TWI447024B - Mating device and bonding method - Google Patents

Description

Laminating device and bonding method

The present invention relates to a technique for bonding a flat workpiece such as a liquid crystal module and a cover, and an improved bonding apparatus and bonding method.

Generally, the liquid crystal panel is composed of a liquid crystal module, a protective sheet for protecting the surface of the liquid crystal module, and a touch panel for operation. The liquid crystal module, the protective sheet, the touch panel, and the like (hereinafter referred to as a workpiece) are frames that are assembled into the liquid crystal module, and are in contact with the liquid crystal glass in order to avoid deformation of the protective panel or the touch panel. There is space between each other.

However, when the air layer enters between the liquid crystal module, the protective sheet, the touch panel, and the like (hereinafter referred to as a workpiece), the visibility of the display surface is lowered due to the reflection of the external light. In order to cope with the above problems, the bonding is performed in such a manner that an adhesive layer embedded between the workpieces is formed by a double-sided tape or a bonding material such as an adhesive.

Therefore, in the production of a liquid crystal panel, a bonding apparatus that "prepares the above-described bonding material and performs bonding on at least one of the workpieces" is required. Further, in order to prevent air bubbles or the like from being mixed between the bonded workpieces, the bonding is preferably performed in a vacuum environment. Therefore, the bonding apparatus must also have a vacuum chamber or the like.

The techniques shown in Patent Documents 1 to 4 have been disclosed in the above-described technique for bonding workpieces. The above technique is a technique in which a pair of workpieces are attached by a pressurizing mechanism in a vacuum chamber. In such a pressurizing mechanism, a pressurizing plate that is raised and lowered by a driving portion such as a motor or a pressure cylinder is used.

In the case where a liquid resin or an adhesive sheet is used as the bonding material, a vacuum bubble may be generated in the adhesive layer after bonding, and the method of eliminating the vacuum bubble may be vacuum. Pressurization in the environment, using pressurization (meaning placement in the atmosphere) to return to atmospheric pressure in the atmosphere is an effective way. The practice of performing mechanical pressurization is also effective when returning to the atmosphere.

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 6-97268

[Patent Document 2] Japanese Laid-Open Patent Publication No. 2002-329350

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2003-307719

[Patent Document 4] Japanese Laid-Open Patent Publication No. 2006-184807

In the prior art as described above, the pressurizing mechanism is directly supported by the vacuum chamber. In this way, when vacuum suction is applied to the vacuum chamber, the outer wall of the vacuum chamber is deflected due to atmospheric pressure, or the amount of pressing of the sealing O-ring is changed, resulting in the position of the pressurizing mechanism. Variety. Therefore, the amount of pressurization of the pressurizing plate is excessively affected to affect the workpiece, and after one pressurization, there is a possibility that the pores enter the subsequent layer due to a decrease in the amount of pressurization. In order to cope with such a situation, a method of driving the pressurizing mechanism on a base different from the vacuum chamber is considered. However, when the above-described pressurizing mechanism is provided, the bonding apparatus is increased in size and complexity.

The present invention has been made to solve the above problems of the prior art, and an object of the present invention is to provide a bonding apparatus and a sticker which are simple in structure and capable of maintaining a constant pressing force even when the position of the driving portion is changed. Method.

In order to achieve the above object, the present invention is a bonding apparatus for bonding a pair of workpieces, characterized by having: a pressing head that pushes at least one of the workpieces; and a vacuum chamber, the vacuum chamber a space for sealing "a pair of workpieces by the pressing head"; and a pressure reducing device connected to the vacuum chamber and capable of vacuuming the inside thereof; and a driving portion, The driving portion is supported by the vacuum chamber and applies pressure to the pressing head; and a determining portion for directly or indirectly determining that "the pressure is reduced in the vacuum chamber from before decompression until a change in pressure applied to the other of the pair of workpieces by the pressurizing head during the opening of the atmosphere; and a control unit that controls the pressing force of the driving unit based on the determination by the determining unit.

The other aspect is a bonding method of bonding a pair of workpieces by pushing a pressing head of at least one of the workpieces in the vacuum chamber, wherein the determining unit directly or indirectly determines that "in the aforementioned vacuum chamber The control unit changes the pressure applied to the other of the pair of workpieces during the period from the pressure reduction to the time when the atmosphere is opened, and the control unit controls the control unit based on the determination by the determination unit. The pressing force of the driving portion of the pressurizing head supported by the vacuum chamber.

