‧‧Transfer device

6‧‧‧Split mask loading device

31‧‧‧Base glass

41‧‧‧X direction transfer device

42‧‧‧Y direction transfer device

71‧‧‧Split mask

72‧‧‧Frame

711‧‧‧Y direction skirt

Claims (7)

A manufacturing apparatus for dividing a mask frame assembly, the manufacturing apparatus comprising a holder device and a backfire illumination device for vapor deposition in an active organic electroluminescent diode display (AMOLED) panel process In the mask frame assembly program, a horizontal type mask frame assembly is manufactured for manufacturing a large screen display or a moving AMOLED panel, the manufacturing apparatus comprising: a pair of linear servo motors for split mask transfer; and a movable type holder; The method includes: a plurality of split mask holders respectively mounted on the linear servo motor to apply tension after holding a split mask; and a Y-direction holder disposed at two sides of the split mask holder Holding and stretching a Y direction of a Y-direction skirt formed at both ends of the split mask, so that the movable gripper horizontally moves the split mask to a set frame position; a base glass and The back-illumination pull-down device sequentially loads a base glass and a back-illuminated illumination device that illuminates a substrate glass direction in a direction of a lower portion of the fixedly disposed frame; The device is disposed on an upper side of the linear servo motor for mask transfer, and transfers an image and a laser welding device mounted on the lower portion in the X, Y, and Z directions; and the image and the laser welding device are mounted thereon The transfer device is provided with a camera, a laser displacement sensor and a laser welding device for setting a tilting illumination device. The manufacturing apparatus of the split mask frame assembly according to the first aspect of the invention, wherein the movable gripper is configured as follows, that is, a guide rail constituting the linear servo motor and a portion disposed on an upper portion of the guide rail The upper part of the guide block is provided with a plurality of the divided mask holders and a plurality of the Y-direction holders disposed at both sides of the split mask holder in a manner of interlocking and moving. A manufacturing apparatus for a split mask frame assembly according to claim 1 or 2, wherein the Y-direction holder comprises: a mask guide roller that supports the Y formed in the split mask a skirt of the one-liter descending roller unit, the slider guide roller is pulled up thereon; a mask holder that holds the Y-direction skirt; and a mask holder cylinder that holds the mask Operation a clamping block carrying the mask holder and the mask holder cylinder; and a stretching cylinder that causes the clamping block to move forward and backward to apply a tensile force. The manufacturing apparatus of the split mask frame assembly according to the third aspect of the invention, wherein the clamping block is provided with: an inclined block, which performs a forward and backward movement in a downward direction for guiding; and a guide rail for combining A guide block at a lower portion of the tilting block slides along a forward and backward traveling direction of the split mask holder. The apparatus for manufacturing a split mask frame assembly according to claim 1, wherein the base glass has a structure in which a transparent base glass holder of quartz material is located at a lower portion thereof and supported. The apparatus for manufacturing a split mask frame assembly according to claim 1, wherein the backlight illumination device is a light-emitting diode illumination device in which a light-emitting diode is used as a light source. The apparatus for manufacturing a split mask frame assembly according to claim 6, wherein the light emitting diode lighting device is an edge type light emitting diode lighting device provided by a light source side.