In other aspects, in order to perform the determination by the determination unit, a detecting unit for detecting "the pressing force of the pressing head against the other of the pair of workpieces" is provided.

In other aspects, in order to perform the determination by the determination unit, a detection unit for detecting "the position of the pressing head relative to the other of the pair of workpieces" is provided.

In the invention described above, when the vacuum chamber is attracted, even if the vacuum chamber or the like is displaced due to the atmospheric pressure, and then even if the atmosphere is released due to the opening of the atmosphere, the driving portion supported thereby is controlled by the pressing force of the pressing head. It is fixed, so it can prevent the change of the pressure.

The other aspect is characterized in that it has a support portion for supporting the other of the pair of workpieces, and the detecting portion has a sensor for detecting a gap between the support portion and the driving portion.

In the above-described aspect, the position of the pressurizing head can be determined based on the interval between the support portion and the driving portion, and can be controlled to an appropriate pressing force.

The other aspect is characterized in that: a support portion for supporting the other of the pair of workpieces, the detecting portion having: a sensor for detecting a gap between the support portion and the pressing head .

In the above-described aspect, the position of the pressurizing head can be determined based on the interval between the support portion and the pressurizing head, and controlled to an appropriate pressing force.

As described above, according to the present invention, it is possible to provide a bonding apparatus and a bonding method which are simple in structure and capable of maintaining a constant pressing force even when the position of the driving portion fluctuates.

Next, an embodiment of the present invention (hereinafter referred to as an embodiment) will be specifically described with reference to the drawings.

[A, composition]

[1. Overall structure]

First, the overall structure of the bonding apparatus (hereinafter referred to as the present apparatus) of the present embodiment will be described. As shown in Fig. 1, the apparatus is a device in which four holding devices 2 are mounted on a turntable 1. The turntable 1 is intermittently rotated by an indexing mechanism not shown in the drawing, and is combined with the input and take-out position 1A, the sticking material preparation position 1B, the positioning position 1C, and the vacuum bonding position 1D.

As shown in FIG. 2, the holding device 2 is a device that holds the workpiece S1 placed on the placing portion 3 and the workpiece S2 held by the holding portion 4 in the vertical direction. In the present embodiment, the so-called workpieces S1 and S2 are rectangular substrates such as a liquid crystal module and a cover. The support portion is composed of the turntable 1 and the mounting portion 3.

Although not shown in the drawing, at the sticking material preparation position 1B, the peeling device or the coating device is provided to be detachable. The peeling device is a peeling device for peeling off the release paper of the double-sided tape that has been attached to the workpiece S1 in advance. The coating device is a coating device for applying an adhesive to the workpiece S1.

Although not shown in the drawing, a positioning device is disposed at the positioning position 1C, and the positioning device executes the workpiece S1 according to the value measured by the detecting device for detecting the position of the workpieces S1 and S2. Positioning of the workpiece S2.

As shown in FIGS. 3 to 7, the pressing device 5 is provided at the vacuum bonding position 1D. The pressing device 5 can press the workpiece S2 against the workpiece S1 side in the decompression space in the vacuum chamber 51.

[2, pressing device]

Next, the detailed structure of the pressing device 5 will be described. As shown in FIGS. 3 to 7, the pressing device 5 includes a vacuum chamber 51, a pressurizing head 52, a lifting mechanism 53, a driving portion 54, an auxiliary member 56A, an auxiliary member 56B, a sensor 57, and the like. The vacuum chamber 51 covers the holding device 2 on the turntable 1 to form a sealed chamber. In the vacuum chamber 51, a pressure reducing pump 55 (Fig. 8) as a vacuum source (pressure reducing means) is connected through a pipe.

The pressurizing head 52 is a means provided in the vacuum chamber 51 and pressurizing the workpiece S2 downward. An elastic protective sheet or the like may be assembled to the pressing head 52 and the placing portion 3. The drive unit 54 is a motor that causes the drive rod 54a connected to the pressurizing head 52 to move up and down by rotating the ball screw not shown in the drawing.

The elevating mechanism 53 is a mechanism that elevates and lowers the vacuum chamber 51 together with the pressurizing head 52. The elevating mechanism 53 has a drive source 53a, a ball screw 53b, a slider 53c, a guide 53d, and the like. The drive source 53a is a member such as a motor that causes the ball screw 53b to rotate. The ball screw 53b is a member that moves the slider 53c up and down by rotation. The slider 53c is a member that is fixed to the vacuum chamber 51 to lift and lower the vacuum chamber 51. The guide 53d is a member for guiding the movement of the slider 53c.

The auxiliary member 56A is a member that is fixed to the horizontal direction of the drive lever 54a. The auxiliary member 56B is a member that is fixed to the vertical direction of the turntable 1. The sensor 57 is a sensor that is fixed to the upper end of the auxiliary member 56B and is used to detect the interval between the "accessory member 56A reaching the upper portion thereof". This is formed by indirectly detecting the position of the pressurizing head 52. The auxiliary members 56A, 56B and the sensor 57 constitute a detecting portion.

The components of the turntable 1, the holding device 2, the pressing device 5, and the like, and their respective driving sources, switches, power supplies, and the like are controlled by the control device 6 shown in Fig. 8. The control device 6 can be configured to realize various functions described below by, for example, a computer that "operates in a dedicated electronic circuit or a specific program".

Hereinafter, the control device 6 will be described with reference to Fig. 8 of the virtual function block diagram. The input device for operating the control device 6, such as a switch, a touch panel, a keyboard, a mouse, and the like, and an output device such as a display, a lamp, and a gauge for confirming the state of the control device 6 are omitted.

In other words, the control device 6 includes a chamber control unit 61, a pressure reduction control unit 62, a pressing control unit 63, an interval determination unit 64, a storage unit 65, a fluctuation determination unit 66, a drive amount determination unit 67, an input/output interface 68, and the like. Features. The chamber control unit 61 is a means for controlling the "lifting mechanism 53 for raising and lowering the vacuum chamber 51".

The pressure reduction control unit 62 is a means for controlling the pressure reducing pump 55 that "decompresses the pressure in the vacuum chamber 51". The pressing control unit 63 is a means for controlling the driving unit 54 that "lifts the pressing head 52 up and down".

The interval determining unit 64 is means for determining the interval between the auxiliary member 56A and the auxiliary member 56B based on the detected value from the sensor 57. The memory unit 65 is a means for storing the "interval determined by the interval determining unit 64".

The change determination unit 66 is a means for determining the amount of fluctuation in the interval by comparing the interval between the "determination by the interval determination unit 64" and the interval "memorized in the memory unit 65". The driving amount determining unit 67 is means for determining the driving amount of the driving unit 54 based on the interval "determined by the interval determining unit 64" or the "variation determined by the fluctuation determining unit 66". The input/output interface 68 is a means for controlling the conversion or input of the "signal between the sections to be controlled".

[B, role]

The operation of the embodiment having the above configuration will be described with reference to Figs. 2 to 8. Further, a method of controlling the bonding apparatus in the order described below and a computer program for causing the control apparatus to operate are also aspects of the present invention.

First, as shown in Fig. 2, the workpiece S1 is placed on the placing portion 3, and the workpiece S2 is held by the holding portion 4, whereby the workpiece S1 and the workpiece S2 are opposed to each other. A material T is prepared at the workpiece S1. That is, the adhesive side of one side of the double-sided tape is attached, or an adhesive is applied.

The holding device 2 holding the workpieces S1 and S2, as shown in Fig. 3, reaches the vacuum bonding position 1D by the rotation of the turntable 1. Once this is done, vacuum bonding will be performed by the pressing device 5 as described below.

In other words, as shown in Fig. 4, the chamber control unit 61 lowers the vacuum chamber 51 by operating the elevating mechanism 53, and seals the periphery of the holding device 2. Next, as shown in Fig. 5, the pressure reduction control unit 62 causes the pressure reducing pump 55 to operate to apply vacuum suction to the inside of the vacuum chamber 51. At this time, although the vacuum chamber 51 is deflected by the atmospheric pressure, the interval is detected by the sensor 57 and memorized in the memory portion 65.

Since the measured interval is proportional to the interval between the position of the pressurizing head 52 (in a preliminary state, a certain position with respect to the vacuum chamber 51) and the workpiece S1, the drive is driven according to the interval. The amount determining unit 67 determines the driving amount of the driving unit 54. As shown in Fig. 6, the pressing control unit 63 causes the driving unit 54 to actuate to lower the pressing head 52 based on the determined driving amount, and presses the workpiece S2 against the workpiece S1.

After that, as shown in Fig. 7, the pressure reducing control unit 62 causes the pressure reducing pump 55 to stop, thereby causing the vacuum chamber 51 to form an atmosphere. As a result, the deflection of the outer wall is restored by the formation of atmospheric pressure in the vacuum chamber 51.

At this time, the fluctuation determination unit 66 determines the fluctuation amount by comparing the interval between the "measurement by the sensor 57" and the interval at the time of pressure reduction, and the drive amount determination unit 67 maintains the drive amount based on the fluctuation amount while maintaining The pressing control unit 63 causes the driving unit 54 to act based on the above-described result, in accordance with the pressing force equal to that at the time of pressure reduction.

In this way, by performing the feedback-based immediate control, the workpiece S2 is continuously pressurized with a certain pressure to the workpiece S1. Next, after a predetermined period of time has elapsed stably, the pressing control unit 63 urges the driving unit 54 to move, and the pressing head 52 is raised.

[C, effect]

According to the embodiment described above, the following effects can be obtained. In other words, even in the simple structure of "the driving portion 54 is disposed on the vacuum chamber 51", the pressing of the pair of workpieces S1, S2 can be performed at a constant pressure during the period from the vacuum suction to the opening of the atmosphere. Therefore, it does not adversely affect the workpiece, and prevents the pores from entering the adhesive layer due to a decrease in the amount of pressurization.

[D, other embodiments]

The present invention is not limited to the above embodiments. For example, the drive portion can be any means as long as the pressurizing head can be raised and lowered. For example, it may also be a cylinder that causes the drive rod to advance and retreat. Further, as far as the lifting mechanism is concerned, any means can be used as long as the vacuum chamber can be raised and lowered. For example, a cylinder can also be used. A plurality of lifting mechanisms can also be arranged around the vacuum chamber to achieve stable lifting.

There is also no particular limitation on the shape of the vacuum chamber. For example, as shown in FIG. 9, by forming the hollow portion 51a that communicates with the outside air, the amount of deflection of the vacuum chamber 51 during vacuum suction is suppressed, and the influence on the driving portion 54 is reduced. .

The configuration of the detection unit is also unlimited. As long as the determination unit can directly or indirectly determine the structure in which the pressing head changes the pressing force of the workpiece opposite to the workpiece pushed by the pressing head. Therefore, any one of the following can be detected by the sensor: "the workpiece, and the support portion (such as the mounting portion) and the turntable that supports the workpiece" and the "pressurizing head" And the spacing of any of the components (such as the drive rod) that move with the pressurizing head. In this case, there is no limitation as to whether or not the auxiliary member is interposed between one or both of the objects to be detected. The sensor used is not limited to the above device. For example, a laser displacement meter or the like can also be used.

In addition, it is also possible to directly detect the change in the pressing force by providing a sensor that detects the self-pressure of the pressing head. For example, consider a sensor 58 for detecting pressure between the auxiliary member 56A and the auxiliary member 56B as shown in Fig. 10, or inserting a sensor at the drive rod 54a as shown in Fig. 11. 58 way. In the above case, the pressure determination unit is set instead of the interval determination unit 64 located in the control device 6.

When the vacuum chamber 51 is decompressed, the pressure determined by the pressure determining unit (the pressure changed from the initial state before decompression) is stored in the memory unit 65 based on the detected value of the sensor 58. Based on this pressure, the drive amount determining unit 67 determines the drive amount of the drive unit 54. The pressing control unit 63 causes the driving unit 54 to actuate and lowers the pressing head 52 based on the determined driving amount, and presses the workpiece S2 against the workpiece S1.

After that, the pressure reduction control unit 62 stops the pressure reduction pump 55, and the fluctuation determination unit 66 compares the "pressure measured by the sensor 58" with the "pressure at the time of pressure reduction" to determine the amount of change ( Change in pressure). The driving amount determining unit 67 determines the driving amount based on the fluctuation amount, and maintains the same pressing force as that at the time of pressure reduction, and the pressing control unit 63 activates the driving unit 54 accordingly. For sensors for detecting pressure, stress sensing such as metal resistor type, semiconductor type, piezoelectric type, magnetostrictive type, and ion conductor type is considered. The device is not limited to the above various types of devices.

In addition, although the cover and the liquid crystal module (the laminated display panel and the backlight) are typical examples of the workpiece to be bonded, any one of the objects to be formed by the pair of objects may be processed. The workpiece can be applied. For example, semiconductor wafers, optical discs, and the like can also be applied. The type of adhesive or double-sided tape can also be freely selected.

1. . . Turntable

2. . . Holding device

3. . . Mounting department

4. . . Holding department

5. . . Pressing device

6. . . Control device

51. . . Vacuum chamber

51a. . . Hollow part

52. . . Pressurizing head

53. . . Lifting mechanism

53a. . . Drive source

53b. . . Ball screw

53c. . . Slide

53d. . . Guide

54. . . Drive department

54a. . . Drive rod

55. . . Decompression pump

56A, 56B. . . Auxiliary component

57, 58. . . Sensor

61. . . Chamber control

62. . . Decompression control department

63. . . Press control unit

64. . . Interval determination unit

65. . . Memory department

66. . . Change determination unit

67. . . Drive amount determination unit

68. . . Input and output interface

Fig. 1 is a schematic plan view showing the overall configuration of one embodiment of the present invention.

Fig. 2 is a perspective view showing the holding device in the embodiment of Fig. 1.

Fig. 3 is a longitudinal sectional view showing a state in which the vacuum chamber of the pressing device is raised in the embodiment of Fig. 1;

Fig. 4 is a longitudinal sectional view showing a state in which the vacuum chamber of the pressing device of Fig. 3 is lowered.

Fig. 5 is a longitudinal sectional view showing a state in which the vacuum chamber of the pressing device of Fig. 3 is decompressed.

Fig. 6 is a longitudinal sectional view showing the pressing head of the pressing device of Fig. 3 when it is lowered.

Fig. 7 is a longitudinal sectional view showing the vacuum chamber of the pressing device of Fig. 3 when the atmosphere is opened.

Fig. 8 is a functional block diagram showing a control device according to an embodiment of Fig. 1.

Fig. 9 is a longitudinal sectional view showing a pressing device according to another embodiment of the present invention.

Fig. 10 is a longitudinal sectional view showing a pressing device according to another embodiment of the present invention.

Fig. 11 is a longitudinal sectional view showing a pressing device according to another embodiment of the present invention.

1. . . Turntable

3. . . Mounting department

4. . . Holding department

5. . . Pressing device

51. . . Vacuum chamber

52. . . Pressurizing head

53. . . Lifting mechanism

53a. . . Drive source

53b. . . Ball screw

53c. . . Slide

53d. . . Guide

54. . . Drive department

54a. . . Drive rod

56A, 56B. . . Auxiliary component

57. . . Sensor

T. . . Sticker

S1, S2. . . Workpiece

Claims (6)

A laminating device is a laminating device for bonding a pair of workpieces, comprising: a pressing head that pushes at least one of the workpieces; and a vacuum chamber that is used for a space for sealing a pair of workpieces by the pressing head; and a pressure reducing device connected to the vacuum chamber and performing vacuum suction on the inside thereof; and a driving portion which is vacuumed by the vacuum The chamber is supported by the chamber and applies pressure to the pressing head; and the determining unit is configured to directly or indirectly determine that during the vacuum chamber, the pressure is reduced until the atmosphere is opened before the pressure is reduced. a change in the pressing force of the pressing head to the other of the pair of workpieces; and a control unit that controls the pressing force of the driving unit based on the determination by the determining unit. The bonding apparatus according to claim 1, wherein the detecting unit is configured to detect a pressure applied to the other of the pair of workpieces by the pressing head for determining the determining unit. The bonding apparatus according to claim 1, wherein the detecting unit has a detecting unit for detecting a position of the pressing head against another of the pair of workpieces in order to determine the determining unit. The bonding apparatus according to claim 3, further comprising: a supporting portion for supporting the other of the pair of workpieces, wherein the detecting portion has a function for detecting between the supporting portion and the driving portion Interval sensor. The bonding apparatus of claim 3, further comprising: a support portion for supporting the other of the pair of workpieces, wherein the detecting portion has: for detecting between the support portion and the pressing head The sensor of the interval. A bonding method is a bonding method for bonding a pair of workpieces by pushing a pressing head of at least one of the workpieces in a vacuum chamber, wherein the determining portion directly or indirectly determines that: in the vacuum chamber The control unit controls the pressing force of the driving unit based on the determination by the determining unit during the period from the decompression to the time when the atmosphere is opened, and the pressing force of the pressing head to the other of the pair of workpieces is changed. The driving portion is for driving a pressing head supported by the vacuum chamber.